A boron nitride processing and polishing apparatus and method

By designing a boron nitride processing and grinding device that includes a fixture, a drive mechanism, and a light-emitting component, semi-automatic grinding of the inner wall of boron nitride was achieved. This solved the problems of difficulty in ensuring uniformity and low efficiency in manual grinding, thereby improving the yield and reducing costs.

CN116872032BActive Publication Date: 2025-10-24ZHEJIANG PIONEER MICROELECTRONICS TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202310989640.9
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-08-07
Publication Date
2025-10-24
Estimated Expiration
2043-08-07

AI Technical Summary

Technical Problem

In the existing technology, it is difficult to ensure consistent internal roughness when manually processing boron nitride, resulting in uneven thickness, affecting the crystal growth yield and low efficiency.

Method used

A boron nitride processing and polishing device is adopted, which uses a clamp, a drive mechanism and a light-emitting element. The clamp rotation is controlled by a foot switch, and the inner wall of the boron nitride is polished by sandpaper of different grits. The polishing progress is observed by the light-emitting element, thus realizing semi-automatic processing.

Benefits of technology

This improved the polishing efficiency of boron nitride, ensured uniform internal roughness, increased the yield of crystal growth, and reduced production costs.

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Abstract

The application relates to the technical field of boron nitride processing, and discloses a boron nitride processing and polishing device and method.The device comprises a clamp, a supporting frame, a driving mechanism and a foot switch.The clamp comprises a transparent shell and a light-emitting piece, the transparent shell is internally provided with a containing cavity, the shell wall of the transparent shell is hollow, and the light-emitting piece is embedded in the shell wall of the transparent shell; the supporting frame is supported at one end of the clamp; the driving mechanism is in transmission connection with the other end of the clamp and is used for driving the clamp to rotate; and the foot switch is electrically connected with the driving mechanism so as to control the operation of the driving mechanism.In the process of rotating the clamp, sandpaper is used to process and polish the inner wall of boron nitride; in the process of polishing, the inner wall of boron nitride can be directly observed through the light emitted by the light-emitting piece, semi-automatic processing and polishing of boron nitride are realized, and the efficiency is improved; and the boron nitride is polished while rotating, so that the boron nitride produced is smooth and uniform in roughness, and the finished product rate of the crystal is improved.
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Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of boron nitride processing, in particular to a boron nitride processing and polishing device and method. BACKGROUND

[0002] Boron nitride is a bearing crystal and a tool for assisting crystal growth. After boron nitride crystal growth, there will be more or less delamination phenomenon, and such delamination phenomenon will affect crystal growth if not handled. Therefore, boron nitride is usually processed after use. The roughness of the inner wall of boron nitride and the uniformity of the wall thickness have a great influence on the yield of the finished product, so the processing technology of boron nitride is very critical.

[0003] At present, the processing and polishing of boron nitride inside on the market are mostly in the artificial processing stage. The operator puts the boron nitride on an iron stand, and uses a shovel, a scraper and other tools to process and polish the delamination part or the protruding part. However, artificial processing and polishing of boron nitride not only cannot guarantee that the roughness of the boron nitride inside is consistent, but also will appear uneven thickness, which seriously affects the yield of the finished product, and the efficiency is low. SUMMARY

[0004] The purpose of the present application is to provide a boron nitride processing and polishing device and method to solve the problem of artificial processing and polishing of boron nitride, which cannot guarantee that the roughness of the boron nitride inside is consistent and has low efficiency.

[0005] In order to achieve the above purpose, the present application adopts the following technical scheme:

[0006] One aspect of the present application is to provide a boron nitride processing and polishing device, comprising:

[0007] The clamp comprises a transparent shell and a light emitting piece, the transparent shell is provided with a containing cavity, the shell wall of the transparent shell is hollow, and the light emitting piece is embedded in the shell wall of the transparent shell;

[0008] The support frame is supported at one end of the clamp;

[0009] The driving mechanism is in transmission connection with the other end of the clamp, and the driving mechanism is used for driving the clamp to rotate;

[0010] The foot switch is electrically connected with the driving mechanism to control the operation of the driving mechanism.

[0011] Preferably, a plurality of rolling wheels are rotatably arranged on the support frame, and the clamp abuts against the rolling wheels.

[0012] Preferably, the rolling wheel set comprises a plurality of rolling wheels, and the plurality of rolling wheels are arranged at intervals along the circumference of the clamp, and the central axis of the rolling wheel is parallel to the rotation axis of the clamp.

