Electrostatic chuck high temperature testing device

Abstract

The present application relates to a semiconductor device, in particular to an electrostatic chuck high temperature testing device. The purpose of the present application is to provide an electrostatic chuck high temperature testing device with higher testing efficiency, which specifically comprises a preheating chamber, a testing chamber, a cooling chamber and a conveying assembly arranged in sequence, a vacuum interface is arranged on the side wall of the preheating chamber, the testing chamber and the cooling chamber respectively, each vacuum interface is in communication with the inner cavity of the preheating chamber, the testing chamber and the cooling chamber respectively, the preheating chamber and the cooling chamber are respectively provided with a detachable chamber cover, the preheating chamber is used for heating the electrostatic chuck, the testing chamber is used for testing the heated electrostatic chuck, the cooling chamber is used for cooling the tested electrostatic chuck, and the conveying assembly is used for conveying the electrostatic chuck from the preheating chamber to the testing chamber and then from the testing chamber to the cooling chamber.

Description

Electrostatic Chuck High Temperature Testing Device Technical Field

[0001] This invention relates to a semiconductor device, and more particularly to a high-temperature testing device for an electrostatic chuck. Background Technology

[0002] When performing performance testing on an electrostatic chuck, the electrostatic chuck is installed on a fixture inside the chamber to ensure the chamber is airtight. In a vacuum environment, the electrostatic chuck is energized, and it adsorbs wafers and other adsorbed objects. The adsorption force is calculated by reading the back pressure.

[0003] When performing high-temperature testing on electrostatic chucks using existing testing equipment, the chuck is first heated. If a problem occurs with the chuck or the test is completed and the next chuck needs to be tested, the chamber must be allowed to cool to near room temperature before the chuck can be removed. Furthermore, when the chuck is clamped, due to the different materials of the clamp and the chuck and their mismatched thermal expansion, the chuck can only be cooled slowly in a vacuum through thermal radiation to prevent damage; rapid cooling is not possible. The total time for high-temperature testing of a single electrostatic chuck in a single chamber is close to one working day, which is inefficient. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a high-temperature testing device for electrostatic chucks with higher detection efficiency.

[0005] To address the aforementioned technical problems, this application provides the following technical solution:

[0006] The present invention relates to a high-temperature testing device for an electrostatic chuck, comprising a preheating chamber, a testing chamber, a cooling chamber, and a conveying assembly arranged sequentially. Vacuum interfaces are respectively provided on the side walls of the preheating chamber, the testing chamber, and the cooling chamber, and each vacuum interface communicates with the inner cavity of the preheating chamber, the testing chamber, and the cooling chamber. The preheating chamber and the cooling chamber are each equipped with a removable chamber cover. The preheating chamber is used to heat the electrostatic chuck, the testing chamber is used to test the heated electrostatic chuck, and the cooling chamber is used to cool the tested electrostatic chuck. The conveying assembly is used to transfer the electrostatic chuck from the preheating chamber to the testing chamber, and then from the testing chamber to the cooling chamber.

[0007] The present invention relates to a high-temperature testing device for an electrostatic chuck, wherein a heater is provided in the preheating chamber.

[0008] The present invention relates to a high-temperature testing device for an electrostatic chuck, wherein a heat spreader is provided on the surface of the heater.

[0009] The present invention relates to a high-temperature testing device for an electrostatic chuck, wherein the testing chamber is provided with a testing fixture and an elastic clamping mechanism, the elastic clamping mechanism is used to position the electrostatic chuck, and the testing fixture is used to test the electrostatic chuck.

[0010] The present invention relates to a high-temperature testing device for an electrostatic chuck, wherein a cooler is provided in the cooling chamber.

[0011] The present invention relates to a high-temperature testing device for an electrostatic chuck, wherein a cooling gas nozzle is provided on the inner wall of the cooling chamber, and the cooling gas nozzle is connected to a non-oxidizing gas source.

[0012] The present invention discloses a high-temperature testing device for an electrostatic chuck, wherein the conveying assembly includes a first conveying mechanism and a second conveying mechanism. A first partition device and the first conveying mechanism are disposed between the preheating chamber and the testing chamber. The first partition device is used to connect or separate the preheating chamber and the testing chamber. The first conveying mechanism is used to transport the electrostatic chuck located in the preheating chamber to the testing chamber. A second partition device and the second conveying mechanism are disposed between the testing chamber and the cooling chamber. The second partition device is used to connect or separate the testing chamber and the cooling chamber. The second conveying mechanism is used to transport the electrostatic chuck located in the testing chamber to the cooling chamber.

