Inner tube assembly and reaction furnace

Abstract

The application provides an inner furnace tube assembly and a reaction furnace, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem that the inner furnace tube is difficult to form in a process. The inner furnace tube assembly is applied to the reaction furnace, and the reaction furnace comprises an outer furnace tube and the inner furnace tube assembly. The inner furnace tube assembly comprises: a first mounting frame having a hollow area; a second mounting frame arranged in parallel with the first mounting frame; and a plurality of connecting rods, both ends of each connecting rod being connected with the first mounting frame and the second mounting frame respectively. The plurality of connecting rods are sequentially arranged around the hollow area to form a cavity, and the hollow area is configured as an opening of the cavity. Through this structure, when the inner furnace tube assembly is manufactured, only the first mounting frame, the connecting rods and the second mounting frame which are simple to manufacture in a process are needed to be produced to assemble the inner furnace tube assembly, so that the manufacturing difficulty of the inner furnace tube assembly is reduced.

Description

Technical Field

[0001] This invention relates to the field of semiconductor or photovoltaic material processing, and specifically to an inner furnace tube assembly and a reaction furnace. Background Technology

[0002] With the development of semiconductor or photovoltaic material processing technology, some chemical vapor deposition (CVD) equipment adopts a double-layer furnace tube structure, in which the outer furnace tube is fitted outside the inner furnace tube, and the inner furnace tube serves as the process chamber. However, the one-piece molded inner furnace tube is difficult to form in terms of process, thus limiting its widespread use. Summary of the Invention

[0003] To address the aforementioned technical problems, this application is proposed. Embodiments of this application provide an inner furnace tube assembly and a reactor.

[0004] In a first aspect, one embodiment of this application provides an inner furnace tube assembly applied to a reactor. The reactor includes an outer furnace tube and an inner furnace tube assembly. The inner furnace tube assembly includes: a first mounting frame having a hollowed-out area; a second mounting frame arranged parallel to the first mounting frame; and a plurality of connecting rods, each connecting rod having its two ends connected to the first mounting frame and the second mounting frame respectively. The plurality of connecting rods are arranged sequentially around the hollowed-out area to form a cavity, and the hollowed-out area is configured as an opening of the cavity.

[0005] In some embodiments, the first mounting bracket includes a first groove, and the second mounting bracket includes a second groove; a first end of the connecting rod is inserted into the first groove, and a second end of the connecting rod is inserted into the second groove.

[0006] In some embodiments, the first groove is a first annular groove, and the second groove is a second annular groove, with the first annular groove and the second annular groove being coaxially arranged; wherein, the first ends of the plurality of connecting rods are all inserted into the first annular groove, the second ends of the plurality of connecting rods are all inserted into the second annular groove, and the plurality of connecting rods are arranged in a ring along the first annular groove, wherein the sides of adjacent connecting rods are in contact with each other.

[0007] In some embodiments, the cavity has a process chamber; wherein, the inner furnace tube assembly further includes: a mounting plate and a side plate, wherein the mounting plate is located on the side of the second mounting frame away from the first mounting frame, the side plate connects the second mounting frame and the mounting plate, and the second mounting frame, the mounting plate and the side plate together form a flow equalization cavity; wherein, the second mounting frame is provided with a plurality of air inlets and at least one first vent hole, the air inlets are configured to deliver process gas to the flow equalization cavity, and the first vent hole connects the flow equalization cavity and the process chamber to deliver the gas in the flow equalization cavity to the process chamber.

[0008] In some embodiments, the connecting rod includes a hollow rod, and the hollow rod communicates with an air inlet to deliver process gas to the flow equalization chamber using the hollow rod.

[0009] In some embodiments, the cavity has a process chamber; wherein the inner furnace tube assembly further includes: a mounting plate and a side plate, wherein the mounting plate is located on the side of the second mounting frame away from the first mounting frame, and the side plate connects the second mounting frame and the mounting plate to form a flow equalization cavity; wherein the second mounting frame further includes a plurality of air inlets configured to deliver process gas to the flow equalization cavity; wherein the connecting rod includes a hollow rod that passes through the second mounting frame and communicates with the flow equalization cavity, wherein the side wall of the hollow rod has a second vent hole that connects the cavity of the hollow rod and the process chamber to deliver gas from the flow equalization cavity to the process chamber.

