A treatment terminal based on multi-channel, low-inertia rotating beam

Abstract

The present invention relates to a treatment terminal based on a multi-channel, small-inertia rotating beam, comprising: a fixed beam and a rotating beam, the rotating beam is fixed on a first frame, the rotating beam comprises a horizontal beam and an inclined beam forming an acute angle with the ground, the first frame is connected to a first transmission mechanism, a lifting mechanism is arranged below the first transmission mechanism; a deflection unit is fixed on a second frame, the second frame is connected to a second transmission mechanism, the deflection unit contacts the inclined beam in time to form a vertical beam; a plurality of first treatment rooms, the plurality of first treatment rooms are evenly arranged along the circumferential direction of the rotating beam to form a first layer of treatment rooms; a plurality of second treatment rooms, the plurality of second treatment rooms are evenly arranged along the circumferential direction of the deflection unit to form a second layer of treatment rooms; a plurality of treatment heads, which are respectively arranged in one-to-one correspondence with the first treatment room and the second treatment room, the treatment heads are used to receive ion beams transmitted by the rotating beam and perform irradiation treatment on patients.

Description

Technical Field

[0001] The invention relates to a treatment terminal based on a multi-channel, small-inertia rotating beam line, belonging to the technical field of ion beam irradiation treatment. Background Art

[0002] Ion beam radiotherapy and irradiation research are increasingly widely used. Radiation therapy for cancer is a very popular technical means currently used. Because ion beam irradiation of organisms has an inverted depth dose distribution and a high relative biological effect, it can better avoid damage to normal cells while killing tumor cells, making ion therapy for cancer an advanced and effective cancer radiotherapy method in the world today. Currently, the most commonly used ions for ion therapy for cancer are protons and carbon ions. Carbon ions have more significant advantages in linear energy density, relative biological effect, and side scattering. They can produce difficult-to-repair DNA double-strand breaks (DSBs) and are usually used as the best choice for cancer treatment. However, the carbon ion accelerators currently in operation are large in scale, occupy a large area of ​​equipment, and are expensive.

[0003] When using ion beams to treat cancer, if only one irradiation direction is used, the normal cells between the skin and the tumor will receive at least 1 / 3 of the tumor radiation dose, causing varying degrees of damage. In order to reduce this damage and increase the focal-to-skin ratio of the treatment, a course of treatment requires irradiation from different directions, dividing the total dose into multiple radiation directions, so that the dose received by normal tissues is greatly reduced.

[0004] The terminal beamline of the accelerator treatment is an essential device for the accelerator cancer treatment device to realize the beam irradiation of patients. In order to realize multiple irradiation angles, an accelerator needs to be equipped with treatment terminals with different irradiation angles. Commonly used ones are horizontal terminals, vertical terminals and 45-degree terminals. In order to configure these fixed-angle treatment terminals, the terminal beam transmission line is usually designed to be very long, and a large deflection magnet is used to realize the climbing and passing of the beamline, which increases the footprint of the device, greatly increases the equipment cost, increases the difficulty of equipment installation, and has a high overall investment. For example, the Wuwei carbon ion treatment device draws the beam out from the plane accelerated by the circular accelerator, passes through a section of beam transmission line, and uses a large deflection magnet to realize the climbing and passing of the beamline, realizing a plan of five treatment rooms with two vertical, two horizontal, and one 45-degree angles. The terminal beamline length reaches 140 meters, with many equipment, high vertical space occupation of the beamline, and a climbing height of nearly 20 meters. The horizontal footprint is large and the cost is expensive. The use of combined rotating beamlines can realize multi-room and multi-angle irradiation treatment, and the combination of different beamlines can realize the terminal treatment layout of multiple angles and multiple treatment rooms on the upper and lower floors.

[0005] In order to achieve multi-angle irradiation, a rotating gantry technology can also be used. However, due to the high magnetic rigidity of carbon ions, the scale of the rotating gantry is very large. For example, the heavy ion rotating gantry developed by the Heidelberg Heavy Ion Research Center in Germany weighs 630 tons, of which the rotating part weighs 570 tons. It is also very large and has high processing and operating costs. Even the superconducting carbon ion rotating gantry being developed internationally weighs more than 200 tons. The magnetic rigidity of the proton therapy device is only 1 / 3 of that of the carbon ion, and the weight and volume of the gantry are greatly reduced.

