A sample position conversion component and hot wire CVD diamond equipment

Abstract

The present invention discloses a sample position conversion component and a hot wire CVD diamond device, which relate to the field of vacuum coating technology and solve the technical problem of inconsistent thickness of diamond films grown between various substrates. The component comprises a revolution axis, a turntable mechanism and a driving mechanism, wherein the revolution axis is vertically placed along the z-axis direction, and the turntable mechanism has a revolution table that can rotate in the horizontal direction and a plurality of rotation units distributed in a ring around the axis of the revolution table as the center, and the revolution table can simultaneously drive a plurality of the rotation units to revolve around the revolution axis in a self-rotating manner. When the substrates carried by the multiple sample tables of the present invention grow and coat the film, they revolve around the revolution axis while rotating themselves, so that the positions of the various substrates are alternately changed while also changing their own positions in the horizontal direction, thereby making the growth of diamond films at different positions on each substrate more uniform.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating, and in particular to a sample position conversion component and a hot-filament CVD diamond device. Background Art

[0002] Hot filament chemical vapor deposition (HFCVD) is an important method for artificially synthesizing diamond films. The working principle of hot filament chemical vapor deposition is to use molecules to decompose on a heated hot wire and deposit on the substrate surface to form a thin film.

[0003] Vacuum coating is widely used in the semiconductor, optics and other industries. Uniformity of coating thickness is a common requirement. In the vacuum coating machine for coating the workpiece, the material source is generally fixed. In order to improve the uniformity of the workpiece coating, the sample stage supporting the workpiece is generally set to a rotatable sample stage. When using the vacuum coating machine to coat the workpiece, the workpiece can be rotated by the rotating sample stage, and its different positions can be rotated towards the material source, thereby improving the coating uniformity on the workpiece surface.

[0004] Substrate rotation generally involves a planar rotation method. This method is commonly used due to its simple structure, but it is not easy to obtain a relatively uniform coating. Currently, whether it is experimental or industrial production HFCVD coating equipment, the thickness of the diamond film grown between each substrate on the same revolution table is uneven, resulting in errors in the thickness of the diamond film between products from the same batch. Summary of the Invention

[0005] The embodiments of the present invention provide a sample position conversion assembly and a hot-filament CVD diamond device to solve the technical problem of inconsistent thickness of diamond films grown on different substrates.

[0006] To achieve the above objectives, the embodiments of the present invention adopt the following technical solutions:

[0007] On the one hand, the present application provides a sample position conversion assembly, having multiple sample stages distributed in a ring, each of the sample stages having two oppositely arranged bearing surfaces and abutment surfaces, the bearing surfaces being used to bear a substrate, and also including a revolution axis, a turntable mechanism and a driving mechanism, the revolution axis being vertically placed along the z-axis direction, the revolution axis having two opposite first and second ends; the turntable mechanism having a revolution table rotatable in a horizontal direction and multiple rotation units distributed in a ring with the axis of the revolution table as the center, the revolution table having two opposite first end faces and a second end face, the first end of the revolution axis being synchronously rotatably connected with the axis center of the second end face, the rotation unit being used to bear the sample stage, the revolution table being able to simultaneously drive multiple rotation units to revolve around the revolution axis in a self-rotating manner; the driving mechanism being used to drive the above-mentioned revolution axis to rotate. The sample position conversion assembly provided in an embodiment of the present invention is such that when substrates supported by multiple sample stages grow and coat, they revolve around the revolution axis and rotate themselves, so that the positions of the substrates are alternately changed while the positions of the substrates themselves are also changed in the horizontal direction, thereby making the growth of diamond films at different positions on each substrate more uniform, and improving the consistency of diamond film thickness between substrates, thereby avoiding errors in diamond film thickness between products of the same batch.

[0008] Furthermore, the turntable mechanism also includes an internal geared disc that rotates relative to the orbiting platform, with the orbiting platform and the internal geared disc coaxially aligned. Each of the rotation units includes a planetary gear that meshes with the internal geared disc. The orbiting platform drives the planetary gears to rotate about the orbital axis while simultaneously rotating in the opposite direction of the orbiting platform. This planetary rotation design allows for more uniform thin film growth on each substrate surface.

