PECVD gas spray component, film forming system and manufacturing method

Abstract

The present disclosure relates to a PECVD gas spray component, a film forming system and a manufacturing method, wherein the gas spray component comprises a spray body, the spray body comprises an air inlet plate, an exhaust plate and an air distribution cavity formed between the air inlet plate and the exhaust plate, an air inlet flow channel connected to the air distribution cavity is formed on the air inlet plate, a plurality of first exhaust holes connected to the air distribution cavity are formed on the exhaust plate, and the spray body is integrally formed to effectively simplify the complex manufacturing and assembly processes, while achieving uniform spraying of process gas and high film forming quality.

Description

Technical Field

[0001] The present disclosure relates to the technical field of PECVD equipment, and in particular, to a PECVD gas spray component, a film forming system and a manufacturing method. Background Art

[0002] PECVB (Plasma Enhanced Chemical Vapor Deposition) technology is widely used in the fields of semiconductor manufacturing, flat panel manufacturing and solar cell manufacturing, and is mainly used to deposit various insulating films and semiconductor films. In the related technology, PECVB spray parts are limited by traditional subtractive manufacturing processes, so the number of parts of the spray parts is large and all are machined, and the functional body is formed by positioning and sealing assembly. The processing and manufacturing are difficult, time-consuming and labor-intensive, and the sealing is poor. At the same time, it is easy to cause uneven gas supply in the vapor deposition process, which makes the uniformity of the air flow field in the coating space limited and the film quality is poor. Summary of the invention

[0003] The purpose of the present disclosure is to provide a PECVD gas spray component, a film forming system and a manufacturing method, wherein the PECVD gas spray component can effectively simplify the complex manufacturing and assembly processes, while achieving uniform spraying of process gas and high film forming quality.

[0004] In order to achieve the above-mentioned objectives, the first aspect of the present disclosure provides a PECVD gas spray part, including a spray body, the spray body including an air inlet plate, an exhaust plate and an air distribution cavity formed between the air inlet plate and the exhaust plate, an air inlet flow channel connected to the air distribution cavity is formed on the air inlet plate, a plurality of first exhaust holes connected to the air distribution cavity are formed on the exhaust plate, and the spray body is integrally formed.

[0005] Optionally, the spray body forms a box structure, which includes the air inlet plate, the exhaust plate and a side plate located between the outer periphery of the air inlet plate and the exhaust plate, and the air distribution cavity is formed between the air inlet plate, the exhaust plate and the side plate. The spray body also includes an air distribution plate, the outer periphery of the air distribution plate is combined to the inner wall of the side plate to divide the air distribution cavity into a first sealed cavity close to the air inlet plate and a second sealed cavity close to the exhaust plate, and a plurality of air distribution holes distributed at intervals are formed on the air distribution plate to connect the first sealed cavity and the second sealed cavity.

[0006] Optionally, the intake air flow channel includes an intake hole, an intake cavity and an exhaust cavity, the intake port of the intake hole extends to the outside of the outer wall of the intake plate, the intake cavity is formed inside the intake plate and is arranged circumferentially around the intake hole, the intake cavity is connected to the intake hole, and the exhaust cavity is formed on the inner wall of the intake plate and is connected to the intake cavity.

[0007] Optionally, an exhaust protrusion extending along the exhaust cavity is protruded inwardly in the exhaust cavity, and a plurality of second exhaust holes are respectively formed on two side walls of the exhaust protrusion along the extension direction, and the second exhaust holes are respectively connected to the exhaust cavity and the first sealed cavity.

[0008] Optionally, the exhaust protrusion is an annular protrusion or a linear protrusion, the exhaust cavity is correspondingly formed as an annular cavity or a linear cavity, the air inlet cavity is a linear flow channel, and the linear protrusion or linear flow channel forms a cross-shaped structure;

[0009] There is one exhaust cavity, which forms the annular cavity extending around the air inlet hole, or there are multiple exhaust cavities, which form multiple annular cavities arranged at intervals along the circumference of the air inlet hole, and the multiple annular cavities are connected in sequence through annular flow channels.

