A dry grinding method for grinding a fused quartz rotary body part by a small-diameter ball head grinding wheel

Abstract

The application discloses a dry grinding processing method for grinding a fused quartz rotary body part by using a small-diameter ball head grinding wheel, and relates to the technical field of ultra-precision machining.The application adopts a ceramic-based CBN grinding wheel, runs a numerical control processing program, and performs grinding processing along a grinding wheel movement track, without adding any grinding fluid between the grinding wheel and the workpiece during the process; when the total grinding depth of the grinding wheel reaches a preset total amount of feeding, the rotation of the grinding wheel main shaft and the workpiece main shaft is stopped, the ball head grinding wheel is moved away from the workpiece by operating the machine tool, and the ultra-precision grinding of the workpiece is completed.The application adopts the high-temperature-resistant ceramic-based CBN grinding wheel to perform dry grinding of the fused quartz rotary body part, so that the temperature of the grinding wheel and the surface of the workpiece is increased, the brittle-plastic transition critical grinding depth of the fused quartz material is improved, and a smooth and crack-free surface is obtained.

Description

Technical Field

[0001] The invention relates to the technical field of ultra-precision machining, in particular to a dry grinding method for grinding fused quartz rotating body parts using a small-diameter ball-end grinding wheel. Background Art

[0002] Machining hard and brittle materials like fused quartz typically involves coarse grinding, fine grinding, superfine grinding, and polishing to achieve high surface quality and topographic accuracy. During the grinding stage, the interaction between the abrasive and the workpiece results in minimal removal of surface material. However, due to the high strength and low fracture toughness of fused quartz, numerous structural defects, such as pits, scratches, and cracks, inevitably develop on the surface and subsurface of the material. These grinding defects directly impact the efficiency of subsequent polishing.

[0003] At present, for the processing of some small-diameter, thin-walled complex components, small-diameter ball-end grinding wheels are often used for grinding to avoid interference during the grinding process. For the grinding process of small-diameter ball-end grinding wheels, due to its size limitation, even if the rotation speed of the grinding wheel spindle reaches tens of thousands of revolutions per minute, the relative grinding speed between the grinding wheel and the workpiece is still at a low level. The grinding speed among the grinding process parameters is a key factor affecting the removal mode of hard and brittle materials such as fused quartz. According to the "skin" effect of grinding sub-surface cracks, the greater the grinding speed, the smaller the depth of the sub-surface cracks generated by grinding, and vice versa. Therefore, how to improve the surface quality of fused quartz materials during small-diameter grinding wheel grinding and reduce the depth of its sub-surface damage is a key issue in the current research on small-diameter ball-end grinding wheel grinding technology. Summary of the Invention

[0004] The technical problems to be solved by the present invention are:

[0005] The surface damage and subsurface damage caused by existing grinding methods limit the further improvement of part grinding accuracy.

[0006] The present invention is to solve the above technical problems using the following technical solutions:

[0007] The present invention provides a dry grinding method for grinding a fused quartz rotating body part using a small-diameter ball-end grinding wheel, comprising the following steps:

[0008] S1. Clamp the fused quartz rotating workpiece and the ceramic-based CBN grinding wheel, start the grinding machine, and control each moving axis of the machine to return to zero;

[0009] S2. Use the CCD camera and magnifying lens to adjust the height of the grinding wheel center to be consistent with the height of the workpiece rotation axis;

[0010] S3, measuring the contour size parameters of the workpiece through a CCD camera and a magnifying lens, drawing a two-dimensional contour model of the workpiece, constructing a grinding wheel motion trajectory based on the two-dimensional contour model, and writing a CNC machining program based on the grinding wheel motion trajectory;

[0011] S4. Select a point on the motion trajectory of the ball-end grinding wheel as the trial cutting point for tool setting, and record the point in the workpiece coordinate system O. w (x w ,y w ,z w ) under the coordinates (x1,y1);

[0012] S5. Move the grinding wheel to (x1+δ,y1), where δ is the reserved value for tool setting error.

