A square silicon rod end face size detection device and use method thereof

Abstract

The present invention provides a square silicon rod end face size detection device and a method for using the same, and belongs to the technical field of square silicon rod end face size detection. The device includes: a silicon rod conveying mechanism, a silicon rod moving mechanism, a visual acquisition mechanism, a grating ruler assembly, a photoelectric induction switch, a silicon rod conveying controller and a visual controller, wherein the silicon rod conveying controller is used to receive signals from the photoelectric induction switch, control the silicon rod conveying mechanism and the silicon rod moving mechanism, the silicon rod industrial production line transports the silicon rod to the initial position, the photoelectric induction switch senses the silicon rod and feeds back a first sensing signal, the silicon rod conveying mechanism conveys the silicon rod to the silicon rod moving mechanism after a delay of x1 seconds, the silicon rod moving mechanism moves the silicon rod to the acquisition position, and the end face of the silicon rod contacts the grating ruler assembly; the visual acquisition mechanism acquires an image containing the grating ruler scale and the silicon rod edge line and transmits it to the visual controller, performs data analysis, and obtains the peripheral size of the silicon rod and the diagonal size of the silicon rod.

Description

Technical Field

[0001] The present invention relates to the technical field of square silicon rod end face size detection, and in particular to a square silicon rod end face size detection device and a use method thereof. Background Art

[0002] A processing technology of single crystal silicon wafers consists of crystal pulling, cutting, squaring, polishing, slicing and sorting. After the polishing process, square silicon rods are obtained, and silicon wafers are obtained by cutting the square silicon rods. Square silicon rods are a product form in the processing of square silicon wafers. Silicon wafers are obtained after the silicon rods are sliced. Therefore, testing the end face size of single crystal silicon rods can further improve the yield of silicon wafers and reduce production costs.

[0003] The national standard has set error range requirements for the size of square silicon wafers, with the error of the side length not exceeding 0.25mm, the error of the diagonal length and the chamfer length not exceeding 0.5mm, etc. In the actual production and testing process, the testing requirements of silicon wafers of different specifications of each company are also different according to different needs. At present, the detection of silicon rod size is mostly done by manually measuring various parts of the silicon rod end face with a vernier caliper. The detection efficiency is low and time-consuming, which hinders the process of realizing fully automated production of silicon wafers. In addition, due to the limitation of the vernier scale graduation value, the manual reading itself will also have reading errors, so the measurement accuracy is not high, which affects the accuracy of error judgment. Summary of the invention

[0004] In view of this, the present invention provides a square silicon rod end face size detection device and an end face size detection method, which realize automatic detection of the silicon rod end face size and have the advantage of high precision.

[0005] The technical solution adopted by the embodiment of the present invention to solve the technical problem is:

[0006] A square silicon rod end face size detection device comprises: a silicon rod conveying mechanism (2), a silicon rod moving mechanism (3), a visual collection mechanism (4), a grating ruler assembly (5), a photoelectric sensor switch (6), a silicon rod conveying controller and a visual controller, wherein the silicon rod conveying controller is used to receive a signal from the photoelectric sensor switch (6), control the silicon rod conveying mechanism (2) and the silicon rod moving mechanism (3), a silicon rod industrial production line (1) transports the silicon rod (7) to an initial position, the photoelectric sensor switch (6) senses the silicon rod and feeds back a first sensing signal, and the silicon rod conveying controller receives a signal from the photoelectric sensor switch (6) and controls the silicon rod conveying mechanism (2) and the silicon rod moving mechanism (3). The rod transport mechanism (2) transports the silicon rod (7) from the initial position to the silicon rod moving mechanism (3) after a delay of x1 seconds. The silicon rod moving mechanism (3) moves the silicon rod (7) to a collection position so that the end face of the silicon rod (7) contacts the grating scale assembly (5) and faces the visual collection mechanism (4). The visual collection mechanism (4) collects an image containing the grating scale scale and the silicon rod edge line and transmits it to the visual controller. The visual controller performs data analysis and obtains the peripheral line size and diagonal line size of the silicon rod.

[0007] The silicon rod handling mechanism (2) comprises: a gantry support (201), and a first one-way screw assembly, a second one-way screw assembly, a lifting connecting rod (202), a horizontal platform (203), a two-way screw assembly, and a silicon rod clamp (204) connected in sequence, wherein the first one-way screw assembly and the second one-way screw assembly share a common guide slider (205), wherein:

[0008] The gantry support (201) is composed of a first support, a crossbeam, and a second support that are connected in sequence, the silicon rod industrial production line (1) passes through the gantry support (201), and the photoelectric sensor switch (6) is installed on the first support;

[0009] The first one-way screw assembly is installed in the horizontal direction, and its two ends are fixedly installed on the top of the first pillar and the top of the second pillar respectively. The common guide slider (205) is threadedly connected with the first one-way screw (219) in the first one-way screw assembly. Under the driving action of the first drive motor (218) in the first one-way screw assembly, the first one-way screw (219) rotates to make the common guide slider (205) reciprocate in the horizontal direction;

[0010] The second one-way screw assembly is fixedly mounted on one side surface of the lifting connecting rod (202), the common guide slider (205) is threadedly connected to the second one-way screw (227) in the second one-way screw assembly, and under the driving action of the second drive motor (226) in the second one-way screw assembly, the second one-way screw (227) is rotated to make the lifting connecting rod (202) reciprocate in the vertical direction;

[0011] The bottom of the lifting connecting rod (202) is connected to the upper surface of the horizontal platform (203), and the lower surface of the horizontal platform (203) is installed with the horizontally arranged bidirectional screw assembly; in the bidirectional screw assembly for providing clamping power, two clamping slide blocks (234) are each installed with one silicon rod clamp (204), and the two clamping slide blocks (234) are driven by a clamping motor to move toward or away from each other, so that the two silicon rod clamps (204) clamp or move away from the silicon rod;

[0012] The silicon rod moving mechanism (3) comprises: a first support frame (300), a third one-way screw assembly, a rotary reducer (321), and a silicon rod bearing platform (322) connected in sequence, and also comprises a rotary reducer driving motor (323), wherein the third one-way screw assembly is horizontally arranged and both ends are fixedly mounted on the first support frame (300); in the third one-way screw assembly, the third one-way screw (316) and the first one-way screw (219) are in a perpendicular relationship to each other, the upper surface of the third slide (312) is horizontally arranged, and the third one-way screw (316) is driven by a third driving motor (315) to make the third one-way screw (316) The third slide (312) reciprocates in the horizontal direction along the third one-way screw (316); the rotary reducer (321) and the rotary reducer drive motor (323) are fixedly installed on the upper surface of the third slide (312); the rotary output shaft of the rotary reducer (321) is connected to the lower surface of the silicon rod bearing platform (322); the rotary reducer (321) is connected to the rotary reducer drive motor (323) and is controlled by the rotary reducer drive motor (323) to perform fixed-point rotation on the same horizontal plane; the silicon rod bearing platform (322) is horizontally arranged, and the upper surface is used to bear the silicon rod (7);

[0013] The visual acquisition mechanism (4) comprises: a second support frame (400), a camera fixing frame (405) mounted on the rear end of the upper surface of the second support frame (400), and cameras (401) to (404) mounted on the camera fixing frame (405); in a left view in which the direction in which the lens faces the grating ruler assembly is located, the cameras (401) to (404) form a square and are located in the upper left position, the upper right position, the lower left position, and the lower right position, respectively;

[0014] The grating ruler assembly (5) comprises a grating ruler fixing frame (501) mounted on the front end of the upper surface of the first supporting frame (300), a group of springs (502), a limit switch (503), a grating ruler (504) of regular shape, a left light frame (505), a right light frame (506), and a fill light (507); the grating ruler (504) has four edge length scales and four chamfer line scales engraved by laser; the grating ruler (504) has four spring connection ends evenly distributed at the edge position, and the four springs (502) are all fixedly connected to one of the spring connection ends at one end and fixedly mounted on the grating ruler fixing frame (501) at the other end. On; a pair of limit switches (503) are installed on the grating ruler fixing frame (501), located between the grating ruler (504) and the grating ruler fixing frame (501), and located on the opposite side of the grating ruler fixing frame (501); the left light stand (505) and the right light stand (506) are relatively arranged on both sides of the grating ruler (504), and are installed on the first supporting frame (300), and one fill light (507) is installed on each of the left light stand (505) and the right light stand (506), and the two fill lights (507) are both facing the grating ruler (504) and are used to fill light for the grating ruler (504);

[0015] After the silicon rod (7) is moved to the silicon rod carrying platform (322), during the process of moving toward the collection position, the silicon rod (7) contacts the grating ruler (504) and stops moving after the two limit switches (503) are triggered. At this time, the silicon rod (7) reaches the collection position, and the end face of the silicon rod is in close contact with the grating ruler (504); the first camera (401) is used to photograph the upper left area of ​​the grating ruler (504), the second camera (402) is used to photograph the upper right area of ​​the grating ruler (504), the third camera (403) is used to photograph the lower left area of ​​the grating ruler (504), and the fourth camera (404) is used to photograph the lower right area of ​​the grating ruler (504);

[0016] The cameras (401) to (404) are all in communication connection with the visual controller, and the visual controller is used to identify the edge line of the silicon rod end face and the coordinates of each point of the edge line displayed on the grating ruler based on the silicon rod end face pictures with scales transmitted by the cameras (401) to (404), and calculate the peripheral line size of the silicon rod and the diagonal size of the silicon rod.

