Spraying assembly and spraying equipment

Abstract

The present application provides a spray assembly and a spray device, wherein the spray assembly includes a spray plate, and a first gas movement path is provided on the spray plate, wherein the first gas movement path includes at least one first sub-channel arranged in layers in the direction of the height of the spray plate, and adjacent first sub-channels are connected through first connecting holes, and at least two first connecting holes are provided, and the projections of the first connecting holes located in adjacent layers on the bottom surface of the spray plate do not overlap. In this way, the process gas can be dispersed downward layer by layer from multiple first sub-channels arranged in layers, and adjacent first sub-channels are connected through first connecting holes, and multiple first connecting holes are provided, and the projections of multiple first connecting holes in the height direction of the spray plate do not overlap, so that the process gas can be evenly sprayed onto the object to be sprayed, the diffusion distance of the gas is increased, and the uniformity of the gas spraying is good.

Description

Technical Field

[0001] The present application relates to the technical field of atomic layer deposition equipment, and in particular to a spray assembly and a spray equipment. Background Art

[0002] The spray system designed and adopted by the existing mainstream atomic layer vapor deposition (ALD) manufacturers is generally designed with several layers of ventilation plates stacked together. Each layer of the plate takes in air through the side or top surface, and then the gas passes through the internal air channels of each layer of the plate to finally reach the spray plate to achieve gas spraying. The purpose of the multi-layer ventilation plate stacking design is to isolate the reaction gases according to their respective air channels, but the consequence of this design is that the design of the gas uniform flow channel is limited, the diffusion distance of the reaction gas is short, and multiple air channels are involved between the plates, which easily leads to sealing failure, and the assembly is difficult, resulting in poor uniformity of gas spraying. Summary of the invention

[0003] In view of this, the present application provides a spray assembly that solves the problems of short diffusion distance of reaction gas, poor uniformity of gas spraying, easy leakage, and high assembly difficulty. The present application also provides a spray device including the above-mentioned spray assembly.

[0004] In order to achieve the above objectives, this application provides the following technical solutions:

[0005] A spray assembly includes a spray plate, on which a first gas movement path is opened, the first gas movement path includes at least one first sub-channel arranged in layers in the direction of the height of the spray plate, and adjacent first sub-channels are connected by first connecting through holes, at least two first connecting through holes are provided, and the projections of the first connecting through holes located in adjacent layers on the bottom surface of the spray plate do not overlap.

[0006] Optionally, a plurality of the first connecting through holes are evenly arranged in the length direction of the shower plate.

[0007] Optionally, in the length direction of the shower plate, a plurality of the first connecting through holes located in each layer are symmetrically arranged about the middle of the first branch channel.

[0008] Optionally, a plurality of first gas movement paths are provided on the shower plate, and the first gas movement paths are intake paths of process gas and / or intake paths of isolation gas.

[0009] Optionally, a second gas movement path is opened on the spray plate, and the second gas movement path includes a plurality of second sub-channels arranged in layers in the direction of the height of the spray plate, and adjacent second sub-channels are connected by second connecting through holes, and there are multiple second connecting through holes, and the projections of the second connecting through holes located in adjacent layers on the bottom surface of the spray plate overlap.

[0010] Optionally, a plurality of second gas movement paths are provided on the shower plate, and the second gas movement path is a gas extraction path.

[0011] Optionally, a plurality of inlet paths for the process gas are provided, a plurality of exhaust paths are provided, and a plurality of inlet paths for the isolation gas are provided, wherein:

[0012] In the direction of the width of the shower plate, the exhaust paths are arranged on both sides of the inlet path of each process gas, and the inlet paths of some of the isolation gases are located in the middle of the shower plate;

[0013] The remaining inlet paths of the isolation gas are located outside the inlet path of the process gas and the exhaust path to form an annular path.

[0014] Optionally, in the height direction of the shower plate, each of the first gas movement paths is connected to an air inlet opened at the end of the shower plate, and each of the air extraction paths is connected to an air extraction port opened at the end of the shower plate.