[0013] S6. Set the feed rate and control the grinding wheel to move closer to the workpiece, so that the gap between the grinding wheel and the workpiece surface is reduced;

[0014] S7: Manually rotate the workpiece spindle. If no collision sound is generated, execute S6 again. If a periodic sound is generated, execute S8 directly.

[0015] S8. Record the X and Y coordinates of the current trial cutting point and the machine tool coordinate origin. At the current position, control the grinding wheel to move away from the workpiece by a distance of Δd. At this time, the gap between the grinding wheel and the workpiece is the machining reserved distance, which is used to compensate for the tool setting error.

[0016] S9, turn on the grinding wheel spindle and the workpiece spindle, and set the grinding parameters;

[0017] S10, running the CNC machining program to make the grinding wheel perform reciprocating feeding motion along the grinding wheel motion trajectory, without adding any grinding fluid between the grinding wheel and the workpiece during the process;

[0018] S11. When the total grinding depth of the grinding wheel reaches the preset total feed amount, stop the operation of the grinding wheel spindle and the workpiece spindle, operate the machine tool to move the ball head grinding wheel away from the workpiece, and complete the ultra-precision grinding of the workpiece.

[0019] Furthermore, the average particle size of the abrasive grains of the ceramic-based CBN grinding wheel is 1 to 5 μm.

[0020] Furthermore, S3 includes the following steps:

[0021] S31, measure the contour size parameters of the workpiece through the CCD camera and the magnifying lens, and draw the two-dimensional contour model of the workpiece in the software;

[0022] S32, establish the grinding wheel coordinate system (XYZO) and the workpiece coordinate system (X w Y w Z w O w), where the X, Y, and Z directions of the workpiece coordinate system are consistent with the machine tool coordinate system;

[0023] S33. Offset the workpiece contour line in the two-dimensional contour model outward by Rs+a to form the motion trajectory of the grinding wheel; where Rs is the radius of the ball-end grinding wheel, and a is the reserved value for tool setting error. Write a CNC machining program based on the motion trajectory of the grinding wheel.

[0024] Furthermore, the feed amount in S6 is 1 μm.

[0025] Furthermore, the grinding machine tool includes: three linear motion axes X, Y, and Z axes, a C-axis turntable, two precision fine-tuning linear feed axes U and V axes, and a grinding wheel spindle and a workpiece spindle, the axis direction of the workpiece spindle is parallel to the Y-axis motion direction; the grinding wheel spindle is obliquely hung below the C-axis turntable, and the angle between its axis and the horizontal plane is 40°; the central axis of the C-axis turntable is parallel to the Z axis, and the height of the C-axis turntable and the grinding wheel spindle can be changed by moving it along the Z axis. The U axis is connected to the rotating end of the C-axis turntable through a U-axis connecting frame, one end of the V axis is installed on the U-axis connecting frame, and the other end of the V axis is connected to the U axis, and a U axis protective cover is installed on the U axis.

[0026] Furthermore, the grinding machine tool also includes: a monitoring device, a horizontal worktable and a workpiece spindle protection cover, the horizontal worktable is arranged below the ball head grinding wheel, the workpiece spindle protection cover is installed on the horizontal worktable, the workpiece spindle is installed in the workpiece spindle protection cover, the horizontal worktable is installed on a two-dimensional movable platform, the horizontal worktable is operable to move along the X-axis and Y-axis directions of the grinding machine tool on the two-dimensional movable platform, the monitoring device is installed on the horizontal worktable, the monitoring device includes: a CCD camera and a magnifying lens, the CCD camera is installed on the horizontal worktable, and the magnifying lens is installed on the CCD camera.

[0027] Furthermore, the horizontal workbench is arranged horizontally, the central axis of the workpiece spindle is parallel to the horizontal workbench, and the workpiece is clamped at the end of the workpiece spindle.

