A design method for an integrated gas module and its rotary multi-way valve

Abstract

This invention discloses an integrated gas module and its design method for a rotary multi-way valve, including a main flow channel, multiple rotary multi-way valves located upstream and downstream of the main flow channel, multiple single-way valves, and a flow control module. The main flow channel, rotary multi-way valves, single-way valves, and flow control module are tightly fitted and interconnected. The rotary multi-way valve includes a rotor, a stator, and a drive unit. In this invention, by providing through holes on the stator and rotor within the rotary multi-way valve to form different switching channels, a single rotary multi-way valve can be equivalent to multiple single-way valves, greatly reducing the valve arrangement. The tight fit and interconnection of the main flow channel, rotary multi-way valves, single-way valves, and flow control module reduces the space occupied by the original connecting pipelines. Furthermore, the arrangement of multiple rotary multi-way valves and single-way valves allows for different switching channel combinations based on valve position logic between valve groups, reducing the installation size of the gas module and saving installation space.

Description

Technical Field

[0001] This invention relates to the field of exhaust gas treatment equipment technology, and more specifically to an integrated gas module. Background Technology

[0002] The gas handling system can filter, exhaust, extract, measure and control gas flow rate and exhaust pressure, and detect gas composition.

[0003] Most existing gas pipeline systems are controlled by single-point valves. Conventional valves only have two working modes: opening and closing of a single channel. When using such valves for complex systems, there are usually many valves and complex pipelines, and many control points. Pre-use testing and troubleshooting are time-consuming and labor-intensive. Therefore, the design of integrated valve groups can effectively overcome these problems. However, integrated valve groups are currently rare, and the focus is mainly on the design of 3-way valves in integration. There is less research on valves with one inlet channel and multiple outlet channels.

[0004] Existing patent publication number WO2005113950A2 discloses a wall-flow particulate trap system that regenerates through a reverse pressure drop on the porous wall of multiple tubular channels by filtering exhaust gas, with the pressure drop and duration sufficient to discharge collected soot and ash. The system includes a particulate collector having an inlet and an outlet; a mode valve assembly offset from the inlet of the particulate collector; a remotely driven safety valve offset from the outlet of at least one particulate collector; a pipe rotor located between the particulate collector and the mode valve assembly, the pipe rotor having a first end and a second end, the second end of the pipe rotor being in operative communication with the mode valve assembly, and the first end of the pipe rotor being in fluid communication with the inlet of the particulate collector; and a rotor driver operatively connected to said pipe rotor.

[0005] After the entire filtration and exhaust system is integrated, it needs to be installed in a limited space. Due to the complexity of its connecting pipelines and the large number of valves required, directly applying existing valve assemblies results in a large footprint, failing to meet integration requirements. Therefore, reducing the space occupied by the entire pipeline and control valves while fitting them within a limited space is a pressing technical problem. Furthermore, in existing technologies, multi-point valve assembly systems have complex electrical connections and dense connection points. Multiple interconnected links are prone to leaks, leading to a large workload for troubleshooting and numerous safety hazards. Current multi-way valve structures are insufficient for integrated control of more than three channels. It is necessary to research new valve block structures that integrate the functions of multiple single-point valves into a single multi-way valve, achieving physical integration of multiple functional valve blocks. The design of high-sealing multi-way valves mainly involves two core issues: first, what structure should be used to achieve integrated control of the opening and closing of multiple flow channels; and second, based on this structure, how to calculate structural parameters and verify sealing performance to achieve engineering applications of the high-sealing multi-way valve. Summary of the Invention

[0006] The technical problem to be solved by this invention is how to achieve system miniaturization, reduce installation size, and save installation space.

[0007] This invention solves the above-mentioned technical problems through the following technical means: an integrated gas module, characterized in that it includes a main channel, multiple rotary multi-way valves and multiple rotary single-way valves located upstream and downstream of the main channel, and a flow control module. The main channel, rotary multi-way valves, rotary single-way valves, and flow control module are closely fitted and interconnected. The rotary multi-way valve includes a rotor, a stator, and a drive unit. The rotor is rotatably disposed within the rotary multi-way valve and is drivenly connected to the output end of the drive unit. The stator is fixedly disposed within the rotary multi-way valve and rotates in cooperation with the rotor. The stator has an input port and multiple or a single output port, which respectively form multiple switching channels. The rotor input end is always connected to the input port of the stator. The rotor has multiple notches circumferentially arranged to match the output ports. The drive unit drives the notches to move relative to the matched output ports between aligned and misaligned states, thereby causing the corresponding switching channels to be opened or closed.

[0008] By creating through holes in the stator and rotor of the rotary multi-way valve to form different switching channels, a single rotary multi-way valve can be equivalent to multiple single-way valves, greatly reducing the valve layout. The main flow channel, rotary multi-way valve, single-way valve, and flow control module are tightly integrated and interconnected, reducing the space occupied by the original connecting pipelines. At the same time, the arrangement of multiple rotary multi-way valves and single-way valves can achieve different switching channel combinations according to the valve position logic between valve groups, reducing the installation size of the gas module and saving installation space.

[0009] As a preferred technical solution, the flow control module includes a flow controller, the rotor includes a valve stem, the valve stem has multiple openings circumferentially distributed in a spiral pattern along the circumference of the valve stem, and the drive unit drives the valve stem to rotate around its axis to open and close the corresponding switching channel.

[0010] As a preferred technical solution, the main channel includes an airway plate, which has a sealed cavity structure. The airway plate has a first airway, a second airway, a third airway, a fourth airway, and a fifth airway that penetrate the cavity. The airway plate is connected to an external input pipeline through the input end of the first airway. The airway plate is connected to a rotary single-way valve through the second and third airways. The airway plate is connected to a rotary multi-way valve through the fourth and fifth airways.

[0011] As a preferred technical solution, the rotary multi-way valve includes a second valve group, a fifth valve group, a sixth valve group, and a seventh valve group; the single-way valve includes a first valve group, a third valve group, and a fourth valve group; the air passage plate is connected to the first valve group via a first air passage; the air passage plate is connected to an external input pipeline via the first valve group; the air passage plate is connected to the second valve group via a fourth air passage; the air passage plate is connected to the third valve group via a second air passage; the air passage plate is connected to the fourth valve group via a third air passage; the air passage plate is connected to the input end of the fifth valve group via a fifth air passage; the output ends of the third and fourth valve groups are connected to an external pipeline; the output end of the fifth valve group is connected to the input end of the flow control module; and the output end of the flow control module is connected to the seventh valve group via the sixth valve group.

[0012] As a preferred technical solution, the flow control module includes a flow controller, which has an input adapter and an output adapter. The input adapter and the output adapter of the flow controller are respectively connected to adjacent control valves through sealing connectors. The flow controller is fixedly mounted on the sealing connector, and the ends of the flow controller connected to the sealing connector and the control valves are all planar seals.

[0013] As a preferred technical solution, the sealing connector is an L-shaped adapter plate. Both L-shaped adapter plates are installed at the bottom of the flow controller and are symmetrically distributed about the axis of the flow controller. The L-shaped adapter plate includes a vertical section and a horizontal section. The end of the vertical section facing the flow controller is sealed and fixed to the adapter of the flow controller, and the end of the vertical section away from the flow controller is sealed and fixed to the control valve.

[0014] As a preferred technical solution, the stator includes a rod sleeve, on which multiple through holes are formed, and the multiple through holes are adapted to the opening on the valve stem.

