A thin film vapor deposition heating apparatus

Abstract

The application discloses a thin film vapor deposition heating device, which comprises a deposition cavity and a rotating device; the rotating device comprises a base arranged below the deposition cavity, a magnetic fluid sealing transmission device arranged on the base, a heating disc arranged in the deposition cavity, a hollow shaft matched with the magnetic fluid sealing transmission device and a driving device for driving the hollow shaft to rotate; the upper end of the hollow shaft penetrates into the deposition cavity and is fixedly connected with the heating disc; the base is provided with a mounting cavity, the lower end of the hollow shaft penetrates into the mounting cavity and is connected with a rotating electric connecting component; the rotating electric connecting component comprises an insulating shaft fixedly arranged at the lower end of the hollow shaft, a slip ring assembly and a brush assembly which are both arranged on the base and are connected with the insulating shaft respectively; the heating disc is provided with a heating pipe and a temperature sensor, and the heating pipe and the temperature sensor are both electrically connected with the brush assembly and the slip ring assembly respectively through the hollow shaft and the insulating shaft in sequence; the slip ring assembly and the brush assembly are used for power supply when rotating. The application prevents the twisting and entanglement of the power supply wires when rotating and meets the power supply of the circuit.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of vapor deposition technology, in particular to a thin film vapor deposition heating device. BACKGROUND

[0002] Chemical vapor deposition (CVD) and physical vapor deposition (PVD) are widely used in the semiconductor industry for thin film deposition. For example, a CVD device includes a reaction chamber and a wafer heating base. When two or more gaseous raw materials are introduced into the reaction chamber, the gaseous raw materials chemically react with each other to form a new material and deposit onto the surface of the heating base wafer, forming a deposited thin film.

[0003] The process of vapor deposition coating is complex and diversified, and at the same time, various factors will affect the uniformity of the coating thickness. In order to meet the higher requirements of the coating process, the existing wafer heating device adopts the mode of lifting and reciprocating rotation. However, this mode has a limited rotation angle, resulting in poor adjustment capability. However, when the wafer heating device rotates 360° in the horizontal direction, the power supply wires will be wound and damaged due to the power supply to the heating disc and the like. Therefore, how to realize the rotation structure of the heating device without damaging the power supply wires is an important problem to be solved by those skilled in the art. SUMMARY

[0004] In view of the above shortcomings of the prior art, the present application provides a thin film vapor deposition heating device to solve the technical problem that the rotation structure in the prior art easily causes the power supply wires to be wound and affect the power supply of the circuit while rotating dynamically.

[0005] In order to achieve the above-mentioned purpose, the technical scheme of the present application is as follows:

[0006] A thin film vapor deposition heating device, comprising a deposition chamber and a rotating device; the rotating device comprises: a base arranged below the deposition chamber, a magnetic fluid sealing transmission device arranged on the base, a heating disc arranged in the deposition chamber, a hollow shaft matched with the magnetic fluid sealing transmission device, and a driving device for driving the hollow shaft to rotate; the upper end of the hollow shaft penetrates into the deposition chamber and is fixedly connected with the heating disc; the base has a mounting cavity, the lower end of the hollow shaft penetrates into the mounting cavity and is connected with a rotating electrical connection component; the rotating electrical connection component comprises: an insulating shaft fixedly arranged at the lower end of the hollow shaft, a slip ring assembly and a brush assembly which are both arranged on the base and are respectively connected with the insulating shaft; the heating disc is provided with a heating pipe and a temperature sensor, and the heating pipe and the temperature sensor are both electrically connected with the brush assembly and the slip ring assembly through the inside of the hollow shaft and the insulating shaft, respectively; the slip ring assembly and the brush assembly are used for power supply when rotating.

[0007] Further, the slip ring assembly comprises a stator arranged on the base and coaxial with the hollow shaft, a rotor rotating relative to the stator, a connecting cable connecting the rotor and the temperature sensor, and a signal cable arranged on the stator.

