Etching liquid formulation detection data processing system

Abstract

This invention relates to the field of etching solution production technology, and provides an etching solution preparation and testing data processing system, comprising: an etching solution raw material weighing device, a stirring device, a transport device, and an industrial computer; the etching solution raw material weighing device includes a support frame, a raw material tank, a weighing tank, a weighing sensor, a first conveying pipe, a second conveying pipe, a first electrically controlled valve, and a second electrically controlled valve; multiple etching solution raw material weighing devices are present, and the first electrically controlled valve, the second electrically controlled valve, and the weighing sensor are all electrically connected to the industrial computer; the stirring device includes a lifting drive assembly, a lifting base, a stirring drive assembly, and a stirring shaft; the transport device includes a base, a conveyor belt, and a container. The advantages of this invention are: automatic preparation of etching solutions with different raw material ratios, multiple containers sequentially passing through the receiving area to batch prepare the etching solution, and then transporting it to the etching solution testing area, thus improving the efficiency of etching solution preparation.

Description

Technical Field

[0001] This invention relates to the field of etching solution production technology, and more specifically to an etching solution preparation and testing data processing system. Background Technology

[0002] In the TFT panel industry, etching is an indispensable process, and wet etching has been widely used for a long time due to its advantages such as fast etching speed, high selectivity, and simple process. Wet etching is a process in which the target material is etched away by a chemical reaction between the target material and the etching solution.

[0003] Etching solutions include acidic copper chloride, basic copper chloride, ferric chloride, ammonium persulfate, sulfuric acid / chromic acid, and sulfuric acid / hydrogen peroxide etching solutions. To achieve the desired etching effect, such as depending on the object being etched or the etching speed, the etching solution needs to be formulated.

[0004] Traditionally, researchers manually adjust the weight of raw materials in test tubes to prepare etching solutions based on existing solutions; or they add new materials or replace old ones. When the types and weights of raw materials change, the actual etching effect also changes. To test the etching effect and confirm the required etching solution, multiple solutions with different proportions of raw materials need to be prepared. Manually mixing the materials in test tubes one by one is extremely inefficient.

[0005] Therefore, how to improve the efficiency of preparing etching solutions is a technical problem that urgently needs to be solved in this field. Summary of the Invention

[0006] The technical problem to be solved by the present invention is to provide an etching solution preparation and detection data processing system to improve the efficiency of etching solution preparation.

[0007] This invention is implemented as follows: an etching solution preparation and detection data processing system, comprising:

[0008] Etching solution raw material weighing device, stirring device, conveying device, and industrial computer;

[0009] The etching solution raw material weighing device includes a support frame, a raw material tank, a weighing tank, a weighing sensor, a first conveying pipe, a second conveying pipe, a first electrically controlled valve, and a second electrically controlled valve. The raw material tank is fixedly installed on the top of the support frame. The outlet of the raw material tank is fixedly connected to the upper end of the first conveying pipe. The first conveying pipe is equipped with a first electrically controlled valve. The lower end of the first conveying pipe is aligned with the inlet of the weighing tank. The weighing tank is placed at the detection end of the weighing sensor. The weighing sensor is fixedly installed in the middle of the support frame. The outlet of the weighing tank is connected to the upper end of the second conveying pipe. The second conveying pipe is equipped with a second electrically controlled valve. The lower end of the second conveying pipe is fixedly connected to the bottom of the support frame.

[0010] The etching solution raw material weighing device has multiple components, and the first electrically controlled valve, the second electrically controlled valve, and the weighing sensor are all electrically connected to the industrial computer.

[0011] The stirring device includes a lifting drive assembly, a lifting base, a stirring drive assembly, and a stirring shaft. The lifting base is connected to the support frame through the lifting drive assembly, and the stirring shaft is connected to the lifting base through the stirring drive assembly.

[0012] The transport device includes a base, a conveyor belt, and a container. The base is fixedly connected to the conveyor belt, and multiple bases are arranged at intervals along the length of the conveyor belt. Each base has a groove, and the container is placed in the groove.

[0013] The second feed pipe and the area below the stirring shaft form a receiving area. The container first arrives at the receiving area, the raw material of the etching solution falls into the container, the stirring shaft stirs the raw material in the container, and then the container arrives at the etching solution detection area.

[0014] Furthermore, the industrial computer stores an etching solution formula table, which includes multiple sets of etching solution formula data. Each set of etching solution formula data includes a group number, raw material type, and the weight of each raw material. The group number of each set of etching solution formula data is different. The industrial computer binds the raw material type to the corresponding weighing sensor. The weight of each raw material is the weighing threshold of the corresponding weighing sensor.