[0013] Preferably, the driving mechanism comprises a motor, a rotating shaft and a chuck, the motor is connected with one end of the rotating shaft, the chuck is connected with the other end of the rotating shaft, and the clamp is clamped on the chuck.

[0014] Preferably, the boron nitride processing and polishing device further comprises a protective cover, which is arranged outside the clamp, the rotating shaft and the chuck, and the protective cover is connected with the motor shell of the motor.

[0015] Preferably, the boron nitride processing and polishing device further comprises a reset button, which is electrically connected with the driving mechanism.

[0016] Preferably, the boron nitride processing and polishing device further comprises an emergency stop knob, which is electrically connected with the driving mechanism.

[0017] Another aspect of the present application is to provide a boron nitride processing and polishing method using the boron nitride processing and polishing device as described above, comprising the following steps:

[0018] Step S1, placing the workpiece to be processed in the accommodating cavity of the clamp, and starting the light-emitting part;

[0019] Step S2, adjusting the rotating speed of the clamp, stepping on the foot switch, and driving the clamp to rotate through the driving mechanism;

[0020] Step S3, sequentially using sandpapers with different mesh numbers to polish the inner wall of the workpiece to be processed until the set condition is reached, wherein the mesh numbers of the sandpapers increase in the order of polishing, and the set condition comprises that the roughness of the inner wall of the workpiece to be processed is less than a set threshold;

[0021] Step S4, stepping on the foot switch again to stop the rotation of the clamp.

[0022] Preferably, in the step S3, sequentially using sandpapers with different mesh numbers to polish the inner wall of the workpiece to be processed comprises:

[0023] Step S31, using a sandpaper with a first set mesh number to rough polish the inner wall of the workpiece to be processed until the protruding steps on the surface of the inner wall of the workpiece to be processed are polished flat;

[0024] Step S32, using a sandpaper with a second set mesh number to polish the inner wall of the workpiece to be processed twice, the second set mesh number is greater than the first set mesh number, and the concave or protruding part of the inner wall of the workpiece to be processed is polished flat;

[0025] Step S33, using a sandpaper with a third set mesh number to polish the inner wall of the workpiece to be processed, the third set mesh number is greater than the second set mesh number, and the set condition is reached.

[0026] Preferably, in the step S3, the setting condition further comprises: the light emitted by the light emitting piece is weak and uniform on the inner wall surface of the workpiece.

[0027] Compared with the prior art, the boron nitride processing and polishing device and method has the following beneficial effects:

[0028] The boron nitride processing and polishing device uses a foot switch to control the operation of the driving mechanism, and drives the clamp to rotate through the driving mechanism. In the process of rotating the clamp, the inner wall of the boron nitride is processed and polished by using sandpaper. In the process of polishing, the inner wall of the boron nitride can be directly observed by the light emitted by the light emitting piece, so as to realize semi-automatic processing and polishing of the boron nitride and improve the efficiency. Moreover, the boron nitride is polished while rotating, so that the output boron nitride is smooth and uniform in roughness, which is beneficial to improve the yield of the crystal. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 is a front view of the boron nitride processing and polishing device according to the embodiment of the present application;

[0030] Figure 2 is a left view of the boron nitride processing and polishing device according to the embodiment of the present application;

[0031] Figure 3 is a top view of the boron nitride processing and polishing device according to the embodiment of the present application;

[0032] Figure 4 is a structure diagram of the chuck in the embodiment of the present application;

[0033] In the drawings,

[0034] 10, clamp; 11, transparent shell; 12, light emitting piece; 13, battery compartment; 14, wire; 15, exhaust hole;

[0035] 20, support frame; 21, roller;

[0036] 30, driving mechanism; 31, motor; 32, rotating shaft; 33, chuck; 331, claw;

[0037] 40, foot switch;

[0038] 50, protective cover;

[0039] 60, reset button; 61, emergency stop knob; 62, alarm fault lamp; 63, speed adjusting knob. DETAILED DESCRIPTION

[0040] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0041] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to direct connections, indirect connections through an intermediary, or internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0042] The following embodiments of the present invention are described in further detail with reference to the accompanying drawings and examples. The following examples are used to illustrate the present invention but are not intended to limit the scope of the present invention.