[0010] Optionally, the inlet flow channel further includes a preheating flow channel which surrounds the inlet hole and is spirally coiled, and the inner end of the preheating flow channel is connected to the exhaust chamber.

[0011] Optionally, an air-filling cavity is further formed inside the side plate, the air-filling cavity has an air-filling hole extending outside the side plate, and the air-filling cavity is communicated with the exhaust cavity.

[0012] Optionally, the inner wall of the air intake plate is formed into a central inner convex portion and an annular outer concave portion in the radial direction, the air intake cavity is arranged corresponding to the annular outer concave portion, and the exhaust cavity is formed at a concave point of the annular outer concave portion.

[0013] Optionally, at least one of the two side walls of the gas distribution plate forms a first conical surface, so that the volume of the first sealed cavity and / or the second sealed cavity gradually increases radially outward.

[0014] Optionally, a first exhaust area and a second exhaust area arranged around the outer periphery of the first exhaust area are formed on the exhaust plate, and the hole spacing of the first exhaust holes in the first exhaust area is greater than the hole spacing of the first exhaust holes in the second exhaust area.

[0015] Optionally, the outer wall of the exhaust plate forms a second conical surface protruding outward.

[0016] Optionally, a gas heating element is also provided on at least one of the air inlet plate and the side plate.

[0017] According to a second aspect of the present disclosure, a PECVD film forming system is provided, comprising an upper electrode, a lower electrode and a film forming chamber located between the upper electrode and the lower electrode, wherein the upper electrode is the PECVD gas spray element as described above.

[0018] According to a third aspect of the present disclosure, a method for manufacturing a PECVD gas spray part is provided, comprising modeling the gas spray part as described above according to process requirements, and integrally forming the gas spray part through an additive manufacturing process.

[0019] Through the above technical solution, the present disclosure provides a PECVD gas spray part, which makes the gas uniform by guiding the process gas through the inlet flow channel of the inlet plate of the spray body to the gas distribution cavity of the spray body, and evenly discharges the uniform process gas through the multiple first exhaust holes of the exhaust plate of the spray body, so that the spray effect is good, thereby ensuring stable and efficient film quality. In addition, the spray body is integrally formed, which effectively simplifies the complex manufacturing and assembly process, and avoids the risk of gas leakage caused by positioning and sealing assembly of multiple processing parts, has good airtightness and high reliability, and further improves the uniformity of process gas supply.

[0020] Other features and advantages of the present disclosure will be described in detail in the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The accompanying drawings are used to provide a further understanding of the present disclosure and constitute a part of the specification. Together with the following specific embodiments, they are used to explain the present disclosure but do not constitute a limitation of the present disclosure. In the accompanying drawings:

[0022] Figure 1 is a schematic structural diagram of a spray body provided in an exemplary embodiment of the present disclosure;

[0023] Figure 2 is a schematic structural diagram of a spray body provided in an exemplary embodiment of the present disclosure from another angle;

[0024] Figure 3 is a top view of a spray body provided in an exemplary embodiment of the present disclosure;

[0025] Figure 4 yes Figure 3 Cross-sectional view at the AA position;

[0026] Figure 5 yes Figure 4 A structural schematic diagram of another implementation method;

[0027] Figure 6 is a front view of a spray body provided in an exemplary embodiment of the present disclosure;

[0028] Figure 7 yes Figure 6 Cross-section view at the mid-BB position;

[0029] Figure 8 yes Figure 6 Cross-section at the mid-CC position;

[0030] Fig. 9 yes Figure 8 Isometric structural diagram of ;

[0031] Fig.10 is a structural schematic diagram of the air inlet cavity of the spray body provided in the second embodiment of the present disclosure;