[0008] Further, an insulating sleeve is sleeved on the rotor extending out of the stator towards one end of the insulating shaft, the insulating sleeve is fixed with a radial set screw, the head of the set screw abuts against the rotor and the tail of the set screw extends out of the insulating sleeve, and the insulating shaft is fixed with a supporting rod which drives the set screw to rotate around the rotor axis.

[0009] Further, the base is fixed with an insulating plate, and the stator is fixed on the insulating plate.

[0010] Further, the temperature sensor is a thermocouple, the insulating shaft is provided with a threaded through hole, the lower end of the thermocouple is threadedly connected in the threaded through hole, and the lower end of the thermocouple is electrically connected to the slip ring assembly.

[0011] Further, the brush assembly comprises positive and negative conductive bands arranged on the outer circumferential surface of the insulating shaft, positive and negative brushes electrically contacting the positive and negative conductive bands respectively, and an insulating support assembly arranged on the base, and the insulating support assembly is used for fixing the positive and negative brushes.

[0012] Further, the insulating support assembly comprises a first insulating support, a second insulating support, a third insulating support and a fixing member, the third insulating support is a T-shaped hollow shaft, and the third insulating support is sequentially penetrated by the positive brush, the second insulating support, the negative brush and the first insulating support from top to bottom, and the fixing member is a T-shaped shaft, and the fixing member is inserted into the third insulating support from top to bottom and fixedly connected with the base.

[0013] Further, the driving device comprises a motor arranged in the mounting cavity, a driving wheel fixed on the rotating shaft of the motor, a driven wheel and a synchronous belt wound around the driving wheel and the driven wheel, and the magnetic fluid sealing transmission device comprises a hollow rotating shaft cooperating with the hollow shaft and rotating synchronously, the lower end of the hollow rotating shaft extends into the mounting cavity, and the driven wheel is fixed on the hollow rotating shaft.

[0014] Further, an insulating tube is arranged between the hollow shaft and the magnetic fluid sealing transmission device.

[0015] Further, the magnetic fluid sealing transmission device is connected with the deposition cavity through a horizontal adjusting assembly; the horizontal adjusting assembly comprises a connecting plate fixed on the lower surface of the deposition cavity, at least three groups of length adjusting assemblies and a bellows sleeved outside the hollow shaft; one end of the bellows is fixedly connected with the connecting plate, and the other end is fixedly connected with the magnetic fluid sealing transmission device; the at least three groups of length adjusting assemblies are arranged along the circumferential direction of the bellows; the length adjusting assembly comprises a screw rod, a first nut and a second nut; the magnetic fluid sealing transmission device is provided with an adjusting through hole, the connecting plate is provided with an adjusting threaded hole, the screw rod is screwed into the adjusting threaded hole after passing through the adjusting through hole; the first nut and the second nut are screwed on the screw rod, and the first nut and the second nut are located between the connecting plate and the magnetic fluid sealing transmission device.

[0016] Beneficial effects:

[0017] The hollow shaft and the insulating shaft are arranged to facilitate wiring of the heating pipe and the temperature sensor, so that the heating pipe and the temperature sensor are prevented from being twisted and entangled in the rotating process; the slip ring assembly and the brush assembly are arranged to fix the external wiring of the heating pipe and the temperature sensor when the hollow shaft rotates, so that the twisting and entanglement of the power supply wire are prevented, and the power supply of the circuit is met. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0019] Figure 1 A structure diagram of a thin film vapor deposition heating device is disclosed.

[0020] Figure 2 A structure diagram of a thin film vapor deposition heating device is disclosed. Figure 1 A local enlarged view of I in the middle.