[0028] Furthermore, a V-axis slideway is provided on the V-axis, the V-axis slideway is arranged horizontally, the V-axis slideway is parallel to the X-axis of the grinding machine tool, and the U-axis is operable to slide along the V-axis slideway.

[0029] Furthermore, a U-axis slide is provided on the U-axis, the U-axis slide is horizontally arranged, the U-axis slide is parallel to the Y-axis of the grinding machine, and the tool spindle fixing frame drives the ball head grinding wheel to slide operably along the U-axis slide.

[0030] Compared with the prior art, the present invention has the following beneficial effects:

[0031] The present invention discloses a dry grinding method for grinding a fused quartz rotating body part using a small-diameter ball-end grinding wheel. The method adopts a high-temperature resistant ceramic-based CBN grinding wheel to dry grind the fused quartz rotating body part, thereby increasing the temperature of the grinding wheel and the workpiece surface, changing the mechanical properties of the fused quartz material, increasing the critical grinding depth of the brittle-ductile transition of the fused quartz material, changing the material removal mode from brittle removal to plastic removal, obtaining a smooth crack-free surface, and improving the grinding processing accuracy.

[0032] The method of the present invention realizes ultra-precision grinding of fused quartz rotating parts in the plastic domain, reduces the surface roughness from 226.188 nm to 44.272 nm, and significantly improves the surface quality of the workpiece.

[0033] The method of the present invention has certain universality and can be extended to the high-efficiency, low-damage, high-quality ultra-precision grinding of small-caliber (φ20-φ50mm) rotating parts. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 Schematic diagram of a dry grinding apparatus for grinding fused quartz rotating parts using a small-diameter ball-end grinding wheel according to an embodiment of the present invention;

[0035] Figure 2 : is a diagram of the motion trajectory of the grinding wheel in an embodiment of the present invention;

[0036] Figure 3 This is a super-depth-of-field image of the dry-grinded surface of a fused quartz rotating part in an embodiment of the present invention;

[0037] Figure 4 This is a white light interferometer result diagram of the surface roughness of the fused quartz rotating body part during dry grinding in an embodiment of the present invention;

[0038] Figure 5 This is a super-depth image of the wet-grinded surface of a fused quartz rotating part in an embodiment of the present invention;

[0039] Figure 6 This is the white light interferometer result of the wet grinding surface roughness of the fused quartz rotating part in the embodiment of the present invention.

[0040] Description of reference numerals:

[0041] 1. C-axis turntable, 2. U-axis connecting frame, 3. V-axis, 4. Grinding wheel spindle fixing frame, 5. Grinding wheel spindle, 6. Ball head grinding wheel, 7. Horizontal worktable, 8. Workpiece spindle protection cover, 9. Workpiece to be processed, 10. Workpiece spindle, 11. U-axis protection cover, 12. U-axis. DETAILED DESCRIPTION

[0042] In the description of the present invention, it should be noted that the terminology in each embodiment, such as "up", "down", "front", "back", "left", "right", etc., which indicate directions, are only for simplifying the description of the positional relationship based on the drawings in the specification, and do not mean that the referred elements and devices must be operated in accordance with the specific directions and defined operations and methods and structures in the specification. Such directional nouns do not constitute a limitation to the present invention.

[0043] In the description of the present invention, it should be noted that the terms "first," "second," and "third" mentioned in the embodiments of the present invention are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly specifying the number of the technical features indicated. Therefore, a feature specified as "first," "second," or "third" may explicitly or implicitly include one or more of such features.