[0015] Optionally, the spray plate is an integrally formed structure.

[0016] Optionally, the gas inlet path of the process gas includes a gas homogenizing groove arranged at a gas outlet end of the path, and a plurality of gas outlets for spraying gas toward the object to be sprayed are arranged in the gas homogenizing groove.

[0017] Optionally, it further includes a plurality of outer plugs and an inner plug for sealing the connecting through holes, wherein the outer plugs and the inner plugs partially seal the connecting through holes so that the projections of the plurality of first connecting through holes connected to the first sub-channels in the direction of the height of the spray plate do not overlap.

[0018] A spraying device comprises the spraying assembly described in any one of the above items.

[0019] The spray assembly provided in the present application opens a first gas movement path on the spray plate, and the first gas movement path includes multiple first sub-channels arranged in layers in the height direction of the spray plate, so that the process gas can be dispersed downward layer by layer from the multiple first sub-channels arranged in layers, and adjacent first sub-channels are connected through first connecting through holes. There are multiple first connecting through holes, and the projections of the multiple first connecting through holes in the height direction of the spray plate do not overlap. In this way, the process gas can be evenly sprayed onto the object to be sprayed, the diffusion distance of the gas is increased, and the uniformity of the gas spraying is good.

[0020] Moreover, the integrated setting of the spray assembly reduces the seams of the layers, avoids the setting of structures such as sealing rings, reduces the risk of gas leakage, and improves the airtightness and safety of the overall structure of the spray assembly.

[0021] In addition, the present application creatively integrates the air extraction structure into the spray assembly, and the air extraction structure and the spray assembly are integrally formed, thus avoiding the separate setting of the air extraction structure, making the overall layout of the air intake structure and the air extraction structure more reasonable, improving the degree of integration of the air extraction structure and the air intake structure, and improving the airtightness of the overall structure of the spray assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0023] Figure 1 A three-dimensional diagram of the spray assembly provided for this embodiment;

[0024] Figure 2 It is a bottom view of the spray assembly;

[0025] Figure 3 is a top view of the spray assembly;

[0026] Figure 4 for Figure 3 Sectional view at AA;

[0027] Figure 5 for Figure 3 Sectional view at the middle BB;

[0028] Figure 6 for Figure 3 Cross-section at CC;

[0029] Figure 7 for Figure 3 Sectional view at DD;

[0030] Figure 8 for Figure 3 Sectional view at EE;

[0031] Fig. 9 It is a front view of the spray assembly;

[0032] Fig.10 for Fig. 9 Cross-sectional view at FF.

[0033] exist Figure 1-Figure 10 middle:

[0034] 1-Spray plate;

[0035] 11-first gas movement path, 12-gas inlet, 13-gas extraction port, 14-external plug, 15-internal plug, 16-second gas movement path;

[0036] 111-first sub-channel, 112-first connecting through hole, 113-gas uniforming groove, 114-gas outlet of process gas, 115-gas outlet of isolation gas, 116-gas inlet path of process gas, 117-gas inlet path of isolation gas, 121-gas inlet of process gas, 122-gas inlet of isolation gas, 161-second sub-channel, 162-second connecting through hole, 163-gas inlet of gas to be extracted. DETAILED DESCRIPTION

[0037] The present application provides a spray assembly and a spray device including the spray assembly.