[0021] 1, deposition cavity;

[0022] 21, base; 22, magnetic fluid sealing transmission device; 221, hollow rotating shaft; 23, heating disc; 24, hollow shaft; 25, driving device; 251, motor; 252, driving wheel; 253, driven wheel; 254, synchronous belt; 26, insulating pipe;

[0023] 3, heating pipe; 4, temperature sensor;

[0024] 51, insulating shaft; 511, stepped ring; 512, compression ring; 521, stator; 522, rotor; 523, connecting cable; 524, insulating sleeve; 525, set screw; 526, support rod; 527, insulating plate; 533, positive brush; 534, negative brush; 536, first insulating support; 537, second insulating support; 538, third insulating support; 539, fixing member;

[0025] 6, horizontal adjustment assembly; 61, connecting plate; 62, screw rod; 63, first nut; 64, second nut; 65, bellows. DETAILED DESCRIPTION

[0026] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0027] A thin film vapor deposition heating device, as shown in Figure 1 and Figure 2 , comprises a deposition cavity 1 and a rotating device; the rotating device comprises a base 21 arranged below the deposition cavity 1, a magnetic fluid sealing transmission device 22 arranged on the base 21, a heating disc 23 arranged in the deposition cavity 1, a hollow shaft 24 matched with the magnetic fluid sealing transmission device 22, and a driving device 25 for driving the hollow shaft 24 to rotate; the upper end of the hollow shaft 24 penetrates into the deposition cavity 1 and is fixedly connected with the heating disc 23; the base 21 has a mounting cavity, the lower end of the hollow shaft 24 penetrates into the mounting cavity and is connected with a rotating electric connecting component; the rotating electric connecting component comprises an insulating shaft 51 fixedly arranged at the lower end of the hollow shaft 24, a slip ring assembly and a brush assembly both arranged on the base 21 and connected with the insulating shaft 51 respectively; the heating disc 23 is provided with a heating tube 3 and a temperature sensor 4; the heating tube 3 and the temperature sensor 4 are both electrically connected with the brush assembly and the slip ring assembly respectively through the inside of the hollow shaft 24 and the insulating shaft 51; the slip ring assembly and the brush assembly are used for power supply when rotating.

[0028] The heating tube 3 and the temperature sensor 4 are connected with the brush assembly and the slip ring assembly through the inside of the hollow shaft 24 and the insulating shaft 51 in sequence, so that the heating tube 3 and the temperature sensor 4 do not interfere with each other and avoid entanglement due to centrifugal force when rotating. The brush assembly enables the heating tube 3 to maintain electrical connection when rotating, and because the external power supply wire is fixed, the power supply wire is prevented from being damaged due to winding. The slip ring assembly enables the external power supply wire to be fixed, and the part connected with the temperature sensor 4 of the slip ring assembly can rotate, so that when the temperature sensor 4 rotates with the hollow shaft 24, the power supply wire and the electrical connection structure of the temperature sensor 4 are prevented from being damaged due to winding.

[0029] The slip ring assembly comprises a stator 521 arranged on the base 21 and coaxial with the hollow shaft 24, a rotor 522 rotating relative to the stator 521, a connecting cable 523 connecting the rotor 522 and the temperature sensor 4, and a signal cable arranged on the stator 521. The stator 521 is sleeved on the rotor 522. The rotor 522 enables the connecting cable 523 to rotate when the temperature sensor 4 rotates with the hollow shaft 24, so that the connecting cable 523 is prevented from being damaged due to winding.

[0030] The base 21 is provided with an insulating plate 527 fixed by screws, the stator 521 passes through the insulating plate 527 and the base 21, and the stator 521 is fixed on the insulating plate 527 by screws. The base 21 is provided with a corresponding clearance hole with a diameter larger than that of the stator 521. The insulating plate 527 can prevent the stator 521 from being punctured, thereby affecting the accuracy of the temperature sensor 4.

[0031] The temperature sensor 4 is a thermocouple, the insulating shaft 51 is provided with a threaded hole, the lower end of the thermocouple is connected in the threaded hole by screwing, and one end of the connecting cable 523 is electrically connected with the rotor 522 and the other end is electrically connected with the lower end of the thermocouple. Fixing the lower end of the thermocouple can prevent the thermocouple from generating stress on the electrical connection contact due to rotation, shaking and other reasons.

