Device and method for correcting mask position

Abstract

The present invention relates to the technical field of quartz crystal electronic component manufacturing, and specifically to a device and method for correcting the position of a mask plate; the device comprises a platform mounting substrate, a fixture placement platform, a correction module and a driving module; the correction module comprises a long side correction block, a short side correction block, a long side correction block connector, a short side correction block connector, a long side bearing mounting member, a long side bearing, a short side bearing mounting member, a short side bearing, a long side slider, a long side slide rail, a short side slider, a short side slide rail, a plurality of tension spring fixing rods and tension springs; the tension spring is connected to the long side bearing mounting member, the long side correction block connector is fixedly connected to the long side bearing mounting member, the long side correction block is fixedly connected to the long side correction block connector, the short side correction block connector is fixedly connected to the short side bearing mounting member, and the short side correction block is fixedly connected to the short side correction block connector; through the above structure, the upper and lower electrodes are prevented from being misaligned and the assembly efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of quartz crystal electronic component manufacturing, and in particular to a device and method for correcting the position of a mask. Background Art

[0002] With the advent of 5G communication technology and the Internet of Everything era, new requirements are being placed on the size, quality, and stability of quartz crystal products. With the reduction in size of quartz crystal products and the rapid adoption of 5G communication technology, the practical challenges of adapting these products to the market are becoming increasingly apparent. Currently, the coating process in quartz crystal manufacturing involves vapor-depositing a metal electrode film on both sides of a quartz crystal wafer using a fixture. The fixture consists of several components: a lower cover plate, a magnetic frame, a lower electrode plate, a positioning plate, an upper electrode plate, and an upper cover plate. These components are all made of magnetic stainless steel and assembled together by the magnetic attraction of magnets placed in the magnetic frame. The upper and lower electrode plates are collectively referred to as mask plates. The crystal wafer is placed in the positioning grooves of the positioning plate. The mask plates are symmetrically positioned around the positioning plate. After vapor deposition, symmetrical electrodes are formed on both sides of the crystal wafer. In actual production, the position of the upper and lower electrode plates on the mask plate is not completely symmetrical, and there is often some misalignment between the upper and lower electrodes. This misalignment can directly affect certain properties of the quartz crystal product.

[0003] When the size of the quartz crystal product is large, the size of the crystal wafer used is relatively large. Compared with the large wafer size, the impact of a small electrode misalignment is not significant. When the size of the quartz crystal product is small, the wafer used is relatively small. Compared with the small wafer size, the small electrode misalignment is no longer small, and the impact of the electrode misalignment will be significant. The traditional fixture assembly method is to magnetically attract the lower cover plate to the bottom of the magnetic frame, the lower electrode plate to the upper part of the magnetic frame, the positioning plate to the upper part of the lower electrode plate, the wafer to be placed in the positioning groove of the positioning plate, the upper electrode plate to the upper part of the positioning plate, and the upper cover plate to the upper part of the upper electrode plate. If the mask plate is to be symmetrical during the assembly process, it is necessary to observe the symmetry of the magnetic attraction under a microscope after assembling the mask plate. If it is asymmetrical, it must be removed and reassembled.

[0004] In summary, the traditional fixture assembly method easily leads to the misalignment of the upper and lower electrodes due to assembly differences, and the assembly efficiency is low. Summary of the Invention

[0005] The purpose of the present invention is to provide a device and method for correcting the position of a mask plate, aiming to solve the technical problem in the conventional fixture assembly method in the prior art that the upper and lower electrodes are easily misaligned due to assembly differences and the assembly efficiency is low.

