Electronic grade silicon rod appearance automatic detection and identification equipment and its detection process

Abstract

The application relates to the technical field of silicon rod detection, in particular to an electronic-grade silicon rod appearance automatic detection and marking device and a detection process thereof. The device comprises a detection table, one end of a detection bin is provided with a telescopic supporting rod, the other end is fixedly provided with a rotating motor, one side of the detection table is provided with a driving groove, the inside of the driving groove is slidably provided with a detection sliding block, one side of an arc-shaped supporting arm is provided with a visual identifier, and a laser marker is arranged on a vertical telescopic rod. The rotating motor can drive the silicon rod to rotate. After the visual identifier detects the defects on the silicon rod, a central processing chip processes information and pushes the information to the vertical telescopic rod on the arc-shaped supporting arm. The laser marker moves downward and marks the defective part on the silicon rod. The consistency of the operation is improved, the quality is more stable, impurity pollution is less, and the product yield is more stable.

Description

Technical Field

[0001] This invention relates to an automatic inspection and labeling device and its inspection process, and in particular to an automatic inspection and labeling device and its inspection process for the appearance of electronic-grade silicon rods, belonging to the field of silicon rod inspection technology. Background Technology

[0002] In the production process of electronic-grade polysilicon, the silicon rods produced in the reduction workshop need to undergo appearance inspection and pretreatment. Silicon rods that meet the electronic-grade requirements are pretreated by knocking off the carbon head, knocking off the crossbeam, and knocking off the silicon rods whose surface appearance does not meet the requirements. The remaining qualified segmented silicon material is sent to the crushing process for crushing.

[0003] The main types of materials that do not meet the appearance requirements are discolored surfaces, needle-like silicon on the surface, and uneven outer surfaces. Common examples include cauliflower-shaped and coral-shaped materials. Current technology involves manual visual inspection to remove crossbeams, carbon heads, and silicon rods that do not meet the appearance requirements. This method is inefficient and affects the subsequent processing progress.

[0004] Therefore, there is an urgent need to improve the automatic inspection of silicon rod appearance in order to solve the above-mentioned problems. Summary of the Invention

[0005] The purpose of this invention is to provide an automatic inspection and marking device for the appearance of electronic-grade silicon rods and its inspection process. A rotary motor can drive the silicon rod to rotate. After the vision recognition device detects defects on the silicon rod, the central processing chip processes the information and pushes it to the vertical telescopic rod on the arc-shaped support arm. The laser marker moves downward and marks the defective part on the silicon rod. This process improves the consistency of operation, makes the quality more stable, reduces impurity contamination, and makes the product yield more stable.

[0006] To achieve the above objectives, the main technical solutions adopted by the present invention include:

[0007] An automatic inspection and labeling device for electronic-grade silicon rods includes an inspection table with an inspection chamber inside. A telescopic support rod is fixedly installed at one end of the inspection chamber, and a rotary motor is fixedly installed at the other end. A silicon rod is held between the rotary motor and the telescopic support rod, fixing the silicon rod between the inspection chambers. The silicon rod is squeezed by the rotary motor and the telescopic support rod. The rotary motor can drive the silicon rod to rotate, thus enabling all-round inspection of the silicon rod, improving the inspection range and efficiency.

[0008] After the robotic arm disassembles the silicon rods, they are placed in a designated position on the inspection table. Visual recognition technology is used to inspect and identify the silicon rods placed on the processing table, distinguishing carbon heads, crossbeams, and unqualified silicon rod parts. The appearance standards are entered by comparing with unqualified limit samples.