[0038] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0039] like Figure 1-Figure 10 As shown, an embodiment of the present application provides a spray assembly, which is a component of a spray device, and the spray device is a component of a spatially isolated atomic layer deposition device. The spray assembly mainly includes a spray plate 1, on which a first gas movement path 11 is opened, and the first gas movement path 11 includes at least one first branch channel 111 arranged in layers in the direction of the height of the spray plate 1, and adjacent first branch channels 111 are connected through first connecting through holes 112, and at least two first connecting through holes 112 are provided, and in the direction of the height of the spray plate 1, the projections of the first connecting through holes 112 located in adjacent layers do not overlap. Specifically, in Figure 4In the direction indicated by the bidirectional arrow Z, taking the first gas moving path 11 as being divided into an upper first sub-channel, a middle first sub-channel and a lower first sub-channel from top to bottom as an example, the flow process of the spray gas in the spray plate 1 is as follows: the gas enters the upper first sub-channel of the first gas moving path 11 through the process gas inlet 121 or the isolation gas inlet 122, the gas diffuses in the upper first sub-channel, and then the gas enters the middle first sub-channel through the first connecting through hole 112 between the upper first sub-channel and the middle first sub-channel, and then the gas is The gas diffuses in the middle first sub-channel, and then enters the lower first sub-channel through the first connecting through hole 112 between the middle first sub-channel and the lower first sub-channel, and then the gas diffuses in the lower first sub-channel; and, on the basis of the above, a plurality of first connecting through holes 112 are provided, and the projections of the first connecting through holes 112 located in adjacent layers on the bottom surface of the spray plate 1 do not overlap, so that the gas can fully diffuse in the previous first sub-channel 111 and then flow into the next first sub-channel 111, so that the uniformity of the gas spraying the object to be sprayed is better.

[0040] It should be noted that the projections of the first connecting through holes 112 located in adjacent layers on the bottom surface of the shower plate 1 do not overlap. Preferably, the projections of all the first connecting through holes 112 on the bottom surface of the shower plate 1 do not overlap.

[0041] It should also be noted that one or more first gas movement paths 11 can be set, and the first gas movement path 11 can be an intake path 116 for process gas and / or an intake path 117 for isolation gas. Accordingly, the gas flowing in the first gas movement path 11 can be a process gas and / or an isolation gas.

[0042] It should also be noted that the number of first sub-channels 111 is not limited herein, and the number of first sub-channels 111 can be at least one; preferably, the number of first sub-channels 111 is at least two; more preferably, the number of first sub-channels 111 is at least three, thereby further improving the uniformity of gas diffusion.

[0043] It should be noted that the bottom surface of the spray plate 1 refers to the bottom surface of the spray plate 1. Figure 4 The lower surface in the direction indicated by the double-headed arrow Z.

[0044] Furthermore, in the height direction of the spray plate 1, the number of the first connecting through holes 112 increases from the spray gas inlet 12 of the first gas movement path 11 to the spray gas outlet. Such a setting can make the gas spray more uniform when spraying the gas toward the object to be sprayed, thereby further improving the molding effect of the object to be sprayed.

[0045] The spray assembly of the above structure is provided with a first gas movement path 11 on the spray plate 1. The first gas movement path 11 includes a plurality of first sub-channels 111 arranged in layers in the height direction of the spray plate 1. In this way, the process gas can be dispersed downward layer by layer from the plurality of first sub-channels 111 arranged in layers, and adjacent first sub-channels 111 are connected through first connecting through holes 112. A plurality of first connecting through holes 112 are provided, and the projections of the first connecting through holes 112 located in adjacent layers on the bottom surface of the spray plate 1 do not overlap. In this way, the process gas can be evenly sprayed onto the object to be sprayed, thereby increasing the diffusion distance of the gas and improving the uniformity of the gas spraying.

[0046] In some embodiments, a plurality of first connecting through holes 112 are evenly arranged in the length direction of the shower plate 1. Specifically, evenly arranging the first connecting through holes 112 can make the gas gradually and evenly diffuse to various positions of the first sub-channels 111 in the length direction of the shower plate 1 during the gas circulation in the plurality of gas channels, thereby further improving the uniformity of gas spraying.

[0047] It should be noted that the length direction of the shower plate 1 refers to Figure 2 and Figure 3 The direction is indicated by the double-headed arrow X.

[0048] In addition, the positions of the first connecting through holes 112 may also be arranged in other ways. In the length direction of the spray plate 1, the first connecting through holes 112 may not be evenly arranged, for example: the number of the first connecting through holes 112 located in the middle is greater than the number of the first connecting through holes 112 located at the end, or the number of the first connecting through holes 112 located in the middle is less than the number of the first connecting through holes 112 located at the end.