[0017] Furthermore, the present invention also provides a method for using a square silicon rod end face size detection device, the application subject is the aforementioned square silicon rod end face size detection device, and the steps include:

[0018] Step S1, when the photoelectric sensor switch (6) senses the presence of a silicon rod (7) to be detected, a first silicon rod arrival signal is sent to a silicon rod conveying controller, and the silicon rod (7) reaches an initial position within x1 seconds;

[0019] Step S2, after receiving the first silicon rod arrival signal, the silicon rod conveying controller delays for x1 seconds and controls the second drive motor (226) to drive the second unidirectional lead screw (227), so that the bidirectional lead screw assembly and the silicon rod clamp (204) move downward to the silicon rod grabbing area;

[0020] Step S3, the silicon rod conveying controller controls the clamping drive motor (233) to rotate, and drives the bidirectional lead screw to rotate so that the two silicon rod clamps (204) clamp the silicon rod (7);

[0021] Step S4, the silicon rod conveying controller controls the second driving motor (226) to rotate in the opposite direction, and drives the second one-way lead screw (227) to drive the silicon rod clamp (204) to lift the silicon rod (7) and move it upward to a specified translation height;

[0022] Step S5, the silicon rod conveying controller controls the first driving motor (218) to rotate, and drives the first one-way lead screw (219) to horizontally move the silicon rod (7) to above the silicon rod carrying platform (322);

[0023] Step S6, the silicon rod conveying controller controls the second lead screw assembly to drive the silicon rod clamp (204) downward to place the silicon rod (7) onto the silicon rod carrying platform (322);

[0024] Step S7, the silicon rod conveying controller controls the clamping drive motor (233) to rotate in the opposite direction, so that the silicon rod clamping claw (204) is loosened and leaves the silicon rod (7);

[0025] Step S8, the silicon rod conveying controller controls the second lead screw assembly to rise to a specified height;

[0026] Step S9, the silicon rod conveying controller controls the third drive motor (315) to drive the third one-way lead screw (316) to move the third slide table (312) in the direction of the grating ruler (504), the end surface of the silicon rod (7) contacts the grating ruler (504) and triggers the two limit switches (503), and after the silicon rod conveying controller detects that the trigger state signal of the limit switch changes, it controls the third drive motor (315) to stop driving, and the silicon rod (7) reaches the collection position;

[0027] Step S10, the visual controller controls the cameras (401) to (404) to collect images and transmit the images to the visual controller, and the visual controller performs algorithm processing and calculation to obtain the size of one side end face of the silicon rod;

[0028] Step S11, the silicon rod conveying controller controls the third driving motor (315) to reversely drive the third one-way lead screw (316) so that the silicon rod (7) leaves the grating ruler (504) and reaches a rotation position;

[0029] Step S12, the silicon rod conveying controller controls the rotary reducer driving motor (323) to drive the rotary reducer (321) to rotate, so that the silicon rod (7) rotates 180°;

[0030] Step S13, the silicon rod conveying controller controls the third one-way screw assembly to convey the silicon rod (7) to the collection position again;

[0031] Step S14, cameras (401) to (404) perform a second image acquisition and transmit the image to the visual controller, which performs algorithm processing and calculation to obtain the size of the end face on the other side of the silicon rod, and the cross-sectional size detection of the single silicon rod is completed;

[0032] Step S15, the silicon rod conveying controller controls the third unidirectional lead screw assembly to move the silicon rod (7) to the bottom of the bidirectional lead screw assembly, and the silicon rod conveying mechanism (2) transfers the silicon rod (7) to the initial position. During the conveying process, when the photoelectric sensor switch (6) senses the silicon rod (7) again, a second silicon rod arrival signal is sent to the silicon rod conveying controller. After a delay of x2 seconds, the silicon rod (7) arrives at the initial position on the silicon rod industrial production line (1).

[0033] Preferably, in step S10, the images captured by the cameras (401) to (404) are, in sequence, an image of region A located at the upper left, an image of region B located at the upper right, an image of region C located at the lower left, and an image of region D located at the lower right. In step S9, the visual controller performs algorithm processing and calculation to obtain the size of the end face of one side of the silicon rod, comprising:

[0034] Step S101, reading the image of region A, rotating the image of region A 270° clockwise, performing image processing, and reading and calculating image parameters of region A;

[0035] Step S102, reading the B region image, rotating the B region image 180° clockwise, performing image processing, and reading and calculating the B region image parameters;

[0036] Step S103, reading the C region image, performing image processing, and reading and calculating the C region image parameters;

[0037] Step S104, reading the D region image, rotating the D region image 90° clockwise, performing image processing, and reading and calculating the D region image parameters;

[0038] Step S105, calculating the silicon rod end face dimension data according to the A region image parameters, the B region image parameters, the C region image parameters, and the region image parameters D, wherein the silicon rod end face dimension data includes the silicon rod side length L1-L4, the chamfered side length K1-K4, the chamfered diagonal length E1-E2, and the diagonal length G1-G2.

[0039] It can be seen from the above technical scheme that the square silicon rod end face size detection device provided by the embodiment of the present invention is composed of a silicon rod handling mechanism, a silicon rod moving mechanism, a visual acquisition mechanism, a grating scale assembly, a photoelectric sensor switch, a silicon rod conveying controller and a visual controller, wherein the silicon rod conveying controller is used to receive the signal of the photoelectric sensor switch, control the silicon rod handling mechanism and the silicon rod moving mechanism, the silicon rod industrial production line transports the silicon rod to the initial position, the photoelectric sensor switch senses the silicon rod and feeds back the first sensing signal, the silicon rod handling mechanism transports the silicon rod from the initial position to the silicon rod moving mechanism after a delay of x1 seconds, the silicon rod moving mechanism moves the silicon rod to the acquisition position, so that the end face of the silicon rod contacts the grating scale assembly and faces the visual acquisition mechanism, the visual acquisition mechanism collects the image containing the grating scale scale and the silicon rod edge line and transmits it to the visual controller, performs data analysis, and obtains the peripheral size of the silicon rod and the diagonal size of the silicon rod. The present invention further proposes a method for using the square silicon rod end face size detection device, and provides a solution for calculating the silicon rod end face size based on the silicon rod end face picture with grating scale scale. The solution of the present invention realizes the automatic detection of the end face size of the silicon rod and has the advantage of high precision. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 The figure is a diagram showing the overall structure of the square silicon rod end face size detection device of the present invention.

[0041] Figure 2 It is a first partial schematic diagram of the device for detecting the end face size of a square silicon rod of the present invention.

[0042] Figure 3 It is a second partial schematic diagram of the square silicon rod end face dimension detection device of the present invention.

[0043] Figure 4 It is a third partial schematic diagram of the square silicon rod end face size detection device of the present invention.

[0044] Figure 5It is a fourth partial schematic diagram of the square silicon rod end face dimension detection device of the present invention.

[0045] Figure 6 Schematic diagram of the parts photographed by cameras 401-404.

[0046] Figure 7 Schematic diagram of measurement parameters on the silicon rod end face.

[0047] Figure 8 This is a picture of the silicon rod end face and grating scale from the camera's perspective.

[0048] Fig. 9 Four examples of area images are taken by cameras 401-404.

[0049] Fig.10 This is an example of an image of region C taken by camera 403 .

[0050] Fig.11 This is the detection flow chart of the data analysis part.

[0051] In the figure: silicon rod industrial production line (1), silicon rod handling mechanism (2), silicon rod moving mechanism (3), visual collection mechanism (4), grating ruler assembly (5), photoelectric sensor switch (6), silicon rod (7), conveyor line (101), silicon rod conveying platform (102), gantry support (201), lifting connecting rod (202), horizontal platform (203), silicon rod clamp (204), common guide slider (205), first slide rail slider (211), first lead screw slider (212), upper translation slide rail (213), lower translation slide rail (214), first left fixed support (215), first right fixed support (216), first motor fixed support (217), first drive motor (218), first one-way lead screw (219), connecting rod guide rail (221), second lead screw slider (222), second upper fixed support (223), second lower fixed support (224), second motor fixed support (225), first Second drive motor (226), second unidirectional lead screw (227), bidirectional horizontal slide rail (231), clamping motor fixed support (232), clamping drive motor (233), clamping slide block (234), bidirectional lead screw (235), first support frame (300), second support frame (400), cameras (401) to (404), camera fixing frame (405), grating ruler fixing frame (501), spring (502), limit switch (50 3), grating ruler (504), left light frame (505), right light frame (506), fill light (507), third slide rail (311), third slide table (312), third front fixed support (313), third rear fixed support (314), third drive motor (315), third one-way lead screw (316), third coupling (317), rotary reducer (321), silicon rod bearing platform (322), rotary reducer drive motor (323). DETAILED DESCRIPTION

[0052] The technical scheme and technical effects of the present invention are further elaborated in detail below in conjunction with the accompanying drawings of the present invention.

[0053] like Figure 1 As shown, the present invention provides a square silicon rod end face size detection device, which is used in the silicon wafer production process to detect the end face size of the silicon rod 7 conveyed by the silicon rod industrial production line 1. Please refer to Figure 2-5The device is composed of a silicon rod conveying mechanism 2, a silicon rod moving mechanism 3, a visual collection mechanism 4, a grating scale assembly 5, a photoelectric sensor switch 6, a silicon rod conveying controller and a visual controller, wherein the silicon rod conveying controller is used to receive signals from the photoelectric sensor switch 6, control the silicon rod conveying mechanism 2 and the silicon rod moving mechanism 3, the silicon rod industrial production line 1 transports the silicon rod 7 to the initial position, the photoelectric sensor switch 6 senses the silicon rod and feeds back a first sensing signal, the silicon rod conveying mechanism 2 transports the silicon rod 7 from the initial position to the silicon rod moving mechanism 3 after a delay of x1 seconds, the silicon rod moving mechanism 3 moves the silicon rod 7 to the collection position, so that the end face of the silicon rod 7 contacts the grating scale assembly 5 and faces the visual collection mechanism 4, the visual collection mechanism 4 collects an image containing the grating scale scale and the silicon rod edge line and transmits it to the visual controller, the visual controller performs data analysis, and obtains the peripheral line size and diagonal line size of the silicon rod;

[0054] The silicon rod industrial production line 1 is composed of a conveyor line 101 and a silicon rod conveying platform 102 mounted on the conveyor line 101, and the silicon rod conveying platform 102 carries silicon rods 7;

[0055] The silicon rod handling mechanism 2 includes: a gantry support 201, and a first one-way screw assembly, a second one-way screw assembly, a lifting connecting rod 202, a horizontal platform 203, a two-way screw assembly, and a silicon rod clamp 204, which are connected in sequence. The first one-way screw assembly and the second one-way screw assembly share a common guide slider 205, wherein:

[0056] The gantry support 201 is composed of a first support, a crossbeam, and a second support connected in sequence. The silicon rod industrial production line 1 passes through the gantry support 201. A photoelectric sensor switch 6 is installed on the first support.