[0006] To achieve the above-mentioned purpose, the present invention adopts a device for correcting the position of a mask, comprising a platform mounting base, a fixture placement platform, a correction module, and a driving module. The platform mounting base is fixedly connected to the driving module, the platform mounting base has a long side guide hole groove and a short side guide hole groove, the correction module is respectively arranged at the long side guide hole groove and the short side guide hole groove, and the fixture placement platform is fixedly connected to the platform mounting base;

[0007] The correction module includes a long side correction block, a short side correction block, a long side correction block connector, a short side correction block connector, a long side bearing mounting member, a long side bearing, a short side bearing mounting member, a short side bearing, a long side slider, a long side slide rail, a short side slider, a short side slide rail, a plurality of tension spring fixing rods and tension springs, the long side slide rail and the short side slide rail are respectively fixedly connected to the platform mounting base plate and are located on the back of the platform mounting base plate, the long side slider is slidably connected to the long side slide rail, the short side slider is slidably connected to the long side slide rail, the long side bearing mounting member is fixedly connected to the long side slider, the long side bearing is fixed on the top of the long side bearing mounting member, the short side slider is fixedly connected to the long side slide rail, The side bearing mounting piece is fixedly connected to the long side slider, the short side bearing is fixed to the top of the short side bearing mounting piece, the platform mounting base plate, the long side bearing mounting piece and the short side bearing mounting piece are respectively provided with the tension spring fixing rod, the tension spring is connected to the long side bearing mounting piece, the long side return block connecting piece is fixedly connected to the long side bearing mounting piece, the long side return block is fixedly connected to the long side return block connecting piece and is located in the long side guide hole groove, the short side return block connecting piece is fixedly connected to the short side bearing mounting piece, the short side return block is fixedly connected to the short side return block connecting piece and is located in the short side guide hole groove.

[0008] In which, the driving module includes a motor mounting substrate, a substrate support plate, a device support base, a wire, a control box, a foot switch, a servo motor and a cam. The substrate support plate is fixedly connected to the platform mounting substrate and the motor mounting substrate respectively. The device support base is fixedly connected to the motor mounting substrate and is located below the motor mounting substrate. The servo motor is fixedly connected to the motor mounting substrate. The cam is fixedly connected to the output end of the servo motor. The wire is connected to the servo motor and the control box respectively. The foot switch is provided on the control box.

[0009] Wherein, the cam has four convex points and two concave points.

[0010] Among them, the device for correcting the position of the mask plate also includes a long side reference block and a short side reference block. The long side reference block is fixedly connected to the fixture placement platform and is located above the fixture placement platform. The short side reference block is fixedly connected to the fixture placement platform and is located above the fixture placement platform.

[0011] Wherein, the long-side normalization block and the short-side normalization block are both in a half-I shape.

[0012] Wherein, the installation height of the cam is parallel to the long side bearing and the short side bearing respectively.

[0013] Among them, the fixture placement platform, the long side correction block, the short side correction block, the long side correction block connector, the short side correction block connector and the cam are made of stainless steel, and the substrate support plate and the device support base are made of aluminum alloy.

[0014] The present invention also provides a method for correcting the position of a mask, comprising the following steps:

[0015] placing the fixture with the crystal sheet installed on the fixture placement platform;

[0016] The servo motor is activated by the foot switch to drive the cam to rotate, and the long side bearing and the short side bearing slide into or out of the concave point of the cam respectively;

[0017] Under the action of the tension spring, the long-side alignment block is moved toward the long-side reference block, and the short-side alignment block is moved toward the short-side reference block, so that the mask plate in the fixture is subjected to clamping forces in two directions respectively, making the upper electrode plate and the lower electrode plate of the mask plate symmetrical.

[0018] The present invention provides a device and method for correcting the position of a mask plate, which comprises the following steps: placing a fixture equipped with a crystal sheet on the fixture placement platform; starting the servo motor through the foot switch to drive the cam to rotate, and the long-side bearing and the short-side bearing respectively slide into or out of the recess of the cam; under the action of the tension spring, the long-side correction block is moved toward the long-side reference block, and the short-side correction block is moved toward the short-side reference block, so that the mask plate in the fixture is respectively subjected to clamping forces in two directions, and the upper electrode plate and the lower electrode plate of the mask plate are symmetrical. The correction action takes about 1 second. While correcting the mask plate with high efficiency and quality, the operation of correcting the mask plate becomes simple and easy to learn, reducing labor intensity, preventing the upper and lower electrodes from being misaligned, and improving assembly efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 It is a structural schematic diagram of the device for correcting the position of the mask plate of the present invention.

