A cutting tool and machining method for thin-walled holes in ceramic nozzles

Abstract

This invention discloses a tool and method for machining thin-walled holes in ceramic nozzles, aiming to solve the problem of notches and peeling caused by grinding and extrusion of thin-walled mesh holes in ceramic nozzles. The tool includes a tool body with a tool head mounted on it, and a side groove on the side wall of the tool head. Using this tool, several thin-walled mesh holes are machined on the end face of the nozzle blank. A fixture is used to load the nozzle blank, and polishing particles are sprayed onto the end face of the nozzle blank with the thin-walled mesh holes by rotating a polishing turntable, removing the chipped edges and notches of the thin-walled mesh holes. Visual inspection at 200x magnification using a Keyence microscope shows no notches or peeling. This method effectively solves the problem of notches and peeling caused by grinding and extrusion of thin-walled mesh holes in ceramic nozzle products.

Description

Technical Field

[0001] This invention relates to the field of ceramic product processing technology, and more specifically, to a cutting tool and processing method for machining thin-walled holes in ceramic nozzles. Background Technology

[0002] In recent years, with the further development of the semiconductor industry, alumina ceramic parts for various applications have been developed. Currently, we process an alumina ceramic nozzle used in 14nm deposition equipment. Plasma gas enters through eight deep holes at the bottom of the alumina ceramic nozzle and then exits through 19 mesh holes on the end face and eight oblique holes on the side, etching the wafer within the cavity. Therefore, the surface condition of the holes is critical. The 19 0.22mm thin hole walls must be free of cracks, and the hole openings must be visually inspected at 200x magnification using a Keyence microscope to ensure no gaps or peeling. However, since the ceramic material is processed by grinding, the use of spiral grinding and twist drilling during the process can cause small peeling and gaps at the 0.22mm thick hole openings due to pressure. Therefore, controlling the gaps generated during processing is extremely difficult. Summary of the Invention

[0003] To overcome the above shortcomings, the present invention provides a tool and method for machining thin-walled holes in ceramic nozzles, which can effectively solve the problem of gaps and peeling caused by grinding and extrusion of thin-walled mesh holes on products.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: a tool for machining thin-walled holes in ceramic nozzles, comprising a tool body, a tool head disposed on the tool body, and a side groove provided on the side wall of the tool head.

[0005] The side grooves on the sidewall of the cutter head can effectively increase the cutting force and facilitate the inflow of coolant, effectively reducing the generation of chipping notches and keeping the notch size below 0.1mm, thus significantly reducing the number of notches.

[0006] Preferably, a metal bonding layer is provided on the outer wall of the cutter head.

[0007] The metal bond layer, compared to the electrobonded bond of twist drills, has a certain degree of toughness, provides a buffering effect during machining, and improves the machining performance and stability of the tool.

[0008] Preferably, the cutter head has a cylindrical structure.

[0009] The cylindrical cutter head is convenient for processing thin-walled mesh.

[0010] A method for machining thin-walled holes in a ceramic nozzle includes the following steps:

[0011] S1, Nozzle blank forming;

[0012] S2, using a ceramic nozzle thin-walled hole machining tool to machine several thin-walled mesh holes on the end face of the nozzle blank;

[0013] S3, Load the drilled nozzle blank onto the fixture;

[0014] S4, install the fixture onto the polishing turntable, and attach the end face of the nozzle blank with thin-walled mesh to the surface of the polishing turntable.

[0015] S5, while rotating the polishing turntable, polishing particles are sprayed between the nozzle blank end face and the surface of the polishing turntable. The polishing turntable and the nozzle blank move relative to each other to achieve grinding and polishing of the nozzle blank end face.

[0016] S6. After the nozzle blank is ground and polished, remove the nozzle blank from the fixture.