[0015] As a preferred technical solution, the second valve group includes a second valve group housing, a second valve stem, and a second rod sleeve. The second valve stem is rotatably connected inside the second valve group housing, and the second rod sleeve is fixedly connected inside the second valve group housing and rotatably engages with the second valve stem. The second valve stem has multiple second through holes, and the second rod sleeve has a first input channel, a first output channel, a second output channel, and a third output channel. The first input channel is connected to the output end of the first valve group through a fourth air passage. The first output channel, the second output channel, and the third output channel are all connected to external pipelines. The diameters of the multiple second through holes are respectively adapted to the cross-sections of the first input channel, the first output channel, the second output channel, and the third output channel. The first input channel communicates with the inner cavity of the second valve stem through an annular air chamber.

[0016] As a preferred technical solution, the first valve group includes a first valve group housing, a first valve stem, a first rod sleeve, a first connecting channel, and a second connecting channel. The first valve stem is rotatably connected inside the first valve group housing, and the first rod sleeve is fixedly connected inside the first valve group housing and rotatably engages with the first valve stem. A coaxial and discontinuous first connecting channel and a second connecting channel are provided at the center of the first valve group housing. Two first through holes are provided on the first valve stem, and the two first through holes form a passage through the valve stem. A through hole is provided on the first rod sleeve that matches the cross-sectional port of the first connecting channel and the second connecting channel.

[0017] As a preferred technical solution, the flow controller is provided in two sets arranged side by side.

[0018] A design method for a rotary multi-way valve in an integrated gas module includes the following steps:

[0019] S1: Design the structure of a cylindrical rotary multi-way valve and determine its working mode;

[0020] S2: Design the orifice and stem of the cylindrical rotary multi-way valve according to functional and sealing requirements;

[0021] S3: Analyze the flow resistance characteristics of the cylindrical rotary multi-way valve to determine the location of the through hole;

[0022] S4: Calculate the leakage rate of the cylindrical rotary multi-way valve to ensure high sealing performance;

[0023] Step S1 includes the following steps:

[0024] S11: Determine the main structural components of the cylindrical rotary multi-way valve, including the valve stem, the stem sleeve, the first and second air outlet holes on the valve stem, and the air guide hole on the stem sleeve.

[0025] S12: Determine the sealing method of the cylindrical rotary multi-way valve;

[0026] S13: Determine the operating mode of the cylindrical rotary multi-way valve;

[0027] S2 includes the following steps:

[0028] S21: Determine the included angle between adjacent air outlets; Let the center of the multi-way valve core shaft (i.e., valve stem) be O, the outer diameter be D, and the diameter of the internal air passage of the valve stem be d. Design air outlets at different angles relative to the center O at different heights of the valve stem, with the air outlet diameter being r.

[0029] S22: Establish a critical cutoff state model; when the first vent is completely opposite to the guide hole, the gas flows out from the first valve stem vent. At this time, the left and right boundaries of the first vent and the guide hole are a1 and b1, the left and right boundaries of the second vent are a2 and b2, and the angle between the vent boundary and the center O is θ, with a size of arcsin(r / d).

[0030] During the switching process, the critical cutoff state is when the first vent is just closed and the second vent is about to form a gap with the air guide hole, and gas will flow out from the second vent. Establish a geometric model of the critical cutoff state. Rotate the valve stem counterclockwise. The left boundary a1' of the first vent intersects the right boundary b1 of the air guide hole on a line. The right boundary b2' of the second vent intersects the left boundary a1 of the air guide hole on a line. At this time, the first vent and the air guide hole, and the second vent and the air guide hole are both in a linear closed state. The angle between the vent boundary and the center O is the critical cutoff angle β.

[0031] To ensure the dynamic shut-off of the valve, the first and second vents cannot be open simultaneously, i.e., θ≤β, resulting in:

[0032] θ=arcsin(r / d)≤β,r / d≤sin(β) (1)

[0033] S23: Determine the minimum inner diameter of the pipeline through which the gas flows and use this to determine the pipeline conductance, thereby determining the pressure relief flow rate; during the pressure relief process, calculate the minimum inner diameter of the pipeline based on the pressure difference across the pipeline and the gas flow rate.

[0034] The flow conductance formula for air at 20℃ in a long pipe with a circular cross-section (L>20φ) is:

[0035]

[0036] In equation (2): C20℃ is the flow conductance of the long pipe to air at 20℃; φ is the minimum diameter of the pipe; L is the length of the pipe; The average pressure in the pipeline; p1 and p2 are the gas pressures at both ends of the pipe, respectively;

[0037] As can be seen from the definition of flow rate, the pipeline flow rate is...

[0038] Q = C 20℃ ×Δp (3)

[0039] In equation (3), Q is the gas mass flow rate; ΔP is the pressure difference across the pipeline; substituting equation (3) into equation (2) yields...

[0040]

[0041]

[0042] The value of ΔP is calculated based on the pressure difference before and after the pipeline. The pressure p2 at the end of the pipeline is atmospheric pressure, and the pressure p1 at the front end of the pipeline is ΔP+101kPa. Substitute the known parameters into formula (5), and take the value of Q as the minimum acceptable flow rate to calculate the minimum inner diameter φ of the pipeline.

[0043] Therefore, for ease of processing, the inlet and outlet diameters r of the multi-way valve are designed to be integer values ​​upwards of φ, and the valve stem inner diameter must satisfy Formula 1.

[0044] S3 includes the following steps:

[0045] S31: Establish a valve pipeline flow resistance model; when fluid passes through the valve, its fluid resistance loss is represented by the fluid pressure drop ΔP before and after the valve, as shown in equation (6);

[0046]

[0047] In equation (6): ΔP is the pressure difference; v is the flow velocity; ρ is the density, and the gas density is set to a predetermined value. Therefore, the flow resistance coefficient is calculated as follows:

[0048]

[0049] S32: Analyze the flow resistance characteristics of the cylindrical rotary multi-way valve to determine the location of the through hole.

[0050] As a preferred technical solution, step S4 includes the following steps:

[0051] S41: Determine the leakage path of the cylindrical valve; the four-position three-way valve includes a first outlet, a second outlet, and a third outlet. When the second outlet is open and the first and third outlets are closed, there are two leakage paths for the third outlet: one is the path l1 between the third outlet and the second outlet, and the other is the path l2 of 1 / 4 of the circumference of the cylindrical cross section between the third outlet and the second outlet.

[0052] S42: Establish a model for calculating the leakage rate of a cylindrical valve; based on the leakage rate calculation formula...

[0053]

[0054] In equation (8), Q L Leakage rate; l is the path length between the through hole and the sealing hole; η is the aerodynamic viscosity, 1.81 × 10⁻⁶. -5 Pa·s; p1 is the high-pressure port pressure, which is atmospheric pressure during leak detection, p1=101325Pa; p2 is the low-pressure port pressure, which is a vacuum state during leak detection, so p2=0Pa; The average pressure; rf Let be the size of the leakage gap, a value to be determined. With the second outlet open and the first and third outlets closed, the total leakage for the third outlet is the sum of the leakage along the two paths.

[0055]

[0056] In the formula

[0057] S43: Determine the minimum leakage gap; calculate l based on l1 and l2 according to the valve's required leakage rate. 总 The leakage gap r was calculated. f :

[0058]

[0059] The advantages of this invention are:

[0060] (1) In this invention, by opening through holes on the stator and rotor inside the rotary multi-way valve and forming different switching channels, a single rotary multi-way valve can be equivalent to multiple single-way valves, which greatly reduces the valve arrangement. The main channel, rotary multi-way valve, single-way valve and flow control module are closely fitted and interconnected, reducing the space occupied by the original connecting pipeline. At the same time, the setting of multiple rotary multi-way valves and single-way valves can realize the combination of different switching channels according to the valve position logic between valve groups, reducing the installation size of the gas module and saving installation space.