[0044] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0045] Specific implementation plan 1: Combined Figures 1 to 2 As shown, the present invention provides a dry grinding method for grinding fused quartz rotating parts with a small-diameter ball-end grinding wheel, comprising the following steps:

[0046] S1. Clamp the fused quartz rotating workpiece and the ceramic-based CBN grinding wheel, start the grinding machine, and control each moving axis of the machine to return to zero;

[0047] S2. Use the CCD camera and magnifying lens to move the Z-axis lifting platform to adjust the height of the grinding wheel center to be consistent with the height of the workpiece rotation axis;

[0048] S3, measuring the contour size parameters of the workpiece through a CCD camera and a magnifying lens, drawing a two-dimensional contour model of the workpiece, constructing a grinding wheel motion trajectory based on the two-dimensional contour model, and writing a CNC machining program based on the grinding wheel motion trajectory;

[0049] S4. Select a point on the motion trajectory of the ball-end grinding wheel as the trial cutting point for tool setting, and record the point in the workpiece coordinate system O. w (x w ,y w ,z w ) under the coordinates (x1,y1);

[0050] S5. Move the grinding wheel to (x1+δ,y1), where δ is the reserved value for tool setting error.

[0051] S6. Set the feed rate and control the grinding wheel to move closer to the workpiece, so that the gap between the grinding wheel and the workpiece surface is reduced;

[0052] S7, manually rotate the workpiece spindle, if no collision sound is generated, then S6 is executed again; if periodic sound occurs, then S8 is directly executed;

[0053] S8, record the X, Y coordinate values of the current trial cutting point and the machine tool coordinate origin, and control the grinding wheel to move a distance of Δd away from the workpiece under the current position, at which time the gap between the grinding wheel and the workpiece is the machining allowance distance for compensating for the tool setting error;

[0054] S9, start the grinding wheel spindle and the workpiece spindle, and set the grinding parameters;

[0055] S10, run the numerical control machining program to make the grinding wheel reciprocating feed motion along the grinding wheel motion trajectory, and no grinding fluid is added between the grinding wheel and the workpiece during the process;

[0056] S11, when the total grinding depth of the grinding wheel reaches the preset total amount of feed, stop the operation of the grinding wheel spindle and the workpiece spindle, and operate the machine tool to move the ball head grinding wheel away from the workpiece, thereby completing the ultra-precision grinding of the workpiece.

[0057] In the machining method of the embodiment, no grinding fluid is added during machining of the fused quartz rotary body part, a small-diameter ceramic-based CBN grinding wheel with high temperature resistance is directly used for grinding, without the action of the grinding fluid, the heat exchange between the grinding wheel and the workpiece is reduced, the local temperature of the workpiece is increased, the plastic domain machining of the fused quartz workpiece is realized, and the surface quality of the surface of the fused quartz element is further improved.

[0058] Specific implementation scheme two: the average particle size of abrasive grains of the ceramic-based CBN grinding wheel is 1-5 μm. The other aspects of the embodiment are the same as those of the specific implementation scheme one.

[0059] Specific implementation scheme three: S3 includes the following steps:

[0060] S31, measure the profile size parameters of the workpiece through a CCD camera and a magnifying lens, and draw a two-dimensional profile model of the workpiece in software;

[0061] S32, establish a grinding wheel coordinate system (XYZO) and a workpiece coordinate system (XYZW), wherein the X, Y and Z directions of the workpiece coordinate system are consistent with those of the machine tool coordinate system; w Y w Z w O w );

[0062] S33, offset the workpiece profile line in the two-dimensional profile model to the outside by Rs+a to form the motion trajectory of the grinding wheel; wherein Rs is the radius of the ball head grinding wheel, and a is the tool setting error allowance value, and a numerical control machining program is written according to the motion trajectory of the grinding wheel. The other aspects of the embodiment are the same as those of the specific implementation scheme one.

[0063] In the embodiment,Figure 2 As shown in the figure, for the grinding wheel motion trajectory of a cylindrical fused quartz workpiece, the offset compensation amount is adjusted along the grinding wheel motion trajectory, first approaching the workpiece solid body. For the feed of an arc-shaped contour, the offset compensation amount is adjusted along the line connecting the arc center point and all points on the arc segment. The ball-end grinding wheel feed is achieved by changing the position of the workpiece relative to the grinding wheel.

