Double stage exposure machine

Abstract

The present application relates to the technical field of exposure machines, and in particular to a dual-table exposure machine. By using at least two loading mechanisms to load the parts to be exposed respectively, one exposure machine can simultaneously perform exposure operations on multiple parts to be exposed. By making the controller move synchronously with the exposure mechanism, the heat emitted by the controller is avoided from locally heating the exposure machine, so that the exposure machine is heated more evenly, thereby reducing the risk of thermal deformation of the exposure machine, thereby avoiding the reduction of the accuracy of the exposure machine due to thermal deformation. By making the controller move synchronously with the exposure mechanism, relative movement between the controller and the exposure mechanism is avoided, thereby reducing the risk of loosening of the connection between the optical fiber and the exposure mechanism and the controller, thereby improving the reliability of the exposure machine. In this way, the accuracy and reliability of the exposure machine are guaranteed.

Description

Technical Field

[0001] The present application relates to the technical field of exposure machines, and in particular to a dual-stage exposure machine. Background Art

[0002] With the development of science and technology, the requirements for product production precision in industrial production are getting higher and higher.

[0003] In a traditional exposure machine, the controller is usually fixedly mounted on the frame. Since the heat dissipation of the controller is large, if the controller is fixed at a fixed position of the exposure machine, the exposure machine will be heated unevenly, resulting in uneven deformation of the exposure machine, which will reduce the accuracy of the exposure machine. In addition, since the exposure head needs to move during operation, if the controller is fixed at a fixed position of the exposure machine, not only will the length of the exposure head optical fiber be too long, resulting in large energy loss of the optical signal during propagation, further increasing the heat generated by the controller, thereby reducing the accuracy of the exposure machine, but it will also cause the optical fiber to be repeatedly bent, resulting in loose connection between the optical fiber and the exposure head, resulting in interruption of optical fiber transmission and reducing the reliability of the exposure machine. Repeated bending of the optical fiber will also reduce the service life of the optical fiber and affect the accuracy of the optical fiber transmitting the optical signal. In addition, the exposure machine has a high positioning accuracy for the product. For different models of the exposed parts, the positioning reference of the exposure machine is different. Therefore, when the exposed parts are awakened, the positioning structure of the exposed parts must also be adjusted. This is relatively inefficient and difficult to ensure positioning accuracy, which leads to reduced production accuracy of the exposure machine.

[0004] It can be seen that how to ensure the accuracy and reliability of the exposure machine is a technical problem that needs to be solved urgently. Summary of the invention

[0005] The present application provides a dual-table exposure machine, which aims to solve the technical problem of how to ensure the accuracy and reliability of the exposure machine in the prior art.

[0006] The present application provides a dual-table exposure machine, comprising:

[0007] At least two loading mechanisms, the loading mechanisms are used to load the pieces to be exposed, and the loading mechanisms are arranged side by side;

[0008] An exposure mechanism, the exposure mechanism is used to expose the workpiece to be exposed;

[0009] A controller, the controller being used to control the exposure mechanism;

[0010] A moving mechanism, the moving mechanism is used to drive the exposure mechanism to move;

[0011] Wherein, the controller moves synchronously with the exposure mechanism in at least one moving direction.

[0012] Furthermore, the moving mechanism comprises:

[0013] A first moving component, wherein the first moving component drives the exposure mechanism to move along a first direction;

[0014] A second moving assembly, wherein the second moving assembly drives the exposure mechanism to move along a second direction;

[0015] The first direction is configured as a scanning direction along the exposure mechanism, and the second direction is configured as a light emitting direction along the exposure mechanism.

[0016] Furthermore, the controller moves synchronously with the exposure mechanism in the first direction.

[0017] Furthermore, the first moving component includes:

[0018] First Pedestal;

[0019] A first driving assembly, the first driving assembly is mounted on the first base, and the first driving assembly is arranged along a scanning direction of the exposure mechanism;

[0020] A first linear guide assembly, the number of the first linear guide assemblies is at least two, the first linear guide assembly is installed on the first base, and the first linear guide assembly is arranged in parallel with the first driving assembly;

[0021] A first mounting seat, wherein the first mounting seat is mounted at a power output end of the first driving assembly, the first mounting seat is connected to all the first linear guide rail assemblies, and the first linear guide rail assemblies guide the first mounting seat;

[0022] Wherein, the second moving assembly and the controller are both mounted on the first mounting seat;

[0023] The exposure mechanism is installed at the power output end of the second moving component.

[0024] Furthermore, the moving mechanism further comprises a guiding device, and the guiding device comprises:

[0025] a second base, the second base being arranged in parallel with the first base, and the second base and the first base being respectively located on two sides of the exposure mechanism;

[0026] a second driving assembly, the second driving assembly being mounted on the second base, the second driving assembly being arranged in parallel with the first driving assembly, and the second driving assembly and the first driving assembly being operated synchronously;

[0027] A second linear guide assembly, the second linear guide assembly is mounted on the second base, and the second linear guide assembly is arranged in parallel with the first linear guide assembly;

[0028] a second mounting seat, the second mounting seat being mounted on the second linear guide rail assembly;

[0029] A third linear guide assembly is mounted on the second mounting seat, the third linear guide assembly is parallel to the second moving assembly, and the third linear guide assembly is connected to the exposure mechanism.

[0030] Furthermore, the dual-table exposure machine provided by the present application also includes:

[0031] A liquid cooling system is used to cool the controller.

[0032] Furthermore, the dual-table exposure machine provided by the present application also includes:

[0033] A hood, the hood being provided to cover at least the exposure mechanism and the controller;

[0034] An air cooling system is used to cool the interior space of the hood.

[0035] Furthermore, the hood is provided with an air inlet and an air outlet, the height of the air inlet is higher than the height of the controller, and the height of the air outlet is lower than the height of the controller.

[0036] Furthermore, the exposure mechanism comprises:

[0037] A mounting bracket, the mounting bracket being mounted on the moving mechanism;

[0038] An exposure head, the exposure head is fixedly mounted on the mounting bracket;

[0039] A detection device is used to detect the tilt angle of the exposure head.

[0040] Furthermore, it is characterized in that the detection device comprises:

[0041] A hanging bracket, the hanging bracket is fixedly mounted on the mounting bracket;

[0042] A contact bracket, the inner wall of which is hemispherical, the contact bracket is non-conductive, and a plurality of contact members are arranged at the longitude and latitude lines of the inner wall of the contact bracket;

[0043] A suspension rope, wherein a first end of the suspension rope is mounted on the suspension bracket, the first end coincides with the spherical center of the contact bracket, and the suspension rope is conductive;

[0044] A weight ball, the weight ball is installed at the second end of the suspension rope, and the weight ball is conductive;

[0045] A computing unit connected to the suspension rope, the weighted ball and the contact member;

[0046] Wherein, when the optical axis of the exposure head is in a vertical state, the center line of the suspension rope is collinear with the optical axis of the exposure head;

[0047] When the suspension rope is in a stretched state, the weight ball is tangent to the inner wall of the contact bracket, and the weight ball contacts the contact member to trigger the contact member;

[0048] The calculation unit is configured to calculate the tilt angle of the exposure head according to the number of the triggered contact member.