[0009] In one possible structural design, the inner gear disc is an inner conical gear disc; the rotation unit is a second rotation unit; the planetary gear is a conical planetary gear, and the conical planetary gear has two opposing large and small end faces. The second rotation unit also includes an outer gear ring and a plurality of transmission gears distributed in a ring around the axis of the revolution table. The inner circumference of the outer gear ring is interference-fitted with the outer circumference of the revolution table, and the outer teeth of the outer gear ring are meshed with each of the transmission gears. One end face of the transmission gear is connected to the abutment surface of the sample stage, and the other end face is connected to the large end face of the conical planetary gear, and the transmission gear is coaxial with the conical planetary gear. In this conical planetary gear-inner conical gear disc design, the revolution table drives the outer gear ring to drive the transmission gear to rotate while driving the conical planetary gear to rotate horizontally. At the same time, because the conical planetary gear is meshed with the inner conical gear disc, the conical planetary gear drives the sample stage to rotate while revolving.

[0010] In one possible structural design, a period conversion mechanism is also included, which includes a transmission unit and a toggle unit; the transmission unit includes a grooved wheel that rotates in the horizontal direction, the axis of the grooved wheel is synchronously connected to the second end of the revolving shaft, and a plurality of radial grooves are provided at equal angles along the circumference of the grooved wheel; the toggle unit has a crank that can rotate in the horizontal direction and a cylindrical pin installed at one end of the crank, and the other end of the crank is installed with a driving shaft, the driving shaft is vertically arranged along the z-axis direction, and the end of the driving shaft away from the crank is synchronously connected to the driving end of the driving mechanism; the driving shaft drives the crank to rotate along the axis of the driving shaft so that the cylindrical pin at the end of the crank disengages or enters the radial groove. The design of adding a period conversion mechanism between the turntable mechanism and the driving mechanism can make each sample stage have a fixed position conversion cycle, ensuring the consistency of the diamond film thickness between each substrate.

[0011] Furthermore, the number of the radial grooves is 3 or 4. The substrate switching period is changed by changing the number of the radial grooves.

[0012] Furthermore, arc-shaped locking grooves are provided along the circumference of the sheave, with the same number as the radial grooves, and are staggered with the radial grooves. An active dial or an arc-shaped swing plate is mounted on the end of the crank away from the cylindrical pin, cooperating with the arc-shaped locking grooves. When the cylindrical pin enters the radial groove, the arc-shaped locking groove of the sheave separates from the active dial or the arc-shaped swing plate. With this design, before the cylindrical pin enters the sheave, the active dial or the arc-shaped swing plate locks the sheave through the arc-shaped locking groove, rendering the sheave stationary. When the cylindrical pin enters the sheave, the active dial or the arc-shaped swing plate separates from the arc-shaped locking groove, allowing the cylindrical pin to drive the sheave to rotate through the radial groove. When the cylindrical pin leaves the radial groove, the active dial or the arc-shaped swing plate again locks the sheave through the arc-shaped locking groove, further rendering the sheave stationary. This repeated periodic position change significantly improves the uniformity of thin film growth thickness across substrates.

[0013] In one possible structural design, the drive mechanism includes a horizontally arranged motor, with a first spur gear mounted on an output end of the motor. The first spur gear drives the revolving shaft to rotate via a gear set. In this design, the motor drives the revolving shaft to rotate via the gear set.

[0014] Furthermore, the drive mechanism includes a base, and the gear set includes a horizontally arranged end face gear plate and a third spur gear parallel to the end face gear plate. The end face gear plate and the third spur gear are both rotatably connected to the base, the end face gear plate meshingly connected to the first spur gear, and a second spur gear is coaxially mounted on the end face gear plate along the z-axis, the second spur gear meshingly connected to the third spur gear. The coordinated transmission of multiple gears improves operational stability.

[0015] Another embodiment of the present invention provides a hot-filament CVD diamond apparatus, comprising the sample position conversion assembly described in any of the above technical solutions, and further comprising a cabinet and a vacuum chamber, wherein the cabinet has a storage space; the vacuum chamber is vertically embedded in the storage space, a door is hingedly connected to the open end of the vacuum chamber, and the sample stage is located within the vacuum chamber. In the hot-filament CVD diamond apparatus provided in this embodiment of the present invention, a diamond film is grown on a substrate in a near-vacuum environment within the vacuum chamber, significantly improving the purity and uniformity of the diamond film. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is an axonometric view of the hot-filament CVD diamond equipment of the present invention;

[0017] Figure 2 This is an axonometric view of one embodiment of the turntable mechanism of the present invention;

[0018] Figure 3 This is a front view of one embodiment of the rotation unit of the present invention;

[0019] Figure 4 A top view of one embodiment of a sample position conversion assembly of the present invention;

[0020] Figure 5 A top view of another embodiment of the turntable mechanism of the present invention;

[0021] Figure 6 A front view of another embodiment of the rotation unit of the present invention;

[0022] Figure 7 This is an axonometric view of another embodiment of the sample position conversion assembly of the present invention.