[0010] In some embodiments, at least one first support post is further included, which is disposed within the flow uniform cavity and is used to connect the second mounting bracket and the mounting plate.

[0011] In some embodiments, the first pillar is connected to the central region of the second mounting bracket, and / or the first pillar is connected to the central region of the mounting plate.

[0012] In some embodiments, the outer furnace tube has a receiving cavity configured to receive an inner furnace tube assembly, the cavity having a process chamber; the first mounting bracket has a third vent hole communicating between the receiving cavity and the process chamber.

[0013] In some embodiments, the outer furnace tube has a receiving cavity configured to receive an inner furnace tube assembly, the cavity containing a process chamber; the connecting rod has a fourth vent hole communicating between the receiving cavity and the process chamber.

[0014] In a second aspect, one embodiment of this application provides a reactor, comprising: an inner furnace tube assembly as described in any of the first aspects above; and an outer furnace tube having a receiving cavity configured to receive the inner furnace tube assembly.

[0015] The inner furnace tube assembly and reactor proposed in this application embodiment are applied to a reactor, which includes an outer furnace tube and an inner furnace tube assembly. The inner furnace tube assembly includes: a first mounting frame with a hollowed-out area; a second mounting frame arranged parallel to the first mounting frame; and multiple connecting rods, each connecting rod connecting to both ends of the first and second mounting frames respectively. The multiple connecting rods are arranged sequentially around the hollowed-out area to form a cavity, and the hollowed-out area is configured as the opening of the cavity. With this structure, when manufacturing the inner furnace tube assembly, only the simple first mounting frame, connecting rods, and second mounting frame need to be manufactured in the production process to assemble the inner furnace tube assembly, reducing the manufacturing difficulty of the inner furnace tube assembly. Attached Figure Description

[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The image shown is a cross-sectional view of an inner furnace tube assembly provided in an exemplary embodiment of this application.

[0018] Figure 2 The diagram shown is a schematic cross-section of a connecting rod provided in an exemplary embodiment of this application.

[0019] Figure 3 The image shown is a cross-sectional view of an inner furnace tube assembly provided in an exemplary embodiment of this application.

[0020] Figure 4 The image shown is a cross-sectional view of an inner furnace tube assembly provided in an exemplary embodiment of this application.

[0021] Figure 5 The image shown is a cross-sectional view of a reactor provided in an exemplary embodiment of this application.

[0022] Figure 6 The above is a cross-sectional view of a reactor provided as another exemplary embodiment of this application.

[0023] Figure 7 The image shown is a cross-sectional view of a reactor provided in another exemplary embodiment of this application.

[0024] Figure 8 The image shown is a partially enlarged view of a reactor provided in an exemplary embodiment of this application.

[0025] Figure 9 The image shown is a cross-sectional view of a reactor provided in another exemplary embodiment of this application.

[0026] Figure label:

[0027] 100. Inner furnace tube assembly; 110. First mounting bracket; 111. First groove; 112. Third vent; 120. Second mounting bracket; 121. Second groove; 122. Air inlet; 123. First vent; 130. Connecting rod; 131. Hollow rod; 1311. Second vent; 132. Fourth vent; 133. Solid rod; 140. Mounting plate; 150. Side plate; 160. Air inlet pipe; 170. First support column; 180. Thermocouple; 200. Reactor; 210. Outer furnace tube; 220. Positioning plate; 230. Flange; 231. Exhaust port; 240. Main furnace body; 250. Tail end cover. Detailed Implementation

[0028] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0029] Application Overview

[0030] Semiconductor and photovoltaic materials are widely used in industries such as electronics and new energy. Semiconductor and photovoltaic materials typically require chemical processing before they can be applied to products; Chemical Vapor Deposition (CVD) is one such processing method. CVD utilizes gaseous or vaporous substances to undergo chemical reactions on the surface of a silicon wafer, generating a solid deposit. Low-Pressure Chemical Vapor Deposition (LPCVD) equipment is a commonly used processing method.

[0031] With the development of semiconductor or photovoltaic material processing technology, some LPCVD equipment has begun to adopt a double-layer furnace tube structure, in which the outer furnace tube is fitted outside the inner furnace tube, and the inner furnace tube serves as the process chamber. However, due to the high difficulty in manufacturing a one-piece inner furnace tube, it cannot be widely used.

