An etching time estimation device and method for a swing plate flat bridge

Abstract

The application provides an etching time estimation device and method for a swing plate flat bridge, which comprises a fixing assembly, a thrust loading unit, a first pressure collecting unit and a data processing unit; the fixing assembly comprises a base and a first fixing seat for fixing a swing plate and a second fixing seat for fixing the thrust loading unit, which are arranged on the base respectively; the thrust loading unit comprises an open shell and a slider and a servo motor arranged in the shell; the servo motor is used to push the slider to slide from a first preset position to a second preset position; the first end of the first pressure collecting unit is connected with the second end of the slider, and the second end is in contact with the center swing of the swing plate; the first pressure collecting unit is used to collect a pressure value when the slider is in the second preset position; and the data processing unit is used to obtain the etching time of the swing plate flat bridge according to the pressure value. The application can solve the technical problems of long time consumption and poor measurement accuracy of the swing plate flat bridge etching method in the prior art.

Description

Technical Field

[0001] This invention relates to the field of accelerometer component technology, and in particular to an etching time estimation device and method for a pendulum bridge. Background Technology

[0002] Two torque converter coils are symmetrically mounted on both sides of the quartz pendulum of the accelerometer to form a pendulum assembly, used to sense external acceleration. The thickness of the flexible bridge of the pendulum directly affects the accelerometer bias. Different types of accelerometers have different biases, corresponding to a certain range of pendulum bridge thickness. The level of control over the consistency of the pendulum bridge thickness determines the bias range of batch products. Therefore, the etching time needs to be evaluated before pendulum etching, and the bridge thickness needs to be measured before the bridge reaches the target thickness to determine the remaining etching time, thereby ensuring the range of pendulum bridge thickness during batch production.

[0003] Currently, the majority of steps in the oscillating etching process rely on manual labor. The consistency of the flat bridge thickness is highly dependent on the operator's experience, and the thickness measurement needs to be performed on a piece-by-piece basis. This mainly relies on measuring the sag of the central pendulum of a horizontally placed quartz piece, and then calculating the remaining etching time for the flat bridge using a conversion formula. However, since the flat bridge is only 20μm thick, the central pendulum is prone to wobbling after the oscillating piece is placed horizontally, making accurate measurement of the central pendulum position difficult and time-consuming. Furthermore, measuring the sag of the central pendulum using a horizontal placement method is significantly affected by the consistency of the central pendulum's dimensions. Therefore, there is an urgent need to improve the existing method for measuring the etching thickness of the oscillating flat bridge to enhance the control level of the flat bridge thickness and improve production quality. Summary of the Invention

[0004] This invention provides an etching time estimation device and method for a swivel bridge, which can solve the technical problems of long etching time and poor measurement accuracy in the existing swivel bridge etching method.

[0005] According to one aspect of the present invention, an etching time estimation device for a planar bridge is provided, the device comprising a fixing component, a thrust loading unit, a first pressure acquisition unit, and a data processing unit;

[0006] The fixing component includes a base and a first fixing seat and a second fixing seat respectively disposed on the base. The first fixing seat is used to fix the swing plate, and the second fixing seat is used to fix the thrust loading unit.

[0007] The thrust loading unit includes a housing with an open side and a slider and a servo motor disposed within the housing; the push rod of the servo motor is connected to the first end of the slider, and the servo motor is used to push the slider so that the slider slides from a first preset position to a second preset position. When the slider is in the first preset position, the central pendulum of the pendulum and the outer ring are in the same plane; when the slider is in the second preset position, the central pendulum of the pendulum and the outer ring are in different planes.

[0008] The first end of the first pressure acquisition unit is connected to the second end of the slider, and the second end is in contact with the center pendulum of the pendulum. The first pressure acquisition unit moves toward the pendulum under the action of the slider, thereby pushing the center pendulum of the pendulum away from the plane of the outer ring of the pendulum, in order to acquire the pressure value when the slider is in the second preset position.

[0009] The data processing unit is used to obtain the etching time of the pendulum bridge based on the pressure value.

[0010] Preferably, the thrust loading unit further includes a first limiting structure and a second limiting structure; the first limiting structure is disposed on the open side end face of the housing; the second limiting structure is disposed inside the housing and is located between the slider and the servo motor; the slider can slide between the first limiting structure and the second limiting structure; the first preset position is the position where the first end of the slider contacts the second limiting structure, and the second preset position is the position where the second end of the slider contacts the first limiting structure.

