Graphite heater cleaning device based on single crystal pulling hot field

Abstract

The application discloses a graphite heater cleaning device based on a single-crystal drawing heat field, which comprises a horizontal base plate, two positioning pin columns are installed on the base plate, a plurality of elastic locking assemblies are installed on the positioning pin columns in the circumferential direction, a pneumatic cylinder is installed on the base plate, a piston rod of the pneumatic cylinder is connected with a lifting seat, a plurality of telescopic wiping assemblies are uniformly installed on the lifting seat in the circumferential direction, and a driving assembly is installed on the lifting seat. The graphite heater cleaning device has the beneficial effects that: the elastic locking assembly is designed by utilizing the structural characteristics of the graphite heater, the graphite heater is clamped and fixed by the elastic locking assembly, the graphite heater is accurately positioned during clamping, the gap of the graphite heater is uniformly cleaned by the telescopic wiping assembly, manual cleaning is not needed, the efficiency of heat field cleaning is improved, the phenomenon of missed cleaning gap is effectively avoided, and the success rate of single-crystal silicon drawing is ensured.

Description

Technical fields:

[0001] This invention relates to the field of single crystal hot field cleaning tools, and more particularly to a graphite heater cleaning device based on the single crystal pulling hot field. Background technology:

[0002] The single crystal furnace is the core equipment for single crystal silicon pulling. Each furnace pulls one single crystal silicon rod approximately every 48 hours. After pulling, a thorough and meticulous disassembly and cleaning process is required before the next batch of single crystal silicon rods can be pulled. The main task of the disassembly and cleaning process is to remove and clean various hot zone components. The purpose of disassembly and cleaning is to remove oxides from the hot zone components (the temperature inside the single crystal furnace is above 1400 degrees Celsius during single crystal pulling, and the pulling is carried out in a vacuum environment. When the furnace is disassembled after pulling, air enters and a layer of light yellow oxide quickly forms on the surface of the hot zone components), thereby ensuring the successful pulling of the next batch of single crystal silicon rods (the purity requirements for single crystal silicon rods are extremely high; the purity requirement for photovoltaic-grade single crystal silicon is generally 99.9999%, while the purity requirement for semiconductor-grade single crystal silicon is usually above 99.9999999%). Therefore, the cleaning of the hot zone components is extremely important. The hot zone components that need to be cleaned during disassembly and cleaning include graphite heaters, insulation cylinders, flow guide cylinders, electric heaters, vacuum extraction pipes, etc.

[0003] Due to its inherent structure, the graphite heater is the most time-consuming, difficult, and labor-intensive component to clean in a hot zone. Figure 7 As shown, the graphite heater has a cylindrical heat transfer cylinder with dozens of slits approximately 10mm wide. Two supports with mounting holes 9 are located at the ends of the cylinder. Therefore, cleaning the graphite heater requires not only wiping its inner and outer surfaces but also cleaning the slits 28. Due to the narrowness and large number of slits 28, this cleaning can only be done using a long, thin rod-shaped tool. Fiber paper or sponge is wrapped around the tool, and high-concentration alcohol is sprayed onto the tool. The tool is then inserted into the slits 28 and moved up and down to wipe them clean. This cleaning method has the following drawbacks: 1. Difficult cleaning, high labor intensity, and low work efficiency; 2. Operators may easily miss cleaning certain slits, leading to failure in the next batch of single crystal pulling and causing significant losses. Summary of the Invention:

[0004] The purpose of this invention is to provide a cleaning device for graphite heaters based on the single crystal pulling hot field, so as to solve the technical problems of difficult cleaning, low working efficiency, and easy omission of cleaning gaps when cleaning graphite heaters in the hot field in the prior art.

[0005] The application relates to a graphite heater cleaning device based on a single-crystal drawing hot field, which comprises a horizontally arranged base plate, two positioning pin columns arranged on the base plate, a plurality of elastic locking assemblies arranged on the positioning pin columns in a circumferential direction, a gas cylinder arranged on the base plate, a piston rod of the gas cylinder being connected with a lifting seat, a plurality of telescopic wiping assemblies being uniformly arranged on the lifting seat in a circumferential direction, the telescopic wiping assemblies being used for wiping off oxides in graphite heater gaps, and a driving assembly being arranged on the lifting seat and used for driving the telescopic wiping assemblies to telescopically extend.

[0006] Further, the elastic locking assembly comprises a locking pressing pin, the top end of the locking pressing pin being semispherical, an installation groove being formed on the positioning pin column, the positioning pin column being hinged in the installation groove, the positioning pin column extending out of the installation groove, a first compression spring being arranged in the installation groove, and the first compression spring making the top end of the locking pressing pin tilt outward.