[0009] After visual recognition, a projection spotlight is used to locate and mark the parts that need to be removed;

[0010] A drive groove is provided on one side of the inspection table, and a detection slider is slidably installed inside the drive groove. An arc-shaped support arm is fixedly installed on the upper side of the detection slider. A vision recognition device is fixedly installed on the side of the arc-shaped support arm near the silicon rod. After the silicon rod is fixed inside the inspection chamber, the detection slider is slidable, which drives the vision recognition device on the arc-shaped support arm to slide horizontally. Therefore, the vision recognition device on the arc-shaped support arm can inspect the silicon rod. The upper end of the arc-shaped support arm is connected to a horizontal support arm via a vertical telescopic rod. A laser marker is fixedly installed on the vertical telescopic rod. A central processing chip is fixedly installed inside the electrical control box. The detection slider and the rotary motor are both connected to the central processing chip. When the vision recognition device detects a defect on the silicon rod, it transmits the information to the central processing chip in the electrical control box. After processing the information, the central processing chip pushes it to the vertical telescopic rod on the arc-shaped support arm. The vertical telescopic rod moves the laser marker downward and marks the silicon rod. The structure is simple, eliminates the need for manual inspection, has a high degree of automation, and greatly improves the efficiency of inspection.

[0011] Preferably, a drive tooth groove is fixedly provided on the bottom side of the testing station, and the drive tooth groove corresponds to the drive groove. A drive motor is fixedly provided on the testing slider, and a drive gear is provided at the output end of the drive motor. A drive rack is fixedly provided inside the drive tooth groove, and the drive gear and the drive rack are meshed and connected. The drive motor is used to push the testing slider horizontally. The drive tooth groove is fixed to the bottom of the testing station, and the drive motor is fixed to the testing slider. Therefore, when the drive motor on the testing slider is started, it drives the drive gear on the drive motor to rotate. The drive gear meshes and connects with the drive rack on the drive tooth groove. Therefore, when the drive gear rotates, the drive motor will drive the entire testing slider to move horizontally. Of course, when the drive motor rotates in the opposite direction, the testing slider can move in the opposite direction. Therefore, the silicon rod can be cyclically tested without manual testing, which greatly improves the testing efficiency.

[0012] A guide groove is provided on one side of the drive groove, and a guide limiting plate is fixedly installed on the detection slider. The guide limiting plate is slidably installed inside the guide groove. During the sliding process of the detection slider, the detection slider may become skewed. However, the guide limiting plate is fixedly installed on the detection slider, and the guide groove is provided on one side of the drive groove. The guide limiting plate extends into the guide groove. Therefore, the guide groove plays a certain guiding and supporting role for the guide limiting plate, preventing the detection slider from becoming skewed during the sliding process and improving the stability of the detection slider's movement.

[0013] Preferably, the vertical telescopic rod is fixedly connected to the arc-shaped support arm via a telescopic rod fixing plate, which improves the structural strength of the vertical telescopic rod. At the same time, the arc-shaped support arm increases the overall height of the vertical telescopic rod, preventing the silicon rod from accidentally hitting the horizontal support arm on the vertical telescopic rod when rotating. The horizontal support arm is located at the output end of the vertical telescopic rod, and a U-shaped clamping groove is fixedly provided at the end of the horizontal support arm away from the vertical telescopic rod. The laser marker is fixedly installed inside the U-shaped clamping groove, which facilitates the adjustment of the height of the laser marker and improves the flexibility and convenience of the device.

[0014] Preferably, a circular support plate is provided at one end of the silicon rod, at the output end of the rotary motor. The circular support plate can ensure the uniformity of the force on the silicon rod, thereby improving the stability of the silicon rod rotation. Several evenly distributed silicon rod support arms are provided on the circular support plate. The silicon rod support arms increase the contact area with the silicon rod, improving the stability of the silicon rod. Anti-slip pads are fixedly provided on the side of the silicon rod support arms near the silicon rod. The anti-slip pads on the silicon rod support arms further improve the stability of the silicon rod. The rotation of the rotary motor can drive the rotation of the silicon rod, so the silicon rod can be inspected from all directions, improving the inspection range and inspection accuracy.

