A curved glass coating production line

Abstract

The present application relates to the field of curved glass coating, in particular to a curved glass coating production line. The curved glass coating production line comprises a conveying mechanism and a magnetron sputtering chamber arranged along the conveying route of the conveying mechanism. The curved glass coating production line comprises a fixed tool conveyed by the conveying mechanism. After the fixed tool fixes the curved glass, the conveying mechanism sends the fixed tool with the curved glass to the magnetron sputtering chamber. The curved glass coating production line can stably drive the curved glass placed thereon to the magnetron sputtering chamber for magnetron sputtering coating, so that the curved glass is not easy to deviate during the advancing process, and the coating effect is good.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of curved glass coating, in particular to a curved glass coating production line. BACKGROUND

[0002] Glass can significantly improve performance after coating, common glass coating process such as magnetron sputtering coating process, usually use sputtering target material on the glass surface magnetron sputtering, sputtering target material in the magnetic field, make the glass surface deposition on the multilayer nanometer film layer, in order to make the performance of the coating glass is good and widely used. The performance of the coating glass is affected by the uniformity of the film thickness and other factors, if the film thickness is not uniform, the performance of the coating glass will be very poor. In actual production, if you want to magnetron sputtering coating on the large flat glass, the production personnel usually put the glass to be coated on the conveying mechanism composed of multiple transmission rollers, and the multiple transmission rollers are sent to the magnetron sputtering chamber for coating. The existing flat glass to be coated can be placed on the multiple transmission rollers after being placed on the conveying mechanism, and the multiple transmission rollers are in surface contact, so that the glass is not easy to deviate during the transmission process, and the coating effect is good. SUMMARY

[0003] The technical problem to be solved by the present application is to provide a curved glass coating production line, which can drive the curved glass placed thereon to the magnetron sputtering chamber for magnetron sputtering coating, so that the curved glass is not easy to deviate during the advancing process, and the coating effect is good.

[0004] To solve the above problems, the present application provides a curved glass coating production line, which comprises a conveying mechanism and a magnetron sputtering chamber arranged along the conveying route of the conveying mechanism, and a fixed tool conveyed by the conveying mechanism. After the fixed tool fixes the curved glass, the conveying mechanism sends the fixed tool with the curved glass placed thereon to the magnetron sputtering chamber.

[0005] The conveying mechanism comprises a left conveying belt and a right conveying belt. The fixed tool is provided with a left wing and a right wing placed on the left conveying belt and the right conveying belt respectively. The left conveying belt and the right conveying belt convey the fixed tool by the wings, and send the fixed tool with the curved glass fixed thereto to the magnetron sputtering chamber.

[0006] The fixed tool comprises a frame body, and the wings are specifically arranged on both sides of the frame body. The area between the left conveying belt and the right conveying belt is left empty to expose the lower part of the frame body. The lower part of the frame body is correspondingly provided with a left empty area to expose the downward back surface of the curved glass.

[0007] In the magnetron sputtering chamber, a magnetron sputtering device is arranged below the conveying mechanism, which is aligned with the area left empty between the left conveying belt and the right conveying belt, and magnetron sputtering is performed on the downward back surface of the curved glass in the fixed tool passing through.

[0008] The system includes a pre-vacuum chamber and a recovery pressure chamber. The pre-vacuum chamber, the magnetron sputtering chamber, and the recovery pressure chamber are arranged in sequence and adjacent to each other according to the conveying direction of the conveying mechanism. The inlet of the magnetron sputtering chamber is connected to the outlet of the pre-vacuum chamber, and the outlet of the magnetron sputtering chamber is connected to the inlet of the recovery pressure chamber.

[0009] A first lifting gate is provided at any point from the magnetron sputtering chamber inlet to the pre-vacuum chamber outlet for sealing; and / or a second lifting gate is provided at any point from the magnetron sputtering chamber outlet to the recovery pressure chamber inlet for sealing.

[0010] The pre-vacuum chamber is equipped with a vacuum pump near its outlet, and the magnetron sputtering chamber is equipped with a gas supply pump near its inlet. When the first lifting gate is open, the gas supply pump continuously supplies gas to the magnetron sputtering chamber, while the vacuum pump continuously evacuates the pre-vacuum chamber.

[0011] The first seal is provided between the magnetron sputtering chamber and the pre-vacuum chamber, and / or a second seal is provided between the magnetron sputtering chamber and the recovery pressure chamber.

[0012] The pre-vacuum chamber inlet is equipped with an outward-opening sealed gate; and / or the recovery pressure chamber outlet is equipped with an outward-opening sealed gate.

