A high-precision mirror angle measuring device and a measuring method

Abstract

The application relates to a high-precision mirror angle measuring device and a measuring method, which comprises a carrier table module, a measuring target plate, an angle ruler module and a measuring arm module. The carrier table module comprises, from top to bottom, a carrier table with a central concave point at the top, an adjusting table and an inclination adjusting table; the position adjusting table is arranged to be capable of adjusting the position of the carrier table in at least the horizontal direction and the height direction; the measuring target plate is arranged perpendicularly to the X direction and is provided with a 0-degree horizontal reference line extending in the Y direction; the angle ruler module comprises an angle ruler and a laser level; the angle ruler comprises a supporting part and a measuring part arranged on the supporting part; the supporting part is arranged horizontally, and the measuring part is provided with a circular-arc-shaped fixed scale; the measuring arm module comprises a rotating support and a transmitting unit, and the outer side of the rotating support is provided with a circular-arc-shaped vernier scale; when the rotating support is rotated to the vertical position, the 0 line of the fixed scale and the 0 line of the vernier scale are vertically corresponding. The application has high testing precision.

Description

Technical Field

[0001] The invention relates to the field of laser radar component deflection angle testing technology, and in particular to a high-precision measuring device and method for measuring the angle of a reflector. Background Technology

[0002] With the rise of smart factories and autonomous driving, the application of LiDAR is becoming increasingly widespread. Direct Time of Flight (DTOF) LiDAR is gaining wider acceptance in applications such as AMR and service robots, leading to increasingly higher performance requirements for the radar. LiDAR, according to its design requirements, emits light at a specific angle through a reflector to actively detect the target and complete the measurement task. Therefore, whether the reflector angle is in a reasonable position determines whether the radar can reach the test target within its effective range. Currently, whether it is a semi-solid-state rotating mirror LiDAR or a purely mechanical LiDAR, the crucial core component, the optical reflector, needs to have its angle determined within a reasonable range to ensure the angle and accuracy of the laser measurement.

[0003] In existing technologies, the testing of reflector angle parameters and consistency has always had significant shortcomings, specifically as follows: Currently, there are two main types of testing: The first type utilizes general-purpose measuring equipment, such as 2D projectors, 3D measuring machines, and ATOS (photogrammetric 3D scanners); however, the testing angles of these different devices vary considerably, and the consistency is very poor. Even two measurements of the same product can introduce significant deviations due to inconsistencies in the sampling points. The second type is qualitative measurement, such as the laser radar reflector testing device disclosed in Chinese patent CN215575643U. This system, consisting of a worktable, motor mount, motor rotary table, the reflector under test, a reflector receiving wall, a laser emitter, and a vibration damping structure, provides a horizontal light source. The light is reflected by the reflector onto the receiving wall, which has a designated area. The system determines whether the tested reflector meets the requirements by observing whether the reflected light enters the designated area. This testing method first establishes a qualified area using qualified samples, then determines the qualification of the tested component through analogy. However, it has the following problems: 1. It cannot provide specific angle values, making direct measurement impossible; 2. As the reflector angle changes, the closer it gets to parallel or perpendicular to the test light, the less or infinitely long the required test wall becomes, making even analog testing impossible; 3. The reflector is mounted on the motor, and the angle introduced by the motor itself or the installation is directly incorporated into the judgment angle, directly affecting the accuracy of the data; 4. The quality of the measurement beam and the size of the measurement space directly affect the measurement accuracy. Summary of the Invention

[0004] To solve the above-mentioned technical problems, on the one hand, the invention provides a high-precision measuring device for the angle of a reflector, comprising:

[0005] The stage module, from top to bottom, includes a stage with a central recess at the top, a position adjustment stage for adjusting the spatial position of the stage, and a tilt adjustment stage for adjusting the levelness of the stage; the position adjustment stage is configured to be able to adjust the position of the stage at least in the horizontal and vertical directions.

[0006] The target plate is set perpendicular to the X direction and has a 0° horizontal reference line extending in the Y direction;

[0007] Angle ruler module includes an angle ruler and a laser level. The angle ruler includes a support and a measuring part mounted on the support. The support is horizontally positioned, with its length pointing towards the target plate along the X-direction. A cavity structure for accommodating the stage module is formed from bottom to top at the bottom of the support. A horizontal slit is formed at the end of the support away from the target plate. The measuring part has a fixed arc-shaped scale. The laser level is located on the side of the support away from the target plate. The laser level's emission port is flush with the horizontal slit.

[0008] The measuring arm module includes a rotating bracket hinged to the support at its bottom and a transmitting unit located at the top of the rotating bracket along its length. The rotation axis of the rotating bracket is along the Y direction and is flush with the horizontal slit. The interior of the rotating bracket has a beam channel along its length. The exterior of the rotating bracket has an arc-shaped vernier scale. When the rotating bracket rotates to the vertical position, the 0 line of the fixed scale and the 0 line of the vernier scale are perpendicularly aligned. The transmitting unit includes a laser emitter for emitting a laser beam.