[0015] At the other end of the silicon rod, the telescopic support rod includes a horizontal telescopic rod and a silicon rod fixing plate. The silicon rod fixing plate is rotatably mounted on the output end of the horizontal telescopic rod. After fixing the silicon rod, the silicon rod fixing plate is rotatably mounted on the horizontal telescopic rod. Therefore, the silicon rod fixing plate can rotate with the rotation of the circular support plate. At the same time, the horizontal telescopic rod plays a supporting role for the silicon rod, preventing the silicon rod from falling off during rotation and improving the stability of the silicon rod. A limiting groove is opened on the side of the silicon rod fixing plate near the silicon rod. One end of the silicon rod is fixed inside the limiting groove to lock the silicon rod and prevent the silicon rod from shaking during rotation.

[0016] Preferably, the bottom of the testing station is provided with symmetrically distributed support bases, and the bottom of the support bases is fixed with rubber pads. The support bases are fixed to the bottom of the testing station, which improves the structural strength of the testing station and the overall stability of the device.

[0017] An electrical control box is fixedly installed on one side of the support base. A central processing chip is fixedly installed inside the electrical control box. The detection slider and the rotary motor are both connected to the central processing chip. After the silicon rod is fixed inside the detection chamber, the central processing chip activates the horizontal telescopic rod inside the detection chamber to squeeze the silicon rod. Then, the rotary motor inside the detection chamber is activated to rotate the silicon rod. At the same time, the drive motor on the detection slider is activated, and the detection slider slides horizontally on the detection table. The vision recognition device on the detection slider detects the silicon rod and pushes the data information to the central processing chip. After processing the information, the central processing chip moves the laser marker on the horizontal support arm downward through the vertical telescopic rod, so that the pen tip of the laser marker contacts the surface of the silicon rod to mark the silicon rod.

[0018] An inspection process for an automatic appearance inspection and marking device for electronic-grade silicon rods includes the following steps:

[0019] Step 1: Place the silicon rod produced by reduction on the testing table, and fix the silicon rod inside the testing chamber by rotating the motor and telescopic support rod;

[0020] Step 2: Start the drive motor on the detection slider. When the drive gear rotates, the drive tooth groove that meshes with the drive gear pushes the detection slider to move horizontally. The vision recognition device on the arc support arm automatically visually recognizes the silicon rod.

[0021] Step 3: Activate the vertical telescopic rod on the arc-shaped support arm, move the laser marker on the horizontal support arm downward, and mark the broken silicon rod;

[0022] Step 4: Start the rotary motor inside the testing chamber to rotate the silicon rod, and identify and label the remaining parts;

[0023] Step 5: Manually tap the marked location and break the silicon rod.

[0024] This invention has at least the following beneficial effects:

[0025] 1. The rotary motor can drive the silicon rod to rotate. After the vision recognition device detects the defects on the silicon rod, the central processing chip processes the information and pushes it to the vertical telescopic rod on the arc support arm. The laser marker moves down and marks the defective part on the silicon rod. This process improves the consistency of operation, makes the quality more stable, reduces impurity contamination, and makes the product yield more stable.

[0026] 2. After the robotic arm disassembles the silicon rods, they are placed in designated positions on the inspection table. Visual recognition technology is used to inspect and identify the silicon rods placed on the processing table, distinguishing carbon heads, crossbeams, and unqualified silicon rod parts. The appearance standards are recorded by comparing with unqualified limit samples. After visual recognition, a projection spotlight is used to locate and mark the parts that need to be removed. Attached Figure Description

[0027] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0028] Figure 1 The three-dimensional representation of the present invention Figure 1 ;

[0029] Figure 2 The three-dimensional representation of the present invention Figure 2 ;

[0030] Figure 3 This is a partial structure of the present invention. Figure 1 ;

[0031] Figure 4 This is a partial structure of the present invention. Figure 2 ;

[0032] Figure 5 This is a structural diagram of the detection slider of the present invention;

[0033] Figure 6 This is a perspective view of the detection slider of the present invention;

[0034] Figure 7 This is a perspective view of the telescopic support rod of the present invention;

[0035] Figure 8 This is a side view of the present invention;

[0036] Figure 9 This is a process flow diagram of the present invention.