[0021] Figure 2 It is a rear view of the structure of the fixture placement platform of the present invention.

[0022] Figure 3 It is a structural diagram of the driving module of the present invention.

[0023] Figure 4 This is a rear view of the structure of the fixture placement platform when the cam of the present invention rotates to the step one position.

[0024] Figure 5 This is a rear view of the structure of the fixture placement platform when the cam of the present invention rotates to the step two position.

[0025] Figure 6 This is a rear view of the structure of the fixture placement platform when the cam of the present invention rotates to the step three position.

[0026] Figure 7 This is a rear view of the structure of the fixture placement platform when the cam of the present invention rotates to the step four position.

[0027] Figure 8 It is a flowchart of the steps of the method for correcting the position of the mask plate of the present invention.

[0028] 100- platform mounting base plate, 101- long side guide hole groove, 102- short side guide hole groove, 200- fixture placement platform, 201- long side reference block, 202- short side reference block, 311- long side return block, 312- short side return block, 321- long side return block connector, 322- short side return block connector, 331- long side bearing mounting part, 332- long side bearing, 333- short side bearing mounting part, 334- short side bearing, 341- long side slider, 342- long side slide rail, 343- short side slider, 344- short side slide rail, 361- tension spring fixing rod, 362- tension spring, 400- motor mounting base plate, 401- base plate support plate, 402- device support base, 403- wire, 404- control box, 405- foot switch, 411- servo motor, 412- cam. DETAILED DESCRIPTION

[0029] See also Figures 1 to 7 ,in Figure 1 This is a schematic diagram of the structure of a device for correcting the position of a mask plate. Figure 2 This is the rear view of the fixture placement platform structure. Figure 3 This is a schematic diagram of the drive module. Figure 4 This is the rear view of the fixture placement platform structure when the cam rotates to the step 1 position. Figure 5 This is the rear view of the fixture placement platform structure when the cam rotates to the step 2 position. Figure 6 This is the rear view of the fixture placement platform structure when the cam rotates to the step three position. Figure 7 This is the rear view of the fixture placement platform structure when the cam rotates to the step four position.

[0030] The present invention provides a device for correcting the position of a mask, comprising a platform mounting base 100, a fixture placement platform 200, a correction module, and a driving module. The platform mounting base 100 is fixedly connected to the driving module. The platform mounting base 100 has a long side guide hole groove 101 and a short side guide hole groove 102. The correction module is respectively arranged at the long side guide hole groove 101 and the short side guide hole groove 102. The fixture placement platform 200 is fixedly connected to the platform mounting base 100.

[0031] The correction module includes a long side correction block 311, a short side correction block 312, a long side correction block connector 321, a short side correction block connector 322, a long side bearing mounting member 331, a long side bearing 332, a short side bearing mounting member 333, a short side bearing 334, a long side slider 341, a long side slide rail 342, a short side slider 343, a short side slide rail 344, a plurality of tension spring fixing rods 361 and tension springs 362, the long side slide rail 342 and the short side slide rail 344 are respectively fixedly connected to the platform mounting base 100 and are located on the back of the platform mounting base 100, the long side slider 341 is slidably connected to the long side slide rail 342, the short side slider 343 is slidably connected to the long side slide rail 342, the long side bearing mounting member 331 is fixedly connected to the long side slider 341, and the long side bearing 332 is fixed to the long side bearing mounting member 3 31, the short side bearing mounting piece 333 is fixedly connected to the long side slider 341, the short side bearing 334 is fixed to the top of the short side bearing mounting piece 333, the platform mounting base plate 100, the long side bearing mounting piece 331 and the short side bearing mounting piece 333 are respectively provided with the tension spring fixing rod 361, the tension spring 362 is connected to the long side bearing mounting piece 331, the long side return block connecting piece 321 is fixedly connected to the long side bearing mounting piece 331, the long side return block 311 is fixedly connected to the long side return block connecting piece 321, and is located in the long side guide hole groove 101, the short side return block connecting piece 322 is fixedly connected to the short side bearing mounting piece 333, the short side return block 312 is fixedly connected to the short side return block connecting piece 322, and is located in the short side guide hole groove 102.