[0009] In one embodiment of the invention, the rotating bracket includes a bottom bracket, a top bracket, and an intermediate bracket connecting the bottom bracket and the top bracket.

[0010] The bottom support includes a hinge seat and a first support plate located at the top of the hinge seat. The hinge seat is hinged to the support part. A strip-shaped first through groove is formed on the first support plate.

[0011] The intermediate support includes a frame structure formed by multiple supporting side plates, and forms a beam channel extending along the length of the intermediate support inside the intermediate support.

[0012] The top support includes a second support plate connected to the middle support and multiple adjustable side plates located on the side of the second support plate; the second support plate has a strip-shaped second through slot, which is perpendicular to the first through slot; the laser emitter is installed in the top support with adjustable angle, and by adjustment, the laser beam emitted by the laser emitter can pass through the second through slot, the beam channel and the first through slot in sequence.

[0013] In one embodiment of the invention, the measuring arm module further includes an adjustment unit for adjusting the laser beam angle of the laser emitter;

[0014] The adjustment unit includes a lower adjustment ball connected to the laser emitter, an upper adjustment ball located above the lower adjustment ball and connected to the laser emitter, and an adjustment assembly for horizontally adjusting the position of the upper adjustment ball; the lower adjustment ball and the second support plate form a spherical pair.

[0015] In one embodiment of the invention, the adjustment unit further includes a lower adjustment sleeve disposed on the top of the second support plate, an anti-loosening sleeve detachably connected to the lower adjustment sleeve, and an anti-loosening washer disposed in the anti-loosening sleeve; the lower adjustment ball is disposed in the lower adjustment sleeve and forms a spherical pair with the inner wall surface of the anti-loosening washer.

[0016] In one embodiment of the invention, the adjustment assembly includes an upper adjustment sleeve covering the upper adjustment ball and at least two sets of adjustment parts; the interior of the upper adjustment sleeve is provided with a spherical structure that forms a spherical pair with the upper adjustment ball; the extension directions of the at least two sets of adjustment parts intersect; the adjustment part includes an adjustment bolt and an adjustment spring coaxially arranged, the adjustment bolt and the adjustment spring being arranged on both sides of the upper adjustment sleeve; the adjustment bolt is threadedly connected to the adjustment side plate and its end abuts against the outer wall of the upper adjustment sleeve; one end of the adjustment spring is connected to the inner side of the adjustment side plate, and the other end of the adjustment spring abuts against the outer wall of the upper adjustment sleeve.

[0017] In one embodiment of the invention, the transmitting unit further includes a first filter detachably mounted on the top of the first support plate and a second filter detachably mounted on the bottom of the second support plate; the second filter and the first filter are arranged opposite to each other along the extension direction of the rotating bracket, the second filter has a second through hole in the shape of an elongated strip and communicating with the second through slot, the first filter has a first through hole in the shape of an elongated strip and communicating with the first through slot, and the first through hole and the second through hole are perpendicular to each other; the laser beam passes through the second through hole, the second through slot, the beam channel, the first through hole and the first through slot in sequence and is incident on the central concave point.

[0018] In one embodiment of the invention, the emitting unit further includes a cutoff device connected to the bottom of the laser emitter.

[0019] In one embodiment of the invention, the rotating bracket is locked to the measuring unit; the measuring target plate is also provided with a plurality of upper reference lines arranged parallel to the 0° horizontal reference line above and a plurality of lower reference lines arranged parallel to the 0° horizontal reference line below.

[0020] In one embodiment of the invention, this application further includes a threaded fastener for locking the rotating bracket and the measuring part; the measuring part has an arc-shaped groove, and the threaded fastener passes through the arc-shaped groove and is threaded onto the rotating bracket.

[0021] On the other hand, the invention provides a method for measuring the angle of a high-precision reflector, which uses the measuring device in any of the above embodiments for measurement, and includes the following steps:

[0022] Activate the laser level and use the laser emitted by the laser level to adjust the relative position of the angle ruler and the test target plate, so that the horizontal seam is aligned with the 0° horizontal baseline on the test target plate.

[0023] Adjust the tilt adjustment table to make the stage level;

[0024] Rotate the measuring arm module to a vertical position so that the 0 line on the vernier scale and the 0 line on the fixed scale are vertically aligned;

[0025] Start the laser emitter and adjust the position adjustment stage to adjust the position of the stage in the horizontal direction until the laser beam emitted by the laser emitter is projected onto the central concave point of the stage.

[0026] Mount the reflector to be tested upside down on the stage, and adjust the position adjustment platform to adjust the position of the stage in the height direction until the laser beam from the laser emitter and the laser beam from the laser level intersect on the plane to be tested of the reflector; then turn off the laser level.

[0027] Rotate the mirror under test horizontally by 180° and mount it face up on the stage. The mirror under test reflects the laser beam emitted by the laser emitter onto the target plate. Rotate the measuring arm module until the laser beam reflected by the mirror coincides with the 0° horizontal reference line on the target plate. Read the rotation angle 'a' of the measuring arm module.

[0028] The angle θ of the reflector is obtained based on the rotation angle 'a' read from the reading. This angle is 45° + a / 2.