[0017] Specialized cutting tools are used to process thin-walled mesh holes. These tools possess a certain degree of toughness, providing a buffering effect during processing and improving machining performance and stability. Side grooves on the tool tip effectively increase cutting force and facilitate coolant inflow, significantly reducing edge chipping and notch formation, keeping notch size below 0.1mm and reducing the number of notches. A fixture is used to mount the nozzle blank, facilitating grinding and polishing. The end faces of the nozzle blank with thin-walled mesh holes are polished by spraying 3μm diamond polishing particles after a polishing turntable rotates, removing edge chipping and notches. Visual inspection at 200x magnification using a Keyence microscope shows no notches or peeling. This method effectively solves the problem of notches and peeling caused by grinding and extrusion in thin-walled mesh holes on ceramic nozzles.

[0018] Preferably, in S1, the ceramic powder is processed into a nozzle structure to closely approximate the actual size of the product, and then sintered to obtain a nozzle blank.

[0019] The nozzle blank is easy to process.

[0020] Preferably, the fixture is provided with several clamping holes that are compatible with the nozzle blank, and the nozzle blank is installed in accordance with the clamping holes on the fixture during S3.

[0021] The nozzle blank is fitted with the clamping holes on the fixture, ensuring stable and reliable installation. The fixture has several assembly holes, enabling batch grinding and polishing of the nozzle blanks, which improves work efficiency.

[0022] Preferably, a raised ring is provided on the outer wall of the nozzle blank, and in S3, the raised ring rests on the lower surface of the nozzle blank.

[0023] The raised ring serves a positioning function, ensuring that the nozzle blank end face is reliably attached to the polishing turntable.

[0024] As a preferred option, several ring-shaped raised patterns are provided on the surface of the polishing turntable, and the nozzle blank end face is in contact with the ring-shaped raised patterns during S4.

[0025] The annular convex pattern facilitates the entry of polishing particles between the end face of the nozzle blank and the surface of the polishing turntable, ensuring the grinding and polishing effect.

[0026] Preferably, the fixture is provided with an extrusion platform, and pressure is applied to the extrusion platform during S5 so that the end face of the nozzle blank is reliably supported on the surface of the polishing turntable.

[0027] Pressure is applied to the fixture by the extrusion platform to ensure that the nozzle blank end face is reliably attached to the polishing turntable, thus ensuring the grinding and polishing effect.

[0028] Preferably, a rack and guide bar are installed above the turntable, and a gear ring is set on the outer wall of the fixture. The gear ring meshes with the rack. A pressure seat is rotatably connected to the fixture. A positioning sleeve is fitted on the pressure seat. A preload spring is installed between the positioning sleeve and the pressure seat. A guide block is set at the upper end of the positioning sleeve. A guide groove is set on the guide bar. A top pressure surface is set on the top surface of the guide groove. The top pressure surface includes an upward inclined section and a downward inclined section. The guide block is fitted and installed in the guide groove. The guide block rests on the top pressure surface. A piston cylinder is installed on the guide bar. The piston cylinder telescopic rod is connected to the positioning sleeve. In S5, the piston cylinder works to push the guide block to move along the guide groove, causing the fixture to rotate. The guide block moves along the trajectory of the top pressure surface, changing the preload force of the preload spring.

[0029] The piston cylinder powers the movement of the fixture, which moves in the opposite direction to the rotation of the polishing turntable. During movement, the gear ring and rack mesh, allowing the fixture to rotate simultaneously. Furthermore, the guide block moves along the trajectory of the pressure surface, altering the preload of the preload spring. As the guide block passes the downward tilting section, the preload gradually increases, increasing the pressure on the nozzle body within the fixture; conversely, as the guide block passes the upward tilting section, the preload gradually decreases, reducing the pressure on the nozzle body. This design prevents excessive pressure from damaging the nozzle blank surface and avoids insufficient pressure from affecting the grinding and polishing effect. In S5, the nozzle blank itself moves and rotates with the fixture, and the changing pressure further enhances the grinding and polishing effect.