[0006] Current proton therapy devices usually have a rotating gantry for irradiating patients at multiple angles. To realize the beam delivery system, many functions need to be realized, resulting in a large weight of the rotating gantry equipment, reaching hundreds of tons, and the entire rotating gantry is very expensive. Due to the large size and weight, the gantry has a very large moment of inertia and a slow rotation speed, with a maximum of only 1rpm. To achieve irradiation at different angles, the waiting time for rotation positioning is long, and the treatment efficiency is low. Summary of the invention

[0007] In response to the above technical problems, the present invention provides a treatment terminal based on a multi-channel, small-inertia rotating beam, which can greatly shorten the length of the rotating beam, reduce the investment in equipment such as magnets, greatly reduce the rotational inertia of the rotating system, and increase the rotation speed to 2rpm. The positioning accuracy can be increased to 0.1mm, and the number of treatment rooms can be greatly increased at a lower construction cost, forming a terminal layout with multiple treatment rooms and multiple angles, greatly improving the treatment efficiency.

[0008] To achieve the above object, the present invention adopts the following technical solutions:

[0009] A treatment terminal based on a multi-channel, low-inertia rotating beam, comprising:

[0010] A fixed harness and a rotating harness are connected by a telescopic component, the rotating harness is fixed on the first frame, the rotating harness includes a horizontal harness and an inclined harness at an acute angle to the ground, the first frame is connected to the first transmission mechanism, a lifting mechanism is installed below the first transmission mechanism, and the first transmission mechanism is used to drive the first frame to rotate 0-360 degrees along the circular track;

[0011] A deflection unit is fixed on a second frame, the second frame is connected to a second transmission mechanism, the second transmission mechanism is used to drive the second frame to rotate 0-360 degrees along a circular track with the rotation axis of the first frame as the axis, and the deflection unit contacts the inclined beam line in time to form a vertical beam line;

[0012] A control mechanism, used for controlling the first transmission mechanism and the second transmission mechanism to rotate synchronously or independently;

[0013] A plurality of first treatment rooms, wherein the plurality of first treatment rooms are evenly arranged along the circumferential direction of the rotating beam line to form a first layer of treatment rooms, and a mounting hole is opened on the wall of each of the first treatment rooms;

[0014] A plurality of second treatment rooms, wherein the plurality of second treatment rooms are evenly arranged along the circumferential direction of the deflection unit to form a second layer of treatment rooms, and a mounting hole is provided on the wall of each second treatment room;

[0015] There are several treatment heads, each of which is arranged in one-to-one correspondence with the first treatment room and the second treatment room. The treatment heads pass through the mounting holes to receive the ion beam transmitted by the rotating beam line and irradiate the patient or the sample.

[0016] The treatment terminal, preferably, the treatment head includes a horizontal treatment head, a vertical treatment head and an inclined treatment head, and the inclined beam line is driven by the lifting mechanism to rise upward to a channel that is compatible with the deflection unit and the inclined treatment head in the second-layer treatment room at the same time, thereby forming a vertical treatment terminal compatible with the vertical treatment head in the first-layer treatment room or a tilted treatment terminal compatible with the tilted treatment head in the second-layer treatment room;

[0017] At the same time, the horizontal beam is driven by the lifting mechanism to rise to a channel that is compatible with the horizontal treatment head in the second-layer treatment room to form a horizontal treatment terminal.

[0018] The treatment terminal is preferably such that when the deflection unit is in the energized state, the inclined beam line is adapted to the vertical treatment head in the first-layer treatment room to form a vertical treatment terminal, and at the same time the horizontal beam line is adapted to the horizontal treatment head in the second-layer treatment room to form a horizontal treatment terminal.

[0019] The described treatment terminal is preferably such that when the deflection unit is in a non-powered state, the inclined beam line is adapted to the inclined treatment head in the second-layer treatment room to form an inclined treatment terminal, and at the same time the horizontal beam line is adapted to the horizontal treatment head in the second-layer treatment room to form a horizontal treatment terminal.

[0020] The treatment terminal preferably has at least three treatment heads in each of the first treatment chambers, and at least two treatment heads in each of the second treatment chambers.

[0021] In the treatment terminal, preferably, the telescopic component is a metal bellows or other vacuum sealing element capable of telescopic movement.

[0022] In the treatment terminal, preferably, the deflection unit is a deflection dipole magnet.

[0023] In the treatment terminal, preferably, the deflection dipole magnet is a 45-degree deflection dipole magnet or a dipole magnet with any other deflection angle.