[0029] In one embodiment of the invention, when the target plate being measured is further provided with an upper reference line and a lower reference line, the measurement method further includes:

[0030] Lock the rotating bracket and the measuring unit;

[0031] Replace the reflector under test and read the scale value of the spot of the laser beam reflected by the reflector projected onto the target plate and overlaps with the upper reference line, lower reference line or 0° horizontal reference line.

[0032] Replace the different mirrors under test and repeat the previous step until all mirrors under test have been measured.

[0033] The above-mentioned technical solution of the invention has the following advantages compared with the prior art:

[0034] 1. This embodiment allows for rapid testing and direct measurement of the reflector's angle value without contacting the reflector surface;

[0035] 2. Through the embodiments, the angles of reflectors at different angles can be measured within a limited spatial location;

[0036] 3. Measurements should be taken based on the actual installation conditions of the reflector to avoid distortion of the reflector angle caused by the deflection angle introduced by other components, thereby further improving the measurement accuracy;

[0037] 4. This embodiment is a fixed test rather than a selective test, which avoids the adverse effects introduced by vibration during the rotation process, while also ensuring the consistency of the comparison benchmark and improving the consistency of the measurement. Attached Figure Description

[0038] To make the invention easier to understand, the invention will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0039] Figure 1 This is a schematic diagram of the structure of a high-precision reflector angle measuring device;

[0040] Figure 2 This is a structural schematic diagram of the stage module and the mirror under test.

[0041] Figure 3 This is a top view of the stage module;

[0042] Figure 4 This is a schematic diagram of the target plate being measured;

[0043] Figure 5 This is a structural diagram of the angle ruler module;

[0044] Figure 6 This is a structural schematic diagram of the measuring arm module;

[0045] Figure 7 This is a structural diagram of the angle ruler module and the measuring arm module;

[0046] Figure 8 This is a structural diagram of the bottom support;

[0047] Figure 9 This is a schematic diagram of the bottom support from another perspective;

[0048] Figure 10 This is a structural diagram of the top support and adjustment unit;

[0049] Figure 11 yes Figure 10 Cross-sectional view;

[0050] Figure 12 This is a schematic diagram showing the connection between the adjustment unit and the second support plate;

[0051] Figure 13This is a schematic diagram showing the connection between the lower and upper adjustment balls and the laser emitter in the adjustment unit;

[0052] Figure 14 This is a schematic diagram showing the connection between the second support plate and the lower adjusting sleeve.

[0053] Explanation of reference numerals in the instruction manual's attached drawings: 100, substrate;

[0054] 200. Stage module; 210. Stage; 211. Center concave point; 220. Tilt adjustment stage; 230. X-axis adjustment stage; 240. Y-axis adjustment stage; 250. Z-axis adjustment stage; 260. Differential head;

[0055] 300. Target plate for measurement; 310. 0° horizontal baseline; 320. Upper baseline; 330. Lower baseline;

[0056] 400, Angle ruler module; 410, Angle ruler; 411, Support unit; 4111, Horizontal channel; 4112, Horizontal gap; 4113, Lateral opening; 412, Measuring unit; 4121, Fixed scale; 4122, Arc groove; 420, Laser level; 430, Two-dimensional level;

[0057] 500. Measuring arm module; 510. Transmitting unit; 511. Laser emitter; 512. Second filter; 513. First filter; 514. Beam cutoff; 520. Rotating bracket; 521. Beam channel; 522. Vernier scale; 523. Bottom bracket; 5231. Hinge seat; 5232. First support plate; 5233. First through slot; 524. Top bracket; 5241. Second support plate; 5242. Adjustable side plate; 524 4. Second through slot; 5245. Spherical groove; 525. Intermediate support; 5251. Support side plate; 5252. Arc-shaped slider; 526. Hinge shaft; 5261. Rotating body marking line; 530. Adjusting unit; 531. Lower adjusting ball; 532. Upper adjusting ball; 533. Lower adjusting sleeve; 534. Upper adjusting sleeve; 540. Anti-loosening sleeve; 550. Anti-loosening washer; 560. Adjusting part; 561. Adjusting bolt; 562. Adjusting spring;

[0058] 600. Threaded fasteners;

[0059] 700. The reflector to be tested. Detailed Implementation

[0060] The invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the invention, but the embodiments are not intended to limit the invention.

[0061] Reference Figures 1 to 14As shown, the invention provides a high-precision measuring device for the angle of a reflector, comprising: a substrate 100, a stage module 200, a measuring target plate 300, an angle ruler module 400, and a measuring arm module 500. Wherein:

[0062] The substrate 100 is set horizontally.

