Hydrostatic rotary table mechanism and its processing equipment

Abstract

This application discloses a hydrostatic rotary table mechanism and processing equipment having the same. The hydrostatic rotary table mechanism includes: a worktable for supporting a workpiece; a base disposed below the worktable, at least a portion of which is in contact with the worktable; a hydraulic chamber disposed on the base, into which oil is introduced to form an oil film supporting the worktable between the base and the worktable; and a negative pressure groove disposed on the base, opposite to the worktable, with a negative pressure cavity between the groove and the worktable, through which a downward suction force is applied to the worktable. This application solves the problem in the prior art where, when the load force on a hydrostatic rotary table is large, the stiffness of the oil film increases, affecting the working accuracy of the hydrostatic rotary table.

Description

Technical Field

[0001] This application relates to the field of hydrostatic turntable structure design technology, and more specifically, to a hydrostatic turntable mechanism and processing equipment having the same. Background Technology

[0002] A hydrostatic rotary table is a rotary table device that uses the principle of hydrostatic pressure to support and transmit torque. In a hydrostatic rotary table, lubricating oil or hydraulic oil is supplied to the oil chamber through a pressure pipeline via an oil supply system. Under the action of pressure in the oil chamber, the oil forms a hydrostatic oil film of a certain thickness. The oil film supports the moving parts and provides support for torque transmission. Therefore, hydrostatic rotary tables have advantages such as low wear, high motion accuracy, long mean time between failures (MTBF), low drive power, high load capacity, good vibration absorption, and smooth movement. They are widely used in high-precision machining equipment, such as precision machine tools, semiconductor equipment, or optical equipment.

[0003] Currently, oil film stiffness is determined solely by the load. When the stiffness of the turntable is insufficient to withstand large loads or external disturbances, or when the oil film stiffness changes significantly, it will affect the accuracy and stability of the hydrostatic turntable, leading to increased errors in processing or testing results and impacting product quality. Summary of the Invention

[0004] The main objective of this application is to provide a hydrostatic turntable mechanism and processing equipment thereof, so as to solve the problem that when the load force of the hydrostatic turntable in the prior art is large, the oil film stiffness increases, which affects the working accuracy of the hydrostatic turntable.

[0005] According to one aspect of this application, a hydrostatic turntable mechanism is provided, comprising: a worktable for supporting a workpiece; a base disposed below the worktable, at least a portion of which is in contact with the worktable; a hydraulic chamber disposed on the base, wherein oil is introduced into the hydraulic chamber to form an oil film supporting the worktable between the base and the worktable; and a negative pressure groove disposed on the base, opposite to the worktable, wherein a negative pressure cavity is formed between the negative pressure groove and the worktable, and a downward suction force is applied to the worktable through the negative pressure cavity.

[0006] Furthermore, the hydrostatic turntable mechanism also includes: a displacement detection component, which is mounted on the base and opposite to the worktable, and is used to detect the amount of displacement of the worktable in the vertical direction; a negative pressure adjustment component, which is connected to the negative pressure chamber, and is used to adjust the pressure in the negative pressure chamber; the displacement detection component is signal-connected to the negative pressure adjustment component, and the negative pressure adjustment component adjusts the pressure in the negative pressure chamber according to the displacement signal of the displacement detection component.

[0007] Furthermore, the displacement detection component is a laser displacement sensor; and / or, the negative pressure regulating component includes a vacuum pump.

[0008] Furthermore, there are multiple displacement detection components, which are evenly spaced along the circumferential direction of the base; the static pressure turntable mechanism also includes a control module, with each displacement detection component and negative pressure adjustment component connected to the control module. The control module controls the negative pressure adjustment component to adjust the pressure in the negative pressure chamber according to the detection results of each displacement detection component.