[0013] Beneficial effects: When magnetron sputtering coating is required on curved glass, production personnel first fix the curved glass using a fixture, then place the fixture and the fixed curved glass together onto a conveyor mechanism, which then carries them to the magnetron sputtering chamber for magnetron sputtering. Because the curved glass is fixed by the fixture, it is less likely to shift during the process of being carried to the magnetron sputtering chamber by the conveyor mechanism, resulting in a more uniform coating layer and a better coating effect. Attached Figure Description

[0014] Figure 1 This is a simplified structural diagram of a curved glass coating production line.

[0015] Figure 2 This is a simplified schematic diagram of the second pre-vacuum chamber.

[0016] Figure 3 It is along Figure 1 Simplified sectional view along the AA direction.

[0017] Figure 4 yes Figure 3 A simplified schematic diagram of the pre-vacuum chamber.

[0018] Figure 5 yes Figure 3 A simplified schematic diagram of the structure with the pre-vacuum chamber removed.

[0019] Figure 6 is a structural schematic diagram of the fixed tooling.

[0020] Figure 7 is a partial exploded view of the fixed tooling.

[0021] Figure 8 is a structural schematic diagram of the fixed tooling fixing the curved glass.

[0022] Symbol explanation:

[0023] 1 - production line; 21 - first pre-vacuum chamber; 211 - first pre-vacuum chamber inlet; 212 - first pre-vacuum chamber outlet; 213 - sealing gate of first pre-vacuum chamber; 214 - air extraction pump of first pre-vacuum chamber; 22 - second pre-vacuum chamber; 221 - second pre-vacuum chamber inlet; 222 - second pre-vacuum chamber outlet; 223 - sealing gate of second pre-vacuum chamber; 224 - air extraction pump of second pre-vacuum chamber; 225 - annular sealing groove; 31 - first magnetron sputtering chamber; 311 - first magnetron sputtering chamber inlet; 312 - first magnetron sputtering chamber outlet; 313 - lifting gate of first magnetron sputtering chamber; 314 - air extraction pump of first magnetron sputtering chamber; 315 - air supply pump of first magnetron sputtering chamber; 316 - magnetron sputtering equipment of first magnetron sputtering chamber; 32 - second magnetron sputtering chamber; 321 - second magnetron sputtering chamber inlet; 322 - second magnetron sputtering chamber outlet; 323 - lifting gate of second magnetron sputtering chamber; 324 - air extraction pump of second magnetron sputtering chamber; 325 - air supply pump of second magnetron sputtering chamber; 326 - magnetron sputtering equipment of second magnetron sputtering chamber; 4 - recovery air pressure chamber; 41 - recovery air pressure chamber inlet; 42 - recovery air pressure chamber outlet; 43 - lifting gate of recovery air pressure chamber; 44 - sealing gate of recovery air pressure chamber; 45 - air extraction pump of recovery air pressure chamber; 46 - air supply pump of recovery air pressure chamber; 511 - left conveying belt of first pre-vacuum chamber; 512 - left conveying belt of second pre-vacuum chamber; 513 - left conveying belt of first magnetron sputtering chamber; 514 - left conveying belt of second magnetron sputtering chamber; 515 - left conveying belt of recovery air pressure chamber; 52 - guide pulley; 6 - fixed tooling; 61 - frame body; 62 - moving piece; 63 - sliding block; 631 - clamping block; 632 - fixed part; 64 - left wing; 65 - right wing; 7 - curved glass. DETAILED DESCRIPTION

[0024] The present application will be further described in conjunction with the detailed description.

[0025] See Figure 1, the curved glass coating production line 1 comprises a conveying mechanism (not shown in the figure) and a first pre-vacuum chamber 21, a second pre-vacuum chamber 22, a first magnetron sputtering chamber 31, a second magnetron sputtering chamber 32 and a recovery gas pressure chamber 4 arranged in the conveying direction of the conveying mechanism. The production line 1 further comprises a plurality of fixed toolings 6 (see Figure 8 ), which, after fixing the curved glass 7, can be placed on the conveying mechanism and conveyed by the conveying mechanism to successively pass through the first pre-vacuum chamber 21, the second pre-vacuum chamber 22, the first magnetron sputtering chamber 31, the second magnetron sputtering chamber 32 and the recovery gas pressure chamber 4, and the magnetron sputtering devices in the magnetron sputtering chambers 31, 32 will perform magnetron sputtering coating on the fixed curved glass 7 in the fixed tooling 6 passing through. The specific structures of the above chambers and mechanisms will be described in detail below.