[0049] The beneficial effects achieved by this application are:

[0050] The present application proposes a dual-table exposure machine, which loads the exposed parts respectively through at least two loading mechanisms, so that one exposure machine can perform exposure operations on multiple exposed parts at the same time. By making the controller move synchronously with the exposure mechanism, the distance between the controller and the exposure mechanism is reduced, and the length of the optical fiber is reduced, thereby reducing the light loss of the light source during the transmission process, reducing the power of the controller, and thus reducing the heat generated by the controller, thereby reducing the risk of deformation of the exposure machine due to heat. By making the controller move synchronously with the exposure mechanism, the heat emitted by the controller is avoided from heating the exposure machine locally, so that the exposure machine is heated more evenly, thereby reducing the risk of thermal deformation of the exposure machine. By making the controller move synchronously with the exposure mechanism, the relative movement of the controller and the exposure mechanism is avoided, thereby reducing the risk of loosening of the connection between the optical fiber and the exposure mechanism and the controller, thereby improving the reliability of the exposure machine. In this way, by reducing the heat generated by the controller and making the controller move synchronously with the exposure mechanism, the exposure machine dissipates heat more evenly, thereby reducing the risk of thermal deformation of the exposure machine, thereby avoiding the exposure machine from reducing the accuracy of the exposure machine due to thermal deformation. In this way, the accuracy and reliability of the exposure machine are guaranteed. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] Figure 1 Schematic diagram of the three-dimensional structure of an exposure machine in an embodiment of the present invention;

[0052] Figure 2 It is a schematic diagram of the three-dimensional structure of the exposure machine installation cover in an embodiment of the present invention;

[0053] Figure 3 is a schematic diagram of the three-dimensional structure of an exposure mechanism in an embodiment of the present invention;

[0054] Figure 4 is a sectional view of the three-dimensional structure of the detection device in an embodiment of the present invention;

[0055] Figure 5 is a sectional view of the three-dimensional structure of the detection device when tilt occurs in an embodiment of the present invention;

[0056] Figure 6 is a schematic diagram of the three-dimensional structure of the loading mechanism in an embodiment of the present invention;

[0057] Figure 7 is an exploded view of a loading mechanism in an embodiment of the present invention;

[0058] Figure 8 is a cross-sectional view of a loading mechanism in an embodiment of the present invention;

[0059] Fig. 9 The embodiment of the present invention Figure 8 Magnified view at A in the middle.

[0060] Description of main component symbols:

[0061] 100, exposure machine; 10, loading mechanism; 11, loading platform assembly; 111, adsorption hole; 112, first hole; 113, second hole; 114, sealing slope; 12, elastic member; 13, sealing member; 14, lower sealing plate; 141, connecting groove; 142, exhaust hole; 15, adapter; 16, sealing ring; 17, limit plate; 171, limit hole; 20, exposure mechanism; 21, mounting bracket; 22, exposure head; 23, detection device; 231, suspension bracket; 232, contact bracket; 233, contact member; 234, suspension rope; 235, counterweight ball ; 236. Operation unit; 30. Controller; 40. Moving mechanism; 41. First moving assembly; 411. First base; 412. First driving assembly; 413. First linear guide assembly; 414. First mounting seat; 42. Second moving assembly; 43. Guide device; 431. Second base; 432. Second driving assembly; 433. Second linear guide assembly; 434. Second mounting seat; 435. Third linear guide assembly; 50. Liquid cooling system; 60. Hood; 61. Air inlet; 62. Air outlet; 70. Air cooling system; 80. Part to be exposed. DETAILED DESCRIPTION

[0062] In order to make the purpose, technical scheme and advantages of the present invention clearer, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention. In addition, it should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0063] In the description of the present invention, it is necessary to understand that the terms "length", "width", "up", "down", "left", "right", "horizontal", "top", "bottom", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0064] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0065] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or mutual communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0066] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0067] The disclosure below provides many different embodiments or examples to realize different structures of the present invention. In order to simplify the disclosure of the present invention, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present invention. In addition, the present invention can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed. In addition, the examples of various specific processes and materials provided by the present invention, but those of ordinary skill in the art can be aware of the application of other processes and / or the use of other materials.

[0068] See also Figure 1 and Figure 6 to Figure 7 In some embodiments of the present application, an exposure machine 100 provided in the present application includes a loading mechanism 10 and an exposure mechanism 20 .

[0069] There are at least two loading mechanisms 10 , which are used to load the workpiece 80 to be exposed. The loading mechanisms 10 are arranged side by side. The exposure mechanism 20 is used to expose the workpiece 80 to be exposed.

[0070] The loading mechanism 10 includes a loading platform assembly 11, a negative pressure device, an elastic member 12, and a sealing member 13. The loading platform assembly 11 is provided with a plurality of adsorption holes 111, and the adsorption holes 111 are used to adsorb the to-be-exposed member 80. The negative pressure device is used to form a negative pressure in the adsorption holes 111. The elastic member 12 is provided in the adsorption holes 111. The sealing member 13 is connected to the elastic member 12, and the sealing member 13 is used to seal the adsorption holes 111. If the adsorption holes 111 do not adsorb the to-be-exposed member 80, the sealing member 13 seals the adsorption holes 111 and causes the elastic member 12 to undergo elastic deformation. If the adsorption holes 111 adsorb the to-be-exposed member 80, the elastic member 12 moves the sealing member 13, thereby releasing the seal of the adsorption holes 111.

[0071] When the object to be exposed 80 is placed on the loading mechanism 10, the object to be exposed 80 blocks the adsorption hole 111, and the adsorption hole 111 is formed with negative pressure by the negative pressure device, and then the object to be exposed 80 is fixed to the loading mechanism 10 by atmospheric pressure. Since the adsorption holes 111 in the area of ​​the object to be exposed 80 are mainly subjected to atmospheric pressure by the object to be exposed 80, the atmospheric pressure on the sealing member 13 is relatively small. At this time, the elastic member 12 causes the sealing member 13 to release the sealing of the adsorption holes 111. The adsorption holes 111 outside the area of ​​the object to be exposed 80 are not subjected to atmospheric pressure by the object to be exposed 80, so the sealing member 13 bears most of the atmospheric pressure, and then the sealing member 13 is closely attached to the loading platform assembly 11, and then the adsorption holes 111 are blocked to prevent the occurrence of air leakage, thereby ensuring the effectiveness of the loading mechanism 10 in adsorbing the object to be exposed 80, and reducing the power of the negative pressure device, thereby reducing the energy consumption of the exposure equipment. In this way, the energy consumption of the exposure machine 100 is reduced.

[0072] In some embodiments of the present application, there are two loading mechanisms 10, which are used to load the workpiece to be exposed 80. The loading mechanisms 10 are arranged side by side. This embodiment is a double-station exposure mechanism, which exposes two workpieces to be exposed. The exposure mechanism 20 is used to expose the workpiece to be exposed 80. The controller 30 is used to control the exposure mechanism 20. The moving mechanism 40 is used to drive the exposure mechanism 20 to move.

[0073] At least two loading mechanisms 10 are used to load the exposed objects 80 respectively, so that one exposure machine 100 can simultaneously perform exposure operations on multiple exposed objects 80, thereby improving the production efficiency of the exposure equipment. The loading mechanism 10 fixes the exposed objects 80 by adsorption.

[0074] In other embodiments of the present invention, the number of the loading mechanism 10 is one, which is a single-station exposure machine 100 , that is, during exposure, one workpiece 80 to be exposed is exposed.

[0075] See also Figure 1 to Figure 2 In some embodiments of the present application, a dual-table exposure machine 100 proposed in the present application includes: a loading mechanism 10, an exposure mechanism 20, a controller 30 and a moving mechanism 40.