[0009] Furthermore, the hydrostatic turntable mechanism also includes: a support component disposed within the negative pressure chamber, the support component extending along the circumferential direction of the negative pressure chamber, and both sides of the support component respectively fitting against the bottom surface of the negative pressure chamber and the worktable; wherein, at least a portion of the support component is movably disposed in the vertical direction.

[0010] Furthermore, a mounting groove is provided on the bottom surface of the support component that fits against the negative pressure chamber, and the mounting groove extends along the circumferential direction of the support component; the hydrostatic turntable mechanism also includes a sealing ring, at least a portion of which is disposed in the mounting groove and is interference-fitted with the mounting groove, and the sealing ring can be elastically disposed to push the support component to move.

[0011] Furthermore, there are multiple hydraulic chambers, which are spaced apart along the circumferential direction of the base; wherein, there is one or more negative pressure chambers between two adjacent hydraulic chambers.

[0012] Furthermore, the static pressure turntable mechanism also includes: a gas channel, which is located inside the base and is connected to the negative pressure chamber, through which the gas in the negative pressure chamber is output; and an exhaust pipe, which is connected to the gas channel and is equipped with a flow regulating valve, through which the gas flow rate in the exhaust pipe is regulated.

[0013] Furthermore, the hydrostatic turntable mechanism also includes: an oil delivery pipeline, which includes a main delivery pipe and output branch pipes. The main delivery pipe is arranged around the base, and the two ends of the output branch pipes are respectively connected to the hydraulic chamber and the main delivery pipe. There are multiple output branch pipes, and multiple output branch pipes are arranged in a one-to-one correspondence with multiple hydraulic chambers.

[0014] On the other hand, this application also provides a processing device, including a hydrostatic rotary table mechanism, which is the hydrostatic rotary table mechanism described above.

[0015] Compared with the prior art, the technical solution of this application has at least the following technical effects:

[0016] The hydrostatic turntable mechanism in this application can achieve adaptive hydrostatic support under different load conditions. The real-time feedback of the laser displacement sensor and the calculation and control strategy of the PLC controller enable the vacuum preload adjustment to be adjusted in real time according to the weight changes of the processed parts to maintain an appropriate preload force. That is, by adjusting the pressure changes in the negative pressure chamber, the changes in oil film stiffness caused by load changes are balanced, thereby achieving high-precision and high-stability turntable operation. Attached Figure Description

[0017] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0018] Figure 1 This is a schematic diagram of an embodiment of the hydrostatic rotary table mechanism disclosed in this application;

[0019] Figure 2 This is a schematic diagram of the base structure in the hydrostatic rotary table mechanism disclosed in this application;

[0020] Figure 3 This is a cross-sectional view of the hydrostatic rotary table mechanism disclosed in this application;

[0021] Figure 4 This is a schematic diagram of the negative pressure chamber in the hydrostatic rotary table mechanism disclosed in this application;

[0022] Figure 5 This is a schematic diagram showing the cooperation between the displacement detection component and the mounting bracket in the hydrostatic turntable mechanism disclosed in this application.

[0023] The above figures include the following reference numerals:

[0024] 1. Workbench; 2. Base; 20. Hydraulic chamber; 21. Negative pressure groove; 22. Negative pressure chamber; 3. Displacement detection component;

[0025] 30. Mounting bracket; 4. Negative pressure regulating component; 5. Control module; 23. Support component; 230. Mounting groove; 24. Sealing ring; 60. Gas passage; 61. Air extraction pipeline; 610. Flow regulating valve; 7. Oil delivery pipeline; 70. Main delivery pipe; 71. Output branch pipe; 8. Oil tank; 9. Support frame. Detailed Implementation