[0013] The present invention relates to an electrostatic chuck high-temperature testing device, wherein the first conveying mechanism and the second conveying mechanism are both three-degree-of-freedom manipulators, the first conveying mechanism is disposed in the preheating chamber, and the second conveying mechanism is disposed in the testing chamber.

[0014] The present invention relates to an electrostatic chuck high-temperature testing device, wherein the first partition device and the second partition device are both slide gate valves.

[0015] Compared with the prior art, the electrostatic chuck high-temperature testing device of the present invention has at least the following beneficial effects:

[0016] The electrostatic chuck high-temperature testing device of the present invention comprises a preheating chamber, a testing chamber, and a cooling chamber arranged sequentially. Each chamber provides a different function, and heating, testing, and cooling are completed independently by the three chambers, which are arranged in sequence. Therefore, the electrostatic chuck can be preheated in advance and cooled rapidly, and the entire testing process can be carried out continuously, significantly shortening the testing time and improving the testing efficiency. At the same time, since each chamber performs a different function, the structures of the preheating chamber, testing chamber, and cooling chamber are simplified. With a small initial investment, the testing efficiency is greatly improved, and the testing efficiency is higher than that of several single-chamber testing devices with the same total cost.

[0017] The electrostatic chuck high-temperature testing device of the present invention will be further described below with reference to the accompanying drawings. Attached Figure Description

[0018] Figure 1 is a schematic diagram of the preheating chamber in the electrostatic chuck high-temperature testing device of the present invention;

[0019] Figure 2 is a schematic diagram of the test chamber in the electrostatic chuck high-temperature test device of the present invention;

[0020] Figure 3 is a schematic diagram of the cooling chamber in the electrostatic chuck high-temperature testing device of the present invention;

[0021] Figure 4 is a schematic diagram of the structure of the electrostatic chuck high-temperature testing device of the present invention. Detailed Implementation

[0022] As shown in Figures 1, 2, 3, and 4, the electrostatic chuck high-temperature testing device of the present invention includes a preheating chamber 1, a testing chamber 3, a cooling chamber 5, and a conveying assembly placed sequentially. Vacuum interfaces 81, 82, and 83 are respectively provided on the side walls of the preheating chamber 1, the testing chamber 3, and the cooling chamber 5. Each vacuum interface 81, 82, and 83 is connected to the inner cavity of the preheating chamber 1, the testing chamber 3, and the cooling chamber 5. The preheating chamber 1 and the cooling chamber 5 are respectively equipped with removable chamber covers 13 and 53. The preheating chamber 1 is used to heat the electrostatic chuck, the testing chamber 3 is used to test the heated electrostatic chuck, and the cooling chamber 5 is used to cool the tested electrostatic chuck. The conveying assembly is used to transfer the electrostatic chuck from the preheating chamber 1 to the testing chamber 3, and then from the testing chamber 3 to the cooling chamber 5. When the electrostatic chuck high-temperature testing device of the present invention is working, the preheating chamber 1, the testing chamber 3, and the cooling chamber 5 are evacuated through vacuum interfaces 81, 82, and 83, respectively. The first electrostatic chuck is placed in the preheating chamber 1 for heating. After the required temperature is reached, the first electrostatic chuck is sent to the testing chamber 3 for performance testing via the conveying component. At the same time, the second electrostatic chuck is placed in the preheating chamber 1 to start heating. After the first electrostatic chuck is tested, it is conveyed to the cooling chamber 5 for cooling via the conveying component. After the second electrostatic chuck is heated to the predetermined temperature, it is tested in the testing chamber 3 and cooled in the cooling chamber 5 in sequence. The electrostatic chuck high-temperature testing device of the present invention includes a preheating chamber 1, a testing chamber 3, and a cooling chamber 5 arranged in sequence. Each of the above chambers provides different functions. Heating, testing, and cooling are completed independently by the three chambers, which are arranged in sequence. Therefore, the electrostatic chuck can be preheated in advance and cooled quickly, and the entire testing process can be carried out continuously, which greatly shortens the testing time and improves the testing efficiency. At the same time, since each chamber performs different functions, the structures of the preheating chamber, testing chamber, and cooling chamber are simplified. With a small initial investment, the testing efficiency is greatly improved, and the testing efficiency is higher than that of several single-chamber testing devices with the same total cost.

