A substrate loading fixture and a coating device

Abstract

The present invention relates to the technical field of thin film preparation, and discloses a substrate loading fixture and a coating device. The substrate loading fixture includes a mother loading table and a son loading table. The son loading table includes a frame and a placement surface arranged on the frame. The frame is placed on the mother loading table, and the frame is detachably connected to the mother loading table. The placement surface is provided with a preset curvature, and the placement surface is used to carry a substrate adapted to its curvature. In the present invention, the placement surface of the son loading table is provided with a preset curvature for placing a substrate adapted to its curvature, and thus for coating a substrate with a preset curvature, without changing the target-substrate distance and without affecting the coating process; the frame of the son loading table is detachably connected to the mother loading table. By replacing the son loading table with different preset curvatures on the mother loading table, the mother loading table can be compatibly loaded with substrates of different curvatures, maximizing the value of the mother loading table and effectively saving the cost of the substrate loading fixture.

Description

Technical Field

[0001] The present invention relates to the technical field of thin film preparation, and in particular to a substrate loading jig and a film coating device. Background Art

[0002] In recent years, the market for electronic products such as smartphones and tablets has boomed. The corresponding improvement in the quality of these smart devices has also placed higher demands on the coating technology used in the touch screens of these products. Improving coating efficiency and quality, and expanding the scope of coating applications, are the goals of vacuum coating technology. Among these, achieving compatibility with substrates of varying sizes without compromising lateral uniformity is a key focus of coating technology development.

[0003] Currently, the application of automated magnetron sputtering coating machines is becoming increasingly widespread. For substrate coating, the two main technical indicators are film thickness uniformity and production capacity. In the coating industry, especially in the automotive market, the large size of automotive glass requires that the glass loading fixtures manufactured to match the glass also be processed to match. Furthermore, the curvature of automotive glass varies from vehicle to vehicle, necessitating glass loading fixtures with varying curvatures, further increasing costs. Therefore, for customers, maximizing equipment utilization while simultaneously reducing costs is also a key consideration.

[0004] Therefore, there is an urgent need for a substrate loading fixture and a coating device to solve the above problems. Summary of the invention

[0005] Based on the above, the purpose of the present invention is to provide a substrate loading fixture and a coating device that can fully utilize the equipment to load substrates with different curvatures at a low cost.

[0006] To achieve the above object, the present invention adopts the following technical solutions:

[0007] A substrate loading jig, comprising:

[0008] mother loading platform;

[0009] The sub-loading platform includes a frame and a placement surface arranged on the frame. The frame is placed on the mother loading platform. The frame is detachably connected to the mother loading platform. The placement surface is provided with a preset curvature and is used to carry a substrate adapted to its curvature.

[0010] As a preferred solution of the substrate loading jig, a loading block is provided on the inner side of the sub-loading platform, and the substrate abuts against the loading block.

[0011] As a preferred solution of the substrate loading jig, the loading block is provided with a loading groove, and the substrate is placed in the loading groove.

[0012] As a preferred solution of a substrate loading fixture, four loading blocks are provided, and the four loading blocks are respectively arranged in pairs opposite to each other, and four sides of the substrate are in contact with the loading blocks.

[0013] As a preferred solution of a substrate loading fixture, the sub-loading table is provided with a clamping assembly, and the clamping assembly is in contact with a surface of the substrate away from the placement surface to fix the substrate.

[0014] As a preferred solution of a substrate loading fixture, the clamping assembly includes a base and a clamping block. The base is arranged on the placement surface and / or the frame, and the clamping block can slide relative to the base in a direction tangent to a surface of the substrate away from the placement surface and can be in contact with the surface of the substrate away from the placement surface.

[0015] As a preferred solution of a substrate loading fixture, the substrate loading fixture further includes a transfer rack, and the transfer rack is connected to the mother loading table.

[0016] As a preferred solution of a substrate loading fixture, the transfer rack is arranged in a frame structure, and the mother loading table is placed inside the transfer rack.