[0007] Further, a threaded through hole is formed on the outer wall of the locking pressing pin, and a stud is screwed in the threaded through hole and abuts against the first compression spring.

[0008] Further, the locking pressing pin has a taper, and the end with a large diameter of the locking pressing pin faces upward.

[0009] Further, the telescopic wiping assembly comprises a plurality of telescopic rods distributed along the circumferential direction of the lifting seat, a central groove is arranged in the lifting seat, a plurality of through grooves are formed in the central groove and extend radially outward, the telescopic rods are slidably connected in the through grooves, a second compression spring is arranged on the lifting seat and applies an elastic force radially inward to the telescopic rods, cleaning sponges are arranged at both sides of the outer end of the telescopic rods, the inner end of the telescopic rod is wedge-shaped, and a guide angle is formed on the outer end of the telescopic rod.

[0010] Further, a plurality of spring grooves matched with the positions of the through grooves are formed in the lifting seat, the spring grooves are connected with the through grooves, a limiting plate is connected on the telescopic rod, the limiting plate is slidably connected with the spring grooves, and the second compression spring is arranged in the spring grooves.

[0011] Further, sponge grooves are formed at both sides of the outer end of the telescopic rod, and the cleaning sponges are arranged in the sponge grooves.

[0012] Further, a liquid cavity is arranged in the telescopic rod, alcohol is filled in the liquid cavity, a liquid permeation hole is formed in the groove bottom of the sponge groove and connected with the liquid cavity, and a liquid adding hole is formed in the liquid cavity and arranged with a sealing plug.

[0013] Further, the driving assembly comprises a screw rod, a cover plate is fixedly installed on the lifting seat, an adjusting screw hole is formed in the cover plate, the screw rod is screwed in the adjusting screw hole, a driving circular table is connected to the bottom end of the screw rod, the driving circular table is in contact with the wedge surface of the telescopic rod, and a rotating handle is installed at the top end of the screw rod.

[0014] Further, three or more than three pre-positioning vertical plates are installed on the outer edge of the base plate, the pre-positioning vertical plates have a straight-angled trapezoidal cross section, and a plurality of supporting legs are vertically downwardly installed on the base plate.

[0015] The graphite heater is clamped and fixed by the elastic locking assembly designed according to the structural characteristics of the graphite heater, the graphite heater is accurately positioned during clamping, the gap of the graphite heater is uniformly cleaned by the telescopic wiping assembly, manual cleaning is not needed, the degree of automation is high, the efficiency of heat field cleaning is greatly improved, the phenomenon of missing gap cleaning is effectively avoided, the success rate of single crystal silicon drawing is ensured, the cleaning degree of the graphite heater is improved by the cleaning structure that continuously moistens the sponge with alcohol, the cleaning of the oxide is more thorough, the success rate of single crystal silicon drawing is improved, and the application is worthy of wide promotion and use. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a top view of the application;

[0017] Figure 2 It is a sectional view along A-A of the application;

[0018] Figure 3 It is a sectional view along B-B of the application;

[0019] Figure 4 It is a perspective view of the internal structure of the application;

[0020] Figure 5 It is a perspective view of the telescopic rod of the application;

[0021] Figure 6 It is a perspective view of the application in use;

[0022] Figure 7 It is a perspective view of the graphite heater of the application;

[0023] In the figure, the chassis 1, the positioning pin column 2, the installation slot 3, the locking press pin 4, the first compression spring 5, the stud 6, the air cylinder 7, the graphite heater 8, the mounting hole 9, the lifting seat 10, the through slot 11, the spring slot 12, the second compression spring 13, the telescopic rod 14, the cleaning sponge 15, the sponge slot 16, the liquid infiltration hole 17, the liquid cavity 18, the sealing plug 19, the center slot 20, the guide angle 21, the screw 22, the cover plate 23, the limiting plate 24, the supporting leg 25, the pre-positioning vertical plate 26, the driving circular table 27, the gap 28. DETAILED DESCRIPTION

[0024] Embodiment 1

[0025] As shown in Figure 1 , Figure 3 and Figure 7 , the graphite heater cleaning device based on single crystal drawing heat field comprises a horizontally arranged chassis 1, two positioning pin columns 2 are installed on the chassis 1, the positioning pin columns 2 are used for positioning the mounting hole 9, a plurality of elastic locking assemblies are installed on the positioning pin columns 2 in the circumferential direction, an air cylinder 7 is installed on the chassis 1, the piston rod of the air cylinder 7 is connected with the lifting seat 10, a plurality of telescopic wiping assemblies are uniformly distributed and installed on the lifting seat 10 in the circumferential direction, the telescopic wiping assemblies are used for wiping off the oxides in the gap of the graphite heater 8, a driving assembly is installed on the lifting seat 10, the driving assembly is used for driving the telescopic wiping assemblies to stretch and retract, in the clamping state, the telescopic wiping assemblies are in the retracted state, so as to facilitate the normal clamping, in the cleaning state, the telescopic wiping assemblies are in the extended state and are inserted into the gap 28 of the graphite heater 8, and the air cylinder 7 is started and stopped to clean.

