Measuring device for low-temperature hall measurements

Abstract

A measuring device for low-temperature Hall measurement includes a sample holder, four conductive probes, a liquid nitrogen conduit, and a liquid nitrogen tank. The sample holder is used to be placed on a test bench, and includes a receiving part and a supporting part. The receiving part has a receiving groove and a surrounding wall, and the surrounding wall is provided with a through mounting hole. The supporting part is annular and has a flow-through opening, and is used to support a sample so that the supporting part and the bottom surface of the sample enclose a receiving space in communication with the receiving groove through the flow-through opening. Each conductive probe is used to be electrically connected with a circuit for low-temperature Hall measurement, and each conductive probe includes a needle body used to press a corresponding part of the sample supported on the supporting part and form an ohmic contact. The liquid nitrogen conduit has a first end and a second end, the liquid nitrogen conduit is open at the first end, the liquid nitrogen conduit passes through the mounting hole and extends into the receiving part so that the slotted opening is in communication with the receiving groove, and the liquid nitrogen conduit is communicated with the liquid nitrogen tank at the second end. The liquid nitrogen tank is located outside the test bench, and is used to store and provide liquid nitrogen.

Description

Technical Field

[0001] This disclosure relates to the field of Hall measurement, and more specifically to a measuring device for low-temperature Hall measurement. Background Technology

[0002] Currently, for high-purity germanium products with a purity of 12-13N, the impurity concentration of high-purity germanium is determined by using germanium thin sheets to make ohmic electrodes, forming good ohmic contact, and then using a Hall effect meter to perform low-temperature Hall effect measurement. The measured carrier concentration is the impurity concentration.

[0003] Figure 1 This is a three-dimensional view of a sample holder for a known measuring device used in low-temperature Hall effect measurements. Figure 2 yes Figure 1 A top view showing the sample. For example, sample 300 can be, but is not limited to, a high-purity germanium single-crystal wafer or a mercury cadmium telluride wafer.

[0004] Figure 1 The sample holder 11' of the measuring device 100' for cryogenic Hall effect measurement is used to place the device on the test stage. The sample holder 1' includes a receiving part 11' and a support part 12'. The mounting hole 112a' of the receiving part 11' is used to install a liquid nitrogen tube (not shown) and a liquid nitrogen tank (not shown). The sample holder 11' is typically made of plastic (e.g., PP).

[0005] The receiving part 11' has a receiving groove 111' and a surrounding wall 112'. The receiving groove 111' is open to the top and closed around the sides and bottom. The surrounding wall 112' surrounds the receiving groove 111' and has a through mounting hole 112a'.

[0006] The support portion 12' is located inside the receiving groove 111' and protrudes upward. The support portion 12' is disc-shaped and has a flat upper surface 121'. The upper surface 121' is used to support the sample 300 for low-temperature Hall measurement. The height difference between the support portion 12' and the surrounding wall 112' of the receiving portion 11' in the vertical direction D1 is set to be greater than the thickness of the sample 300.

[0007] The sample 300, supported on the support 12', is pressed against four solder points 300a by four probes (not shown), which are electrically connected to the circuitry of the test stage. Then, liquid nitrogen is poured into the receiving groove 111' through a liquid nitrogen bath and liquid nitrogen tube to immerse the sample 300. The liquid nitrogen in the receiving groove 111' cools the sample 300 and creates the cryogenic measurement environment required for low-temperature Hall effect measurements.

[0008] like Figure 1 and Figure 2As shown, the upper surface 121' of the support 12' is a flat surface. After the four probes press against the four solder points 300a of the sample 300, the sample 300 will be tightly attached to the upper surface 121' of the support 12'. When liquid nitrogen is supplied to the receiving groove 111' through the liquid nitrogen tank and liquid nitrogen tube to immerse the sample 300, the liquid nitrogen will cool the sample 300 from the top and the periphery. The cooling of the sample 300 from the bottom requires the receiving groove 111' to conduct heat through the sample holder 11' to the junction between the sample 300 and the upper surface 121' of the support 12'. This will cause a large difference in cooling between the top and periphery of the sample 300 and the bottom of the sample 300, which is not conducive to the uniform and synchronous cooling of the sample 300 to the low temperature required for low temperature Hall effect measurement. In addition, if the coefficient of thermal expansion of sample 300 varies with temperature, such as thermal expansion and contraction or thermal contraction and expansion (e.g., high-purity germanium single crystal wafer), the large cooling difference between the top and periphery of sample 300 and the bottom of sample 300 may cause large warping of sample 300. This warping will adversely affect the corresponding contact between the four probes and the four solder points 300a, and thus affect the measurement results of low-temperature Hall effect measurement.