[0064] Specific embodiment 4: The feed amount in S6 is 1 μm. The rest of this embodiment is the same as the specific embodiment 1.

[0065] Specific implementation plan five: Figure 1 As shown, the grinding machine comprises: three linear motion axes (X, Y, and Z), a C-axis turntable 1, two precision fine-tuning linear feed axes (U-axes 12 and V-axis 3), a grinding wheel spindle 5, and a workpiece spindle 10. The axis of the workpiece spindle 10 is parallel to the Y-axis motion direction. The grinding wheel spindle 5 is obliquely suspended below the C-axis turntable 1, with its axis forming an angle of 40° with the horizontal plane. The central axis of the C-axis turntable 1 is parallel to the Z-axis, and its movement along the Z-axis direction can change the height of the C-axis turntable 1 and the grinding wheel spindle 5. The U-axis 12 is connected to the rotating end of the C-axis turntable 1 via a U-axis connecting frame 2. One end of the V-axis 3 is mounted on the U-axis connecting frame, and the other end of the V-axis 3 is connected to the U-axis 12. A U-axis protective cover 11 is mounted on the U-axis 12. During the grinding of fused quartz rotating parts, the ball-end grinding wheel 6 moves along the contour of the workpiece 9 being machined. The rest of this embodiment is the same as the first embodiment.

[0066] In this implementation, the grinding wheel performs a reciprocating feed motion along the Y-axis for cylindrical fused quartz rotating parts. During grinding, the relative grinding speeds of the workpiece and grinding wheel are adjusted by adjusting the rotational speeds of the workpiece and grinding wheel spindles. The feed speeds of the workpiece and grinding wheel are regulated by controlling the speed of the two-dimensional moving platform. The machine tool's motion system controls the tool radius compensation value to achieve ball-end grinding wheel feed motion and adjust the grinding depth.

[0067] Specific implementation scheme six: The grinding machine tool further includes: a monitoring device, a horizontal workbench 7 and a workpiece spindle protection cover 8. The horizontal workbench 7 is arranged below the ball-end grinding wheel, the workpiece spindle protection cover 8 is installed on the horizontal workbench 7, the workpiece spindle 10 is installed in the workpiece spindle protection cover 8, the horizontal workbench 7 is installed on a two-dimensional movable platform, and the horizontal workbench 7 can be operated on the two-dimensional movable platform to move along the X-axis and Y-axis directions of the grinding machine tool respectively. The monitoring device is installed on the horizontal workbench 7, and the monitoring device includes: a CCD camera and a magnifying lens. The CCD camera is installed on the horizontal workbench, and the magnifying lens is installed on the CCD camera. The rest of this implementation scheme is the same as the specific implementation scheme five.

[0068] Specific embodiment seven: the horizontal workbench 7 is arranged horizontally, the central axis of the workpiece spindle 10 is parallel to the horizontal workbench 7, and the workpiece is clamped at the end of the workpiece spindle 10. The rest of this embodiment is the same as the specific embodiment six.

[0069] Specific embodiment eight: The V-axis 3 is provided with a V-axis slideway, which is arranged horizontally and parallel to the X-axis of the grinding machine. The V-axis 3 can be operated to slide along the V-axis slideway. The rest of this embodiment is the same as specific embodiment seven.

[0070] Specific embodiment nine: The U-axis 12 is provided with a U-axis slideway, which is arranged horizontally and parallel to the Y-axis of the grinding machine. The ball-end grinding wheel 6 is driven by the grinding wheel spindle fixing frame 4 to slide along the U-axis slideway. This embodiment is otherwise identical to specific embodiment eight.