[0023] In the picture:

[0024] 1. Cabinet;

[0025] 2. Vacuum chamber;

[0026] 3. Door body;

[0027] 4. Sample position conversion component;

[0028] 41. Turntable mechanism, 411. Internal gear disc, 412. Revolution table, 413. Sample table, 414. First rotation unit, 4141. Rotation shaft, 4142. Spur planetary gear, 415. Second rotation unit, 4151. Conical planetary gear, 4152. Transmission gear, 4153. External gear ring;

[0029] 42. Revolution axis;

[0030] 43. First period conversion mechanism, 431. First transmission unit, 4311. First sheave, 4312. First arc-shaped locking groove, 4313. First radial groove, 432. First dial unit, 4321. Active dial, 4322. First crank, 4323. First cylindrical pin, 4324. First driving shaft;

[0031] 44. Second period conversion mechanism, 441. Second transmission unit, 4411. Second sheave, 4412. Second radial groove, 4413. Arc-shaped locking plate, 4414. Second arc-shaped locking groove, 442. Second toggle unit, 4421. Second crank, 4422. Second cylindrical pin, 4423. Arc-shaped swing plate, 4424. Second driving shaft;

[0032] 45. Driving mechanism, 451. Base, 452. Motor, 453. Top seat, 454. First spur gear, 455. End face gear disc, 456. Second spur gear, 457. Third spur gear. DETAILED DESCRIPTION

[0033] The embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0034] In the description of the present invention, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0035] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0036] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0037] Substrate rotation generally uses a planar rotation method. This method is commonly used due to its simple structure, but it is not easy to obtain a relatively uniform coating. Planar rotation generates a centrifugal force during the rotation process, which can cause uneven growth of the inner and outer layers of the substrate. There is also the technical problem of inconsistent thickness of the diamond film grown on different substrates.

[0038] Based on the above, the embodiment of the present invention also provides a hot wire CVD diamond device, such as Figure 1 As shown, the apparatus comprises a cabinet 1, a vacuum chamber 2, and a sample position conversion assembly 4. The cabinet 1 has a storage space; the vacuum chamber 2 is vertically embedded in the storage space, and a door 3 is hingedly connected to the open end of the vacuum chamber 2. The sample stage 413 is located within the vacuum chamber 2. In the hot-filament CVD diamond apparatus provided in an embodiment of the present invention, a diamond film is grown on a substrate in a near-vacuum environment within the vacuum chamber 2, significantly improving the purity and uniformity of the diamond film.

[0039] The sample position conversion component 4 mentioned above is described below with examples;

[0040] It should be noted that, for the sake of convenience of description, the height direction of the sample position conversion component 4 is defined as the z-axis, the length direction of the sample position conversion component 4 is the x-axis, and the width direction of the sample position conversion component 4 is the y-axis. It can be understood that the coordinate system setting of the sample position conversion component 4 can be flexibly set according to specific actual needs.

[0041] In one embodiment of the sample position conversion component 4, for example Figure 2 and Figure 3As shown, the sample position conversion assembly 4 has four sample stages 413 distributed in a ring. Each sample stage 413 has two oppositely arranged supporting surfaces a and abutting surfaces b. The supporting surface a is used to support the substrate. The sample position conversion assembly 4 also includes a revolution axis 42, a turntable mechanism 41, and a drive mechanism 45. The revolution axis 42 is vertically placed along the z-axis direction and has two opposite first ends c and second ends d. The drive mechanism 45 is used to drive the revolution axis 42 to rotate. In the sample position conversion assembly 4 provided in an embodiment of the present invention, the substrates supported by the four sample stages 413 revolve around the revolution axis 42 while rotating themselves during film growth. This causes the positions of the various substrates to change alternately while also causing their own positions to change horizontally. This makes the growth of diamond films at different positions on each substrate more uniform, improves the consistency of diamond film thickness between substrates, and avoids errors in diamond film thickness between products of the same batch.