[0023] Optionally, a heater 2 is installed in the preheating chamber 1, and the power of the heater 2 can be adjusted according to different operating conditions. Since the electrostatic chuck only heats up in the preheating chamber 1 without clamping, there is no need to consider the thermal expansion of the electrostatic chuck and clamping equipment, which can quickly heat up and cool down, further improving the detection efficiency.

[0024] Optionally, a heat spreader plate is also provided on the surface of heater 2 to adjust the heating rate of the electrostatic chuck. The preheating chamber 1, heater 2 and heat spreader plate are all made of high-temperature resistant materials and have a low vacuum release rate.

[0025] Optionally, the test chamber 3 is equipped with a test fixture 14 and an elastic clamping mechanism 4. The elastic clamping mechanism 4 is used to position the electrostatic chuck and prevent damage to the electrostatic chuck during clamping. The test fixture 14 is used to test the electrostatic chuck. The test fixture 14 provides the water, electricity, and gas functions required for electrostatic chuck testing, and the elastic clamping mechanism 4 is matched with the coefficient of thermal expansion of the electrostatic chuck.

[0026] Optionally, a cooler 6 is provided in the cooling chamber 5, and the cooling rate of the cooler 6 can be adjusted according to different operating conditions.

[0027] Optionally, the inner wall of the cooling chamber 5 is also provided with a cooling gas nozzle 7, which is connected to a non-oxidizing gas source. The cooling rate of the cooling gas nozzle 7 is lower than that of the cooler 6, and it is used to cool the electrostatic chuck in the high-temperature section of the electrostatic chuck to reduce the cooling rate and prevent the material of the electrostatic chuck from cracking.

[0028] Optionally, the conveying assembly includes a first conveying mechanism 11 and a second conveying mechanism 12. A first partition device and the first conveying mechanism 11 are provided between the preheating chamber 1 and the testing chamber 3. The first partition device is used to connect or separate the preheating chamber 1 and the testing chamber 3. When the first partition device is open, the first conveying mechanism 11 is used to transport the electrostatic chuck located in the preheating chamber 1 to the testing chamber 3. A second partition device and the second conveying mechanism 12 are provided between the testing chamber 3 and the cooling chamber 5. The second partition device is used to connect or separate the testing chamber 3 and the cooling chamber 5. The second conveying mechanism 12 is used to transport the electrostatic chuck located in the testing chamber 3 to the cooling chamber 5. By conveying the electrostatic chuck through the first conveying mechanism 11 and the second conveying mechanism 12, no manual operation is required, further improving testing efficiency.

[0029] Optionally, both the first conveying mechanism 11 and the second conveying mechanism 12 are three-degree-of-freedom manipulators. The first conveying mechanism 11 is located in the preheating chamber 1, and the second conveying mechanism 12 is located in the testing chamber 3. The first conveying mechanism 11 and the second conveying mechanism 12 can perform up-and-down, translational, and rotational movements to realize the function of up-and-down and horizontally conveying objects.

[0030] Optionally, the first partition device and the second partition device are respectively a first slide gate valve 9 and a second slide gate valve 10. The inlet and outlet of the first slide gate valve 9 are respectively installed on the preheating chamber 1 and the test chamber 3 with screws, and the inlet and outlet of the second slide gate valve 10 are respectively installed on the preheating chamber 3 and the cooling chamber 5 with screws.

[0031] The working process of the electrostatic chuck high-temperature testing device of the present invention is as follows:

[0032] The first electrostatic chuck 15 to be tested is placed in the preheating chamber 1 for preheating. The heating rate of the first electrostatic chuck 15 in a free state without clamping can reach 20 degrees / minute. When the predetermined temperature is reached and the vacuum degree in the preheating chamber 1 is equal to the vacuum degree in the test chamber 3, the first insert valve 9 is opened and the first conveying mechanism 11 transports the first electrostatic chuck 15 to the test fixture 14 in the test chamber 3, and it is clamped by the elastic clamping mechanism 4.

[0033] In test chamber 3, the various parameters of the first electrostatic chuck 15 are tested. At the same time, the first slide valve 9 is closed, the heater 2 is closed, and non-oxidizing gas is introduced into the preheating chamber 1 through the vacuum interface 81 to atmospheric pressure. The chamber cover 13 is opened and the second electrostatic chuck is placed in. The chamber cover 13 is closed, and a vacuum is drawn through the vacuum interface 81 to preheat the second electrostatic chuck.

