A copper film etching device

Abstract

The application discloses a copper film etching device and relates to the technical field of copper film etching.The device comprises a containing box, a gas guide pipe is symmetrically arranged on the top of the side of the containing box, a partition plate is fixedly arranged at the middle position in the inner cavity of the containing box, a mounting rack is fixedly arranged at the middle position on the top of the containing box, and a driven gear is rotatably connected to the middle position on the top of the mounting rack.A partition plate is fixedly arranged at the middle position in the inner cavity of the containing box, the containing box is divided into an etching chamber and a drying chamber by the partition plate, the copper film is transferred into the drying chamber for drying after being etched in the etching chamber, the device can effectively solve the problem that the traditional copper film needs to be rotated into a drying device by means of a tool to remove the etching liquid remaining on the top of the copper film plate after being processed in the etching device, and a large amount of time is wasted in the transferring process, so that the overall time consumption of the copper film etching process is relatively long.

Description

Technical Field

[0001] This invention relates to the field of copper film etching technology, and more particularly to a copper film etching apparatus. Background Technology

[0002] Copper film etching (CPE) is an important micro / nano fabrication method used to manufacture high-precision microelectronic devices, micromechanical systems, and microfluidic chips. Based on electrochemical principles, this process involves immersing a copper film substrate in an etching solution. Under the influence of an electric current, the material on the surface of the copper film substrate is gradually etched away to form the desired microstructure. It is suitable for processing various materials and complex shapes. The key advantages of CPE lie in its high precision and high controllability. During the etching process, the etching solution is used to corrode the material on the surface of the copper film substrate to form the required microstructure. However, etching solution residues may remain on the surface of the copper film substrate after etching. If not removed promptly, the chemical reaction of the etching solution can continue, potentially causing further damage to the copper film surface. Furthermore, some chemicals in the etching solution may react with moisture in the air to form oxides or hydrates, leading to surface oxidation or water film formation, which can affect subsequent process steps or device performance.

[0003] In the existing technology, copper film etching equipment only has a single etching process. After the copper film is processed in the etching equipment, it needs to be rotated into the drying equipment with the help of tools to remove the etching solution remaining on the top of the copper film plate. The transfer process wastes a lot of time, which makes the overall copper film etching process take a long time. Summary of the Invention

[0004] The purpose of this invention is to solve the problem that existing copper film etching devices only have a single etching process. After the copper film is processed in the etching device, it needs to be rotated into a drying device to remove the etching solution remaining on the top of the copper film plate. The transfer process wastes a lot of time, resulting in a long overall time consumption for the copper film etching process. Therefore, this invention proposes a copper film etching device.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A copper film etching apparatus includes a receiving box, on which air guide pipes are symmetrically fixedly arranged on the top side of the receiving box. A partition plate is fixedly arranged in the middle of the inner cavity of the receiving box. A mounting frame is fixedly arranged in the middle of the top of the receiving box. A driven gear is rotatably connected to the middle of the top of the mounting frame. A drive assembly for rotating the driven gear is arranged on the side of the mounting frame. A displacement screw is threaded into the center of the driven gear. A rectangular block is rotatably connected to the bottom of the displacement screw. The rectangular block is slidably arranged in a mounting frame in the horizontal direction. A U-shaped frame is fixedly arranged at the bottom of the mounting frame. A transfer frame is fixedly arranged at the bottom of the U-shaped frame.

[0007] The drive assembly includes a drive gear, a vertical motor, and a protective folding plate, with the top of the protective folding plate fixedly mounted on the top of the mounting frame.

[0008] Optionally, a vertical motor is fixedly installed at the bottom of the protective folding plate, and a drive gear is fixedly installed at the output end of the vertical motor. The number of teeth of the drive gear is much smaller than the number of teeth of the driven gear.

[0009] Optionally, the mounting frame has a clearance groove on its side, and a rectangular rod is fixedly provided on the side of the rectangular block, with the rectangular rod extending out from the side of the clearance groove.

[0010] Optionally, a bottom sealing plate is fixedly provided at the bottom of the transfer frame, and both the bottom sealing plate and the transfer frame are provided with leakage holes. The length of the bottom sealing plate is equal to the length of the gap between the two sets of partition plates.

[0011] Optionally, the side of the rectangular block is fixedly connected to one end of the connecting spring, and the other end of the connecting spring is fixedly connected to the side of the mounting frame.

[0012] Optionally, driven balls are fixedly arranged at equal intervals along the vertical direction on the side of the transfer frame, and an active ball is fixedly arranged at the middle position on the side of the partition plate.

[0013] Optionally, an extension block is symmetrically fixedly provided at the top edge of the container, the extension block is rotatably connected to one end of the sealing cover, a handle is fixedly provided at the middle of the top of the sealing cover, and a clearance notch is symmetrically provided at the end of the sealing cover away from the pivot.