[0026] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0027] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0028] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this application. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0029] As mentioned in the background section, in existing hydrostatic rotary table mechanisms, an oil film is formed between the worktable and the base to support the worktable. When changes occur on the worktable, the stiffness of the oil film also changes accordingly, affecting the accuracy of the worktable and causing instability in the rotary table's movement. When the stiffness of the oil film changes significantly, the rotation of the rotary table becomes unstable due to the change in the oil film's supporting force. The oil film cannot maintain the high-precision positioning and movement of the rotary table, leading to inaccurate processing or testing results. Therefore, to address the above-mentioned technical problems, this application provides a hydrostatic rotary table mechanism, including a worktable 1 and a base 2, with a hydraulic chamber 20 provided on the base 2. The hydraulic chamber 20 is used to introduce oil, forming an oil film between the base 2 and the worktable 1 to support the worktable 1. At the same time, a negative pressure groove 21 is also provided on the base 2 opposite to the worktable 1. Thus, a negative pressure chamber 22 is formed between the negative pressure groove 21 on the worktable 1. The negative pressure generated in the negative pressure chamber 22 applies a downward suction force to the worktable 1. When the load on the worktable 1 increases, the oil film will provide an upward support force to balance the load pressure. At this time, in order to avoid the stiffness of the oil film increasing and to balance the support force of the oil film, the negative pressure in the negative pressure chamber 22 provides a downward suction force, so that the worktable 1 maintains a good contact state during the movement, thereby improving the smoothness of the turntable's movement and the positioning accuracy.

[0030] See Figures 1 to 5As shown, this application provides a hydrostatic turntable mechanism, including: a worktable 1 for supporting a workpiece; a base 2 disposed below the worktable 1, at least a portion of which is in contact with the worktable 1; a hydraulic chamber 20 disposed on the base 2, wherein oil is introduced into the hydraulic chamber 20 to form an oil film supporting the worktable 1 between the base 2 and the worktable 1; and a negative pressure groove 21 disposed on the base 2, which is opposite to the worktable 1, and a negative pressure cavity 22 is provided between the negative pressure groove 21 and the worktable 1, through which a downward suction force is applied to the worktable 1.

[0031] The hydrostatic turntable mechanism provided by the present invention includes a worktable 1 and a base 2. The base 2 is disposed below the worktable 1 and is in contact with the worktable 1. The base 2 is provided with a hydraulic chamber 20 and a negative pressure groove 21. During operation, oil is introduced into the hydraulic chamber 20 to form an oil film between the base 2 and the worktable 1. The oil film supports the worktable 1. At the same time, a negative pressure chamber 22 is formed between the worktable 1 and the negative pressure groove 21. A negative pressure is generated in the negative pressure chamber 22 to provide a downward suction force to the worktable 1. Thus, when the load on the worktable 1 changes, the stiffness of the oil film changes accordingly. By adjusting the pressure in the negative pressure chamber 22, the upward supporting force provided by the oil film to the worktable 1 can be balanced, thereby solving the problem of reduced positioning accuracy and poor support stability of the worktable 1 caused by large changes in the thickness and stiffness of the oil film.

[0032] Specifically, the hydrostatic rotary table mechanism also includes: a displacement detection component 3, mounted on the base 2 and opposite to the worktable 1, used to detect the vertical displacement of the worktable 1; a negative pressure regulating component 4, connected to the negative pressure chamber 22, used to regulate the pressure within the negative pressure chamber 22; and a signal connection between the displacement detection component 3 and the negative pressure regulating component 4, which adjusts the pressure within the negative pressure chamber 22 based on the displacement signal from the displacement detection component 3. Through the cooperation between the displacement detection component 3 and the negative pressure regulating component 4, precise control of the pressure within the negative pressure chamber 22 is achieved. In actual use, when the thickness of the oil film changes, the position of the worktable 1 changes accordingly. Therefore, by detecting the displacement of the worktable 1, the change in oil film thickness is fed back, thus enabling the monitoring of oil film thickness variations.

[0033] Preferably, the displacement detection component 3 is a laser displacement sensor, which is mounted on the base 2 via a mounting bracket 30; and / or, the negative pressure regulating component 4 includes a vacuum pump, which regulates the pressure inside the negative pressure chamber 22 by adjusting the output power of the vacuum pump.

