A high-power laser energy homogenization and attenuation method

Abstract

The application belongs to the technical field of laser application, and particularly relates to a high-power laser energy homogenization and attenuation method, which relates to a laser energy attenuation cavity including a water inlet, a water outlet, an emission lens group, a diffuse reflection sampling cavity including an off-axis parabolic reflector, a light transmission channel, a diffuse reflection sleeve and a homogenization lens group. The laser energy attenuation cavity is filled with liquid acting as cooling water and attenuation medium, and is connected with external water cooling through the water inlet and the water outlet. High-power laser is diffusely reflected in the diffuse reflection sampling cavity through the off-axis parabolic reflector, a small part of energy is absorbed by the diffuse reflection sleeve, and the rest of the energy is spatially sampled through the light transmission channel, the sampled laser is homogenized through the homogenization lens group, and the homogenized laser is emitted into the laser energy attenuation cavity and the energy is absorbed by the attenuation liquid in the cavity. The method can attenuate high-power laser with a power density of 20kW / cm 2 for a long time, can continuously adjust the laser attenuation degree, has strong practicability, and meets the needs of industrial production and scientific research.

Description

Technical Field

[0001] This invention belongs to the field of laser application technology, and specifically relates to a method for uniform attenuation of high-power laser energy. Background Technology

[0002] With the rapid development of science and technology, the demand for high-power lasers in modern industry and scientific research is constantly increasing. Some applications, such as surface treatment, laser etching of large-scale integrated circuits, and dynamic calibration of ultra-high temperature sensors, have high requirements for the attenuation amplitude and accuracy of the laser output. The control accuracy of the voltage controllers currently used with lasers cannot meet the requirements. Therefore, the development of laser power attenuation technology is of great significance for complex and rapid industrial production and scientific research.

[0003] Existing laser energy attenuation methods fall into two categories. One type adjusts the energy by changing the control voltage, but its adjustment precision is limited, it cannot continuously adjust the laser energy, and the laser energy output is uneven. The other type attenuates the laser energy step by step using multi-stage optical devices. This attenuation device is complex to build, and due to material limitations, it cannot perform long-term energy attenuation for high-power lasers. Therefore, achieving uniform laser energy output and continuous high-precision adjustment would greatly expand the application range of high-power lasers. Summary of the Invention

[0004] (a) Technical problems to be solved

[0005] The technical problem this invention aims to solve is: addressing the inability of traditional laser energy attenuation devices to continuously adjust high-power lasers, and proposing a method for uniformly attenuating high-power laser energy, capable of attenuating a power density of 20 kW / cm² over a long period. 2 High-power laser.

[0006] (II) Technical Solution

[0007] To solve the above-mentioned technical problems, the present invention provides a method for homogenizing and attenuating high-power laser energy. The method is implemented by a high-power laser energy homogenizing and attenuating device, which includes a laser energy attenuation cavity 1 and a diffuse reflection sampling cavity 2. The diffuse reflection sampling cavity 2 is installed inside the laser energy attenuation cavity 1 via an electrically controlled guide rail 3.

[0008] The laser energy attenuation cavity 1 is a cylindrical cavity filled with energy attenuation liquid; the diffuse reflection sampling cavity 2 is moved left and right by an electrically controlled guide rail 3; the diffuse reflection sampling cavity 2 includes: an off-axis parabolic mirror 8, a light transmission channel 9, a diffuse reflection sleeve 10, and a homogenization lens group 11.

[0009] The off-axis parabolic reflector 8 disperses the incident laser into the diffuse reflection sleeve 10 by setting its position; the light transmission channel 9 is set inside the diffuse reflection sleeve 10 and is used to sample the spatial intensity of the dispersed laser; the homogenizing lens group 11 is set at the front end of the light transmission channel 9 and includes a grating and a collimating lens group, which is used to convert the dispersed light into collimated light.

[0010] The laser energy attenuation cavity 1 also includes an output lens group 6, which is positioned opposite to the diffuse reflection sampling cavity 2 and is used to output focused laser or collimated laser.

[0011] The method includes the following steps:

[0012] Step 1: The high-power laser beam diverges after passing through the off-axis parabolic mirror 8 and enters the diffuse reflection sampling cavity 2;

[0013] Step 2: A small portion of the energy is absorbed by the diffuse reflection sleeve 10 during the diffuse reflection process, while most of the energy is spatially sampled through the light transmission channel 9 and then expanded by the homogenizing lens group 11. The power density of the expanded laser is reduced and the energy distribution is more uniform.

[0014] Step 3: Then the laser enters the laser energy attenuation cavity 1, and its energy is absorbed by the attenuation liquid as it propagates through the attenuation liquid.