[0043] like Figures 1-3 As shown, a boron nitride processing and polishing device according to an embodiment of the present invention includes a fixture 10, a support frame 20, a driving mechanism 30 and a foot switch 40. The fixture 10 includes a transparent shell 11 and a light-emitting component 12. The transparent shell 11 is provided with a accommodating cavity for loading and stabilizing the boron nitride processing component. The shell wall of the transparent shell 11 is hollow, and the light-emitting component 12 is embedded in the shell wall of the transparent shell 11; the support frame 20 is supported on one end of the fixture 10; the driving mechanism 30 is transmission-connected to the other end of the fixture 10, and the driving mechanism 30 is used to drive the fixture 10 to rotate, thereby providing power for the rotation of the boron nitride; the foot switch 40 is electrically connected to the driving mechanism 30 to control the operation of the driving mechanism 30.

[0044] The operation of the driving mechanism 30 is controlled by using the foot switch 40, the clamp 10 is driven to rotate by the driving mechanism 30, and in the process of rotating the clamp 10, the inner wall of the boron nitride is processed and polished by using the sandpaper. In the process of polishing, the inner wall of the boron nitride can be directly observed by the light emitted by the light emitting part 12, the semi-automatic processing and polishing of the boron nitride is realized, and the efficiency is improved. The boron nitride is polished while rotating, so that the produced boron nitride is smooth and uniform in roughness, which is beneficial to improve the yield of the crystal. The light emitting part 12 is embedded in the transparent shell 11, and when polishing, it is not necessary to hold the illuminating appliance for lighting, which is convenient for polishing operation and further improves the polishing efficiency. And the glossiness of the light emitted by the light emitting part 12 on the inner wall of the boron nitride can be directly observed to determine whether the boron nitride is polished in place, so as to avoid the problem of uneven thickness of the inner wall of the boron nitride. The operation of the driving mechanism is controlled by using the foot switch, which is convenient and improves the safety of the operation.

[0045] The light emitting part 12 can select a low-power high-brightness LED light source assembly, and the light emitted by the light emitting part 12 can illuminate the inside of the boron nitride through the clamp 10. The transparent shell 11 is made of acrylic material. The shell wall of the transparent shell 11 is further provided with a battery compartment 13 for placing a battery. The battery is connected with the light emitting part 12 through a wire 14 to supply power to the light emitting part 12.

[0046] In order to avoid the heat generated by the friction between the boron nitride and the clamp 10 inside due to rotation, which causes the gap pressure to be too large to be discharged, and the boron nitride cannot be taken out, preferably, the transparent shell 11 is further provided with an exhaust hole 15.

[0047] The support frame 20 is rotatably provided with a rolling wheel set, the clamp 10 abuts against the rolling wheel set, the rolling wheel set can support the clamp 10, share the force with the driving mechanism 30, make the clamp 10 rotate smoothly, and reduce the friction between the clamp 10 and the support frame 20. Further, the rolling wheel set includes a plurality of rollers 21, the plurality of rollers 21 are arranged at intervals along the circumference of the clamp 10, and the central axis of the roller 21 is parallel to the rotation axis 32 of the clamp 10. The support frame 20 is in direct contact with the clamp 10 through the rollers 21, and when the clamp 10 rotates, the rollers 21 rotate.

[0048] The driving mechanism 30 comprises a motor 31, a rotating shaft 32 and a chuck 33, the motor 31 is connected with one end of the rotating shaft 32, the motor 31 drives the rotating shaft 32 to rotate, the chuck 33 is connected with the other end of the rotating shaft 32, and the clamp 10 is clamped on the chuck 33. The chuck 33 is a three-jaw chuck 33, which is fastened on the rotating shaft 32. The transparent shell 11 is generally cylindrical, one end of which is open to form a boron nitride inlet, which is communicated with an internal containing cavity; the other end of the transparent shell 11 is conical, and the end of the other end of the transparent shell 11 is serrated and matched with the serrated jaw 331 of the three-jaw chuck 33, so that the clamp 10 is stably connected with the motor 31. In order to facilitate disassembly and assembly, the transparent shell 11 is assembled by two parts through rivets, one part is a semicylinder with two flat ends, and the other part is a semicylinder with a conical end, and the two parts are both embedded with light emitting parts.

[0049] The boron nitride processing and polishing device further comprises a protective cover 50, which is arranged outside the clamp 10, the rotating shaft 32 and the chuck 33, and is connected with the motor 31 shell of the motor 31, so as to avoid that the operator's clothes or sundries are accidentally rolled into the machine during rotation. The protective cover 50 can be made of transparent plastic plate. The support frame 20 can be connected with the motor 31 shell of the motor 31 through rivets.