[0032] The end of the rotor 522 extending out of the stator 521 towards the insulating shaft 51 is sleeved with an insulating sleeve 524; the insulating sleeve 524 is provided with a radial tight screw hole, and a tight screw 525 is screwed into the tight screw hole; the head of the tight screw 525 abuts against the outer periphery of the rotor 522, and the tail of the tight screw 525 extends out of the insulating sleeve 524, so that the tight screw 525, the insulating sleeve 524 and the rotor 522 are fixed together. The support rod 526 is vertically arranged and threadedly connected to the lower end surface of the insulating shaft 51, the support rod 526 intersects with the tight screw 525, and the outer periphery of the support rod 526 abuts against the tight screw 525, so that the support rod 526 pushes the tight screw 525 when the insulating shaft 51 rotates, and the support rod 526 drives the tight screw 525 to rotate around the axis of the rotor 522. The tight screw 525 drives the rotor 522 to rotate, which prevents the connecting cable 523 from driving the rotor 522 to rotate due to stress, and prevents the electrical connection contacts at both ends of the connecting cable 523 from being stressed.

[0033] The brush assembly comprises positive and negative conductive bands respectively arranged on the outer circumferential surface of the insulating shaft 51, positive and negative brushes 533 and 534 respectively in electrical contact with the positive and negative conductive bands, and an insulating support assembly arranged on the base 21. The positive and negative conductive bands rotate with the insulating shaft 51, and the positive and negative brushes 533 and 534 maintain electrical contact during rotation to realize power supply. The insulating support assembly is used to fix the positive and negative brushes 533 and 534. The insulating support assembly comprises a first insulating support 536, a second insulating support 537, a third insulating support 538, and a fixing member 539. The third insulating support 538 is in the shape of a hollow T-shaped shaft, and the third insulating support 538 penetrates the positive brush 533, the second insulating support 537, the negative brush 534, and the first insulating support 536 in order from top to bottom. The fixing member 539 is in the shape of a T-shaped shaft, and the fixing member 539 is inserted into the third insulating support 538 from top to bottom. The fixing member 539 is provided with a fixing threaded hole, and a screw is screwed into the fixing threaded hole after penetrating the base 21 and the insulating plate 527 in order. The screw is tightened to fix the fixing member 539 and the base 21. Thus, the first insulating support 536, the negative brush 534, the second insulating support 537, the positive brush 533, the fixing member 539, the insulating plate 527, and the base 21 are fixed and connected.

[0034] The driving device 25 adopts synchronous belt transmission. The driving device 25 comprises a motor 251 arranged in the mounting cavity, a driving wheel 252 fixedly arranged on the rotating shaft of the motor 251, a driven wheel 253, and a synchronous belt 254 wound around the driving wheel 252 and the driven wheel 253. The magnetic fluid sealing transmission device 22 comprises a hollow rotating shaft 221 that cooperates with the hollow shaft 24 and rotates synchronously. The lower end of the hollow rotating shaft 221 extends into the mounting cavity, and the driven wheel 253 is fixedly arranged on the hollow rotating shaft 221. An insulating tube 26 is further arranged between the hollow shaft 24 and the hollow rotating shaft 221 of the magnetic fluid sealing transmission device 22.

[0035] A plurality of sealing assemblies are further arranged between the hollow shaft 24 and the hollow rotating shaft 221 for sealing. The sealing assemblies are located below the insulating tube 26 and comprise a sealing washer and an O-ring that are sequentially arranged on the hollow shaft 24.

[0036] The insulating shaft 51 is provided with a stepped ring 511 that is integrally formed with the insulating shaft 51 and is arranged on the hollow shaft 24. The outer circumferential surface of the hollow rotating shaft 221 is provided with a connecting thread, and a compression ring 512 is screwed onto the connecting thread. The compression ring 512 cooperates with the stepped ring 511, and the compression ring 512 is tightened to compress the stepped ring 511, so that the insulating shaft 51 is fixed on the hollow shaft 24.