[0009] In addition, Figure 1 and Figure 2 In the sample holder 11', since the receiving groove 111' and the disc-shaped support 12' are concentric circles, in order to allow the receiving groove 111' to hold more liquid nitrogen to meet the needs of immersing the sample 300 and the requirements of the low temperature measurement environment, the radial width of the receiving groove 111' is made larger. Although this can shorten the time required to reach the low temperature of the low temperature measurement environment, the consumption of liquid nitrogen is large, and a balance needs to be made between the consumption of liquid nitrogen and the time required to reach the low temperature of the low temperature measurement environment. Summary of the Invention

[0010] In view of the problems existing in the prior art, the purpose of this disclosure is to provide a measuring device for cryogenic Hall measurement that can reduce the cooling difference between the liquid nitrogen above and around the sample and the sample below.

[0011] Therefore, a measuring device for low-temperature Hall effect measurement is provided, comprising a sample holder, four conductive probes, a liquid nitrogen conduit, and a liquid nitrogen bath. The sample holder is used to place the sample on a test stage and includes a receiving portion and a supporting portion. The receiving portion has a receiving groove and a surrounding wall; the receiving groove is open upwards and closed on all sides and bottom, and the surrounding wall surrounds the receiving groove and has a through mounting hole. The supporting portion is located within the receiving groove and protrudes upwards. The supporting portion is annular and has a flow port communicating with the receiving portion. The supporting portion supports the sample for low-temperature Hall effect measurement so that the bottom surface of the supporting portion and the sample forms a receiving space communicating with the receiving groove via the flow port. The height difference between the supporting portion and the surrounding wall of the receiving portion in the vertical direction is set to be greater than the thickness of the sample. Each conductive probe is used for electrical connection with the circuit of the low-temperature Hall effect measurement. Each conductive probe includes a needle body, which presses down on the corresponding part of the sample supported on the supporting portion to form an ohmic contact. The liquid nitrogen conduit has a first end and a second end. The first end is open, and the conduit passes through a mounting hole in the receiving part and extends into the receiving part to communicate with the receiving groove. The second end of the conduit is connected to a liquid nitrogen tank. The liquid nitrogen tank is located outside the test stage and is used to store and supply liquid nitrogen. During cryogenic Hall effect measurement, the sample holder is placed on the test stage, the sample is supported on the support and held in place by four conductive probes, and liquid nitrogen in the liquid nitrogen tank is supplied to the receiving groove through the communication with the liquid nitrogen conduit to immerse the sample. The liquid nitrogen also enters the receiving space enclosed by the support and the bottom surface of the sample through the communication between the receiving groove and the flow port.

[0012] The beneficial effects of this disclosure are as follows.

[0013] In the measuring apparatus for low-temperature Hall effect measurement disclosed herein, after liquid nitrogen is supplied to the receiving groove through a liquid nitrogen tank and a liquid nitrogen conduit to immerse the sample, the liquid nitrogen cools the sample from above, around, and below (i.e., from the receiving space enclosed by the support and the bottom surface of the sample). This significantly reduces the cooling difference between the top and around the sample and the bottom of the sample due to the connection of the liquid nitrogen in the receiving space and the receiving groove, facilitating uniform and synchronous cooling of the sample to the required low temperature for low-temperature Hall effect measurement. Furthermore, because the cooling difference between the top and around the sample and the bottom of the sample is not as large as in the prior art, even if the sample's coefficient of thermal expansion varies with temperature, the risk of sample warping caused by the cooling difference between the top and around the sample and the bottom of the sample is greatly reduced. That is, the sample can more easily shrink (for samples that expand with temperature) or expand (for samples that shrink with temperature) and remain flat, thereby avoiding the adverse effects of large warping on the corresponding contact between the four probes and the sample, and thus ensuring the measurement results of the low-temperature Hall effect measurement. Attached Figure Description

[0014] Figure 1This is a three-dimensional view of a sample holder for a known measuring device used in low-temperature Hall effect measurements.