[0015] When the industrial computer sends a weighing signal to the first electrically controlled valve, the first electrically controlled valve opens; when the increase in weight of the weighing tank is greater than or equal to the weighing threshold of the weighing sensor, the first electrically controlled valve closes.

[0016] When the industrial computer sends a feeding signal to the second electrically controlled valve, the second electrically controlled valve opens; when the weighing value of the weighing sensor is the weight of the weighing tank, the second electrically controlled valve closes.

[0017] Furthermore, a barcode is affixed to the surface of the container, and each container has a different barcode. The transport device transports the container to the etching solution detection area. A first barcode scanner is installed in the receiving area, and a second barcode scanner is installed in the etching solution detection area. Both the first and second barcode scanners are electrically connected to the industrial computer.

[0018] Furthermore, after the first barcode scanner scans the barcode of the container located in the receiving area, the industrial computer binds the barcode to the group number, and the barcode and the group number correspond one-to-one.

[0019] Furthermore, the detection area has a data input device, which is electrically connected to the industrial computer and is used to input etching solution detection result data.

[0020] The industrial computer stores the etching solution formula data and etching solution test result data for each group in a database.

[0021] Furthermore, the data input device includes a keyboard, a touch screen, an industrial camera, and an electron microscope.

[0022] Furthermore, the lifting drive assembly is an electric push rod, and the stirring drive assembly is a servo motor.

[0023] Furthermore, a container positioning sensor is installed in the receiving area, and the container positioning sensor is electrically connected to the industrial computer.

[0024] The advantages of this invention are: multiple weighing sensors are controlled by an industrial computer, the weighing threshold of the weighing sensors is changed, a specified weight of etching solution raw material falls into the container, and then it is stirred and mixed to automatically prepare etching solutions with different proportions of raw materials. Multiple containers pass through the receiving area in sequence to prepare etching solutions in batches, and then transport them to the etching solution detection area, thereby improving the efficiency of etching solution. Attached Figure Description

[0025] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0026] Figure 1 This is a schematic diagram of the etching solution preparation, detection, and data processing system of the present invention.

[0027] Figure 2 This is a schematic diagram of the etching solution raw material weighing device in this invention.

[0028] Figure 3 This is a schematic diagram of the stirring device in the present invention stirring the liquid in the container.

[0029] Figure 4 This is a schematic diagram showing the positions of the container, barcode, first barcode scanner, and container positioning sensor in this invention.

[0030] Figure 5 This is a schematic diagram of the connection of the industrial computer in this invention.

[0031] Reference numerals: 1. Etching solution raw material weighing device; 11. Raw material tank; 12. Weighing tank; 13. Weighing sensor; 14. First conveying pipe; 15. Second conveying pipe; 16. First electrically controlled valve; 17. Second electrically controlled valve; 2. Stirring device; 21. Lifting drive assembly; 22. Lifting seat; 23. Stirring drive assembly; 24. Stirring shaft; 3. Transport device; 31. Base; 32. Conveyor belt; 33. Container; 4. Industrial computer; 5. Barcode; 51. First barcode scanner; 52. Second barcode scanner; 6. Data input device; 7. Container positioning sensor; 8. Receiving area. Detailed Implementation

[0032] This invention provides an etching solution preparation and detection data processing system, which overcomes the shortcomings of manual etching solution preparation in the prior art, and achieves automatic etching solution preparation, thereby improving the efficiency of etching solution preparation.

[0033] The overall concept of the technical solution of this invention is as follows:

[0034] The equipment includes a raw material weighing device, a stirring device, a conveying device, and an industrial computer for the etching solution.

[0035] In the etching solution raw material weighing device, the etching solution raw material in the raw material tank first falls into the weighing tank. The weighing sensor detects the weight change in the weighing tank. After reaching the set weighing threshold, the etching solution raw material in the weighing tank falls into the container. Multiple etching solution raw material weighing devices are available for various etching solutions.

[0036] After the raw materials for the etching solution have all fallen into the container, the stirring device stirs and mixes the raw materials in the container. Multiple containers pass through the receiving area in sequence, automatically dispensing the etching solution.

[0037] According to the etching solution formula table in the industrial computer, the number of groups in the etching solution formula data matches the quantity of etching solution to be prepared in the container. The transport device transports the containers one by one to the receiving area. The industrial computer adjusts the weighing threshold of the weighing sensor sequentially according to the group number of the etching solution formula data and the weight of each raw material.