[0034] In practical implementation, multiple displacement detection components 3 are arranged at even intervals along the circumferential direction of the base 2. The static pressure turntable mechanism also includes a control module 5, with each displacement detection component 3 and negative pressure adjustment component 4 connected to the control module 5. The control module 5 controls the negative pressure adjustment component 4 to adjust the pressure in the negative pressure chamber 22 based on the detection results of each displacement detection component 3. Preferably, the control module 5 is a PLC controller, which uses multiple displacement detection components 3 to detect different positions of the worktable 1 to improve the detection accuracy of the displacement of the worktable 1.

[0035] The hydrostatic turntable mechanism further includes a support component 23, disposed within the negative pressure chamber 22. The support component 23 extends circumferentially within the negative pressure chamber 22, and its two sides are respectively attached to the bottom surface of the negative pressure chamber 22 and the worktable 1. At least a portion of the support component 23 is movably disposed vertically. Preferably, the support component 23 is a support plate. The attachment of the support component 23 to the worktable 1 simultaneously seals the negative pressure chamber 22, preventing oil from entering it.

[0036] In the specific implementation process, a mounting groove 230 is provided on the bottom surface of the support component 23 that fits against the negative pressure chamber 22. The mounting groove 230 extends along the circumferential direction of the support component 23. The hydrostatic turntable mechanism also includes a sealing ring 24, at least a portion of which is disposed within the mounting groove 230 and is interference-fitted with the mounting groove 230. The sealing ring 24 can be elastically disposed to push the support component 23 to move. Through the cooperation between the sealing ring 24 and the support component 23, the negative pressure chamber 22 is sealed. In the initial state of the mechanism, a vacuum pump is used to evacuate the negative pressure chamber 22. At this time, due to the negative pressure, the sealing ring 24 is compressed downward. When oil is introduced into the hydraulic chamber 20 to generate an oil film, the worktable 1 moves upward. At this time, the sealing ring 24 rebounds and pushes the support component 23 upward, so that the support component 23 always remains in contact with the worktable 1.

[0037] In this application, there are multiple hydraulic chambers 20, which are spaced apart along the circumferential direction of the base 2. One or more negative pressure chambers 22 are located between adjacent hydraulic chambers 20. Preferably, multiple displacement detection components 3 are positioned corresponding to the locations of the multiple hydraulic chambers 20 to detect the thickness of the oil film formed at each hydraulic chamber 20 location. One or more negative pressure chambers 22 between adjacent hydraulic chambers 20 form a group, and each group's negative pressure chamber 22 is connected to a vacuum pump. The control module 5 controls the output power of the corresponding vacuum pump based on the detection results of the displacement detection components 3 at different locations, thereby improving the control accuracy of the force applied to the worktable 1 and maintaining the worktable 1 under force balance.

[0038] In specific implementation, such as Figure 4As shown, the static pressure turntable mechanism also includes: a gas channel 60, which is disposed within the base 2 and communicates with the negative pressure chamber 22, through which gas is output; and an extraction pipe 61, which communicates with the gas channel 60, and is equipped with a flow regulating valve 610, which regulates the gas flow rate within the extraction pipe 61. Specifically, the flow regulating valve 610 is signal-connected to the control module 5.

[0039] Specifically, the hydrostatic turntable mechanism further includes: an oil delivery pipeline 7, which includes a main delivery pipe 70 and output branch pipes 71. The main delivery pipe 70 is arranged around the base 2, and the two ends of the output branch pipes 71 are respectively connected to the hydraulic chamber 20 and the main delivery pipe 70; there are multiple output branch pipes 71, and multiple output branch pipes 71 are arranged one-to-one with multiple hydraulic chambers 20. The hydrostatic turntable mechanism also includes an oil tank 8, which is connected to the main delivery pipe 70. A support frame 9 is provided on the base 2, and at least a portion of the main delivery pipe 70 is arranged on the support frame 9 to support the main delivery pipe 70 and ensure its stability.