[0026] See Figure 3 , the first pre-vacuum chamber 21, the second pre-vacuum chamber 22, the first magnetron sputtering chamber 31, the second magnetron sputtering chamber 32 and the recovery gas pressure chamber 4 are sequentially adjacent to each other, and each of them has a partial opening on the rear end plate to form an inlet and a partial opening on the front end plate to form an outlet, see Figure 4 and Figure 5 , wherein: the first pre-vacuum chamber 21 outlet 212 is connected with the second pre-vacuum chamber 22 inlet 221; the second pre-vacuum chamber 22 outlet 222 is connected with the first magnetron sputtering chamber 31 inlet 311; the first magnetron sputtering chamber 31 outlet 312 is connected with the second magnetron sputtering chamber 32 inlet 321; and the second magnetron sputtering chamber 32 outlet 322 is connected with the recovery gas pressure chamber 4 inlet 41. In order to prevent gas leakage at the connection between the outlets and the inlets, a sealing member is arranged between the two adjacent chambers, for example, see Figure 2 , a ring-shaped sealing groove 225 is formed on the rear end plate of the second pre-vacuum chamber 22, which surrounds the outside of the inlet 221 on the rear end plate of the second pre-vacuum chamber 22. A ring-shaped sealing strip (not shown in the figure) is accommodated in the ring-shaped sealing groove 225, and in the state that the first pre-vacuum chamber 21 and the second pre-vacuum chamber 22 are adjacently installed together, the rear end face of the first pre-vacuum chamber 21 and the front end face of the second pre-vacuum chamber 22 jointly press the ring-shaped sealing strip to deform it, and the ring-shaped sealing strip seals the connection between the first pre-vacuum chamber 21 outlet 212 and the second pre-vacuum chamber 22 inlet 221. Ring-shaped sealing grooves and ring-shaped sealing strips are provided on the rear end plates of the first magnetron sputtering chamber 31, the second magnetron sputtering chamber 32 and the recovery gas pressure chamber 4 as sealing members, which will not be described here.

[0027] See Figure 4, the first pre-vacuum chamber 21 is provided with a sealing gate 213 outside the inlet 211 for sealing, and the sealing gate 213 can be opened outwardly to expose the inlet 211. The left side and the right side of the first pre-vacuum chamber 21 are each provided with four gas pumps 214 (specifically, molecular pumps), wherein the front two gas pumps 214 (one on each side) are close to the inlet 211 of the first pre-vacuum chamber 21, and the rear two gas pumps 214 are close to the outlet 212, and each gas pump 214 can perform gas pumping on the first pre-vacuum chamber 21. The left inner wall and the right inner wall of the first pre-vacuum chamber 21 are respectively provided with a left conveying belt 511 and a right conveying belt, and the left conveying belt 511 and the right conveying belt are symmetrical to each other, horizontally arranged from front to back, and the starting end of the two is close to and aligned with the inlet 211 of the first pre-vacuum chamber 21, and the ending end is close to and aligned with the outlet 212. The second pre-vacuum chamber 22 has the same structure as the first pre-vacuum chamber 21, and is also provided with a sealing gate 223 (which extends into the first pre-vacuum chamber 21 from the outlet 212 of the first pre-vacuum chamber 21 when opened backward), a gas pump 224, a left conveying belt 512 and a right conveying belt, and the difference is only that the number of the gas pumps 224 of the second pre-vacuum chamber 22 is four, which are respectively arranged on the left side and the right side of the second pre-vacuum chamber 22.

[0028] See Figure 5The inner side of the inlet 311 of the first magnetron sputtering chamber 31 is provided with a lifting gate 313. When the lifting gate 313 is raised, the inlet 311 is blocked, and when the lifting gate 313 is lowered, the inlet 311 is exposed. The left side and the right side of the first magnetron sputtering chamber 31 are each provided with three gas supply pumps 315, which are close to the inlet 311 of the first magnetron sputtering chamber 31 and can supply inert gas such as argon to the first magnetron sputtering chamber 31. The front bottom of the first magnetron sputtering chamber 31 is provided with two gas exhaust pumps 314 (specifically, molecular pumps), which are close to the inlet 311 of the first magnetron sputtering chamber 31 and can exhaust the first magnetron sputtering chamber 31. The left inner wall and the right inner wall of the first magnetron sputtering chamber 31 are also respectively provided with a left conveying belt 513 and a right conveying belt. Compared with the left conveying belt 511 and the right conveying belt of the first pre-vacuum chamber 21, the left conveying belt 513 and the right conveying belt of the first magnetron sputtering chamber 31 have basically the same structure, only the length is different, and the left conveying belt 513 and the right conveying belt of the first magnetron sputtering chamber 31 each have two sections, and the two sections of the left conveying belt 513 and the right conveying belt are arranged in front of and behind the inlet 311 and the outlet 312 of the first magnetron sputtering chamber 31. Four magnetron sputtering devices 316 are arranged in front of and behind the two gas exhaust pumps 314 at the bottom of the first magnetron sputtering chamber 31, and can magnetron sputter the curved glass 7 passing upwards. The second magnetron sputtering chamber 32 has basically the same structure as the first magnetron sputtering chamber 31, and is also provided with a lifting gate 323, a gas supply pump 325, a gas exhaust pump 324, a magnetron sputtering device 326, a left conveying belt 514, and a right conveying belt. The difference is that the left side and the right side of the second magnetron sputtering chamber 32 are each provided with six gas supply pumps 325, and among the six gas supply pumps 325 on the same side, the front three are close to the inlet 321 of the second magnetron sputtering chamber 32 and the rear three are close to the outlet 322. The second magnetron sputtering chamber 32 is not only provided with two gas exhaust pumps 324 close to the inlet 321 at the front bottom, but also provided with two gas exhaust pumps 324 (specifically, molecular pumps) close to the outlet 322 at the rear bottom, which are symmetrically arranged in front of and behind the two gas exhaust pumps 324 at the front bottom. The number of magnetron sputtering devices 326 of the second magnetron sputtering chamber 32 is three.