[0038] Finally, in the etching solution testing area, researchers removed containers from the transport device, poured the etching solution into the material to be etched, tested the etching speed and other etching effects, and then input the test results into an industrial computer. The industrial computer stored the etching solution formula data and etching solution test results data for each set in a database.

[0039] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0040] See Figures 1 to 5 The preferred embodiment of the present invention.

[0041] An etching solution preparation and detection data processing system includes:

[0042] Etching solution raw material weighing device 1, stirring device 2, conveying device 3, and industrial computer 4;

[0043] The etching solution raw material weighing device 1 includes a support frame, a raw material tank 11, a weighing tank 12, a weighing sensor 13, a first conveying pipe 14, a second conveying pipe 15, a first electrically controlled valve 16, and a second electrically controlled valve 17. The raw material tank 11 is fixedly installed on the top of the support frame. The outlet of the raw material tank 11 is fixedly connected to the upper end of the first conveying pipe 14. The first conveying pipe 14 is equipped with the first electrically controlled valve 16. The lower end of the first conveying pipe 14 is aligned with the inlet of the weighing tank 12. The weighing tank 12 is placed at the detection end of the weighing sensor 13. The weighing sensor 13 is fixedly installed in the middle of the support frame. The outlet of the weighing tank 12 is connected to the upper end of the second conveying pipe 15. The second conveying pipe 15 is equipped with the second electrically controlled valve 17. The lower end of the second conveying pipe 15 is fixedly connected to the bottom of the support frame.

[0044] The etching solution raw material weighing device 1 has multiple components, and the first electrically controlled valve 16, the second electrically controlled valve 17, and the weighing sensor 13 are all electrically connected to the industrial computer 4.

[0045] The stirring device 2 includes a lifting drive assembly 21, a lifting seat 22, a stirring drive assembly 23, and a stirring shaft 24. The lifting seat 22 is connected to the support frame through the lifting drive assembly 21, and the stirring shaft 24 is connected to the lifting seat 22 through the stirring drive assembly 23.

[0046] The transport device 3 includes a base 31, a transport belt 32, and a container 33. The base 31 is fixedly connected to the transport belt 32, and multiple bases 31 are arranged at intervals along the length of the transport belt 32. Each base 31 has a groove, and the container 33 is placed in the groove.

[0047] The second feed pipe 15 and the area below the stirring shaft 24 is the receiving area 8. The container 33 arrives at the receiving area 8 first, and the raw material of the etching solution falls into the container 33. The stirring shaft 24 stirs the raw material in the container 33.

[0048] The advantages of this invention are: an industrial computer 4 controls multiple weighing sensors 13, changes the weighing threshold of the weighing sensors 13, and a specified weight of etching solution raw material falls into the container 33, which is then stirred and mixed to automatically prepare etching solutions with different proportions of raw materials. Multiple containers 33 pass through the receiving area 8 in sequence to prepare etching solutions in batches, and then transport them to the etching solution detection area, thereby improving the efficiency of the etching solution.

[0049] The industrial computer 4 stores an etching solution formula table, which includes multiple sets of etching solution formula data. Each set of etching solution formula data includes a group number, raw material type, and the weight of each raw material. The group number of each set of etching solution formula data is different. The industrial computer 4 binds the raw material type to the weighing sensor 13. The weight of each raw material is the weighing threshold of the corresponding weighing sensor 13.

[0050] When the industrial computer 4 sends a weighing signal to the first electrically controlled valve 16, the first electrically controlled valve 16 opens; when the weight increase of the weighing tank 12 is greater than or equal to the weighing threshold of the weighing sensor 13, the first electrically controlled valve 16 closes.

[0051] When the industrial computer 4 sends a feeding signal to the second electrically controlled valve 17, the second electrically controlled valve 17 opens. When the weighing value of the weighing sensor 13 is equal to the weight of the weighing tank 12, the second electrically controlled valve 17 closes. The beneficial effect of this technical solution is that the industrial computer 4 sequentially changes the weighing threshold of the weighing sensor 13 according to the group number of the etching solution formula data and the weight of each raw material. When the container 33 reaches the feeding area, the industrial computer 4 sends a weighing signal to begin weighing; when the weight increase of the weighing tank 12, i.e., the weight of the raw material, reaches the weighing threshold, the industrial computer 4 sends a feeding signal.