[0032] Fig.11 is a schematic structural diagram of an exhaust cavity of a spray body provided in a second embodiment of the present disclosure;

[0033] Fig.12 is a schematic structural diagram of the air inlet cavity of the spray body provided in the third embodiment of the present disclosure;

[0034] Fig.13 is a schematic structural diagram of an exhaust cavity of a spray body provided in a third embodiment of the present disclosure;

[0035] Fig.14 is a schematic structural diagram of the air inlet cavity of the spray body provided in the fourth embodiment of the present disclosure;

[0036] Fig.15 It is a schematic structural diagram of the exhaust chamber of the spray body provided in the fourth embodiment of the present disclosure.

[0037] Description of Reference Numerals

[0038] 1-spray body; 110-air inlet plate; 111-inlet flow channel; 11110-inlet hole; 11120-inlet cavity; 11130-exhaust cavity; 11131-exhaust protrusion; 11132-second exhaust hole; 11140-annular flow channel; 11150-preheating flow channel; 112-central inner convex part; 113-annular outer concave part; 120-exhaust plate; 121-first exhaust hole; 122-first Exhaust area; 123-second exhaust area; 124-second conical surface; 130-air distribution cavity; 131-first sealed cavity; 132-second sealed cavity; 140-side plate; 141-air supply cavity; 142-air supply hole; 150-air distribution plate; 151-air distribution hole; 152-first conical surface; 153-central inner convex section; 154-annular outer concave section; 160-first branch flow channel; 170-second branch flow channel. DETAILED DESCRIPTION

[0039] The specific implementation of the present disclosure is described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation described herein is only used to illustrate and explain the present disclosure, and is not used to limit the present disclosure.

[0040] In the present disclosure, unless otherwise stated, directional words such as "upper" and "lower" generally refer to the upper and lower parts of the space when the gas spraying part is in use. Figure 6 The upper and lower directions of the drawing; "inside" and "outside" refer to the inside and outside relative to the outline of the component or structure itself. In addition, it should be noted that the terms used, such as "first" and "second", are used to distinguish one element from another, and do not have order and importance. In addition, in the description with reference to the drawings, the same mark in different drawings represents the same element.

[0041] According to a first aspect of the present disclosure, a PECVD gas spray component is provided, including a spray body 1, the spray body 1 includes an air intake plate 110, an exhaust plate 120 and an air distribution cavity 130 formed between the air intake plate 110 and the exhaust plate 120, an air intake flow channel 111 connected to the air distribution cavity 130 is formed on the air intake plate 110, a plurality of first exhaust holes 121 connected to the air distribution cavity 130 are formed on the exhaust plate 120, and the spray body 1 is integrally formed.

[0042] Through the above technical solution, that is, the present disclosure provides a PECVD gas spray part, referring to Figures 1 to 15 As shown, the process gas is uniformly distributed by guiding the process gas through the inlet flow channel 111 of the air inlet plate 110 of the spray body 1 to the air distribution cavity 130 of the spray body 1, and the uniform process gas is uniformly discharged through the multiple first exhaust holes 121 of the exhaust plate 120 of the spray body 1, so that the spray effect is good, thereby ensuring stable and efficient film forming quality. In addition, the spray body is integrally formed, which effectively simplifies the complex manufacturing and assembly process, and avoids the risk of gas leakage caused by positioning and sealing assembly of multiple processing parts, has good airtightness and high reliability, and further improves the uniformity of process gas supply.

[0043] In addition, it should be noted that PECVD technology uses microwaves or radio frequencies to form plasma locally in the gas containing the atoms that make up the thin film. The plasma has strong chemical activity and can easily react to deposit the desired thin film on the substrate. The process gas can be film-forming gases such as hydrogen, silane and phosphine.