[0024] In the treatment terminal, preferably, the rotating beam is connected to the treatment head in a contactless manner through a vacuum membrane window.

[0025] In the treatment terminal, preferably, both ends of the deflection unit are contactlessly connected to the treatment head and the tilting beam through vacuum film windows.

[0026] The present invention adopts the above technical solution, which has the following advantages:

[0027] 1. The treatment terminal of the present invention can significantly reduce the length of the beam line, the weight of the rotating system, the moment of inertia and the construction cost. Specifically, in ion therapy, in order to provide different treatment angles, an accelerator uses multiple branch beam lines, and in order to configure multiple treatment rooms, the beam line is extended very long and the number of equipment is large. In the traditional treatment terminal, one beam line corresponds to one treatment room, and four beam lines are required to achieve beam distribution in four treatment rooms, and the total length of the beam line is close to 200 meters. The present invention can achieve beam distribution in 16 or more treatment rooms through a beam line of about 20 meters, which not only reduces the cost of process equipment such as magnets, vacuum, and power supplies, but also reduces the scale and cost of supporting auxiliary facilities. The beam line is short, the equipment is small, and the weight of the rotating system is light, so the moment of inertia is 20% of that of the traditional proton Gantry. The transmission system is simple in design, with high transmission accuracy, high rotation speed, short waiting time, and high treatment efficiency.

[0028] 2. During radiotherapy, the most time-consuming steps are positioning before irradiation and waiting for dose attenuation after radiation. Adding treatment rooms is a key bottleneck to improving treatment efficiency. At present, radiotherapy terminals have a single beam corresponding to a single treatment room. The multi-angle treatment of a single treatment room is achieved through multiple fixed beams or rotating gantry technology. Under this scheme, the cost of increasing treatment rooms to improve treatment efficiency is huge. Adding treatment rooms on the basis of the current internationally used 3-5 treatment rooms will lead to a significant increase in the cost of treatment equipment, which is not conducive to large-scale promotion and application. The present invention can achieve multi-angle beam distribution in multiple treatment rooms through a multi-channel, small-inertia rotating beam. 16 multi-angle treatment rooms can be achieved without adding beams, greatly improving treatment efficiency.

[0029] 3. During a single treatment, tumor patients often require multi-angle irradiation to reduce the damage to normal cells along the beam path. The present invention can achieve multi-angle irradiation treatment in one treatment room through a multi-channel, small-inertia rotating beam line. It can simultaneously achieve three irradiation angles of 45 degrees, horizontal and vertical, as well as two-angle irradiation of 45 degrees and horizontal in one treatment room. In this way, tumor patients can complete the required multi-angle irradiation in one treatment room, greatly reducing the waiting time and turnover time for repositioning caused by changing treatment rooms. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 A top view of a treatment terminal based on a multi-channel, small-inertia rotating beam provided by an embodiment of the present invention;

[0031] Figure 2 for Figure 1 AA section view, Figure 2 This is a schematic diagram before the first rack is raised;

[0032] Figure 3 for Figure 2 A schematic diagram of the first rack after it is raised;

[0033] Figure 4 A partial sectional view of the treatment terminal provided by the embodiment of the present invention;

[0034] Figure 5 for Figure 2 BB section view.

[0035] The marks in the figure are as follows:

[0036] 1-45 degree beam; 2-horizontal beam; 3-45 degree deflection dipole magnet; 4-bellows; 5-first frame; 6-first transmission mechanism; 7-lifting mechanism; 8-second frame; 9-second transmission mechanism; 10-first horizontal treatment head; 11-first 45 degree treatment head; 12-vertical treatment head; 13-second horizontal treatment head; 14-second 45 degree treatment head; 15-treatment bed; 16-rotation axis; 17-24 are the first to eighth three-angle treatment rooms on the first floor; 25-32 are the first to eighth two-angle treatment rooms on the second floor. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention is described clearly and completely below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary persons in the art without creative work are within the scope of protection of the present invention.

[0038] Unless otherwise defined, the technical or scientific terms used in the present invention shall have the usual meanings understood by persons with ordinary skills in the field to which the present invention belongs. The words "first", "second", "third", "fourth" and similar terms used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Words such as "include" or "comprise" and the like mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Words such as "connect" or "connected" and the like are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect.

[0039] For ease of description, spatially relative terms may be used herein to describe the relationship of one element or feature relative to another element or feature as shown in the figures, such as "inside", "outside", "inner side", "outer side", "below", "above", etc. Such spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation depicted in the figures.