[0049] In some embodiments, in the length direction of the shower plate 1, the plurality of first connecting through holes 112 located in each layer are symmetrically arranged about the middle of the first sub-channel 111. The plurality of first connecting through holes 112 located in each layer are symmetrically arranged about the middle of the first sub-channel 111, so that the gas entering from the air inlet 12 can be quickly dispersed to various positions of the first sub-channel 111 in the length direction of the shower plate 1.

[0050] In some embodiments, a plurality of first gas moving paths 11 are provided on the shower plate 1, and the first gas moving paths 11 are the inlet paths 116 of the process gas and / or the inlet paths 117 of the isolation gas. Specifically, part of the first gas moving paths 11 are the inlet paths 116 of the process gas, and part of the first gas moving paths 11 are the inlet paths 117 of the isolation gas. Here, setting the inlet paths 116 of the process gas and the inlet paths 117 of the isolation gas as the first gas moving paths 11 of the above structure can greatly improve the gas intake uniformity.

[0051] Exemplarily, the first gas movement path 11 is the inlet path 116 for the process gas; the first gas movement path 11 is the inlet path 117 for the isolation gas; part of the first gas movement path 11 is the inlet path 116 for the process gas, and part of the first gas movement path 11 is the inlet path 117 for the isolation gas.

[0052] In addition, the process gas intake path 116 may be set to have the structure of the first gas movement path 11 described above, and the isolation gas intake path 117 may have another structure.

[0053] In some embodiments, a second gas movement path 16 is opened on the shower plate 1, and the second gas movement path 16 includes a plurality of second sub-channels 161 arranged in layers in the height direction of the shower plate 1, and adjacent second sub-channels 161 are connected through second connecting holes 162, and there are multiple second connecting holes 162, and the projections of the second connecting holes 162 located in adjacent layers on the bottom surface of the shower plate 1 overlap.

[0054] Furthermore, in some embodiments, a plurality of second gas moving paths 16 are provided on the shower plate 1 , and the second gas moving paths 16 are gas extraction paths.

[0055] Specifically, taking the second gas moving path 16 divided into an upper second sub-channel and a lower second sub-channel from top to bottom as an example, after the process gas reacts with the object to be sprayed, the second gas moving path 16 is used to evacuate gas, and the gas enters the lower second sub-channel through a plurality of second connecting through holes 162, and then the gas enters the upper second sub-channel through the second connecting through holes 162 between the lower second sub-channel and the upper second sub-channel, and then is evacuated from the gas extraction port 13. Here, by providing a plurality of second connecting through holes 162, and the projections of the second connecting through holes 162 located in adjacent layers on the bottom surface of the spray plate 1 overlap, the evacuation efficiency of the second gas moving path 16 can be improved, so that the residual process gas can be quickly evacuated, and the spraying efficiency can be improved.

[0056] It should be noted that the number of the second sub-channels 161 is not limited herein, and the number of the second sub-channels 161 may be 2, 3, 4, 5, 6, and so on.

[0057] In some embodiments, a plurality of process gas inlet paths 116 are provided, a plurality of exhaust paths are provided, and a plurality of isolation gas inlet paths 117 are provided. Here, the process gas inlet paths 116, the isolation gas inlet paths 117, and the exhaust paths are all provided in a plurality, which can improve the efficiency of thin film growth or deposition. Specifically, the process gas inlet path 116 refers to the first gas movement path 11 at the positions of the process gas outlet 114 and the process gas inlet 121, the exhaust path refers to the second gas movement path 16 at the positions of the exhaust port 13 and the inlet 163 of the gas to be exhausted, and the isolation gas inlet path 117 refers to the first gas movement path 11 at the positions of the isolation gas outlet 115 and the isolation gas inlet 122.

[0058] It should be noted that providing a plurality of inlet paths 116 for process gases includes providing a plurality of inlet paths 116 for process gases of different types, and providing a plurality of inlet paths 116 for process gases of the same type.