[0044] The spray body 1 can be constructed in any suitable manner according to actual application requirements. For example, in some embodiments, Figures 1 to 15As shown, the spray body 1 can be formed into a box structure, which includes an air intake plate 110, an exhaust plate 120, and a side plate 140 located between the outer peripheries of the air intake plate 110 and the exhaust plate 120. The air distribution cavity 130 is formed between the air intake plate 110, the exhaust plate 120, and the side plate 140, and has a simple structure and high reliability. In addition, the spray body 1 also includes an air distribution plate 150, the outer periphery of which is combined with the inner wall of the side plate 140 to divide the air distribution cavity 130 into a first sealed cavity 131 close to the air intake plate 110 and a second sealed cavity 132 close to the exhaust plate 120. The air distribution plate 150 is formed with a plurality of air distribution holes 151 distributed at intervals to connect the first sealed cavity 131 and the second sealed cavity 132, so that the process gas can pass through the first sealed cavity 131 and the second sealed cavity 132 twice, and the gas distribution uniformity is effectively improved, and the spraying effect is good, so that the stable and efficient film forming quality can be guaranteed. The outer contour of the box structure can be constructed in any suitable manner, for example, Figure 1 The box structure can be a rectangular shape as shown, or a circular shape not shown in the figure, and the present disclosure does not impose any specific restrictions on such deformation. In addition, in order to ensure that the box structure has good electrical conductivity, heat transfer capacity and gas corrosion resistance, the material of the box structure can be a light metal material such as aluminum alloy or titanium aluminum alloy, which ensures the overall lightweight design of the box structure on the one hand, and has strong structural rigidity and high reliability on the other hand.

[0045] In some embodiments, reference Figures 4 to 9 As shown, the inlet flow channel 111 may include an inlet hole 11110, an inlet cavity 11120 and an exhaust cavity 11130. The inlet port of the inlet hole 11110 extends to the outside of the outer wall of the inlet plate 110. The inlet cavity 11120 is formed inside the inlet plate 110 and is arranged circumferentially around the inlet hole 11110. The inlet cavity 11120 is connected to the inlet hole 11110. The exhaust cavity 11130 is formed on the inner wall of the inlet plate 110 and is connected to the inlet cavity 11120, so that the process gas entering through the inlet hole 11110 can be discharged around the inlet hole 11110. 0, the gas is evenly diffused into the exhaust chamber 11130 connected to the air inlet chamber 11120, thereby evenly and quickly filling the first sealed chamber 131 with the process gas, and then the process gas after the first uniformization is transported to the second sealed chamber 132 through the multiple air distribution holes 151 on the air distribution plate 150 for secondary uniformization, and finally discharged from the multiple first exhaust holes 121 of the exhaust plate 120, with good spraying effect and high film quality, which further ensures that the spray body 1 sprays the process gas evenly and efficiently.

[0046] Among them, reference Figure 5 and Fig. 9As shown, the exhaust cavity 11130 may protrude inward to form an exhaust protrusion 11131 extending along the exhaust cavity 11130, and the exhaust protrusion 11131 may have a plurality of second exhaust holes 11132 respectively formed on the two side walls along the extension direction, and the second exhaust holes 11132 respectively connect the exhaust cavity 11130 and the first sealed cavity 131, thereby enabling the process gas to be discharged into the first sealed cavity 131 evenly and quickly, with high reliability.

[0047] In addition, in order to ensure that the process gas in the exhaust cavity 11130 can quickly fill the first sealed cavity 131, in other embodiments, Fig.11 As shown, a plurality of second exhaust holes 11132 may be formed on the wall surface of the exhaust protrusion 11131 and arranged at intervals, and the extension directions of the plurality of second exhaust holes 11132 may present different postures. Specifically, for example, the extension direction of the second exhaust holes 11132 may be parallel to or perpendicular to the horizontal direction, or the angle between the two may be any angle between 0-90°. The purpose is to enable the process gas to quickly and evenly fill the first sealed cavity 131, and the present disclosure does not make any specific limitations here.

