A faceplate component cleaning apparatus and cleaning chemical formulation

Abstract

The application discloses a kind of Faceplate component cleaning device and cleaning chemical formula, it is related to semiconductor equipment cleaning technical field, including installation on support base pure water tank, chemical tank and cleaning tank:It also includes power component, for respectively separately with the chemical in the pure water tank and the chemical tank of the pure water injection described pure water tank and described chemical tank in described cleaning tank and drive liquid in described cleaning tank carry out fast up and down to and fro flow, to realize to the continuous flushing of cleaning component.This device can be back and forth to component quickly flushing, greatly shorten the back and forth flushing interval time, so that stubborn impurities quickly fall off, also greatly shorten the chemical cleaning time, and this power component can be back and forth to component flushing operation of pure water in pure water tank and chemical in chemical tank, without installing multiple drive motor, power cylinder and its related components, can reduce cost.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor equipment cleaning, in particular to a Faceplate component cleaning device and cleaning chemical formula. BACKGROUND

[0002] Faceplate is a kind of disc-shaped semiconductor equipment component, which is used in semiconductor CVD (chemical vapor deposition) process. In use, gas and vapor material are introduced into the reactor through the dense through holes in the bottom of the Faceplate, the raw material diffuses through the boundary layer and contacts the surface of the substrate, and a chemical reaction occurs on the surface of the substrate with the movement of the adsorbed raw material. The component can avoid adverse reactions or uneven reactions during the introduction of the reaction gas in the CVD process, and the through holes of the Faceplate play a key role, so the cleaning of the through holes of the Faceplate is very high.

[0003] At present, the cleaning process in the domestic cleaning industry mainly uses a certain proportion of mixed chemicals to remove surface deposits. As for the deposition on the wall of the component hole, the existing method is to form an impact on the hole wall by pumping out the liquid, so as to wash down the deposition in the hole wall. The operation steps are as follows:

[0004] S1: Stack multiple components in the cleaning tank, and use the reversing valve and the power unit (such as pump body) to quickly pump the chemical liquid in the chemical tank to the cleaning tank and completely immerse the components, forming a downward flushing of the components, and then use the power unit to quickly pump all the chemical liquid in the cleaning tank back to the chemical tank, forming an upward flushing of the components, and repeating the above steps multiple times;

[0005] S2: After the chemical cleaning is completed, the reversing valve is reversed, and the pure water in the pure water tank is quickly pumped into the cleaning tank by another power unit, and then quickly pumped out, so as to repeatedly flush the components and remove the residual chemicals.

[0006] However, the above-mentioned method of pumping out liquid to clean the components has some disadvantages. When multiple stacked components are flushed, the time interval between downward flushing and upward flushing is too long (i.e. the interval time between back and forth flushing is too long), which makes it difficult to timely flush some stubborn deposits (some deposits are different in shape, so they are subjected to different impact forces of the upward moving fluid or the downward moving fluid, and the deposits are easily removed only when they are subjected to a large impact force, and most of the time, multiple impacts are required. Therefore, the frequency of back and forth impact can be increased by shortening the time interval between downward flushing and upward flushing, so as to accelerate the removal of stubborn deposits and shorten the cleaning time. Therefore, the present application provides a Faceplate component cleaning device and a cleaning chemical formula to meet the demand. SUMMARY

[0007] The Faceplate component cleaning device and cleaning chemical formula are provided to solve the problem of long cleaning time caused by long interval time of back and forth flushing in the prior art.

[0008] To achieve the above object, the application provides the following technical scheme: a Faceplate component cleaning device, comprising a pure water tank, a chemical tank and a cleaning tank installed on a support base, the pure water tank and the chemical tank are both provided with a liquid injection pipe and a liquid delivery pipe, the two liquid delivery pipes are both provided with a liquid discharge pipe with a valve, the liquid outlet ends of the two liquid delivery pipes are both connected with a liquid inlet pipe at the bottom of the cleaning tank through a reversing element, and the device further comprises a power element for separately injecting pure water and chemical in the pure water tank and the chemical tank into the cleaning tank and driving the liquid in the cleaning tank to flow up and down quickly to realize continuous flushing of the Faceplate component.