[0029] The inner side of the entrance 41 of the recovery chamber 4 is provided with the same lifting gate 43 as the magnetron sputtering chambers 31, 32, and the outer side of the exit 42 is provided with the same sealing gate 44 as the pre-vacuum chamber, and the sealing gate 44 of the recovery chamber 4 opens forward and outward. The left side and the right side of the recovery chamber 4 are respectively provided with a gas supply pump 46 for supplying gas to the recovery chamber 4 and a gas exhaust pump 45 for exhausting gas from the recovery chamber 4, and the gas exhaust pump 45 is close to the entrance 41 and the gas supply pump 46 is close to the exit 42. The left inner wall and the right inner wall of the recovery chamber 4 are also respectively provided with a left conveying belt 515 and a right conveying belt, and the left conveying belt 515 and the right conveying belt are transversely arranged in front of and behind each other, and the beginning ends of the two are close to and aligned with the entrance 41 of the recovery chamber 4, and the ending ends of the two are close to and aligned with the exit 42. In this embodiment, the lifting gates 313, 323, 43 are respectively arranged at the inner side of the entrance 311 of the first magnetron sputtering chamber 31, the inner side of the entrance 321 of the second magnetron sputtering chamber 32, and the inner side of the entrance 41 of the recovery chamber 4 to seal the corresponding entrances, so that the connected entrances and exits cannot be connected. In other embodiments, the lifting gates 313, 323, 43 can be arranged at any position from the entrance 311 of the first magnetron sputtering chamber 31 to the exit 222 of the second pre-vacuum chamber 22, from the entrance 321 of the second magnetron sputtering chamber 32 to the exit 312 of the first magnetron sputtering chamber 31, and from the entrance 41 of the recovery chamber 4 to the exit 322 of the second magnetron sputtering chamber 32. The curved glass coating production line 1 is provided with a controller (not shown in the figure), which is provided with a control program in advance, and the controller is connected to and controls each component of the sealing gate, the lifting gate, the gas exhaust pump, the gas supply pump, the magnetron sputtering device, the left conveying belt, and the right conveying belt.

[0030] See Figure 3 , the left conveying belts 511, 512, 513, 514, 515 and the right conveying belts of the first pre-vacuum chamber 21, the second pre-vacuum chamber 22, the first magnetron sputtering chamber 31, the second magnetron sputtering chamber 32, and the recovery chamber 4 are collectively used as conveying mechanisms, and the conveying belts of the five are at the same height and are collectively used for conveying the fixed tool 6 (see Figure 8 ) and the curved glass 7 fixed thereby. See Figure 6 and Figure 7 , the fixed tool 6 has a frame body 61 with a cuboid outer contour, and the left side and the right side of the frame body 61 respectively extend to form a left wing 64 and a right wing 65, and the left wing 64 and the right wing 65 can be respectively conveyed by the left conveying belts 511, 512, 513, 514, 515 (see Figure 3) and right conveyor belt drive transmission. The frame body 61 is hollow and through from top to bottom (both the upper and lower parts are provided with a hollow area), and a left and right moving part 62 is installed in the hollow part of the frame body 61, and the two moving parts 62 are symmetrically arranged left and right. The front end and the rear end of each moving part 62 are respectively detachably clamped to the front frame edge and the rear frame edge of the frame body 61, and after clamping, the moving part 62 can move left and right relative to the frame body 61 along the front frame edge and the rear frame edge. Each moving part 62 is provided with a front and rear sliding block 63, and the two sliding blocks 63 are symmetrically arranged front and rear. The lower part of each sliding block 63 is a fixed part 632 made of insulating material, and the upper part is a clamping block 631. The clamping block 631 of the sliding block 63 is detachably clamped to the moving part 62 to complete the installation, and can move front and rear relative to the moving part 62. When the curved glass 7 needs to be fixed by the fixing tool 6, the production personnel first operate the two moving parts 62 to move left and right and operate the four sliding blocks 63 to move front and rear to leave a space for placing the curved glass 7; then, the production personnel put the curved glass 7 into the space while operating the two moving parts 62 and the four sliding blocks 63 to move horizontally towards the curved glass 7 (towards the inside) until the four sliding blocks 63 hold and clamp the four corners of the curved glass 7 together, as shown in Figure 8 , the fixing tool 6 realizes the fixation of the curved glass 7.