[0048] In some embodiments, reference Figures 6 to 15 As shown, the profile shape of the exhaust protrusion 11131 can be constructed in any suitable manner, for example, the exhaust protrusion 11131 can be constructed as follows Fig. 9 The annular protrusion shown, or constructed as Fig.15 The linear protrusion shown in the figure, the exhaust cavity 11130 is correspondingly formed as an annular cavity or a linear cavity. At the same time, in order to ensure the rapid flow of process gas, the linear protrusion can be constructed as follows Fig.15 The cross-shaped structure shown in the figure, or the cross-shaped structure not shown in the figure, and correspondingly, a plurality of second exhaust holes 11132 are formed on the side wall surface of the cross-shaped structure or the cross-shaped structure to ensure that the process gas can quickly fill the first sealed cavity 131; in addition, the air inlet cavity 11120 can be constructed as follows Fig.10 and Fig.14 The straight flow channel shown can also be constructed into any other suitable structure such as a cross structure or a cross-shaped structure in order to ensure the rapid flow of process gas, and the present disclosure does not make any specific limitation here.

[0049] Wherein, in some embodiments, reference Figures 7 to 9 As shown, the number of the exhaust cavity 11130 can be one, and one exhaust cavity 11130 forms an annular cavity extending around the gas inlet hole 11110, so that the process gas can be uniformly and quickly discharged into the first sealed cavity 131 through the annular cavity. Fig.12 and Fig.13As shown, there may be multiple exhaust cavities 11130, and the multiple exhaust cavities 11130 are formed into multiple annular cavities spaced apart along the circumference of the air inlet hole 11110, wherein the number of annular cavities is not specifically limited in the present disclosure, and may be constructed as follows, for example: Fig.12 The four annular cavities shown in the figure are all connected with the annular flow channel 11140 through the second branch flow channel 170, so that the multiple annular cavities can be connected in sequence through the annular flow channel 11140, and the intersection of the inlet cavity 11120 constructed as a cross structure and the annular flow channel 11140 is located at the midpoint of the two annular cavities, so as to ensure that the process gas introduced through the inlet hole 11110 can be evenly distributed to the four annular cavities, and further evenly discharged to the inside of the first sealed cavity 131.

[0050] It should be noted that when the number of exhaust cavities 11130 is configured as multiple, the specific number of exhaust cavities 11130 is not specifically limited in this disclosure. Specifically, the corresponding design can be made according to the actual distribution requirements of the intake flow channel. In addition, the thickness of the intake plate 110, the exhaust plate 120 and the side plate 140 is not specifically limited in this disclosure. In addition, the intake hole 11110 can be connected to an external gas source, and the external gas source is filled with the above-mentioned process gas, so that the intake plate 110 can be continuously supplied with gas.

[0051] In some embodiments, reference Figures 4 to 7 As shown, the inlet flow channel 111 may also include a preheating flow channel 11150 which is spirally coiled around the inlet hole 11110, and the inner end of the preheating flow channel 11150 is connected to the exhaust chamber 11130, so that the process gas on the end face of the inlet plate 110 can be fully circulated and the process gas can be fully preheated. At the same time, external overheating and excessive internal heat loss can be prevented, so as to reduce additional heating requirements and reduce energy consumption.

[0052] in, Figure 4 As an example, a supplementary air cavity 141 may be formed inside the side plate 140, and the supplementary air cavity 141 is connected to the exhaust cavity 11130, so that the process gas in the side wall surface can play a role of heat insulation, further reducing the heat loss in the air distribution cavity 130, with high reliability and low energy consumption. In addition, the supplementary air cavity 141 has a supplementary air hole 142 extending outside the side plate 140, so that the supplementary air cavity 141 can be quickly supplied with air. Among them, the supplementary air cavity 141 can be connected to the exhaust cavity 11130 through the process gas in the side wall surface. Fig.10 The first branch channel 160 shown is connected to the exhaust chamber 11130, or can be connected to the exhaust chamber 11130 by Figure 7As shown, the annular flow channel 11140 is connected to the exhaust chamber 11130 . The present disclosure does not limit this type of deformation. The purpose is to guide the gas in the air replenishing chamber 141 to the inside of the exhaust chamber 11130 .