[0032] In view of this, this application proposes an inner furnace tube assembly and a reactor. The inner furnace tube assembly is applied to a reactor, which includes an outer furnace tube and an inner furnace tube assembly. The inner furnace tube assembly includes: a first mounting frame with a hollowed-out area; a second mounting frame arranged parallel to the first mounting frame; and multiple connecting rods, each connecting rod connecting to the first mounting frame and the second mounting frame at both ends respectively. The multiple connecting rods are arranged sequentially around the hollowed-out area to form a cavity, and the hollowed-out area is configured as the opening of the cavity. With this structure, in manufacturing the inner furnace tube assembly, only the simple first mounting frame, connecting rods, and second mounting frame need to be manufactured, thus reducing the manufacturing difficulty of the inner furnace tube assembly.

[0033] Exemplary device

[0034] Figure 1 The image shown is a cross-sectional view of an inner furnace tube assembly provided in an exemplary embodiment of this application. Figure 1As shown, the inner furnace tube assembly 100 is applied to a reactor. The reactor includes an outer furnace tube and the inner furnace tube assembly 100. The inner furnace tube assembly 100 includes: a first mounting bracket 110 with a hollow area; a second mounting bracket 120 arranged parallel to the first mounting bracket 110; and a plurality of connecting rods 130, the two ends of each connecting rod 130 being connected to the first mounting bracket 110 and the second mounting bracket 120 respectively. The plurality of connecting rods 130 are arranged sequentially around the hollow area to form a cavity, and the hollow area is configured as the opening of the cavity.

[0035] The furnace opening is used for feeding and discharging the boat structure, and the furnace opening can be sealed through the furnace door.

[0036] With this structure, firstly, when manufacturing the inner furnace tube assembly 100, only the first mounting bracket 110, the second mounting bracket 120, and multiple connecting rods 130, which have simple manufacturing processes, are needed to assemble the inner furnace tube assembly 100. Secondly, in related technologies, the processing and molding of one-piece inner furnace tubes is difficult and costly. If the inner furnace tube is damaged due to deformation or defects, the entire inner furnace tube needs to be replaced. However, if the connecting rod 130 of the inner furnace tube assembly 100 is damaged, the connecting rod 130 can be replaced directly, saving costs. Thirdly, the connecting rod 130 can be recycled after use. After simple cleaning and polishing, it can be reused after passing inspection, significantly reducing material costs. Fourthly, the small size of the connecting rod 130 facilitates transportation. In practical applications, connecting rods 130 with different cross-sectional shapes, diameters, and wall thicknesses (for hollow rods 131 described below) can be selected as the assembly raw materials for the inner furnace tube assembly 100. For inner furnace tube assemblies 100 of different specifications, only the first mounting bracket 110 and the second mounting bracket 120 of different specifications need to be produced. The connecting rod 130 can be mass-produced according to fixed specifications, which greatly reduces the manufacturing cost of the inner furnace tube assembly 100.

[0037] Figure 2 The diagram shown is a schematic cross-section of a connecting rod provided in an exemplary embodiment of this application.

[0038] In some embodiments, such as Figure 2 As shown, the connecting rod 130 includes a solid rod 133 and / or a hollow rod 131.

[0039] In some embodiments, such as Figure 2 As shown, the cross-section of the connecting rod 130 can be circular, polygonal (such as triangle, trapezoid, rectangle, etc.), elliptical, etc.

[0040] In some embodiments, such as Figure 3 As shown. The cross-section of the inner furnace tube assembly 100 can be polygonal (such as square), circular, or elliptical, etc.

[0041] Figure 3The image shown is a cross-sectional view of an inner furnace tube assembly provided in an exemplary embodiment of this application. Figure 4 The image shown is a cross-sectional view of an inner furnace tube assembly provided in an exemplary embodiment of this application.