[0011] Preferably, the device further includes a second pressure acquisition unit, which is disposed on the second end face of the first limiting structure facing the slider.

[0012] Preferably, the second pressure acquisition unit includes multiple thin-film pressure sensors, which are evenly distributed circumferentially on the second end face of the first limiting structure facing the slider. All the thin-film pressure sensors are connected to the data processing unit. When all the thin-film pressure sensors reach a preset pressure, the data processing unit is also used to control the servo motor to stop pushing the slider.

[0013] Preferably, the device further includes a thickness acquisition unit and a time acquisition unit; the thickness acquisition unit is used to acquire the initial flat bridge thickness of multiple flat bridge pieces with different flat bridge thicknesses; the first pressure acquisition unit is also used to acquire the pressure values ​​corresponding to the multiple flat bridge pieces with different flat bridge thicknesses when the slider is in the second preset position; the time acquisition unit is used to acquire the etching time corresponding to the etching of the multiple flat bridge pieces with different flat bridge thicknesses to the preset thickness; the data processing unit is also used to acquire the correspondence between each pressure value acquired by the first pressure acquisition unit and each etching time acquired by the time acquisition unit.

[0014] Preferably, the first fixing base is U-shaped, including a base plate and a first cantilever and a second cantilever spaced apart on the base plate. The first cantilever and the second cantilever are parallel to each other. The distance between the first cantilever and the second cantilever is greater than the central pendulum diameter of the pendulum and less than the outer diameter of the outer ring of the pendulum. The first fixing base is provided with a blind groove that connects the first cantilever, the base plate and the second cantilever. The pendulum is disposed in the blind groove.

[0015] Preferably, the first fixing seat further includes a fixing plunger, the first cantilever and the second cantilever are respectively provided with through holes, and the outer ring of the swing plate is respectively provided with bosses at positions corresponding to the through holes. Each boss is provided with a connecting hole, and the fixing plunger passes through the through holes and the connecting holes to fix the swing plate.

[0016] Preferably, the second end of the slider has a protrusion, the first end of the first pressure acquisition unit is connected to the protrusion, and the protrusion can extend from the open side of the housing during the sliding of the slider.

[0017] Preferably, the central axis of the slider is parallel to the central axis of the housing, and the slider slides along its own central axis; the sensitive axis of the first pressure acquisition unit is parallel to the central axis of the housing; and the central axis of the push rod of the servo motor is parallel to the central axis of the housing.

[0018] According to another aspect of the present invention, a method for estimating the etching time of a planar bridge is provided, the method employing any of the aforementioned apparatus for estimation, specifically comprising:

[0019] The outer ring of the pendulum to be measured is fixed on the first fixed base, the center pendulum of the pendulum is in the same plane as the outer ring, the slider is in the first preset position, and the second end of the first pressure acquisition unit is in contact with the center pendulum of the pendulum.

[0020] The servo motor pusher pushes the slider to move toward the pendulum plate. The first pressure acquisition unit also moves toward the pendulum plate under the action of the slider, thereby pushing the center of the pendulum plate to deviate from the plane where the outer ring of the pendulum plate is located.

[0021] When the slider moves to the second preset position, the pressure value of the first pressure acquisition unit is acquired;

[0022] The data processing unit obtains the etching time of the swing plate bridge based on the pressure value of the first pressure acquisition unit and the correspondence between the pressure value and the etching time.

[0023] By applying the technical solution of this invention, the problem of estimating the etching time of the pendulum bridge is transformed into the problem of measuring the pressure value of the pendulum, thereby realizing automated operation.

[0024] Compared with the prior art, the present invention has the following beneficial effects:

[0025] 1. The process is simple, highly repeatable, and can be automated by adding automated equipment;

[0026] 2. Significantly improved operational efficiency, enhanced measurement consistency, and reduced production labor costs. Attached Figure Description

[0027] The accompanying drawings, which form part of this specification, are provided to further illustrate embodiments of the invention and, together with the textual description, explain the principles of the invention. It is obvious that the drawings described below are merely some embodiments of the invention, and those skilled in the art can obtain other drawings based on these drawings without any creative effort.

[0028] Figure 1 A schematic diagram of an etching time estimation device for a planar bridge according to an embodiment of the present invention is shown.