[0061] (2) In this invention, by setting up two sets of flow controllers, one is used and one is on standby, which improves the stability of system operation. By setting planar seals on both ends of the sealing connector, the sealing reliability is improved. At the same time, the sealing connector is used to replace the original threaded seal, which reduces the overall size and improves the consistency with the appearance after the module is assembled. Attached Figure Description

[0062] Figure 1 This is a schematic diagram of the overall system provided in an embodiment of the present invention;

[0063] Figure 2 This is a schematic diagram of the internal structure of the gas module housing provided in an embodiment of the present invention;

[0064] Figure 3 This is a schematic diagram of the first valve group structure provided in an embodiment of the present invention;

[0065] Figure 4 This is a schematic diagram of the cross-sectional structure of the first sleeve provided in an embodiment of the present invention;

[0066] Figure 5 This is a schematic diagram of the second valve group structure provided in an embodiment of the present invention;

[0067] Figure 6 This is a schematic diagram of the cross-sectional structure of the valve stem of the second valve group provided in an embodiment of the present invention;

[0068] Figure 7 This is a schematic diagram of the cross-sectional structure of the second sleeve provided in an embodiment of the present invention;

[0069] Figure 8 This is a schematic diagram of the fifth valve group structure provided in an embodiment of the present invention;

[0070] Figure 9 This is a schematic diagram of the cross-sectional structure of the fifth sleeve provided in an embodiment of the present invention;

[0071] Figure 10 A schematic diagram of the fifth valve stem structure provided in an embodiment of the present invention;

[0072] Figure 11 This is a schematic diagram of the airway plate structure provided in an embodiment of the present invention;

[0073] Figure 12 This is a schematic diagram of the internal structure of the exhaust unit provided in an embodiment of the present invention;

[0074] Figure 13 A schematic diagram of the flow controller structure provided in an embodiment of the present invention;

[0075] Figure 14 This is a schematic diagram of the L-shaped adapter plate structure provided in an embodiment of the present invention;

[0076] Figure 15 This is a schematic diagram of the filter unit structure provided in an embodiment of the present invention;

[0077] Figure 16 This is a schematic diagram of the internal structure of the filter unit provided in an embodiment of the present invention;

[0078] Figure 17 This is a schematic diagram of the cross-sectional structure of a multi-stage filter provided in an embodiment of the present invention;

[0079] Figure 18 This is a schematic diagram of the basic valve assembly structure provided in an embodiment of the present invention;

[0080] Figure 19 This is a schematic diagram of the basic valve assembly operating mode provided in an embodiment of the present invention;

[0081] Figure 20 This is a schematic diagram of the valve stem cross-section structure provided in an embodiment of the present invention;

[0082] Figure 21 This is a schematic diagram of the outlet structure of the basic valve assembly provided in an embodiment of the present invention;

[0083] Figure 22This is a schematic diagram of the gas module structure provided in an embodiment of the present invention;

[0084] Figure 23 This is a schematic diagram of the fourth airway structure provided in an embodiment of the present invention;

[0085] Icon labels:

[0086] 1. Filter unit; 11. Filter unit housing; 12. Multi-stage filter; 121. Secondary filter; 1211. Mounting groove; 1212. Docking protrusion; 122. Support plate; 1221. Through hole; 123. Pressure ring; 13. Filter element; 131. First filter element; 132. Second filter element; 133. Third filter element; 2. Exhaust unit; 21. Gas module; 210. Gas module housing; 22. Mass spectrometry detection module; 221. Flow control module; 2211. Flow controller; 2212. L-shaped adapter plate; 222. Gas sampling module; 223. Online detection module; 2231. Detection branch; 2232. Gas detector; 2233. Component detection buffer tank; 23. 24. Air pump unit; 25. Main control module; 26. Valve group module; 2501. First valve group; 25011. First valve group housing; 25012. First valve stem; 25013. First stem sleeve; 25014. First through hole; 25015. First connecting channel; 25016. Second connecting channel; 2502. Second valve group; 25021. Second valve group housing; 25022. Second valve stem; 25023. Second stem sleeve; 250231. First through hole; 250232. Second through hole; 250233. Third through hole; 250234. Fourth through hole; 25024. Second through hole; 25025. First input channel; 25026. First output channel; 25027. Second output channel; 25028, Third output channel; 25029, First annular chamber; 2503, Third valve group; 2504, Fourth valve group; 2505, Fifth valve group; 25051, Fifth valve group housing; 25052, Fifth valve stem; 25053, Fifth stem sleeve; 25054, Second annular chamber; 250531, Fifth through hole; 250532, Sixth through hole; 250533, Seventh through hole; 2506, Sixth valve group; 2507, Seventh valve group; 2508, Reference valve group; 25081, External mounting base; 250811, First air outlet; 250812, Second air outlet; 250813, Third air outlet; 250814, First air inlet 25082, Inner sealing bushing; 250821, Air guide hole; 25083, Upper sealing cover of bearing; 25084, Rotary switching spindle; 250841, First air outlet; 250842, Second air outlet; 25085, Bearing; 25086, Snap ring; 25087, Lower sealing cover; 251, Control valve; 2511, Valve stem; 2512, Opening; 252, Drive motor; 253, Air duct plate; 2531, Air duct; 25311, First air duct; 25312, Second air duct; 25313, Third air duct; 25314, Fourth air duct; 25315, Fifth air duct; 26, Exhaust unit housing; 3, Air storage tank; 4, Nitrogen tank; 5, Pressure sensor. Detailed Implementation

[0087] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0088] Example 1

[0089] See Figure 1 , Figure 10 An integrated filtration and exhaust system with an integrated gas module includes an intake unit, a filter unit 1, an exhaust unit 2, and a gas storage unit connected in sequence. In this embodiment, the gas storage unit is a gas storage tank 3. The exhaust unit 2 includes a gas module 21, a mass spectrometry detection module 22, a vacuum pump group 23, a main control module 24, a valve group module 25, and an exhaust unit housing 26. The gas module 21, the mass spectrometry detection module 22, the vacuum pump group 23, and the main control module 24 are all fixedly connected inside the exhaust unit housing 26. In this embodiment, the four-position three-way valve is the second valve group 2502. The vacuum pump group 23 is fixed at the bottom of the exhaust unit housing 26, and the mass spectrometry detection module 22 is located at the top of the vacuum pump group 23. The intake unit is connected to the gas storage tank 3 in sequence through the mass spectrometry detection module 22 and the gas module 21.

[0090] The gas module 21 includes an interconnected flow control module 221, a gas sampling module 222, multiple rotary multi-way valves, multiple single-way valves, and a main flow channel. The multiple rotary multi-way valves, multiple single-way valves, the flow control module 221, and the gas sampling module 222 are respectively connected upstream and downstream of the main flow channel. The gas sampling module 222 is located at the top of the vacuum pump assembly 23. The flow control module 221 is connected to the gas sampling module 222 and the vacuum pump assembly 23 through different valve assemblies within the valve assembly module 25. The valve assembly module 25 includes multiple switching channels. The control valve 251 has multiple switching channels located within its stem 2511, and all inputs share a common interface. The input ports of the gas sampling module 222 and the vacuum pump group 23 are respectively connected to the switching channels of the control valve 251. The rotary multi-way valve includes a rotor, a stator, and a drive unit. The rotor is rotatably located within the rotary multi-way valve and is connected to the output of the drive unit. The stator is fixed within the rotary multi-way valve and rotates in cooperation with the rotor. The stator has an input port and multiple output ports, which respectively form multiple switching channels.

[0091] It should be noted that the exhaust unit housing 26 is equipped with a nitrogen flushing port, which is connected to an external nitrogen tank 4, enabling flushing of the entire pipeline.