[0076] There are at least two loading mechanisms 10, which are used to load the workpiece to be exposed 80, and the loading mechanisms 10 are arranged side by side. The exposure mechanism 20 is used to expose the workpiece to be exposed 80. The controller 30 is used to control the exposure mechanism 20. The moving mechanism 40 is used to drive the exposure mechanism 20 to move.

[0077] The controller 30 moves synchronously with the exposure mechanism 20 in at least one moving direction.

[0078] At least two loading mechanisms 10 are used to load the exposed workpiece 80 respectively, so that one exposure machine 100 can perform exposure operation on multiple exposed workpieces 80 at the same time. The loading mechanism 10 can be driven by the moving mechanism 40 to move between the exposure station and the loading and unloading station. When the loading mechanism 10 arrives at the loading and unloading station, if the loading mechanism 10 is unloaded, the workpiece 80 to be exposed is loaded to the loading mechanism 10, and the workpiece 80 to be exposed is loaded by the loading mechanism 10. The loading mechanism 10 loaded with the workpiece 80 to be exposed is moved to the exposure station by the moving mechanism 40, and then the workpiece 80 to be exposed is exposed by the exposure mechanism 20. In the process of the exposure mechanism 20 exposing the workpiece 80 to be exposed, the exposure mechanism 20 is controlled by the controller 30, and the working state of the exposure head 22 is accurately controlled to ensure that the electronic circuit pattern can be accurately and efficiently converted into a pattern that can be exposed on the workpiece 80 to be exposed. The controller 30 can accurately adjust the working parameters of the exposure head 22, such as the intensity of the light source, the exposure time, etc., by receiving instructions from the operation control system, so as to ensure the exposure effect and quality.

[0079] After the exposure of the workpiece 80 to be exposed is completed at the exposure station, the moving mechanism 40 drives the workpiece 80 to be exposed that has been exposed to move to the loading and unloading station, and then unloads the workpiece 80 to be exposed that has been exposed. When one of the loading mechanisms 10 is loading and unloading the workpiece 80 to be exposed at the loading and unloading station, the other loading mechanisms 10 can make the exposure machine 100 expose the workpiece 80 to be exposed at the exposure station. In this way, at least two loading mechanisms 10 drive the workpiece 80 to be exposed to flow between the stations, so that the action time between the stations can be overlapped, thereby improving the working efficiency of the exposure machine 100.

[0080] By making the controller 30 move synchronously with the exposure mechanism 20, the distance between the controller 30 and the exposure mechanism 20 is reduced, thereby reducing the length of the optical fiber, thereby reducing the light loss of the light source during the propagation process, reducing the power of the controller 30, and then reducing the heat generated by the controller 30, thereby reducing the risk of deformation of the exposure machine 100 due to heat, thereby avoiding the exposure machine 100 The accuracy of the exposure machine 100 is reduced due to thermal deformation.

[0081] By making the controller 30 move synchronously with the exposure mechanism 20, the heat emitted by the controller 30 can be prevented from locally heating the exposure machine 100, so that the exposure machine 100 is heated more evenly, thereby reducing the risk of thermal deformation of the exposure machine 100, thereby avoiding the exposure machine 100 's accuracy being reduced due to thermal deformation.

[0082] By making the controller 30 move synchronously with the exposure mechanism 20, relative movement between the controller 30 and the exposure mechanism 20 is avoided, thereby reducing the risk of loosening of the connection between the optical fiber and the exposure mechanism 20 and the controller 30, thereby improving the reliability of the exposure machine 100.

[0083] In this way, the accuracy and reliability of the exposure machine 100 are guaranteed.

[0084] See also Figure 1 In some embodiments of the present application, the moving mechanism 40 includes: a first moving component 41 and a second moving component 42. The first moving component 41 drives the exposure mechanism 20 to move along a first direction. The second moving component 42 drives the exposure mechanism 20 to move along a second direction. The first direction is configured as a scanning direction along the exposure mechanism 20, and the second direction is configured as a light emitting direction along the exposure mechanism 20.

[0085] During the process of the exposure mechanism 20 exposing the workpiece 80 to be exposed, the exposure mechanism 20 is located above the workpiece 80 to be exposed, and the exposure mechanism 20 is driven to move along the second direction by the second moving component 42, thereby adjusting the distance between the exposure mechanism 20 and the workpiece 80 to be exposed, and then making the distance between the workpiece 80 to be exposed and the exposure mechanism 20 close to the focal length of the exposure mechanism 20, thereby ensuring the exposure effect of the exposure machine 100.

[0086] For different types of exposed parts 80, the thickness of the exposed parts 80 varies. After the exposed parts 80 are changed, the height of the exposure mechanism 20 can be adjusted by the second moving assembly 42, so that the focus of the exposure mechanism 20 is located at the exposed part 80, thereby ensuring the exposure effect.

[0087] In some embodiments of the present application, the heights of the exposure mechanism 20 corresponding to different types of workpieces 80 to be exposed can be preset in the control system.

[0088] When the model of the workpiece 80 to be exposed is changed, the model of the workpiece 80 to be exposed can be input, and the height of the exposure mechanism 20 can be automatically adjusted by the second moving component 42, so that the focus of the exposure mechanism 20 is located on the workpiece 80 to ensure the exposure effect.

[0089] In some embodiments of the present application, a QR code or an identification label may be provided on the workpiece to be exposed 80 or the loading mechanism 10 to carry relevant information such as thickness of the workpiece to be exposed 80 .

[0090] By reading the information carried by the QR code or identification label and obtaining the thickness information of the workpiece 80 to be exposed, the height of the exposure mechanism 20 can be automatically adjusted by the second moving component 42, so that the focus of the exposure mechanism 20 is located at the workpiece 80 to be exposed, thereby ensuring the exposure effect.

[0091] In some embodiments of the present application, a distance measuring sensor may be provided to detect the distance between the workpiece to be exposed 80 and the distance measuring sensor, thereby calculating the change in thickness of the workpiece to be exposed 80. The second moving component 42 automatically adjusts the height of the exposure mechanism 20 according to the change in thickness of the workpiece to be exposed 80, thereby making the focus of the exposure mechanism 20 located at the workpiece to be exposed 80, thereby ensuring the exposure effect.

[0092] In some embodiments of the present application, a distance measuring sensor may be provided on the exposure mechanism 20, and the distance between the workpiece to be exposed 80 and the exposure mechanism 20 may be detected by the distance measuring sensor. Then, the height of the exposure mechanism 20 may be automatically adjusted according to the distance between the workpiece to be exposed 80 and the exposure mechanism 20 by the second moving component 42, so that the focus of the exposure mechanism 20 is located at the workpiece to be exposed 80, thereby ensuring the exposure effect.

[0093] During the process of exposing the exposure member 80 by the exposure mechanism 20, the exposure mechanism 20 is driven to move by the first moving component 41, so that the exposure mechanism 20 scans the exposure member 80, so that the exposure mechanism 20 can reach all the exposure areas of the exposure member 80 and complete the exposure of the exposure member 80.

[0094] In some embodiments of the present application, the distance measuring sensor may be installed in front of the exposure mechanism 20 in the moving direction and move synchronously with the exposure mechanism 20 .