[0052] For example, a certain etching solution formula:

[0053]

[0054]

[0055] There are six types of raw materials, corresponding to six etching solution raw material weighing devices 1. These six raw material tanks 11 store ammonium fluoride, oxalic acid, ammonium sulfate, sodium sulfate, glycerin, and water, each with a capacity of 1000 grams. The weighing thresholds of the six weighing sensors 13 correspond to the weights of these six raw materials. When the first container 33 arrives at the unloading area, the industrial computer 4 executes the etching solution formula data for group number 1001, with the weighing thresholds of the six weighing sensors 13 being 15g, 7g, 8g, 14g, 35g, and 10g, respectively. When the second container 33 arrives at the unloading area, the industrial computer 4 executes the etching solution formula data for group number 1002, with the weighing thresholds of the six weighing sensors 13 being 10g, 7g, 8g, 14g, 40g, and 10g, respectively. Similarly, the industrial computer 4 executes the etching solution formula data for groups number 1003 and 1004.

[0056] After all group numbers have been processed, even if the next container 33 arrives at the unloading area, the etching solution raw material weighing device 1 will no longer weigh or unload the raw material.

[0057] The surface of each container 33 is affixed with a barcode 5, and each container 33 has a different barcode 5. The transport device 3 transports the container 33 to the etching solution detection area. A first barcode scanner 51 is installed in the receiving area 8, and a second barcode scanner 52 is installed in the etching solution detection area. Both the first barcode scanner 51 and the second barcode scanner 52 are electrically connected to the industrial computer 4. The beneficial effects of this technical solution are that the first barcode scanner 51 is used to determine whether the container 33 has arrived at the unloading area and to distinguish between different containers 33; the second barcode scanner 52 is used to quickly view the formula data corresponding to the etching solution in the container 33 after scanning the barcode of the container 33.

[0058] When the first barcode scanner 51 scans the barcode of the container 33 located in the receiving area 8, the industrial computer 4 binds the barcode to the group number, and the barcode and the group number correspond one-to-one. The beneficial effect of this technical solution is that it can accurately realize the preparation of a group of etching solutions in a container 33, and it is also convenient to view the formula data by scanning the barcode of the container 33.

[0059] The detection area has a data input device 6, which is electrically connected to the industrial computer 4. The data input device 6 is used to input the etching solution detection result data.

[0060] The industrial computer 4 stores the etching solution formula data and etching solution test result data for each set in a database. The beneficial effect of this technical solution is that, in the etching solution testing area, researchers remove container 33 from the transport device 3, pour the etching solution from container 33 into the material to be etched, and use existing tools to test and observe the etching effect, such as the etching speed and the damage to the material. The etching solution test result data is then input into the industrial computer 4 to obtain the etching results corresponding to a set of etching solution formula data, facilitating the confirmation of the actual required etching solution.

[0061] The data input device 6 includes a keyboard, a touch screen, an industrial camera, and an electron microscope. Researchers input etching solution detection results data via the keyboard or touch screen. The industrial camera or electron microscope sends the captured etching images to the industrial computer 4.

[0062] The lifting drive assembly 21 is an electric push rod, and the stirring drive assembly 23 is a servo motor. When the container 33 reaches the receiving area 8, the industrial computer 4 sends a stirring signal to the electric push rod and the servo motor. The electric push rod lowers the lifting seat 22, and the stirring shaft 24 enters the container 33. The servo motor rotates the stirring shaft 24 to stir the liquid in the container 33. When the stirring time ends, the industrial computer 4 sends a stop signal to the electric push rod and the servo motor. The servo motor stops, and the electric push rod raises the lifting seat 22, causing the stirring shaft 24 to detach from the container 33. The transport device 3 then transports the container 33 out of the receiving area 8 and to the etching solution detection area. An air jet pipe is installed on the support frame. After the stirring shaft 24 detaches from the container 33, the air jet pipe is aimed at the stirring shaft 24 and sprays compressed air. The compressed air blows away the liquid adhering to the surface of the stirring shaft 24, effectively cleaning the stirring shaft 24 and preventing the stirring shaft 24 from introducing impurities while stirring in multiple containers 33.

[0063] A container positioning sensor 7 is installed in the receiving area 8, and the container positioning sensor 7 is electrically connected to the industrial computer 4. The container positioning sensor 7 is a photoelectric sensor. When the photoelectric sensor detects that the container 33 has moved to the receiving area 8, the industrial computer 4 stops the transport device 3 and then starts the first barcode scanner 51 to scan the barcode on the container 33.

[0064] An industrial computer coordinates and controls the operation of the etching solution raw material weighing device 1, the stirring device 2, and the transport device 3, so that the work of this invention can proceed in an orderly manner.