[0092] See Figure 1 , Figure 2 The valve group module 25 is fixedly connected inside the gas module 21. The gas module 21 includes a gas module housing 210. The valve group module 25 includes seven control valves 251, drive motors 252, and gas duct plates 253, hereinafter referred to as the first valve group 2501, the second valve group 2502, the third valve group 2503, the fourth valve group 2504, the fifth valve group 2505, the sixth valve group 2506, and the seventh valve group 2507. Each control valve 251 is connected to a corresponding drive motor 252, and the drive motors 252 are all electrically connected to the main control module 24. They are divided into four types of valve groups, the first being... The Class I valve group is a cylindrical rotary single-way valve, including the first valve group 2501, the third valve group 2503, and the fourth valve group 2504, wherein the first valve group 2501, the third valve group 2503, and the fourth valve group 2504 have the same structure. The Class II valve group is a cylindrical rotary four-position three-way valve, including the second valve group 2502 and the seventh valve group 2507, wherein the second valve group 2502 and the seventh valve group 2507 have the same structure. The Class III valve group is a cylindrical rotary three-position two-way valve, including the fifth valve group 2505. The Class IV valve group is a cylindrical rotary two-position two-way valve, including the sixth valve group 2506.

[0093] See Figure 11 , Figure 23 The top of the gas module housing 210, from left to right, is connected to the first valve group 2501, the gas duct plate 253, and the second valve group 2502. The bottom of the gas module housing 210, from left to right, is fixedly connected to the fourth valve group 2504, the gas duct plate 253, the fifth valve group 2505, the flow control module 221, the sixth valve group 2506, and the seventh valve group 2507. (See reference...) Figure 11The main airway includes an airway plate 253, which has five airways 2531, hereinafter referred to as the first airway 25311, the second airway 25312, the third airway 25313, the fourth airway 25314, and the fifth airway 25315. The first airway 25311 is connected to the output end of the first valve group 2501, and the input end of the first valve group 2501 is connected to an external input pipeline. The airway plate 253 is connected to the input end of the second valve group 2502 through the fourth airway 25314. A third valve group 2503 is also provided between the first valve group 2501 and the fourth valve group 2504. Plate 253 is connected to the input end of the third valve group 2503 through the second air passage 25312. The air passage plate 253 is connected to the pressure sensor 7. The air passage plate 253 is connected to the input end of the fourth valve group 2504 through the third air passage 25313. The output end of the fourth valve group 2504 is connected to another external pipeline. The air passage plate 253 is connected to the input end of the fifth valve group 2505 through the fifth air passage 25315. The output end of the fifth valve group 2505 is connected to the input end of the flow control module 221. The output end of the flow control module 221 is connected to the seventh valve group 2507 through the sixth valve group 2506.

[0094] See Figures 3-10 Each control valve 251 is equipped with a corresponding drive motor 252. The drive motor 252 is connected to the valve stem 2511 of the control valve 251. The valve stem 2511 has multiple openings 2512 around its circumference, and the multiple openings 2512 are spirally distributed around the valve stem 2511. The valve stem 2511 is connected to the drive motor 252 of the valve group module 25. The drive motor 252 drives the valve stem 2511 to rotate around its axis to open and close the corresponding switching channel.

[0095] See Figure 3 , Figure 4The first valve assembly 2501 is a single-way valve, performing only opening and closing functions. The first valve assembly 2501 includes a first valve assembly housing 25011, a first valve stem 25012, a first stem sleeve 25013, a first through hole 25014, a first connecting channel 25015, and a second connecting channel 25016. A coaxial but discontinuous first connecting channel 25015 and second connecting channel 25016 are formed at the center of the first valve assembly housing 25011. Two first through holes 25014 are formed on the first valve stem 25012, creating a passageway through the valve stem 2511. The first stem sleeve 25013 is fixedly connected within the first valve assembly housing 25011 and is connected to the first valve... The rod 25012 rotates and engages. The left and right ends of the first rod sleeve 25013 are respectively provided with through holes that are adapted to the cross-sectional ports of the first connecting channel 25015 and the second connecting channel 25016. When the two first through holes 25014 are aligned with the cross-sectional ports of the first connecting channel 25015 and the second connecting channel 25016 and the two through holes on the first rod sleeve 25013, the first connecting channel 25015 and the second connecting channel 25016 are connected. When the two first through holes 25014 have no overlapping area with the two through holes, the first connecting channel 25015 and the second connecting channel 25016 are cut off by the first valve rod 25012, and the first valve group 2501 is in the closed state.

[0096] See Figure 5 , Figure 6 , Figure 7The second valve assembly 2502 is a four-position three-way valve. The second valve assembly 2502 includes a second valve assembly housing 25021, a second valve stem 25022, a second stem sleeve 25023, four second through holes 25024, a first input channel 25025, a first output channel 25026, a second output channel 25027, and a third output channel 25028. The second valve stem 25022 and the second stem sleeve 25023 are interference-fitted. The first input channel 25025 is connected to the second connecting channel 25016 via a first air passage 25311. The first output channel 25026, the second output channel 25027, and the third output channel 25028 are respectively connected to the three input ports of the gas sampling module 222. The second valve stem 25022 is rotatably connected inside the second valve assembly housing 25021, and the second rod sleeve 25023 is fixedly connected inside the second valve assembly housing 25021 and rotatably engages with the second valve stem 25022. The second rod sleeve 25023 is provided with a first through hole 250231, a second through hole 250232, a third through hole 250233, and a fourth through hole 250234. The first through hole 250231 is aligned with the right end of the first input channel 25024, and the second through hole 250232, the third through hole 250233, and the fourth through hole 250234 are aligned with the first output channel 25026, the second output channel 25027, and the third output channel 25028, respectively.

[0097] The four second through holes 25024 are designated as holes A, B, C, and D, respectively, and are arranged in a spiral pattern. Holes A and D are located on the same side of the second valve stem 25022, while hole B is located on the opposite side. The valve position logic is as follows: when hole B is connected to the first output channel 25026 through the second through hole 250232, sampling of the first gas sampling bottle can be achieved; when hole C is connected to the second output channel 25027 through the third through hole 250233, sampling can be achieved. It can realize sampling of the second gas sampling bottle. When hole D is connected to the third output channel 25028 through the fourth through hole 250234, it can realize sampling of the third gas sampling bottle. When holes B, C and D are not connected to the second through hole 250232, the third through hole 250233 and the fourth through hole 250234, the first output channel 25026, the second output channel 25027 and the third output channel 25028 are all in a non-conductive state.

[0098] See Figure 6 The second sleeve 25023 has a first annular chamber 25029. The A hole is connected to the first annular chamber 25029, so that gas can enter the first annular chamber 25029 through the A hole. The gas enters the inner cavity of the second valve stem 25022 through the first input channel 25025, the first through hole 250231, the first annular chamber 25029, and the A hole in sequence, so that the A hole is always in the conductive state.

[0099] The second valve group 2502 and the seventh valve group 2507 have the same structure. The difference between the second valve group 2502 and the seventh valve group 2507 is that the input and output ends are connected to different devices. The three output ends of the seventh valve group 2507 are connected to the two input ends of the vacuum pump group 23 and the gas storage tank 3, respectively. The input end of the third valve group 2503 is connected to the output end of the sixth valve group 2506.

[0100] See Figure 8 , Figure 9 , Figure 10 The fifth valve assembly 2505 is a three-position two-way valve. The fifth valve assembly 2505 includes a fifth valve assembly housing 25051, a fifth valve stem 25052, and a fifth stem sleeve 25053. The fifth stem sleeve 25053 has a fifth through hole 250531, a sixth through hole 250532, and a seventh through hole 250533. The fifth stem sleeve 25053 is fixedly connected inside the fifth valve assembly housing 25051, and the fifth valve stem 25052 is rotatably connected inside it. The sixth through hole 250532 and the seventh through hole 250533 are located on the same side, and the fifth through hole 250531 is located on the other side. The fifth valve stem 25052 has three openings 2512, hereinafter referred to as holes E, F, and G, where E and F are... The holes are located on the same side, with the G hole located on the other side of the fifth valve stem 25052. The F hole and the fifth through hole 250531 are both input ports. The E hole and the G hole are respectively connected to the output ports of the two flow controllers 2211. A second annular chamber 25054 is provided on the fifth rod sleeve 25053. The second annular chamber 25054 and the E hole are always in communication. Gas enters the second annular chamber 25054 from the fifth through hole 250531 and enters the inner cavity of the fifth valve stem 25052 from the E hole. When the E hole is aligned with the sixth through hole 250532, the gas is discharged from the sixth through hole 250532. When the G hole is aligned with the seventh through hole 250533, the gas is discharged from the seventh through hole 250533.