[0042] In some embodiments, such as Figure 3 and Figure 4 As shown, the first mounting bracket 110 includes a first groove 111, and the second mounting bracket 120 includes a second groove 121. The first end of the connecting rod 130 is inserted into the first groove 111, and the second end of the connecting rod 130 is inserted into the second groove 121. By setting the first groove 111 and the second groove 121, the connecting rod 130 can be stably fixed, and when assembling the inner furnace tube assembly 100, it is very convenient to simply insert the connecting rod 130 into the first groove 111 and the second groove 121 to assemble the inner furnace tube assembly 100.

[0043] In some embodiments, the number of first grooves 111 is the same as the number of connecting rods 130, and the number of second grooves 121 is the same as the number of connecting rods 130. That is, each connecting rod 130 corresponds to a first groove 111 and a second groove 121 coaxially arranged with the first groove 111, and each connecting rod 130 is inserted into a different first groove 111 and a different second groove 121.

[0044] In some embodiments, such as Figure 3 and Figure 4 As shown, the first groove 111 is a first annular groove, and the second groove 121 is a second annular groove. The first annular groove and the second annular groove are coaxially arranged. The first ends of the plurality of connecting rods 130 are all inserted into the first annular groove, and the second ends of the plurality of connecting rods 130 are all inserted into the second annular groove. The plurality of connecting rods 130 are arranged in a ring along the first annular groove, and the sides of adjacent connecting rods 130 are in contact.

[0045] For example, such as Figure 3 As shown, the first groove 111 is an annular groove provided along the edge of the first mounting bracket 110, such as... Figure 4 As shown, the second groove 121 is an annular groove provided along the edge of the second mounting bracket 120.

[0046] By setting the first annular groove and the second annular groove, multiple connecting rods 130 can be inserted into the same groove at the same end, thereby allowing the connecting rods 130 to be tightly connected and reducing the leakage of process gas into the space between the outer furnace tube and the inner furnace tube assembly 100 in the outer furnace tube receiving cavity.

[0047] In some embodiments, the first groove 111 has a square cross-section with a hollowed-out area, and the second groove 121 has a square cross-section with a hollowed-out area. The first groove 111 and the second groove 121 are coaxially arranged. The first ends of a plurality of connecting rods 130 are inserted into the first groove 111, and the second ends of a plurality of connecting rods 130 are inserted into the second groove 121. The plurality of connecting rods 130 are arranged sequentially in a square shape along the first groove 111, with the sides of adjacent connecting rods 130 contacting each other. With this structure, the first mounting bracket 110, the second mounting bracket 120, and the connecting rods 130 can be assembled into an inner furnace tube assembly 100 with a square cross-section.

[0048] In some embodiments, the first groove 111 and / or the second groove 121 may be through grooves, that is, after the connecting rod 130 is inserted into the first groove 111 and / or the second groove 121, it may pass through the first groove 111 and / or the second groove 121.

[0049] In some embodiments, such as Figure 1 and Figure 4 As shown, the cavity contains a process chamber; the inner furnace tube assembly 100 further includes a mounting plate 140 and a side plate 150, wherein the mounting plate 140 is located on the side of the second mounting frame 120 away from the first mounting frame 110, and the side plate 150 connects the second mounting frame 120 and the mounting plate 140, and the second mounting frame 120, the mounting plate 140 and the side plate 150 together form a uniform flow cavity; wherein the second mounting frame 120 is provided with a plurality of air inlets 122 and at least one first vent hole 123, the air inlets 122 are configured to deliver process gas to the uniform flow cavity, and the first vent hole 123 connects the uniform flow cavity and the process chamber to deliver the gas in the uniform flow cavity to the process chamber.

[0050] For example, such as Figure 4 As shown, the second mounting bracket 120 includes multiple through holes, among which an air inlet 122 and a first vent 123 are included.

[0051] In some embodiments, the air inlet 122 may be arranged in the same manner as the first vent 123, and / or the air inlet 122 may be arranged in the same pattern as the second groove 121. For example, as shown... Figure 4 As shown, the air inlet 122 and the first vent 123 are arranged in multiple rings around each other, and the air inlet 122 and the second groove 121 are together located in the edge area of ​​the second mounting bracket 120.

[0052] In some embodiments, a plurality of first vent holes 123 may be evenly distributed on the second mounting bracket 120. For example, the plurality of first vent holes 123 may be arranged as follows: Figure 4The multiple first vent holes 123 are arranged in a grid pattern on the second mounting bracket 120, as shown.