[0026] Specifically, as shown in Figure 2 , the elastic locking assembly comprises a locking press pin 4, the top end of the locking press pin 4 is hemispherical, an installation slot 3 is formed on the positioning pin column 2, the positioning pin column 2 is hinged in the installation slot 3, the positioning pin column 2 extends out of the installation slot 3, a first compression spring 5 is installed in the installation slot 3, the first compression spring 5 makes the top end of the locking press pin 4 tilt outward, the locking press pin 4 has a taper, the end with a larger diameter of the locking press pin 4 faces upward, the locking press pin 4 is used for elastically pressing the graphite heater 8, when the graphite heater 8 is clamped, the mounting hole 9 of the graphite heater 8 is aligned with the positioning pin column 2, at this time, the hemispherical head part of the locking press pin 4 is in contact with the lower edge of the mounting hole 9, then the locking press pin 4 is pressed downward, the locking press pin 4 rotates inward, when the bottom end of the graphite heater 8 is in contact with the chassis 1, the head of the locking press pin 4 is exposed outside the mounting hole 9, due to the action of the first compression spring 5, the graphite heater 8 is pressed and fixed by the locking press pin 4, and the clamping is completed.

[0027] Specifically, as shown in Figures 3 to 5As shown, the telescopic wiping assembly comprises a plurality of telescopic rods 14 distributed along the circumference of the lifting seat 10, a central groove 20 is arranged in the lifting seat 10, a plurality of through grooves 11 are radially outwardly arranged in the central groove 20, the height of the through grooves 11 can be designed according to the actual position of the gap 28 of the graphite heater 8 (the height of the through grooves 11 shown in the drawings is consistent only for the convenience of expression, so as to better understand the technical content of the present application), the telescopic rods 14 are slidably connected in the through grooves 11, the second compression spring 13 is installed on the lifting seat 10, the second compression spring 13 exerts a radially inward elastic force on the telescopic rod 14, the cleaning sponge 15 is installed on both sides of the outer end of the telescopic rod 14, the inner end of the telescopic rod 14 is wedge-shaped, the outer end of the telescopic rod 14 is provided with a guide angle 21, which facilitates the telescopic rod 14 to be smoothly inserted into the gap 28 of the graphite heater 8; a plurality of spring grooves 12 matched with the positions of the through grooves 11 are arranged in the lifting seat 10, the spring grooves 12 are communicated with the through grooves 11, the limiting plate 24 is connected on the telescopic rod 14, the limiting plate 24 is slidably connected with the spring grooves 12, the second compression spring 13 is installed in the spring grooves 12, the driving assembly comprises a screw rod 22, the cover plate 23 is fixedly installed on the lifting seat 10, the adjusting screw hole is arranged on the cover plate 23, the screw rod 22 is screwed in the adjusting screw hole, the driving circular table 27 is connected to the bottom end of the screw rod 22, the driving circular table 27 is in contact with the wedge-shaped surface of the telescopic rod 14, and the rotating handle is installed at the top end of the screw rod 22.

[0028] As Figure 3 and Figure 4 shown, when cleaning the gap 28 of the graphite heater 8, first, the clamping is completed, then the screw rod 22 is rotated to make the driving circular table 27 descend, the driving circular table 27 extrudes the telescopic rod 14 to make it inserted into the gap 28, then the air cylinder 7 is started and stopped to make the telescopic rod 14 move up and down to complete the wiping.

[0029] Example 2:

[0030] On the basis of example 1, in order to adjust the elastic pressing force of the locking pressing pin 4, as Figure 2 shown, a threaded through hole is arranged on the outer wall of the locking pressing pin 4, and a stud 6 is screwed in the threaded through hole, and the stud 6 abuts against the first compression spring 5.

[0031] In order to facilitate the replacement of the cleaning sponge 15 and increase the cleaning effect of the cleaning sponge 15, as Figure 3 and Figure 5As shown, sponge grooves 16 are formed on both sides of the outer end of the telescopic rod 14, and the cleaning sponge 15 is installed in the sponge groove 16; a liquid cavity 18 is arranged in the telescopic rod 14, and alcohol is filled in the liquid cavity 18; a liquid permeation hole 17 is formed in the bottom of the sponge groove 16 in the liquid cavity 18, and the liquid permeation hole 17 is communicated with the liquid cavity 18; a liquid adding hole is formed in the liquid cavity 18, and a sealing plug 19 is installed in the liquid adding hole.