[0014] Compared with the prior art, the present invention has the following advantages:

[0015] 1. The present invention has a partition plate fixedly installed in the middle of the inner cavity of the receiving box. The partition plate divides the receiving box into an etching chamber and a drying chamber. After the copper film is etched in the etching chamber, it is transferred to the drying chamber for drying under the drive of the drive motor. This can effectively solve the problem that in the traditional method, after the copper film is processed in the etching device, it needs to be rotated to the drying device with tools to remove the etching solution remaining on the top of the copper film plate. The transfer process wastes a lot of time, which makes the overall copper film etching process take a long time.

[0016] 2. The present invention includes a transfer frame for holding the copper film to be etched. Active balls are equidistantly arranged on the side of the transfer frame along the vertical direction, while a driven ball is fixedly arranged in the middle of one side of the partition plate. When the transfer frame is transferred from the etching chamber to the drying chamber, the driven ball contacts the active ball, thereby forcing the transfer frame to vibrate in the horizontal direction. This accelerates the transfer of the transfer frame from the etching chamber to the drying chamber, causing the etching solution attached to the surface of the copper film to fall off, thereby reducing the drying process time of the transfer frame in the drying chamber. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0018] Figure 2 for Figure 1 A partial structural diagram showing the removal of the sealing cap;

[0019] Figure 3 This is a partial structural diagram of the container;

[0020] Figure 4 This is a partial structural diagram of the transfer frame and its connectors;

[0021] Figure 5 for Figure 4 Another perspective structural diagram.

[0022] In the diagram: 1. Air duct; 2. Container box; 21. Extension block; 3. Sealing cover; 31. Handle; 32. Clearance notch; 4. Mounting frame; 5. Protective folding plate; 6. Vertical motor; 61. Drive gear; 7. Driven gear; 8. Driven ball; 9. Divider plate; 10. Driving ball; 11. Bottom sealing plate; 12. Transfer frame; 121. Leakage hole; 13. U-shaped frame; 14. Rectangular block; 15. Displacement screw; 16. Connecting spring; 17. Clearance groove; 18. Rectangular rod; 19. Mounting frame. Detailed Implementation

[0023] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0024] In the description of this invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0025] Reference Figure 1-5 A copper film etching device includes a housing 2. Air guide pipes 1 are symmetrically fixed on the top side of the housing 2. There are two sets of air guide pipes 1. One set of air guide pipes 1 is connected to a dryer, and the other set of air guide pipes 1 is used for exhausting the entire housing 2 when the dryer is working.

[0026] A partition plate 9 is fixedly installed in the middle of the inner cavity of the container 2. A mounting frame 4 is fixedly installed in the middle of the top of the container 2. A driven gear 7 is rotatably connected to the middle of the top of the mounting frame 4. A drive assembly for driving the driven gear 7 to rotate is provided on the side of the mounting frame 4. The drive assembly includes a drive gear 61, a vertical motor 6, and a protective folding plate 5.

[0027] The protective folding plate 5 is fixedly mounted on the top of the mounting bracket 4. A vertical motor 6 is vertically fixedly mounted on the bottom of the protective folding plate 5. A drive gear 61 is fixedly mounted on the output end of the vertical motor 6. The number of teeth of the drive gear 61 is much smaller than the number of teeth of the driven gear 7. Therefore, when the vertical motor 6 rotates, the drive gear 61 can slowly drive the driven gear 7 to rotate. The vertical motor 6 is selected as a motor with a built-in brake. When the driven vertical motor 6 stops, the driven gear 7 can remain stationary.

[0028] A displacement screw 15 is screwed into the center thread of the driven gear 7. A rectangular block 14 is rotatably connected to the bottom of the displacement screw 15. The side of the rectangular block 14 is fixedly connected to one end of the connecting spring 16. The other end of the connecting spring 16 is fixedly connected to the side of the mounting frame 19. The rectangular block 14 is slidably disposed in the mounting frame 19 in the horizontal direction. Driven balls 8 are fixedly disposed at equal intervals in the vertical direction on the side of the transfer frame 12. A driving ball 10 is fixedly disposed in the middle position of the side of the partition plate 9. When the connecting spring 16 is at its original length, the driving ball 10 and the driven ball 8 are in close contact.

[0029] The top of the mounting frame 19 has a transverse groove that is longer than the rectangular block 14, allowing the rectangular block 14 to move laterally along the horizontal direction of the mounting frame 19. When the driven gear 7 rotates, it can drive the rectangular block 14 and the mounting frame 19 at the bottom of the displacement screw 15 to move vertically.

[0030] The mounting frame 19 has a clearance groove 17 on its side, and a rectangular rod 18 is fixedly installed on the side of the rectangular block 14. The rectangular rod 18 extends out from the side of the clearance groove 17. The arrangement of the rectangular rod 18 and the clearance groove 17 restricts the rectangular block 14 to move laterally stably within the mounting frame 19.