[0009] Preferably, the power element comprises a power cylinder installed on the support base and a hard pipe connecting the inner cavities of the chemical tank and the pure water tank and provided with a valve, the telescopic end of the power cylinder penetrates the upper opening of the chemical tank and is fixedly connected with a driving motor, a rotating cylinder is fixed on the output shaft of the driving motor, an annular groove is obliquely arranged on the inner wall of the hollow cavity of the rotating cylinder, a piston plate provided with a sealing ring on the outer wall is arranged below the rotating cylinder, an L-shaped movement rod is installed at the upper end shaft center of the piston plate, the end of the L-shaped movement rod is slidingly arranged in the annular groove, a limiting column is installed on the piston plate and penetrates a limiting plate, the limiting plate is fixedly sleeved on the telescopic end of the power cylinder at the upper end, the lower end of the limiting plate is rotationally connected with the output shaft of the driving motor through a bearing, one end of the hard pipe penetrates the chemical tank and is connected with a breather pipe penetrating the piston plate through a hose;

[0010] The upper end of the cleaning tank is open and is sealed by a sealing cover, and a waterproof breather is installed in the upper end through hole of the sealing cover to prevent the liquid in the cleaning tank from overflowing and make the internal pressure consistent with the outside;

[0011] An extrusion gap is arranged between the piston plate and the upper end of the liquid surface in the chemical tank.

[0012] Preferably, the cleaning tank is installed on the support base through a heightening frame, and the liquid outlet ends of the two liquid delivery pipes are both higher than the liquid surface heights in the corresponding pure water tank and chemical tank.

[0013] Preferably, the waterproof breather is clamped and fixed between two support nets.

[0014] Preferably, the inner cavity of the cleaning tank is provided with a rack, the rack comprising three limiting columns arranged circumferentially, and a C-shaped reinforcing rod and a support ring arranged on the three limiting columns from top to bottom.

[0015] Preferably, the rack is placed in the cleaning tank, the inner cavity bottom of the cleaning tank is provided with a slot matched with the three limiting columns, and the upper ends of the three limiting columns abut against the bottom end of the sealing cover.

[0016] Preferably, the reversing piece comprises a rotary joint mounted on the liquid inlet end of the cleaning tank, the outer wall of the rotary joint is provided with a rotary handle, the inner cavity of the rotary joint is fixed with a blocking plate, the blocking plate is provided with a water passing hole, and the liquid inlet end of the cleaning tank is provided with two liquid inlet holes corresponding to the positions of the two liquid outlet ends of the two liquid delivery pipes.

[0017] A Faceplate component cleaning chemical formula is composed of hydrofluoric acid, ammonium fluoride and ethylene glycol, and the hydrofluoric acid, the ammonium fluoride and the ethylene glycol are all electronic grade.

[0018] In summary, the technical effects and advantages of the present application are as follows:

[0019] 1. The present application has a reasonable structure, is provided with a power piece, can quickly back and forth flush the components, greatly shortens the back and forth flushing interval time, makes the stubborn impurities quickly fall off, and also greatly shortens the chemical washing time, and the power piece can respectively flush the components with pure water in the pure water tank and the chemical in the chemical tank, without the need to install multiple driving motors, power cylinders and related components, so that the cost can be reduced.

[0020] 2. In the present application, the liquid outlet ends of the two liquid delivery pipes are both higher than the liquid surface heights in the corresponding pure water tank and chemical tank, so as to ensure that when the chemical or pure water flushing is completed and the piston plate returns to the original position, the chemical or pure water in the cleaning tank can completely enter the corresponding liquid delivery pipe, avoiding the mixing of the chemical containing impurities and pure water after cleaning, which increases the impurity content in the pure water and affects the flushing effect of the pure water on the components.