[0017] As a preferred solution of a substrate loading fixture, a first connection hole is provided on the mother loading table, and a second connection hole is provided on the sub-loading table. A connection bolt passes through the first connection hole and the second connection hole to connect the mother loading table and the sub-loading table.

[0018] A coating device includes the substrate loading fixture according to any one of the above solutions.

[0019] The beneficial effects of the present invention are as follows:

[0020] In the present invention, the placement surface of the sub-loading table is provided with a preset curvature for placing a substrate adapted to its curvature, and then for coating a substrate with a preset curvature, without changing the target-substrate distance and without affecting the coating process; further, the frame of the sub-loading table is detachably connected to the mother loading table. By replacing the sub-loading table with different preset curvatures on the mother loading table, the mother loading table can be compatible with substrates of different curvatures, maximizing the value of the mother loading table and effectively saving the cost of the substrate loading fixture. Description of the Drawings

[0021] To more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the accompanying drawings required for the description of the embodiments of the present invention. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can be obtained based on the content of the embodiments of the present invention and these accompanying drawings.

[0022] Figure 1 is an exploded schematic view of a substrate loading jig and a substrate provided in a specific embodiment of the present invention;

[0023] Figure 2 is a schematic view of a substrate loading jig and a substrate provided in a specific embodiment of the present invention;

[0024] Figure 3 is Figure 2 a partial enlarged schematic view at position A in

[0025] Figure 4 is Figure 2 a partial enlarged schematic view at position B in.

[0026] In the figure:

[0027] 100, substrate;

[0028] 1, mother loading table;

[0029] 2, sub-loading table; 21, frame; 22, placement surface; 23, loading block; 24, clamping assembly; 241, base; 242, clamping block; 2421, chute; 2422, clamping bolt;

[0030] 3, transfer rack. Specific Embodiments

[0031] To make the technical problems solved by the present invention, the technical solutions adopted, and the achieved technical effects clearer, the following will further describe in detail the technical solutions of the embodiments of the present invention with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present invention.

[0032] As Figures 1-4 shown, this embodiment provides a substrate loading jig for a coating device. The substrate loading jig includes a mother loading table 1 and a sub-loading table 2. The sub-loading table 2 includes a frame 21 and a placement surface 22 provided on the frame 21. The frame 21 is placed on the mother loading table 1, and the frame 21 is detachably connected to the mother loading table 1. The placement surface 22 is provided with a preset curvature, and the placement surface 22 is used to carry a substrate 100 adapted to its curvature.

[0033] By setting the placement surface 22 of the sub-loading table 2 to have a preset curvature, it is used to place the substrate 100 adapted to its curvature, and then for coating the substrate 100 with a preset curvature, without changing the target-substrate distance and without affecting the coating process; further, the frame 21 of the sub-loading table 2 is detachably connected to the mother-loading table 1. By replacing the sub-loading table 2 with different preset curvatures on the mother-loading table 1, the mother-loading table 1 can compatibly load substrates 100 with different curvatures, maximizing the value of the mother-loading table 1 and effectively saving the cost of the substrate loading fixture.

[0034] In this embodiment, the mother-loading table 1 is set as a frame structure, and the frame 21 is placed inside the mother-loading table 1. By setting the mother-loading table 1 as a frame structure, it can effectively protect the frame 21 placed therein to a certain extent, and then ensure the reliability of the substrate 100 placed on the placement surface 22.

[0035] It should be noted that the placement surface 22 is a hollow annular structure provided on the inner side of the frame 21, and one side surface of the substrate 100 close to the placement surface 22 abuts against the surface of the hollow annular structure. On the premise of ensuring the support of the substrate 100, by setting the placement surface 22 as a hollow annular structure, on the one hand, the contact with the substrate 100 is reduced, thereby reducing the wear of the substrate 100, and on the other hand, it is beneficial to reduce the overall weight of the substrate loading fixture.