[0071] Example 1

[0072] In order to verify the processing effect of the method of the present invention, the dry grinding method of the present invention for grinding fused quartz rotating parts with a small diameter ball end grinding wheel is compared with the existing wet grinding method. Both methods use the same processing parameters and a ceramic-based CBN grinding wheel (particle size of 3 μm) to process the fused quartz glass rod. The processing parameters are a ball end grinding wheel speed of 71000 r / min, a workpiece speed of 30 r / min, a grinding depth of 1 μm, and a feed speed of 30 μm / s. When the total grinding depth of the grinding wheel reaches 10 μm, the processing is stopped and the grinding is completed. Figure 3 As shown in the figure, the super depth of field image of the component surface is obtained by the method of the present invention. The surface morphology of the workpiece is a typical plastic stripe. The surface roughness is measured using a white light interferometer. The results are as follows: Figure 4 As shown in Figure 2, the roughness result is 44.272, which is much lower than the result of wet grinding with the same process parameters and grinding wheel. Figure 5As shown in Figure 2, there are a lot of material fractures and brittle pits on the surface of the fused silica glass rod produced by wet grinding, such as Figure 6 As shown, the surface roughness of the workpiece is 226.188nm.

[0073] Results show that dry grinding of fused quartz glass rods using a small-diameter ceramic-based CBN grinding wheel can achieve plastic-domain machining of fused quartz rotating parts, demonstrating a reduction in roughness from 226.188 nm to 44.272 nm and a significant improvement in workpiece surface quality. Using a high-temperature-resistant ceramic-based CBN grinding wheel for dry grinding of fused quartz rotating parts increases the temperature of both the grinding wheel and the workpiece surface, altering the mechanical properties of the fused quartz material and increasing the critical grinding depth for the brittle-ductile transition, resulting in a smooth, crack-free surface.

[0074] Although the present invention is disclosed as above, the scope of protection disclosed by the present invention is not limited thereto. Those skilled in the art of the present invention may make various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications will fall within the scope of protection of the present invention.

Claims

1. A dry grinding method for grinding fused quartz rotating parts using a small diameter ball-end grinding wheel, characterized in that: The steps include: S1. Clamp the fused quartz rotating workpiece and the ceramic-based CBN grinding wheel, start the grinding machine, and control each moving axis of the machine to return to zero; S2. Use the CCD camera and magnifying lens to adjust the height of the grinding wheel center to be consistent with the height of the workpiece rotation axis; S3, measuring the contour size parameters of the workpiece through a CCD camera and a magnifying lens, drawing a two-dimensional contour model of the workpiece, constructing a grinding wheel motion trajectory based on the two-dimensional contour model, and writing a CNC machining program based on the grinding wheel motion trajectory; S4. Select a point on the motion trajectory of the ball-end grinding wheel as the trial cutting point for tool setting, and record the point in the workpiece coordinate system O. w (x w ,y w ,z w ) under the coordinates (x1,y1); S5. Move the grinding wheel to (x1+δ,y1), where δ is the reserved value for tool setting error. S6. Set the feed rate and control the grinding wheel to move closer to the workpiece, so that the gap between the grinding wheel and the workpiece surface is reduced; S7: Manually rotate the workpiece spindle. If no collision sound is generated, execute S6 again. If a periodic sound is generated, execute S8 directly. S8. Record the X and Y coordinates of the current trial cutting point and the machine tool coordinate origin. At the current position, control the grinding wheel to move away from the workpiece by a distance of Δd. At this time, the gap between the grinding wheel and the workpiece is the machining reserved distance, which is used to compensate for the tool setting error. S9, turn on the grinding wheel spindle and the workpiece spindle, and set the grinding parameters; S10, running the CNC machining program to make the grinding wheel perform reciprocating feeding motion along the grinding wheel motion trajectory, without adding any grinding fluid between the grinding wheel and the workpiece during the process; S11. When the total grinding depth of the grinding wheel reaches the preset total feed amount, stop the operation of the grinding wheel spindle and the workpiece spindle, operate the machine tool to move the ball head grinding wheel away from the workpiece, and complete the ultra-precision grinding of the workpiece.