[0021] 3. In the present application, the chemical is composed of hydrofluoric acid, ammonium fluoride and ethylene glycol, the chemical formula does not introduce impurity elements, effectively reduces the corrosiveness of the chemical, prolongs the cleaning window time, and reduces the corrosion loss of the components.

[0022] 4. In the present application, the hydrofluoric acid, the ammonium fluoride and the ethylene glycol are configured according to effective components 3:1:6, and it is verified that the component loss thickness is about 0.00015 inch after soaking for 30 minutes, which is very small. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings described below only illustrate some of the embodiments of the present application, and are not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor are within the scope of protection of the present application.

[0024] Figure 1 Schematic diagram of the rear view structure of the present application;

[0025] Figure 2 Schematic diagram of the rear view structure of the present application;

[0026] Figure 3 Schematic diagram of the rear view structure of the present application; Figure 1 Schematic diagram of the rear view structure of the present application;

[0027] Figure 4 Schematic diagram of the rear view structure of the present application; Figure 3 Schematic diagram of the rear view structure of the present application;

[0028] Figure 5 Schematic diagram of the rear view structure of the present application; Figure 1 Schematic diagram of the rear view structure of the present application;

[0029] Figure 6 Schematic diagram of the rear view structure of the present application; Figure 5 Schematic diagram of the rear view structure of the present application;

[0030] Figure 7 Schematic diagram of the rear view structure of the present application; Figure 5 Schematic diagram of the rear view structure of the present application.

[0031] In the figure: 1, support base; 2, pure water tank; 3, liquid injection pipe; 4, infusion pipe; 5, reversing piece; 51, rotary joint; 52, blocking plate; 53, liquid inlet hole; 54, water passage hole; 55, rotary handle; 6, cleaning tank; 7, liquid discharge pipe; 8, sealing cover; 9, power element; 91, power cylinder; 92, driving motor; 93, piston plate; 94, rotary cylinder; 95, limiting plate; 96, limiting column; 97, hard pipe; 98, L-shaped movement rod; 99, annular groove; 910, soft pipe; 911, air pipe; 10, medicine tank; 11, heightening stand; 12, waterproof air permeable element; 13, placing rack; 131, C-shaped reinforcing rod; 132, support ring; 133, limiting stand column. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, and not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor are within the scope of protection of the present application.

[0033] Example: Reference Figure 1 The faceplate component cleaning device shown includes a pure water tank 2, a medicine tank 10, and a cleaning tank 6 mounted on a support base 1. Both the pure water tank 2 and the medicine tank 10 are equipped with an injection pipe 3 and an infusion pipe 4. Both infusion pipes 4 are equipped with a drain pipe 7 with a valve. The outlet ends of both infusion pipes 4 are connected to the inlet pipe at the bottom of the cleaning tank 6 through a reversing component 5. The device is characterized by further including a power component 9, which is used to inject pure water and medicine from the pure water tank 2 and the medicine tank 10 into the cleaning tank 6 respectively and drive the liquid in the cleaning tank 6 to flow up and down rapidly, so as to achieve continuous rinsing of the faceplate component.

[0034] As a preferred embodiment of this example, Figures 2-4 As shown, the power component 9 includes a power cylinder 91 mounted on the support base 1 and a rigid pipe 97 connecting the medicine tank 10 to the inner cavity of the pure water tank 2 and equipped with a valve. The telescopic end of the power cylinder 91 passes through the upper opening of the medicine tank 10 and is fixedly connected to the drive motor 92. A rotating cylinder 94 is fixed on the output shaft of the drive motor 92, and an annular groove 99 is inclinedly provided on the hollow inner wall of the rotating cylinder 94. A piston plate 93 with a sealing ring on its outer wall is provided below the rotating cylinder 94, and an L-shaped moving rod 98 is installed at the axial center of the upper end of the piston plate 93. The end of the L-shaped moving rod 98 is slidably disposed in the annular groove 99. The piston plate 93 is equipped with... There is a limiting post 96, which penetrates the limiting plate 95. The upper end of the limiting plate 95 is fixedly sleeved on the telescopic end of the power cylinder 91. The lower end of the limiting plate 95 is rotatably connected to the output shaft of the drive motor 92 through a bearing. One end of the rigid tube 97 penetrates the medicine tank 10 and is connected to the vent pipe 911 that seals the piston plate 93 through the hose 910. The upper end of the cleaning tank 6 is open and sealed by the sealing cover 8. A waterproof and breathable component 12 is installed in the through hole at the upper end of the sealing cover 8 to prevent the liquid inside the cleaning tank 6 from overflowing and to make its internal air pressure the same as the outside. There is a squeezing gap between the piston plate 93 and the upper end of the liquid surface inside the medicine tank 10.