[0034] When the first electrostatic chuck 15 in the test chamber 3 has been tested and the vacuum level in the test chamber 3 is equal to that in the cooling chamber 5, the second gate valve 10 is opened, and the second conveying mechanism 12 conveys the first electrostatic chuck 15 to the cooler 6 in the cooling chamber 5. The second gate valve 10 is closed, and the cooler nozzle 7 is opened for high-temperature cooling at a rate of 20 degrees / minute. When the temperature drops below 100 degrees, the cooler 6 is opened for rapid cooling. When the first electrostatic chuck 15 reaches the operable temperature, non-oxidizing gas is introduced into the cooling chamber 5 through the vacuum interface 83 to atmospheric pressure. The chamber cover 53 is opened, the first electrostatic chuck 15 is taken out, the chamber cover 53 is closed, and a vacuum is drawn through the vacuum interface 83.

[0035] Repeating the above process can significantly improve detection efficiency and save time and labor costs.

[0036] The embodiments described above are merely preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Various modifications and improvements made by those skilled in the art to the technical solutions of the present invention without departing from the spirit of the present invention should fall within the protection scope defined by the claims of the present invention.

Claims

1. A high-temperature testing device for an electrostatic chuck, characterized in that, The device includes a preheating chamber (1), a testing chamber (3), a cooling chamber (5), and a conveying assembly arranged sequentially. Vacuum interfaces (81, 82, 83) are respectively provided on the side walls of the preheating chamber (1), the testing chamber (3), and the cooling chamber (5). Each vacuum interface (81, 82, 83) is connected to the inner cavity of the preheating chamber (1), the testing chamber (3), and the cooling chamber (5). The preheating chamber (1) and the cooling chamber (5) are respectively equipped with removable chamber covers (13, 53). The preheating chamber (1) is used to heat the electrostatic chuck. The testing chamber (3) is used to test the heated electrostatic chuck. The cooling chamber (5) is used to cool the tested electrostatic chuck. The conveying assembly is used to transfer the electrostatic chuck from the preheating chamber (1) to the testing chamber (3) and then from the testing chamber (3) to the cooling chamber (5).

2. The electrostatic chuck high-temperature testing device according to claim 1, characterized in that, A heater (2) is installed in the preheating chamber (1).

3. The electrostatic chuck high-temperature testing device according to claim 2, characterized in that, The heater (2) has a heat spreader plate on its surface.

4. The electrostatic chuck high-temperature testing device according to claim 3, characterized in that, The test chamber (3) is equipped with a test fixture (14) and an elastic clamping mechanism (4). The elastic clamping mechanism (4) is used to position the electrostatic chuck, and the test fixture (14) is used to test the electrostatic chuck.

5. The electrostatic chuck high-temperature testing device according to claim 4, characterized in that, A cooler (6) is installed inside the cooling chamber (5).

6. The electrostatic chuck high-temperature testing device according to claim 5, characterized in that, The inner wall of the cooling chamber (5) is provided with a cooling gas nozzle (7), which is connected to a non-oxidizing gas source.

7. The electrostatic chuck high-temperature testing device according to claim 6, characterized in that, The conveying assembly includes a first conveying mechanism (11) and a second conveying mechanism (12). A first partition device and the first conveying mechanism (11) are provided between the preheating chamber (1) and the test chamber (3). The first partition device is used to connect or separate the preheating chamber (1) and the test chamber (3). The first conveying mechanism (11) is used to transport the electrostatic chuck located in the preheating chamber (1) to the test chamber (3). A second partition device and the second conveying mechanism (12) are provided between the test chamber (3) and the cooling chamber (5). The second partition device is used to connect or separate the test chamber (3) and the cooling chamber (5). The second conveying mechanism (12) is used to transport the electrostatic chuck located in the test chamber (3) to the cooling chamber (5).

8. The electrostatic chuck high-temperature testing device according to claim 7, characterized in that, Both the first conveying mechanism (11) and the second conveying mechanism (12) are three-degree-of-freedom manipulators. The first conveying mechanism (11) is located in the preheating chamber (1), and the second conveying mechanism (12) is located in the test chamber (3).

9. The electrostatic chuck high-temperature testing device according to claim 8, characterized in that, Both the first partition device and the second partition device are slide gate valves (9, 10).

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