[0057] The first one-way screw assembly is installed in the horizontal direction, and its two ends are fixedly installed on the top of the first pillar and the top of the second pillar respectively. Here, the horizontal installation means that the slider moves in the horizontal direction. The common guide slider 205 is threadedly connected with the first one-way screw 219 in the first one-way screw assembly. Under the driving action of the first driving motor 218 in the first one-way screw assembly, the first one-way screw 219 rotates to make the common guide slider 205 reciprocate in the horizontal direction.

[0058] A pair of first slide rail sliders 211 and a first screw slider 212 are provided on the rear surface of the common guide slider 205. The first screw slider 212 is provided with an internal threaded through hole, which is threadedly connected to the first one-way screw 219; a connecting rod guide rail 221 and a second screw slider 222 are installed on the front surface of the common guide slider 205. The lifting connecting rod 202 is slidably connected to the connecting rod guide rail 221, and the connecting rod guide rail 221 plays a guiding role. The second screw slider 222 is provided with an internal threaded through hole, which is threadedly connected to the second one-way screw 227;

[0059] Referring to the accompanying drawings, the first one-way screw assembly includes: a common guide slider 205, an upper translation slide rail 213 and a lower translation slide rail 214 arranged opposite to each other in the upper and lower directions, a first left fixed support 215 installed on the first pillar, a first right fixed support 216 and a first motor fixed support 217 installed on the second pillar, a first drive motor 218 fixedly installed on the first motor fixed support 217, and a first drive motor 218 sequentially inserted into the first left fixed support 215, the first screw slider 212, and the first right fixed support 217. 6, the lower end of the first one-way screw 219 is connected to the rotor of the first drive motor 218 through the first coupling; the upper translation rail 213 and the lower translation rail 214 are both fixedly mounted on the first pillar and the second pillar at both ends and are horizontally arranged, and the two first slide rail sliders 211 are slidably connected to the upper translation rail 213 and the lower translation rail 214 respectively; according to the example in the figure, the height of the first one-way screw 219 is located between the upper translation rail 213 and the lower translation rail 214;

[0060] The second one-way screw assembly includes: a common guide slider 205, a second upper fixed support 223, a second lower fixed support 224, and a second motor fixed support 225 which are sequentially installed on the lifting link 202 from top to bottom, a second drive motor 226 which is fixedly installed on the second motor fixed support 225, a second one-way screw 227 which is sequentially inserted in the second upper fixed support 223, the second screw slider 222, and the second lower fixed support 224, and the lower end of the second one-way screw 227 is connected to the rotor of the second drive motor 226 through a second coupling; wherein the second one-way screw 227 rotates coaxially with the rotor of the second drive motor 226; the second one-way screw 227 is in a rotational connection relationship with the second upper fixed support 223 and the second lower fixed support 224, and the second one-way screw 227 is in a threaded connection relationship with the second screw slider 222;

[0061] The second one-way screw assembly is fixedly mounted on one side surface of the lifting link 202, and the common guide slider 205 is threadedly connected with the second one-way screw 227 in the second one-way screw assembly. Under the driving action of the second drive motor 226 in the second one-way screw assembly, the second one-way screw 227 rotates to make the lifting link 202 reciprocate in the vertical direction;

[0062] The bottom of the lifting link 202 is connected to the upper surface of the horizontal platform 203, and the lower surface of the horizontal platform 203 is installed with a horizontally arranged bidirectional lead screw assembly; the bidirectional lead screw assembly includes: a pair of bidirectional horizontal slide rails 231 installed on the lower surface of the horizontal platform 203 and arranged opposite to each other on the left and right, a clamping motor fixed support 232, a bidirectional lead screw front fixed support, and a bidirectional lead screw rear fixed support, which are installed on the lower surface of the horizontal platform 203 from front to back, a clamping drive motor 233 fixedly installed on the clamping motor fixed support 232, a pair of clamping sliders 234, and a bidirectional lead screw 235 which is sequentially inserted in the bidirectional lead screw front fixed support, the two clamping sliders 234, and the bidirectional lead screw rear fixed support, and the bidirectional lead screw 235 is connected to the clamping drive motor 233 through a bidirectional lead screw coupling. The rotor of the driving motor 233; the clamping slider 234 has a threaded through hole and a pair of bidirectional guide groove structures; the two clamping sliders 234 are threadedly connected to the bidirectional lead screw 235 through the threaded through hole and are respectively located at the two threaded parts of the bidirectional lead screw 235; the two bidirectional guide groove structures of the clamping slider 234 are respectively slidably connected to the two bidirectional horizontal slide rails 231; the silicon rod clamp 204 is installed on the lower surface of the clamping slider 234; in the bidirectional lead screw assembly for providing clamping power, a silicon rod clamp 204 is installed on each of the two clamping sliders 234, and the two clamping sliders 234 are driven by the clamping motor to move toward or away from each other, so that the two silicon rod clamps 204 clamp or move away from the silicon rod; the surface of the silicon rod clamp 204 on the side contacting the silicon rod has an anti-slip structure;

[0063] The silicon rod moving mechanism 3 includes: a first support frame 300, a third one-way screw assembly, a rotary reducer 321, and a silicon rod carrying platform 322 connected in sequence, and also includes a rotary reducer driving motor 323, wherein the third one-way screw assembly is horizontally arranged and fixedly installed on the first support frame 300 at both ends; the third one-way screw assembly includes: two third slide rails 311 installed on the upper surface of the first support frame 300, which are opposite to each other and parallel to each other, and a third slide table 312 with a pair of third slide rail guide grooves and threaded through holes on the lower surface, a third front fixed support 313, a third rear fixed support 314 and a third motor fixed support installed on the upper surface of the first support frame 300 in a front-to-back order, and a third driving support fixedly installed on the third motor fixed support. The motor 315 is sequentially penetrated through the third one-way screw 316 in the third front fixed support 313, the third slide 312, and the third rear fixed support 314. The third one-way screw 316 is located between the two third slide rails 311. The third one-way screw 316 is connected to the rotor of the third drive motor 315 through the third coupling 317. The third one-way screw 316 is rotationally connected to the third front fixed support 313 and the third rear fixed support 314, and is threadedly connected to the third slide 312. The two third slide rails 311 are respectively slidably connected to the two third slide rail guide grooves of the third slide 312. The two third slide rails 311 are respectively meshed with the shapes of the two third slide rail guide grooves. The third slide 312 is threadedly connected to the third one-way screw 316.

[0064] In the third one-way screw assembly, the third one-way screw 316 and the first one-way screw 219 are perpendicular to each other, the upper surface of the third slide 312 is horizontally arranged, and the third one-way screw 316 is driven by the third drive motor 315, so that the third slide 312 reciprocates in the horizontal direction along the third one-way screw 316; the upper surface of the third slide 312 is fixedly installed with a rotary reducer 321 and a rotary reducer drive motor 323, the rotation output shaft of the rotary reducer 321 is connected to the lower surface of the silicon rod bearing platform 322, the rotary reducer 321 is connected to the rotary reducer drive motor 323, and is controlled by the rotary reducer drive motor 323 to perform fixed-point rotation on the same horizontal plane, the silicon rod bearing platform 322 is horizontally arranged, and the upper surface is used to bear the silicon rod 7; the silicon rod bearing platform 322 maintains fixed-point rotation on the same horizontal plane under the drive of the rotary reducer 321.

[0065] The visual acquisition mechanism 4 includes: a second support frame 400, a camera fixing frame 405 installed on the rear end of the upper surface of the second support frame 400, and cameras 401-404 installed on the camera fixing frame 405; in the left view in which the lens faces the direction of the grating ruler assembly, the cameras 401-404 form a square and are located in the upper left position, the upper right position, the lower left position, and the lower right position in sequence;

[0066] The grating ruler assembly 5 includes a grating ruler fixing frame 501 installed on the front end of the upper surface of the first support frame 300, a group of springs 502, a limit switch 503, a grating ruler 504 of regular shape, a left light frame 505, a right light frame 506, and a fill light 507; the grating ruler 504 has 4 edge length scales and 4 chamfer line scales engraved by laser; the grating ruler 504 has 4 spring connection ends evenly distributed at the edge position, and the four springs 502 are fixedly connected to a spring connection end at one end and fixedly installed at the other end On the grating ruler fixing frame 501; a pair of limit switches 503 are installed on the grating ruler fixing frame 501, located between the grating ruler 504 and the grating ruler fixing frame 501, and located on the opposite side of the grating ruler fixing frame 501; a left light frame 505 and a right light frame 506 are relatively arranged on both sides of the grating ruler 504, and are installed on the first supporting frame body 300, and a fill light 507 is installed on each of the left light frame 505 and the right light frame 506, and the two fill lights 507 are both facing the grating ruler 504, and are used to fill light for the grating ruler 504;

[0067] The plane where the square formed by the cameras 401-404, the grating ruler fixing frame 501, the plane where the grating ruler 504 is located, and the end face of the silicon rod to be measured are arranged in sequence and are perpendicular to the ground and the third one-way screw 316. The line connecting the geometric center of the square formed by the cameras 401-404 and the scale center of the grating ruler 504 is perpendicular to the plane where the grating ruler 504 is located.

[0068] After the silicon rod 7 is moved to the silicon rod supporting platform 322, during the movement toward the collection position, the silicon rod 7 contacts the grating ruler 504 and stops moving after the two limit switches 503 are triggered. At this time, the silicon rod 7 reaches the collection position, and the end face of the silicon rod is close to the grating ruler 504. During the process of the grating ruler assembly 5 being acted upon by the force of the silicon rod 7, the four springs 502 are evenly stressed, the grating ruler 504 is always perpendicular to the ground, and the two limit switches 503 are triggered at the same time by the force of the grating ruler 504; the first camera 401 is used to shoot the upper left area of ​​the grating ruler 504, the second camera 402 is used to shoot the upper right area of ​​the grating ruler 504, the third camera 403 is used to shoot the lower left area of ​​the grating ruler 504, and the fourth camera 404 is used to shoot the lower right area of ​​the grating ruler 504; the shooting examples are as follows Figure 6 As shown;

[0069] refer to Figure 8As shown in the scale lines, in the present invention, the four side length scales of the grating ruler 504 are connected end to end in sequence to form a square, the center of the square is the scale center, the scale values ​​of the four endpoints of the square are all 0, and the maximum scale value of each side length scale is located in the center; the four chamfer line scales of the grating ruler 504 are respectively located at the four corners of the square, and the angle between them and the sides of the square is 45°; the midpoint scale value of the chamfer line scale is 0, and the maximum scale value is located at the endpoints on both sides; the graduation value of the grating ruler 504 is 0.02mm, and the single-sided range of the grating ruler is greater than the side length of the end face of the matched standard silicon rod; the range of the chamfer line scale is greater than the chamfer length of the end face of the standard silicon rod.