[0031] See Figure 3 and Figure 8After the production personnel fix the curved glass 7 with the fixing tool 6, they need to place the fixing tool 6 together with the fixed curved glass 7 on the conveying mechanism, and then the conveying mechanism drives the fixing tool 6 to be sequentially sent to the first pre-vacuum chamber 21, the second pre-vacuum chamber 22, the first magnetron sputtering chamber 31, the second magnetron sputtering chamber 32 and the recovery pressure chamber 4. That is, the production personnel need to place the left wing 64 and the right wing 65 of the fixing tool 6 on the left conveying belt 511 and the right conveying belt of the first pre-vacuum chamber 21 respectively. In this way, the left conveying belt 511 and the right conveying belt of the first pre-vacuum chamber 21 drive the left wing 64 and the right wing 65 of the fixing tool 6 to convey the fixing tool 6 together with the fixed curved glass 7 to the second pre-vacuum chamber 22, and then to the first magnetron sputtering chamber 31, the second magnetron sputtering chamber 32 and the recovery pressure chamber 4. The left wing 64 and the right wing 65 of the fixing tool 6 fall on the left conveying belt 512 and the right conveying belt of the second pre-vacuum chamber 22, and the fixing tool 6 is driven by the left conveying belt 512 and the right conveying belt of the second pre-vacuum chamber 22 instead of the left conveying belt 511 and the right conveying belt of the first pre-vacuum chamber 21. Under the driving of the left conveying belts 511, 512, 513, 514 and 515 and the right conveying belts of the chambers, the fixing tool 6 sequentially passes through the first pre-vacuum chamber 21, the second pre-vacuum chamber 22, the first magnetron sputtering chamber 31, the second magnetron sputtering chamber 32 and the recovery pressure chamber 4. The conveying belts are preferably used to convey the fixing tool 6 at the same conveying speed, and the inner side of each conveying belt is provided with a plurality of guide pulleys 52 to guide the fixing tool 6. In addition, it should be noted that the distance between the two adjacent conveying belts should be less than the length of the fixing tool 6 in the front-rear direction, so as to ensure that the fixing tool 6 can be conveyed by the previous conveying belt before it falls on the next conveying belt.

[0032] See Figures 3 to 5 After the production personnel place the fixing tool 6 (see Figure 8) Before being placed on the conveying mechanism, the controller controls all the sealing gates 213, 223, 44 in the five chambers of the first pre-vacuum chamber 21, the second pre-vacuum chamber 22, the first magnetron sputtering chamber 31, the second magnetron sputtering chamber 32 and the recovery pressure chamber 4 to be in the closed state and all the lifting gates 313, 323, 43 to be located at the upper dead point to block and seal the corresponding entrances, at this time each chamber forms a closed space because the entrance and exit of each chamber are sealed; the controller also controls the left and right conveying belts 511, 512, 513, 514, 515 of the five chambers to be driven at the same conveying speed. The production personnel first control the sealing gate 213 of the first pre-vacuum chamber 21 to be opened by the controller to expose the entrance 211, and then place the left and right wings 64, 65 of the fixed tooling 6 into the left and right conveying belts in the first pre-vacuum chamber 21 from the entrance 211 of the first pre-vacuum chamber 21 respectively, and then drive the fixed tooling 6 with the curved glass 7 fixed therein into the first pre-vacuum chamber 21 by the left and right conveying belts 511, 512 to be conveyed towards the exit 212 of the first pre-vacuum chamber 21. After the fixed tooling 6 completely enters the first pre-vacuum chamber 21, the controller controls the sealing gate 213 of the first pre-vacuum chamber 21 to be closed to seal the entrance 211, so that a sealed space is formed in the first pre-vacuum chamber 21, at this time the controller controls the air pump 214 of the first pre-vacuum chamber 21 to be started and a part of the air in the first pre-vacuum chamber 21 is pumped away. Before the fixed tooling 6 reaches the exit 212 of the first pre-vacuum chamber 21, the controller controls the sealing gate 223 of the second pre-vacuum chamber 22 to be opened towards the back and outwards to expose the entrance 221 of the second pre-vacuum chamber 22, so that the entrance 221 of the second pre-vacuum chamber 22 is connected with the exit 212 of the first pre-vacuum chamber 21, and the fixed tooling 6 with the curved glass 7 fixed therein enters the second pre-vacuum chamber 22 from the exit 212 of the first pre-vacuum chamber 21 through the entrance 221 of the second pre-vacuum chamber 22 under the conveying of the left and right conveying belts 511, 512 of the first pre-vacuum chamber 21, and is driven by the left and right conveying belts 512, 513 of the second pre-vacuum chamber 22 to move towards the exit 222 of the second pre-vacuum chamber 22. After the fixed tooling 6 completely enters the second pre-vacuum chamber 22, the controller controls the sealing gate 223 of the second pre-vacuum chamber 22 to be closed to seal the entrance 221, so that a sealed space is formed in the second pre-vacuum chamber 22, at this time the controller controls the air pump 224 of the second pre-vacuum chamber 22 to be started and most of the air in the second pre-vacuum chamber 22 is pumped away to provide conditions for subsequent magnetron sputtering.