[0030] Compared with the prior art, the beneficial effects of the present invention are: the processing tool and processing method for thin-walled holes in ceramic nozzles of the present invention can effectively solve the problem of gaps and peeling caused by grinding and extrusion of thin-walled mesh holes in ceramic nozzle products. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the machining tool of the present invention;

[0032] Figure 2 This is a schematic diagram of the nozzle blank of the present invention mounted on the fixture;

[0033] Figure 3 This is a schematic diagram of the nozzle blank of the present invention being ground and polished;

[0034] Figure 4 This is a partial top view of the nozzle blank being ground and polished according to Embodiment 2 of the present invention;

[0035] Figure 5 This is a schematic diagram of the connection structure of the fixture in Embodiment 2 of the present invention;

[0036] In the diagram: 1. Tool body, 2. Tool holder, 3. Tool head, 4. Side groove, 5. Nozzle blank, 6. Thin-walled mesh, 7. Fixture, 8. Clamping hole, 9. Convex ring, 10. Polishing turntable, 11. Extrusion platform, 12. Annular convex pattern, 13. Positioning seat, 14. Roller, 15. Rack, 16. Guide bar, 17. Gear ring, 18. Pressure seat, 19. Mounting hole, 20. Bearing, 21. Limiting ring, 22. Positioning ring, 23. Positioning sleeve, 24. Preload spring, 25. Limiting pin, 26. Guide block, 27. Guide groove, 28. Upward tilting section, 29. Downward tilting section, 30. Lower translation section, 31. Upper translation section, 32. Ball bearing, 33. Piston cylinder, 34. Collar, 35. Limiting groove. Detailed Implementation

[0037] The technical solution of the present invention will be further described in detail below through specific embodiments and with reference to the accompanying drawings:

[0038] Example 1: A cutting tool for machining thin-walled holes in ceramic nozzles (see attached document) Figure 1 The tool includes a cutter body 1, a cutter shank 2 connected to the cutter body, and a cutter head 3 mounted on the cutter body. The cutter head is located at one end of the cutter body, and a side groove 4 is provided on the side wall of the cutter head, extending to both ends of the cutter body. A metal bonding layer is provided on the outer wall of the cutter head. The cutter head has a cylindrical structure. The side groove on the side wall of the cutter head can effectively increase the cutting force and facilitate the inflow of coolant, effectively reducing the generation of chipping notches, controlling the notch size to below 0.1mm, and significantly reducing the number of notches.

[0039] A method for machining thin-walled holes in ceramic nozzles (see appendix) Figure 2 Appendix Figure 3 ), including the following steps:

[0040] S1, Nozzle blank forming; Ceramic powder is processed into the nozzle structure pattern, then roughed to make it close to the actual size of the product, and then sintered to obtain nozzle blank 5;

[0041] S2, using a ceramic nozzle thin-walled hole machining tool to machine several thin-walled mesh holes 6 on the end face of the nozzle blank;

[0042] S3, the drilled nozzle blank is loaded onto the fixture 7; the fixture is provided with a number of clamping holes 8 that are adapted to the nozzle blank, and the nozzle blank is installed in accordance with the clamping holes on the fixture. In this embodiment, 8 clamping holes are evenly distributed, and 8 nozzle blanks can be loaded on the fixture at one time; a convex ring 9 is provided on the outer wall of the nozzle blank, and the convex ring rests on the lower surface of the nozzle blank.

[0043] S4. The fixture is installed on the polishing turntable 10, and the end face of the nozzle blank with thin-walled mesh is attached to the surface of the polishing turntable. An extrusion platform 11 is set on the fixture and is located at the center of the fixture. Pressure is applied to the extrusion platform to reliably support the end face of the nozzle blank on the surface of the polishing turntable. Several annular ridges 12 are set on the surface of the polishing turntable. The annular ridges are arranged radially at intervals and all annular ridges are arranged concentrically. The end face of the nozzle blank is attached to the annular ridges. A positioning seat 13 is set on the edge of the polishing turntable. Two rollers 14 are installed on the positioning seat and the edge of the fixture is attached to the outer wall of the two rollers for positioning.