[0037] In the diagram, 1-Detection table, 101-Detection chamber, 102-Drive groove, 103-Guide groove, 104-Drive tooth groove, 105-Drive rack, 2-Detection slider, 201-Guide limiting plate, 202-Telescopic rod fixing plate, 203-Arc-shaped support arm, 204-Vertical telescopic rod, 205-Horizontal support arm, 206-U-shaped clamping groove, 3-Rotary motor, 301-Circular support plate, 302-Silicon rod support arm, 4-Telescopic support rod, 401-Horizontal telescopic rod, 402-Silicon rod fixing plate, 403-Limiting groove, 5-Drive motor, 501-Drive gear, 6-Vision recognition device, 7-Laser marker, 8-Silicon rod, 9-Electrical control box, 901-Central processing chip, 10-Support base. Detailed Implementation

[0038] The following will describe in detail the implementation of this application with reference to the accompanying drawings and embodiments, so that the implementation process of how this application uses technical means to solve technical problems and achieve technical effects can be fully understood and implemented accordingly.

[0039] like Figures 1-9 As shown, the electronic-grade silicon rod appearance automatic inspection and marking equipment provided in this embodiment includes an inspection table 1, an inspection chamber 101 is provided inside the inspection table 1, a telescopic support rod 4 is fixedly provided at one end of the inspection chamber 101, and a rotary motor 3 is fixedly provided at the other end of the inspection chamber 101. A silicon rod 8 is held between the rotary motor 3 and the telescopic support rod 4, and the silicon rod 8 is fixed between the inspection chambers 101. The silicon rod 8 is squeezed by the rotary motor 3 and the telescopic support rod 4. The rotary motor 3 can drive the silicon rod 8 to rotate, so the silicon rod 8 can be inspected from all directions, improving the inspection range and inspection efficiency.

[0040] After the robotic arm disassembles the rod, it is placed in a designated position on the inspection table 1. Visual recognition technology is used to inspect and identify the silicon rod placed on the processing table, and to distinguish the carbon head, crossbeam, and unqualified silicon rod parts. The appearance standard is recorded by comparing with the unqualified limit sample.

[0041] After visual recognition, a projection spotlight is used to locate and mark the parts that need to be removed;

[0042] A drive groove 102 is provided on one side of the testing table 1. A detection slider 2 is slidably arranged inside the drive groove 102. An arc-shaped support arm 203 is fixedly arranged on the upper side of the detection slider 2. A vision recognition device 6 is fixedly arranged on the side of the arc-shaped support arm 203 near the silicon rod 8. After the silicon rod 8 is fixed inside the testing chamber 101, by sliding the detection slider 2, the vision recognition device 6 on the arc-shaped support arm 203 slides horizontally during the sliding process. Therefore, the vision recognition device 6 on the arc-shaped support arm 203 can detect the silicon rod 8. The upper end of the arc-shaped support arm 203 is connected to a horizontal support arm 2 via a vertical telescopic rod 204. 05. A laser marker 7 is fixedly installed on the vertical telescopic rod 204. A central processing chip 901 is fixedly installed inside the electrical control box 9. The detection slider 2 and the rotary motor 3 are both connected to the central processing chip 901. When the vision recognition device 6 detects a defect on the silicon rod 8, it transmits the information to the central processing chip 901 on the electrical control box 9. After the central processing chip 901 processes the information, it pushes it to the vertical telescopic rod 204 on the arc support arm 203. The vertical telescopic rod 204 moves the laser marker 7 and marks the silicon rod 8. The structure is simple, no manual inspection is required, the degree of automation is high, and the inspection efficiency is greatly improved.