[0031] A U-shaped frame 13 is fixedly installed at the bottom of the mounting frame 19. A transfer frame 12 is fixedly installed at the bottom of the U-shaped frame 13. A bottom sealing plate 11 is fixedly installed at the bottom of the transfer frame 12. Both the bottom sealing plate 11 and the transfer frame 12 are provided with leakage holes 121. The diameter of the leakage holes 121 at the bottom of the bottom sealing plate 11 is set to be small. The length of the bottom sealing plate 11 is equal to the length of the gap between the two sets of partition plates 9. The bottom sealing plate 11 and the two sets of partition plates 9 form a simple structure that divides the housing 2 into a drying chamber and an etching chamber respectively.

[0032] An extension block 21 is symmetrically fixed at the top edge of the container 2. The extension block 21 is rotatably connected to one end of the sealing cover 3. A handle 31 is fixedly fixed at the middle of the top of the sealing cover 3. A clearance notch 32 is symmetrically opened at the end of the sealing cover 3 away from the pivot. The clearance notch 32 is designed as a U-shaped frame 13 to allow space. The two sets of sealing covers 3 can completely seal the top of the container 2.

[0033] The specific implementation steps and principles of this invention are as follows:

[0034] One end of the air duct 1 is connected to a dryer. Workers fill the area below the partition plate 9 with etching solution. When the transfer frame 12 is below the partition plate 9, workers place multiple copper films to be etched into the transfer frame 12 for etching. After a period of time, the vertical motor 6 is started. The vertical motor 6 drives the shifting screw 15 to rotate through the drive gear 61 and the driven gear 7, moving the transfer frame 12 to its limit position until the bottom sealing plate 11 is flush with the partition plate 9. During this process, the active ball 10 contacts the driven ball 8, and the transfer frame 12 oscillates back and forth in the horizontal direction, accelerating the fall of the etching solution on the etching plate. Finally, the sealing cover 3 on the top of the container box 2 is closed, and the dryer at one end of the air duct 1 is started. The dryer dries multiple sets of copper film etching plates.

[0035] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A copper film etching apparatus, comprising a housing (2), characterized in that, The container (2) has air pipes (1) fixedly fixedly arranged on the top side of the container (2). The container (2) has a partition plate (9) fixedly arranged in the middle of the inner cavity of the container (2). The container (2) has a mounting frame (4) fixedly arranged in the middle of the top of the container (2). The mounting frame (4) has a driven gear (7) rotatably connected in the middle of the top of the mounting frame (4). The mounting frame (4) has a drive assembly that drives the driven gear (7) to rotate on the side. The driven gear (7) has a displacement screw (15) screwed into the center thread. The displacement screw (15) has a rectangular block (14) rotatably connected to the bottom of the displacement screw (15). The rectangular block (14) is slidably arranged in the mounting frame (19) in the horizontal direction. The mounting frame (19) has a U-shaped frame (13) fixedly arranged at the bottom of the mounting frame (19). The U-shaped frame (13) has a transfer frame (12) fixedly arranged at the bottom of the U-shaped frame (13). The bottom of the transfer frame (12) is fixedly provided with a bottom sealing plate (11), and both the bottom sealing plate (11) and the transfer frame (12) are provided with leakage holes (121). The length of the bottom sealing plate (11) is equal to the length of the gap between the two sets of partition plates (9). The side of the rectangular block (14) is fixedly connected to one end of the connecting spring (16), and the other end of the connecting spring (16) is fixedly connected to the side of the mounting frame (19); The transfer frame (12) has driven balls (8) fixedly arranged at equal intervals along the vertical direction on its side, and the partition plate (9) has an active ball (10) fixedly arranged at the middle position on its side. The container (2) has an extension block (21) fixedly and symmetrically installed at the top edge. The extension block (21) is rotatably connected to one end of the closing cover (3). The closing cover (3) has a handle (31) fixedly installed at the middle of the top. The closing cover (3) has a clearance notch (32) symmetrically opened at the end away from the pivot.

2. The copper film etching apparatus according to claim 1, characterized in that, The drive assembly includes a drive gear (61), a vertical motor (6), and a protective folding plate (5), with the top of the protective folding plate (5) fixedly mounted on the top of the mounting frame (4).

3. The copper film etching apparatus according to claim 2, characterized in that, A vertical motor (6) is fixedly installed at the bottom of the protective folding plate (5), and a drive gear (61) is fixedly installed at the output end of the vertical motor (6). The number of teeth of the drive gear (61) is much smaller than the number of teeth of the driven gear (7).

4. The copper film etching apparatus according to claim 1, characterized in that, The mounting frame (19) has a clearance groove (17) on its side, and a rectangular rod (18) is fixedly installed on the side of the rectangular block (14), with the rectangular rod (18) passing through the clearance groove (17).

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