[0036] As an alternative solution for a substrate loading fixture, to achieve the detachable connection between the frame 21 and the mother-loading table 1, the mother-loading table 1 is provided with first connection holes, and the sub-loading table 2 is provided with second connection holes. The connecting bolts pass through the first connection holes and the second connection holes to connect the mother-loading table 1 and the sub-loading table 2. It should be noted that the connecting bolts pass through the first connection holes and the second connection holes, and the connection is achieved by tightening with connecting nuts. In other embodiments, the first connection holes or the second connection holes can also be set as threaded holes, and the connecting bolts can be screwed into the threaded holes after passing through the other connection holes to also achieve the connection between the frame 21 and the mother-loading table 1. Threaded connection is reliable, easy to disassemble, and reusable.

[0037] As an alternative solution for a substrate loading fixture, to achieve the loading of the substrate 100 on the sub-loading table 2, specifically, a loading block 23 is provided inside the sub-loading table 2, and the substrate 100 abuts against the loading block 23. Optionally, the loading block 23 is provided on the inner side of the frame 21 of the sub-loading table 2, and the edge of the substrate 100 abuts against the loading block 23 for achieving the loading of the substrate 100. Preferably, the loading block 23 can be set as a flexible guiding block. Such a setting can provide a flexible matching mechanism for the substrate 100 to ensure the loading of the substrate 100 is safer and more reliable.

[0038] It should be noted that the loading block 23 is detachably connected to the sub-loading table 2. By replacing the loading blocks 23 with different thicknesses, the loading of substrates 100 with different sizes can be adapted, improving the versatility and economy of the substrate loading jig.

[0039] Furthermore, a loading groove is provided on the loading block 23, enabling the edge of the substrate 100 to be placed within the loading groove, making the loading of the substrate 100 on the placement surface 22 more reliable. Exemplarily, the depth and width of the loading groove are both adapted to the thickness of the substrate 100 to be loaded, so as to achieve the loading of the substrate 100 without damaging the edge of the substrate 100.

[0040] In this embodiment, four loading blocks 23 are provided, and the four loading blocks 23 are respectively arranged in pairs opposite to each other, so that the four sides of the substrate 100 are in contact with the loading blocks 23, ensuring the reliability of loading. Optionally, the loading blocks 23 are respectively located in the middle of each side frame 21, so that the middle of the edge of the substrate 100 is in contact with the loading blocks 23, making the force on the substrate 100 more uniform, the contact more reliable, and at the same time reducing the possibility of damaging the substrate 100.

[0041] As an alternative solution for a substrate loading jig, the sub-loading table 2 is provided with a clamping assembly 24, and the clamping assembly 24 is in contact with the surface of the substrate 100 on the side away from the placement surface 22 to fix the substrate 100. Preferably, four clamping assemblies 24 are provided, and the four clamping assemblies 24 are respectively arranged at the four corners of the sub-loading table 2, so that the substrate 100 can be placed on the placement surface 22 more stably and reliably.

[0042] Specifically, the clamping assembly 24 includes a base 241 and a clamping block 242. The base 241 is arranged on the placement surface 22 and / or the side frame 21. The clamping block 242 can slide relative to the base 241 in a direction tangent to the surface of the substrate 100 on the side away from the placement surface 22 and can be in contact with the surface of the substrate 100 on the side away from the placement surface 22. When the clamping block 242 is in contact with the surface of the substrate 100 on the side away from the placement surface 22, the loading of the substrate 100 relative to the placement surface 22 can be more stable and reliable. Exemplarily, the base 241 is arranged on the placement surface 22 and is in contact with the inner side of the side frame 21.

[0043] Further, a waist-shaped chute 2421 is provided on the clamping block 242. The clamping bolt 2422 passes through the chute 2421 and is threadedly connected to the base 241. When it is necessary to pick up and place the substrate 100, the clamping bolt 2422 is screwed to enable the clamping block 242 to slide along a direction tangent to the surface of the substrate 100 away from the placement surface 22, so as to avoid interference of the clamping block 242 with the substrate 100. After the picking up and placing are completed, the position of the clamping block 242 and the substrate 100 is adjusted, and the clamping bolt 2422 is screwed to make the clamping block 242 reliably abut against the substrate 100, ensuring reliable loading while avoiding damage to the substrate 100.