[0044] S5, while rotating the polishing turntable, 3μm diamond polishing particles are sprayed between the nozzle blank end face and the surface of the polishing turntable. The polishing turntable and the nozzle blank move relative to each other to achieve grinding and polishing of the nozzle blank end face.

[0045] S6. After the nozzle blank is ground and polished, remove the nozzle blank from the fixture.

[0046] Specialized cutting tools are used to process thin-walled mesh holes. These tools possess a certain degree of toughness, providing a buffering effect during processing and improving machining performance and stability. Side grooves on the tool tip effectively increase cutting force and facilitate coolant inflow, significantly reducing edge chipping and notch formation, keeping notch size below 0.1mm and reducing the number of notches. A fixture is used to mount the nozzle blank, facilitating grinding and polishing. The end faces of the nozzle blank with thin-walled mesh holes are polished by spraying 3μm diamond polishing particles after a polishing turntable rotates, removing edge chipping and notches. Visual inspection at 200x magnification using a Keyence microscope shows no notches or peeling. This method effectively solves the problem of notches and peeling caused by grinding and extrusion in thin-walled mesh holes on ceramic nozzles.

[0047] Example 2: A method for processing thin-walled holes in a ceramic nozzle (see appendix) Figure 4 Appendix Figure 5The steps are similar to those in Example 1, with the main difference being that in this example, a rack 15 and a guide bar 16 are installed above the turntable, a gear ring 17 is provided on the outer wall of the fixture, the gear ring meshes with the rack, a pressure seat 18 is rotatably connected to the fixture, a mounting hole 19 is provided on the upper surface of the fixture, a bearing 20 is installed between the outer wall of the pressure seat and the inner wall of the mounting hole, a stepped surface is provided on the pressure seat, a limiting ring 21 is connected to the pressure seat, the upper end of the bearing inner ring abuts against the stepped surface, and the lower end of the bearing inner ring abuts against the limiting ring. A stepped surface is provided at the opening end of the mounting hole, the lower end of the bearing outer ring is supported on the stepped surface, and a positioning ring 22 is fastened to the fixture, the positioning ring abuts against the upper end of the bearing outer ring.

[0048] A positioning sleeve 23 is fitted onto the pressure seat. The positioning sleeve and the pressure seat can move relative to each other but cannot rotate relative to each other. A pre-tension spring 24 is installed between the positioning sleeve and the pressure seat. A vertically arranged limiting groove 35 is provided on the outer wall of the pressure seat. A limiting pin 25 is connected to the positioning sleeve. The end of the limiting pin is placed in the limiting groove to prevent the positioning sleeve and the pressure seat from separating.

[0049] A guide block 26 is provided at the upper end of the positioning sleeve, and a guide groove 27 is provided on the guide bar. A pressing surface is provided on the top surface of the guide groove. The pressing surface includes an upward tilting section 28 and a downward tilting section 29. The pressing surface also includes a lower translation section 30 and an upper translation section 31. The lower translation section is placed between the upward tilting section and the downward tilting section, and the upper translation section is connected to the upper end of the upward tilting section. The guide block is fitted and installed in the guide groove. The guide block cannot rotate in the guide groove. A ball bearing 32 is provided at the upper end of the guide block. The ball bearing on the guide block presses against the pressing surface. A piston cylinder 33 is installed on the guide bar. The piston cylinder telescopic rod is connected to the positioning sleeve. A movable collar 34 is fitted on the positioning sleeve. A connecting rod connects the collar and the piston cylinder telescopic rod.

[0050] When S5 is activated, the piston cylinder pushes the guide block to move along the guide groove, causing the fixture to rotate. The guide block moves along the trajectory of the top pressure surface, changing the preload of the preload spring.