[0063] A stage module 200 is disposed on a substrate 100. From top to bottom, the stage module 200 includes a stage 210 with a central recess 211 at its top, a position adjustment stage for adjusting the spatial position of the stage 210, and a tilt adjustment stage 220 for adjusting the horizontality of the stage 210. The position adjustment stage is configured to adjust the position of the stage 210 at least in the horizontal and vertical directions. In some embodiments, the tilt adjustment stage 220 is fixed to the top of the substrate 100. The position adjustment stage includes an X-direction adjustment stage 230, a Y-direction adjustment stage 240, and a Z-direction adjustment stage 250. The X, Y, and Z directions are perpendicular to each other. The X and Y directions are two horizontally perpendicular directions. Specifically, the X direction is perpendicular to the measurement target plate 300 (i.e., the length direction of the angle ruler module 400). The Y direction is the width direction of the angle ruler module 400. The Z direction is a vertical direction perpendicular to the horizontal, i.e., the height direction of the angle ruler module 400. The Y-direction adjusting stage 240 is connected to the top of the tilt adjusting stage 220. The X-direction adjusting stage 230 is connected to the top of the Y-direction adjusting stage 240. The Z-direction adjusting stage 250 is connected to the top of the X-direction adjusting stage 230. The stage 210 is connected to the top of the Z-direction adjusting stage 250. The movement of the X-direction adjusting stage 230, the Y-direction adjusting stage 240, and the Z-direction adjusting stage 250 is controlled by their respective micrometer heads 260. This embodiment provides a simple description of the position adjusting stage and the stage adjusting structure. In practical applications, it is sufficient to achieve adjustment of the stage in three dimensions in the horizontal and vertical directions, as well as horizontal adjustment of the stage. There are many such adjustment structures, which will not be elaborated in this embodiment.

[0064] The measurement target plate 300 is set perpendicular to the X direction and has a 0° horizontal reference line 310 extending in the Y direction.

[0065] The angle gauge module 400 includes an angle gauge 410 and a laser level 420. The angle gauge 410 includes a support 411 and a fan-shaped measuring part 412 disposed on the support 411. The support 411 and the measuring part 412 can be integrated. The support 411 is horizontally positioned, with its length pointing towards the target plate 300 along the X-direction. The bottom of the support 411 has a cavity structure from bottom to top to accommodate the stage module 200. One side of the support 411 has a lateral opening 4113 at the location of the cavity structure, allowing the operator to easily reach in through the lateral opening 4113 and manually adjust the tilt adjustment stage 220 and the micrometer heads 260 of the X-direction adjustment stage 230, Y-direction adjustment stage 240, and Z-direction adjustment stage 250. A horizontal slit 4112 is opened at the end of the support 411 away from the target plate 300. The support portion 411 has a horizontal channel 4111 extending in the X direction and open at one end, with the opening of the horizontal channel 4111 facing the measuring target plate 300. The horizontal channel 4111 communicates with the cavity structure. This can reduce the material cost and weight of the angle gauge to a certain extent. The measuring portion 412 includes a fixed scale 4121 with an arc shape. The laser level 420 is located on the side of the support portion 411 away from the measuring target plate 300. The emission port of the laser level 420 is flush with the horizontal slit 4112, and the laser beam of the laser level 420 passes through the horizontal slit 4112 and enters the horizontal channel 4111.

[0066] The measuring arm module 500 includes a transmitting unit 510 and a rotating bracket 520. The bottom end of the rotating bracket 520 is hinged to the support part 411 via a hinge shaft 526, the axis of which extends along the Y direction and is flush with the horizontal slit 4112. The hinge shaft 526 is located at the top of the cavity structure of the support part 411. The transmitting unit 510 is located at the top of the rotating bracket 520 along its length. The interior of the rotating bracket 520 has a beam channel 521 extending along its length. The outer side of the rotating bracket 520 has an arc-shaped vernier scale 522, which matches the fixed scale 4121. When the rotating bracket 520 rotates to the vertical position, the 0 mark of the fixed scale 4121 and the 0 mark of the vernier scale 522 are perpendicularly aligned. The scale line of the fixed scale 4121 is an angle scale line, and the scale line of the vernier scale 522 is a vernier scale line. The emitting unit 510 includes a laser emitter 511 for emitting a laser beam. The laser beam from the emitting unit 510 passes through the beam channel 521 and is projected onto the central concave point 211. The position of the stage module 200 can be adjusted by the X-direction adjustment stage 230 and the Y-direction adjustment stage 240, so that the central concave point 211 at the center of the stage module 200 is aligned with the spot of the laser beam.

[0067] The specific steps of the measurement method using the measuring device in the above embodiments are as follows:

[0068] The laser level 420 is activated, and the laser emitted by the laser level 420 is used to adjust the relative position of the angle ruler 410 and the test target plate, so that the horizontal slit 4112 is aligned with the 0° horizontal reference line 310 on the test target plate. Specifically, the projection of the hinge axis along the X direction onto the measurement target plate 300 is determined to coincide with the 0° horizontal reference line 310. The laser beam of the laser level 420 passes sequentially through the horizontal slit 4112, the hinge axis (i.e., the rotation mark line 5261, which is marked on the hinge axis 526 and coincides with the hinge axis), and the 0° horizontal reference line 310, thereby determining the projection of the hinge axis and the 0° horizontal reference line 310 along the X direction onto the measurement target plate 300.

[0069] Adjust the tilt adjustment table 220 to make the stage 210 horizontal.