[0070] Cameras 401-404 are all connected to the vision controller for communication. The vision controller is used to identify the edge lines of the silicon rod end faces and the coordinates of each point on the edge lines displayed on the grating ruler based on the scaled images of the silicon rod end faces transmitted by cameras 401-404, and calculate the peripheral dimensions of the silicon rod and the diagonal dimensions of the silicon rod.

[0071] The first drive motor 218 of the first one-way screw assembly, the second drive motor 226 of the second one-way screw assembly, the clamping motor of the two-way screw assembly, the third drive motor 315 of the third one-way screw assembly, and the rotary reducer drive motor 323 are all controlled by the silicon rod conveying controller. The limit switch 503 is electrically connected to the silicon rod conveying controller for providing a trigger status signal to the silicon rod conveying controller. The silicon rod conveying controller and the visual controller are connected via a network cable or a switch, and communication is achieved through a communication protocol.

[0072] It is understandable that the silicon rod carrying platform 322 is always outside the sensing range of the photoelectric sensor switch 6, so the production line will not be disturbed during the silicon rod end face measurement. The first support frame, the second support frame and the gantry support are all placed on the ground, or fixed on the ground by some conventional fixing methods.

[0073] The working mode of the square silicon rod end face size detection device of the present invention is:

[0074] When the photoelectric sensor switch 6 senses the presence of the silicon rod 7 to be detected, the first silicon rod arrival signal is sent to the silicon rod conveying controller; the silicon rod conveying controller controls the second drive motor 226 to drive the second one-way screw 227, so that the bidirectional screw assembly and the silicon rod clamp 204 move downward to the silicon rod grabbing area; the silicon rod conveying controller controls the clamping drive motor 233 to rotate, and drives the bidirectional screw to rotate so that the two silicon rod clamps 204 clamp the silicon rod 7, and the second drive motor 226 rotates in the opposite direction, and drives the second one-way screw 227 to drive the silicon rod 7 to move downward. The silicon rod clamp 204 lifts the silicon rod 7 and moves upward to a specified translation height; the first drive motor 218 rotates, and drives the first one-way screw 219 to move the silicon rod 7 horizontally to above the silicon rod carrying platform 322, and then the second screw assembly drives the silicon rod clamp 204 downward to place the silicon rod 7 on the silicon rod carrying platform 322, and the clamping drive motor 233 rotates in the opposite direction to release the silicon rod clamp 204 and leave the silicon rod 7, and the second screw assembly rises to a specified height; wherein the lifting height of the second screw assembly is adjusted according to the actual site;

[0075] The third driving motor 315 drives the third one-way screw 316 to move the third slide 312 in the direction of the grating ruler 504. The end face of the silicon rod 7 contacts the grating ruler 504 and the two limit switches 503 are triggered to reach the collection position. The third driving motor 315 stops driving, triggering the cameras 401-404 to collect images. The visual controller performs algorithm processing and calculation to obtain the size of one side of the end face of the silicon rod. After the measurement is completed, the third driving motor 315 drives the third one-way screw 316 in the reverse direction to make the silicon rod 7 leave the grating ruler 504 and reach the rotation position. The rotary reducer driving motor 323 drives the rotary reducer 321 to rotate, so that the silicon rod 7 rotates 180°. The third one-way screw assembly sends the silicon rod 7 to the collection position again. After image collection and obtaining the size of the end face on the other side, the cross-sectional size detection of a single silicon rod is completed.

[0076] The third unidirectional screw assembly moves the silicon rod 7 to the bottom of the bidirectional screw assembly, and the silicon rod transporting mechanism 2 transfers the silicon rod 7 to the initial position. During the transport process, when the photoelectric sensor switch 6 senses the silicon rod 7 again, it sends a second silicon rod arrival signal to the silicon rod conveying controller. After a delay of x2 seconds, the silicon rod 7 arrives at the initial position on the silicon rod industrial production line 1.

[0077] In the prior art, directly photographing the end face of the silicon rod and then performing dimensional analysis will be affected by the focal length and lens, resulting in possible deviations in image size recognition. The solution of the present invention is to directly photograph a picture with a low-gradient scale, establish a coordinate system based on the scale scale for data analysis, which can improve the calculation accuracy and the accuracy of error analysis.

[0078] Furthermore, application Figure 1-Figure 5The square silicon rod end face size detection device shown in the present invention provides an end face size detection method, including device control and data calculation. The steps include:

[0079] Step S1, when the photoelectric sensor switch 6 senses the presence of the silicon rod 7 to be detected, a first silicon rod arrival signal is sent to the silicon rod conveying controller, and the silicon rod 7 reaches the initial position within x1 seconds;

[0080] Step S2, after receiving the first silicon rod arrival signal, the silicon rod conveying controller delays for x1 seconds and controls the second driving motor 226 to drive the second unidirectional lead screw 227, so that the bidirectional lead screw assembly and the silicon rod clamp 204 move downward to the silicon rod grabbing area;

[0081] Step S3, the silicon rod conveying controller controls the clamping drive motor 233 to rotate, and drives the bidirectional lead screw to rotate so that the two silicon rod clamps 204 clamp the silicon rod 7;

[0082] Step S4, the silicon rod conveying controller controls the second driving motor 226 to rotate in the opposite direction, and drives the second one-way screw 227 to drive the silicon rod clamp 204 to lift the silicon rod 7 and move it upward to a specified translation height;

[0083] Step S5, the silicon rod conveying controller controls the first driving motor 218 to rotate, and drives the first one-way lead screw 219 to horizontally move the silicon rod 7 to above the silicon rod carrying platform 322;

[0084] Step S6, the silicon rod conveying controller controls the second screw assembly to drive the silicon rod clamp 204 downward to place the silicon rod 7 onto the silicon rod carrying platform 322;

[0085] Step S7, the silicon rod conveying controller controls the clamping drive motor 233 to rotate in the reverse direction, so that the silicon rod clamping claw 204 is loosened and leaves the silicon rod 7;

[0086] Step S8, the silicon rod conveying controller controls the second lead screw assembly to rise to a specified height;

[0087] Step S9, the silicon rod conveying controller controls the third driving motor 315 to drive the third one-way lead screw 316 to move the third slide 312 in the direction of the grating ruler 504, the end surface of the silicon rod 7 contacts the grating ruler 504 and triggers the two limit switches 503, and the silicon rod conveying controller controls the third driving motor 315 to stop driving after detecting that the trigger state signal of the limit switch changes, and the silicon rod 7 reaches the collection position;

[0088] Step S10, the vision controller controls the cameras 401-404 to collect images and transmit the images to the vision controller, which performs algorithm processing and calculation to obtain the size of one side end face of the silicon rod;

[0089] Step S11, the silicon rod conveying controller controls the third driving motor 315 to reversely drive the third one-way lead screw 316 to make the silicon rod 7 leave the grating ruler 504 and reach the rotation position;

[0090] Step S12, the silicon rod conveying controller controls the rotary reducer driving motor 323 to drive the rotary reducer 321 to rotate, so that the silicon rod 7 rotates 180°;

[0091] Step S13, the silicon rod conveying controller controls the third one-way screw assembly to convey the silicon rod 7 to the collection position again;

[0092] Step S14, cameras 401-404 perform a second image acquisition and transmit the image to the visual controller, which performs algorithm processing and calculation to obtain the size of the end face on the other side of the silicon rod, and the cross-sectional size detection of the single silicon rod is completed;

[0093] Step S15, the silicon rod conveying controller controls the third unidirectional screw assembly to move the silicon rod 7 to the bottom of the bidirectional screw assembly, and the silicon rod conveying mechanism 2 transfers the silicon rod 7 to the initial position. During the conveying process, when the photoelectric sensor switch 6 senses the silicon rod 7 again, it sends a second silicon rod arrival signal to the silicon rod conveying controller. After a delay of x2 seconds, the silicon rod 7 arrives at the initial position on the silicon rod industrial production line 1.

[0094] refer to Figure 6 As shown, in step S10, the images captured by the cameras 401 to 404 are the image of region A located at the upper left, the image of region B located at the upper right, the image of region C located at the lower left, and the image of region D located at the lower right, respectively. In step S9, the visual controller performs algorithm processing and calculation to obtain the size of the end face of one side of the silicon rod, which includes:

[0095] Step S101, reading the image of region A, rotating the image of region A 270° clockwise, performing image processing, and reading and calculating the image parameters of region A;

[0096] Step S102, reading the B region image, rotating the B region image 180° clockwise, performing image processing, and reading and calculating the B region image parameters;

[0097] Step S103, reading the C region image, performing image processing, and reading and calculating the C region image parameters;

[0098] Step S104, reading the D region image, rotating the D region image 90° clockwise, performing image processing, and reading and calculating the D region image parameters;

[0099] Step S105, according to the image parameters of area A, area B, area C, and area D, the silicon rod end face dimension data is calculated, and the silicon rod end face dimension data includes the silicon rod side length L1-L4, the side length after chamfering K1-K4, the diagonal length after chamfering E1-E2, and the diagonal length G1-G2.