[0043] Furthermore, such as Figure 1 , Figure 4 and Figure 5As shown, a drive tooth groove 104 is fixedly provided on the bottom side of the detection table 1, and the drive tooth groove 104 corresponds to the drive groove 102. A drive motor 5 is fixedly provided on the detection slider 2, and a drive gear 501 is provided at the output end of the drive motor 5. A drive rack 105 is fixedly provided inside the drive tooth groove 104. The drive gear 501 and the drive rack 105 are meshed and connected. The drive motor 5 is used to horizontally push the detection slider 2. The drive tooth groove 104 is fixed to the bottom of the detection table 1, and the drive motor 5 is fixed to the detection slider 2. Therefore, when the drive motor 5 on the detection slider 2 is started, it drives the drive gear 501 on the drive motor 5 to rotate. The drive gear 501 is meshed and connected to the drive rack 105 on the drive tooth groove 104. Therefore, when the drive gear 501 rotates, the drive motor 5 will drive the entire detection slider 2 to move horizontally. Of course, when the drive motor 5 rotates in the opposite direction, the detection slider 2 can move in the opposite direction. Therefore, the silicon rod 8 can be cyclically detected without manual detection, which greatly improves the detection efficiency.

[0044] A guide groove 103 is provided on one side of the drive groove 102. A guide limiting plate 201 is fixedly provided on the detection slider 2. The guide limiting plate 201 is slidably disposed inside the guide groove 103. During the sliding process of the detection slider 2, the detection slider 2 may become skewed. However, since the guide limiting plate 201 is fixedly provided on the detection slider 2 and the guide groove 103 is provided on one side of the drive groove 102, the guide limiting plate 201 extends into the guide groove 103. Therefore, the guide groove 103 plays a certain guiding and supporting role for the guide limiting plate 201, preventing the detection slider 2 from becoming skewed during the sliding process and improving the stability of the movement of the detection slider 2.

[0045] Furthermore, such as Figure 5 and Figure 6 As shown, the vertical telescopic rod 204 is fixedly connected to the arc-shaped support arm 203 through the telescopic rod fixing plate 202, which improves the structural strength of the vertical telescopic rod 204. At the same time, the arc-shaped support arm 203 increases the overall height of the vertical telescopic rod 204, preventing the silicon rod 8 from accidentally hitting the horizontal support arm 205 on the vertical telescopic rod 204 when rotating. The horizontal support arm 205 is set at the output end of the vertical telescopic rod 204. A U-shaped clamping groove 206 is fixedly set at the end of the horizontal support arm 205 away from the vertical telescopic rod 204. The laser marker 7 is fixedly set inside the U-shaped clamping groove 206. The laser marker 7 is fixedly set inside the U-shaped clamping groove 206, which facilitates the adjustment of the height of the laser marker 7 and improves the flexibility and convenience of the device.

[0046] like Figure 4 and Figure 7As shown, at one end of the silicon rod 8, a circular support plate 301 is provided at the output end of the rotary motor 3. The circular support plate 301 can ensure the uniformity of the force on the silicon rod 8, thereby improving the stability of the rotation of the silicon rod 8. Several evenly distributed silicon rod support arms 302 are provided on the circular support plate 301. The silicon rod support arms 302 increase the contact area with the silicon rod 8, thereby improving the stability of the silicon rod 8. An anti-slip pad is fixedly provided on the side of the silicon rod support arm 302 near the silicon rod 8. The anti-slip pad on the silicon rod support arm 302 further improves the stability of the silicon rod 8. The rotation of the rotary motor 3 can drive the rotation of the silicon rod 8, so the silicon rod 8 can be inspected from all directions, improving the inspection range and inspection accuracy.

[0047] At the other end of the silicon rod 8, the telescopic support rod 4 includes a transverse telescopic rod 401 and a silicon rod fixing plate 402. The silicon rod fixing plate 402 is rotatably mounted on the output end of the transverse telescopic rod 401. After fixing the silicon rod 8, the silicon rod fixing plate 402 is rotatably mounted on the transverse telescopic rod 401. Therefore, the silicon rod fixing plate 402 can rotate with the rotation of the circular support plate 301. At the same time, the transverse telescopic rod 401 plays a supporting role for the silicon rod 8, preventing the silicon rod 8 from falling off during rotation and improving the stability of the silicon rod 8. A limiting groove 403 is opened on the side of the silicon rod fixing plate 402 near the silicon rod 8. One end of the silicon rod 8 is fixed inside the limiting groove 403 to lock the silicon rod 8 and prevent the silicon rod 8 from shaking during rotation.