[0033] The first and second magnetron sputtering chambers 31, 32 are evacuated by their own vacuum pumps 314, 324 under the control of the controller before the fixed tool 6 arrives, so that the chambers are as close to vacuum as possible to avoid the influence of impurities in the air on the subsequent magnetron sputtering film deposition. Before the fixed tool 6 is about to arrive at the outlet 222 of the second pre-vacuum chamber 22, the controller controls the lifting gate 313 of the first magnetron sputtering chamber 31 to descend and open to expose the inlet 311 of the first magnetron sputtering chamber 31, so that the inlet 311 of the first magnetron sputtering chamber 31 is connected with the outlet 222 of the second pre-vacuum chamber 22. During this process, the controller controls the gas supply pump 315 near the inlet 311 of the first magnetron sputtering chamber 31 to start and continuously supply gas (inert gas such as argon) to the first magnetron sputtering chamber 31, and controls the vacuum pump 224 of the second pre-vacuum chamber 22 to remain started to continuously evacuate the second pre-vacuum chamber 22, so that the gas in the first magnetron sputtering chamber 31 flows to the second pre-vacuum chamber 22, and the air in the second pre-vacuum chamber 22 is not easy to flow back to the first magnetron sputtering chamber 31 to cause pollution. In other embodiments, the gas supply pump 315 near the inlet 311 of the first magnetron sputtering chamber 31 does not supply gas, but is replaced by the evacuation pump 314 to evacuate, so that after the inlet 311 of the first magnetron sputtering chamber 31 is connected with the outlet 222 of the second pre-vacuum chamber 22, even if the residual air in the second pre-vacuum chamber 22 flows to the first magnetron sputtering chamber 31, it will be evacuated by the evacuation pump 314 of the first magnetron sputtering chamber 31, and the same effect of avoiding pollution can be achieved.

[0034] After the fixed tool 6 with the curved glass 7 completely enters the first magnetron sputtering chamber 31, the controller controls the lifting gate 313 of the first magnetron sputtering chamber 31 to rise and reset, reseals the inlet 311, and forms a sealed space inside the first magnetron sputtering chamber 31. The controller controls the gas supply pump 315 of the first magnetron sputtering chamber 31 to continuously fill the inert gas into the first magnetron sputtering chamber 31. After filling a sufficient amount of inert gas, the fixed tool 6 with the curved glass 7 is driven by the conveying belt of the first magnetron sputtering chamber 31 to pass through the four magnetron sputtering devices 316 in the first magnetron sputtering chamber 31 from above in turn. The controller controls the magnetron sputtering devices 316 to perform magnetron sputtering film coating on the downward back surface of the passing curved glass 7 (each magnetron sputtering device 316 coats a layer of film on the curved glass 7 in turn). Similarly, before the fixed tool 6 reaches the outlet 312 of the first magnetron sputtering chamber 31, the controller controls the lifting gate 323 of the second magnetron sputtering chamber 32 to lower and open to expose the inlet 321 of the second magnetron sputtering chamber 32, so that the inlet 321 of the second magnetron sputtering chamber 32 is connected with the outlet 312 of the first magnetron sputtering chamber 31. Since the inert gas used in the second magnetron sputtering chamber 32 is different from that of the first magnetron sputtering chamber 31, during the connection process of the inlet 321 of the second magnetron sputtering chamber 32 and the outlet 312 of the first magnetron sputtering chamber 31, the controller controls the gas pump 324 near the inlet 321 of the second magnetron sputtering chamber 32 to start and perform gas pumping, and controls the gas pump 314 of the first magnetron sputtering chamber 31 to also perform gas pumping (or the first magnetron sputtering chamber 31 uses the gas supply pump 315 for gas supply and the gas pump 324 near the inlet 321 of the second magnetron sputtering chamber 32 for gas pumping), so as to prevent the gas flow of the first magnetron sputtering chamber 31 and the second magnetron sputtering chamber 32 from flowing and causing pollution. After the fixed tool 6 with the curved glass 7 completely enters the second magnetron sputtering chamber 32, the controller controls the lifting gate 323 of the second magnetron sputtering chamber 32 to rise and reset to reseal the inlet 321, so as to form a sealed space inside the second magnetron sputtering chamber 32. Then, the controller controls the gas supply pump 325 of the second magnetron sputtering chamber 32 to continuously fill the inert gas into the second magnetron sputtering chamber 32. After filling a sufficient amount of inert gas, the fixed tool 6 with the curved glass 7 is driven by the conveying belt of the second magnetron sputtering chamber 32 to pass through the three magnetron sputtering devices 326 in the second magnetron sputtering chamber 32 from above in turn. The controller controls the magnetron sputtering devices 326 to perform magnetron sputtering film coating on the downward back surface of the passing curved glass 7.