[0037] The magnetic fluid seal transmission device 22 is connected to the deposition cavity 1 through the horizontal adjustment assembly 6; the horizontal adjustment assembly 6 comprises a connecting plate 61 fixed to the lower surface of the deposition cavity 1 through a screw, at least three groups of length adjustment assemblies, and a bellows 65 sleeved outside the hollow shaft 24; one end of the bellows 65 is fixed to the connecting plate 61, and the other end is fixed to the magnetic fluid seal transmission device 22, so as to realize the sealing between the connecting plate 61 and the magnetic fluid seal transmission device 22. The at least three groups of length adjustment assemblies are arranged along the circumferential direction of the bellows 65. The length adjustment assembly comprises a screw rod 62, a first nut 63, and a second nut 64; the magnetic fluid seal transmission device 22 is provided with an adjusting through hole, the connecting plate 61 is provided with an adjusting threaded hole, and the screw rod 62 is screwed into the adjusting threaded hole after passing through the adjusting through hole; the first nut 63 and the second nut 64 are screwed on the screw rod 62, and the first nut 63 and the second nut 64 are located between the connecting plate 61 and the magnetic fluid seal transmission device 22. The first nut 63 and the second nut 64 are loosened, and the screw rod 62 is adjusted by being screwed to adjust the threaded length of the screw rod 62 between the connecting plate 61 and the magnetic fluid seal transmission device 22, so as to realize the adjustment of the magnetic fluid seal transmission device 22, thereby realizing the horizontal adjustment of the upper surface of the heating disc 23. The end runout of the upper surface of the heating disc 23 is ensured, so that the distance between the upper surface of the heating disc 23 and the showerhead for deposition in the deposition cavity 1 is kept within a specified range. After the adjustment is completed, the first nut 63 and the second nut 64 are locked and fixed to prevent changes.

[0038] The working principle of the device of the present application is as follows:

[0039] The motor 251 is started to drive the hollow rotating shaft 221 and the hollow shaft 24 to rotate synchronously; the hollow shaft 24 drives the insulating shaft 51 and the conductive belt to rotate synchronously, the conductive belt slides relative to the brush and keeps electrical contact, so as to realize the rotary power supply. The thermocouple rotates synchronously with the insulating shaft 51, the insulating shaft 51 pushes the set screw 525 through the support rod 526 to drive the rotor 522 to rotate, so that the thermocouple, the connecting cable 523, and the rotor 522 rotate synchronously, so that the connecting cable 523 does not twist and wind, and the stator 521 is fixed to realize the transmission of the signal during rotation.