[0029] Figure 2 It shows Figure 1 Side view of the fixing components of the etching time estimation device used for the plate-mounted bridge;

[0030] Figure 3 It shows Figure 1 A front view of the fixing components of the etching time estimation device used for the plate-mounted bridge;

[0031] Figure 4 It shows Figure 1 An enlarged schematic diagram of the thrust loading unit, the first pressure acquisition unit, and the data processing unit of the etching time estimation device used for the plate-mounted flat bridge.

[0032] The above figures include the following reference numerals:

[0033] 10. Fixing component; 11. Base; 12. First fixing seat;

[0034] 121. Base plate; 122. First cantilever; 123. Second cantilever;

[0035] 124. Fixed plunger; 13. Second fixed seat;

[0036] 20. Thrust loading unit; 21. Housing; 22. Slider;

[0037] 23. Servo motor; 231. Follow rod; 232. Motor body;

[0038] 24. First limiting structure; 25. Second limiting structure;

[0039] 30. First pressure acquisition unit; 40. Data processing unit;

[0040] 50. Pendulum; 51. Central pendulum; 52. Outer ring; 53. Flat bridge;

[0041] 60. Second pressure acquisition unit. Detailed Implementation

[0042] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the present invention or its application or use. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0043] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0044] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following figures denote similar items; therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0045] like Figures 1-4 As shown, the present invention provides an etching time estimation device for a planar bridge, the device comprising a fixing component 10, a thrust loading unit 20, a first pressure acquisition unit 30, and a data processing unit 40;

[0046] The fixing component 10 includes a base 11 and a first fixing seat 12 and a second fixing seat 13 respectively disposed on the base 11. The first fixing seat 12 is used to fix the swing plate 50, and the second fixing seat 13 is used to fix the thrust loading unit 20.

[0047] The thrust loading unit 20 includes a housing 21 with one open side and a slider 22 and a servo motor 23 disposed within the housing 21. The push rod 231 of the servo motor is connected to the first end of the slider 22. The servo motor 23 is used to push the slider 22 so that the slider 22 slides from a first preset position to a second preset position. When the slider 22 is in the first preset position, the center pendulum 51 and the outer ring 52 of the pendulum plate are in the same plane. When the slider 22 is in the second preset position, the center pendulum 51 and the outer ring 52 of the pendulum plate 50 are in different planes.

[0048] The first end of the first pressure acquisition unit 30 is connected to the second end of the slider 22, and the second end is in contact with the center pendulum 51 of the pendulum plate. The first pressure acquisition unit 30 moves toward the pendulum plate 50 under the action of the slider 22, thereby pushing the center pendulum plate 51 of the pendulum plate away from the plane where the outer ring 52 of the pendulum plate is located, in order to acquire the pressure value when the slider 22 is in the second preset position.

[0049] The data processing unit 40 is used to obtain the etching time of the pendulum bridge 53 based on the pressure value.

[0050] This invention transforms the problem of estimating the etching time of the pendulum bridge 53 into the problem of measuring the pressure value of the pendulum 50, thereby achieving automated operation. Compared with the prior art, this invention has the following advantages: 1. The process is simple, highly repeatable, and can be automated by adding automated equipment; 2. It significantly improves operating efficiency, enhances measurement consistency, and reduces production labor costs.

[0051] According to an embodiment of the present invention, the device further includes a thickness acquisition unit and a time acquisition unit; the thickness acquisition unit is used to acquire the initial flat bridge thickness of a plurality of flat bridge pieces with different flat bridge thicknesses; the first pressure acquisition unit 30 is further used to acquire the pressure values ​​corresponding to the plurality of flat bridge pieces 50 with different flat bridge thicknesses when the slider 22 is in the second preset position; the time acquisition unit is used to acquire the etching time corresponding to the plurality of flat bridge pieces 50 being etched to the preset thickness; the data processing unit 40 is further used to acquire the correspondence between each pressure value acquired by the first pressure acquisition unit 30 and each etching time acquired by the time acquisition unit.

[0052] Through the above settings, the correspondence between pressure value and etching time was obtained. In subsequent measurement processes, the etching time of the pendulum bridge 53 can be obtained simply by using the currently collected pressure value and the corresponding relationship.

[0053] According to one embodiment of the present invention, such as Figure 2 As shown, in order to allow the central pendulum 51 of the pendulum to have swing space, the first fixing seat 12 is U-shaped, including a base plate 121 and a first cantilever 122 and a second cantilever 123 spaced apart on the base plate 121. The first cantilever 122 and the second cantilever 123 are parallel to each other. The distance between the first cantilever 122 and the second cantilever 123 is greater than the diameter of the central pendulum 51 of the pendulum and smaller than the outer diameter of the outer ring 52 of the pendulum. The first fixing seat 12 is provided with a blind groove that connects the first cantilever 122, the base plate 121 and the second cantilever 123. The pendulum 50 is disposed in the blind groove.