[0100] The data analysis process of step S103 includes:

[0101] Step S1031, reading the C region image, identifying two edge length scales, one chamfer line scale and three silicon rod edge lines by digital image processing technology, and defining them as silicon rod edge line a, silicon rod edge line b and silicon rod edge line c in the order of connection from left to right, wherein silicon rod edge line b represents the actual chamfer edge of the silicon rod end face at the position shown in the region image;

[0102] Step S1032, taking the intersection of the edge length ruler in the image of area C as the origin, and using the scale lines and scales shown by the laser ruler to establish a plane coordinate system, wherein the x-axis is established according to the edge line ruler on the left, the y-axis is established according to the edge line ruler on the bottom, and the m-axis is established according to the chamfer line ruler; defining the intersection m1 of line a and line b, the intersection m2 of line b and line c, the middle point m of the chamfer line ruler, the intersection m0 of the perpendicular line of the chamfer line ruler and line b, and the intersection mx of the m-axis and the x-axis;

[0103] Step S1033, reading out points (CyP1, P1), (CyP2, P2), (CyP3, P3) on the silicon rod edge line a in the C region image;

[0104] Read out the coordinates of points m1, m2, and mx in the image of region C. The coordinate of point mx is (P0, 0);

[0105] Read out points (P1, CxP1), (P2, CxP2), (P3, CxP3) on the silicon rod edge line c in the C region image; here, the values ​​of P1, P2, and P3 are different;

[0106] Step S1034, calculating the angle Cxβ between the silicon rod edge c and the x-axis, the angle Cyβ between the silicon rod edge a and the y-axis, the angle Cmβ between the silicon rod edge b and the m-axis, the distance Cm0 between point m0 ​​and point m, and the distance Cm12 between point m1 and point m2 on the m-axis according to the coordinate data obtained in step S1033;

[0107] Step S1035 , the C region image parameters include CxP1 , CxP2 , CxP3 , CyP1 , CyP2 , CyP3 , Cxβ , Cyβ , Cmβ , Cm0 , and Cm12 .

[0108] The calculation contents of step S105 include:

[0109] Step S1051, calculating the side lengths L1, L2, L3, and L4 of the silicon rod end faces, where Z is the range of the side length scale:

[0110] The side length L1 is obtained by the image parameters of area A and area B:

[0111] L1=(L1 P1 +L1 P2 +L1 P3 ) / 3 (1)

[0112] L1 P1 =Z-AxP1*cos(Axβ)-ByP1*cos(Byβ) (2)

[0113] L1 P2 =Z-AxP2*cos(Axβ)-ByP2*cos(Byβ) (3)

[0114] L1 P3 =Z-AxP3*cos(Axβ)-ByP3*cos(Byβ) (4)

[0115] Among them, L1 P1 、L1 P2 、L1 P3 Respectively represent the side lengths measured at the standard axes P1, P2, and P3;

[0116] The side length L2 is obtained by the image parameters of the B region and the D region:

[0117] L2=(L2 P1 +L2 P2 +L2 P3 ) / 3 (5)

[0118] L2 P1 =Z-BxP1*cos(Bxβ)-DyP1*cos(Dyβ) (6)

[0119] L2 P2 =Z-BxP2*cos(Bxβ)-DyP2*cos(Dyβ) (7)

[0120] L2 P3 =Z-BxP3*cos(Bxβ)-DyP3*cos(Dyβ) (8)

[0121] The side length L3 is obtained by the image parameters of the C region and the D region:

[0122] L3=(L3 P1 +L3 P2 +L3 P3 ) / 3 (9)

[0123] L3 P1 =Z-CyP1*cos(Cyβ)-DxP1*cos(Dxβ) (10)

[0124] L3 P2 =Z-CyP2*cos(Cyβ)-DxP2*cos(Dxβ) (11)

[0125] L3 P3 =Z-CyP3*cos(Cyβ)-DxP3*cos(Dxβ) (12)

[0126] The side length L4 is obtained by the image parameters of area A and area C:

[0127] L4=(L4 P1 +L4 P2 +L4 P3 ) / 3 (13)

[0128] L4 P1 =Z-CxP1*cos(Cxβ)-AyP1*cos(Ayβ) (14)

[0129] L4 P2 =Z-CxP2*cos(Cxβ)-AyP2*cos(Ayβ) (15)

[0130] L4 P3 =Z-CxP3*cos(Cxβ)-AyP3*cos(Ayβ) (16)

[0131] Step S1052, calculating the side lengths K1, K2, K3, and K4 of the silicon rod end face after chamfering:

[0132] The length of the side after chamfering K1 is:

[0133] K1=L1-L B2 -L A1 (17)

[0134]

[0135]

[0136] The length of the side after chamfering K2 is:

[0137] K2=L2-L D2 -L B1 (20)

[0138]

[0139]

[0140] The length of the side after chamfering K3 is:

[0141] K3=L3-L C2 -L D1 (twenty three)

[0142]

[0143]

[0144] The length of the side after chamfering K4 is:

[0145] K4=L4-L A2 -L C1 (26)

[0146]

[0147]

[0148] Where L A1 , L A2 , L B1 , L B2 , L C1 , L C2 , L D1 , L D2 They all refer to arc length projection;

[0149] Step S1053, calculating the lengths of the diagonal lines E1 and E2 of the silicon rod end face after chamfering:

[0150]

[0151]

[0152] Among them, β represents the average rotation angle of the silicon rod relative to the grating scale coordinates, and the calculation formula is:

[0153] β=(β A +β B +β C +β D ) / 4 (31)

[0154] β A =Axβ+Ayβ+Amβ (32)

[0155] β B =Bxβ+Byβ+Bmβ (33)

[0156] β C =Cxβ+Cyβ+Cmβ (34)

[0157] β D =Dxβ+Dyβ+Dmβ (35)

[0158] Step S1054, calculating the diagonal lengths G1 and G2 of the silicon rod end faces:

[0159] G1=E1+LB ⊥ +LC ⊥ (36)

[0160]

[0161]

[0162] G2=E2+LA ⊥ +LC ⊥ (39)

[0163]

[0164]

[0165] A specific implementation method is given below: Taking the standard size silicon rod (182mm*182mm) as an example, the calculation method of the end face size of the square silicon rod is explained. First, the grating ruler size is set to 200mm*200mm, and the camera position should be as perpendicular to the grating ruler as possible. In the actual measurement process, Aθ, Bθ, Cθ, and Dθ can be measured directly, and α1, α2, α3, and α4 can be further obtained according to the geometric relationship. H1, H2, H3, and H4 can be obtained through geometric calculation. The remaining parameter measurement methods are explained below.

[0166] The working distance of cameras (401) to (404) is 200 mm, and the focal length of the lens is 50 mm. Figure 6 As shown, A, B, C, and D are the imaging areas of cameras ①, ②, ③, and ④ respectively. The actual imaging range of each area is set to 50*50mm, and the actual detection accuracy is set to 0.02mm. Therefore, the actual size represented by a single pixel is 0.02*0.02mm, and 50*50mm corresponds to a pixel of 2500*2500ppi. In order to improve the detection accuracy, the value is enlarged by 2-3 times the theoretical calculation value, and the pixel of the selected industrial camera needs to be above 18.75 million pixels.

[0167] refer to Figure 8The grating ruler is designed in a square shape, and its side length is adjusted according to the different specifications of the silicon rod end face to be measured. For example, if a silicon rod with an end face size of 182mm*182mm needs to be measured, the grating ruler scale side length can be designed to be 200mm (i.e. Z=200). In addition to the rectangular coordinate system axis, the figure also designs a scale axis for measuring the chamfer length of the silicon rod, and the minimum scale is designed to be 0.02mm.

[0168] The purpose of designing the grating ruler is to provide a reference for visual measurement of dimensions. The designed grating ruler has the following characteristics: (1) The grating ruler simulates the manual measurement method, avoiding distortion errors caused by poor imaging conditions and further ensuring the authenticity of the measured data; (2) The grating ruler is laser engraved and is tightly attached to the end face of the silicon rod during measurement, which can further ensure the measurement accuracy.

[0169] The edge line of the silicon rod end face under the grating ruler and the schematic diagram of the grating ruler imaging are shown in the figure below. Fig. 9 Take the image of area C captured by camera ③ as an example, the areas captured by cameras ①, ② and ④ can be rotated clockwise by 270°, 180° and 90° respectively to obtain Fig.10 As shown in the schematic diagram, the four area images all use the same data reading method. The following takes the data collection of the C area image as an example:

[0170] The silicon rod edge lines a, b and c in the figure are the pictures collected by the image acquisition module. The silicon rod edge lines are obtained by digital image processing technology. The edge lines represent the actual boundaries of the silicon rods and serve as the basis for measuring the size of the silicon rods. The x-axis, y-axis and m-axis in the figure are rulers engraved by laser, and their measurement accuracy is 0.02mm, where the x-axis is perpendicular to the y-axis, and the m-axis is the line segment of the point (20, 0) on the x-axis and the point (0, 20) on the y-axis (i.e. P0=20). Only the minimum accuracy of 1mm is drawn in the figure to facilitate the explanation of the calculation process. In the actual detection process, the ruler measurement accuracy is 0.02mm. The calculation process is explained below.

[0171] The silicon rod edge line a and the silicon rod edge line b intersect at point m1, and the silicon rod edge line b and the silicon rod edge line c intersect at point m2. The angle between the silicon rod edge line a and the silicon rod edge line c is Cθ. Take P1=30, P2=40, P3=50.

[0172] Draw a line perpendicular to the x-axis through (30, 0) and intersect the silicon rod edge c at point x30. The distance from point x30 to the x-axis is Cx30. Similarly, draw lines perpendicular to the x-axis through (40, 0) and (50, 0) and intersect the silicon rod edge c at points x40 and x50 respectively. Cx40 and Cx50 are the distances from points x40 and x50 to the x-axis. The angle between the silicon rod edge c and the x-axis is Cxβ.

[0173] Draw a line perpendicular to the y-axis through (0, 30) and intersect the silicon rod edge line a at point y30. The distance from point y30 to the y-axis is Cy30. Similarly, draw perpendicular lines through (0, 40) and (0, 50) to intersect the silicon rod edge line a at points y40 and y50 respectively. Cy40 and Cy50 are the distances from points y40 and y50 to the y-axis. The angle between the silicon rod edge line a and the y-axis is Cyβ.

[0174] Draw a line perpendicular to the m-axis through the zero point (10, 10) of the m-axis, intersecting the silicon rod edge line b at point m0, and the distance from point m0 ​​to the m-axis is recorded as Cm0. Draw perpendicular lines to the m-axis through points m1 and m2 respectively, and the distance between the two perpendicular lines to the m-axis through points m1 and m2 is recorded as Cm12. Cm1 and Cm2 are the straight-line distances from m1 and m2 to the m-axis respectively. The angle between the silicon rod edge line b and the m-axis is recorded as Cmβ.