[0040] In practical implementation: First, assemble the worktable 1 and base 2, ensuring proper communication between the laser displacement sensor and other components, and set a required static pressure stiffness for the PLC controller; when the static pressure turntable is not working, the sealing surface of the negative pressure groove on the base and the oil cover of the hydraulic chamber are in contact with the worktable. At this time, the sealing ring 24 inside the support component 23 is compressed and deformed, forming a gapless state, and the laser displacement sensor has no displacement change; when the static pressure turntable starts working but has not floated, the sealing ring inside the support component is still... Under compression and deformation, the vacuum pump starts working, creating a negative pressure environment. This draws air out of the negative pressure chamber, lowering the pressure inside to the external pressure, thus generating a downward pulling force and forming a downward preload. This is similar to a closed hydrostatic turntable providing downward pressure preload through its upper chamber. At this time, the displacement change of the laser displacement sensor is small. When the hydrostatic turntable is in operation, the hydraulic chamber 20 of the base 2 and the worktable are filled with oil, forming a tiny oil film gap (generally within 0.01-0.05mm). This allows for... Currently, under hydrostatic pressure support, the compression deformation of the sealing ring 24 within the support component 23 decreases. As the sealing ring recovers its deformation, the support component 23 is lifted upwards. At this time, the sealing surface of the negative pressure groove remains in contact with the worktable, ensuring that the vacuum environment after the turntable floats is not disrupted, and preload continues to be provided. The laser displacement sensor experiences a large displacement change, transmitting the oil film thickness change ΔH to the PLC controller. The PLC controller, through algorithms and control strategies, calculates the required vacuum pressure and adjusts the vacuum pump output to match the corresponding pressure load via the vacuum pump regulator. When the processed parts (of known weight) are placed on the hydrostatic turntable, the load increases, and the oil film thickness changes significantly. The laser displacement sensor again transmits the oil film thickness change ΔH to the PLC controller, which, through algorithms and control strategies, calculates the required vacuum pressure and adjusts the vacuum pump output to match the corresponding pressure load via the vacuum pump regulator. The sizes of the negative pressure chamber and hydraulic chamber are determined based on the required preload and load. The magnitude of the preload can be controlled by adjusting the throttle valve. This implementation method achieves high-precision and high-stability hydrostatic turntable operation while ensuring structural simplification and ease of manufacturing. A change in oil film thickness exceeding 0.001 mm is considered a significant change. In this case, the laser displacement sensor transmits the oil film thickness change ΔH to the PLC controller. The PLC controller calculates the required vacuum pressure using algorithms and control strategies, and adjusts the vacuum pump output pressure load accordingly via a vacuum pump regulator, achieving feedback control. This method can be used in any instance that causes changes in oil film thickness, including but not limited to changes caused by air in the oil film or changes caused by components.

[0041] In one embodiment of the present invention: a 100kg part G1 is placed on a hydrostatic turntable, and the oil film thickness change ΔH is measured to be 0.002mm. The set oil film stiffness K is 2000N / micrometer. The turntable weight G2 is 100kg, the hydrostatic pressure P is 1bar, and the hydrostatic area S is 0.1cm². 2 ,

[0042] Then F 静压 =P*S=100000Pa*0.001m 2 =1000N, upward;

[0043] F 预载力 =K*ΔH=2000*2=4000N, downwards;

[0044] F 预载力 =G1+G2+F 真空 -F 静压 ,

[0045] Then F 真空 =3000N, downwards;

[0046] F 真空 =3000N is the adjustment value of the vacuum pump regulator.