[0015] Step 4: Finally, the attenuated homogenized laser is output through the output lens group 6; wherein, the energy attenuation liquid in the cavity attenuates the laser energy and also acts as cooling water to cool the diffuse reflection sampling cavity 2, which is connected to the external water cooler through the water inlet 4 and the water outlet 5.

[0016] The diffuse reflection sampling cavity 2 is installed inside the laser energy attenuation cavity 1 via an electrically controlled guide rail 3. The diffuse reflection sampling cavity 2 moves left and right on the electrically controlled guide rail 3 to adjust the attenuation amplitude, controlled by a stepper motor.

[0017] The laser energy attenuation cavity 1 includes an inlet 4 and an outlet 5 for the inflow and outflow of energy attenuation liquid, thereby enabling the attenuation medium to flow in or out of the cylindrical cavity.

[0018] The energy decay liquid includes deionized water or NaCl solutions of different concentrations.

[0019] The outgoing lens group 6 includes a grating and a focusing lens or window.

[0020] The laser energy attenuation cavity 1 also includes a monitoring component 7 for acquiring liquid temperature, humidity, and scattered light intensity.

[0021] The surface of the off-axis parabolic reflector 8 is plated with a gold film.

[0022] The cross-section of the light-transmitting channel 9 consists of several symmetrical circular holes.

[0023] The diffuse reflection sleeve 10 is used to diffusely reflect the incident laser by more than 90%.

[0024] The diffuse reflection sleeve 10 is made of aluminum, copper, or an aluminum-copper alloy, and the light-receiving surface of the material is first sandblasted and then gold-plated.

[0025] (III) Beneficial Effects

[0026] This invention addresses the problems of small laser power attenuation, poor accuracy, and uneven output spot in current laser systems by proposing a method for uniform attenuation of high-power laser energy.

[0027] Compared with existing technologies, the high-power laser energy homogenization attenuation method provided by this invention involves the high-power laser beam being diffusely reflected inside the diffuse reflection sampling cavity by an off-axis parabolic mirror. A small portion of the energy is absorbed by the diffuse reflection sleeve, while the remaining energy is sampled spatially through the light transmission channel. The sampled laser is homogenized by a homogenization lens group. The homogenized laser then enters the laser energy attenuation cavity, where its energy is absorbed by the attenuation liquid. This attenuation liquid both attenuates the laser energy and acts as cooling water to cool the diffuse reflection sampling cavity. It is connected to an external water cooler through inlet and outlet ports. The high-power laser energy homogenization attenuation method provided by this invention has advantages such as simple setup, high adjustment precision, and large attenuation amplitude, and can homogenize and attenuate a power density of 20 kW / cm² for a long time. 2 High-power laser. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of a high-power laser energy homogenization and attenuation device according to an embodiment of the present invention;

[0029] Figure 2 This is a perspective view of a diffuse reflection sampling cavity according to an embodiment of the present invention;

[0030] Figure 3 This is a schematic diagram of the structure of a diffuse reflection sampling cavity according to an embodiment of the present invention.

[0031] Reference numerals in the attached figures: 1. Laser energy attenuation cavity; 2. Diffuse reflection sampling cavity; 3. Electrically controlled guide rail; 4. Water inlet; 5. Water outlet; 6. Outgoing lens group; 7. Monitoring component; 8. Off-axis parabolic mirror; 9. Light transmission channel; 10. Diffuse reflection sleeve; 11. Homogenization lens group. Detailed Implementation

[0032] To make the objectives, contents, and advantages of the present invention clearer, the specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples.

[0033] To solve the above-mentioned technical problems, the present invention provides a method for homogenizing and attenuating high-power laser energy. The method is implemented by a high-power laser energy homogenization and attenuation device, which includes a laser energy attenuation cavity 1 and a diffuse reflection sampling cavity 2. The diffuse reflection sampling cavity 2 is installed inside the laser energy attenuation cavity 1 via an electrically controlled guide rail 3.

[0034] The laser energy attenuation cavity 1 is a cylindrical cavity filled with energy attenuation liquid; the diffuse reflection sampling cavity 2 is moved left and right by an electrically controlled guide rail 3; the diffuse reflection sampling cavity 2 includes: an off-axis parabolic mirror 8, a light transmission channel 9, a diffuse reflection sleeve 10, and a homogenization lens group 11.

[0035] The off-axis parabolic reflector 8 disperses the incident laser into the diffuse reflection sleeve 10 by setting its position; the light transmission channel 9 is set inside the diffuse reflection sleeve 10 and is used to sample the spatial intensity of the dispersed laser; the homogenizing lens group 11 is set at the front end of the light transmission channel 9 and includes a grating and a collimating lens group, which is used to convert the dispersed light into collimated light.

[0036] The laser energy attenuation cavity 1 also includes an output lens group 6, which is positioned opposite to the diffuse reflection sampling cavity 2 and is used to output focused laser or collimated laser.