[0044] Preferably, the height of the clamping block 242 relative to the placement surface 22 is adjustable to adapt to substrates 100 of different thicknesses. Exemplarily, the height of the clamping block 242 relative to the placement surface 22 can be adjusted by adding a gasket between the clamping block 242 and the base 241.

[0045] As an alternative solution of the substrate loading fixture, the substrate loading fixture further includes a transfer rack 3, and the transfer rack 3 is connected to the mother loading table 1. The transfer rack 3 is provided for cooperating with handling fixtures, mounting fixtures, etc. in the coating device to handle and mount the substrate loading fixture.

[0046] Specifically, the transfer rack 3 is detachably connected to the mother loading table 1. For the specific manner of the detachable connection, refer to the detachable connection manner between the mother loading table 1 and the sub-loading table 2, which will not be elaborated here.

[0047] In this embodiment, the transfer rack 3 is arranged in a frame structure, and the mother loading table 1 is placed inside the transfer rack 3. The transfer rack 3 in the frame structure can play a certain protective role for the mother loading table 1.

[0048] This embodiment also discloses a coating device, including the substrate loading fixture according to any one of the above solutions. This coating device only requires one mother loading table 1, and in cooperation with multiple sub-loading tables 2 with different curvatures, can be used for coating substrates 100 with different curvatures, with lower costs.

[0049] Note that the above is only the preferred embodiment of the present invention and the applied technical principles. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described here. Various obvious changes, re-adjustments and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Without departing from the concept of the present invention, more other equivalent embodiments can be included, and the scope of the present invention is determined by the scope of the appended claims.

[0050] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0051] In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

Claims

1. A substrate loading fixture, characterized in that, Comprising: A mother loading table (1); A sub-loading table (2), including a frame (21) and a placement surface (22) provided on the frame (21), the frame (21) is placed on the mother loading table (1), the frame (21) is detachably connected to the mother loading table (1), the placement surface (22) is provided with a preset curvature, and the placement surface (22) is used to carry a substrate (100) adapted to its curvature; A loading block (23) is provided inside the sub-loading table (2), and the substrate (100) abuts against the loading block (23); The substrate loading jig further includes a transfer rack (3), and the transfer rack (3) is connected to the mother loading table (1).

2. The substrate loading jig according to claim 1, wherein A loading groove is provided on the loading block (23), and the substrate (100) is placed in the loading groove.

3. The substrate loading jig according to claim 1, wherein There are four loading blocks (23), and the four loading blocks (23) are respectively arranged in pairs opposite to each other, and the four sides of the substrate (100) are all in contact with the loading blocks (23).

4. The substrate loading fixture according to claim 1, wherein The sub-loading table (2) is provided with a clamping assembly (24), and the clamping assembly (24) abuts against the surface of the substrate (100) away from the placement surface (22) to fix the substrate (100).

5. The substrate loading fixture according to claim 4, wherein The clamping assembly (24) includes a base (241) and a clamping block (242), the base (241) is provided on the placement surface (22) and / or the frame (21), and the clamping block (242) can slide relative to the base (241) in a direction tangent to the surface of the substrate (100) away from the placement surface (22), and can abut against the surface of the substrate (100) away from the placement surface (22).

6. The substrate loading fixture according to claim 1, wherein The transfer rack (3) is set as a frame structure, and the mother loading table (1) is placed inside the transfer rack (3).

7. The substrate loading fixture according to any one of claims 1-6, characterized in that, A first connection hole is provided on the mother loading table (1), and a second connection hole is provided on the sub-loading table (2). A connecting bolt passes through the first connection hole and the second connection hole to connect the mother loading table (1) and the sub-loading table (2).

8. A coating device, characterized in that, Comprising the substrate loading jig according to any one of claims 1-7.

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