[0047] Vacuum preloading technology introduces preload force, so that the stiffness of the oil film is determined not only by the load but also by the combined effect of the preload force and the oil chamber pressure. The introduction of preload force effectively increases the stiffness of the hydrostatic turntable, improving its resistance to external disturbances and deformation. This helps improve the turntable's stability and vibration resistance, increasing its operational accuracy and reliability. The accuracy and stability of the hydrostatic turntable depend on the system's preload effect and its response to external loads. Vacuum preloading technology provides precise mechanical preload, ensuring good contact during the turntable's movement, thereby improving the smoothness of movement and positioning accuracy. Specifically, vacuum preloading technology uses a vacuum pump to create a negative pressure environment below atmospheric pressure within the vacuum chamber, subjecting the hydrostatic turntable to a downward pulling force, thus forming a preloaded state. Because the preload force achieved using vacuum preloading technology is more precise and reliable, the hydrostatic turntable is more stable during operation, effectively reducing system dynamic errors and vibrations. Furthermore, the high precision of vacuum preloading technology ensures the system's preload effect, thereby improving the system's response to external loads. When the system is subjected to external loads, the balance between the preload and the external load is very stable. This stability ensures that the hydrostatic turntable can quickly and accurately achieve changes in any angle to meet the accuracy requirements of different working conditions.

[0048] The hydrostatic turntable mechanism in this application enables adaptive hydrostatic support under different load conditions. Real-time feedback from the laser displacement sensor and the calculation and control strategy of the PLC controller allow the vacuum preload adjustment to be adjusted in real time according to the weight changes of the processed parts to maintain an appropriate preload force, thereby achieving high-precision and high-stability turntable operation. This hydrostatic turntable mechanism achieves precise control of the hydrostatic turntable by using a vacuum preload feedback adjustment system combined with components such as a laser displacement sensor, PLC controller, and vacuum pump regulator. It has advantages such as simplified structure and convenient manufacturing, and can adapt to adaptive control requirements under different load conditions, improving the stability and accuracy of the hydrostatic turntable.

[0049] The present invention also provides a processing device, including a hydrostatic turntable mechanism, wherein the hydrostatic turntable mechanism is the hydrostatic turntable mechanism described above.

[0050] In practical applications, a hydrostatic rotary table is a rotary table device that utilizes liquid pressure to generate support and transmit torque. An open hydrostatic rotary table has several oil chambers on one side of the bed, and lubricating oil is supplied to these chambers through an oil supply system. The working process of the hydrostatic rotary table is described as follows: Initial state: When the rotary table is not in operation, the moving parts are in contact with the supporting components under the influence of gravity. At this time, there is no lubricating oil in the oil chambers of the hydrostatic rotary table, and the oil film is absent. Start of operation: When the rotary table starts working, lubricating oil enters the oil chambers of the rotary table through the oil supply system. The oil supply system includes a hydraulic pump, pipelines, and throttle valves to ensure the formation and maintenance of the oil film. Oil film formation: The lubricating oil forms an oil film with a certain pressure in the oil chambers, and the thickness and pressure of the oil film are controlled by the equipment and regulating devices in the oil supply system. The force generated by the oil film balances the weight and load-bearing capacity of the moving parts, thereby providing support for the moving parts on the rotary table and achieving liquid lubrication. Force balance adjustment: When the load increases, the throttle's adjustment reduces the oil film thickness and increases its pressure to maintain force balance. This ensures the turntable maintains stable operation even under increased load. Based on this working principle, the open hydrostatic turntable utilizes liquid pressure to form a lubricating oil film, providing stable support and torque transmission. This liquid lubrication method reduces friction and wear, improving the turntable's accuracy and lifespan. While the open hydrostatic turntable has a simpler structure compared to other hydrostatic turntables, it suffers from lower oil film stiffness under small loads, leading to lower accuracy. The oil film pressure of the open hydrostatic turntable is solely determined by the load, limiting its load-bearing capacity and accuracy, making it more suitable for heavy-load applications.