[0175] Through digital image processing technology, the sizes of parameters Cx30, Cx40, Cx50, Cxβ, Cy30, Cy40, Cy50, Cyβ, Cm12, Cmβ, and Cθ are obtained respectively. The "C" contained in the parameter represents that the parameter is obtained through the C area. The A, B, and D areas are named in the same way, as shown in the figure. The detection method is the same as the above-mentioned C area image detection method.

[0176] Calculate the side lengths of silicon rods L1, L2, L3, L4:

[0177] L1=(L130+L140+L150) / 3

[0178] L130=200-Ax30*cos(Axβ)-By30*cos(Byβ)

[0179] L140=200-Ax40*cos(Axβ)-By40*cos(Byβ)

[0180] L150=200-Ax50*cos(Axβ)-By50*cos(Byβ)

[0181] L2=(L230+L240+L250) / 3

[0182] L230=200-Bx30*cos(Bxβ)-Dy30*cos(Dyβ)

[0183] L240=200-Bx40*cos(Bxβ)-Dy40*cos(Dyβ)

[0184] L250=200-Bx50*cos(Bxβ)-Dy50*cos(Dyβ)

[0185] L3=(L330+L340+L350) / 3

[0186] L330=200-Cy30*cos(Cyβ)-Dx30*cos(Dxβ)

[0187] L340=200-Cy40*cos(Cyβ)-Dx40*cos(Dxβ)

[0188] L350=200-Cy50*cos(Cyβ)-Dx50*cos(Dxβ)

[0189] L4=(L430+L440+L450) / 3

[0190] L430=200-Cx30*cos(Cxβ)-Ay30*cos(Ayβ)

[0191] L440=200-Cx40*cos(Cxβ)-Ay40*cos(Ayβ)

[0192] L450=200-Cx50*cos(Cxβ)-Ay50*cos(Ayβ)

[0193] Among them, L430, L440, and L450 represent the side lengths obtained at 30 mm, 40 mm, and 50 mm, respectively;

[0194] The calculation of the side lengths K1, K2, K3, and K4 of the silicon rod end face after chamfering is based on the aforementioned formulas (17) to (28). The lengths of the diagonal lines E1 and E2 of the silicon rod end face after chamfering are:

[0195]

[0196]

[0197] The calculation of the diagonal lengths G1 and G2 of the silicon rod end faces is based on the aforementioned formulas (36)-(41).

[0198] Whether the silicon rod is qualified is judged based on the standard silicon rod size and error range requirements, such as the detection requirements shown in Table 1. The silicon rod end face size detected meets the requirements shown in Table 1 and is qualified.

[0199]

[0200] Table 1

[0201] For the device, Hikvision MV-CH250-90GM industrial camera is selected, which has a resolution of 5120*5120, a target surface size of 12mm*12mm, a designed imaging field of view of 50mm*50mm, and a calculated optical magnification of the lens of 0.24. The measurement method of multiple cameras + grating rulers can reduce the distortion error, so a close distance can be used for the working distance, and the working distance is taken as 200mm. The calculated focal length of the lens is 50mm. Further, Hikvision MVL-KF5024M-25MP is selected as the camera, and its 25 million resolution meets the design and detection requirements. The silicon rod conveying controller uses Siemens 1511PLC, and image processing is implemented using Hikvision VC3000 vision controller. The communication between PLC and vision controller is realized through opc ua communication protocol, and the two are connected through network cable or switch. Specifically, PLC creates opc ua server, and vision controller creates opc ua client to access specified point value. In actual industrial production site, the connection method is mostly to connect the switch through network cable for communication.

[0202] What is disclosed above is only a preferred embodiment of the present invention, which certainly cannot be used to limit the scope of rights of the present invention. A person skilled in the art can understand that all or part of the processes of the above embodiments and equivalent changes made according to the claims of the present invention still fall within the scope of the invention.

Claims

1. A square silicon rod end face size detection device, characterized in that: include: A silicon rod transport mechanism (2), a silicon rod moving mechanism (3), a visual collection mechanism (4), a grating ruler assembly (5), a photoelectric sensor switch (6), a silicon rod conveying controller and a visual controller, wherein the silicon rod conveying controller is used to receive a signal from the photoelectric sensor switch (6), control the silicon rod transport mechanism (2) and the silicon rod moving mechanism (3), the silicon rod industrial production line (1) transports the silicon rod (7) to an initial position, the photoelectric sensor switch (6) senses the silicon rod and feeds back a first sensing signal, and the silicon rod transport mechanism (2) senses the silicon rod and feeds back a first sensing signal. After a delay of x1 seconds, the silicon rod (7) is moved from the initial position to the silicon rod moving mechanism (3); the silicon rod moving mechanism (3) moves the silicon rod (7) to a collection position so that the end face of the silicon rod (7) contacts the grating scale assembly (5) and faces the visual collection mechanism (4); the visual collection mechanism (4) collects an image containing the grating scale scale and the silicon rod edge line and transmits it to the visual controller; the visual controller performs data analysis and obtains the peripheral line size and diagonal line size of the silicon rod; The silicon rod handling mechanism (2) comprises: a gantry support (201), and a first one-way screw assembly, a second one-way screw assembly, a lifting connecting rod (202), a horizontal platform (203), a two-way screw assembly, and a silicon rod clamp (204) connected in sequence, wherein the first one-way screw assembly and the second one-way screw assembly share a common guide slider (205), wherein: The gantry support (201) is composed of a first support, a crossbeam, and a second support connected in sequence, the silicon rod industrial production line (1) passes through the gantry support (201), and the photoelectric sensor switch (6) is installed on the first support; the first one-way screw assembly is installed in the horizontal direction, and the two ends are fixedly installed on the top of the first support and the top of the second support respectively, the common guide slider (205) is threadedly connected to the first one-way screw (219) in the first one-way screw assembly, and under the driving action of the first drive motor (218) in the first one-way screw assembly, the first one-way screw (219) rotates to make the common guide slider (205) reciprocate in the horizontal direction; The second one-way screw assembly is fixedly mounted on one side surface of the lifting connecting rod (202), the common guide slider (205) is threadedly connected to the second one-way screw (227) in the second one-way screw assembly, and under the driving action of the second drive motor (226) in the second one-way screw assembly, the second one-way screw (227) is rotated to make the lifting connecting rod (202) reciprocate in the vertical direction; The bottom of the lifting connecting rod (202) is connected to the upper surface of the horizontal platform (203), and the lower surface of the horizontal platform (203) is installed with the horizontally arranged bidirectional screw assembly; in the bidirectional screw assembly for providing clamping power, two clamping slide blocks (234) are each installed with one silicon rod clamp (204), and the two clamping slide blocks (234) are driven by a clamping motor to move toward or away from each other, so that the two silicon rod clamps (204) clamp or move away from the silicon rod; The silicon rod moving mechanism (3) comprises: a first support frame (300), a third one-way screw assembly, a rotary reducer (321), and a silicon rod bearing platform (322) connected in sequence, and also comprises a rotary reducer driving motor (323), wherein the third one-way screw assembly is horizontally arranged and both ends are fixedly mounted on the first support frame (300); in the third one-way screw assembly, the third one-way screw (316) and the first one-way screw (219) are in a perpendicular relationship to each other, the upper surface of the third slide (312) is horizontally arranged, and the third one-way screw (316) is driven by a third driving motor (315) to make the third one-way screw (316) The third slide (312) reciprocates in the horizontal direction along the third one-way screw (316); the rotary reducer (321) and the rotary reducer drive motor (323) are fixedly installed on the upper surface of the third slide (312); the rotary output shaft of the rotary reducer (321) is connected to the lower surface of the silicon rod bearing platform (322); the rotary reducer (321) is connected to the rotary reducer drive motor (323) and is controlled by the rotary reducer drive motor (323) to perform fixed-point rotation on the same horizontal plane; the silicon rod bearing platform (322) is horizontally arranged, and the upper surface is used to bear the silicon rod (7); The visual acquisition mechanism (4) comprises: a second support frame (400), a camera fixing frame (405) mounted on the rear end of the upper surface of the second support frame (400), and four cameras (401) to (404) mounted on the camera fixing frame (405); in a left view in which the lens faces the direction of the grating ruler assembly, the four cameras (401) to (404) form a square and are located in the upper left position, the upper right position, the lower left position, and the lower right position, respectively; The grating ruler assembly (5) comprises a grating ruler fixing frame (501) mounted on the front end of the upper surface of the first supporting frame (300), a group of springs (502), a limit switch (503), a grating ruler (504) of regular shape, a left light frame (505), a right light frame (506), and a fill light (507); the grating ruler (504) has four edge length scales and four chamfer line scales engraved by laser; the grating ruler (504) has four spring connection ends evenly distributed at the edge position, and the four springs (502) are all fixedly connected to one of the spring connection ends at one end and fixedly mounted on the grating ruler fixing frame (501) at the other end. On; a pair of limit switches (503) are installed on the grating ruler fixing frame (501), located between the grating ruler (504) and the grating ruler fixing frame (501), and located on the opposite side of the grating ruler fixing frame (501); the left light stand (505) and the right light stand (506) are relatively arranged on both sides of the grating ruler (504), and are installed on the first supporting frame (300), and one fill light (507) is installed on each of the left light stand (505) and the right light stand (506), and the two fill lights (507) are both facing the grating ruler (504) and are used to fill light for the grating ruler (504); The plane where the square formed by the four cameras (401) to (404), the grating ruler fixing frame (501), the plane where the grating ruler (504) is located, and the end face of the silicon rod to be measured are arranged in sequence and are perpendicular to the ground and the third one-way screw (316), and the line connecting the geometric center of the square formed by the four cameras (401) to (404) and the scale center of the grating ruler (504) is perpendicular to the plane where the grating ruler (504) is located; After the silicon rod (7) is moved to the silicon rod carrying platform (322), during the process of moving toward the collection position, the silicon rod (7) contacts the grating ruler (504) and stops moving after the two limit switches (503) are triggered. At this time, the silicon rod (7) reaches the collection position, and the end face of the silicon rod is in close contact with the grating ruler (504); the first camera (401) is used to photograph the upper left area of ​​the grating ruler (504), the second camera (402) is used to photograph the upper right area of ​​the grating ruler (504), the third camera (403) is used to photograph the lower left area of ​​the grating ruler (504), and the fourth camera (404) is used to photograph the lower right area of ​​the grating ruler (504); The four cameras (401) to (404) are all in communication connection with the visual controller, and the visual controller is used to identify the edge line of the silicon rod end face and the coordinates of each point of the edge line displayed on the grating ruler based on the silicon rod end face pictures with scales transmitted by the four cameras (401) to (404), and calculate the size of the silicon rod periphery and the diagonal size of the silicon rod.