[0059] In the present embodiment, further, in the width direction of the spray plate 1, exhaust paths are arranged on both sides of the air inlet path 116 of each process gas, so that after the process gas is sprayed onto the object to be sprayed, the residual process gas can be quickly extracted through the exhaust path close to the air inlet path 116 of the process gas, thereby improving the exhaust speed and further improving the processing efficiency of the atomic layer deposition equipment; the air inlet path 117 of part of the isolation gas is located in the middle of the spray plate 1, so that when the isolation gas is used to purge the object to be sprayed, the residual process gas on the object to be sprayed can be quickly purged clean, thereby improving the purging efficiency.

[0060] Taking the spraying of two process gases by the spray assembly as an example, two different process gases flow in the two process gas dispersion paths respectively, and the two process gases successively contact and react with the surface of the sprayed object. Since the two process gases will also react with each other, the exhaust paths are set on both sides of the process gas inlet path 116 to exhaust the reacted and excess process gases; the isolation gas inlet path 117 is to further remove the residual process gas on the surface of the sprayed object to prevent the second process gas from reacting with the residual first process gas on the surface of the sprayed object, and it also has the function of establishing a "gas wall" to separate the two process gases.

[0061] On the basis of the above, further, the air inlet path 117 of the remaining isolation gas is located outside the air inlet path 116 of the process gas and the exhaust path to form an annular path, so that the isolation gas can purge the spray object from the middle and all around at the same time, further improving the processing efficiency of the atomic layer deposition equipment.

[0062] It should be noted that the width direction of the shower plate 1 refers to Figure 3 The direction is indicated by the double-headed arrow Y.

[0063] In some embodiments, in the height direction of the shower plate 1, each first gas movement path 11 is connected to the air inlet 12 opened at the end of the shower plate 1, and each air extraction path is connected to the air extraction port 13 opened at the end of the shower plate 1. Specifically, each first gas movement path 11 is connected to an air inlet 12, and each air extraction path is connected to the air extraction port 13. Here, the air inlet 12 or the air extraction port 13 is set in the middle of the length direction of the shower plate 1, so as to further make the gas evenly distributed in the dispersed path or improve the gas extraction efficiency.

[0064] In some embodiments, the shower plate 1 is an integrally formed structure. Specifically, the shower plate 1 is set as an integrally formed steel plate, and multiple first gas moving paths 11 are formed by opening holes or grooves in the steel plate to achieve the entry and exhaust of process gas and isolation gas.

[0065] It should be noted that, in addition to the above-mentioned hole-making and slotting method, the integral molding method of the spray plate 1 may also be other methods, such as casting molding or injection molding.

[0066] Here, by setting the spray plate 1 as an integrally formed structure, the seams of the layers are reduced, the setting of structures such as sealing rings is avoided, the risk of gas leakage is reduced, and the airtightness and safety of the overall structure of the spray assembly are improved.

[0067] In addition, the shower plate 1 can also be arranged through other structures or in other forms. For example, each first gas movement path 11 is an integrally formed structure. With this arrangement, when the gas flows in the dispersion path, its air tightness can be improved to avoid gas leakage.

[0068] In some embodiments, the gas inlet path 116 of the process gas includes a gas uniforming groove 113 arranged at the gas outlet end of the path, and a plurality of gas outlets for spraying gas toward the object to be sprayed are arranged in the gas uniforming groove 113. Specifically, when the process gas diffuses downward layer by layer along the plurality of first sub-channels 111 of the first gas moving path 11, the gas uniforming groove 113 is arranged at the gas outlet end of the path. The gas uniforming groove 113 can make the gas spray more uniform and improve the reaction rate between the object to be sprayed and the process gas.