[0035] Before the fixed tool 6 reaches the second magnetron sputtering chamber 32 outlet 322, the controller controls the lifting gate 43 of the recovery air pressure chamber 4 to descend and open to expose the inlet 41 of the recovery air pressure chamber 4, and to connect the inlet 41 of the recovery air pressure chamber 4 with the outlet 322 of the second magnetron sputtering chamber 32. Also, to avoid the air in the recovery air pressure chamber 4 flowing into the second magnetron sputtering chamber 32 to cause pollution, during the connection of the inlet 41 of the recovery air pressure chamber 4 with the outlet 322 of the second magnetron sputtering chamber 32, the air supply pump 325 of the second magnetron sputtering chamber 32 near the outlet 322 needs to supply air (or the air exhaust pump 324 needs to exhaust air), while the air exhaust pump 45 of the recovery air pressure chamber 4 exhausts air. After the fixed tool 6 with the curved glass 7 plated completely enters the recovery air pressure chamber 4, the controller controls the lifting gate 43 of the recovery air pressure chamber 4 to ascend and reset to reseal the inlet 41, so as to form a sealed space in the recovery air pressure chamber 4. Since the air exhaust pumps 214, 224 of the pre-vacuum chambers 21, 22 have exhausted most of the air, and the inert gas filled in the magnetron sputtering chamber during the magnetron sputtering process cannot completely fill the entire magnetron sputtering chamber, the air pressure in the sealed space of the recovery air pressure chamber 4 is less than the normal atmospheric pressure. After the lifting gate 43 ascends and resets, the controller controls the air exhaust pump 45 of the recovery air pressure chamber 4 to stop exhausting air and controls the air supply pump 46 to start slowly supplying air, so as to slowly recover the air pressure in the recovery air pressure chamber 4 to the normal atmospheric pressure, to avoid the curved glass 7 from directly entering the normal pressure environment from the negative pressure environment, and to avoid cracks and other defects. After the air pressure in the recovery air pressure chamber 4 recovers to the normal atmospheric pressure, the controller controls the sealing gate 44 of the recovery air pressure chamber 4 to open outwardly to expose the outlet 42, and the fixed tool 6 with the curved glass 7 plated completely is driven by the conveying belt of the recovery air pressure chamber 4 to leave the recovery air pressure chamber 4 from the outlet 42 of the recovery air pressure chamber 4, and the production personnel can take away the fixed tool 6 from the front of the recovery air pressure chamber 4, and can disassemble the curved glass 7 plated completely from the fixed tool 6.

[0036] In the embodiment, the areas between the left conveying belts 511, 512, 513, 514, 515 and the right conveying belts of each chamber are left empty (for the fixed tool 6 to pass through), and the upper part and the lower part of the frame body 61 of the fixed tool 6 are also provided with empty areas, so that the curved glass 7 fixed on the fixed tool 6 can expose the upward-facing front surface and the downward-facing back surface, and the magnetron sputtering devices 316, 326 are arranged at the lower part of the magnetron sputtering chambers 31, 32 to magnetron sputter and plate the back surface of the curved glass 7. In other embodiments, the magnetron sputtering devices 316, 326 can be arranged at the upper part of the magnetron sputtering chambers 31, 32 to magnetron sputter and plate the front surface of the curved glass 7; or the magnetron sputtering devices 316, 326 are arranged at the upper part and the lower part of the magnetron sputtering chambers 31, 32 to magnetron sputter and plate the front surface and the back surface of the curved glass 7 passing through.