[0101] The sixth valve assembly 2506 is a two-position, two-way valve. The sixth valve assembly 2506 includes a sixth valve assembly housing, a sixth valve stem, and a sixth stem sleeve. The sixth valve stem is rotatably connected inside the sixth valve assembly housing, and the sixth stem sleeve is fixedly connected inside the sixth valve assembly housing and rotatably engages with the sixth valve stem. The sixth valve stem has three third through holes, denoted as H, I, and J, respectively. The sixth stem sleeve has an eighth, ninth, and tenth through hole. The sixth valve assembly housing has a third input channel, a fourth input channel, and a fourth output channel. The third and fourth input channels are connected to the other ends of two flow controllers 2211, respectively, and the fourth output channel is connected to the input end of the seventh valve assembly. The three third through holes of the sixth valve stem are connected and their diameters are adapted to the cross sections of the third input channel, the fourth input channel, and the fourth output channel, respectively. The through holes on the sixth valve stem that are adapted to the fourth output channel all establish annular air chambers. Among them, the H and I holes are both input ends, and the J hole is the output end. The H and I holes are not located on the same side. When the H hole is aligned with the eighth through hole and the third input channel, this branch, i.e., one flow controller 2211, is in the conducting state. When the I hole is aligned with the ninth through hole and the fourth input channel, the other branch, i.e., another flow controller 2211, is in the conducting state. Due to the opening of the annular chamber, the J hole is always in the conducting state with the tenth through hole and the fourth output channel.

[0102] See Figure 13 , Figure 14 The flow control module 221 includes two mass flow controllers 2211 and an L-shaped adapter plate 2212. The two mass flow controllers 2211 are arranged side by side. Each mass flow controller 2211 has two L-shaped adapter plates 2212 fixedly connected to its bottom and symmetrically distributed about the axis of the flow controller. The L-shaped adapter plates 2212 are fixedly connected to the inner wall of the gas module housing 210. The L-shaped adapter plate 2212 includes a vertical section and a horizontal section. The end of its vertical section facing the flow controller 2211 is sealed and fixed to the adapter of the flow controller 2211 by a rubber ring. The end of its vertical section away from the flow controller 2211 is sealed and fixed to the fifth valve group 2505 and the sixth valve group 2506 by rubber rings respectively.

[0103] See Figure 1The exhaust unit 2 also includes an online detection module 223. The online detection module 223 includes a detection branch 2231, a gas detector 2232, and a component detection buffer tank 2233. Both ends of the detection branch 2231 are connected to the main pipeline of the exhaust unit 2, and a control valve is provided at the end of the detection branch 2231 connected to the main pipeline. The component detection buffer tank 2233 and the gas detector 2232 adapted to the detection gas are provided on the detection branch 2231. In this embodiment, three gas detectors 2232 are used as an example, namely CO detector, H2 detector and SF6 detector. It should be noted that during detection, the pressure reducing valve is first adjusted to a slightly positive pressure, and then the pressure at the back end is controlled by the S-9 manual valve to create a slightly positive pressure operating environment for the detector. The optimal detection flow rate for CO and SF6 is 100mL-150mL / min. The buffer tank is designed with a volume of 1L, which can theoretically support at least 3 sampling analyses.

[0104] See Figure 15 , Figure 16 , Figure 17 The filter unit 1 includes a filter unit housing 11 and two multi-stage filters 12. The multi-stage filters 12 filter the discharged high-temperature and high-pressure gas containing dust particles and impurities. To meet the filtration efficiency, the gas flow rate needs to be controlled by a mass flow meter. In addition, when the high-temperature and high-pressure gas is discharged to a low pressure of about 30 kPa, the gas will contain water vapor. A condensation and dehydration module needs to be designed so that after the high-temperature and high-humidity gas passes through the heat exchanger of the condensation and dehydration module, the gas temperature is reduced to room temperature or lower by the cooling water in the heat exchanger, and the condensate is precipitated. A dedicated closed cavity is set up to store the condensate. After the particulate composition of the gas at the downstream end of the filter meets the requirements, it enters the subsequent unit.

[0105] Two multi-stage filters 12 are fixedly installed inside the filter unit housing 11. The input and output ends of the multi-stage filters 12 are connected to the output ends of the intake unit and the exhaust unit 2, respectively. Control valves are installed on the connecting pipes of the input and output ends of the multi-stage filters 12 to the output ends of the intake unit and the exhaust unit 2, respectively. The two multi-stage filters 12 are symmetrically distributed inside the filter unit housing 11, one in use and one on standby. The input end of the multi-stage filter 12 is connected to the output end of the intake unit, and the output end of the multi-stage filter 12 is connected to the input end of the mass spectrometry detection module 22. Pressure sensors are installed at both the input and output ends of the filter unit housing 11. The pressure sensors are electrically connected to the main control module 24 to detect the operating status of the multi-stage filters 12. If the pressure difference across the multi-stage filter 12 is too large, a new filter needs to be replaced. When replacing, simply close the control valve. At the same time, to facilitate the replacement of the multi-stage filters 12, a detachable door is designed on the filter unit housing 11.

[0106] See Figure 17The multi-stage filter 12 includes multiple secondary filters 121 connected in series. From left to right, the secondary filters 121 consist of a first-stage filter, a second-stage filter, and five third-stage filters. Each secondary filter 121 includes a housing, a support plate 122, and a pressure ring 123. The secondary filters 121 employ the same structure, facilitating filter modification, and the overall weight is less than 1.8 kg. An annular support plate 122 is fixed to the inner wall of the secondary filter 121. A through hole 1221 is opened at the center line of the annular support plate 122. The filter element 13 is embedded in the through hole 1221 and connected and secured by the pressure ring 123. The pressure ring 123 is a wire mesh pressure plate, which prevents excessive gas impact from causing excessive deformation of the filter element 13 and damaging the sealing structure. 13 includes a first filter element 131, a second filter element 132, and a plurality of third filter elements 133 arranged sequentially along the axial direction of the multi-stage filter 12. In this embodiment, five third filter elements 133 are used as an example. The first filter element 131 is a coarse sponge, the second filter element 132 is a fine sponge and polypropylene, and the third filter element 133 is made of H14 grade high-efficiency filter element (high-efficiency glass fiber filter paper). The inner wall of the secondary filter 121 is provided with an installation groove 1211. One end of the third filter element 133 connected to the secondary filter 121 extends into the installation groove 1211 and is bonded and fixed thereto. The end of the third filter element 133 connected to the secondary filter 121 is serrated. The end face of the installation groove 1211 connected to it is provided with a mating protrusion 1212 that is adapted to it.

[0107] By setting one end of the third filter element 133 connected to the secondary filter 121 to be serrated and extending into the mounting groove 1211, and setting the mating protrusion 1212 to cooperate with the serrated connecting part of the third filter element 133, the contact area between the third filter element 133 and the secondary filter 121 is increased, and the connection strength of the third filter element 133 is improved. By bonding and fixing the third filter element 133 to the secondary filter 121 and injecting glue at their connection, the leakage of polluted gas from the edge can be prevented. It should be noted that the installation structure of the first filter element 131, the second filter element 132 and the third filter element 133 is the same, but not limited to this.