[0037] The method includes the following steps:

[0038] Step 1: The high-power laser beam diverges after passing through the off-axis parabolic mirror 8 and enters the diffuse reflection sampling cavity 2;

[0039] Step 2: A small portion of the energy is absorbed by the diffuse reflection sleeve 10 during the diffuse reflection process, while most of the energy is spatially sampled through the light transmission channel 9 and then expanded by the homogenizing lens group 11. The power density of the expanded laser is reduced and the energy distribution is more uniform.

[0040] Step 3: Then the laser enters the laser energy attenuation cavity 1, and its energy is absorbed by the attenuation liquid as it propagates through the attenuation liquid.

[0041] Step 4: Finally, the attenuated homogenized laser is output through the output lens group 6; wherein, the energy attenuation liquid in the cavity attenuates the laser energy and also acts as cooling water to cool the diffuse reflection sampling cavity 2, which is connected to the external water cooler through the water inlet 4 and the water outlet 5.

[0042] The diffuse reflection sampling cavity 2 is installed inside the laser energy attenuation cavity 1 via an electrically controlled guide rail 3. The diffuse reflection sampling cavity 2 moves left and right on the electrically controlled guide rail 3 to adjust the attenuation amplitude, controlled by a stepper motor.

[0043] The laser energy attenuation cavity 1 includes an inlet 4 and an outlet 5 for the inflow and outflow of energy attenuation liquid, thereby enabling the attenuation medium to flow in or out of the cylindrical cavity.

[0044] The energy decay liquid includes deionized water or NaCl solutions of different concentrations.

[0045] The outgoing lens group 6 includes a grating and a focusing lens or window.

[0046] The laser energy attenuation cavity 1 also includes a monitoring component 7 for acquiring liquid temperature, humidity, and scattered light intensity.

[0047] The surface of the off-axis parabolic reflector 8 is coated with a gold film.

[0048] The cross-section of the light-transmitting channel 9 consists of several symmetrical circular holes.

[0049] The diffuse reflection sleeve 10 is used to diffusely reflect the incident laser by more than 90%.

[0050] The diffuse reflection sleeve 10 is made of aluminum, copper, or an aluminum-copper alloy, and the light-receiving surface of the material is first sandblasted and then gold-plated.

[0051] Example 1

[0052] Figure 1 This is a schematic diagram of a high-power laser energy homogenization and attenuation device according to an embodiment of the present invention, as shown below. Figure 1 As shown, an embodiment of the present invention provides a high-power laser energy homogenization and attenuation device, comprising: a laser energy attenuation cavity 1 and a diffuse reflection sampling cavity 2; wherein, the diffuse reflection sampling cavity 2 comprises: an off-axis parabolic mirror 8, a light transmission channel 9, a diffuse reflection sleeve 10, and a homogenization lens group 11.

[0053] The diffuse reflection sampling cavity 2 is installed inside the laser energy attenuation cavity 1 via an electrically controlled guide rail 3. It can be moved left and right on the guide rail to adjust the attenuation ratio by a stepper motor.

[0054] Based on the above embodiments, the high-power laser homogenization attenuation device further includes an inlet 4 and an outlet 5 for the inflow and outflow of energy attenuation liquid.

[0055] Based on the above embodiments, the high-power laser homogenization attenuation device also includes an output lens group 6 for outputting focused laser or collimated laser.

[0056] It should be noted that the exit lens group 6 includes an aperture stop and a collimating lens group.

[0057] Based on the above embodiments, the high-power laser homogenization attenuation device also includes a monitoring component 7 for acquiring temperature, humidity and scattered light intensity.

[0058] like Figure 2 As shown, the off-axis parabolic reflector 8 disperses the incident laser into the diffuse reflection sleeve by setting its placement position.

[0059] like Figure 3 As shown, the cross-section of the light-transmitting channel 9 consists of several symmetrical circular holes.

[0060] The diffuse reflection sleeve 10 is used to diffusely reflect more than 90% of the incident laser.

[0061] The diffuse reflection sleeve 10 is made of aluminum, copper, or an aluminum-copper alloy, which are highly thermally conductive. The light-receiving surface of the material is first sandblasted and then gold-plated.

[0062] It should be noted that the homogenizing lens group 11 includes a grating and a collimating lens group, which are used to convert diverging light into collimated light.

[0063] In this embodiment of the invention, a high-power laser beam diverges into the diffuse reflection sampling cavity 2 after passing through the off-axis parabolic reflector 8. A small portion of the energy is absorbed by the diffuse reflection sleeve 10 during the diffuse reflection process, while most of the energy is spatially sampled through the light transmission channel 9. The beam is then expanded by the homogenizing lens group 11, resulting in a lower power density and more uniform energy distribution. The laser beam then enters the laser energy attenuation cavity 1 and propagates through the attenuating liquid, where its energy is absorbed. Finally, the attenuated homogenized laser beam is output through the exit lens group 6. The energy attenuating liquid in the cavity attenuates the laser energy and also acts as cooling water to cool the diffuse reflection sampling cavity 2. The cavity is connected to an external water cooler through the water inlet 4 and the water outlet 5.