[0054] Specifically, the width of the first fixed seat 12 is 1 mm to 4 mm larger than the outer diameter of the outer ring 52 of the swing plate, and the width of the blind groove is 0.1 mm to 0.5 mm larger than the thickness of the outer ring 52 of the swing plate.

[0055] According to one embodiment of the present invention, such as Figure 2As shown, in order to better fix the swing plate 50, the first fixing seat 12 also includes a fixing plunger 124. The first cantilever 122 and the second cantilever 123 are respectively provided with through holes. The outer ring 52 of the swing plate is respectively provided with a boss at the position corresponding to the through hole. Each boss is provided with a connecting hole. The fixing plunger 124 passes through the through hole and the connecting hole to fix the swing plate 50.

[0056] Specifically, the first cantilever 122 and the second cantilever 123 are parallel to each other and both perpendicular to the base plate 121, so as to facilitate the installation of the swing plate 50.

[0057] The elastic end of the fixed plunger 124 is 0.2 mm to 0.8 mm away from the other end of the blind groove.

[0058] According to one embodiment of the present invention, such as Figure 3 As shown, the first fixed seat 12 is bolted to the base 11, and the second fixed seat 13 is bolted to the base 11. The thrust loading unit 20 is also bolted to the second fixed seat 13.

[0059] According to one embodiment of the present invention, such as Figure 4 As shown, to prevent the slider 22 from sliding out from the open side of the housing 21, the thrust loading unit 20 further includes a first limiting structure 24 and a second limiting structure 25; the first limiting structure 24 is disposed on the open side end face of the housing 21; the second limiting structure 25 is disposed inside the housing 21 and is located between the slider 22 and the servo motor 23; the slider 22 can slide between the first limiting structure 24 and the second limiting structure 25; the first preset position is the position where the first end of the slider 22 contacts the second limiting structure 25, and the second preset position is the position where the second end of the slider 22 contacts the first limiting structure 24.

[0060] Specifically, the first limiting structure 24 can be an annular seal, which is fixedly connected to the housing 21 by screws. The second limiting structure 25 can be an annular boss integral with the housing 21. The distance between the annular seal and the annular boss is determined according to requirements. Generally, the distance between the annular seal and the annular boss should be greater than 10mm.

[0061] The servo motor 23 includes a motor body 232 and a push rod 231. The motor body 232 is fixedly connected to the housing 21 by screws, and the push rod 231 is connected to the motor body 232. The maximum thrust of the servo motor 23 is not higher than 50N, and the range of movement of the push rod 231 should be greater than the range of free axial movement of the slider 22.

[0062] According to one embodiment of the present invention, such as Figure 4As shown, in order to enable the slider 22 to stop in time after reaching the second preset position, the device also includes a second pressure acquisition unit 60, which is disposed on the second end face of the first limiting structure 24 facing the slider 22.

[0063] Specifically, the second pressure acquisition unit 60 includes a plurality of thin-film pressure sensors, which are evenly distributed circumferentially on the second end face of the first limiting structure 24 facing the slider 22. The plurality of thin-film pressure sensors are all connected to the data processing unit 40. When the plurality of thin-film pressure sensors reach the preset pressure, the data processing unit 40 is also used to control the servo motor 23 to stop pushing the slider 22.

[0064] The diaphragm pressure sensor has a minimum range greater than 50N and a measurement accuracy better than 0.3N. The preset pressure can be set to 10N.

[0065] According to one embodiment of the present invention, the second end of the slider 22 has a protrusion, the first end of the first pressure acquisition unit 30 is connected to the protrusion, and the protrusion can extend from the open side of the housing 21 during the sliding of the slider 22.

[0066] Specifically, the first pressure acquisition unit 30 is connected to the protrusion by screws.

[0067] According to one embodiment of the present invention, in order to improve the accuracy of the first pressure acquisition unit 30, the central axis of the slider 22 is parallel to the central axis of the housing 21, and the slider 22 slides along its own central axis; the sensitive axis of the first pressure acquisition unit 30 is parallel to the central axis of the housing 21; the central axis of the push rod 231 of the servo motor is parallel to the central axis of the housing 21. The minimum range of the first pressure acquisition unit 30 is better than 0.01 gf, and its accuracy is better than 0.001 gf.