[0032] In this embodiment, the fixture with the crystal sheet is placed on the fixture placement platform 200; the servo motor 411 is started by the foot switch 405 to drive the cam 412 to rotate, and the long side bearing 332 and the short side bearing 334 slide into or out of the recess of the cam 412 respectively; under the action of the tension spring 362, the long side correction block 311 is moved toward the long side reference block 201, and the short side correction block 312 is moved toward the short side reference block 202, so that the mask plate in the fixture is subjected to the clamping force in two directions respectively, and the upper electrode plate and the lower electrode plate of the mask plate are symmetrical. The correction action takes about 1 second. While correcting the mask plate with high efficiency and quality, the operation of correcting the mask plate becomes simple and easy to learn, reducing labor intensity, preventing the upper and lower electrodes from being misaligned, and improving assembly efficiency.

[0033] Furthermore, the driving module includes a motor mounting substrate 400, a substrate support plate 401, a device support base 402, a wire 403, a control box 404, a foot switch 405, a servo motor 411 and a cam 412. The substrate support plate 401 is fixedly connected to the platform mounting substrate 100 and the motor mounting substrate 400 respectively. The device support base 402 is fixedly connected to the motor mounting substrate 400 and is located below the motor mounting substrate 400. The servo motor 411 is fixedly connected to the motor mounting substrate 400. The cam 412 is fixedly connected to the output end of the servo motor 411. The wire 403 is connected to the servo motor 411 and the control box 404 respectively. The control box 404 is provided with the foot switch 405.

[0034] Furthermore, the cam 412 has four convex points and two concave points.

[0035] Furthermore, the device for correcting the position of the mask plate also includes a long side reference block 201 and a short side reference block 202, the long side reference block 201 is fixedly connected to the fixture placement platform 200 and is located above the fixture placement platform 200, and the short side reference block 202 is fixedly connected to the fixture placement platform 200 and is located above the fixture placement platform 200.

[0036] Furthermore, the long-side alignment block 311 and the short-side alignment block 312 are both in a half-I shape.

[0037] Furthermore, the installation height of the cam 412 is parallel to the long side bearing 332 and the short side bearing 334 respectively.

[0038] Furthermore, the fixture placement platform 200, the long side correction block 311, the short side correction block 312, the long side correction block connector 321, the short side correction block connector 322 and the cam 412 are made of stainless steel, and the substrate support plate 401 and the device support base 402 are made of aluminum alloy.