[0070] Rotate the measuring arm module 500 to a vertical position so that the 0 mark on the vernier scale 522 is vertically aligned with the 0 mark on the fixed scale 4121.

[0071] Start the laser emitter 511 and adjust the position adjustment stage to adjust the position of the stage 210 in the horizontal direction until the laser beam emitted by the laser emitter 511 is projected onto the central concave point 211 of the stage, that is, until the spot of the laser beam of the laser emitter 511 irradiated on the stage overlaps with the central concave point 211.

[0072] The mirror to be tested is mounted upside down on the stage 210, and the position adjustment platform is adjusted to adjust the position of the stage 210 in the height direction until the laser beam of the laser emitter 511 and the laser beam of the laser level 420 intersect on the plane to be tested of the mirror; then the laser level 420 is turned off.

[0073] The mirror under test is rotated horizontally by 180° and mounted face up on the stage 210. The mirror under test 700 reflects the laser beam emitted by the laser emitter 511 onto the measurement target plate 300. The measurement arm module 500 is rotated until the laser beam reflected by the mirror coincides with the 0° horizontal reference line 310 on the test target plate. The rotation angle α of the measurement arm module 500 is then read.

[0074] The angle θ of the reflector is obtained based on the read rotation angle a = 45 + a / 2.

[0075] Therefore, this embodiment has the following advantages:

[0076] 1. This embodiment allows for rapid testing and direct measurement of the reflector's angle value without contacting the reflector surface;

[0077] 2. Through the embodiments, the angles of reflectors at different angles can be measured within a limited spatial location;

[0078] 3. Measurements should be taken based on the actual installation conditions of the reflector to avoid distortion of the reflector angle caused by the deflection angle introduced by other components, thereby further improving the measurement accuracy;

[0079] 4. This embodiment is a fixed test rather than a selective test, which avoids the adverse effects introduced by vibration during the rotation process, while also ensuring the consistency of the comparison benchmark and improving the consistency of the measurement.

[0080] Furthermore, when the target plate 300 is also provided with an upper reference line 320 and a lower reference line 330, the measurement method proceeds as follows after the test steps in the above embodiment:

[0081] Lock the rotating bracket 520 to the measuring part 412. For example, the angle gauge 410 and the intermediate bracket 525 are fixed by threaded fasteners 600.

[0082] Replace the reflector 700 under test and read the scale value where the spot of the laser beam reflected by the reflector is projected onto the measurement target plate 300 and overlaps with the upper reference line 320, the lower reference line 330, or the 0° horizontal reference line 310. Due to various factors during batch production, the angle of the reflector 700 under test may vary. Therefore, by measuring different reflectors 700 under test, the angle of different reflectors 700 under test can be calculated by identifying the overlap between the spot of the laser beam projected onto the measurement target plate 300 by the laser emitter 511 and the upper reference line 320, the lower reference line 330, or the 0° horizontal reference line 310. The specific principle is as follows: The angle of the reflector 700 under test can be calculated by reading the degree value 'b' on the consistency measurement target plate 300. The formula for calculating degree value 'b' is: b = arctan(d / l), where d is the vertical distance between the scale line corresponding to the light spot (upper reference line 320, lower reference line 330, or 0° horizontal reference line 310) and the 0° horizontal reference line 310, and l is the horizontal distance from the consistency measurement target plate 300 to the stage 210. The formula for calculating the angle θ' of the reflector 700 under test is: θ' = θ ± b / 2, where θ is the angle of the reflector in the above embodiment, and b is the degree value. It should be noted that if the scale line corresponding to the light spot is the upper reference line 320, then the angle θ' is negative; if the scale line corresponding to the light spot is the lower reference line 330, then the angle θ' is positive. The resolution of the consistency measurement target plate 300 can be determined by the distance between the reflector 700 under test and the consistency measurement target plate 300; the greater the distance, the higher the resolution. Typically, a consistency measurement plate with a resolution higher than that of the vernier scale 522 and the fixed scale 4121 is sufficient.

[0083] For different reflectors in the same batch, the previous step is repeated by replacing different reflectors 700 under test and repeating the previous step until all reflectors 700 under test are measured.

[0084] Therefore, this embodiment can accurately measure multiple mirrors of the same specification in the same batch, thereby achieving consistent measurement of multiple mirrors.

[0085] Furthermore, the rotating bracket 520 includes a bottom bracket 523, a top bracket 524, and an intermediate bracket 525 connecting the bottom bracket 523 and the top bracket 524. The bottom bracket 523 includes a hinge seat 5231 and a first support plate 5232 disposed at the top of the hinge seat 5231. The hinge seat 5231 is hinged to the support part 411 via a hinge shaft 526. The first support plate 5232 has a strip-shaped first through groove 5233.

[0086] The intermediate support 525 includes a frame structure formed by multiple supporting side plates 5251, and forms a beam channel 521 extending along the length of the intermediate support 525 inside the intermediate support 525. In some embodiments, there are two supporting side plates 5251, which are positioned opposite each other to form the beam channel 521 between them. In some embodiments, an arc-shaped slider 5252 is fixed to the outer side of the supporting side plate 5251 near the top, and a vernier scale 522 is provided on the arc-shaped slider 5252.