[0051] The piston cylinder powers the movement of the fixture, which moves in the opposite direction to the rotation of the polishing turntable. During movement, the gear ring and rack mesh, allowing the fixture to rotate simultaneously. Furthermore, the guide block moves along the trajectory of the pressure surface, altering the preload of the preload spring. As the guide block passes the downward tilting section, the preload gradually increases, increasing the pressure on the nozzle body of the fixture. Conversely, as the guide block passes the upward tilting section, the preload gradually decreases, reducing the pressure on the nozzle body of the fixture. This prevents excessive pressure from damaging the nozzle blank surface and avoids insufficient pressure from affecting the grinding and polishing effect. In step S5, the nozzle blank itself moves and rotates with the fixture, and the changing pressure adjustment improves the grinding and polishing effect. Other steps are the same as in Example 1.

[0052] The embodiments described above are merely preferred embodiments of the present invention and are not intended to limit the present invention in any way. Other variations and modifications may be made without departing from the technical solutions described in the claims.

Claims

1. A method for processing thin-walled holes in a ceramic nozzle, characterized in that, Includes the following steps: S1, Nozzle blank forming; S2, using a ceramic nozzle thin-walled hole machining tool to machine several thin-walled mesh holes on the end face of the nozzle blank; the tool includes a tool body, a tool head is provided on the tool body, and a side groove is provided on the side wall of the tool head; S3, Load the drilled nozzle blank onto the fixture; S4, install the fixture onto the polishing turntable, and attach the end face of the nozzle blank with thin-walled mesh to the surface of the polishing turntable. S5, while rotating the polishing turntable, polishing particles are sprayed between the nozzle blank end face and the surface of the polishing turntable. The polishing turntable and the nozzle blank move relative to each other to achieve grinding and polishing of the nozzle blank end face. A rack and guide bar are installed above the turntable. A gear ring is set on the outer wall of the fixture, and the gear ring meshes with the rack. A pressure seat is rotatably connected to the fixture. A positioning sleeve is fitted on the pressure seat. A preload spring is installed between the positioning sleeve and the pressure seat. A guide block is set at the upper end of the positioning sleeve. A guide groove is set on the guide bar. A top pressure surface is set on the top surface of the guide groove. The top pressure surface includes an upward inclined section and a downward inclined section. The guide block is fitted and installed in the guide groove. The guide block rests on the top pressure surface. A piston cylinder is installed on the guide bar. The piston cylinder telescopic rod is connected to the positioning sleeve. In S5, the piston cylinder works to push the guide block to move along the guide groove, causing the fixture to rotate. The guide block moves along the trajectory of the top pressure surface, changing the preload force of the preload spring.

2. The method for processing thin-walled holes in ceramic nozzles according to claim 1, characterized in that, A metal bonding layer is provided on the outer wall of the cutter head.

3. The method for processing thin-walled holes in ceramic nozzles according to claim 1, characterized in that, The cutter head has a cylindrical structure.

4. The method for processing thin-walled holes in ceramic nozzles according to claim 1, characterized in that, In S1, ceramic powder is processed into a nozzle structure to closely approximate the actual size of the product, and then sintered to obtain a nozzle blank.

5. The method for processing thin-walled holes in ceramic nozzles according to claim 1, characterized in that, The fixture is provided with several clamping holes that are compatible with the nozzle blank. In S3, the nozzle blank is installed by fitting the clamping holes on the fixture.

6. The method for processing thin-walled holes in a ceramic nozzle according to claim 5, characterized in that, A raised ring is provided on the outer wall of the nozzle blank. In S3, the raised ring rests on the lower surface of the nozzle blank.

7. The method for processing thin-walled holes in ceramic nozzles according to claim 1, characterized in that several ring-shaped raised patterns are provided on the surface of the polishing turntable, and the end face of the nozzle blank is in contact with the ring-shaped raised patterns during S4.

8. The method for processing thin-walled holes in a ceramic nozzle according to any one of claims 1 to 7, characterized in that, An extrusion platform is set on the fixture. During S5, pressure is applied to the extrusion platform to reliably support the nozzle blank end face on the surface of the polishing turntable.

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