[0053] In some embodiments, reference Figure 4 and Figure 5 As shown, the inner wall of the air intake plate 110 can be formed into a central inner convex portion 112 and an annular outer recess 113 along the radial direction, the air intake cavity 11120 is arranged corresponding to the annular outer recess 113, and the exhaust cavity 11130 is formed at the concave point of the annular outer recess 113. In this way, on the one hand, the overall weight of the air intake plate 110 can be reduced to ensure a lightweight design, and on the other hand, the exhaust cavity 11130 can be accommodated inside through the concave point of the annular outer recess 113, so as to make the air distribution in the annular outer recess 113 area larger and better adapt to the process requirements. At the same time, it is also convenient to diffuse the process gas toward both sides to ensure efficient gas supply to the first sealed cavity 131.

[0054] The outer contour of the gas distribution plate 150 can be constructed in any suitable manner according to actual process requirements. For example, in some embodiments, Figure 4 As shown, at least one of the two side walls of the air distribution plate 150 forms a first conical surface 152, so that the volume of the first sealed cavity 131 and / or the second sealed cavity 132 gradually increases radially outward, so as to better meet the process requirements, so that the spray body 1 can spray evenly and ensure good film forming quality. Figure 5 It is exemplarily shown that the inner wall of the gas distribution plate 150 is formed into a central inner convex section 153 and an annular outer concave section 154 along the radial direction, so as to better meet the process requirements and enable the process gas in the gas distribution cavity 130 to be evenly distributed.

[0055] In some embodiments, reference Figure 2As shown, a first exhaust area 122 and a second exhaust area 123 arranged around the outer periphery of the first exhaust area 122 can be formed on the exhaust plate 120, and the hole spacing of the first exhaust holes 121 located in the first exhaust area 122 is greater than the hole spacing of the first exhaust holes 121 located in the second exhaust area 123. By different densities of the first exhaust holes 121 on the exhaust plate 120, different exhaust flow rates can be achieved. In this way, in specific work, for example, when it is necessary to supply gas to the film forming chamber in the PECVD film forming system, since both sides of the film forming chamber are usually provided with exhaust ports for dry pumps or molecular pumps to evacuate gas to maintain the constant air pressure in the film forming chamber, the gas loss on both sides of the film forming chamber is relatively serious. By constructing the first exhaust holes 121 on the second exhaust area 123 to be denser than the first exhaust holes 121 on the first exhaust area 122, it is convenient to better replenish the process gas on both sides, so as to ensure a higher film forming quality.

[0056] Among them, reference Figure 5 As shown, the outer wall of the exhaust plate 120 can form a second conical surface 124 protruding outward, so that by changing the hole depth of the first exhaust hole 121 on the exhaust plate 120, different distributions of gas flow resistance can be achieved to ensure uniform gas supply, further ensuring better film forming quality. In addition, it should be noted that the corresponding aperture size, number of holes and shape of the exhaust holes are not specifically limited in this disclosure, and corresponding matching design can be carried out according to actual process requirements to achieve corresponding intake air flow distribution; in addition, the hole depth of the exhaust hole can be adaptively designed with the plate thickness of the gas distribution plate 150 and the exhaust plate 120, and this disclosure does not make specific limitations on this.

[0057] In some embodiments not shown in the figure, a gas heating element may also be provided on at least one of the air inlet plate 110 and the side plate 140 to preheat the process gas entering the spray body 1. On the one hand, it can reduce the process preparation time, and on the other hand, it can achieve good heat shielding inside the cavity, reduce the heat loss of the process gas inside the cavity, reduce additional heating requirements, and lower energy consumption.