[0042] The above description describes that the substrate carried by the sample stage 413 rotates while revolving around the revolution axis 42 when growing a coating. The following is an example of the turntable mechanism 41 that realizes this function. Figure 2 As shown, the turntable mechanism 41 has a revolution table 412 that can rotate in the horizontal direction and four first rotation units 414 distributed in a ring with the axis of the revolution table 412 as the center. The revolution table 412 has two opposite first end faces e and second end faces f. The first end c of the revolution shaft 42 is synchronously rotated and connected with the axis of the second end face f. The first rotation unit 414 is used to carry the sample stage 413. The revolution table 412 can simultaneously drive the four first rotation units 414 to revolve around the revolution shaft 42 in a self-rotating manner; the turntable mechanism 41 also has an internal spur gear that can rotate relative to the revolution table 412, and the revolution table 412 is coaxially matched with the internal spur gear; each first rotation unit 414 has a spur planetary gear 4142, which is meshed with the internal spur gear; the revolution table 412 drives the spur planetary gear 4142 to rotate while performing a self-rotation movement in the opposite direction of the rotation direction of the revolution table 412. This planetary rotation design can make the thin films grown on the surfaces of each substrate more uniform.

[0043] Continue to see Figure 2 To enable the self-rotation of the spur planetary gears 4142, each of the four spur planetary gears 4142 is rotatably connected to the circumference of the first end surface e of the revolution platform 412 via a rotation shaft 4141. This spur planetary gear 4142-internal spur gear design allows the revolution platform 412 to simultaneously rotate the spur planetary gears 4142 horizontally. Simultaneously, due to the meshing connection between the spur planetary gears 4142 and the internal spur gear, the spur planetary gears 4142 drive the sample stage 413 to rotate while simultaneously orbiting.

[0044] Continue to see Figure 3 During the rotation of the sample stage 413, a centrifugal force will be generated, which will cause the inner and outer ring films on a substrate to grow unevenly to a small extent. In order to avoid this situation, the turntable mechanism 41 is equipped with a periodic conversion mechanism to realize the intermittent rotation of the turntable mechanism 41, thereby avoiding the uneven growth of the inner and outer ring films on a substrate. An example is given below to illustrate this. The sample position conversion component 4 also includes a first periodic conversion mechanism 43. The first periodic conversion mechanism 43 includes a first transmission unit 431 and a first toggle unit 432; the first transmission unit 431 includes a first groove wheel 4311 that rotates in the horizontal direction, and the axis of the first groove wheel 4311 is synchronously connected to the second end d of the revolution shaft 42, and rotates along the first groove wheel 4311. A sheave 4311 is provided with four first radial slots 4313 at equal angles along its circumference. The first shifting unit 432 comprises a horizontally rotatable first crank 4322 and a first cylindrical pin 4323 mounted at one end of the first crank 4322. A first driving shaft 4324 is mounted at the other end of the first crank 4322. The first driving shaft 4324 is vertically arranged along the z-axis, and the end of the first driving shaft 4324, distal from the first crank 4322, is synchronously rotatably connected to the drive end of the drive mechanism 45. The first driving shaft 4324 drives the first crank 4322 to rotate along its axis, causing the first cylindrical pin 4323 at the end of the first crank 4322 to disengage from or enter the first radial slot 4313. The addition of a first period conversion mechanism 43 between the turntable mechanism 41 and the drive mechanism 45 allows each sample stage 413 to have a fixed position conversion period, ensuring consistency in diamond film thickness across substrates.