[0037] In the embodiment, the production personnel place a fixed tool 6 with the curved glass 7 fixed thereon onto the left and right conveyors 511 of the first pre-vacuum chamber 21, and the left and right conveyors 511 drive the fixed tool 6 to move forward. In other embodiments, the production personnel can place multiple fixed tools 6 at a time according to actual conditions, and the left and right conveyors drive the fixed tools to move forward. The left and right conveyors can be temporarily stopped to make the fixed tools stay in the corresponding chambers for a short time, and then the left and right conveyors drive the fixed tools to move forward after the pumps, the gas supply pumps and the magnetron sputtering devices in the chambers complete the relevant processes. In addition, in the embodiment, the first pre-vacuum chamber 21, the second pre-vacuum chamber 22 and the recovery pressure chamber 4 are all provided with sealing gates. In other embodiments, the sealing gates can be replaced by the lifting gate plates 313, 323 of the magnetron sputtering chambers 31, 32, which can also seal the entrances and exits.

[0038] The above description is only an embodiment of the present application, and does not limit the patent protection scope. Those skilled in the art can make non-essential changes or substitutions on the basis of the present application, and still fall within the patent protection scope.

Claims

1. A curved glass coating production line comprising a transport mechanism and a magnetron sputtering chamber arranged along the transport route of the transport mechanism, characterized in that The fixed tooling is conveyed by the conveying mechanism, and after the curved glass is fixed by the fixed tooling, the conveying mechanism sends the fixed tooling with the curved glass to the magnetron sputtering chamber; the fixed tooling specifically comprises a frame body, two moving members are movably arranged on the frame body, two sliding blocks are movably arranged on each moving member, and the four sliding blocks are transversely movable and jointly clamp and fix the four corners of the curved glass; The conveying mechanism comprises a left conveying belt and a right conveying belt; the fixed tooling is provided with a left wing and a right wing which are respectively placed on the left conveying belt and the right conveying belt, and the left conveying belt and the right conveying belt send the fixed tooling with the fixed curved glass to the magnetron sputtering chamber by conveying the wings of the fixed tooling; The fixed tooling comprises a frame body, and the wings are specifically arranged on the two sides of the frame body; a region between the left conveying belt and the right conveying belt is left empty to expose a lower part of the frame body; and the lower part of the frame body is correspondingly provided with a left empty region to expose the downward back surface of the curved glass.

2. The curved glass coating production line of claim 1, wherein, In the magnetron sputtering chamber, a magnetron sputtering device is arranged below the conveying mechanism and is upwardly aligned with the region left empty between the left conveying belt and the right conveying belt to magnetron sputter the downward back surface of the curved glass in the fixed tooling passing through.

3. The curved glass coating production line of claim 1, wherein the coating chamber is a coating chamber for forming a coating layer on the curved glass sheet, and the coating chamber is a coating chamber for forming a coating layer on the curved glass sheet. The magnetron sputtering chamber, the pre-vacuum chamber and the recovery pressure chamber are arranged in sequence according to the conveying direction of the conveying mechanism, and the inlet of the magnetron sputtering chamber is connected with the outlet of the pre-vacuum chamber, and the outlet of the magnetron sputtering chamber is connected with the inlet of the recovery pressure chamber.

4. The curved glass coating production line of claim 3, wherein: A first lifting gate is arranged at any position from the inlet of the magnetron sputtering chamber to the outlet of the pre-vacuum chamber to seal; and / or a second lifting gate is arranged at any position from the outlet of the magnetron sputtering chamber to the inlet of the recovery pressure chamber to seal.

5. The curved glass coating production line of claim 4, wherein the coating chamber is a coating chamber for forming a coating layer on the curved glass sheet. The pre-vacuum chamber is provided with an air exhaust pump near the outlet thereof, and the magnetron sputtering chamber is provided with an air supply pump near the inlet thereof, and in the state that the first lifting gate is opened, the air supply pump continuously supplies air to the magnetron sputtering chamber and the air exhaust pump continuously exhausts air from the pre-vacuum chamber.

6. The curved glass coating production line of claim 3, wherein the coating line is a continuous coating line. A first sealing member is arranged between the magnetron sputtering chamber and the pre-vacuum chamber, and / or a second sealing member is arranged between the magnetron sputtering chamber and the recovery pressure chamber.

7. The curved glass coating production line of claim 3, wherein: The inlet of the pre-vacuum chamber is provided with an outwardly open sealing gate; and / or the outlet of the recovery pressure chamber is provided with an outwardly open sealing gate.

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