[0065] The etching solution preparation and testing data processing system of this invention can batch adjust the types and weights of raw materials in the etching solution, quickly preparing etching solutions with different raw material ratios. The etching solutions are then transported in containers to the etching solution testing area, where workers use existing tools to test the etching effect. A second barcode scanner is then used to scan the barcode on the container to retrieve the corresponding etching solution formula data. The etching results are then input into an industrial computer and stored in a database, corresponding one-to-one with the etching solution formula data. By consulting the database, the corresponding etching solution formula can be found based on the desired etching effect, facilitating further large-scale production of the etching solution.

[0066] While specific embodiments of the present invention have been described above, those skilled in the art should understand that the specific embodiments described are merely illustrative and not intended to limit the scope of the present invention. Equivalent modifications and variations made by those skilled in the art in accordance with the spirit of the present invention should be covered within the scope of protection of the claims of the present invention.

Claims

1. A data processing system for etching solution preparation and detection, characterized in that, include: Etching solution raw material weighing device, stirring device, conveying device, and industrial computer; The etching solution raw material weighing device includes a support frame, a raw material tank, a weighing tank, a weighing sensor, a first conveying pipe, a second conveying pipe, a first electrically controlled valve, and a second electrically controlled valve. The raw material tank is fixedly installed on the top of the support frame. The outlet of the raw material tank is fixedly connected to the upper end of the first conveying pipe. The first conveying pipe is equipped with a first electrically controlled valve. The lower end of the first conveying pipe is aligned with the inlet of the weighing tank. The weighing tank is placed at the detection end of the weighing sensor. The weighing sensor is fixedly installed in the middle of the support frame. The outlet of the weighing tank is connected to the upper end of the second conveying pipe. The second conveying pipe is equipped with a second electrically controlled valve. The lower end of the second conveying pipe is fixedly connected to the bottom of the support frame. The etching solution raw material weighing device has multiple components, and the first electrically controlled valve, the second electrically controlled valve, and the weighing sensor are all electrically connected to the industrial computer. The stirring device includes a lifting drive assembly, a lifting base, a stirring drive assembly, and a stirring shaft. The lifting base is connected to the support frame through the lifting drive assembly, and the stirring shaft is connected to the lifting base through the stirring drive assembly. The transport device includes a base, a conveyor belt, and a container. The base is fixedly connected to the conveyor belt, and multiple bases are arranged at intervals along the length of the conveyor belt. Each base has a groove, and the container is placed in the groove. The second feed pipe and the area below the stirring shaft form a receiving area. The container arrives at the receiving area first, and the raw material of the etching solution falls into the container. The stirring shaft stirs the raw material in the container. The industrial computer stores an etching solution formula table, which includes multiple sets of etching solution formula data. Each set of etching solution formula data includes a group number, raw material type, and the weight of each raw material. The group number of each set of etching solution formula data is different. The industrial computer binds the raw material type to the corresponding weighing sensor. The weight of each raw material is the weighing threshold of the corresponding weighing sensor. When the industrial computer sends a weighing signal to the first electrically controlled valve, the first electrically controlled valve opens; when the increase in weight of the weighing tank is greater than or equal to the weighing threshold of the weighing sensor, the first electrically controlled valve closes. When the industrial computer sends a feeding signal to the second electrically controlled valve, the second electrically controlled valve opens; when the weighing value of the weighing sensor is the weight of the weighing tank, the second electrically controlled valve closes. The surface of the container is affixed with a barcode, and each container has a different barcode. The transport device transports the container to the etching solution detection area. A first barcode scanner is installed in the receiving area, and a second barcode scanner is installed in the etching solution detection area. Both the first and second barcode scanners are electrically connected to the industrial computer. When the first barcode scanner scans the barcode of the container located in the receiving area, the industrial computer binds the barcode to the group number, and the barcode and the group number correspond one-to-one; The etching solution detection area is equipped with a data input device, which is electrically connected to the industrial computer. The data input device is used to input etching solution detection result data. The industrial computer stores the etching solution formula data and etching solution test result data for each group in a database.

2. The etching solution preparation and detection data processing system according to claim 1, characterized in that, The data input device includes a keyboard, a touch screen, an industrial camera, and an electron microscope.

3. The etching solution preparation and detection data processing system according to claim 1, characterized in that, The lifting drive component is an electric push rod, and the stirring drive component is a servo motor.

4. The etching solution preparation and detection data processing system according to claim 1, characterized in that, A container positioning sensor is installed in the receiving area, and the container positioning sensor is electrically connected to the industrial computer.

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