2. The dry grinding method for grinding fused quartz rotating parts with a small diameter ball end grinding wheel according to claim 1, characterized in that: The average particle size of the abrasive grains of the ceramic-based CBN grinding wheel is 1 to 5 μm.

3. The dry grinding method for grinding fused quartz rotating parts with a small diameter ball end grinding wheel according to claim 1, characterized in that: S3 includes the following steps: S31, measure the contour size parameters of the workpiece through the CCD camera and the magnifying lens, and draw the two-dimensional contour model of the workpiece in the software; S32, establish the grinding wheel coordinate system (XYZO) and the workpiece coordinate system (X w Y w Z w O w ), where the X, Y, and Z directions of the workpiece coordinate system are consistent with the machine tool coordinate system; S33. Offset the workpiece contour line in the two-dimensional contour model outward by Rs+a to form the motion trajectory of the grinding wheel; where Rs is the radius of the ball-end grinding wheel, and a is the reserved value for tool setting error. Write a CNC machining program based on the motion trajectory of the grinding wheel.

4. The dry grinding method for grinding fused quartz rotating parts with a small diameter ball end grinding wheel according to claim 1, characterized in that: The feed amount in S6 is 1 μm.

5. The dry grinding method for grinding fused quartz rotating parts with a small diameter ball end grinding wheel according to claim 1, characterized in that: The grinding machine tool comprises: three linear motion axes X, Y, and Z axes, a C-axis turntable, two precision fine-tuning linear feed axes U and V axes, a grinding wheel spindle, and a workpiece spindle, wherein the axis direction of the workpiece spindle is parallel to the Y-axis motion direction; the grinding wheel spindle is hung obliquely below the C-axis turntable, and the angle between its axis and the horizontal plane is 40°; the central axis of the C-axis turntable is parallel to the Z axis, and the height of the C-axis turntable and the grinding wheel spindle can be changed by moving it along the Z axis; the U axis is connected to the rotating end of the C-axis turntable through a U-axis connecting frame, one end of the V axis is installed on the U-axis connecting frame, and the other end of the V axis is connected to the U axis, and a U axis protective cover is installed on the U axis.

6. The dry grinding method for grinding fused quartz rotating parts with a small diameter ball end grinding wheel according to claim 5, characterized in that: The grinding machine tool further includes: a monitoring device, a horizontal worktable and a workpiece spindle protection cover, the horizontal worktable is arranged below the ball-end grinding wheel, the workpiece spindle protection cover is installed on the horizontal worktable, the workpiece spindle is installed in the workpiece spindle protection cover, the horizontal worktable is installed on a two-dimensional movable platform, the horizontal worktable is operable to move along the X-axis and Y-axis directions of the grinding machine tool on the two-dimensional movable platform, the monitoring device is installed on the horizontal worktable, the monitoring device includes: a CCD camera and a magnifying lens, the CCD camera is installed on the horizontal worktable, and the magnifying lens is installed on the CCD camera.

7. The dry grinding method for grinding fused quartz rotating parts with a small diameter ball end grinding wheel according to claim 6, characterized in that: The horizontal workbench is arranged horizontally, the central axis of the workpiece spindle is parallel to the horizontal workbench, and the workpiece is clamped at the end of the workpiece spindle.

8. The dry grinding method for grinding fused quartz rotating parts with a small diameter ball end grinding wheel according to claim 7, characterized in that: The V-axis is provided with a V-axis slideway, which is arranged horizontally and parallel to the X-axis of the grinding machine. The V-axis can be operated to slide along the V-axis slideway.

9. The dry grinding method for grinding fused quartz rotating parts with a small diameter ball end grinding wheel according to claim 8, characterized in that: The U-axis is provided with a U-axis slideway, which is horizontally arranged and parallel to the Y-axis of the grinding machine. The ball head grinding wheel is driven by the grinding wheel spindle fixing frame to slide along the U-axis slideway.

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