[0053] Figure 5 The image shown is a cross-sectional view of a reactor provided in an exemplary embodiment of this application.

[0054] In some embodiments, such as Figure 5 As shown, the inner furnace tube assembly 100 also includes an air inlet pipe 160, the first end of which is connected to the air inlet hole 122, and the second end of which is connected to an external air supply device.

[0055] Figure 6 The above is a cross-sectional view of a reactor provided as an exemplary embodiment of this application.

[0056] In other embodiments, such as Figure 6 As shown, the connecting rod 130 includes a hollow rod 131, and the hollow rod 131 is connected to the air inlet 122 to deliver process gas to the uniform flow chamber using the hollow rod 131. The connecting rod 130 may be entirely hollow rods 131, or it may include both hollow rods 131 and solid rods 133.

[0057] In this way, the inner furnace tube assembly 100 does not need to be equipped with an air inlet pipe 160. It can be connected to the external gas supply device through the hollow rod 131 in the connecting rod 130 as an air inlet pipe and deliver process gas to the uniform flow chamber. Therefore, when manufacturing the inner furnace tube 100, it is not necessary to manufacture the air inlet pipe 160 separately, which simplifies the manufacturing process of the inner furnace tube assembly 100. In addition, the hollow rod 131 simultaneously undertakes the functions of inputting process gas and forming the process chamber of the inner furnace tube assembly 100, without occupying additional space to set up the air inlet pipe 160, thus saving the space occupied in the inner furnace tube assembly 100.

[0058] Figure 7 The image shown is a cross-sectional view of a reactor provided in an exemplary embodiment of this application.

[0059] In other embodiments, such as Figure 1 and Figure 7As shown, the cavity contains a process chamber; the inner furnace tube assembly 100 further includes a mounting plate 140 and a side plate 150, wherein the mounting plate 140 is located on the side of the second mounting frame 120 away from the first mounting frame 110, and the side plate 150 connects the second mounting frame 120 and the mounting plate 140 to form a flow equalization cavity; wherein the second mounting frame 120 further includes a plurality of air inlets 122, which are configured to deliver process gas to the flow equalization cavity; wherein the connecting rod 130 includes a hollow rod 131, which passes through the second mounting frame 120 and communicates with the flow equalization cavity, wherein the side wall of the hollow rod 131 has a second vent hole 1311, which connects the cavity of the hollow rod 131 and the process chamber to deliver the gas in the flow equalization cavity to the process chamber.

[0060] In this way, the air inlet 122 can be connected to the air supply structure to introduce process gas into the flow uniform cavity. After the process gas is mixed in the flow uniform cavity, it will enter the hollow rod 131 and enter the process chamber through the second vent 1311 on the hollow rod 131.

[0061] In some embodiments, the air supply structure may include an air inlet pipe 160, wherein the first end of the air inlet pipe 160 is connected to the air inlet 122, and the second end of the air inlet pipe 160 is connected to an external air supply device.

[0062] In some embodiments, the air supply structure may further include a hollow rod 131 without a second vent hole 1311, that is, the first end of the hollow rod 131 without a second vent hole 1311 is connected to the air inlet 122, and the second end is connected to an external air supply device.

[0063] In other embodiments, the connecting rod 130 includes a hollow rod 131, the sidewall of which has at least one second vent hole 1311. The second vent hole 1311 connects the cavity of the hollow rod 131 to the process chamber, allowing gas in the cavity of the hollow rod 1311 to enter the process chamber.

[0064] Specifically, one end of the hollow rod 131 is embedded in the second groove 121, and the other end is connected to an external gas supply device. For example, the other end of the hollow rod 131 is embedded in the first groove 111 and connected to the external gas supply device. In this way, the external gas supply device can introduce process gas into the hollow rod 131, and then the process gas can flow into the process chamber from the second vent hole 1311. The connecting rod 130 can be entirely hollow rod 131, or the connecting rod 130 can include hollow rod 131 and solid rod 133.

[0065] In this way, multiple process gases can be mixed evenly in the cavity of the hollow rod 131 and flow into the process chamber, thereby improving the process effect.