[0095] During the exposure of the workpiece 80 by the exposure mechanism 20, since the distance sensor is installed in front of the moving direction of the exposure mechanism 20 and moves synchronously with the exposure mechanism 20, the distance sensor first reaches the workpiece 80 to be exposed, and then detects the distance between the workpiece 80 to be exposed and the exposure mechanism 20, and then drives the exposure mechanism 20 to move in the second direction through the second moving component 42, adjusts the distance between the workpiece 80 to be exposed and the exposure mechanism 20 according to the distance data detected by the distance sensor, and drives the exposure mechanism 20 to move in the first direction through the first moving component 41, thereby completing the exposure of the workpiece 80 to be exposed. If the same workpiece 80 to be exposed has multiple surfaces to be exposed, and the heights of the surfaces to be exposed are different, the distance between the exposure mechanism 20 and the workpiece 80 to be exposed can be detected in real time by the distance sensor, and then the distance between the exposure mechanism 20 and the workpiece 80 to be exposed can be adjusted in real time by the second moving component 42, so that the exposure machine 100 can complete the exposure of the irregular-shaped workpiece 80 to be exposed, and the exposure effect meets the expected requirements.

[0096] See also Figure 1 In some embodiments of the present application, the controller 30 moves synchronously with the exposure mechanism 20 in the first direction.

[0097] During the exposure of the exposure mechanism 20 to the exposed member 80, since the thickness difference between the exposed members 80 of different models is small, the moving distance of the second moving assembly 42 is small, and thus the impact on the optical fiber is small. In order to expose the entire exposed area of ​​the exposed member 80, the exposure mechanism 20 moves a long path in the first direction, which has a greater impact on the optical fiber. By making the controller 30 move synchronously with the exposure mechanism 20 in the first direction, relative movement of the controller 30 and the exposure mechanism 20 can be avoided, thereby reducing the risk of loosening of the connection between the optical fiber and the exposure mechanism 20 and the controller 30, thereby improving the reliability of the exposure machine 100.

[0098] In some embodiments of the present application, the exposure mechanism 20 and the controller 30 may be both mounted on the first moving assembly 41, and the first moving assembly 41 may be used to drive the controller 30 and the exposure mechanism 20 to move synchronously. A moving device may also be added to drive the controller 30 to move, and the first moving assembly 41 may be used to drive the exposure mechanism 20 to move, and the moving device and the first moving assembly 41 may be used to move synchronously, so that the controller 30 and the exposure mechanism 20 may move synchronously.

[0099] In some embodiments of the present application, the first moving assembly 41 includes a first base 411, a first driving assembly 412, a first linear guide assembly 413 and a first mounting seat 414. The first driving assembly 412 is mounted on the first base 411, and the first driving assembly 412 is arranged along the scanning direction of the exposure mechanism 20. The number of the first linear guide assemblies 413 is at least two, and the first linear guide assemblies 413 are mounted on the first base 411, and the first linear guide assemblies 413 are arranged in parallel with the first driving assembly 412. The first mounting seat 414 is mounted on the power output end of the first driving assembly 412, and the first mounting seat 414 is connected to all the first linear guide assemblies 413, and the first linear guide assembly 413 guides the first mounting seat 414. Among them, the second moving assembly 42 and the controller 30 are both mounted on the first mounting seat 414. The exposure mechanism 20 is mounted on the power output end of the second moving assembly 42.

[0100] The first driving assembly 412 and the first linear guide assembly 413 are mounted on the first base 411 , so that the relative position of the first driving assembly 412 and the first linear guide assembly 413 is kept fixed and the position accuracy of the relative position of the first driving assembly 412 and the first linear guide assembly 413 is improved.

[0101] During the process of exposing the exposure member 80 by the exposure mechanism 20, the first driving component 412 operates, thereby driving the first mounting seat 414 to move in the first direction under the guidance of the first linear guide rail component 413, and then driving the second moving component 42, the exposure mechanism 20 and the controller 30 to move synchronously in the first direction through the first mounting seat 414.

[0102] The first linear guide rail assemblies 413 are used for guidance, thereby improving the structural strength and stability of the first moving assembly 41 , avoiding shaking or position deviation of the exposure mechanism 20 during movement, and improving the exposure accuracy of the exposure machine 100 .

[0103] The second moving assembly 42 drives the exposure mechanism 20 to move in the second direction, thereby adjusting the height of the exposure mechanism 20 , so that the exposure machine 100 can adapt to the exposure of the workpieces 80 to be exposed with different thicknesses.

[0104] In some embodiments of the present application, the first driving assembly 412 may include a first linear motor assembly, and the first linear motor assembly includes a first stator assembly and a first mover assembly. The first stator assembly is fixedly mounted on the first base 411, and the first mover assembly is fixedly mounted on the first mounting seat 414. During the operation of the first driving assembly 412, the first stator assembly drives the first mover assembly to move, and then drives the first mounting seat 414 to move through the first mover assembly, and then drives the second moving assembly 42, the exposure mechanism 20, and the controller 30 to move synchronously in the first direction through the first mounting seat 414.

[0105] In some embodiments of the present application, the second moving component 42 includes an electric screw module.

[0106] The exposure mechanism 20 is installed on the power output end of the electric screw module, and the electric screw module is installed vertically, and then the exposure mechanism 20 is driven to move in the vertical direction by the electric screw module, so that the height of the exposure mechanism 20 is adjusted by the second moving component 42, so that the exposure machine 100 can adapt to the exposure of the exposed parts 80 with different thicknesses.

[0107] See also Figure 1In some embodiments of the present application, the moving mechanism 40 further includes a guiding device 43, which includes a second base 431, a second driving assembly 432, a second linear guide assembly 433, a second mounting seat 434, and a third linear guide assembly 435. The second base 431 is arranged in parallel with the first base 411, and the second base 431 and the first base 411 are respectively located on both sides of the exposure mechanism 20. The second driving assembly 432 is installed on the second base 431, and the second driving assembly 432 is arranged in parallel with the first driving assembly 412, and the second driving assembly 432 and the first driving assembly 412 operate synchronously. The second linear guide assembly 433 is installed on the second base 431, and the second linear guide assembly 433 is arranged in parallel with the first linear guide assembly 413. The second mounting seat 434 is installed on the second linear guide assembly 433. The third linear guide assembly 435 is mounted on the second mounting seat 434 . The third linear guide assembly 435 is parallel to the second moving assembly 42 . The third linear guide assembly 435 is connected to the exposure mechanism 20 .

[0108] The second driving assembly 432 and the second linear guide assembly 433 are mounted on the second base 431 , so that the relative position of the second driving assembly 432 and the second linear guide assembly 433 is kept fixed and the position accuracy of the relative position of the second driving assembly 432 and the second linear guide assembly 433 is improved.

[0109] When the exposure mechanism 20 moves along the first direction, the exposure mechanism 20 is guided by the guide device 43 on the side of the exposure mechanism 20 away from the first moving component 41, thereby avoiding the exposure mechanism 20 from forming a cantilever structure, making the force on the exposure mechanism 20 more uniform, thereby preventing the exposure mechanism 20 from deflecting under the action of gravity, and improving the exposure accuracy of the exposure mechanism 20 and the reliability of the working process.

[0110] When the guide device 43 guides the exposure mechanism 20, the second driving assembly 432 and the first driving assembly 412 operate synchronously, so that the forces on both sides of the exposure mechanism 20 are uniform, so that the exposure mechanism 20 can be translated in the first direction. The second linear guide assembly 433 is used for guidance to improve the structural strength of the guide device 43 and make the motion structure of the exposure mechanism 20 more stable.