[0035] Before cleaning, the valves on the two liquid injection pipes 3, the two liquid discharge pipes 7 and the hard pipe 97 are in a closed state. The medicine tank 10 is communicated with the inner cavity of the cleaning tank 6 through the reversing piece 5. At this time, the power cylinder 91 drives the piston plate 93 to move downward quickly. The air extrusion liquid surface extrudes the medicine into the cleaning tank 6 and overflows the stacked components to perform a downward flushing. The power cylinder 91 is stopped. At this time, the driving motor 92 drives the rotating cylinder 94 to rotate quickly. The L-shaped movement rod 98 moves up and down along the annular path of the annular groove 99 arranged obliquely (the L-shaped movement rod 98 is limited by the limiting column 96 to move stably up and down). When the L-shaped movement rod 98 drives the piston plate 93 to move downward, the medicine tank 10 forms a positive pressure. The air extrusion liquid surface continues to inject the medicine into the cleaning tank 6 to form an upward flushing. When the L-shaped movement rod 98 drives the piston plate 93 to move upward, the medicine tank 10 forms a negative pressure. At this time, the external atmospheric pressure presses the liquid in the cleaning tank 6 into the medicine tank 10 to form a downward flushing. Such a process is repeated until the cleaning is completed. The piston plate 93 quickly returns to the original position to quickly flush the components back and forth. The interval time between the back and forth flushing is greatly shortened. The stubborn impurities are quickly removed. The medicine cleaning time is also greatly shortened. After the medicine cleaning is completed, the pure water tank 2 is communicated with the inner cavity of the cleaning tank 6 through the reversing piece 5. The valve on the hard pipe 7 is opened to communicate the inner cavity of the medicine tank 10 with the pure water tank 2. At this time, the power cylinder 91 drives the piston plate 93 to move downward to press the pure water into the cleaning tank 6. The driving motor 92 is controlled to work to flush the components back and forth with the pure water. The operation is consistent with the medicine flushing operation. After the operation is completed, the components return to the original position. The piston plate 93 does not contact the liquid surface during the whole process.

[0036] It should be noted that: 1. The limiting plate 95 limits the limiting column 96 and also shares the extrusion force of the output shaft of the driving motor 92 to prevent the output shaft of the driving motor 92 from being damaged due to excessive extrusion force; 2. The power cylinder can be a rotary hydraulic cylinder, a gas cylinder or an electric telescopic cylinder; 3. The waterproof air permeable piece can be a waterproof air permeable film; 4. The driving motor 92 and the power cylinder 91 of the power piece 9 of the device can flush the components with the pure water in the pure water tank 2 and the medicine in the medicine tank 10 respectively. Multiple driving motors 92, power cylinders 91 and related components are not needed, which can reduce the cost.

[0037] As a preferred embodiment in the embodiment, the device comprises a pure water tank 2, a medicine tank 10, a cleaning tank 6, a power cylinder 91, a driving motor 92, a rotating cylinder 94, a L-shaped movement rod 98, a limiting column 96, a limiting plate 95 and a reversing piece 5. Figure 1As shown, the cleaning tank 6 is installed on the support base 1 through the heightening frame 11, and the liquid outlet ends of the two infusion tubes 4 are higher than the liquid levels in the pure water tank 2 and the medicine water tank 10 respectively, so that when the medicine water or the pure water is flushed and the piston plate 93 returns to the original position, the medicine liquid or the pure water in the cleaning tank 6 can enter the corresponding infusion tube 4 completely, avoiding the increase of the impurity content in the pure water due to the mixture of the impure medicine water and the pure water after cleaning, and affecting the flushing effect of the pure water on the components.