[0040] Current proton cancer therapy devices usually have a rotating gantry for irradiating patients at multiple angles. To realize the beam delivery system, many functions need to be implemented, resulting in a large weight of the rotating gantry equipment, reaching hundreds of tons, and the entire rotating gantry is very expensive.

[0041] In order to provide multiple treatment rooms and multi-angle irradiation in existing heavy ion treatment devices, there are problems such as long terminal beam lines, large floor space, high investment, long construction period, and great installation difficulty. The present invention provides a treatment terminal based on a dual-channel, small-inertia rotating beam line. The terminal adopts a liftable dual-beam rotating system combined with a rotating dipole magnet, which can provide a variety of treatment angles and provide a multi-layer, multi-treatment room, and multi-angle layout. Compared with multiple combined rotating beam lines, the beam line length is simplified and greatly shortened. Compared with conventional terminal beam line solutions, the beam line length can be shortened from 112 meters to 20 meters. It can provide single-angle irradiation, dual-angle irradiation and three-angle irradiation, and a multi-layer, multi-treatment room, multi-angle terminal irradiation system can further reduce equipment investment and improve treatment efficiency. It is not only suitable for heavy ion therapy, but also for proton therapy.

[0042] The treatment terminal based on multi-channel and small inertia rotating beam provided by the present invention provides a terminal irradiation system with multiple angles, multiple operation rooms and single room with multiple angles for any type of accelerator to draw out the beam in any way and then deflect it to the vertical (upward or downward) direction. The accelerator can be a synchrotron, a cyclotron, a FFAG (Fixed-Field Alternating Gradient Accelerator), a linear accelerator or other types of accelerators. The beam in the particle accelerator can be drawn out horizontally from the inside or outside. The beam in the particle accelerator can also be drawn out vertically from the outside or inside through a Lambertson (iron cutting magnet) cutting magnet.

[0043] The present invention is explained in detail below with reference to the accompanying drawings.

[0044] like Figure 1 , 2 As shown, the treatment terminal based on multi-channel, small inertia rotating beam involved in the present invention includes a fixed beam (not shown in the figure) and a rotating beam, and the fixed beam is connected to the rotating beam through a bellows 4, that is, the two ends of the bellows 4 are respectively connected to the vacuum flanges of the fixed beam and the rotating beam; the rotating beam includes a 45-degree beam 1 (it can also be an acute-angle beam of other angles) and a horizontal beam 2, the rotating beam is fixed on the first frame 5, and a first transmission mechanism 6 is installed below the first frame 5. The first frame 5 rotates 360 degrees along the circular track under the drive of the first transmission mechanism 6, thereby making the rotating beam a beam that can rotate 360 ​​degrees, and a lifting mechanism 7 is installed below the first transmission mechanism 6. The first frame 5 can reciprocate up and down under the drive of the lifting mechanism 7.

[0045] Furthermore, the treatment terminal of the present invention further includes a 45-degree deflection dipole magnet 3 (of course, other angles of deflection dipole magnets are also feasible), which is fixed on the second frame 8. A second transmission mechanism 9 is installed below the second frame 8. The second frame 8 is driven by the second transmission mechanism 9 to rotate 360 ​​degrees along the circular track with the axis 16 of the first frame 5 as the center, thereby making the 45-degree deflection dipole magnet 3 a dipole magnet that can rotate 360 ​​degrees. The first frame 5 and the second frame 8 can rotate synchronously or independently under the action of the control mechanism.

[0046] Furthermore, the treatment terminal of the present invention also includes: a first treatment room, which is in a plurality of numbers and is evenly arranged along the circumferential direction of the rotating beam line to form a first layer of treatment rooms, and a mounting hole is provided on the wall of each first treatment room; a second treatment room, which is in a plurality of numbers and is evenly arranged along the circumferential direction of the rotation of the deflection unit to form a second layer of treatment rooms, and a mounting hole is provided on the wall of each second treatment room; a treatment head, which is in a plurality of numbers and is respectively arranged in one-to-one correspondence with the first treatment room and the second treatment room, and the treatment head passes through the mounting hole to receive the ion beam transmitted by the rotating beam line and irradiate the patient or sample.

[0047] Furthermore, if Figure 2 As shown, the rotating beam line and the treatment head are non-contactly connected through a vacuum film window, and the two ends of the 45-degree deflection dipole magnet 3 (deflection unit) are non-contactly connected to the treatment head and the 45-degree beam line 1 through the vacuum film window.