[0039] In this embodiment, the four convex points are respectively A, B, C, and D, and the two concave points are respectively E and F. Taking the correction of a mask plate of a fixture as an example, step 1: Figure 1 、 Figure 3 and Figure 4In the embodiment, after the power of the control box 404 is turned on, the servo motor 411 is reset. After the reset, point A of the cam 412 rotates to the position of the short side bearing 334, and point B of the cam 412 rotates to the position of the long side bearing 332. At this time, the long side correction block 311 is pushed to the opposite direction of the long side reference block 201, and the short side correction block 312 is pushed to the opposite direction of the short side reference block 202. The long side correction block 311 and the short side correction block 312 are in a relaxed state. Step 2: Figure 1 、 Figure 2 、 Figure 3 and Figure 5 , place the fixture to be corrected flat on the fixture placement platform 200, step on the foot switch 405, and the servo motor 411 drives the cam 412 to rotate clockwise; due to the tension of the tension spring 362, the long-side correcting block 311 is pulled toward the long-side reference block 201, and the short-side correcting block 312 is pulled toward the short-side reference block 202, so that the long-side bearing 332 and the short-side bearing 334 are closely against the cam 412; the cam 412 rotates clockwise, When point E on the cam 412 moves to the position of the short-side bearing 334, the short-side correcting block 312 moves toward the short-side reference block 202 under the tension of the tension spring 362, and the short-side correcting block 312 performs a clamping action; at this time, the long-side bearing 332 is close to point C of the cam 412, and the long-side correcting block 311 is still in a relaxed state; the short-side correcting block 312 clamps the mask plate of the fixture toward the short-side reference block 202, thereby correcting the long-side direction of the mask plate; Step 3: Figure 1 、 Figure 2 、 Figure 3 and Figure 6 , the servo motor 411 continues to drive the cam 412 to continue to rotate clockwise. When point F on the cam 412 reaches the position of the long-side bearing 332, the long-side correcting block 311 moves toward the long-side reference block 201 under the tension of the tension spring 362, and the long-side correcting block 311 performs a clamping action; at this time, the short-side bearing 334 is close to point B of the cam 412, and the short-side correcting block 312 is in a relaxed state; the long-side correcting block 311 clamps the mask plate of the fixture toward the long-side reference block 201, thereby correcting the short-side direction of the mask plate; Step 4: Figure 1 、 Figure 2 、 Figure 3 and Figure 7The servo motor 411 continues to drive the cam 412 to rotate clockwise. When point D on the cam 412 reaches the position of the long-side bearing 332, the long-side correcting block 311 is in a relaxed state. At this time, the short-side bearing 334 is in close contact with point C of the cam 412, and the short-side correcting block 312 is in a relaxed state. Both the long-side correcting block 311 and the short-side correcting block 312 complete a mask correction action, and the long-side correcting block 311 and the short-side correcting block 312 release the clamp. Step 5: Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 and Figure 7 , the cam 412 rotates to Figure 7 After the cam 412 is rotated to the position of step 1, it is rotated counterclockwise to reverse the steps 4, 3, and 2 until the cam 412 is rotated to the position of step 1. At this time, the long side and short side of the mask plate of the fixture are corrected twice under the clamping force of the long side correction block 311 and the short side correction block 312 respectively, and the fixture can be removed. Through the above five steps, the mask plate in the fixture can be corrected twice, and the positions of the upper electrode and the lower electrode of the mask plate are corrected symmetrically. This is much more convenient and quick than observing and confirming the correction effect under a microscope after each action of assembling the fixture. It realizes the semi-mechanized completion of the mask plate position correction work. In use, it is only necessary to place the fixture on the fixture placement platform 200 and step on the foot switch 405. The correction action is completed within 1 second, which improves the efficiency of the mask plate position correction and reduces labor intensity.

[0040] See also Figure 8 ,in Figure 8 It is a flowchart of the steps of the method for correcting the position of the mask.

[0041] The present invention also provides a method for correcting the position of a mask, comprising the following steps:

[0042] S1: placing the fixture with the crystal sheet on the fixture placement platform 200;

[0043] S2: The servo motor 411 is activated by the foot switch 405 to drive the cam 412 to rotate, and the long side bearing 332 and the short side bearing 334 slide into or out of the concave point of the cam 412 respectively;

[0044] S3: Under the action of the tension spring 362, the long side alignment block 311 is moved toward the long side reference block 201, and the short side alignment block 312 is moved toward the short side reference block 202, so that the mask plate in the fixture is subjected to clamping forces in two directions respectively, and the upper electrode plate and the lower electrode plate of the mask plate are symmetrical.

[0045] In this embodiment, the fixture with the crystal piece is first placed on the fixture placement platform 200; then the servo motor 411 is started by the foot switch 405 to drive the cam 412 to rotate, and the long side bearing 332 and the short side bearing 334 slide into or out of the recess of the cam 412 respectively; then, under the action of the tension spring 362, the long side correction block 311 is moved toward the long side reference block 201, and the short side correction block 312 is moved toward the short side reference block 202, so that the mask plate in the fixture is subjected to the clamping force in two directions respectively, and the upper electrode plate and the lower electrode plate of the mask plate are symmetrical; thus, the upper and lower electrodes are prevented from being misaligned, and the assembly efficiency is improved.