[0087] The top support 524 includes a second support plate 5241 and multiple adjustable side plates 5242. The second support plate 5241 is connected to the intermediate support 525, and the adjustable side plates 5242 are located on the side of the second support plate 5241. The second support plate 5241 has a strip-shaped second through slot 5244, which is perpendicular to the first through slot 5233. The laser emitter 511 is adjustablely mounted in the top support 524, and by adjustment, the laser emitted by the laser emitter 511 can pass sequentially through the second through slot 5244, the beam channel 521, and the first through slot 5233. The second through slot 5244 and the first through slot 5233 can limit the laser beam emitted by the laser emitter, ensuring that the laser beam emitted by the laser emitter 511 illuminates the reflector with a concentrated spot, avoiding an excessively large spot that could lead to inaccurate measurements. Compared with existing technologies, this improves the quality of the laser beam and enhances the accuracy of the measurement.

[0088] Furthermore, the measuring arm module 500 also includes an adjustment unit 530 for adjusting the laser beam angle of the laser emitter 511. The adjustment unit 530 includes a lower adjustment ball 531, an upper adjustment ball 532, and an adjustment assembly. The lower adjustment ball 531 is connected to the laser emitter 511, and the upper adjustment ball 532 is located above the lower adjustment ball 531 and connected to the laser emitter 511. The adjustment assembly is used to adjust the position of the upper adjustment ball 532. The lower adjustment ball 531 and the second support plate 5241 form a spherical pair. Specifically, in this embodiment, the laser emitter 511's light emission angle can be adjusted through the adjustment assembly, thereby ensuring that the laser beam of the laser emitter 511 can pass through the second through slot 5244 and the first through slot 5233 and be incident on the central concave point 211.

[0089] Furthermore, the adjusting unit 530 also includes a lower adjusting sleeve 533, an anti-loosening sleeve 540, and an anti-loosening washer 550. The lower adjusting sleeve 533 is located on the top of the second support plate 5241, the anti-loosening sleeve 540 is detachably connected to the lower adjusting sleeve 533, and the anti-loosening washer 550 is located inside the anti-loosening sleeve 540. The lower adjusting sleeve 533 has a spherical structure inside, the second support plate 5241 has a spherical groove 5245, the lower adjusting ball 531 is located inside the lower adjusting sleeve 533, and the lower adjusting ball 531, the spherical structure of the lower adjusting sleeve 533, and the spherical groove 5245 form a spherical pair. The anti-loosening washer 550 has a spherical structure that forms a spherical pair with the lower adjusting ball 531, and the inner wall surface of the lower adjusting ball 531 and the anti-loosening washer 550 form a spherical pair. The first through groove 5233 communicates with the spherical groove 5245. The upper adjusting ball 532 rotates within the upper adjusting sleeve 534; the lower adjusting ball 531 rotates within the spherical groove 5245 at the top of the second support plate 5241. In some embodiments, the anti-loosening washer 550 is made of PA material and has a certain lubricating effect. Specifically, the anti-loosening sleeve 540 and the anti-loosening washer 550 in this embodiment play a loosening role, preventing the laser emitter 511 from shaking during the measurement process and affecting the measurement results, thereby further improving the measurement accuracy of this application.

[0090] Furthermore, the adjustment assembly includes an upper adjustment sleeve 534 covering the upper adjustment ball 532 and at least two sets of adjustment parts 560. The interior of the upper adjustment sleeve 534 has a spherical structure that forms a spherical pair with the upper adjustment ball 532. The extension directions of the at least two sets of adjustment parts 560 intersect. Thus, the at least two sets of adjustment parts 560 can adjust the horizontal coordinate position of the upper adjustment sleeve 534 from at least two directions. Each adjustment part 560 includes an adjustment bolt 561 and an adjustment spring 562 coaxially arranged. The adjustment bolt 561 and the adjustment spring 562 are disposed on both sides of the upper adjustment sleeve 534; the adjustment bolt 561 is threadedly connected to the adjustment side plate 5242 and its end abuts against the outer wall of the upper adjustment sleeve 534. For example, the adjustment side plate 5242 has a threaded hole, and the adjustment bolt 561 is threadedly connected to the threaded hole. One end of the adjustment spring 562 is connected to the inner side of the adjustment side plate 5242, and the other end of the adjustment spring 562 abuts against the outer wall of the upper adjustment sleeve 534. Specifically, the light emission angle of the laser emitter 511 is adjusted by adjusting the adjusting bolt 561 on the bracket and the opposing adjusting spring 562, so that the light spot of the laser emitter 511 can pass completely through the second filter 512 and the first filter 513.