[0111] When the exposure mechanism 20 moves along the second direction, the exposure mechanism 20 is guided and supported by the third linear guide rail assembly 435 on the side away from the first moving assembly 41, so as to balance the gravity exerted on the exposure mechanism 20, thereby preventing the exposure mechanism 20 from deflecting under the action of gravity, thereby improving the exposure accuracy of the exposure mechanism 20 and the reliability of the working process.

[0112] See also Figure 1 to Figure 2In some embodiments of the present application, the dual-stage exposure machine 100 provided by the present application further includes a liquid cooling system 50. The liquid cooling system 50 is used to cool the controller 30.

[0113] The controller 30 is cooled by the liquid cooling system 50, thereby preventing the temperature of the controller 30 from being too high, thereby improving the accuracy and reliability of the controller 30. The temperature of the controller 30 is kept stable by the cooling system, avoiding excessive temperature fluctuations of the controller 30, thereby improving the exposure accuracy and consistency of the exposure machine 100.

[0114] In some embodiments of the present application, the cooling system includes a liquid cooling machine and a liquid cooling pipe. The liquid cooling pipe is coiled around the controller 30 according to a designed path. The liquid cooling machine is used to circulate the coolant in the liquid cooling pipe and cool the coolant.

[0115] When the coolant passes through the controller 30, the coolant absorbs heat from the controller 30 and flows through the liquid cooling machine in the liquid cooling pipe. When the coolant passes through the liquid cooling machine, the coolant is cooled by the liquid cooling machine and the cooled coolant passes through the controller 30 again. In this cycle, the controller 30 is cooled by the cooling system.

[0116] See also Figure 1 to Figure 2 In some embodiments of the present application, a dual-stage exposure machine 100 provided by the present application further includes a hood 60 and an air cooling system 70. The hood 60 is at least provided to cover the exposure mechanism 20 and the controller 30. The air cooling system 70 is used to cool the internal space of the hood 60.

[0117] By at least covering the exposure mechanism 20 and the controller 30 with the hood 60, the influence of the external environment of the exposure machine 100 on the exposure mechanism 20 and the controller 30 is reduced, the temperature stability of the exposure mechanism 20 and the controller 30 is improved, and excessive temperature fluctuation of the controller 30 is avoided, thereby improving the exposure accuracy and consistency of the exposure machine 100. The air cooling system 70 is used to cool the internal space of the hood 60, thereby placing the exposure mechanism 20 and the controller 30 in a low temperature environment, thereby preventing the temperature of the controller 30 from being too high, thereby improving the accuracy and reliability of the controller 30.

[0118] In some embodiments of the present application, the hood 60 is provided with an air inlet 61 and an air outlet 62 , the height of the air inlet 61 is higher than the height of the controller 30 , and the height of the air outlet 62 is lower than the height of the controller 30 .

[0119] The air cooling system 70 delivers cooled air from the air inlet 61 to the housing 60, thereby reducing the temperature in the housing 60. The air is drawn into the housing 60 through the air outlet 62, thereby increasing the fluidity of the air in the housing 60, and then the heat emitted by the controller 30 is taken away by the flowing air, thereby preventing the temperature of the controller 30 from being too high.

[0120] Since the density of air with a lower temperature is lower, the height of the air inlet 61 is set higher than the height of the controller 30, so that the low-temperature air can reach the controller 30 more quickly. By making the height of the air outlet 62 lower than the height of the controller 30, a convective air flow is formed in the hood 60, and the air flow passes through the controller 30 to take away the heat emitted by the controller 30, thereby improving the cooling effect of the air cooling system 70 on the controller 30.

[0121] In some embodiments of the present application, the air cooling system 70 includes an air cooler, an air outlet duct and an air inlet duct. The air outlet duct is connected to the air inlet 61 of the hood 60 , and the air inlet duct is connected to the air outlet 62 of the hood 60 .

[0122] During the operation of the air cooler, air is evacuated from the internal space of the hood 60 through the air inlet duct, and the air that absorbs the heat of the controller 30 is sucked into the air cooler. The air cooler then cools the air, and the cooled air is blown into the internal space of the hood 60 from the air inlet 61 of the hood 60 through the air outlet duct. The cooled air then takes away the heat emitted by the controller 30, thereby preventing the temperature of the controller 30 from being too high, thereby improving the accuracy and reliability of the controller 30.

[0123] In some embodiments of the present application, the air outlet duct is provided with a first air door, and the air inlet duct is provided with a second air door and a third air door. The first air door is connected to the air inlet 61, and the first air door is used to control the air volume of the air inlet 61. The second air door is connected to the air outlet 62, and the second air door is used to control the air volume of the air outlet 62. The third air door is connected to the atmospheric space, and the third air door is used to control the air volume of the air cooler.

[0124] In some embodiments of the present application, a first temperature sensor is provided at the air inlet 61, and the first temperature sensor is used to detect the temperature at the air inlet 61. A second temperature sensor is provided at the air outlet 62, and the second temperature sensor is used to detect the temperature of the air outlet 62. A third temperature sensor is provided at the controller 30, and the third temperature sensor is used to detect the temperature at the controller 30.

[0125] The cooling effect of the air cooling system 70 on the environment inside the hood 60 is determined by calculating the difference between the second temperature detected by the second temperature sensor and the first temperature detected by the first temperature sensor.

[0126] If the calculated difference is less than the difference threshold, and the third temperature detected by the third temperature sensor is higher than the temperature threshold, it means that the temperature rise of the airflow after passing through the controller 30 is not obvious, and the cooling effect of the controller 30 does not meet the expected requirements, and then it is judged that the cooling effect of the air cooling system 70 does not meet the expected requirements. In this case, it indicates that the air flow rate of the air outlet 62 is too large, which leads to the loss of cold air in the hood 60 too fast, so that the cold air is drawn out of the hood 60 before absorbing enough heat. At this time, the opening of the second damper can be closed to reduce the air flow rate of the air outlet 62. In this case, the opening of the third damper can be increased so that the air cooler can draw more air from the atmospheric space, thereby ensuring the air intake of the air cooler.

[0127] If the calculated difference is greater than the difference threshold, and the third temperature detected by the third temperature sensor is higher than the temperature threshold, it means that the temperature of the airflow rises significantly after passing through the controller 30, but the cooling effect of the controller 30 does not meet the expected requirements, and then it is judged that the cooling effect of the air cooling system 70 does not meet the expected requirements. In this case, it indicates that the air flow rate of the air inlet 61 is too small, resulting in insufficient cold air in the hood 60. At this time, the opening of the first damper can be increased to increase the air intake of the air inlet 61 and improve the cooling effect of the air cooling system 70.

[0128] In some embodiments of the present application, a first air pressure sensor may be provided in the air outlet duct, a second air pressure sensor may be provided in the air inlet duct, and a third air pressure sensor may be provided in the hood 60. The first air pressure sensor is used to detect the air outlet pressure of the air cooler, the second air pressure sensor is used to detect the air inlet pressure of the air cooler, and the third air pressure sensor is used to detect the air pressure in the hood 60.

[0129] If the first air pressure data detected by the first air pressure sensor is greater than the first air pressure threshold, it indicates that the output power of the air cooler is too large or the opening of the first air damper is too small. If the third temperature detected by the third temperature sensor is higher than the third temperature threshold at this time, the opening of the first air damper is opened to improve the cooling effect of the air cooling system 70; if the third temperature detected by the third temperature sensor is lower than the third temperature threshold at this time, the output power of the air cooler is reduced to reduce the energy consumption of the air cooling system 70.

[0130] The opening degree of the first damper and the opening degree of the second damper may be adjusted by the third air pressure data detected by the third air pressure sensor.