[0058] According to the second aspect of the present disclosure, a PECVD film forming system is also provided, including an upper electrode, a lower electrode and a film forming chamber located between the upper electrode and the lower electrode. The upper electrode is the above-mentioned PECVD gas spray component, which can effectively simplify the complex manufacturing and assembly processes, while achieving uniform spraying of process gases, ensuring stable and efficient film forming quality in the film forming chamber and having all the beneficial effects of the above-mentioned gas spray component, which will not be repeated in the present disclosure.

[0059] According to a third aspect of the present disclosure, a method for manufacturing a PECVD gas spray part is also provided, wherein the gas spray part is modeled according to process requirements, and the gas spray part is integrally formed by an additive manufacturing process. Specifically,

[0060] The first step is to preliminarily select the size of the air intake structure and the size of the spray area according to the coating specifications and air intake flow requirements of the PECVD equipment, and complete the preliminary design of the overall structure of the spray body 1;

[0061] The second step is to design the intake structure based on the intake uniformity and preheating requirements, specifically including the intake flow channel 111 (size, shape, arrangement, etc.) and the intake holes 11110 (the air flow outlet inside the intake flow channel 111, size, shape, arrangement and posture, etc.);

[0062] The third step is to design the hole structure (size, shape, arrangement and plate thickness, etc.) of the gas distribution plate 150 and the gas exhaust plate 120 based on the uniformity requirements of gas distribution and spraying;

[0063] The fourth step is to perform a finite element simulation analysis of the thermal flow field of the integrated spray body 1 based on the functional requirements using tools such as FLUENT according to the requirements of the PECVD equipment for the best spraying effect (stable and uniform pressure, flow rate, and temperature distribution);

[0064] Step 5: Combine the results of finite element simulation analysis and return to step 3 and step 4 to adjust and optimize the parameters involved. After completion, repeat step 5 and perform finite element simulation analysis again until the ideal spraying effect is obtained.

[0065] Step 6: Complete the interface structure design for electrode feeding, vacuuming, etc.

[0066] Step 7: Combined with the structural stability requirements of the process, a weight reduction design based on the additive manufacturing process is performed on the specific position of the spray body 1, including the use of hollow and porous structure design, etc. After completion, strength verification is performed using tools such as ANSYS;

[0067] Step 8: Select a suitable additive manufacturing process, such as SLM, and optimize the structure based on the manufacturing process (blunting edges, smooth transition of rounded corners, etc.);

[0068] The ninth step is to import the digital model into the additive manufacturing equipment to complete the forming and manufacturing, and then carry out the necessary post-processing process (powder cleaning, annealing, etc.);

[0069] Step 10: Based on the insulation and shielding requirements of the electric field, the coating process (including insulating isolation film and conductive shielding film) is completed for the specific area of ​​the gas spray part;

[0070] In the eleventh step, the local structure of the gas spray part is reprocessed and then delivered for inspection and use.

[0071] The preferred embodiments of the present disclosure are described in detail above in conjunction with the accompanying drawings; however, the present disclosure is not limited to the specific details in the above embodiments. Within the technical concept of the present disclosure, a variety of simple modifications can be made to the technical solution of the present disclosure, and these simple modifications all fall within the protection scope of the present disclosure.

[0072] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present disclosure will not further describe various possible combinations.

[0073] In addition, various embodiments of the present disclosure may be arbitrarily combined, and as long as they do not violate the concept of the present disclosure, they should also be regarded as the contents disclosed by the present disclosure.