[0064] The high-power laser energy homogenization attenuation device provided in this embodiment of the invention can attenuate a power density of 20kW / cm² over a long period of time. 2 The high-power laser can continuously adjust the laser attenuation level, making it highly practical and able to meet the needs of industrial production and scientific research.

[0065] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A method for homogenizing and attenuating high-power laser energy, characterized in that, The high-power laser energy homogenization attenuation method is implemented by a high-power laser energy homogenization attenuation device, which includes a laser energy attenuation cavity (1) and a diffuse reflection sampling cavity (2). The diffuse reflection sampling cavity (2) is installed inside the laser energy attenuation cavity (1) via an electrically controlled guide rail (3). The laser energy attenuation cavity (1) is a cylindrical cavity filled with energy attenuation liquid; the diffuse reflection sampling cavity (2) is driven to move left and right by an electrically controlled guide rail (3); the diffuse reflection sampling cavity (2) includes: an off-axis parabolic mirror (8), a light transmission channel (9), a diffuse reflection sleeve (10), and a homogenizing lens group (11); The off-axis parabolic reflector (8) disperses the incident laser into the diffuse reflection sleeve (10) by setting its position; the light transmission channel (9) is set inside the diffuse reflection sleeve (10) and is used to sample the spatial intensity of the dispersed laser; the homogenizing lens group (11) is set at the front end of the light transmission channel (9) and includes a grating and a collimating lens group, and is used to convert the dispersed light into collimated light; The laser energy attenuation cavity (1) also includes an output lens group (6), which is positioned opposite to the diffuse reflection sampling cavity (2) and is used to output focused laser or collimated laser. The method includes the following steps: Step 1: The high-power laser diverges after passing through the off-axis parabolic mirror (8) and enters the diffuse reflection sampling cavity (2); Step 2: A small portion of the energy is absorbed by the diffuse reflection sleeve (10) during the diffuse reflection process, while most of the energy is spatially sampled through the light transmission channel (9) and then expanded by the homogenizing lens group (11). The power density of the expanded laser is reduced and the energy distribution is more uniform. Step 3: Then the laser enters the laser energy attenuation cavity (1) and propagates through the attenuation liquid, where its energy is absorbed by the attenuation liquid; Step 4: Finally, the attenuated homogenized laser is output through the output lens group (6); wherein, the energy attenuation liquid in the cavity attenuates the laser energy and also acts as cooling water to cool the diffuse reflection sampling cavity (2), which is connected to the external water cooler through the inlet (4) and outlet (5).

2. The high-power laser energy homogenization attenuation method as described in claim 1, characterized in that, The diffuse reflection sampling cavity (2) is installed inside the laser energy attenuation cavity (1) via an electrically controlled guide rail (3). The diffuse reflection sampling cavity (2) moves left and right on the electrically controlled guide rail (3) to adjust the attenuation amplitude, controlled by a stepper motor.

3. The high-power laser energy homogenization attenuation method as described in claim 1, characterized in that, The laser energy attenuation cavity (1) includes an inlet (4) and an outlet (5) for the inflow and outflow of energy attenuation liquid, so as to realize the inflow or outflow of attenuation medium in the cylindrical cavity.

4. The high-power laser energy homogenization attenuation method as described in claim 1, characterized in that, The energy decay liquid includes deionized water or NaCl solutions of different concentrations.

5. The high-power laser energy homogenization attenuation method as described in claim 1, characterized in that, The outgoing lens group (6) includes a grating and a focusing lens or window.

6. The high-power laser energy homogenization attenuation method as described in claim 1, characterized in that, The laser energy attenuation cavity (1) also includes a monitoring component (7) for acquiring liquid temperature, humidity and scattered light intensity.

7. The high-power laser energy homogenization attenuation method as described in claim 1, characterized in that, The surface of the off-axis parabolic mirror (8) is coated with a gold film.

8. The high-power laser energy homogenization attenuation method as described in claim 1, characterized in that, The cross-section of the light-transmitting channel (9) consists of several symmetrical circular holes.

9. The high-power laser energy homogenization attenuation method as described in claim 1, characterized in that, The diffuse reflection sleeve (10) is used to diffusely reflect more than 90% of the incident laser.

10. The high-power laser energy homogenization attenuation method as described in claim 1, characterized in that, The diffuse reflection sleeve (10) is made of aluminum, copper or aluminum-copper alloy, and the light-receiving surface of the material is first sandblasted and then gold-plated.

Images