[0051] A closed hydrostatic turntable is a turntable device that uses liquid pressure to provide support and transmit torque. Unlike an open hydrostatic turntable, a closed hydrostatic turntable has oil chambers on both sides of the turntable, and uses lubricating oil circulated through an oil supply system. The following is a description of the working process of a closed hydrostatic turntable: Initial state: When the turntable is not in operation, the moving parts are in contact with the supporting components under the influence of gravity. At this time, the lubricating oil circulating in the oil supply system of the closed hydrostatic turntable enters the oil chambers on both sides through pressure pipelines. Start of operation: When the turntable starts working, the lubricating oil in the oil supply system flows to the hydrostatic turntable through the oil chambers at a certain pressure. The lubricating oil in the oil chambers forms an oil film of a certain thickness, which bears the weight of the moving parts and provides support. Pressure control: The oil supply system of a closed hydrostatic turntable is usually equipped with a pressure control device (such as a pressure regulating valve) to ensure that the oil film thickness and oil film pressure are within the set range. This ensures a stable and reliable lubricating oil film supporting moving parts, and avoids the adverse effects of excessively high or low lubricating oil pressure on the turntable performance. Oil circulation: After forming an oil film in the oil chamber, the lubricating oil flows along the turntable surface, carrying away the heat generated by friction, and returns to the oil supply system through the return oil line for reuse. This keeps the lubricating oil in the turntable clean and cooled, helping to improve lubrication and extend the turntable's service life. Through a closed oil supply system and the circulation of lubricating oil, the closed hydrostatic turntable can stably and reliably provide lubricating oil film support and transmit torque. Closed hydrostatic turntables are typically used in applications requiring higher precision, larger loads, and longer lifespans, such as precision machining equipment, large assembly lines, and heavy machinery. Compared to open hydrostatic turntables, closed hydrostatic turntables offer higher rigidity and precision due to the pre-loading of liquid in the upper chamber, which improves oil film rigidity. This structure is more complex than open hydrostatic turntables, making manufacturing and adjustment more difficult, and requiring higher levels of technical expertise from processing equipment and assembly personnel. Hydrostatic rotary tables require strict control over machining accuracy and hydraulic system leakage during manufacturing to ensure their precision and stability. The vacuum preload hydrostatic rotary table is an innovative structure that achieves preload while reducing structural complexity and improving manufacturing and assembly convenience. In this structure, vacuum technology removes gas from the hydraulic system, achieving precise preload of the gas film under sub-atmospheric pressure conditions. This improves the oil film stiffness and load-bearing capacity of the hydrostatic rotary table, reduces structural complexity and manufacturing costs, and provides easier maintenance, repair, and cleaning. Therefore, this hydrostatic rotary table mechanism is proposed in this application.

[0052] As can be seen from the above description, the embodiments of this application achieve the following technical effects:

[0053] The hydrostatic turntable mechanism provided by the present invention includes a worktable 1 and a base 2. The base 2 is disposed below the worktable 1 and is in contact with the worktable 1. The base 2 is provided with a hydraulic chamber 20 and a negative pressure groove 21. During operation, oil is introduced into the hydraulic chamber 20 to form an oil film between the base 2 and the worktable 1. The oil film supports the worktable 1. At the same time, a negative pressure chamber 22 is formed between the worktable 1 and the negative pressure groove 21. A negative pressure is generated in the negative pressure chamber 22 to provide a downward suction force to the worktable 1. Thus, when the load on the worktable 1 changes, the stiffness of the oil film changes accordingly. By adjusting the pressure in the negative pressure chamber 22, the upward supporting force provided by the oil film to the worktable 1 can be balanced, thereby solving the problem of reduced positioning accuracy and poor support stability of the worktable 1 caused by large changes in the thickness and stiffness of the oil film.

[0054] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0055] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be construed as limiting the scope of protection of this application.