[0045] Continue to see Figure 3When the first cylindrical pin 4323 disengages from the first radial groove 4313, the first groove wheel 4311 will continue to rotate under the action of its own inertia, which will cause the first cylindrical pin 4323 to fail to accurately enter the next first radial groove 4313, thereby affecting the intermittent operation. To avoid this situation, first arc-shaped locking grooves 4312 are provided along the circumferential direction of the first groove wheel 4311, the number of which is equal to the first radial grooves 4313, and are staggered with the first radial grooves 4313; an active dial 4321 that cooperates with the first arc-shaped locking groove 4312 is installed at the end of the first crank 4322 away from the first cylindrical pin 4323; when the first cylindrical pin 4323 enters the first radial groove 4313, the first arc-shaped locking groove 4312 of the first groove wheel 4311 is separated from the active dial. With such a design, before the first cylindrical pin 4323 enters the first groove wheel 4311, the active dial 4321 locks the first groove wheel 4311 through the first arc-shaped locking groove 4312, so that the first groove wheel 4311 is stationary. When the first cylindrical pin 4323 enters the first groove wheel 4311, the active dial 4321 separates from the first arc-shaped locking groove 4312, and the first cylindrical pin 4323 drives the first groove wheel 4311 to rotate through the first radial groove 4313. When the first cylindrical pin 4323 disengages from the first radial groove 4313, the active dial 4321 locks the first groove wheel 4311 through the first arc-shaped locking groove 4312, thereby making the first groove wheel 4311 stationary. Such repeated periodic position changes greatly improve the uniformity of thin film growth thickness between each substrate.

[0046] In another embodiment of the sample position conversion assembly 4, for example Figure 4 and Figure 5 As shown, the sample position conversion assembly 4 has three sample stages 413 arranged in a ring. Each sample stage 413 has two oppositely disposed supporting surfaces a and abutting surfaces b. The supporting surface a is used to support the substrate. The sample position conversion assembly 4 also includes a revolution axis 42, a turntable mechanism 41, and a drive mechanism 45. The revolution axis 42 is vertically disposed along the z-axis and has two opposite first ends c and second ends d. The drive mechanism 45 is used to drive the revolution axis 42 to rotate. In the sample position conversion assembly 4 provided in an embodiment of the present invention, the substrates supported by the three sample stages 413 revolve around the revolution axis 42 while rotating themselves during film growth. This causes the positions of the substrates to change alternately while also causing their own positions to change horizontally. This results in more uniform growth of the diamond film at different positions on each substrate, improves the consistency of the diamond film thickness between substrates, and avoids errors in the diamond film thickness between products from the same batch.

[0047] The above description describes that the substrate carried by the sample stage 413 rotates while revolving around the revolution axis 42 when growing a coating. The following is an example of the turntable mechanism 41 that realizes this function. Figure 4 As shown, the turntable mechanism 41 has a turntable 412 that can rotate in the horizontal direction and three second rotation units 415 distributed in a ring with the axis of the turntable 412 as the center. The turntable 412 has two opposite first end faces e and second end faces f. The first end c of the revolution shaft 42 is synchronously rotated and connected with the axis of the second end face f. The second rotation unit 415 is used to carry the sample stage 413. The turntable 412 can simultaneously drive the three second rotation units 415 to rotate around the revolution shaft 42 in a self-rotating manner; the turntable mechanism 41 also has an inner conical gear disk that can rotate relative to the turntable 412, and the turntable 412 is coaxially matched with the inner conical gear disk; each second rotation unit 415 has a conical planetary gear 4151, which is meshed with the inner conical gear disk; the turntable 412 drives the conical planetary gear 4151 to rotate while performing a self-rotation motion in the opposite direction of the rotation direction of the turntable 412. The purpose of selecting a bevel gear set is to achieve revolution and rotation while supporting the sample stage 413. The bevel planetary gear 4151 has two opposite large end faces g and a small end face h. The second rotation unit 415 also includes an outer gear ring 4153 and three transmission gears 4152 distributed in a ring around the axis of the revolution table 412. The inner circumference of the outer gear ring 4153 is interference fit with the outer circumference of the revolution table 412, and the outer teeth of the outer gear ring 4153 are meshed with each transmission gear 4152. One of the end faces of the transmission gear 4152 is connected to the abutment face b of the sample stage 413, and the other end face is connected to the large end face g of the bevel planetary gear 4151, and the transmission gear 4152 is coaxial with the bevel planetary gear 4151. With this design of the conical planetary gear 4151-inner conical toothed disc, the orbiting table 412 drives the outer gear ring 4153 to drive the transmission gear 4152 to rotate while driving the conical planetary gear 4151 to rotate in the horizontal direction. At the same time, since the conical planetary gear 4151 is meshed with the inner conical toothed disc, the conical planetary gear 4151 drives the sample table 413 to rotate while revolving.