[0015] Figure 2 yes Figure 1 A top view showing the sample.

[0016] Figure 3 This is a perspective view of a measuring apparatus for low-temperature Hall effect measurement according to the present disclosure, wherein the sample is shown in dashed lines.

[0017] Figure 4 yes Figure 3 A three-dimensional image viewed from another angle.

[0018] Figure 5 This is a three-dimensional view of the sample holder for the measuring device.

[0019] Figure 6 yes Figure 5 A three-dimensional image viewed from another angle.

[0020] Figure 7 yes Figure 5 A top view, in which for ease of comparison with Figure 2 Comparison, showing Figure 2 The outline.

[0021] Figure 8 This is a three-dimensional view of one of the conductive probes in the measuring device.

[0022] Figure 9 This is a three-dimensional view of the liquid nitrogen conduit of the measuring device.

[0023] Figure 10 This is a three-dimensional view of the liquid nitrogen tank used for measurement.

[0024] Figure 11 This is a three-dimensional diagram of the liquid nitrogen pipeline of the measuring device.

[0025] Figure 12 This is a three-dimensional diagram of the magnet used in the measuring device.

[0026] The reference numerals in the attached figures are explained as follows:

[0027] 100' Measuring Device 131 Perforation

[0028] D1 Up and down direction 14 connecting part

[0029] 1' Sample holder 141 through hole

[0030] 11' Containment section 2 conductive probes

[0031] 111' Receiving groove 21 needle body

[0032] 112' Enclosure 22 Elastic Plate

[0033] 112a' Mounting Hole 3 Liquid Nitrogen Conduit

[0034] 112b' inner surface 31 first end

[0035] 12' Support part 32 Second end

[0036] 121' upper surface 33 slot

[0037] 100 Measuring Apparatus 4 Liquid Nitrogen Bath

[0038] D1 vertical direction 5 liquid nitrogen pipes

[0039] 1 Sample holder S containment space

[0040] 11 containment sections, 6 magnets

[0041] 111 Receiving groove 61 First magnetic pole

[0042] 112 Enclosure 62 Second Magnetic Pole

[0043] 112a mounting hole 200 test stand

[0044] 112b inner surface 300 sample

[0045] 12 Support Part 300a Solder Point

[0046] 121 Flow Port 400 Auxiliary Station

[0047] 122 bottom 400a channel

[0048] 13 Outer Ring 500” Imaginary Inner Surface Detailed Implementation

[0049] The accompanying drawings illustrate embodiments of this disclosure, and it will be understood that the disclosed embodiments are merely examples of this disclosure, which can be implemented in various forms. Therefore, the specific details disclosed herein should not be construed as limiting, but are intended only as the basis for the claims and as an illustrative basis to teach those skilled in the art how to implement this disclosure in various ways.

[0050] Reference Figures 3 to 12 The measuring apparatus 100 for cryogenic Hall effect measurement according to this disclosure includes a sample holder 1, four conductive probes 2, a liquid nitrogen conduit 3, and a liquid nitrogen tank 4.

[0051] The sample holder 1 is used to place the sample on the test stage 200. The sample holder 1 includes a receiving part 11 and a support part 12. The receiving part 11 has a receiving groove 111 and a surrounding wall 112. The receiving groove 111 is open upward and closed around the sides and bottom. The surrounding wall 112 surrounds the receiving groove 111 and has a through mounting hole 112a. The support part 12 is located inside the receiving groove 111 and protrudes upward. The support part 12 is annular and has a flow port 121 communicating with the receiving part 11. The support part 12 is used to support the sample 300 for low-temperature Hall measurement so that the support part 12 and the bottom surface of the sample 300 form a receiving space S communicating with the receiving groove 111 through the flow port 121. The height difference between the support part 12 and the surrounding wall 112 of the receiving part 11 in the vertical direction D1 is set to be greater than the thickness of the sample 300.