[0131] If the third air pressure data is higher than the third air pressure threshold, it means that the air pressure in the hood 60 is too high. At this time, it can be judged that the opening of the first air door is too large, the output power of the air cooler is too large, or the opening of the second air door is too small. If the third temperature detected by the third temperature sensor is higher than the third temperature threshold, the opening of the second air door is increased, and the opening of the first air door is adjusted according to the temperature difference between the first temperature detected by the first temperature sensor and the second temperature detected by the second temperature sensor, thereby improving the cooling effect of the air cooling system 70. If the third temperature detected by the third temperature sensor is lower than the third temperature threshold, the output power of the air cooler is reduced, and the first air pressure data detected by the first air pressure sensor is adjusted, and the opening of the first air door is adjusted to ensure the cooling effect of the air cooling system 70.

[0132] If the third air pressure data is lower than the third air pressure threshold, it means that the air pressure in the hood 60 is too low. At this time, it can be judged that the opening of the first air door is too small, the output power of the air cooler is too small, or the opening of the second air door is too large. If the third temperature detected by the third temperature sensor is higher than the third temperature threshold at this time, the output power of the air cooler can be increased, and the opening of the first air door and the second air door can be adjusted according to the first air pressure threshold and the temperature difference between the first temperature detected by the first temperature sensor and the second temperature detected by the second temperature sensor, thereby reducing the energy consumption of the air cooling system 70 while ensuring the cooling effect of the air cooling system 70.

[0133] The ratio of the opening degree of the second damper to the opening degree of the third damper can be adjusted according to the second air pressure data detected by the second air pressure sensor.

[0134] If the temperature data detected by the first temperature sensor, the second temperature sensor and the third temperature sensor are all within the expected range, but the second air pressure data detected by the second air pressure sensor is lower than the second air pressure threshold, it means that the air intake of the air cooler is too small, but the opening of the second air damper is within the expected range. At this time, the third air damper should be opened to increase the amount of air extracted by the air cooler from the atmospheric space and increase the air intake of the air cooler.

[0135] In some embodiments of the present application, a flow rate sensor may be provided at the air outlet 62 , and the flow rate sensor is used to detect the air flow velocity at the air outlet 62 .

[0136] If the air flow velocity detected by the flow velocity sensor is lower than the flow velocity threshold, it indicates that the opening of the second air door is too small or the input power of the air cooler is too small. If the second air pressure data detected by the second air pressure sensor is lower than the second air pressure threshold, the opening of the second air door is increased to increase the air flow velocity of the air outlet 62; if the second air pressure data detected by the second air pressure sensor is higher than or equal to the second air pressure threshold, the input power of the air cooler is increased to increase the air extraction capacity of the air cooler. In this process, the second air pressure data is not felt to adjust the opening of the third air door, thereby adjusting the air intake of the air cooler.

[0137] See also Figures 1 to 3 In some embodiments of the present application, the exposure mechanism 20 includes a mounting bracket 21, an exposure head 22, and a detection device 23. The mounting bracket 21 is mounted on the moving mechanism 40. The exposure head 22 is fixedly mounted on the mounting bracket 21. The detection device 23 is used to detect the tilt angle of the exposure head 22.

[0138] The detection device 23 detects the tilt angle of the exposure head 22, thereby ensuring that the light output angle of the exposure head 22 meets the expected requirements, so that the exposure accuracy of the exposure machine 100 meets the expected requirements. If the detection device 23 detects that the exposure head 22 is tilted, manual adjustment can be performed to make the light output angle of the exposure head 22 meet the expected requirements. An adjustment device can also be added to automatically adjust the light output angle of the exposure head 22, so that the light output angle setting of the exposure head 22 is maintained within the expected range, thereby ensuring that the exposure accuracy of the exposure machine 100 meets the expected requirements.

[0139] See also Figure 3 to Figure 4 In some embodiments of the present application, it is characterized in that the detection device 23 includes: a suspension bracket 231, a contact bracket 232, a suspension rope 234, a counterweight ball 235 and a computing unit 236.

[0140] The suspension bracket 231 is fixedly mounted on the mounting bracket 21. The inner wall of the contact bracket 232 is hemispherical, and the contact bracket 232 is not conductive. A plurality of contact members 233 are arranged at the longitude and latitude lines of the inner wall of the contact bracket 232. The first end of the suspension rope 234 is mounted on the suspension bracket 231, and the first end coincides with the sphere center of the contact bracket 232. The suspension rope 234 is conductive. The weight ball 235 is mounted on the second end of the suspension rope 234, and the weight ball 235 is conductive. The computing unit 236 is connected to the suspension rope 234, the weight ball 235, and the contact member 233.

[0141] When the optical axis of the exposure head 22 is in a vertical state, the center line of the suspension rope 234 is collinear with the optical axis of the exposure head 22. When the suspension rope 234 is in a stretched state, the weight ball 235 is tangent to the inner wall of the contact bracket 232, and the weight ball 235 contacts the contact member 233 to trigger the contact member 233. The calculation unit 236 is configured to calculate the tilt angle of the exposure head 22 according to the number of the triggered contact member 233.

[0142] See also Figure 3 When the suspension rope 234 is in the setting state, it means that the light output angle of the exposure head 22 meets the expected requirements. At this time, the counterweight ball 235 is connected to the contact piece 233 at the lowest point of the contact bracket 232, and the computing unit 236 senses the change of the contact piece 233 to determine that the light output angle of the exposure head 22 is within the expected range.

[0143] See also Figure 4 When the exposure head 22 tilts, the mounting bracket 21 drives the suspension bracket 231, the contact bracket 232, and the contact member 233 to tilt. At this time, the suspension rope 234 is still in a vertical state under the gravity of the counterweight ball 235. At this time, the counterweight ball 235 and the contact bracket 232 move relative to each other. In addition, the inner wall of the contact bracket 232 is hemispherical and the first end of the suspension rope 234 coincides with the sphere center of the contact bracket 232. When the suspension rope 234 is in a straight state, the counterweight ball 235 is tangent to the inner wall of the contact bracket 232. Therefore, the counterweight ball 235 is always in contact with the inner wall of the contact bracket 232. If the counterweight ball 235 and the contact bracket 232 move relative to each other, the corresponding contact originally located at the high position of the contact bracket 232 will move to the lowest position of the contact bracket 232 along with the contact member 233 bracket, and the contact member 233 originally at the lowest position will move to the high position along with the contact bracket 232. However, due to the effect of gravity, the position of the counterweight ball 235 does not change, and the counterweight ball 235 always contacts the contact located at the lowest position of the contact bracket 232. When the corresponding contact member 233 reaches the lowest point of the contact bracket 232, it is connected with the counterweight ball 235, and the calculation unit 236 calculates the tilt angle of the exposure head 22 according to the number of the contact member 233. It can be understood that each contact member 233 on the contact bracket 232 is configured with a number, and each number corresponds to a tilt angle. In this way, the calculation unit 236 can calculate the tilt angle of the exposure head 22 according to the number of the contact member 233. The staff or the adjustment mechanism adjusts the light output angle of the exposure head 22 according to the detected tilt angle, so that the contact piece 233 on the top of the contact bracket 232 returns to the lowest point of the contact bracket 232, thereby completing the adjustment of the light output angle of the exposure head 22 to ensure the exposure accuracy of the exposure machine 100.