[0066] In some embodiments, such as Figure 1As shown, the inner furnace tube assembly 100 also includes at least one first support post 170, which is disposed within the flow equalization cavity and is used to connect the second mounting bracket 120 and the mounting plate 140. Here, the first support post 170 is used to maintain the relative distance between the second mounting bracket 120 and the mounting plate 140, thereby preventing the mounting plate 140 from being dented.

[0067] In some embodiments, the first pillar 170 is connected to the central region of the second mounting bracket 120, and / or the first pillar is connected to the central region of the mounting plate 140. Here, placing the first pillar 170 in the central region of the second mounting bracket 120 and / or the mounting plate 140 can improve the support effect on the second mounting bracket 120 and the mounting plate 140, thereby preventing the mounting plate 140 from denting.

[0068] In some embodiments, such as Figure 1 As shown, the outer furnace tube has a receiving cavity, which is configured to receive the inner furnace tube assembly 100, and the cavity has a process chamber; the first mounting bracket 110 has a third vent 112, which connects the receiving cavity and the process chamber.

[0069] Specifically, during the reaction process, a thin film of deposit (such as a silicon carbide film, commonly known as a poly film) adheres to the inner wall of the process chamber. As the number of processes increases, the deposited film becomes thicker. If the inner furnace tube deforms, the deposited film will detach from the inner wall of the process chamber, thereby damaging the product to be processed or clogging the reactor. In this embodiment, by setting a double-layer furnace tube structure (i.e., the inner furnace tube assembly 100 and the outer furnace tube), and connecting the inner furnace tube assembly 100 and the outer furnace tube through a third vent hole 112, the gas pressure of the process chamber and the containment chamber can be kept consistent. For example, when the inner furnace tube assembly 100 is evacuated to a vacuum state, since the process chamber and the containment chamber are connected, the containment chamber is also evacuated to a vacuum state at the same time. The inner and outer parts of the inner furnace tube assembly 100 are both in a vacuum state, so the gas pressure inside and outside the inner furnace tube assembly 100 is the same and no deformation will occur. The outer furnace tube is in a vacuum state, and the outside of the outer furnace tube is under external gas pressure. In this way, the pressure generated by the gas pressure difference is borne by the outer furnace tube, and the inner furnace tube will not deform due to the gas pressure difference, which reduces the probability of the deposit film falling off, thereby avoiding the film falling off and damaging the product to be processed or clogging the reactor.

[0070] Furthermore, since the process gas enters the process chamber from the first vent 123 of the second mounting bracket 120 or the second vent 1311 of the hollow rod 131, the gas near the first mounting bracket 110 is more likely to be waste gas that has already reacted. By setting the third vent 112 on the first mounting bracket 110, the amount of unreacted gas introduced into the receiving chamber can be reduced, while more waste gas that has already reacted can be introduced into the receiving chamber, thereby improving the utilization rate of the process gas.

[0071] In some embodiments, the connecting rod 130 can be made of any one of silicon carbide, metal, ceramic, or quartz. Quartz and metal have high structural strength and minimal deformation at high temperatures, thereby reducing the probability of deposit film detachment. Silicon carbide, being the same material as the deposit film, also reduces the probability of deposit film detachment.

[0072] Figure 8 The image shown is a partially enlarged view of a reactor provided in an exemplary embodiment of this application.

[0073] In some embodiments, such as Figure 8 As shown, the outer furnace tube has a receiving cavity, which is configured to receive the inner furnace tube assembly 100, and the cavity has a process chamber; the connecting rod 130 has a fourth vent hole 132, which connects the receiving cavity and the process chamber.

[0074] In one specific example, the fourth vent 132 is located at one end of the connecting rod 130 near the second mounting bracket 120.

[0075] In some embodiments, the connecting rod 130 is a hollow rod 131, and the fourth vent 132 includes a first sub-vent and a second sub-vent. The first sub-vent connects the cavity of the connecting rod to the process chamber, and the second sub-vent connects the cavity of the connecting rod to the receiving cavity. Specifically, when the connecting rod 130 is a hollow rod 131, holes need to be drilled on the two side walls facing the process chamber and the receiving cavity respectively to connect the process chamber and the receiving cavity.