[0091] Furthermore, the transmitting unit 510 also includes a second filter 512 and a first filter 513. The second filter 512 is detachably mounted on the bottom of the second support plate 5241, and the first filter 513 is detachably mounted on the top of the first support plate 5232. The second filter 512 and the first filter 513 are arranged opposite each other along the extension direction (i.e., the Z direction) of the rotating bracket 520. The second filter 512 has a long strip-shaped second through hole communicating with the second through slot 5244, and the first filter 513 has a long strip-shaped first through hole communicating with the first through slot 5233. The second through hole and the first through hole are perpendicular to each other, and the width of the second through hole and the first through hole is the same, D. The laser beam passes sequentially through the second through hole, the beam channel 521 of the second through slot 5244, the first through hole, and the first through slot 5233 and is incident on the central concave point 211. In some embodiments, the second through hole and the second through groove 5244 have the same shape and extending direction, and the first through hole and the first through groove 5233 have the same shape and extending direction. Preferably, the width of the second through hole and / or the first through hole is less than or equal to the width of the second through groove 5244 and / or the first through groove 5233.

[0092] In practical applications, the size of the light spot can be further controlled by replacing the matching first and second filters.

[0093] The widths of the second and first through holes are set as D, and the length of the intermediate support 525 is L. The light deflection angle γ when the laser beam reaches the object under test is: γ = arctan(D / L). Where D is the width of the second and first through holes, and L is the vertical distance from the first filter 513 to the hinge point of the bottom support 523. In this embodiment, when D is 0.5 mm and L is 500 mm, the light deflection angle γ ≈ 0.001°. Therefore, the light deflection angle γ in this application is relatively small, resulting in high measurement accuracy. Thus, the second filter 512 and the first filter 513 in this embodiment can filter light, controlling the beam quality according to the testing requirements, thereby achieving higher accuracy in a smaller space.

[0094] Furthermore, the emitting unit 510 also includes a beam cutter 514, which is connected to the bottom of the laser emitter 511. Specifically, since the light spot emitted by the laser emitter 511 has high energy but a large size, the beam cutter 514 in this embodiment cuts the light spot to the ideal size and retains only the middle part with higher energy, resulting in better testing results.

[0095] Furthermore, the rotating bracket 520 is locked to the measuring unit 412. The measuring target plate 300 is also provided with a plurality of upper reference lines 320 arranged parallel to the 0° horizontal reference line 310 above it and a plurality of lower reference lines 330 arranged parallel to the 0° horizontal reference line 310 below it. In some embodiments, the plurality of upper reference lines 320 are arranged at equal intervals, and the plurality of lower reference lines 330 are arranged at equal intervals.

[0096] This application also includes a threaded fastener 600 for locking the rotating bracket 520 and the measuring part 412; the measuring part 412 has an arc-shaped groove 4122, and the threaded fastener 600 passes through the arc-shaped groove 4122 and is threadedly connected to the intermediate bracket 525 on the rotating bracket 520. Specifically, the threaded fastener 600 in this embodiment can lock the rotating bracket 520 and the measuring part 412, and the setting of the upper reference line 320 and the lower reference line 330 facilitates subsequent batch testing of the reflector 700 under test.

[0097] Furthermore, the angle ruler module 400 also includes a high two-dimensional level 430 mounted on the support 411. When the angle ruler 410 is installed, the high two-dimensional level 430 provides a digital display of the level, and the horizontal installation status of the angle ruler 410 is adjusted according to the display.

[0098] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A high-precision measuring device for the angle of a reflecting mirror, characterized in that: include: The stage module includes, from top to bottom, a stage with a central concave point at the top, a position adjustment stage for adjusting the spatial position of the stage, and an angle adjustment stage for adjusting the horizontality of the stage; the position adjustment stage is configured to be able to adjust the position of the stage at least in the horizontal and vertical directions. The target plate is set perpendicular to the X direction and has a 0° horizontal reference line extending in the Y direction; An angle ruler module includes an angle ruler and a laser level. The angle ruler includes a support part and a measuring part disposed on the support part. The support part is horizontally positioned, and its length direction points towards the target plate along the X direction. The bottom of the support part has a cavity structure from bottom to top to accommodate a stage module. A horizontal slit is opened at the end of the support part away from the target plate. The measuring part has a fixed arc-shaped scale. The laser level is disposed on the side of the support part away from the target plate. The laser level's emission port is flush with the horizontal slit. The measuring arm module includes a rotating bracket hinged to a support at its bottom and a transmitting unit located at the top of the rotating bracket along its length. The rotation axis of the rotating bracket is along the Y direction and is flush with the horizontal slit. The interior of the rotating bracket has a beam channel along its length. The exterior of the rotating bracket has an arc-shaped vernier scale. When the rotating bracket rotates to a vertical position, the 0 line of the fixed scale and the 0 line of the vernier scale are perpendicularly aligned. The transmitting unit includes a laser emitter for emitting a laser beam. The rotating bracket includes a bottom bracket, a top bracket, and an intermediate bracket connecting the bottom bracket and the top bracket; The bottom support includes a hinge seat and a first support plate disposed at the top of the hinge seat, the hinge seat being hinged to the support portion; a strip-shaped first through groove is formed on the first support plate; The intermediate support includes a frame structure formed by multiple supporting side plates, and forms a beam channel extending along the length direction of the intermediate support inside the intermediate support. The top support includes a second support plate connected to the middle support and a plurality of adjustable side plates disposed on the side of the second support plate; the second support plate has a strip-shaped second through slot, which is perpendicular to the first through slot; the laser emitter is installed in the top support with adjustable angle, and by adjustment, the laser beam emitted by the laser emitter can pass through the second through slot, the beam channel and the first through slot in sequence.