[0050] The boron nitride processing and polishing device further comprises a speed adjusting knob 63, which is electrically connected with the driving mechanism 30 and is used for adjusting the driving speed of the driving mechanism 30.

[0051] The boron nitride processing and polishing device further comprises an alarm fault lamp 62, which is electrically connected with the driving mechanism 30. When the boron nitride processing and polishing device fails, the alarm fault lamp 62 is lighted, at this time, the driving mechanism 30 will stop running, and will be extinguished after reset.

[0052] The boron nitride processing and polishing device further comprises a reset button 60, which is electrically connected with the driving mechanism 30. When the boron nitride processing and polishing device fails, the button is pressed to remove the fault; the button can also be pressed to stop the equipment running.

[0053] The boron nitride processing and polishing device further comprises an emergency stop knob 61, which is electrically connected with the driving mechanism 30. When the emergency stop button is pressed, the driving mechanism 30 immediately stops running. If you want to restore the running, you need to reset the emergency stop button.

[0054] The boron nitride processing and polishing method disclosed by the application utilizes the boron nitride processing and polishing device as described above to process and polish boron nitride, and the method comprises the following steps:

[0055] Step S1, placing the workpiece to be processed in the accommodating cavity of the clamp 10, and starting the light-emitting part 12; the workpiece to be processed is boron nitride; before placing the boron nitride, the clamp 10 is connected with the driving mechanism 30, and the clamp 10 is clamped at the end by the three-jaw chuck 33, and the end of the clamp 10 is serrated and matched with the serrated clamping jaw 331 of the three-jaw chuck 33;

[0056] Step S2, adjusting the rotating speed of the clamp 10, stepping on the foot switch 40, and driving the clamp 10 to rotate by the driving mechanism 30; preferably, the rotating speed of the clamp 10 is 60-70 rpm;

[0057] Step S3, sequentially using sandpapers of different mesh numbers to polish the inner wall of the workpiece to be processed until the set condition is reached, wherein the mesh numbers of the sandpapers increase in the order of polishing, and the set condition includes that the roughness of the inner wall of the workpiece to be processed is less than a set threshold; using the sandpaper to polish the inner wall of the boron nitride can avoid damage to the boron nitride by tools such as scrapers and spades; the set threshold is 0.2;

[0058] Step S4, stepping on the foot switch 40 again to stop the rotation of the clamp 10.

[0059] The semi-automatic processing method is simple to operate, only needs to place the boron nitride into the clamp 10, turn on the switch, and use the sandpaper to polish the inner wall of the boron nitride workpiece by stepping on the foot switch 40 and using the light-emitting part 12 of the clamp 10, which is efficient, safe, and can prolong the service life of the boron nitride compared with manual processing, thereby reducing the production cost, and because the boron nitride produced in this way has smooth and uniform roughness, it is also beneficial to crystal growth, which can improve the quality of auxiliary materials and the yield of products.

[0060] Further, in the step S3, sequentially using sandpapers of different mesh numbers to polish the inner wall of the workpiece to be processed includes:

[0061] Step S31, using a sandpaper of a first set mesh number to coarsely polish the inner wall of the workpiece to be processed until the protruding steps on the surface of the inner wall of the workpiece to be processed are polished flat; the first set mesh number is preferably 400 mesh;

[0062] Step S32, using a sandpaper of a second set mesh number to polish the inner wall of the workpiece to be processed twice, the second set mesh number being greater than the first set mesh number, until the concave or protruding part of the inner wall of the workpiece to be processed is polished flat; the second set mesh number is preferably 800 mesh;

[0063] Step S33, using a sandpaper of a third set mesh number to polish the inner wall of the workpiece to be processed, the third set mesh number being greater than the second set mesh number, until the set condition is reached; the third set mesh number is preferably 1500 mesh.

[0064] The inner wall of boron nitride is polished by sandpaper with different mesh numbers, which saves manpower and improves polishing quality.

[0065] Further, in the step S3, the setting condition further comprises: the light emitted by the light emitting part 12 on the inner wall surface of the workpiece is weak and uniform, so as to intuitively observe whether the optimal processing state is reached. Preferably, in the processing process, whether the light emitted by the light emitting part 12 on the inner wall surface of the workpiece is weak and uniform is observed first, and then the roughness of the inner wall of the workpiece is detected. When the roughness is less than 0.2, the optimal processing state is reached.