[0144] See also Figure 6 to Figure 7 In some embodiments of the present application, a loading mechanism 10 provided by the present application includes a loading platform assembly 11, an elastic member 12, and a sealing member 13. The loading platform assembly 11 is used to load the workpiece 80 to be exposed, and the loading platform assembly 11 is provided with a plurality of adsorption holes 111, and the adsorption holes 111 are used to adsorb the workpiece 80 to be exposed. The elastic member 12 is provided in the adsorption hole 111. The sealing member 13 is connected to the elastic member 12, and the sealing member 13 is used to seal the adsorption hole 111. Among them, if the adsorption hole 111 does not adsorb the workpiece 80 to be exposed, the sealing member 13 seals the adsorption hole 111 and causes the elastic member 12 to undergo elastic deformation. If the adsorption hole 111 adsorbs the workpiece 80 to be exposed, the elastic member 12 moves the sealing member 13, thereby releasing the seal of the adsorption hole 111.

[0145] The exposed member 80 is fixed by adsorption. When the exposed member 80 is placed on the loading mechanism 10, the exposed member 80 blocks the adsorption hole 111, and the negative pressure device forms a negative pressure on the adsorption hole 111, and then the exposed member 80 is fixed to the loading mechanism 10 by the atmospheric pressure. Since the adsorption holes 111 in the area of ​​the exposed member 80 are mainly subjected to the atmospheric pressure by the exposed member 80, the atmospheric pressure on the sealing member 13 is relatively small. At this time, the elastic member 12 releases the sealing member 13 from sealing the adsorption holes 111. The adsorption holes 111 outside the area of ​​the exposed member 80 are not subjected to the atmospheric pressure by the exposed member 80, and therefore, the sealing member 13 bears most of the atmospheric pressure, and then the sealing member 13 is closely attached to the loading platform assembly 11, and then the adsorption holes 111 are blocked to prevent the occurrence of air leakage, thereby ensuring the effectiveness of the loading mechanism 10 in adsorbing the exposed member 80, and reducing the power of the negative pressure device, thereby reducing the energy consumption of the exposure equipment. In this way, the reliability of the loading mechanism 10 is improved and the energy consumption of the exposure equipment is reduced.

[0146] See also Figures 7 and 8 In some embodiments of the present application, a loading mechanism 10 provided by the present application further includes a lower sealing plate 14. The lower sealing plate 14 is connected to the loading platform assembly 11 and forms a seal. The lower sealing plate 14 is provided with a connecting groove 141, and the connecting groove 141 is used to connect at least two adsorption holes 111.

[0147] At least two adsorption holes 111 are connected through the connecting groove 141, so when an external negative pressure device evacuates the loading mechanism 10, negative pressure can be generated in multiple adsorption holes 111 through a small number of exhaust holes 142, thereby reducing the setting of the exhaust pipeline, thereby reducing the complexity of the air circuit system and facilitating disassembly, assembly and maintenance.

[0148] Since the adsorption holes 111 are interconnected, if there is air leakage in some of the adsorption holes 111, it will affect the fixing effect of the loading mechanism 10 on the to-be-exposed member 80. The inoperative adsorption holes 111 are sealed by the sealing member 13, thereby preventing air leakage in the adsorption holes 111 and ensuring the reliability of the loading mechanism 10 fixing the to-be-exposed member 80.

[0149] In some embodiments of the present application, a sealing ring 16 is disposed between the lower sealing plate 14 and the loading platform assembly 11. All the adsorption holes 111 and all the connecting grooves 141 are within the inner circle of the sealing ring 16.

[0150] The sealing ring 16 is used to improve the sealing performance between the lower sealing plate 14 and the loading platform assembly 11, thereby preventing air leakage from the connecting groove 141 and the adsorption hole 111, thereby ensuring the reliability of the loading mechanism 10 in fixing the to-be-exposed object 80.

[0151] In some embodiments of the present application, the lower sealing plate 14 is provided with an air extraction hole 142 , and the air extraction hole 142 is connected to the connecting groove 141 .

[0152] The negative pressure device evacuates the connecting groove 141 through the exhaust hole 142, thereby generating negative pressure in the adsorption holes 111. When the to-be-exposed member 80 is placed on the loading mechanism 10, the adsorption holes 111 in the area of ​​the to-be-exposed member 80 fix the to-be-exposed member 80 through negative pressure, and the adsorption holes 111 outside the area of ​​the to-be-exposed member 80 block the adsorption holes 111 outside the area of ​​the to-be-exposed member 80 through negative pressure by the sealing member 13, thereby preventing the adsorption holes 111 outside the area of ​​the to-be-exposed member 80 from leaking air and affecting the working performance of the adsorption holes 111 in the area of ​​the to-be-exposed member 80. In this way, the reliability of the loading mechanism 10 in fixing the to-be-exposed member 80 is ensured.

[0153] In some embodiments of the present application, a loading mechanism 10 provided by the present application further includes an adapter 15. The adapter 15 is installed on the lower sealing plate 14, and the position of the adapter 15 corresponds to the position of the air extraction hole 142. The adapter 15 is used to connect the external negative pressure device with the air extraction hole 142.

[0154] The negative pressure device is connected to the exhaust hole 142 through the adapter 15, and then the connecting groove 141 is exhausted, and the adsorption hole 111 generates negative pressure through the connecting groove 141, so that the loading mechanism 10 can effectively fix the to-be-exposed workpiece 80. The negative pressure device can be effectively connected to the loading mechanism 10 through the adapter 15, and the reliability of the loading mechanism 10 fixing the to-be-exposed workpiece 80 is improved.

[0155] See also Figure 7 In some embodiments of the present application, a loading mechanism 10 provided in the present application also includes a limiting plate 17, and the limiting plate 17 is provided with a plurality of limiting holes 171, the positions of the limiting holes 171 correspond to the positions of the adsorption holes 111, and the diameter of the limiting holes 171 is smaller than the diameter of the sealing member 13.

[0156] The opening of the adsorption hole 111 is limited by the limiting plate 17 , thereby preventing the sealing member 13 and the elastic member 12 from falling out of the adsorption hole 111 , thereby improving the reliability of the structure of the loading mechanism 10 .

[0157] In some embodiments of the present application, the adsorption hole 111 includes a first hole 112 and a second hole 113, the first hole 112 is connected to the second hole 113, and the diameter of the first hole 112 is greater than the diameter of the second hole 113. The elastic member 12 is located in the second hole 113 and partially extends into the first hole 112, and the sealing member 13 is located in the first hole 112.

[0158] When the object to be exposed 80 is placed on the loading mechanism 10, the object to be exposed 80 blocks the adsorption hole 111, and the adsorption hole 111 is formed with negative pressure by the negative pressure device, and then the object to be exposed 80 is fixed to the loading mechanism 10 by the atmospheric pressure. Since the adsorption holes 111 in the area of ​​the object to be exposed 80 are mainly subjected to the atmospheric pressure by the object to be exposed 80, the atmospheric pressure on the sealing member 13 is relatively small. At this time, the elastic member 12 causes the sealing member 13 to release the sealing of the adsorption holes 111. The adsorption holes 111 outside the area of ​​the object to be exposed 80 are not subjected to the atmospheric pressure by the object to be exposed 80, and therefore, the sealing member 13 bears most of the atmospheric pressure, and then the sealing member 13 is closely attached to the loading platform assembly 11, and then the adsorption holes 111 are blocked to prevent the occurrence of air leakage, and then the loading mechanism 10 is effective in adsorbing the object to be exposed 80.

