Crystal grain carrier and its internal crystal boat conveying device

Abstract

The present application relates to a wafer carrier and its internal boat conveying device, comprising a loading port arranged on a support frame of the main frame, used for loading a wafer carrier containing a boat, and providing Y-axis pushing of the wafer carrier; a carrier positioning conveying mechanism, which is provided with multiple layers of brackets spaced apart from each other from top to bottom. The multiple layers of brackets of the carrier positioning conveying mechanism can displace the wafer carrier in Z-axis. When the height of one bracket is connected with the first track of the external platform, the boat in the wafer carrier is pushed out of the wafer carrier to the first track by the active feeding mechanism, and the first track can be extended to connect different destinations of different processes, so that the boats can be easily put on the track to reach different destinations of different processes.

Description

Grain carrier and its internal crystal boat transport device Technical Field

[0001] This invention relates to semiconductor process-related equipment, and more particularly to a die carrier and its internal crystal boat transport device. Background Technology

[0002] The generation of dies plays a crucial role in the integrated circuit (IC) manufacturing process. It mainly involves first designing the IC, then fabricating a photomask, then using imaging to shrink the designed circuit onto a wafer, and finally exposing it to generate individual dies on the wafer. In the manufacturing process, the support and carrying of the die for subsequent processes, or for transportation and storage, mainly utilizes a magazine. In automated and integrated processes, this magazine is typically connected to a loading port, and it contains one or more wafer boats. In the prior art, Taiwan Patent Publication No. TW202019797 discloses an "apparatus for transporting die carriers." According to its patent specification, "To further improve work efficiency and production quality in semiconductor manufacturing plants (FABs), this teaching discloses an apparatus and method for automatically loading and unloading die carriers (e.g., a magazine containing multiple wafer boats), using a multi-magazine storage and a multi-lane changer to transfer each wafer boat to a corresponding channel aligned with the flow channel of the processing tool to process the die in the wafer boat." Furthermore, based on Figure 1 and the accompanying description, it can be understood that this prior art couples a first lane changer to a first loading port and includes multiple lanes. The aforementioned first loading port may include a pusher operable to push a boat from the received die carrier into a conveyor in the first transducer. The conveyor may move the boat along the Y and / or Z directions to align the boat with an input of the processing tool 150.

[0003] It is known that the prior art must include the trace converter (first trace converter), and the trace converter and the loading port (first loading port) must be able to be "coupled". The outline of the die carrier and its internal crystal boat must also correspond to the space of the structure in order to meet the requirements of a meticulous system and match the push of the push rod. Therefore, the components must be precisely matched with each other, and there is relatively no space for buffering, flexible application and specification change. Summary of the Invention

[0004] In view of the foregoing, the inventors believe that an improved structure is necessary. Therefore, they have designed a grain carrier and its internal crystal boat transport device, comprising: a loading port located on a support frame of the main frame for loading a grain carrier containing a crystal boat and for pushing the grain carrier along the Y-axis; a carrier positioning and transport mechanism having multiple layers of spaced brackets from top to bottom, with a temporary storage space formed between each layer of brackets and the spaced brackets; a lifting mechanism shared by all layers of brackets for displacing the grain carrier along the Z-axis; a platform located on one side of the carrier positioning and transport mechanism, with a first track along the X-axis on its top surface; and an active feeding mechanism located on one side of the carrier positioning and transport mechanism for pushing the crystal boat from the grain carrier to the first track when the height of one of the brackets of the carrier positioning and transport mechanism aligns with the first track.

[0005] The present invention uses a multi-layer bracket of the carrier positioning and conveying mechanism to displace the crystal carrier along the Z-axis. When the height of one of the brackets is connected to the first track, the active feeding mechanism pushes the crystal boat in the crystal carrier out of the crystal carrier to the first track. The first track can be extended to connect to destinations with different processes, thus enabling each crystal boat to be mounted on the track and reach the destination of different processes.

[0006] Furthermore, the longitudinal space generated by the Z-axis displacement allows the grain carrier continuously entering the loading port to have a buffer space on the upper rail.

[0007] Furthermore, even if the outer contour of the die carrier is different, as long as the track gauge of the bottom of the crystal boat in the die carrier can match the first track, the crystal boat can reach the destination of the predetermined process without the need to change the first track with relatively precise and relatively complicated track converters and peripheral structures. Similarly, the present invention can also enable the crystal boat to reach the destination of the predetermined process. Attached Figure Description

[0008] Figure 1 is a three-dimensional schematic diagram of the crystal carrier and crystal boat of the present invention.

[0009] Figure 2 is a three-dimensional exploded view of the grain carrier decomposition and carrier gate mechanism of the present invention.

[0010] Figure 3 is a schematic diagram showing the grain carrier process from the side view of the present invention.

[0011] Figure 4 is a schematic diagram of the operation of the carrier positioning and conveying mechanism of the present invention carrying the crystal carrier.

[0012] Figure 5 is a schematic diagram of the active feeding mechanism of the present invention pushing the crystal boat into the first track.

[0013] Figure 6 is a schematic diagram of an embodiment of the present invention with multiple sets of tracks.

[0014] Figure 7 is a schematic diagram of the Y-axis movement of the moving mechanism of the present invention.