[0052] Each conductive probe 2 is used for electrical connection with a circuit (not shown) for low-temperature Hall measurement. Each conductive probe 2 includes a needle body 21, which is used to press down on the corresponding part of the sample 300 supported on the support 12 and form an ohmic contact.

[0053] The liquid nitrogen conduit 3 has a first end 31 and a second end 32. The liquid nitrogen conduit 3 is open at the first end 31. The liquid nitrogen conduit 3 passes through the mounting hole 112a of the receiving part 11 and extends into the receiving part 11 so that the slot 33 communicates with the receiving groove 111. The liquid nitrogen conduit 3 is connected to the liquid nitrogen tank 4 at the second end 32.

[0054] Liquid nitrogen tank 4 is located outside test bench 200. Liquid nitrogen tank 4 is used to store and supply liquid nitrogen.

[0055] During low-temperature Hall effect measurement, the sample holder 1 is placed on the test stage 200, the sample 300 is supported on the support part 12 and pressed down by four conductive probes 2, the liquid nitrogen in the liquid nitrogen tank 4 is supplied to the receiving groove 111 through the connection with the liquid nitrogen conduit 3 to immerse the sample 300, and the liquid nitrogen enters the receiving space S formed by the support part 12 and the bottom surface of the sample 300 through the connection between the receiving groove 111 and the flow port 121.

[0056] In the measuring apparatus 100 for low-temperature Hall effect measurement disclosed herein, after liquid nitrogen is supplied to the receiving groove 111 through the liquid nitrogen tank 4 and the liquid nitrogen conduit 3 to immerse the sample 300, the liquid nitrogen will cool the sample 300 from above, around and below (i.e. from the receiving space S enclosed by the support 12 and the bottom surface of the sample 300). In this way, the cooling difference between the upper and lower parts of the sample 300 and the lower part of the sample 300 is greatly reduced due to the connection between the receiving space S and the liquid nitrogen in the receiving groove 111, which is beneficial to uniformly and synchronously cooling the sample 300 to the low temperature required for low-temperature Hall effect measurement. Furthermore, since there is no significant difference in cooling between the top and periphery of sample 300 and the bottom of sample 300 as in the prior art, even if the coefficient of thermal expansion of sample 300 varies with temperature, the risk of warping of sample 300 caused by the cooling difference between the top and periphery of sample 300 and the bottom of sample 300 is greatly reduced. That is, sample 300 can more easily shrink as a whole (for sample 300 that expands with temperature) or expand (for sample 300 that shrinks with temperature) and remain flat, thereby avoiding the adverse effects of large warping on the corresponding contact between the needle body 21 of the four probes 2 and sample 300, thus ensuring the measurement results of low-temperature Hall effect measurement.

[0057] Sample 300 can be any suitable sample. For example, sample 300 can be, but is not limited to, a high-purity germanium single-crystal wafer or a mercury cadmium telluride wafer. In one example, sample 300 can be coupled with... Figure 2 There are four solder points.

[0058] In one example, such as Figure 5 and Figure 6 As shown, the flow port 121 is a part of the annular support portion 12 in the vertical direction D1 and opens upward, that is, in addition to the opening on one side that communicates with the receiving groove 111, it also opens upward. The upward opening increases the cooling area of ​​liquid nitrogen on the sample 300 at the flow port 121.

[0059] In one example, such as Figure 5 and Figure 6 As shown and combined Figure 3 The bottom surface 122 of the receiving space S surrounded by the annular support 12 is flush with the bottom edge of the flow port 121, thereby making the cooling distance of each point on the bottom surface 122 to the sample 300 the same in the vertical direction.