[0048] Furthermore, such as Figure 1 and Figure 2 As shown, the bottom of the testing table 1 is provided with symmetrically distributed support bases 10. The bottom of the support bases 10 is fixed with rubber pads. The support bases 10 are fixed to the bottom of the testing table 1, which improves the structural strength of the testing table 1 and enhances the overall stability of the device.

[0049] An electrical control box 9 is fixedly installed on one side of the support base 10. A central processing chip 901 is fixedly installed inside the electrical control box 9. The detection slider 2 and the rotary motor 3 are both connected to the central processing chip 901. After the silicon rod 8 is fixed inside the detection chamber 101, the horizontal telescopic rod 401 inside the detection chamber 101 is activated by the central processing chip 901 to squeeze the silicon rod 8. Then, the rotary motor 3 inside the detection chamber 101 is activated to rotate the silicon rod 8. At the same time, the drive motor 5 on the detection slider 2 is activated, and the detection slider 2 slides horizontally on the detection table 1. The vision recognition device 6 on the detection slider 2 detects the silicon rod 8 and pushes the data information to the central processing chip 901. After processing the information, the central processing chip 901 moves the laser marker 7 on the horizontal support arm 205 downward through the vertical telescopic rod 204 to mark the silicon rod 8.

[0050] like Figures 1-9As shown, the inspection process of the automatic inspection and marking equipment for the appearance of electronic-grade silicon rods provided in this embodiment includes the following steps:

[0051] Step 1: Place the silicon rod 8 produced by reduction on the testing table 1, and fix the silicon rod 8 inside the testing chamber 101 by rotating the motor 3 and telescopic support rod 4;

[0052] Step 2: Start the drive motor 5 on the detection slider 2. When the drive gear 501 rotates, the drive tooth groove 104 that meshes with the drive gear 501 pushes the detection slider 2 to move horizontally. The vision recognition device 6 on the arc support arm 203 automatically visually recognizes the silicon rod 8.

[0053] Step 3: Activate the vertical telescopic rod 204 on the arc-shaped support arm 203, move the laser marker 7 on the horizontal support arm 205 downward, and mark the broken silicon rod 8;

[0054] Step 4: Start the rotary motor 3 inside the detection chamber 101 to rotate the silicon rod 8, and identify and label the remaining parts;

[0055] Step 5: Manually tap the marked location and break the silicon rod 8.

[0056] If certain terms are used in the specification and claims to refer to specific components, those skilled in the art will understand that hardware manufacturers may use different names to refer to the same component. This specification and claims do not distinguish components based on differences in name, but rather on differences in function. The term "comprising" as used throughout the specification and claims is an open-ended term and should be interpreted as "comprising but not limited to." "Approximately" means that within an acceptable margin of error, those skilled in the art can solve the technical problem and substantially achieve the technical effect within a certain margin of error.

[0057] It should be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a product or system comprising a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a product or system. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the product or system that includes that element.

[0058] The foregoing description illustrates and describes several preferred embodiments of the present invention. However, as previously stated, it should be understood that the present invention is not limited to the forms disclosed herein and should not be construed as excluding other embodiments. It can be used in various other combinations, modifications, and environments, and can be altered within the scope of the inventive concept described herein through the foregoing teachings or techniques or knowledge in related fields. Any modifications and variations made by those skilled in the art that do not depart from the spirit and scope of the present invention should be within the protection scope of the appended claims.