[0066] It should be noted that other specific embodiments of the boron nitride processing and polishing method of the present application are substantially the same as the specific embodiments of the boron nitride processing and polishing device described above, and will not be repeated here.

[0067] The above is only the preferred embodiment of the present application, it should be pointed out that, for ordinary skilled in the art, without departing from the technical principles of the present application, can also make a number of improvements and substitutions, these improvements and substitutions should also be considered as the protection scope of the present application.

Claims

1. A boron nitride processing polishing apparatus characterized by comprising: The application relates to a boron nitride processing and polishing device. The device comprises a clamp, a support frame, a driving mechanism and a foot switch. The clamp comprises a transparent shell and a light-emitting element. The transparent shell has a containing cavity. The shell wall of the transparent shell is hollow. The light-emitting element is embedded in the shell wall of the transparent shell.

2. The boron nitride processing and polishing apparatus of claim 1, wherein, The support frame is supported at one end of the clamp.

3. The boron nitride processing and polishing apparatus of claim 2, wherein, The driving mechanism is in transmission connection with the other end of the clamp.

4. The boron nitride processing and polishing apparatus of claim 1, wherein The driving mechanism is used for driving the clamp to rotate.

5. The boron nitride processing and polishing apparatus of claim 4, wherein, The foot switch is in electrical connection with the driving mechanism.

6. The boron nitride processing and polishing apparatus of claim 1, wherein The foot switch is used for controlling the operation of the driving mechanism.

7. The boron nitride processing and polishing apparatus of claim 1, wherein When the clamp rotates, the inner wall of a workpiece to be processed is processed and polished by using sandpaper.

8. A method for processing boron nitride using the boron nitride processing and polishing apparatus according to any one of claims 1 to 7, characterized by, During the polishing process, the light-emitting element irradiates the workpiece to be processed. The glossiness of the inner wall of the workpiece to be processed is observed to determine whether the workpiece to be processed is polished to the right position. The support frame is rotatably provided with a rolling wheel set. The clamp is abutted against the rolling wheel set. The rolling wheel set comprises a plurality of rolling wheels.

9. The method of claim 8, wherein the boron nitride machining abrasive is a boron nitride powder having a particle size of 0.1 to 10 μm. The rolling wheels are arranged along the circumference of the clamp. The central axes of the rolling wheels are parallel to the rotation axis of the clamp. The driving mechanism comprises a motor, a rotating shaft and a chuck. The motor is connected with one end of the rotating shaft.

10. The method of claim 8, wherein the boron nitride machining abrasive is a boron nitride powder having a particle size of 0.1 to 10 μm. The chuck is connected with the other end of the rotating shaft. The clamp is clamped on the chuck. The boron nitride processing and polishing device further comprises a protective cover. The protective cover is arranged outside the clamp, the rotating shaft and the chuck. The protective cover is connected with the motor shell of the motor. The boron nitride processing and polishing device further comprises a reset button. The reset button is in electrical connection with the driving mechanism. The boron nitride processing and polishing device further comprises an emergency stop knob. The emergency stop knob is in electrical connection with the driving mechanism. The application further discloses a boron nitride processing and polishing method. The method comprises the following steps. In step S1, a workpiece to be processed is placed in the containing cavity of the clamp, and the light-emitting element is started. In step S2, the rotation speed of the clamp is adjusted, the foot switch is stepped on, and the clamp is driven to rotate by the driving mechanism. In step S3, different mesh numbers of sandpaper are used to polish the inner wall of the workpiece to be processed until a set condition is reached. In step S4, the foot switch is stepped on again to stop the rotation of the clamp. In step S3, different mesh numbers of sandpaper are used to polish the inner wall of the workpiece to be processed. In step S31, first set mesh number of sandpaper is used to coarsely polish the inner wall of the workpiece to be processed until the protruding steps on the surface of the inner wall of the workpiece to be processed are polished flat. In step S32, second set mesh number of sandpaper is used to polish the inner wall of the workpiece to be processed. The second set mesh number is greater than the first set mesh number. In step S33, third set mesh number of sandpaper is used to polish the inner wall of the workpiece to be processed. The third set mesh number is greater than the second set mesh number. The set condition further comprises that the light-emitting element irradiates the inner wall surface of the workpiece to be processed with consistent weak light.

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