2. The square silicon rod end face dimension detection device according to claim 1, characterized in that: The silicon rod industrial production line (1) is composed of a conveyor line (101) and a silicon rod conveying platform (102) mounted on the conveyor line (101), and the silicon rod conveying platform (102) carries the silicon rod (7); The surface of the silicon rod clamping claw (204) on the side in contact with the silicon rod has an anti-slip structure; When the grating ruler assembly (5) is subjected to the force of the silicon rod (7), the four springs (502) are subjected to uniform force, the grating ruler (504) is always perpendicular to the ground, and the two limit switches (503) are triggered simultaneously by the force of the grating ruler (504); The silicon rod carrying platform (322) is always located outside the sensing range of the photoelectric sensing switch (6); The first drive motor (218) of the first one-way screw assembly, the second drive motor (226) of the second one-way screw assembly, the clamping motor of the two-way screw assembly, the third drive motor (315) of the third one-way screw assembly, and the rotary reducer drive motor (323) are all controlled by the silicon rod conveying controller, and the limit switch (503) is electrically connected to the silicon rod conveying controller and is used to provide a trigger state signal to the silicon rod conveying controller; The silicon rod conveying controller and the visual controller are connected via a network cable or a switch, and communication is achieved through a communication protocol.

3. The square silicon rod end face dimension detection device according to claim 2, characterized in that: The four side length scales of the grating ruler (504) are connected end to end in sequence to form a square, the center of the square is the center of the scale, the scale values ​​of the four end points of the square are all 0, and the maximum scale value of each side length scale is located in the center; The four chamfered line scales of the grating ruler (504) are respectively located at the four corners of a square, and the angle between them and the sides of the square is 45°; the midpoint scale value of the chamfered line scale is 0, and the maximum scale value is located at the two end points; The graduation value of the grating ruler (504) is 0.02 mm, and the single-side measuring range of the grating ruler is greater than the side length of the end face of the matched standard silicon rod; the measuring range of the chamfering line ruler is greater than the chamfering length of the end face of the standard silicon rod; The working distance of the four cameras (401) to (404) is 200 mm, and the lens focal length is 50 mm.

4. The square silicon rod end face dimension detection device according to claim 1, characterized in that: The rear surface of the common guide slider (205) is provided with a pair of first slide rail sliders (211) and a first screw slider (212); the first screw slider (212) is provided with an internal threaded through hole, which is threadedly connected to the first one-way screw (219); the front surface of the common guide slider (205) is provided with a connecting rod guide rail (221) and a second screw slider (222); the lifting connecting rod (202) is slidably connected to the connecting rod guide rail (221), and the connecting rod guide rail (221) plays a guiding role; the second screw slider (222) is provided with an internal threaded through hole, which is threadedly connected to the second one-way screw (227); The first one-way screw assembly comprises: the common guide slider (205), an upper translation slide rail (213) and a lower translation slide rail (214) arranged opposite to each other in the upper and lower directions, a first left fixed support (215) installed on the first pillar, a first right fixed support (216) and a first motor fixed support (217) installed on the second pillar, the first drive motor (218) fixedly installed on the first motor fixed support (217), and a first guide slider (205) and a first guide slider (205) which are sequentially inserted into the first left fixed support (215), the first guide slider (205), and the first right fixed support (216) installed on the second pillar. The first one-way screw (219) is in the first right fixed support (212) and in the first right fixed support (216), and the lower end of the first one-way screw (219) is connected to the rotor of the first driving motor (218) through a first coupling; the upper translation rail (213) and the lower translation rail (214) are both fixedly mounted on the first pillar and the second pillar at both ends and are horizontally arranged, and the two first slide rail sliders (211) are slidably connected to the upper translation rail (213) and the lower translation rail (214) respectively; The second one-way screw assembly comprises: the common guide slider (205), a second upper fixed support (223), a second lower fixed support (224), and a second motor fixed support (225) which are sequentially mounted on the lifting link (202) from top to bottom, a second drive motor (226) which is fixedly mounted on the second motor fixed support (225), and the second one-way screw (227) which is sequentially inserted into the second upper fixed support (223), the second screw slider (222), and the second lower fixed support (224), wherein the lower end of the second one-way screw (227) is connected to the rotor of the second drive motor (226) via a second coupling; The bidirectional lead screw assembly comprises: a pair of bidirectional horizontal slide rails (231) mounted on the lower surface of the horizontal platform (203) and arranged opposite to each other on the left and right sides; a clamping motor fixing support (232), a bidirectional lead screw front fixing support, and a bidirectional lead screw rear fixing support, which are sequentially mounted on the lower surface of the horizontal platform (203) from front to back; a clamping drive motor (233) fixedly mounted on the clamping motor fixing support (232); and a pair of clamping slide blocks (234), which are sequentially inserted into the bidirectional lead screw front fixing support, two clamping slide blocks (234), and a bidirectional lead screw (235) in the bidirectional lead screw rear fixing support. , the bidirectional lead screw (235) is connected to the rotor of the clamping drive motor (233) through a bidirectional lead screw coupling; the clamping slider (234) has a threaded through hole and a pair of bidirectional guide groove structures; the two clamping sliders (234) are both threadedly connected to the bidirectional lead screw (235) through the threaded through hole and are respectively located at two threaded parts of the bidirectional lead screw (235); the two bidirectional guide groove structures of the clamping slider (234) are respectively slidably connected to the two bidirectional horizontal slide rails (231); the silicon rod clamp (204) is installed on the lower surface of the clamping slider (234); The third one-way screw assembly comprises: two third slide rails (311) mounted on the upper surface of the first support frame (300), which are opposite to each other and arranged in parallel, a third slide table (312) having a pair of third slide rail guide grooves and threaded through holes on the lower surface, a third front fixed support (313), a third rear fixed support (314) and a third motor fixed support mounted on the upper surface of the first support frame (300) in a front-to-back order, and a third drive motor (315) fixedly mounted on the third motor fixed support, in sequence. The third one-way screw (316) is inserted into the third front fixed support (313), the third slide (312), and the third rear fixed support (314); the third one-way screw (316) is connected to the rotor of the third drive motor (315) through a third coupling (317); the two third slide rails (311) are respectively slidably connected to the two third slide rail guide grooves of the third slide (312); the third slide (312) and the third one-way screw (316) are threadedly connected.

5. The square silicon rod end face dimension detection device according to claim 4, characterized in that: The working mode of the square silicon rod end face size detection device is as follows: When the photoelectric sensor switch (6) senses the presence of a silicon rod (7) to be detected, a first silicon rod arrival signal is sent to the silicon rod conveying controller; The silicon rod conveying controller controls the second driving motor (226) to drive the second unidirectional lead screw (227), so that the bidirectional lead screw assembly and the silicon rod clamp (204) move downward to the silicon rod grasping area; the silicon rod conveying controller controls the clamping driving motor (233) to rotate, and drives the bidirectional lead screw to rotate so that the two silicon rod clamps (204) clamp the silicon rod (7); the second driving motor (226) rotates in the opposite direction, and drives the second unidirectional lead screw (227) to drive the silicon rod clamp (204) to clamp the silicon rod (7). 7) is lifted and moved upward to a specified translation height; the first drive motor (218) rotates to drive the first one-way screw (219) to horizontally move the silicon rod (7) to above the silicon rod carrying platform (322), and then the second one-way screw assembly drives the silicon rod clamp (204) to move downward to place the silicon rod (7) on the silicon rod carrying platform (322), the clamping drive motor (233) rotates in the opposite direction to release the silicon rod clamp (204) and leave the silicon rod (7), and the second one-way screw assembly is lifted to a specified height; The third drive motor (315) drives the third one-way lead screw (316) to move the third slide (312) in the direction of the grating ruler (504). The end face of the silicon rod (7) contacts the grating ruler (504) and the two limit switches (503) are triggered to reach the acquisition position. The third drive motor (315) stops driving, triggering four cameras (401) to (404) to acquire images. The visual controller performs algorithm processing and calculation to obtain the end face of one side of the silicon rod. After the measurement is completed, the third drive motor (315) drives the third one-way screw (316) in reverse to make the silicon rod (7) leave the grating ruler (504) and reach the rotation position, the rotary reducer drive motor (323) drives the rotary reducer (321) to rotate, so that the silicon rod (7) rotates 180 degrees, and the third one-way screw assembly sends the silicon rod (7) to the collection position again. After image collection and obtaining the end face size of the other side, the cross-sectional size detection of the single silicon rod is completed; The third unidirectional lead screw assembly moves the silicon rod (7) to below the bidirectional lead screw assembly, and the silicon rod transporting mechanism (2) transports the silicon rod (7) to the initial position. During the transporting process, when the photoelectric sensor switch (6) senses the silicon rod (7) again, a second silicon rod arrival signal is sent to the silicon rod transport controller. After a delay of x2 seconds, the silicon rod (7) arrives at the initial position on the silicon rod industrial production line (1).