[0069] In some embodiments, the spray assembly further includes a plurality of outer plugs 14 and inner plugs 15 for blocking the first connecting through holes 112, and the outer plugs 14 and the inner plugs 15 block a portion of the first connecting through holes 112 so that the projections of the plurality of first connecting through holes 112 connected to the first sub-channels 111 on the bottom surface of the spray plate 1 do not overlap. Specifically, taking the example of grooving and drilling on a steel plate to form the first gas movement path 11, the first connecting through hole 112 punched into the steel plate from one end of the steel plate will penetrate a first sub-channel 111 or penetrate a plurality of adjacent first sub-channels 111. Here, by setting a plurality of outer plugs 14 and inner plugs 15 to block a portion of the first connecting through holes 112, the first connecting through holes 112 that need to be closed are closed, thereby achieving the non-overlapping projections of the plurality of first connecting through holes 112 connected to the first sub-channels 111 in the height direction of the spray plate 1, thereby achieving the uniformity of gas spraying and improving the molding effect of the object to be sprayed.

[0070] A spraying device includes the above-mentioned spraying assembly. Since the spraying device includes the above-mentioned spraying device, the beneficial effects of the spraying device brought by the spraying assembly can be referred to the above content, which will not be repeated here.

[0071] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0072] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0073] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0074] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0075] It should be understood that the qualifiers "first", "second", "third", "fourth", "fifth" and "sixth" used in the description of the embodiments of the present application are only used to more clearly explain the technical solutions and cannot be used to limit the scope of protection of the present application.

[0076] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A spray assembly, characterized in that: The invention comprises a shower plate, wherein a first gas movement path is provided on the shower plate, wherein the first gas movement path comprises at least one first sub-channel arranged in layers in the direction of the height of the shower plate, and adjacent first sub-channels are connected through first connecting through holes, at least two first connecting through holes are provided, and the projections of the first connecting through holes located in adjacent layers on the bottom surface of the shower plate do not overlap; the first gas movement path is an intake path for process gas and / or an intake path for isolation gas, a second gas movement path is provided on the shower plate, and the second gas movement path is an exhaust path; a plurality of intake paths for process gas are provided, a plurality of exhaust paths are provided, and a plurality of intake paths for isolation gas are provided, wherein: In the direction of the width of the shower plate, the exhaust paths are arranged on both sides of the inlet path of each process gas, and the inlet paths of some of the isolation gases are located in the middle of the shower plate; The remaining inlet paths of the isolation gas are located outside the inlet path of the process gas and the exhaust path to form an annular path.

2. The spray assembly according to claim 1, characterized in that: In the length direction of the shower plate, a plurality of the first connecting through holes are evenly arranged.

3. The spray assembly according to claim 1 or 2, characterized in that: In the length direction of the shower plate, a plurality of the first connecting through holes located in each layer are symmetrically arranged about the middle of the first branch channel.

4. The spray assembly according to claim 1, characterized in that: A plurality of the first gas moving paths are provided on the shower plate.

5. The spray assembly according to claim 1, characterized in that: The second gas movement path includes a plurality of second sub-channels arranged in layers in the direction of the height of the shower plate, and adjacent second sub-channels are connected by second connecting through holes. There are a plurality of second connecting through holes, and the projections of the second connecting through holes located in adjacent layers on the bottom surface of the shower plate overlap.

6. The spray assembly according to claim 5, characterized in that: A plurality of the second gas moving paths are provided on the shower plate.

7. The spray assembly according to claim 4, characterized in that: In the height direction of the shower plate, each of the first gas movement paths is communicated with an air inlet opened at the end of the shower plate, and each of the air extraction paths is communicated with an air extraction port opened at the end of the shower plate.

8. The spray assembly according to claim 1, characterized in that: The spray plate is an integrally formed structure.

9. The spray assembly according to claim 4, characterized in that: The gas inlet path of the process gas comprises a gas homogenizing groove arranged at the gas outlet end of the path, and a plurality of gas outlets for spraying gas toward the object to be sprayed are arranged in the gas homogenizing groove.

10. The spray assembly according to claim 2, characterized in that: It also includes a plurality of outer plugs and inner plugs for sealing the connecting through holes, wherein the outer plugs and the inner plugs seal part of the connecting through holes so that the projections of the plurality of first connecting through holes connected to the first branch channels in the direction of the height of the spray plate do not overlap.

11. A spraying device, characterized in that: The invention comprises the spray assembly according to any one of claims 1 to 10.

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