[0038] It should be noted that when the pure water tank 2 and the medicine water tank 10 are filled with liquid, the liquid level cannot be higher than the liquid outlet end of the infusion tube 4.

[0039] As a preferred embodiment in the present embodiment, as shown in Figure 5 As shown, the waterproof air permeable member 12 is clamped and fixed between the two support nets, and the waterproof air permeable member 12 can be supported to prevent damage due to excessive instantaneous air pressure.

[0040] As a preferred embodiment in the present embodiment, as shown in Figure 5 and Figure 6 As shown, the inner cavity of the cleaning tank 6 is provided with a placing rack 13, the placing rack 13 includes three limiting columns 133 arranged in a circle, and a C-shaped reinforcing rod 131 and a support ring 132 are arranged on the three limiting columns 133 from top to bottom. The support ring 132 can support the components stacked together on the ground, the three limiting columns 133 can limit the components, and the C-shaped reinforcing rod 131 can increase the structural strength of the placing rack 13 while leaving an opening, and the placing rack 13 can be placed and taken out through the opening.

[0041] As a preferred embodiment in the present embodiment, the placing rack 13 is placed in the cleaning tank 6, the inner cavity of the cleaning tank 6 is provided with a slot matched with the three limiting columns 133, and the upper ends of the three limiting columns 133 abut against the bottom end of the sealing cover 8 to clamp and fix the placing rack 13, preventing movement of the placing rack 13.

[0042] As a preferred embodiment in the present embodiment, as shown in Figure 7 As shown, the reversing member 5 includes a rotary joint 51 installed on the liquid inlet end of the cleaning tank 6, the outer wall of the rotary joint 51 is provided with a rotating handle 55, the inner cavity of the rotary joint 51 is fixed with a blocking plate 52, the blocking plate 52 is provided with a water passing hole 54, and the liquid inlet end of the cleaning tank 6 is provided with two liquid inlet holes 53 corresponding to the positions of the liquid outlet ends of the two infusion tubes 4. The water passing hole 54, the liquid inlet hole 53 and the infusion tube 4 are communicated by rotating the rotary joint 51, and then the pipeline reversing operation is performed.

[0043] A Faceplate component cleaning chemical formula is composed of hydrofluoric acid, ammonium fluoride and ethylene glycol, and the hydrofluoric acid, the ammonium fluoride and the ethylene glycol are all electronic grade, the chemical formula does not introduce impurity elements (such as not introducing P element, metal Na+ and the like, if P element is remained on the component, it will have adverse effect on later semiconductor ion implantation process, and metal Na+ also has adverse effect on electrical performance), meanwhile, effectively reduces corrosiveness of the chemical, prolongs cleaning window time, and reduces component corrosion loss.

[0044] As a preferred embodiment in the embodiment, the hydrofluoric acid, the ammonium fluoride and the ethylene glycol are configured in 3:1:6 of effective components, after being configured, are precipitated for 30 min, and insoluble substances are filtered out, it is verified that after being soaked for 30 min, the component loss thickness is about 0.00015 inch, and the component corrosion loss is very small.