[0068] The present invention also provides a method for estimating the etching time of a planar bridge, wherein the method uses any of the above-described devices for estimation, specifically including:

[0069] S10. Fix the outer ring 52 of the pendulum to be measured on the first fixed base 12, place the center pendulum 51 of the pendulum and the outer ring 52 on the same plane, place the slider 22 in the first preset position, and put the second end of the first pressure acquisition unit 30 into contact with the center pendulum 51 of the pendulum.

[0070] S20. The push rod 231 of the servo motor pushes the slider 22 to move toward the swing plate 50. The first pressure acquisition unit 30 also moves toward the swing plate 50 under the drive of the slider 22, thereby pushing the center swing 51 of the swing plate to deviate from the plane where the outer ring 52 of the swing plate is located.

[0071] S30. When the slider 22 moves to the second preset position, the pressure value of the first pressure acquisition unit 30 is acquired.

[0072] S40, the data processing unit 40 obtains the etching time of the swing plate flat bridge 53 according to the pressure value of the first pressure acquisition unit 30 and the correspondence between the pressure value and the etching time.

[0073] This invention transforms the problem of estimating the etching time of the pendulum bridge 53 into the problem of measuring the pressure value of the pendulum 50, thereby achieving automated operation. Compared with the prior art, this invention has the following advantages: 1. The process is simple, highly repeatable, and can be automated by adding automated equipment; 2. It significantly improves operating efficiency, enhances measurement consistency, and reduces production labor costs.

[0074] According to one embodiment of the present invention, in S40 of the present invention, obtaining the correspondence between pressure value and etching time includes:

[0075] S41. Obtain the initial flat bridge thickness of multiple flat bridge pieces 50 with different flat bridge thicknesses;

[0076] S42. Fix the outer ring 52 of the current pendulum to the first fixed base 12, place the center pendulum 51 of the pendulum and the outer ring 52 on the same plane, place the slider 22 in the first preset position, and put the second end of the first pressure acquisition unit 30 into contact with the center pendulum 51 of the pendulum.

[0077] S43. The push rod 231 of the servo motor pushes the slider 22 to move toward the swing plate 50. The first pressure acquisition unit 30 also moves toward the swing plate 50 under the drive of the slider 22, thereby pushing the center swing 51 of the swing plate to deviate from the plane where the outer ring 52 of the swing plate is located.

[0078] S44. When the slider 22 moves to the second preset position, the pressure value of the first pressure acquisition unit 30 is acquired;

[0079] S45. Repeat S42-S44 until the pressure values ​​of all pendulums 50 are obtained;

[0080] S46. Obtain the etching time corresponding to the etching of multiple flat bridge plates 50 with different thicknesses to a preset thickness;

[0081] S47. Obtain the relationship between pressure value and etching time based on the pressure value and etching time of all the pendulum plates.

[0082] The estimation method of this invention can effectively improve product accuracy, increase product assembly yield, reduce component waste, and save production costs.

[0083] In summary, this invention provides an etching time estimation device and method for a swivel bridge, transforming the problem of estimating the etching time of the swivel bridge into the problem of measuring the pressure value of the swivel 50, thereby achieving automated operation. Compared with the prior art, this invention has the following advantages: 1. The process is simple, highly repeatable, and can be automated by adding automated equipment; 2. It significantly improves operating efficiency, enhances measurement consistency, and reduces production labor costs.

[0084] The parts of this invention not described in detail are techniques known to those skilled in the art.

[0085] In the description of this invention, it should be understood that the orientation or positional relationship indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" is generally based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this invention and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this invention; the directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0086] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0087] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore should not be construed as limiting the scope of protection of this invention.