[0060] In one example, the outer contour of the receiving groove 111 is rectangular; the outer contour of the annular support 12 is also rectangular. Further, as... Figures 3 to 7 As shown, the outer contour of the receiving groove 111 is a rectangle with rounded corners; the outer contour of the annular support 12 is also a rectangle with rounded corners. Figures 5 to 7In this example, a better balance can be struck between the consumption of liquid nitrogen and the time required to reach the cryogenic measurement environment. (Refer to...) Figure 7 In order to facilitate communication with Figure 2 Compare, Figure 7 Show Figure 2 The contour of the container groove 111'. When it is necessary to reduce the consumption of liquid nitrogen, this can be achieved by reducing the radial width of the container groove 111', for example, by moving the inner surface 112b' of the enclosure 112' radially inward to the imaginary inner surface 500". However, doing so would cause the amount of liquid nitrogen to decrease too much due to the reduction in volume between the support 12' and the imaginary inner surface 500", which would increase the time to reach the low temperature of the cryogenic measurement environment too much. If the rectangular shape of the sample 300 being tested is taken into account, the outer contour of the annular support 12 is changed to a rectangle and the outer contour of the container groove 111 is changed to a rectangle (i.e., the inner surface 112b of the enclosure 112 forms a rectangle). In this way, the container groove 111 of this disclosure is reduced in volume by less than that of the container groove 111' of the prior art when simply using the annular reduction (i.e., the imaginary inner surface 500"), thus balancing the consumption of liquid nitrogen and the time to reach the low temperature of the cryogenic measurement environment.

[0061] In one example, the support portion 12 protrudes upward from the receiving groove 111 by a height of 8 mm; the outer contour of the support portion 12 is at least large enough to support a sample 300 with a diameter of 50 mm or a planar dimension of 20 mm × 30 mm. The width of the support portion 12 is sufficient to allow the probe body 21 of the probe 2 to press against the sample 300.

[0062] like Figure 5 and Figure 6 As shown, the sample holder 1 also includes an outer ring portion 13 and a connecting portion 14. The outer ring portion 13 surrounds and connects to the receiving portion 11 from the outside. The connecting portion 14 is located inside the outer ring portion 13 and its two ends are respectively connected to the surrounding wall 112 of the receiving portion 11 and the outer ring portion 13. The outer ring portion 13 has a through hole 131, and the connecting portion 14 has a through hole 141. The through hole 131 of the outer ring portion 13, the through hole 141 of the connecting portion 14, and the mounting hole 112a of the surrounding wall 112 form a mounting channel for the liquid nitrogen conduit 3 to pass through. The use of the outer ring portion 13 and the connecting portion 14 not only saves materials and enhances the protection of the receiving portion 11, but also enhances the overall structural strength of the sample holder 1.

[0063] The needle body 21 of each conductive probe 2 can be made of silver-plated copper. The diameter of the needle body 21 can be 0.9 mm and the length can be 1 cm.

[0064] like Figure 8 As shown and combined Figure 3 and Figure 4Each conductive probe 2 also includes an elastic plate 22. The needle body 21 is fixed to one end of the elastic plate 22 to press the corresponding part of the sample 300 supported on the support part 12 and form an ohmic contact using the elastic force of the elastic plate 22. The elastic plate 22 is used to ensure that each conductive probe 2 is fixed to the test stage 200 and electrically connected to the circuitry within the test stage 200. Similarly, the elastic plate 22 can be made of copper and can be fixed to the test stage 200 by screws (not shown). By adjusting the position of the screws, the position of the needle body 21 of each conductive probe 2 relative to the sample 300 is adjustable to accommodate measurements of samples 300 of different sizes.

[0065] The liquid nitrogen conduit 3 can be made of, but is not limited to, stainless steel. For further controllable flow of liquid nitrogen, as shown in Figure 9, and in conjunction with… Figure 3 and Figure 4 The liquid nitrogen conduit 3 has a slot 33 located at the first end 31 and formed on the peripheral wall 34 of the liquid nitrogen conduit 3. The area of ​​the slot 33 is smaller than the cross-sectional area of ​​the inner surface of the peripheral wall 32 of the liquid nitrogen conduit 3 at the first end 31. The slot 33 preferably opens upwards and to the left / right, which helps control the flow rate of liquid nitrogen flowing out of the slot 33. If the slot 33 opens downwards and to the left / right, the flow rate will increase due to gravity. In one example, the dimensions of the slot 33 are 4mm × 8mm; the diameter of the mounting hole 112a is 7.5mm.