[0045] Finally, it should be noted that: the above only for the preferred embodiments of the present application, and not for limiting the present application, although the present application is described in detail with reference to the foregoing embodiments, for those skilled in the art, the technical solution recorded in the foregoing embodiments can still be modified, or some technical features can be replaced, any modification, equivalent replacement, improvement and the like within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A faceplate component cleaning device, comprising a pure water tank (2), a medicine tank (10), and a cleaning tank (6) mounted on a support base (1), wherein the pure water tank (2) and the medicine tank (10) are each provided with an injection pipe (3) and an infusion pipe (4), and each of the two infusion pipes (4) is provided with a drain pipe (7) with a valve, and the outlet ends of the two infusion pipes (4) are connected to the inlet pipe at the bottom of the cleaning tank (6) via a reversing component (5), characterized in that: Also include power element (9), for respectively alone pure water tank (2) and the pure water and medicine water tank (10) in the medicine water injection into the cleaning tank (6) and drive the liquid in the cleaning tank (6) to carry out fast up and down back and forth flow, to realize the continuous back and forth flushing of Faceplate component, the Faceplate component is a kind of dish-shaped semiconductor equipment component, for semiconductor CVD process; The power element (9) includes a power cylinder (91) mounted on the support base (1) and a hard tube (97) connected with the pure water tank (2) and the medicine water tank (10) and provided with a valve, and the telescopic end of the power cylinder (91) penetrates the upper opening of the medicine water tank (10) and is fixedly connected with a driving motor (92), the output shaft of the driving motor (92) is fixedly connected with a rotating cylinder (94), and the inner wall of the hollow cavity of the rotating cylinder (94) is provided with an annular groove (99) obliquely, the lower part of the rotating cylinder (94) is provided with a piston plate (93) with a sealing ring on the outer wall, the upper end of the piston plate (93) is provided with an L-shaped moving rod (98), the end of the L-shaped moving rod (98) is slidably arranged in the annular groove (99), the piston plate (93) is provided with a limiting column (96), the limiting column (96) penetrates a limiting plate (95), the upper end of the limiting plate (95) is fixedly connected with the telescopic end of the power cylinder (91), the lower end of the limiting plate (95) is rotatably connected with the output shaft of the driving motor (92) through a bearing, one end of the hard tube (97) penetrates the medicine water tank (10) and is connected with a gas pipe (911) penetrating the piston plate (93) through a hose (910); The upper end of the cleaning tank (6) is open and is sealed by a sealing cover (8), and a waterproof and breathable element (12) is mounted in the through hole of the upper end of the sealing cover (8) to prevent the liquid in the cleaning tank (6) from overflowing and to make the internal pressure consistent with the outside; The piston plate (93) and the upper end of the liquid surface in the medicine water tank (10) are provided with an extrusion gap.

2. A faceplate component cleaning apparatus as claimed in claim 1, wherein: The cleaning tank (6) is installed on the support base (1) through a heightening frame (11), and the liquid outlet ends of the two liquid delivery pipes (4) are both higher than the liquid surface height in the corresponding pure water tank (2) and medicine water tank (10).

3. A faceplate component cleaning apparatus as claimed in claim 1, wherein: The waterproof and breathable element (12) is clamped and fixed between two support nets.

4. A faceplate component cleaning apparatus as claimed in claim 1, wherein: The inner cavity of the cleaning tank (6) is provided with a placing frame (13), and the placing frame (13) includes three limiting columns (133) arranged circumferentially, and a C-shaped reinforcing rod (131) and a supporting ring (132) are arranged on the three limiting columns (133) from top to bottom.

5. A faceplate component cleaning apparatus as claimed in claim 4, wherein: The placing frame (13) is placed in the cleaning tank (6), the inner cavity bottom of the cleaning tank (6) is provided with a slot matched with the three limiting columns (133), and the upper ends of the three limiting columns (133) abut against the bottom end of the sealing cover (8).

6. A faceplate component cleaning apparatus as claimed in claim 1, wherein: The reversing piece (5) comprises a rotary joint (51) installed on the liquid inlet end of the cleaning tank (6), and a rotating handle (55) is arranged on the outer wall of the rotary joint (51); the inner cavity of the rotary joint (51) is fixed with a blocking plate (52), and a water passing hole (54) is arranged on the blocking plate (52); the liquid inlet end of the cleaning tank (6) is provided with two liquid inlet holes (53) corresponding to the positions of the liquid outlet ends of the two liquid delivery pipes (4).

7. A faceplate component cleaning formula, characterized by: The mixture is composed of hydrofluoric acid, ammonium fluoride and ethylene glycol, and the hydrofluoric acid, the ammonium fluoride and the ethylene glycol are all electronic grade.

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