[0076] In some embodiments, such as Figure 5 As shown, the inner furnace tube assembly 100 also includes a thermocouple 180, and the second mounting bracket 120 also includes a third groove. The first end of the thermocouple 180 is inserted into the third groove, and the second end of the thermocouple 180 is connected to an external power supply device. The thermocouple 180 is used to measure the temperature of the process chamber.

[0077] In the above embodiments, the inner furnace tube assembly 100 is applied to a reactor, which includes an outer furnace tube and the inner furnace tube assembly 100. The inner furnace tube assembly 100 includes: a first mounting bracket 110 with a hollowed-out area; a second mounting bracket 120 arranged parallel to the first mounting bracket 110; and multiple connecting rods 130, each connecting rod 130 having its two ends connected to the first mounting bracket 110 and the second mounting bracket 120 respectively. The multiple connecting rods 130 are arranged sequentially around the hollowed-out area to form a cavity, and the hollowed-out area is configured as the opening of the cavity. With this structure, when manufacturing the inner furnace tube assembly 100, only the first mounting bracket 110, connecting rods 130, and second mounting bracket 120, which are relatively simple to manufacture, need to be assembled into the inner furnace tube assembly 100, reducing the manufacturing difficulty of the inner furnace tube assembly 100.

[0078] Based on the same inventive concept, this application also provides a reactor 200. Figure 9 The image shown is a cross-sectional view of a reactor provided in an exemplary embodiment of this application. Figure 9 As shown, the reactor 200 includes an inner furnace tube assembly 100 as described in any of the above embodiments; and an outer furnace tube 210 having a receiving cavity configured to receive the inner furnace tube assembly 100.

[0079] In some embodiments, the cross-section of the outer furnace tube 210 is polygonal, circular, or elliptical.

[0080] In some embodiments, the material of the outer furnace tube 210 can be any one of metal, silicon carbide, quartz, ceramic, or silicon.

[0081] In some embodiments, such as Figure 9 As shown, the reactor 200 also includes: a positioning plate 220, which is connected to the side of the first mounting bracket 110 away from the connecting rod 130; and a flange 230, which seals the connection between the outer furnace tube 210 and the positioning plate 220 so that the receiving cavity forms a sealed chamber.

[0082] Specifically, the flange 230 includes a fourth groove on its inner side, and the positioning plate 220 is at least partially embedded in the fourth groove. The port of the outer furnace tube 210 is connected to the flange 230. Through the flange 230 and the positioning plate 220, a fixed distance can be maintained between the inner furnace tube and the outer furnace tube 210, and the receiving cavity can be sealed, thereby enhancing the structural stability and sealing performance of the reactor 200.

[0083] In some embodiments, the reactor 200 further includes a sealing strip disposed between the mounting plate 220 and the first mounting bracket 110.

[0084] In some embodiments, such as Figure 9 As shown, flange 230 has an extraction port 231, which connects the extraction device to the process chamber. By providing the extraction port 231, gas can be extracted from the process chamber and the containment chamber.

[0085] In some embodiments, the flange 230 further includes a first through hole, the mounting plate 220 further includes a second through hole, the first through hole and the second through hole are coaxially connected, the second end of the air inlet pipe 160 is embedded in the first through hole and the second through hole and communicates with an external air supply device, and / or, the second end of the thermocouple 180 is embedded in the first through hole and the second through hole and connects with an external power supply device.

[0086] In some embodiments, when the hollow rod 131 is connected to an external air supply device, the first groove 111 into which the hollow rod 131 is embedded communicates with the first through hole and the second through hole. For example, the first groove 111 and the second through hole can be connected by a component such as an air pipe or an adapter, and the first through hole communicates with the external air supply device.

[0087] In some embodiments, such as Figure 9 As shown, the reactor 200 also includes a main furnace body 240, which includes a heating chamber configured to accommodate the outer furnace tube 210. Specifically, the main furnace body 240 has opposing first end face openings and second end face openings, and the first end face opening of the main furnace body 240 is connected to a flange 230.

[0088] In some embodiments, such as Figure 9 As shown, the reactor 200 also includes a tail end cover 250, which is used to close the second end face opening of the main furnace body 240.

[0089] In some embodiments, the main furnace body 240 includes a first cavity inside, and the tail end cover 250 includes a second cavity inside. The first cavity and the second cavity are filled with heat insulation cotton. By filling with heat insulation cotton, the heat emitted by the reactor 200 can be prevented from burning the staff.