[0048] Continue to see Figure 5, a centrifugal force is generated during the rotation of the sample stage 413, which causes the inner and outer ring films on a substrate to grow unevenly to a small extent. In order to avoid this situation, the turntable mechanism 41 is configured with a periodic conversion mechanism to realize the intermittent rotation of the turntable mechanism 41, thereby avoiding the uneven growth of the inner and outer ring films on a substrate. An example is given below to illustrate this. The sample position conversion component 4 also includes a second periodic conversion mechanism 44, and the second periodic conversion mechanism 44 includes a second transmission unit 441 and a second toggle unit 442; the second transmission unit 441 includes a second groove wheel 4411 that rotates in the horizontal direction, and the axis of the second groove wheel 4411 is synchronously connected to the second end d of the revolution shaft 42, and rotates along the first Three second radial slots 4412 are formed at equal angles along the circumference of the second sheave 4411. The second shifting unit 442 comprises a horizontally rotatable second crank 4421 and a second cylindrical pin 4422 mounted at one end of the second crank 4421. A second driving shaft 4424 is mounted at the other end of the second crank 4421. The second driving shaft 4424 is vertically arranged along the z-axis, and the end of the second driving shaft 4424, remote from the second crank 4421, is synchronously rotatably connected to the drive end of the drive mechanism 45. The second driving shaft 4424 drives the second crank 4421 to rotate along its axis, causing the second cylindrical pin 4422 at the end of the second crank 4421 to disengage from or enter the second radial slot 4412. The addition of a second period conversion mechanism 44 between the turntable mechanism 41 and the drive mechanism 45 allows each sample stage 413 to have a fixed position conversion period, ensuring consistency in diamond film thickness across substrates.

[0049] Continue to see Figure 5When the second cylindrical pin 4422 disengages from the second radial groove 4412, the second groove wheel 4411 will continue to rotate under the action of its own inertia, which will cause the second cylindrical pin 4422 to fail to accurately enter the next second radial groove 4412, thereby affecting the intermittent operation. In order to avoid this situation, second arc-shaped locking grooves 4414 equal in number to the second radial grooves 4412 are provided along the circumferential direction of the second groove wheel 4411, and are staggered with the second radial grooves 4412; an arc-shaped swinging plate 4423 cooperating with the second arc-shaped locking groove 4414 is installed at the end of the second crank 4421 away from the second cylindrical pin 4422; when the second cylindrical pin 4422 enters the second radial groove 4412, the second arc-shaped locking groove 4414 of the second groove wheel 4411 is separated from the arc-shaped swinging plate 4423. With such design, before the second cylindrical pin 4422 enters the second groove wheel 4411, the arc-shaped swing plate 4423 locks the second groove wheel 4411 through the second arc-shaped locking groove 4414, so that the second groove wheel 4411 is stationary. When the second cylindrical pin 4422 enters the second groove wheel 4411, the arc-shaped swing plate 4423 separates from the second arc-shaped locking groove 4414, and the second cylindrical pin 4422 drives the second groove wheel 4411 to rotate through the second radial groove 4412. When the second cylindrical pin 4422 disengages from the second radial groove 4412, the arc-shaped swing plate 4423 locks the second groove wheel 4411 through the second arc-shaped locking groove 4414, thereby making the second groove wheel 4411 stationary. Such repeated periodic position changes greatly improve the uniformity of film growth thickness between each substrate.

[0050] The following is an example of the driving mechanism 45 mentioned in two embodiments of the sample position conversion assembly 4; Figure 3 As shown, the drive mechanism 45 includes a motor 452 arranged in the horizontal direction. The output end of the motor 452 is equipped with a first spur gear 454. The first spur gear 454 drives the revolving shaft 42 to rotate through the gear set. With this design, the motor 452 drives the revolving shaft 42 to rotate through the gear set. The gear set is described in detail below. The drive mechanism 45 also includes a base 451. The gear set includes a horizontally arranged end face gear disc 455 and a third spur gear 457 parallel to the end face gear disc 455. The end face gear disc 455 and the third spur gear 457 are both rotatably connected to the base 451. The end face gear disc 455 is meshed with the first spur gear 454. The end face gear disc 455 is coaxially equipped with a second spur gear 456 along the z-axis direction. The second spur gear 456 is meshed with the third spur gear 457. A top seat 453 is provided above the gear set to prevent foreign matter from entering the gear set. The transmission through multiple gears improves the stability of operation.

[0051] In the description of this specification, specific features, structures, materials or characteristics may be combined in an appropriate manner in any one or more embodiments or examples.