[0066] Liquid nitrogen tank 4 can be made of boron nitride and encased in 304 stainless steel.

[0067] Reference Figure 3 , Figure 4 and Figure 11 The measuring apparatus 100 also includes a liquid nitrogen conduit 5. The liquid nitrogen conduit 5 passes through an auxiliary platform 400 connected to the test stage 200 for cryogenic Hall effect measurement; the second end 32 of the liquid nitrogen conduit 3 extends into the auxiliary platform 400. The liquid nitrogen conduit 5 passes through the auxiliary platform 400, with one end connected to the second end 32 of the liquid nitrogen conduit 3 (e.g., with an interference fit) and the other end connected to the liquid nitrogen tank 4. The arrangement of the liquid nitrogen conduit 5 increases the path from the liquid nitrogen tank 4 to the receiving recess 111, making flow control of liquid nitrogen more convenient, and consequently, making consumption control of liquid nitrogen more convenient. The liquid nitrogen conduit 5 can be made of, but is not limited to, stainless steel. In one example, the outer diameter of the liquid nitrogen conduit 5 is 10 mm and the inner diameter is 6 mm. (Refer to...) Figure 10 A small hole 41 with a diameter of 4 mm is provided at the part where the liquid nitrogen tank 4 connects to the liquid nitrogen pipe 5. The volume of the liquid nitrogen tank 4 is 47 mL. The small hole 41 with a diameter of 4 mm allows for better control of the flow rate of liquid nitrogen, which in turn allows for better control of the flow rate of liquid nitrogen that finally reaches the receiving groove 111, and thus better control of the consumption of liquid nitrogen.

[0068] Reference Figure 3 , Figure 4 and Figure 12 The measuring device 100 also includes a magnet 6. The magnet 6 is disposed within the channel 400a of the auxiliary stage 400 of the low-temperature Hall effect measurement device, which is connected to the test stage 200. The magnet 6 has a first magnetic pole 61 and a second magnetic pole 62, which are spaced apart vertically by a distance D1. The first and second magnetic poles 61 and 62 are used to shift to the sample stage directly above and below the sample holder 1 when the sample 300 is supported on the support portion 12 of the sample holder 1 and forms ohmic contact with the four conductive probes 2, thereby applying a magnetic field to the sample 300. When a magnetic field reversal is required, the magnet 6 can simply be inverted. The spacing and area of ​​the first and second magnetic poles 61 and 62 can be determined according to the requirements of the sample 300 being tested.

[0069] Several exemplary embodiments have been described in detail above, but this document is not intended to limit itself to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined to form several other combinations, which are not shown for simplicity.

Claims

1. A measuring device for low-temperature Hall effect measurement, characterized in that, The measuring device (100) includes a sample holder (1), four conductive probes (2), a liquid nitrogen conduit (3), and a liquid nitrogen bath (4); The sample holder (1) is used to place the test stage (200). The sample holder (1) includes a receiving part (11) and a support part (12). The receiving part (11) has a receiving groove (111) and a surrounding wall (112). The receiving groove (111) is open to the top and closed around the sides and bottom. The surrounding wall (112) surrounds the receiving groove (111) and has a through mounting hole (112a). The support (12) is located inside the receiving groove (111) and protrudes upward. The support (12) is annular and has a flow port (121) communicating with the receiving part (11). The support (12) is used to support the sample (300) of the low temperature Hall measurement so that the bottom surfaces of the support (12) and the sample (300) form a receiving space (S) communicating with the receiving groove (111) through the flow port (121). The height difference between the walls (112) of the support (12) and the receiving part (11) in the vertical direction (D1) is set to be greater than the thickness of the sample (300). Each conductive probe (2) is used to be electrically connected to the circuit of low temperature Hall measurement. Each conductive probe (2) includes a needle body (21), which is used to press the corresponding part of the sample (300) supported on the support (12) and form an ohmic contact. The liquid nitrogen conduit (3) has a first end (31), a second end (32) and a slot (33). The liquid nitrogen conduit (3) is open at the first end (31). The liquid nitrogen conduit (3) passes through the mounting hole (112a) of the receiving part (11) and extends into the receiving part (11) so that the slot (33) communicates with the receiving groove (111). The second end (32) of the liquid nitrogen conduit (3) is connected to the liquid nitrogen tank (4). The liquid nitrogen tank (4) is located outside the test bench (200) and is used to store and supply liquid nitrogen. During low-temperature Hall effect measurement, the sample holder (1) is placed on the test stage (200), the sample (300) is supported on the support (12) and pressed down by four conductive probes (2), the liquid nitrogen in the liquid nitrogen tank (4) is supplied to the receiving groove (111) through the connection with the liquid nitrogen conduit (3) to immerse the sample (300), and the liquid nitrogen enters the receiving space (S) formed by the support (12) and the bottom surface of the sample (300) through the connection between the receiving groove (111) and the flow port (121).