[0088] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. An etching time estimation device for a planar bridge, characterized in that, The device includes a fixing component, a thrust loading unit, a first pressure acquisition unit, and a data processing unit; The fixing component includes a base and a first fixing seat and a second fixing seat respectively disposed on the base. The first fixing seat is used to fix the swing plate, and the second fixing seat is used to fix the thrust loading unit. The thrust loading unit includes a housing with an open side and a slider and a servo motor disposed within the housing; the push rod of the servo motor is connected to the first end of the slider, and the servo motor is used to push the slider so that the slider slides from a first preset position to a second preset position. When the slider is in the first preset position, the central pendulum of the pendulum and the outer ring are in the same plane; when the slider is in the second preset position, the central pendulum of the pendulum and the outer ring are in different planes. The first end of the first pressure acquisition unit is connected to the second end of the slider, and the second end is in contact with the center pendulum of the pendulum. The first pressure acquisition unit moves toward the pendulum under the action of the slider, thereby pushing the center pendulum of the pendulum away from the plane of the outer ring of the pendulum, in order to acquire the pressure value when the slider is in the second preset position. The data processing unit is used to obtain the etching time of the pendulum bridge based on the pressure value; The device further includes a thickness acquisition unit and a time acquisition unit; the thickness acquisition unit is used to acquire the initial flat bridge thickness of multiple flat bridge plates with different thicknesses; the first pressure acquisition unit is also used to acquire the pressure values ​​corresponding to the multiple flat bridge plates with different thicknesses when the slider is in the second preset position; the time acquisition unit is used to acquire the etching time corresponding to the etching of the multiple flat bridge plates with different thicknesses to the preset thickness; the data processing unit is also used to acquire the correspondence between each pressure value acquired by the first pressure acquisition unit and each etching time acquired by the time acquisition unit.

2. The apparatus according to claim 1, characterized in that, The thrust loading unit further includes a first limiting structure and a second limiting structure; the first limiting structure is disposed on the open side end face of the housing; the second limiting structure is disposed inside the housing and is located between the slider and the servo motor; the slider can slide between the first limiting structure and the second limiting structure; the first preset position is the position where the first end of the slider contacts the second limiting structure, and the second preset position is the position where the second end of the slider contacts the first limiting structure.

3. The apparatus according to claim 2, characterized in that, The device further includes a second pressure acquisition unit, which is disposed on the second end face of the first limiting structure facing the slider.

4. The apparatus according to claim 3, characterized in that, The second pressure acquisition unit includes multiple thin-film pressure sensors, which are evenly distributed circumferentially on the second end face of the first limiting structure facing the slider. All the thin-film pressure sensors are connected to the data processing unit. When all the thin-film pressure sensors reach the preset pressure, the data processing unit is also used to control the servo motor to stop pushing the slider.

5. The apparatus according to claim 1 or 2, characterized in that, The first fixing base is U-shaped and includes a base plate and a first cantilever and a second cantilever spaced apart on the base plate. The first cantilever and the second cantilever are parallel to each other. The distance between the first cantilever and the second cantilever is greater than the central pendulum diameter of the pendulum and less than the outer diameter of the outer ring of the pendulum. The first fixing base is provided with a blind groove that connects the first cantilever, the base plate and the second cantilever. The pendulum is disposed in the blind groove.

6. The apparatus according to claim 5, characterized in that, The first fixing seat also includes a fixing plunger. The first cantilever and the second cantilever are respectively provided with through holes. The outer ring of the swing plate is respectively provided with a boss at a position corresponding to the through hole. Each boss is provided with a connecting hole. The fixing plunger passes through the through hole and the connecting hole to fix the swing plate.

7. The apparatus according to claim 1 or 2, characterized in that, The second end of the slider has a protrusion, the first end of the first pressure acquisition unit is connected to the protrusion, and the protrusion can extend from the open side of the housing during the sliding of the slider.

8. The apparatus according to claim 1 or 2, characterized in that, The central axis of the slider is parallel to the central axis of the housing, and the slider slides along its own central axis; the sensitive axis of the first pressure acquisition unit is parallel to the central axis of the housing; the central axis of the push rod of the servo motor is parallel to the central axis of the housing.

9. A method for estimating etching time for a planar bridge, characterized in that, The method uses the apparatus described in any one of claims 1-8 for estimation, specifically including: The outer ring of the pendulum to be measured is fixed on the first fixed base, the center pendulum of the pendulum is in the same plane as the outer ring, the slider is in the first preset position, and the second end of the first pressure acquisition unit is in contact with the center pendulum of the pendulum. The servo motor pusher pushes the slider to move toward the pendulum plate. The first pressure acquisition unit also moves toward the pendulum plate under the action of the slider, thereby pushing the center of the pendulum plate to deviate from the plane where the outer ring of the pendulum plate is located. When the slider moves to the second preset position, the pressure value of the first pressure acquisition unit is acquired; The data processing unit obtains the etching time of the swing plate bridge based on the pressure value of the first pressure acquisition unit and the correspondence between the pressure value and the etching time.

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