[0046] The above disclosure is only a preferred embodiment of the present invention, and certainly cannot be used to limit the scope of the rights of the present invention. Ordinary technicians in this field can understand that all or part of the processes of the above embodiment and equivalent changes made in accordance with the claims of the present invention are still within the scope of the invention.

Claims

1. A device for correcting the position of a mask, characterized in that: It includes a platform mounting base, a fixture placement platform, a correction module and a driving module, wherein the platform mounting base is fixedly connected to the driving module, the platform mounting base has a long side guide hole groove and a short side guide hole groove, the correction module is respectively arranged at the long side guide hole groove and the short side guide hole groove, and the fixture placement platform is fixedly connected to the platform mounting base; The correction module includes a long side correction block, a short side correction block, a long side correction block connector, a short side correction block connector, a long side bearing mounting member, a long side bearing, a short side bearing mounting member, a short side bearing, a long side slider, a long side slide rail, a short side slider, a short side slide rail, a plurality of tension spring fixing rods and tension springs, the long side slide rail and the short side slide rail are respectively fixedly connected to the platform mounting base plate and are located on the back of the platform mounting base plate, the long side slider is slidably connected to the long side slide rail, the short side slider is slidably connected to the long side slide rail, the long side bearing mounting member is fixedly connected to the long side slider, the long side bearing is fixed on the top of the long side bearing mounting member, the short side slider is fixedly connected to the long side slide rail, The side bearing mounting piece is fixedly connected to the long side slider, the short side bearing is fixed to the top of the short side bearing mounting piece, the platform mounting base plate, the long side bearing mounting piece and the short side bearing mounting piece are respectively provided with the tension spring fixing rod, the tension spring is connected to the long side bearing mounting piece, the long side return block connecting piece is fixedly connected to the long side bearing mounting piece, the long side return block is fixedly connected to the long side return block connecting piece and is located in the long side guide hole groove, the short side return block connecting piece is fixedly connected to the short side bearing mounting piece, the short side return block is fixedly connected to the short side return block connecting piece and is located in the short side guide hole groove; The driving module includes a motor mounting substrate, a substrate support plate, a device support base, a wire, a control box, a foot switch, a servo motor and a cam, wherein the substrate support plate is fixedly connected to the platform mounting substrate and the motor mounting substrate respectively, the device support base is fixedly connected to the motor mounting substrate and is located below the motor mounting substrate, the servo motor is fixedly connected to the motor mounting substrate, the cam is fixedly connected to the output end of the servo motor, the wire is connected to the servo motor and the control box respectively, and the control box is provided with the foot switch; The cam has four convex points and two concave points.

2. The device for correcting the position of a mask according to claim 1, wherein: The device for correcting the position of the mask plate also includes a long side reference block and a short side reference block. The long side reference block is fixedly connected to the fixture placement platform and is located above the fixture placement platform. The short side reference block is fixedly connected to the fixture placement platform and is located above the fixture placement platform.

3. The device for correcting the position of a mask according to claim 1, wherein: The long side correcting block and the short side correcting block are both in a half I-shape.

4. The device for correcting the position of a mask according to claim 1, wherein: The cam installation height is parallel to the long side bearing and the short side bearing respectively.

5. The device for correcting the position of a mask according to claim 2, wherein: The fixture placement platform, the long side correction block, the short side correction block, the long side correction block connector, the short side correction block connector and the cam are made of stainless steel, and the substrate support plate and the device support base are made of aluminum alloy.

6. A method for correcting the position of a mask, applied to the device for correcting the position of a mask as claimed in claim 2, characterized in that: The steps include: placing the fixture with the crystal sheet installed on the fixture placement platform; The servo motor is activated by the foot switch to drive the cam to rotate, and the long side bearing and the short side bearing slide into or out of the concave point of the cam respectively; Under the action of the tension spring, the long-side alignment block is moved toward the long-side reference block, and the short-side alignment block is moved toward the short-side reference block, so that the mask plate in the fixture is subjected to clamping forces in two directions respectively, making the upper electrode plate and the lower electrode plate of the mask plate symmetrical.

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