Claims

1. A PECVD gas spray element, characterized in that: The spray body comprises an air inlet plate, an air outlet plate and an air distribution cavity formed between the air inlet plate and the air outlet plate, an air inlet flow channel connected to the air distribution cavity is formed on the air inlet plate, a plurality of first air outlet holes connected to the air distribution cavity are formed on the air outlet plate, and the spray body is integrally formed; The spray body forms a box structure, the box structure includes the air inlet plate, the exhaust plate and a side plate located between the outer peripheries of the air inlet plate and the exhaust plate, the air distribution cavity is formed between the air inlet plate, the exhaust plate and the side plate, the spray body also includes an air distribution plate, the outer periphery of the air distribution plate is combined with the inner wall of the side plate to divide the air distribution cavity into a first sealed cavity close to the air inlet plate and a second sealed cavity close to the exhaust plate, and a plurality of air distribution holes distributed at intervals are formed on the air distribution plate to connect the first sealed cavity and the second sealed cavity; The intake air flow channel includes an intake hole, an intake cavity and an exhaust cavity. The intake port of the intake hole extends to the outside of the outer wall of the intake plate. The intake cavity is formed inside the intake plate and is arranged circumferentially around the intake hole. The intake cavity is connected to the intake hole. The exhaust cavity is formed on the inner wall of the intake plate and is connected to the intake cavity.

2. The PECVD gas shower according to claim 1, characterized in that: An exhaust protrusion extending along the exhaust cavity is formed inwardly protruding from the exhaust cavity, and a plurality of second exhaust holes are respectively formed on two side walls of the exhaust protrusion along the extension direction, and the second exhaust holes are respectively connected to the exhaust cavity and the first sealing cavity.

3. The PECVD gas shower according to claim 2, characterized in that: The exhaust protrusion is an annular protrusion or a linear protrusion, the exhaust cavity is correspondingly formed as an annular cavity or a linear cavity, the air inlet cavity is a linear flow channel, and the linear protrusion or linear flow channel forms a cross-shaped structure; There is one exhaust cavity, which forms the annular cavity extending around the air inlet hole, or there are multiple exhaust cavities, which form multiple annular cavities arranged at intervals along the circumference of the air inlet hole, and the multiple annular cavities are connected in sequence through annular flow channels.

4. The PECVD gas shower according to claim 1, characterized in that: The inlet flow channel also includes a preheating flow channel that surrounds the inlet hole and is spirally coiled, and the inner end of the preheating flow channel is connected to the exhaust cavity.

5. The PECVD gas shower according to claim 1 or 4, characterized in that: An air-filling cavity is also formed inside the side plate. The air-filling cavity has an air-filling hole extending outside the side plate, and the air-filling cavity is communicated with the exhaust cavity.

6. The PECVD gas shower according to claim 1, characterized in that: The inner wall of the air intake plate is formed into a central inner convex portion and an annular outer concave portion in the radial direction, the air intake cavity is arranged corresponding to the annular outer concave portion, and the exhaust cavity is formed at a concave point of the annular outer concave portion.

7. The PECVD gas shower according to claim 1, characterized in that: At least one of the two side walls of the gas distribution plate forms a first conical surface, so that the volume of the first sealed cavity and / or the second sealed cavity gradually increases radially outward.

8. The PECVD gas shower according to claim 1, characterized in that: The exhaust plate is formed with a first exhaust area and a second exhaust area arranged around an outer periphery of the first exhaust area, and a hole spacing of the first exhaust holes in the first exhaust area is greater than a hole spacing of the first exhaust holes in the second exhaust area.

9. The PECVD gas shower according to claim 1 or 8, characterized in that: The outer wall of the exhaust plate forms a second conical surface protruding outward.

10. The PECVD gas shower according to claim 1, characterized in that: A gas heating element is also provided on at least one of the air inlet plate and the side plate.

11. A PECVD film forming system, characterized in that: It comprises an upper electrode, a lower electrode and a film forming chamber located between the upper electrode and the lower electrode, wherein the upper electrode is a PECVD gas spraying member according to any one of claims 1 to 10.

12. A method for manufacturing a PECVD gas spray part, characterized in that: include Modeling the gas shower component according to any one of claims 1 to 10 according to process requirements, and The gas spraying part is integrally formed by an additive manufacturing process.

Images