[0048] Specifically, Figure 2-5 As shown, the first-layer treatment terminal is provided with eight treatment rooms, namely, the first to eighth three-angle treatment rooms 17-24 on the first layer, and each treatment room is provided with treatment heads at three angles, namely, the first horizontal treatment head 10, the first 45-degree treatment head 11 and the vertical treatment head 12; the second-layer treatment terminal is also provided with eight treatment rooms, namely, the first to eighth two-angle treatment rooms 25-32 on the second layer, and each treatment room is provided with treatment heads at two angles, namely, the second horizontal treatment head 13 and the second 45-degree treatment head 14. Of course, the number of treatment rooms on each layer can be adjusted according to actual needs, and the number of treatment heads in each treatment room can also be set according to actual needs, and is not limited to the above-mentioned three or two-angle treatment heads. The present invention does not limit the angle of the beam, the number of treatment heads, and the number of treatment rooms.

[0049] The working principle of the treatment terminal provided by the present invention is as follows:

[0050] like Figure 2 As shown, before the first gantry 5 is raised, the rotating beam is matched with the treatment head in the first treatment room, that is, the horizontal beam 2 is matched with the first horizontal treatment head 10 in the first treatment room to form a horizontal treatment terminal, and the 45-degree beam 1 is matched with the first 45-degree treatment head 11 in the first treatment room to form a 45-degree treatment terminal.

[0051] like Figure 3As shown, after the first rack 5 is raised under the drive of the lifting mechanism 7, the rotating beam line is matched with the treatment head in the second-layer treatment room, that is, the horizontal beam line 2 is matched with the second horizontal treatment head 13 in the second-layer treatment room to form a horizontal treatment terminal, and the 45-degree beam line 1 is matched with the second 45-degree treatment head 14 in the second-layer treatment room to form a 45-degree treatment terminal. At the same time, the 45-degree beam line 1 also forms a matching channel with the 45-degree deflection dipole magnet 3 in the second-layer treatment room, and then forms a vertical treatment terminal with the vertical treatment head 12 in the first-layer treatment room. In this way, a cross treatment terminal of two-layer treatment rooms or even multiple-layer treatment rooms can be formed.

[0052] During use, after the first frame 5 is raised by the lifting mechanism 7, the 45-degree deflection dipole magnet 3 is powered on, and the 45-degree beam line 1 forms a matching channel with the 45-degree deflection dipole magnet 3, and then forms a vertical treatment terminal with the vertical treatment head 12 in the first-layer treatment room. At the same time, the horizontal beam line 2 is matched with the second horizontal treatment head 13 in the second-layer treatment room to form a horizontal treatment terminal.

[0053] On the other hand, during use, after the first frame 5 is raised by the lifting mechanism 7, the 45-degree deflection dipole magnet 3 is in a non-powered state, and the 45-degree beam line 1 is adapted to the second 45-degree treatment head 14 in the second-level treatment room to form a 45-degree treatment terminal. At the same time, the horizontal beam line 2 is adapted to the second horizontal treatment head 13 in the second-level treatment room to form a horizontal treatment terminal.

[0054] like Figure 4 As shown, it is a partial axial cross-sectional view of the treatment terminal of the present invention. It can be seen from the figure that through the lifting and lowering of the double beam line and the combination with the rotating dipole magnet (45-degree deflection dipole magnet 3), the upper and lower layers can both contain 8 treatment rooms (the first layer, the first to the eighth three-angle treatment rooms 17-24, the second layer, the first to the eighth two-angle treatment rooms 25-32) and the target is located at the same point. The radiotherapy program, the treatment bed 15 is located in the treatment room. Specifically, the upper layer can realize the irradiation of the first to the eighth two-angle treatment rooms 25-32 of the second layer, the double angle (45 degrees and horizontal irradiation angle) and the target is also located at the same point; the lower layer can realize the irradiation of the first to the eighth three-angle treatment rooms 17-24 of the first layer, the three angles (horizontal, 45 degrees and vertical angles) and the target is also located at the same point. Compared with the traditional single treatment room single angle, the tumor patient or sample does not need to be relocated, that is, the required multiple irradiation angles can be completed at one time in one treatment room, further improving the treatment efficiency. Of course, the irradiation angle of the present invention is not limited to the two angles or three angles mentioned above, and the required angle and number can be adjusted according to actual needs.