Claims

1. An automatic inspection and labeling device for the appearance of electronic-grade silicon rods, comprising an inspection table (1), characterized in that, The testing station (1) has a testing chamber (101) inside. A telescopic support rod (4) is fixedly installed at one end of the testing chamber (101), and a rotary motor (3) is fixedly installed at the other end of the testing chamber (101). A silicon rod (8) is held between the rotary motor (3) and the telescopic support rod (4). A drive groove (102) is provided on one side of the detection table (1). A detection slider (2) is slidably arranged inside the drive groove (102). An arc-shaped support arm (203) is fixedly arranged on the upper side of the detection slider (2). A visual identifier (6) is fixedly arranged on the side of the arc-shaped support arm (203) near the silicon rod (8). A horizontal support arm (205) is connected to the upper end of the arc-shaped support arm (203) through a vertical telescopic rod (204). A laser marker (7) is fixedly arranged on the vertical telescopic rod (204). A drive tooth groove (104) is fixedly arranged on the bottom side of the detection table (1). The drive tooth groove (104) corresponds to the drive groove (102). A drive motor (5) is fixedly arranged on the detection slider (2). A drive gear (501) is arranged at the output end of the drive motor (5). A drive rack (105) is fixedly installed inside the drive groove (104). The drive gear (501) meshes with the drive rack (105). The drive motor (5) is used to horizontally push the detection slider (2). A guide groove (103) is opened on one side of the drive groove (102). A guide limiting plate (201) is fixedly installed on the detection slider (2). The guide limiting plate (201) is slidably installed inside the guide groove (103). The vertical telescopic rod (204) is fixedly connected to the arc-shaped support arm (203) through the telescopic rod fixing plate (202). A horizontal support arm (205) is provided at the output end of the vertical telescopic rod (204). A U-shaped clamping groove (206) is fixedly provided at the end of the horizontal support arm (205) away from the vertical telescopic rod (204). The laser marker (7) is fixedly provided inside the U-shaped clamping groove (206). The telescopic support rod (4) includes a horizontal telescopic rod (401) and a silicon rod fixing plate (402). The silicon rod fixing plate (402) is rotatably provided at the output end of the horizontal telescopic rod (401). A limiting groove (403) is provided on the side of the silicon rod fixing plate (402) near the silicon rod (8).

2. The automatic inspection and marking device for the appearance of electronic-grade silicon rods according to claim 1, characterized in that: The output end of the rotary motor (3) is provided with a circular support plate (301), and a number of evenly distributed silicon rod support arms (302) are provided on the circular support plate (301). Anti-slip pads are fixedly provided on one side of the silicon rod support arm (302) near the silicon rod (8).

3. The automatic inspection and marking device for the appearance of electronic-grade silicon rods according to claim 2, characterized in that: The bottom of the testing platform (1) is provided with symmetrically distributed support bases (10), and the bottom of the support bases (10) is fixedly provided with rubber pads; an electrical control box (9) is fixedly provided on one side of the support bases (10), and a central processing chip (901) is fixedly provided inside the electrical control box (9). The testing slider (2) and the rotary motor (3) are both connected to the central processing chip (901).

4. A detection process for an automatic appearance inspection and marking device for electronic-grade silicon rods as described in claim 3, characterized in that, Includes the following steps: Step 1: Place the silicon rod (8) produced by reduction on the testing table (1), and fix the silicon rod (8) inside the testing chamber (101) by rotating the motor (3) and telescopic support rod (4); Step 2: Start the drive motor (5) on the detection slider (2). When the drive gear (501) rotates, the drive tooth groove (104) meshing with the drive gear (501) pushes the detection slider (2) to move horizontally. The vision recognition device (6) on the arc support arm (203) automatically visually recognizes the silicon rod (8). Step 3: Activate the vertical telescopic rod (204) on the arc support arm (203), move the laser marker (7) on the horizontal support arm (205) downward, and mark the broken silicon rod (8); Step 4: Start the rotary motor (3) inside the detection chamber (101) to rotate the silicon rod (8) and identify and mark the remaining parts; Step 5: Manually tap the marked location and break the silicon rod (8).

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