[0052] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any modifications or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included in the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A sample position conversion assembly having a plurality of sample stages distributed in an annular pattern, each of the sample stages having two oppositely disposed carrying surfaces and an abutting surface, wherein the carrying surfaces are used to carry a substrate, characterized in that: Also includes: An orbital axis is vertically disposed along the z-axis direction, and has two opposite first and second ends; A turntable mechanism comprising a horizontally rotatable revolution platform and a plurality of rotation units arranged in a ring around the axis of the revolution platform, wherein the revolution platform has two opposing first and second end surfaces, the first end of the revolution axis being synchronously rotatably connected to the axis of the second end surface, the rotation units being used to carry the sample stage, and the revolution platform being capable of simultaneously driving the plurality of rotation units to revolve around the revolution axis in a self-rotating manner; A driving mechanism, which is used to drive the above-mentioned revolution shaft to rotate; A period conversion mechanism, comprising a transmission unit and a toggle unit; The transmission unit includes a sheave that rotates in the horizontal direction, wherein the axis of the sheave is synchronously connected to the second end of the revolution shaft, and a plurality of radial grooves are provided at equal angles along the circumference of the sheave; The toggle unit has a crank that can rotate in the horizontal direction and a cylindrical pin installed at one end of the crank. The other end of the crank is installed with a driving shaft, which is vertically arranged along the z-axis direction. The end of the driving shaft away from the crank is synchronously connected to the driving end of the driving mechanism. The driving shaft drives the crank to rotate along the axis of the driving shaft so that the cylindrical pin at the end of the crank disengages from or enters the radial groove; Arc-shaped locking grooves are provided along the circumferential direction of the sheave, the number of which is equal to the number of radial grooves, and are staggered with the radial grooves; An active dial or an arc-shaped swing plate that matches the arc-shaped locking groove is installed at one end of the crank away from the cylindrical pin; When the cylindrical pin enters the radial groove, the arc-shaped locking groove of the groove wheel is separated from the active dial or the arc-shaped swing plate.

2. The sample position conversion assembly according to claim 1, characterized in that: The turntable mechanism further comprises an inner gear disc which can rotate relative to the revolution table, and the revolution table and the inner gear disc are coaxially matched; Each of the rotation units has a planetary gear, and the planetary gear is meshed with the internal gear disc; The revolution table drives the planetary gear to rotate around the revolution axis while performing a rotation motion in the opposite direction to the rotation direction of the revolution table.

3. The sample position conversion assembly according to claim 2, characterized in that: The inner gear disc is an inner conical gear disc; The rotation unit is a second rotation unit, and the planetary gear is a bevel planetary gear. The bevel planetary gear has two opposite large end faces and a small end face. The second rotation unit also includes an outer gear ring and a plurality of transmission gears distributed in a ring with the axis of the revolution table as the center. The inner circumference of the outer gear ring is interference fit with the outer circumference of the revolution table, and the outer teeth of the outer gear ring are meshed with each of the transmission gears. One of the end faces of the transmission gear is connected to the abutment surface of the sample table, and the other end face is connected to the large end face of the bevel planetary gear, and the transmission gear is coaxial with the bevel planetary gear.

4. The sample position conversion assembly according to claim 1, characterized in that: The number of the radial grooves is 3 or 4.

5. The sample position conversion assembly according to claim 1, characterized in that: The driving mechanism includes a motor arranged in a horizontal direction, an output end of the motor is installed with a first spur gear, and the first spur gear drives the revolution shaft to rotate through a gear set.

6. The sample position conversion assembly according to claim 5, characterized in that: The driving mechanism also includes a base, and the gear set includes an end face toothed disc arranged in a horizontal direction and a third spur gear parallel to the end face toothed disc. The end face toothed disc and the third spur gear are both rotatably connected to the base, and the end face toothed disc is meshed with the first spur gear. The end face toothed disc is coaxially mounted with a second spur gear along the z-axis direction, and the second spur gear is meshed with the third spur gear.

7. A hot-filament CVD diamond device comprising the sample position conversion assembly according to any one of claims 1 to 6, characterized in that: Also includes: A cabinet, wherein the cabinet has a storage space; A vacuum cavity is vertically embedded in the accommodating space, an open end of the vacuum cavity is hinged with a door, and the sample stage is located in the vacuum cavity.

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