[0108] Adjacent secondary filters 121 are connected by flanges and fixed by welding. Since the secondary filters 121 are small in size, in order to prevent the high temperature generated during welding from burning the sealant and causing smoke pollution to the filter, a water cooling device is used to cool the weld point during welding. At the same time, the welding is carried out intermittently, one cycle at a time, and high temperature resistant sealant is used to avoid local overheating that could burn the sealant and filter element 13.

[0109] Usage: The gas to be filtered enters the multi-stage filter 12 from the filter unit housing 11 for filtration. The filtered gas enters the exhaust unit 2, is first detected by the mass spectrometry detection module 22, and then flows into the flow controller 2211. Under the suction of the vacuum pump group 23, it enters the gas storage tank 3.

[0110] Example 2

[0111] The difference between this embodiment and Embodiment 1 is that, addressing the urgent need for integrated multi-way valves in current gas pipeline systems, this embodiment focuses on improving the physical structure of multi-way valves, designing structural parameters for cylindrical multi-way valves, and analyzing their corresponding flow resistance and sealing characteristics. It proposes a design and integration method for cylindrical rotary multi-way valves in integrated gas modules, overcoming the technical bottlenecks in orifice design, flow resistance analysis, and leakage characteristic analysis of cylindrical rotary multi-way valves. This method accurately realizes the design of cylindrical rotary multi-way valves and can be applied to exhaust processes with numerous gas pipelines and complex control processes, making it suitable for controlling gas channels in complex gas pipelines.

[0112] The design method for rotary multi-way valves or single-way valves in integrated gas modules includes the following steps:

[0113] It should be noted that this embodiment uses a rotary multi-way valve as an example;

[0114] S1: Design the structure of a cylindrical rotary multi-way valve and determine its working mode;

[0115] S2: Design the orifice and stem of the cylindrical rotary multi-way valve according to functional and sealing requirements;

[0116] S3: Analyze the flow resistance characteristics of the cylindrical rotary multi-way valve based on dynamic software to determine the position of the through hole;

[0117] S4: Calculate the leakage rate of the cylindrical rotary multi-way valve to ensure high sealing performance;

[0118] S5: Design an integrated gas handling module system based on a cylindrical rotary multi-way valve, and conduct experimental tests to ensure that the integrated gas module system meets functional requirements.

[0119] Step S1 includes the following steps:

[0120] S11: Determine the main structural components of the cylindrical high-sealing rotary valve; see reference Figure 18Taking the reference valve assembly 2508 as an example, the upper left end of the cylindrical high-sealing rotary valve is the gas input port, and the lower end is designed with three gas outlets (i.e., output ports) and corresponding sealing structures. The reference valve assembly 2508 includes an outer mounting base 25081, an inner sealing bushing 25082, a bearing upper sealing cover 25083, a rotary switching spindle 25084, a bearing 25085, a snap ring 25086, and a lower sealing cover 25087. Among them, the outer mounting base 25081 has a gas input channel and a gas output channel, and the rotary switching spindle 25084 passes through the bearing 5. The bearing 5 is rotatably connected in the outer mounting base 25081 and sealed and fixed by the upper sealing cover 25083 and the lower sealing cover 25087. The bottom of the rotary switching spindle 25084 is provided with a snap ring 25086. An inner sealing bushing 25082 is fixedly connected in the outer mounting base 25081. The inner sealing bushing 25082 is located outside the rotary switching spindle 25084. The rotary switching spindle 25084 has a sealed cavity structure inside, and it is always connected to the gas input channel through an input port. The rotary switching spindle 25084 has an output through hole in the circumference.

[0121] S12: Determine the sealing method of the cylindrical rotary multi-way valve. The sealing method adopts the ball valve sealing method. The static seal adopts the interference fit. The upper sealing cover 25083 and the lower sealing cover 25087 of the bearing are interference-fitted with the outer mounting base 25081. The dynamic seal adopts the ball valve sealing method to achieve airtight sealing. The inner sealing bushing 25082 is made of polytetrafluoroethylene, which has self-lubricating properties. The dynamic seal adopts the interference fit.

[0122] S13: Determine the operating mode of the cylindrical rotary multi-way valve; taking the second valve group 2502 in the second type of valve group, i.e., the four-position three-way valve structure, as an example, refer to... Figure 19 The outer mounting base 25081 has three air outlets and one air inlet, designated as first air outlet 250811, second air outlet 250812, third air outlet 250813, and first air inlet 250814, respectively. The rotary switching spindle 25084, i.e., the valve stem, has first air outlet 250841 and second air outlet 250842, and the inner sealing bushing 25082, i.e., the rod sleeve, has an air guide hole 250821. The corresponding working mold... There are 4 operating modes: Operating Mode 1: First air outlet 250811 is open, second air outlet 250812 and third air outlet 250813 are closed; Operating Mode 2: Second air outlet 250812 is open, first air outlet 250811 and third air outlet 250813 are closed; Operating Mode 3: Third air outlet 250813 is open, first air outlet 250811 and second air outlet 250812 are closed; Operating Mode 4: All channels are closed.

[0123] S2: Design the orifice and stem of the cylindrical rotary multi-way valve according to functional and sealing requirements;

[0124] Step S2 includes the following steps:

[0125] Step 21: Determine the included angle between adjacent air outlets. Rotate the switching spindle 25084 with center O and outer diameter D. The diameter of the internal air passage of the valve stem is d. Design air outlets at different angles relative to center O at different heights of the valve stem. The diameter of the air outlet is r. To facilitate the control of the rotation switching angle between different channels, the angle between adjacent air outlets is determined to be 90°.

[0126] Step 22: Establish a critical cutoff state model. When the first vent 250841 and the air guide hole 250821 are completely opposite, gas flows out from the first vent 250841. At this time, the left and right boundaries of the first vent 250841 and the air guide hole 250821 are a1 and b1, the left and right boundaries of the second vent 250842 are a2 and b2, and the angle between the vent boundary and the center O is θ, with a size of arcsin(r / d).

[0127] See Figure 20 During the switching process, the critical cutoff state is when the first vent 250841 is just closed, and the second vent 250842 is about to form a gap with the air guide hole, and gas will flow out from the second vent 250842. Establish a geometric model of the critical cutoff state. Rotate the valve stem counterclockwise. The left boundary a1' of the first vent 250841 intersects the right boundary b1 of the air guide hole on a line. The right boundary b2' of the second vent 250842 intersects the left boundary a1 of the air guide hole on a line. At this time, the first vent 250841 and the air guide hole, and the second vent 250842 and the air guide hole are both in a linear closed state. The angle between the vent boundary and the center O is the critical cutoff angle β. The calculated critical cutoff angle β is π / 8.

[0128] To ensure the dynamic shut-off of the valve, the first vent 250841 and the second vent 250842 cannot be open simultaneously, i.e., θ≤β, resulting in: θ=arcsin(r / d)≤β=π / 8, r / d≤sin(π / 8)

[0129] The flow conductance formula for air at 20℃ in a long pipe with a circular cross-section (L>20φ) is:

[0130]

[0131] In the formula: C20℃ is the conductance of the long pipe to air at 20℃, m3 / s; φ is the minimum diameter of the pipe, m; L is the length of the pipe, m; The average pressure in the pipeline is expressed in Pa. p1 and p2 are the gas pressures at both ends of the pipe, in Pa.

[0132] As can be seen from the definition of flow rate, the pipeline flow rate is...