2. The measuring device for low-temperature Hall effect measurement according to claim 1, characterized in that, The flow port (121) is a part of the annular support (12) in the vertical direction (D1) and opens upward.

3. The measuring device for low-temperature Hall effect measurement according to claim 1, characterized in that, The bottom surface (122) of the receiving space (S) surrounded by the annular support (12) is flush with the bottom edge of the flow port (121).

4. The measuring device for low-temperature Hall effect measurement according to claim 1, characterized in that, The outer contour of the receiving groove (111) is rectangular, and the outer contour of the annular support (12) is rectangular; or The outer contour of the receiving groove (111) is a rectangle with rounded corners on all four sides, and the outer contour of the annular support (12) is a rectangle with rounded corners on all four sides.

5. The measuring device for low-temperature Hall effect measurement according to claim 1, characterized in that, The support part (12) protrudes upward from the receiving groove (111) by a height of 8 mm; The outer contour of the support (12) is at least large enough to support a sample (300) with a diameter of 50 mm or a planar dimension of 20 mm × 30 mm.

6. The measuring device for low-temperature Hall effect measurement according to claim 1, characterized in that, The sample holder (1) also includes an outer ring (13) and a connecting part (14). The outer ring (13) surrounds the containment section (11) from the outside and is connected to the containment section (11). The connecting part (14) is located inside the outer ring part (13) and its two ends are respectively connected to the enclosure wall (112) of the receiving part (11) and the outer ring part (13). The outer ring (13) has a perforation (131), and the connecting part (14) has a through hole (141). The perforation (131) of the outer ring (13), the through hole (141) of the connecting part (14), and the mounting hole (112a) of the enclosure (112) form an installation channel for the liquid nitrogen conduit (3) to pass through.

7. The measuring device for low-temperature Hall effect measurement according to claim 1, characterized in that, The slot (33) opens upward and to the left / right. The slot (33) is located at the first end (31) and is opened on the peripheral wall of the liquid nitrogen conduit (3). The area of ​​the slot (33) is smaller than the cross-sectional area of ​​the inner surface of the peripheral wall of the liquid nitrogen conduit (3) at the first end (31).

8. The measuring device for low-temperature Hall effect measurement according to claim 7, characterized in that, The dimensions of the slot (33) are 4 mm × 8 mm; The diameter of the mounting hole (112a) is 7.5 mm.

9. The measuring device for low-temperature Hall effect measurement according to claim 1, characterized in that, The measuring device (100) also includes a liquid nitrogen pipeline (5). The liquid nitrogen pipeline (5) is used to pass through the auxiliary platform (400) connected to the test platform (200) for cryogenic Hall measurement. The second end (32) of the liquid nitrogen conduit (3) extends into the auxiliary platform (400); The liquid nitrogen pipe (5) passes through the auxiliary platform (400). One end of the liquid nitrogen pipe (5) is connected to the second end (32) of the liquid nitrogen conduit (3), while the other end of the liquid nitrogen pipe (5) is connected to the liquid nitrogen tank (4).

10. The measuring device for low-temperature Hall effect measurement according to claim 9, characterized in that, The outer diameter of the liquid nitrogen pipeline (5) is 10 mm and the inner diameter is 6 mm; A small hole (41) with a diameter of 4 mm is opened at the part where the liquid nitrogen tank (4) connects to the liquid nitrogen pipeline (5), and the volume of the liquid nitrogen tank (4) is 47 mL.

Images