[0056] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A hydrostatic rotary table mechanism, characterized in that, include: Workbench (1), used to support workpieces; A base (2) is disposed below the workbench (1), and at least a portion of the base (2) is in contact with the workbench (1); A hydraulic chamber (20) is provided on the base (2), and oil is introduced into the hydraulic chamber (20) to form an oil film supporting the worktable (1) between the base (2) and the worktable (1); A negative pressure groove (21) is provided on the base (2), the negative pressure groove (21) is opposite to the worktable (1), and there is a negative pressure cavity (22) between the negative pressure groove (21) and the worktable (1), through which a downward suction force is applied to the worktable (1); A displacement detection component (3) is disposed on the base (2) and opposite to the worktable (1). The displacement detection component (3) is used to detect the displacement of the worktable (1) in the vertical direction. The negative pressure regulating component (4) is connected to the negative pressure chamber (22), and the negative pressure regulating component (4) is used to regulate the pressure inside the negative pressure chamber (22); The displacement detection component (3) is signal-connected to the negative pressure regulating component (4), and the negative pressure regulating component (4) adjusts the pressure in the negative pressure chamber (22) according to the displacement signal of the displacement detection component (3); The displacement detection components (3) are multiple, and the multiple displacement detection components (3) are evenly spaced along the circumferential direction of the base (2); the hydrostatic turntable mechanism further includes: The control module (5) is connected to each of the displacement detection components (3) and the negative pressure adjustment component (4). The control module (5) controls the negative pressure adjustment component (4) to adjust the pressure in the negative pressure chamber (22) according to the detection results of each of the displacement detection components (3). The hydrostatic rotary table mechanism also includes: Gas channel (60) is disposed in the base (2) and is connected to the negative pressure chamber (22). Gas in the negative pressure chamber (22) is output through the gas channel (60). The gas extraction pipeline (61) is connected to the gas channel (60). A flow regulating valve (610) is provided on the gas extraction pipeline (61) to regulate the gas flow rate in the gas extraction pipeline (61).

2. The hydrostatic rotary table mechanism according to claim 1, characterized in that, The displacement detection component (3) is a laser displacement sensor; and / or, The negative pressure regulating component (4) includes a vacuum pump.

3. The hydrostatic rotary table mechanism according to claim 1, characterized in that, The hydrostatic rotary table mechanism also includes: A support component (23) is disposed in the negative pressure chamber (22). The support component (23) extends along the circumferential direction of the negative pressure chamber (22). The two sides of the support component (23) are respectively attached to the bottom surface of the negative pressure chamber (22) and the worktable (1). At least a portion of the support member (23) is movably disposed in the vertical direction.

4. The hydrostatic rotary table mechanism according to claim 3, characterized in that, The bottom surface of the support member (23) that is in contact with the negative pressure chamber (22) is provided with a mounting groove (230), and the mounting groove (230) extends along the circumferential direction of the support member (23); the static pressure turntable mechanism further includes: A sealing ring (24) is provided at least in the mounting groove (230) and is interference-fitted with the mounting groove (230). The sealing ring (24) is elastically provided to push the support member (23) to move.

5. The hydrostatic rotary table mechanism according to claim 1, characterized in that, There are multiple hydraulic chambers (20), and the multiple hydraulic chambers (20) are spaced apart along the circumferential direction of the base (2); There are one or more negative pressure chambers (22) between two adjacent hydraulic chambers (20).

6. The hydrostatic rotary table mechanism according to claim 5, characterized in that, The hydrostatic rotary table mechanism also includes: The oil delivery pipeline (7) includes a main delivery pipe (70) and an output branch pipe (71). The main delivery pipe (70) is arranged around the base (2), and the two ends of the output branch pipe (71) are respectively connected to the hydraulic chamber (20) and the main delivery pipe (70). There are multiple output branch pipes (71), and each of the multiple output branch pipes (71) is arranged in a one-to-one correspondence with a multiple hydraulic chamber (20).

7. A processing equipment, comprising a hydrostatic rotary table mechanism, characterized in that, The hydrostatic turntable mechanism is the hydrostatic turntable mechanism as described in any one of claims 1 to 6.

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