[0133] Q = C 20℃ ×Δp (3)

[0134] In the formula, Q is the gas mass flow rate, Pa·m3 / s; ΔP is the pressure difference between the two ends of the pipeline, Pa; substituting equation (3) into equation (2) yields

[0135]

[0136]

[0137] The pressure difference across the pipeline is 150 kPa, i.e., ΔP is 150 kPa. The pressure at the end of the pipeline, p2, is atmospheric pressure, and the pressure at the front end of the pipeline, p1, is 251 kPa. Substituting the known parameters into formula (5), and taking the value of Q as the minimum acceptable flow rate of 160 SLM, the minimum inner diameter of the pipeline, φ, is calculated to be 5.26 mm.

[0138] Therefore, for ease of processing, the inlet and outlet diameters r of the multi-way valve are designed to be 6mm, and the valve stem inner diameter must meet Formula 1, with a minimum valve stem inner diameter of 16mm.

[0139] S3: Analyze the flow resistance characteristics of the cylindrical rotary multi-way valve based on dynamic software to determine the location of the through-hole; step S3 includes the following steps:

[0140] S31, Establish the valve pipeline flow resistance model. When fluid passes through the valve, its fluid resistance loss is represented by the fluid pressure drop ΔP before and after the valve, as shown in equation (6).

[0141]

[0142] In the formula: ΔP is the pressure difference, Pa; v is m / s; ρ is the density, and the gas density is set to 1.225 kg / m³; therefore, the flow resistance coefficient is:

[0143]

[0144] S32, based on dynamic software analysis of the flow resistance characteristics of the cylindrical rotary multi-way valve, determines the location of the through-hole. To ensure low gas resistance, the influence of the entire space volume of the equipment also needs to be considered during actual processing. Under the condition of meeting dimensional constraints, the outlet can be designed to be far from the inlet to minimize the resistance loss of each flow channel.

[0145] S4: Calculate the leakage rate of the cylindrical rotary multi-way valve to ensure high sealing performance; S4 includes the following steps:

[0146] S41: Identify the leakage path of the cylindrical valve. For a single cylindrical valve, there are two main ways for gas to leak: one is leakage caused by a loose connection between the sealing hole and the through hole, or between the valve core and the inner sealing bushing; the other is leakage caused by a loose connection between the cylindrical curved surface of the sealing port and the through hole and the inner sealing bushing.

[0147] See Figure 21 For a four-position three-way valve, when the second outlet 250812 is open and the first outlet 250811 and the third outlet 250813 are closed, there are two leakage paths for the third outlet 250813. One is path l1 (marked as L1 in the figure) between the third outlet 250813 and the second outlet 250812, and the other is path l2 (marked as L2 in the figure) with a cylindrical cross-section of 1 / 4 of the circumference between the third outlet 250813 and the second outlet 250812.

[0148] S42: Establish a model for calculating the leakage rate of a cylindrical valve. Based on the leakage rate calculation formula...

[0149]

[0150] In the formula, Ql is the leakage rate, Pa·m 3 / s; l is the path length between the through hole and the sealing hole, in meters; η is the aerodynamic viscosity, 1.81 × 10⁻⁶. -5 Pa·s; p1 is the high-pressure port pressure, which is atmospheric pressure during leak detection, p1=101325Pa; p2 is the low-pressure port pressure, which is a vacuum state during leak detection, so p2=0Pa; The average pressure; r f The value representing the size of the leakage gap is to be determined. With the second outlet 250812 open and the first outlet 250811 and the third outlet 250813 closed, the total leakage for the third outlet 250813 is the sum of the leakage along the two paths.

[0151]

[0152] In the formula

[0153] S43: Determine the minimum leakage gap; as the preferred technical solution, the valve leakage rate should be at most 9 × 10⁻⁶. -10 Pa·m 3 / s, l1 is 36mm, l2=π / 4·dmm, calculated to obtain l 总 If the gap is 9.3mm, then the leakage gap r f Solution:

[0154]

[0155] S5: Design an integrated gas handling module system based on a cylindrical rotary multi-way valve, and conduct experimental tests to ensure that the integrated gas module system meets functional requirements.

[0156] S51: Determine the overall structural design scheme of the gas processing module system. The main channel includes a gas duct plate 253. A sealed cavity structure is opened inside the gas duct plate 253. A first gas duct 25311, a second gas duct 25312, a third gas duct 25313, a fourth gas duct and a fifth gas duct are opened on the gas duct plate 253 through the cavity.

[0157] S52; Determine the required structural design schemes for different types of valve groups: Type I valve group is a cylindrical rotary single-way valve including valve group 2501, valve group 2503, and valve group 2504; Type II valve group is a cylindrical rotary four-position three-way valve including valve group 2502 and valve group 2507; Type III valve group is a cylindrical rotary three-position two-way valve including valve group 2505; Type IV valve group is a cylindrical rotary two-position two-way valve including valve group 2506.

[0158] S53: Determine the sealing structure design of the flow controller, that is, the sealing structure between the flow controller 221 and the fifth valve group 2505 and the seventh valve group 2507 is connected by an L-shaped adapter plate 2212.

[0159] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An integrated gas module, comprising: The application relates to a valve assembly, which comprises a main flow channel, a plurality of rotary multi-way valves arranged on the upstream and downstream of the main flow channel, a plurality of rotary single-way valves, and a flow control module, wherein the main flow channel, the rotary multi-way valves, the rotary single-way valves and the flow control module are closely combined and communicated with each other, the rotary multi-way valve comprises a rotor, a stator and a driving part, the rotor is arranged in the rotary multi-way valve and is in transmission connection with the output end of the driving part, the stator is fixedly arranged in the rotary multi-way valve and is in rotation cooperation with the rotor, the stator is provided with an input port and a plurality of or single output ports, the input port and the plurality of or single output ports form a plurality of switching channels respectively, the input end of the rotor is always communicated with the input port of the stator, the rotor is circumferentially provided with a plurality of notches matched with the output ports, and the driving part drives the notches to move between the alignment and misalignment states relative to the output ports matched with the notches and causes the corresponding switching channels to be conducted or closed; the rotor comprises a valve rod, a plurality of openings are circumferentially arranged on the valve rod, the plurality of openings are spirally distributed along the valve rod, and the driving part drives the valve rod to rotate with the axis of the valve rod as the rotation shaft to open and close the corresponding switching channels.

2. The integrated gas module of claim 1, wherein, The main flow channel comprises an air channel plate, a closed cavity structure is arranged in the air channel plate, a first air channel, a second air channel, a third air channel, a fourth air channel and a fifth air channel are arranged in the air channel plate and penetrate the cavity, the input end of the first air channel is connected with an external input pipeline, the second air channel and the third air channel are connected with the rotary single-way valve, and the fourth air channel and the fifth air channel are connected with the rotary multi-way valve.

3. The integrated gas module of claim 2, wherein, The rotary multi-way valve comprises a second valve group, a fifth valve group, a sixth valve group and a seventh valve group, the single-way valve comprises a first valve group, a third valve group and a fourth valve group, the first air channel of the air channel plate is connected with the first valve group, the first valve group of the air channel plate is connected with the external input pipeline, the fourth air channel of the air channel plate is connected with the second valve group, the second air channel of the air channel plate is connected with the third valve group, the third air channel of the air channel plate is connected with the fourth valve group, the fifth air channel of the air channel plate is connected with the input end of the fifth valve group, the output ends of the third valve group and the fourth valve group are connected with an external pipeline, the output end of the fifth valve group is connected with the input end of the flow control module, and the output end of the flow control module is connected with the sixth valve group and the seventh valve group.

4. The integrated gas module of claim 1, wherein, The flow control module comprises a flow controller, the flow controller is provided with an input adapter and an output adapter, the input adapter and the output adapter of the flow controller are connected with adjacent control valves through sealing connectors respectively, the flow controller is fixedly arranged on the sealing connectors, and the end portions connected with the sealing connectors and the control valves are all flat sealing portions.