[0055] On the other hand, the length of the rotating beam of the present invention is greatly reduced to only 20 meters. This is because the first-floor treatment rooms and the second-floor treatment rooms only need to move a horizontal beam line up and down to achieve horizontal beam irradiation of the two-floor treatment rooms. Moreover, the vertical beam line and the inclined beam line (acute-angle beam line) in the first-floor treatment room and the inclined beam line (acute-angle beam line) in the second-floor treatment room can achieve beam irradiation in the vertical direction and in the direction at an acute angle to the ground of the two-floor treatment rooms by moving a beam line up and down, which greatly reduces the length of the rotating beam line.

[0056] The first transmission mechanism 6, the second transmission mechanism 9 and the lifting mechanism 7 in the present invention are conventional devices, and the present invention will not elaborate on them in detail.

[0057] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A treatment terminal based on a multi-channel, small inertia rotating beam, characterized in that: include: A fixed harness and a rotating harness are connected by a telescopic component, the rotating harness is fixed on the first frame, the rotating harness includes a horizontal harness and an inclined harness at an acute angle to the ground, the first frame is connected to the first transmission mechanism, a lifting mechanism is installed below the first transmission mechanism, and the first transmission mechanism is used to drive the first frame to rotate 0-360 degrees along the circular track; A deflection unit is fixed on a second frame, the second frame is connected to a second transmission mechanism, the second transmission mechanism is used to drive the second frame to rotate 0-360 degrees along a circular track with the rotation axis of the first frame as the axis, and the deflection unit contacts the inclined beam line in time to form a vertical beam line; A control mechanism, used for controlling the first transmission mechanism and the second transmission mechanism to rotate synchronously or independently; A plurality of first treatment rooms, wherein the plurality of first treatment rooms are evenly arranged along the circumferential direction of the rotating beam line to form a first layer of treatment rooms, and a mounting hole is opened on the wall of each of the first treatment rooms; A plurality of second treatment rooms, wherein the plurality of second treatment rooms are evenly arranged along the circumferential direction of the deflection unit to form a second layer of treatment rooms, and a mounting hole is provided on the wall of each second treatment room; A plurality of treatment heads, each of which is respectively arranged in one-to-one correspondence with the first treatment room and the second treatment room, and each of which passes through the mounting hole to receive the ion beam transmitted by the rotating beam line and irradiate the patient or the sample; The treatment heads include horizontal treatment heads, vertical treatment heads and tilted treatment heads. The tilted beam is driven by the lifting mechanism to rise upward to a channel that is compatible with the deflection unit and the tilted treatment heads in the second-layer treatment room, thereby forming a vertical treatment terminal that is compatible with the vertical treatment head in the first-layer treatment room or a tilted treatment terminal that is compatible with the tilted treatment head in the second-layer treatment room. At the same time, the horizontal beam is driven by the lifting mechanism to rise to a channel that is compatible with the horizontal treatment head in the second-layer treatment room to form a horizontal treatment terminal.

2. The treatment terminal according to claim 1, characterized in that: When the deflection unit is powered on, the inclined beam line is matched with the vertical treatment head in the first treatment room to form a vertical treatment terminal, and the horizontal beam line is matched with the horizontal treatment head in the second treatment room to form a horizontal treatment terminal.

3. The treatment terminal according to claim 1, characterized in that: When the deflection unit is in a non-powered state, the inclined beam line is matched with the inclined treatment head in the second-layer treatment room to form an inclined treatment terminal, and at the same time, the horizontal beam line is matched with the horizontal treatment head in the second-layer treatment room to form a horizontal treatment terminal.

4. The treatment terminal according to claim 1, characterized in that: The number of the treatment heads in each of the first treatment rooms is at least three, and the number of the treatment heads in each of the second treatment rooms is at least two.

5. The treatment terminal according to claim 1, characterized in that: The telescopic component is a metal bellows or other vacuum sealing element capable of telescopic movement.

6. The treatment terminal according to claim 1, characterized in that: The deflection unit is a deflection dipole magnet.

7. The treatment terminal according to claim 6, characterized in that: The deflection dipole magnet is a 45-degree deflection dipole magnet or a dipole magnet with any other deflection angle.

8. The treatment terminal according to claim 1, characterized in that: The rotating beam is connected to the treatment head without contact through a vacuum film window.

9. The treatment terminal according to claim 1, characterized in that: The two ends of the deflection unit are respectively connected to the treatment head and the inclined beam line in a contactless manner through vacuum film windows.

Images