[0015] Drawing number explanation:

[0016] 1. Loading port

[0017] 2. Grain carrier

[0018] 21. Carrier gate stop mechanism

[0019] 3. Carrier positioning and conveying mechanism

[0020] 30. Bracket

[0021] 31. Mobile mechanism

[0022] 33. Purchase of elevators

[0023] 4. Active feeding mechanism

[0024] 5. Crystal Boat

[0025] 6. Platform

[0026] 61. First Track

[0027] 62. Second Track

[0028] 7. Support frame

[0029] P. Temporary storage space. Detailed Implementation

[0030] Please refer to Figure 1. The present invention includes a grain carrier and an internal crystal boat transport device, comprising:

[0031] Loading port 1:

[0032] The loading port 1 is located on a support frame 7 for loading a die carrier 2 containing a crystal boat 5, as shown in Figure 3, and for pushing the die carrier 2 along the Y-axis. The crystal boat 5 is housed in the die carrier 2 and is a fixture, mainly to protect the die from arbitrary contact and friction. Therefore, when performing semiconductor processes, the die must be placed on the crystal boat 5 and transported by the die carrier 2. The crystal boat 5 can transport multiple dies at once, which is more efficient.

[0033] One carrier positioning and conveying mechanism 3:

[0034] The carrier positioning and conveying mechanism 3 is provided with multiple layers of brackets 30 spaced apart from top to bottom. A temporary storage space P is formed between each layer of brackets 30 and the spaced brackets 30. Each layer of brackets 30 is provided with a lifting mechanism 33 for displacing the crystal carrier 2 along the Z-axis.

[0035] Platform 6:

[0036] The platform 6 is located on one side of the carrier positioning and conveying mechanism 3, and a first track 61 with an X-axis is provided on the top surface.

[0037] One active feeding mechanism 4:

[0038] The active feeding mechanism 4 is located on one side of the carrier positioning and conveying mechanism 3. When the height of one of the brackets 30 of the carrier positioning and conveying mechanism 3 is connected to the first track 61, it pushes the crystal boat 5 in the crystal carrier 2 out of the crystal carrier 2 and onto the first track 61. The active feeding mechanism 4 can be a clamping device or a cylinder-powered ejection mechanism as shown in the example.

[0039] Please refer to Figure 2. To prevent the crystal boat 5 from detaching from the crystal carrier 2, a carrier gate mechanism 21 is typically provided on the adjacent side of the crystal carrier 2 facing the first track to prevent the crystal boat 5 fixed inside the crystal carrier 2 from detaching. The carrier gate mechanism 21 can be a structure that can be easily disassembled and assembled to facilitate selective disassembly and assembly during operation.

[0040] Please refer to Figures 4 and 5. The present invention, through the multi-layered brackets 30 of the carrier positioning and conveying mechanism 3, can displace the crystal carrier 2 along the Z-axis. When the height of one of the brackets 30 is level with the first track 61, the crystal boat 5 can be conveyed to the first track 61. The active feeding mechanism 4 then pushes the crystal boat 5 out of the crystal carrier 2 and onto the first track 61, taking the active feeding mechanism 4 as an example of a cylinder-driven ejection mechanism. The first track 61 can also be connected to a predetermined process destination (optional), thus allowing each crystal boat 5 to be mounted on the track and reach the predetermined process destination.

[0041] Furthermore, the longitudinal space generated by the Z-axis displacement provides a buffer space P for the die carrier 2 continuously entering the loading port 1. Moreover, even if the external contour of the die carrier 2 differs, as long as the track gauge of the bottom of the crystal boat 5 within the die carrier 2 matches the first track 61, the crystal boat 5 can reach the predetermined process destination without requiring a relatively precise and complex line changer and peripheral structure to modify the first track 61, thus easily allowing the crystal boat 5 to reach the predetermined process destination.

[0042] In a preferred embodiment of the present invention, the carrier positioning and conveying mechanism 3 is provided with a Y-axis moving mechanism 31 at its bottom. The moving mechanism 31 can move and position the carrier positioning and conveying mechanism 3 in the Y direction, as shown in Figures 6 and 7. When the platform 6 is further provided with parallel and spaced second tracks 62, the corresponding second track 62 can be adjusted to meet the requirements. The second track 62 can be connected to the process preset destination (optional).

Claims

1. A grain carrier and its internal crystal boat transport device, characterized in that, include: A loading port, located on a support frame, is used to load a die carrier containing a crystal boat and to push the die carrier along the Y-axis; a carrier positioning and conveying mechanism, which has multiple layers of spaced brackets from top to bottom, with a temporary storage space formed between each layer of brackets and the spaced brackets; each layer of brackets is provided with a lifting mechanism for displacing the die carrier along the Z-axis; a platform, located on one side of the carrier positioning and conveying mechanism, with a first track along the X-axis on its top surface; and an active feeding mechanism, located on one side of the carrier positioning and conveying mechanism, which pushes the crystal boat inside the die carrier out of the die carrier and onto the first track when the height of one of the brackets of the carrier positioning and conveying mechanism is connected to the first track.

2. The grain carrier and its internal crystal boat transport device as described in claim 1, characterized in that, The platform is also equipped with a second track on its top surface that is parallel to and spaced apart from the first track; and the bottom of the carrier positioning and conveying mechanism is equipped with a Y-axis moving mechanism.

3. The grain carrier and its internal crystal boat transport device as described in claim 1, characterized in that, The active feeding mechanism is either a clamping device or a cylinder-powered ejection mechanism.

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