2. The high-precision mirror angle measuring device according to claim 1, characterized in that: The measuring arm module also includes an adjustment unit for adjusting the laser beam angle of the laser emitter; The adjustment unit includes a lower adjustment ball connected to the laser emitter, an upper adjustment ball located above the lower adjustment ball and connected to the laser emitter, and an adjustment component for horizontally adjusting the position of the upper adjustment ball; the lower adjustment ball and the second support plate form a spherical pair.

3. The high-precision reflector angle measuring device according to claim 2, characterized in that: The adjustment unit further includes a lower adjustment sleeve disposed on the top of the second support plate, an anti-loosening sleeve detachably connected to the lower adjustment sleeve, and an anti-loosening washer disposed inside the anti-loosening sleeve; the lower adjustment ball is disposed inside the lower adjustment sleeve and forms a spherical pair with the inner wall surface of the anti-loosening washer.

4. The high-precision mirror angle measuring device according to claim 3, characterized in that: The adjustment assembly includes an upper adjustment sleeve covering the upper adjustment ball and at least two sets of adjustment parts; the interior of the upper adjustment sleeve is provided with a spherical structure that forms a spherical pair with the upper adjustment ball; the extension directions of the at least two sets of adjustment parts intersect; each adjustment part includes an adjustment bolt and an adjustment spring coaxially arranged, the adjustment bolt and the adjustment spring being arranged on both sides of the upper adjustment sleeve; the adjustment bolt is threadedly connected to the adjustment side plate and its end abuts against the outer wall of the upper adjustment sleeve; one end of the adjustment spring is connected to the inner side of the adjustment side plate, and the other end of the adjustment spring abuts against the outer wall of the upper adjustment sleeve.

5. The high-precision mirror angle measuring device according to claim 1, characterized in that: The transmitting unit further includes a first filter detachably mounted on the top of the first support plate and a second filter detachably mounted on the bottom of the second support plate; the second filter and the first filter are arranged opposite to each other along the extension direction of the rotating bracket, the second filter has a long strip-shaped second through hole communicating with the second through slot, the first filter has a long strip-shaped first through hole communicating with the first through slot, and the first through hole and the second through hole are perpendicular to each other; the laser beam passes through the second through hole, the second through slot, the beam channel, the first through hole and the first through slot in sequence and is incident on the central concave point.

6. The high-precision mirror angle measuring device according to claim 1, characterized in that: The rotating bracket is locked to the measuring unit; the measuring target plate is also provided with a plurality of upper reference lines arranged parallel to the 0° horizontal reference line above it and a plurality of lower reference lines arranged parallel to the 0° horizontal reference line below it.

7. The high-precision mirror angle measuring device according to claim 6, characterized in that: It also includes a threaded fastener for locking the rotating bracket and the measuring part; the measuring part has an arc-shaped groove, and the threaded fastener passes through the arc-shaped groove and is threaded onto the rotating bracket.

8. A method for measuring the angle of a high-precision reflector, characterized in that: The measurement is performed using the measuring device described in claim 1, and the steps include: Activate the laser level and use the laser emitted by the laser level to adjust the relative position of the angle ruler and the test target plate, so that the horizontal seam is aligned with the 0° horizontal baseline on the test target plate. Adjust the tilt adjustment table to make the stage level; Rotate the measuring arm module to a vertical position so that the 0 line on the vernier scale and the 0 line on the fixed scale are vertically aligned; Start the laser emitter and adjust the position adjustment stage to adjust the position of the stage in the horizontal direction until the laser beam emitted by the laser emitter is projected onto the central concave point of the stage. Mount the reflector to be tested upside down on the stage, and adjust the position adjustment platform to adjust the position of the stage in the height direction until the laser beam from the laser emitter and the laser beam from the laser level intersect on the plane to be tested of the reflector; then turn off the laser level. Rotate the mirror under test horizontally by 180° and mount it face up on the stage. The mirror under test reflects the laser beam emitted by the laser emitter onto the target plate. Rotate the measuring arm module until the laser beam reflected by the mirror coincides with the 0° horizontal reference line on the target plate. Read the rotation angle 'a' of the measuring arm module. The angle θ of the reflector is obtained based on the read rotation angle a = 45° + a / 2.

9. The method for measuring the angle of a high-precision reflector according to claim 8, characterized in that: When the target plate being measured also has an upper reference line and a lower reference line, the measurement method further includes: Lock the rotating bracket and the measuring unit; Replace the reflector under test and read the scale value of the spot of the laser beam reflected by the reflector projected onto the target plate and overlaps with the upper reference line, lower reference line or 0° horizontal reference line; Replace the different mirrors under test and repeat the previous step until all mirrors under test have been measured.

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