6. A method for using a square silicon rod end face size detection device, characterized in that: The application subject is the square silicon rod end face size detection device according to any one of claims 1 to 5, and the steps include: Step S1, when the photoelectric sensor switch (6) senses the presence of a silicon rod (7) to be detected, a first silicon rod arrival signal is sent to a silicon rod conveying controller, and the silicon rod (7) reaches an initial position within x1 seconds; Step S2, after receiving the first silicon rod arrival signal, the silicon rod conveying controller delays for x1 seconds and controls the second drive motor (226) to drive the second unidirectional lead screw (227), so that the bidirectional lead screw assembly and the silicon rod clamp (204) move downward to the silicon rod grabbing area; Step S3, the silicon rod conveying controller controls the clamping drive motor (233) to rotate, and drives the bidirectional lead screw to rotate so that the two silicon rod clamps (204) clamp the silicon rod (7); Step S4, the silicon rod conveying controller controls the second driving motor (226) to rotate in the opposite direction, and drives the second one-way lead screw (227) to drive the silicon rod clamp (204) to lift the silicon rod (7) and move it upward to a specified translation height; Step S5, the silicon rod conveying controller controls the first driving motor (218) to rotate, and drives the first one-way lead screw (219) to horizontally move the silicon rod (7) to above the silicon rod carrying platform (322); Step S6, the silicon rod conveying controller controls the second one-way screw assembly to drive the silicon rod clamp (204) downward to place the silicon rod (7) onto the silicon rod carrying platform (322); Step S7, the silicon rod conveying controller controls the clamping drive motor (233) to rotate in the opposite direction, so that the silicon rod clamping claw (204) is loosened and leaves the silicon rod (7); Step S8, the silicon rod conveying controller controls the second one-way screw assembly to rise to a specified height; Step S9, the silicon rod conveying controller controls the third drive motor (315) to drive the third one-way lead screw (316) to move the third slide table (312) in the direction of the grating ruler (504), the end surface of the silicon rod (7) contacts the grating ruler (504) and triggers the two limit switches (503), and after the silicon rod conveying controller detects that the trigger state signal of the limit switch changes, it controls the third drive motor (315) to stop driving, and the silicon rod (7) reaches the collection position; Step S10, the visual controller controls four cameras (401) to (404) to collect images and transmit them to the visual controller, and the visual controller performs algorithm processing and calculation to obtain the size of one side end face of the silicon rod; Step S11, the silicon rod conveying controller controls the third driving motor (315) to reversely drive the third one-way lead screw (316) so that the silicon rod (7) leaves the grating ruler (504) and reaches a rotation position; Step S12, the silicon rod conveying controller controls the rotary reducer driving motor (323) to drive the rotary reducer (321) to rotate, so that the silicon rod (7) rotates 180°; Step S13, the silicon rod conveying controller controls the third one-way screw assembly to convey the silicon rod (7) to the collection position again; Step S14, the four cameras (401) to (404) perform a second image acquisition and transmit the image to the visual controller, which performs algorithm processing and calculation to obtain the size of the end face on the other side of the silicon rod, and the cross-sectional size detection of the single silicon rod is completed; Step S15, the silicon rod conveying controller controls the third unidirectional lead screw assembly to move the silicon rod (7) to the bottom of the bidirectional lead screw assembly, and the silicon rod conveying mechanism (2) transfers the silicon rod (7) to the initial position. During the conveying process, when the photoelectric sensor switch (6) senses the silicon rod (7) again, a second silicon rod arrival signal is sent to the silicon rod conveying controller. After a delay of x2 seconds, the silicon rod (7) arrives at the initial position on the silicon rod industrial production line (1).

7. The method for using the square silicon rod end face dimension detection device according to claim 6, characterized in that: In step S10, the images captured by the four cameras (401) to (404) are, in order, an image of region A located at the upper left, an image of region B located at the upper right, an image of region C located at the lower left, and an image of region D located at the lower right. In step S9, the visual controller performs algorithm processing and calculation to obtain the size of the end face of one side of the silicon rod, including: Step S101, reading the image of region A, rotating the image of region A 270° clockwise, performing image processing, and reading and calculating image parameters of region A; Step S102, reading the B region image, rotating the B region image 180° clockwise, performing image processing, and reading and calculating the B region image parameters; Step S103, reading the C region image, performing image processing, and reading and calculating the C region image parameters; Step S104, reading the D region image, rotating the D region image 90° clockwise, performing image processing, and reading and calculating the D region image parameters; Step S105, calculating the silicon rod end face dimension data according to the A region image parameters, the B region image parameters, the C region image parameters, and the D region image parameters, wherein the silicon rod end face dimension data includes the silicon rod side length L1-L4, the chamfered side length K1-K4, the chamfered diagonal length E1-E2, and the diagonal length G1-G2.

8. The method for using the square silicon rod end face size detection device according to claim 7, characterized in that: The measuring range of the side length scale is Z, and the step S103 includes: Step S1031, reading the C region image, identifying two side length rulers, one chamfer line ruler and three silicon rod side lines by digital image processing technology, and defining them as silicon rod side line a, silicon rod side line b and silicon rod side line c in order of connection from left to right, wherein silicon rod side line b represents the actual chamfered edge of the silicon rod end face at the position shown in the region image; Step S1032, taking the intersection of the side length ruler in the image of area C as the origin, and using the scale lines and scales shown by the laser ruler to establish a plane coordinate system, wherein the x-axis is established according to the side line ruler on the left, the y-axis is established according to the side line ruler on the bottom, and the m-axis is established according to the chamfer line ruler; defining the intersection m1 of line a and line b, the intersection m2 of line b and line c, the middle point m of the chamfer line ruler, the intersection m0 of the perpendicular line of the chamfer line ruler and line b, and the intersection mx of the m-axis and the x-axis; Step S1033, reading out points (CyP1, P1), (CyP2, P2), (CyP3, P3) on the silicon rod edge line a in the C region image; Read out the coordinates of point m1, point m2, and point mx in the C region image, where the coordinate of point mx is (P0, 0); read out points (P1, CxP1), (P2, CxP2), and (P3, CxP3) on the silicon rod edge line c in the C region image; Step S1034, calculating the angle Cxβ between the silicon rod edge c and the x-axis, the angle Cyβ between the silicon rod edge a and the y-axis, the angle Cmβ between the silicon rod edge b and the m-axis, the distance Cm0 between point m0 ​​and point m, and the distance Cm12 between point m1 and point m2 on the m-axis according to the coordinate data obtained in step S1033; Step S1035, the C region image parameters include CxP1, CxP2, CxP3, CyP1, CyP2, CyP3, Cxβ, Cyβ, Cmβ, Cm0, and Cm12; in addition, the A, B, and D regions are named in the same way as the C region.

9. The method for using the square silicon rod end face size detection device according to claim 8, characterized in that: The step S105 comprises: Step S1051, calculating the side lengths L1, L2, L3, and L4 of the silicon rod end faces: The side length L1 is obtained by the image parameters of the A region and the image parameters of the B region: L1=(L1 P1 +L1 P2 +L1 P3 ) / 3 L1 P1 =Z-AxP1*cos(Axβ)-ByP1*cos(Byβ) L1 P2 =Z-AxP2*cos(Axβ)-ByP2*cos(Byβ) L1 P3 =Z-AxP3*cos(Axβ)-ByP3*cos(Byβ) The side length L2 is obtained by the image parameters of the B region and the image parameters of the D region: <h2 style=";text-align:left;direction:ltr">L2=(L2<h2 style=";text-align:left;direction:ltr"> P1 <h2 style=";text-align:left;direction:ltr"> +L2<h2 style=";text-align:left;direction:ltr"> P2 <h2 style=";text-align:left;direction:ltr"> +L2<h2 style=";text-align:left;direction:ltr"> P3 <h2 style=";text-align:left;direction:ltr"> ) / 3 L2 P1 =Z-BxP1*cos(Bxβ)-DyP1*cos(Dyβ) L2 P2 =Z-BxP2*cos(Bxβ)-DyP2*cos(Dyβ) L2 P3 =Z-BxP3*cos(Bxβ)-DyP3*cos(Dyβ) The side length L3 is obtained by the image parameters of the C region and the D region: <h2 style=";text-align:left;direction:ltr">L3=(L3<h2 style=";text-align:left;direction:ltr"> P1 <h2 style=";text-align:left;direction:ltr"> +L3<h2 style=";text-align:left;direction:ltr"> P2 <h2 style=";text-align:left;direction:ltr"> +L3<h2 style=";text-align:left;direction:ltr"> P3 <h2 style=";text-align:left;direction:ltr"> ) / 3 L3 P1 =Z-CyP1*cos(Cyβ)-DxP1*cos(Dxβ) L3 P2 =Z-CyP2*cos(Cyβ)-DxP2*cos(Dxβ) L3 P3 =Z-CyP3*cos(Cyβ)-DxP3*cos(Dxβ) The side length L4 is obtained by the image parameters of the A region and the image parameters of the C region: L4=(L4 P1 +L4 P2 +L4 P3 ) / 3 L4 P1 =Z-CxP1*cos(Cxβ)-AyP1*cos(Ayβ) L4 P2 =Z-CxP2*cos(Cxβ)-AyP2*cos(Ayβ) L4 P3 =Z-CxP3*cos(Cxβ)-AyP3*cos(Ayβ) Step S1052, calculating the side lengths K1, K2, K3, and K4 of the silicon rod end face after chamfering: the side length K1 after chamfering is: K1=L1-L B2 -L A1 The length of the side after chamfering K2 is: <h2 style=";text-align:left;direction:ltr">K2=L2-L<h2 style=";text-align:left;direction:ltr"> D2 <h2 style=";text-align:left;direction:ltr"> -L<h2 style=";text-align:left;direction:ltr"> B1 The length of the side after chamfering K3 is: <h2 style=";text-align:left;direction:ltr">K3=L3-L<h2 style=";text-align:left;direction:ltr"> C2 <h2 style=";text-align:left;direction:ltr"> -L<h2 style=";text-align:left;direction:ltr"> D1 The length of the side after chamfering K4 is: K4=L4-L A2 -L C1 Step S1053, calculating the lengths of the diagonal lines E1 and E2 of the silicon rod end face after chamfering: Among them, β represents the average rotation angle of the silicon rod relative to the grating scale coordinates, and the calculation formula is: β＝(β A +β B +β C +β D ) / 4 b A =Axβ+Ayβ+Amβ b B =Bxβ+Byβ+Bmβ b C =Cxβ+Cyβ+Cmβ b D =Dxβ+Dyβ+Dmβ Step S1054, calculating the diagonal lengths G1 and G2 of the silicon rod end faces: G1=E1+LB ⊥ +LC ⊥ <h2 style=";text-align:left;direction:ltr">G2 = E2 + LA<h2 style=";text-align:left;direction:ltr"> ⊥ <h2 style=";text-align:left;direction:ltr"> +LC<h2 style=";text-align:left;direction:ltr"> ⊥ Among them, H1, H2, H3, and H4 represent the chamfer lengths of regions A, B, C, and D, respectively.

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