5. The integrated gas module of claim 4, wherein, The sealing connectors are L-shaped adapter plates, the two L-shaped adapter plates are arranged on the bottom of the flow controller and are symmetrically distributed about the axis of the flow controller, the L-shaped adapter plate comprises a vertical segment and a horizontal segment, one end of the vertical segment of the L-shaped adapter plate is sealingly fixed with the adapter of the flow controller, and the other end of the vertical segment of the L-shaped adapter plate is sealingly fixed with the control valve.

6. The integrated gas module of claim 1, wherein, The stator comprises a rod sleeve, a plurality of through holes are formed in the rod sleeve, the plurality of through holes form the gap, and the plurality of through holes are matched with the holes in the valve rod.

7. The integrated gas module of claim 3, wherein, The second valve group comprises a second valve group shell, a second valve rod, and a second rod sleeve, the second valve rod is rotationally connected in the second valve group shell, the second rod sleeve is fixedly connected in the second valve group shell and rotationally matched with the second valve rod, a plurality of second through holes are formed in the second valve rod, a first input channel, a first output channel, a second output channel, and a third output channel are formed in the second rod sleeve, the first input channel is connected with the output end of the first valve group through a fourth gas passage, the first output channel, the second output channel, and the third output channel are connected with external pipelines, the diameters of the plurality of second through holes are matched with the cross sections of the first input channel, the first output channel, the second output channel, and the third output channel respectively, and the first input channel is communicated with the inner cavity of the second valve rod through an annular gas chamber.

8. The integrated gas module of claim 7, wherein, The first valve group comprises a first valve group shell, a first valve rod, a first rod sleeve, a first connecting channel, and a second connecting channel, the first valve rod is rotationally connected in the first valve group shell, the first rod sleeve is fixedly connected in the first valve group shell and rotationally matched with the first valve rod, coaxial and discontinuous first and second connecting channels are formed in the center of the first valve group shell, two first through holes are formed in the first valve rod, the two first through holes form a through channel, and through holes matched with the cross section ports of the first and second connecting channels are formed in the first rod sleeve.

9. A design method of the integrated gas module rotary multi-way valve according to any one of claims 1-8, comprising the following steps: S1: designing a cylindrical rotary multi-way valve structure and determining the working mode of the cylindrical multi-way valve; S2: designing the hole diameter and the valve rod of the cylindrical rotary multi-way valve according to the function and sealing requirements; S3: analyzing the flow resistance characteristics of the cylindrical rotary multi-way valve and determining the position of the through hole; S4: calculating the leakage rate of the cylindrical rotary multi-way valve and ensuring high sealing performance; The step S1 comprises the following steps: S11: determining the main structure of the cylindrical rotary multi-way valve; including a valve rod, a rod sleeve, a first gas outlet hole and a second gas outlet through hole formed in the valve rod, and a gas guide through hole formed in the rod sleeve; S12: determining the sealing mode of the cylindrical rotary multi-way valve; S13: determining the working mode of the cylindrical rotary multi-way valve; The S2 comprises the following steps: S21: determining the included angle between adjacent gas outlets; the valve core shaft of the multi-way valve, i.e. the center of the valve rod, is O, the outer diameter is D, the internal gas passage diameter of the valve rod is d, the gas outlets are designed at different angles relative to the center O at different heights of the valve rod, and the gas outlet hole diameter is r; S22: establishing a critical cutoff state model; when the first gas outlet hole is completely opposite to the gas guide through hole, the gas flows out from the first valve rod gas outlet hole, at this time, the left and right boundaries of the first gas outlet hole and the gas guide through hole are a1 and b1, the left and right boundaries of the second gas outlet hole are a2 and b2, the included angle between the gas outlet boundary and the center O is θ, and the size is arcsin(r / d). In the switching process, the critical cut-off state is that the first outlet hole is just closed, the second outlet hole is about to form a gap with the gas guide hole, and the gas will flow out from the second outlet hole; a critical cut-off state geometric model is established, the valve rod rotates counterclockwise, the left boundary a1' of the first outlet hole intersects with the right boundary b1 of the gas guide hole at a line, the right boundary b2' of the second outlet hole intersects with the left boundary a1 of the gas guide hole at a line, the first outlet hole and the gas guide hole, and the second outlet hole and the gas guide hole are in a line closed state at this time, and the angle between the outlet hole boundary and the center O is the critical cut-off angle β, and the critical cut-off angle is β; In order to ensure the dynamic cut-off of the valve, the first outlet hole and the second outlet hole cannot exist in a state of being opened at the same time, that is, θ≤β, and the following is obtained: θ=arcsin(r / d)≤β, r / d≤sin(β) (1); S23: Determine the minimum inner diameter size of the pipeline through which the gas flows and determine the size of the pipeline flow conductance based on the minimum inner diameter size, so as to determine the pressure relief flow; in the pressure relief process, the minimum inner diameter size of the pipeline is calculated according to the pressure difference before and after the pipeline and the gas flow; The flow conductance formula of 20℃ air in a circular cross-section long pipeline (L>20φ) is: In formula (2): C20°C is the flow conductance of the long tube to 20°C air; φ is the minimum diameter of the tube; L is the length of the tube. P is the average pressure in the tube; p1, p2 are the gas pressures at the two ends of the tube, respectively. From the definition of flow, the pipeline flow is Q = C 20℃ x Δp (3); In formula (3), Q is the mass flow of the gas; ΔP is the pressure difference between the two ends of the pipeline; formula (3) is brought into formula (2) to obtain The value of ΔP is calculated according to the pressure difference before and after the pipeline, the pressure p2 at the end of the pipeline is atmospheric pressure, and the pressure p1 at the front end of the pipeline is ΔP+101kPa; the minimum inner diameter size φ of the pipeline is calculated by bringing the known parameters into formula (5) and taking the value of Q as the lowest acceptable flow; Therefore, in order to facilitate processing, the diameter r of the gas inlet and outlet of the multi-way valve is designed as an upward integer value of φ, and the inner diameter of the valve rod needs to satisfy formula 1; The S3 includes the following steps: S31: Establish a valve pipeline flow resistance model; when the fluid passes through the valve, the fluid resistance loss is represented by the fluid pressure drop ΔP before and after the valve, as shown in formula (6); In formula (6), ΔP is the pressure difference; v is the flow rate; and ρ is the density, and the gas density is set to a set value, so that the flow resistance coefficient is calculated to be: S32: Analyze the flow resistance characteristics of the cylindrical rotary multi-way valve to determine the position of the through hole.

10. A design method of a rotary multi-way valve in an integrated gas module according to claim 9, comprising the following steps: the S4 includes the following steps: S41: Determine the cylindrical valve leakage channel; the four-position three-way valve includes a first outlet, a second outlet, and a third outlet, and the leakage paths are determined to be a path l1 between the third outlet and the second outlet and a path l2 of 1 / 4 circumference length of the cylindrical cross section between the third outlet and the second outlet; S42: Establish a cylindrical valve leakage amount calculation model; according to the leakage rate calculation formula In formula (8), Q L is the leakage rate; l is the path length between the through hole and the sealing hole; η is the air dynamic viscosity, 1.81 x 10 - 5 Pa·s; p1 is the high pressure port pressure, which is the atmospheric pressure size when leak hunting, p1 = 101325 Pa; p2 is the low pressure port pressure, which is in a vacuum state when leak hunting, so p2 = 0 Pa; is the pressure average; r f is the leakage gap size, which is a to-be-calculated value. In the case that the second air outlet is open and the first air outlet and the third air outlet are closed, the total leakage for the third air outlet is the sum of the leakage of the two paths, that is, In the formulae S43: determine the minimum leakage gap; according to the required value of the leakage rate of the valve, according to l1, l2, calculate l 总 , calculate the leakage gap r f :

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