[0032] In order to complete positioning and clamping more quickly, as shown, Figure 6 As shown, three or more than three pre-positioning vertical plates 26 are installed on the outer edge of the bottom disc 1, the cross section of the pre-positioning vertical plate 26 is a right trapezoid, and a plurality of supporting legs 25 are installed on the bottom disc 1.

[0033] The above is only a preferred embodiment of the present application, and is not used to limit the present application, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. A graphite heater cleaning apparatus based on single crystal pulling hot field, characterized in that: It includes horizontally arranged chassis (1), two positioning pin columns (2) are installed on the chassis (1), a plurality of elastic locking assemblies are installed on the positioning pin columns (2) in the circumferential direction, a pneumatic cylinder (7) is installed on the chassis (1), the piston rod of the pneumatic cylinder (7) is connected with a lifting seat (10), a plurality of telescopic wiping assemblies are evenly distributed and installed on the lifting seat (10) in the circumferential direction, the telescopic wiping assemblies are used for wiping off oxides in the gap of a graphite heater (8), a driving assembly is installed on the lifting seat (10), and the driving assembly is used for driving the telescopic wiping assemblies to stretch and retract.

2. A single-crystal-pulling-heat-field-based graphite heater cleaning apparatus according to claim 1, characterized by: The telescopic wiping assembly includes a plurality of telescopic rods (14) distributed along the circumferential direction of the lifting seat (10), a central groove (20) is arranged in the lifting seat (10), a plurality of through grooves (11) are formed in the central groove (20) and radially outward, the telescopic rods (14) are slidably connected in the through grooves (11), a second compression spring (13) is installed on the lifting seat (10), the second compression spring (13) applies a radially inward elastic force to the telescopic rods (14), cleaning sponges (15) are installed on both sides of the outer end of the telescopic rods (14), the inner end of the telescopic rods (14) is wedge-shaped, and a guide angle (21) is formed in the outer end of the telescopic rods (14).

3. A single-crystal-pulling-heat-field-based graphite heater cleaning apparatus according to claim 2, characterized by: A plurality of spring grooves (12) matched with the positions of the through grooves (11) are formed in the lifting seat (10), the spring grooves (12) are communicated with the through grooves (11), a limiting plate (24) is connected to the telescopic rods (14), the limiting plate (24) is slidably connected with the spring grooves (12), and the second compression spring (13) is installed in the spring grooves (12).

4. The single-crystal-pulling hot- field based graphite heater cleaning apparatus according to claim 2, characterized by: The driving assembly includes a screw rod (22), a cover plate (23) is fixedly installed on the lifting seat (10), an adjusting screw hole is formed in the cover plate (23), the screw rod (22) is screwed in the adjusting screw hole, a driving circular table (27) is connected to the bottom end of the screw rod (22), the driving circular table (27) is in contact with the wedge-shaped surface of the telescopic rods (14), and a rotating handle is installed at the top end of the screw rod (22). The elastic locking assembly includes a locking compression pin (4), the top end of the locking compression pin (4) is hemispherical, an installation groove (3) is formed in the positioning pin column (2), the positioning pin column (2) is hingedly connected in the installation groove (3), the positioning pin column (2) extends out of the installation groove (3), a first compression spring (5) is installed in the installation groove (3), and the first compression spring (5) causes the top end of the locking compression pin (4) to tilt outward. A threaded through hole is formed in the outer wall of the locking compression pin (4), a threaded stud (6) is screwed in the threaded through hole, and the threaded stud (6) abuts against the first compression spring (5). The locking compression pin (4) has a taper, and the end with a larger diameter of the locking compression pin (4) faces upward.

5. The single-crystal-pulling hot- field based graphite heater cleaning apparatus according to claim 1, characterized by: Sponge grooves (16) are arranged on both sides of the outer end of the telescopic rod (14), and the cleaning sponge (15) is arranged in the sponge grooves (16).

6. A single-crystal-pulling-heat-field-based graphite heater cleaning apparatus according to claim 5, characterized by: A liquid cavity (18) is arranged in the telescopic rod (14), and alcohol is filled in the liquid cavity (18). A liquid permeation hole (17) is arranged in the bottom of the sponge groove (16), and the liquid permeation hole (17) is communicated with the liquid cavity (18). A liquid adding hole is arranged in the liquid cavity (18), and a sealing plug (19) is arranged in the liquid adding hole.

7. The single-crystal-pulling hot- field based graphite heater cleaning device according to claim 1, characterized by: Three or more than three pre-positioning vertical plates (26) are arranged on the outer edge of the bottom disc (1), the cross section of the pre-positioning vertical plate (26) is a right trapezoid, and a plurality of supporting legs (25) are vertically arranged downwards on the bottom disc (1).

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