[0040] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A thin film vapor deposition heating apparatus characterized by comprising: The utility model relates to a deposition cavity (1) and rotating device, the rotating device includes: the base (21) of being established below the deposition cavity (1), the magnetic fluid seal transmission (22) of being established on the base (21), the heating disc (23) of being established in the deposition cavity (1), hollow shaft (24) with the magnetic fluid seal transmission (22) cooperation and the drive arrangement (25) of driving the rotation of hollow shaft (24), the upper end of hollow shaft (24) is fixedly connected after entering the deposition cavity (1) heating disc (23), the base (21) has the installation cavity, the lower end of hollow shaft (24) enters the installation cavity and is connected with the rotating electric connection part, the rotating electric connection part includes: the insulating shaft (51) of being fixed in the lower end of hollow shaft (24), the slip ring assembly and the brush assembly of being established on the base (21) respectively and being connected the insulating shaft (51), the heating disc (23) is equipped with heating pipe (3) and temperature sensor (4), and heating pipe (3) and temperature sensor (4) are all in turn through the inside of hollow shaft (24) and the insulating shaft (51) respectively electric connection the brush assembly and slip ring assembly, the slip ring assembly and brush assembly are used for the power supply when rotating; The slip ring assembly includes: the stator (521) of being established on the base (21) and being coaxial with the hollow shaft (24), the rotor (522) of rotating relative to the stator (521), the connecting cable (523) of connecting the rotor (522) and temperature sensor (4) and the signal cable of being established on the stator (521), The end of rotor (522) towards the insulating shaft (51) is sleeved with insulating sleeve (524) after extending out of the stator (521), the radial locking screw (525) is fixed on the insulating sleeve (524), the head of locking screw (525) is tightly pressed against the rotor (522), and the tail of locking screw (525) extends out of the insulating sleeve (524), the supporting rod (526) is fixed on the insulating shaft (51), and the supporting rod (526) drives the locking screw (525) to rotate around the axis of rotor (522), The brush assembly includes: the positive electrode conductive band and the negative electrode conductive band of being respectively established on the outer circumferential surface of the insulating shaft (51), the positive electrode brush (533) and the negative electrode brush (534) of being respectively electrically contacted with the positive electrode conductive band and the negative electrode conductive band, and the insulating support assembly of being established on the base (21), the insulating support assembly is used for fixing the positive electrode brush (533) and the negative electrode brush (534). The insulating support assembly comprises a first insulating support (536), a second insulating support (537), a third insulating support (538) and a fixing member (539); the third insulating support (538) is in the shape of a hollow T-shaped shaft, and the third insulating support (538) is sequentially penetrated by the positive brush (533), the second insulating support (537), the first insulating support (536) and the negative brush (534) from top to bottom; the fixing member (539) is in the shape of a T-shaped shaft, and the fixing member (539) is inserted into the third insulating support (538) from top to bottom and is fixedly connected with the base (21).

2. A thin film vapor deposition heating device according to claim 1, wherein The base (21) is fixed with an insulating plate (527), and the stator (521) is fixed on the insulating plate (527).

3. A thin film vapor deposition heating device according to claim 1, wherein The temperature sensor (4) is a thermocouple, the insulating shaft (51) is provided with a threaded hole, the lower end of the thermocouple is threadedly connected in the threaded hole, and the lower end of the thermocouple is electrically connected with the slip ring assembly.

4. The thin film vapor deposition heating apparatus of claim 1, wherein The driving device (25) comprises a motor (251) arranged in the mounting cavity, a driving wheel (252) fixed on the rotating shaft of the motor (251), a driven wheel (253) and a synchronous belt (254) wound around the driving wheel (252) and the driven wheel (253); the magnetic fluid sealing transmission device (22) comprises a hollow rotating shaft (221) matched with the hollow shaft (24) and synchronously rotating with the hollow shaft (24), the lower end of the hollow rotating shaft (221) extends to the mounting cavity, and the driven wheel (253) is fixed on the hollow rotating shaft (221).

5. The thin film vapor deposition heating device of claim 1, wherein, An insulating pipe (26) is arranged between the hollow shaft (24) and the magnetic fluid sealing transmission device (22).

6. The thin film vapor deposition heating apparatus of claim 1, wherein The magnetic fluid sealing transmission device (22) is connected with the deposition cavity (1) through a horizontal adjusting assembly (6); the horizontal adjusting assembly (6) comprises a connecting plate (61) fixed on the lower surface of the deposition cavity (1), at least three groups of length adjusting assemblies and a bellows (65) sleeved outside the hollow shaft (24); one end of the bellows (65) is fixedly connected with the connecting plate (61), and the other end is fixedly connected with the magnetic fluid sealing transmission device (22); at least three groups of the length adjusting assemblies are arranged along the circumferential direction of the bellows (65); the length adjusting assembly comprises a screw rod (62), a first nut (63) and a second nut (64); the magnetic fluid sealing transmission device (22) is provided with an adjusting through hole, the connecting plate (61) is provided with an adjusting threaded hole, the screw rod (62) is screwed into the adjusting threaded hole after penetrating through the adjusting through hole; the first nut (63) and the second nut (64) are both screwed on the screw rod (62), and the first nut (63) and the second nut (64) are both located between the connecting plate (61) and the magnetic fluid sealing transmission device (22).

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