[0090] In some embodiments, the reactor 200 further includes a heating structure (such as a resistance wire), which may be disposed, exemplarily, within a heating chamber.

[0091] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0092] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0093] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0094] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0095] The above description has been given for illustrative and descriptive purposes. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. An inner furnace tube assembly, characterized in that, Applied to a reactor, the reactor comprising an outer furnace tube and an inner furnace tube assembly, wherein the inner furnace tube assembly comprises: The first mounting bracket has a cutout area; The second mounting bracket is arranged parallel to the first mounting bracket; Multiple connecting rods, each of which is connected at both ends to the first mounting bracket and the second mounting bracket respectively; In this configuration, a plurality of connecting rods are arranged sequentially around the hollowed-out area to form a cavity, the cavity having a process chamber, and the hollowed-out area being configured as the opening of the cavity; The inner furnace tube assembly further includes a mounting plate and a side plate, wherein the mounting plate is located on the side of the second mounting frame away from the first mounting frame, the side plate connects the second mounting frame and the mounting plate, and the second mounting frame, the mounting plate and the side plate together form a uniform flow cavity; The second mounting bracket is provided with multiple air inlets and at least one first vent. The air inlets are configured to deliver process gas to the flow equalization cavity. The first vent connects the flow equalization cavity and the process chamber to deliver the gas in the flow equalization cavity to the process chamber.

2. The inner furnace tube assembly according to claim 1, characterized in that, The first mounting bracket includes a first groove, and the second mounting bracket includes a second groove; The first end of the connecting rod is inserted into the first groove, and the second end of the connecting rod is inserted into the second groove.

3. The inner furnace tube assembly according to claim 2, characterized in that, The first groove is a first annular groove, and the second groove is a second annular groove, wherein the first annular groove and the second annular groove are coaxially arranged; The first ends of the plurality of connecting rods are inserted into the first annular groove, and the second ends of the plurality of connecting rods are inserted into the second annular groove. The plurality of connecting rods are arranged in a ring along the first annular groove, wherein the sides of adjacent connecting rods are in contact with each other.

4. The inner furnace tube assembly according to claim 1, characterized in that, The connecting rod includes a hollow rod, and the hollow rod is connected to the air inlet to deliver process gas to the uniform flow cavity using the hollow rod.

5. The inner furnace tube assembly according to claim 1, characterized in that, The cavity contains a process chamber; The inner furnace tube assembly further includes a mounting plate and a side plate, wherein the mounting plate is located on the side of the second mounting frame away from the first mounting frame, and the side plate connects the second mounting frame and the mounting plate to form a flow equalization cavity; The second mounting bracket further includes a plurality of air inlets, which are configured to deliver process gas to the uniform flow cavity; The connecting rod includes a hollow rod that passes through the second mounting bracket and communicates with the flow equalization cavity. The side wall of the hollow rod has a second vent hole that connects the cavity of the hollow rod and the process chamber to transport the gas in the flow equalization cavity to the process chamber.

6. The inner furnace tube assembly according to any one of claims 2 to 5, characterized in that, It also includes at least one first support pillar, which is disposed in the flow equalization cavity and is used to connect the second mounting bracket and the mounting plate.

7. The inner furnace tube assembly according to claim 6, characterized in that, The first pillar is connected to the central area of ​​the second mounting bracket, and / or the first pillar is connected to the central area of ​​the mounting plate.

8. The inner furnace tube assembly according to any one of claims 1 to 3, characterized in that, The outer furnace tube has a receiving cavity configured to accommodate the inner furnace tube assembly, and the cavity contains a process chamber. The first mounting bracket has a third vent hole, which connects the receiving cavity and the process chamber.

9. The inner furnace tube assembly according to any one of claims 1 to 3, characterized in that, The outer furnace tube has a receiving cavity configured to accommodate the inner furnace tube assembly, and the cavity contains a process chamber. The connecting rod has a fourth vent hole, which connects the receiving cavity and the process chamber.

10. A reactor, characterized in that, include: The inner furnace tube assembly as described in any one of claims 1 to 9; An outer furnace tube having a receiving cavity configured to receive the inner furnace tube assembly.

Images