[0159] When the negative pressure device evacuates the adsorption hole 111, the sealing member 13 in the adsorption hole 111 outside the area of ​​the to-be-exposed member 80 moves along the hole wall of the first hole 112 toward the direction of the second hole 113 under the action of the airflow. During the movement of the sealing member 13, the elastic force of the elastic member 12 is overcome, causing the elastic member 12 to undergo elastic deformation. When the sealing member 13 reaches the opening of the second hole 113, the opening of the second hole 113 is blocked, thereby completing the sealing of the adsorption hole 111. After the sealing member 13 blocks the opening of the second hole 113, due to the pressure difference between the second hole 113 and the first hole 112, the sealing member 13 can stably stay at the opening of the second hole 113, thereby forming a stable seal for the adsorption hole 111.

[0160] The opening of the first hole 112 in the suction hole 111 in the area of ​​the to-be-exposed member 80 is blocked by the to-be-exposed member 80, so the air pressure difference between the second hole 113 and the first hole 112 is small, and then under the action of the elastic member 12, the sealing member 13 is moved away from the opening of the second hole 113, so that the first hole 112 is connected with the second hole 113. In addition, the opening of the first hole 112 is blocked by the to-be-exposed member 80, so there is an operating air pressure difference between the inside of the suction hole 111 and the outside of the suction hole 111, and the air pressure inside the suction hole 111 is lower than the air pressure outside the suction hole 111, and then the to-be-exposed member 80 is fixed to the loading mechanism 10 by the atmospheric pressure.

[0161] See also Figures 8 to 9 In some embodiments of the present application, a sealing slope 114 is provided between the first hole 112 and the second hole 113 , and the sealing member 13 is adapted to the sealing slope 114 .

[0162] By forming a seal between the sealing slope 114 and the sealing member 13 , the sealing performance of the sealing member 13 to the adsorption hole 111 is improved, thereby ensuring the reliability of the loading mechanism 10 in fixing the object to be exposed 80 .

[0163] In some embodiments of the present application, the sealing member 13 includes a spherical surface, and the first hole 112 and the second hole 113 both include cylindrical holes. The spherical surface faces the second hole 113. The diameter of the spherical surface is smaller than the diameter of the first hole 112, and the diameter of the sealing member 13 is larger than the diameter of the second hole 113.

[0164] The opening of the second hole 113 is blocked by the spherical surface, thereby improving the reliability of the sealing member 13 blocking the adsorption hole 111, thereby ensuring the reliability of the loading mechanism 10 fixing the to-be-exposed member 80.

[0165] In some embodiments of the present application, the elastic member 12 includes a telescopic spring.

[0166] When the negative pressure device evacuates the adsorption hole 111, the sealing member 13 in the adsorption hole 111 outside the area of ​​the to-be-exposed member 80 moves along the hole wall of the first hole 112 toward the direction of the second hole 113 under the action of the airflow. During the movement of the sealing member 13, the elastic force of the elastic member 12 is overcome, causing the elastic member 12 to undergo elastic deformation. When the sealing member 13 reaches the opening of the second hole 113, the opening of the second hole 113 is blocked, thereby completing the sealing of the adsorption hole 111. After the sealing member 13 blocks the opening of the second hole 113, due to the pressure difference between the second hole 113 and the first hole 112, the sealing member 13 can stably stay at the opening of the second hole 113, thereby forming a stable seal for the adsorption hole 111.

[0167] The opening of the first hole 112 in the suction hole 111 in the area of ​​the to-be-exposed member 80 is blocked by the to-be-exposed member 80, so the air pressure difference between the second hole 113 and the first hole 112 is small, and then under the action of the elastic member 12, the sealing member 13 is moved away from the opening of the second hole 113, so that the first hole 112 is connected with the second hole 113. In addition, the opening of the first hole 112 is blocked by the to-be-exposed member 80, so there is an operating air pressure difference between the inside of the suction hole 111 and the outside of the suction hole 111, and the air pressure inside the suction hole 111 is lower than the air pressure outside the suction hole 111, and then the to-be-exposed member 80 is fixed to the loading mechanism 10 by the atmospheric pressure.

[0168] In the description of this specification, the description with reference to the terms "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiments or examples are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0169] In addition, the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modification, equivalent replacement and improvement made within the spirit and principle of the present invention shall be included in the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A dual-stage exposure machine, characterized in that: include: At least two loading mechanisms, the loading mechanisms are used to load the pieces to be exposed, and the loading mechanisms are arranged side by side; An exposure mechanism, the exposure mechanism is used to expose the workpiece to be exposed; A controller, the controller being used to control the exposure mechanism; A moving mechanism, the moving mechanism is used to drive the exposure mechanism to move; Wherein, the controller moves synchronously with the exposure mechanism in at least one moving direction; The exposure mechanism comprises: A mounting bracket, the mounting bracket being mounted on the moving mechanism; An exposure head, the exposure head is fixedly mounted on the mounting bracket; A detection device, the detection device is used to detect the tilt angle of the exposure head; The detection device comprises: A hanging bracket, wherein the hanging bracket is fixedly mounted on the mounting bracket; A contact bracket, the inner wall of which is hemispherical, the contact bracket is non-conductive, and a plurality of contact members are arranged at the longitude and latitude lines of the inner wall of the contact bracket; A suspension rope, wherein a first end of the suspension rope is mounted on the suspension bracket, the first end coincides with the spherical center of the contact bracket, and the suspension rope is conductive; A weight ball, the weight ball is installed at the second end of the suspension rope, and the weight ball is conductive; A computing unit connected to the suspension rope, the weighted ball and the contact member; Wherein, when the optical axis of the exposure head is in a vertical state, the center line of the suspension rope is collinear with the optical axis of the exposure head; When the suspension rope is in a stretched state, the weight ball is tangent to the inner wall of the contact bracket, and the weight ball contacts the contact member to trigger the contact member; The calculation unit is configured to calculate the tilt angle of the exposure head according to the number of the triggered contact member.

2. The dual-stage exposure machine according to claim 1, characterized in that: The moving mechanism comprises: A first moving component, wherein the first moving component drives the exposure mechanism to move along a first direction; A second moving assembly, wherein the second moving assembly drives the exposure mechanism to move along a second direction; The first direction is configured as a scanning direction along the exposure mechanism, and the second direction is configured as a light emitting direction along the exposure mechanism.

3. The dual-stage exposure machine according to claim 2, characterized in that: The controller moves synchronously with the exposure mechanism in the first direction.

4. The dual-stage exposure machine according to claim 2, characterized in that: The first moving component comprises: First Pedestal; A first driving assembly, the first driving assembly is mounted on the first base, and the first driving assembly is arranged along a scanning direction of the exposure mechanism; A first linear guide assembly, the number of the first linear guide assemblies is at least two, the first linear guide assembly is installed on the first base, and the first linear guide assembly is arranged in parallel with the first driving assembly; A first mounting seat, wherein the first mounting seat is mounted at a power output end of the first driving assembly, the first mounting seat is connected to all the first linear guide rail assemblies, and the first linear guide rail assemblies guide the first mounting seat; Wherein, the second moving assembly and the controller are both mounted on the first mounting seat; The exposure mechanism is installed at the power output end of the second moving component.

5. The dual-stage exposure machine according to claim 4, characterized in that: The moving mechanism further comprises a guiding device, wherein the guiding device comprises: a second base, the second base being arranged in parallel with the first base, and the second base and the first base being respectively located on two sides of the exposure mechanism; a second driving assembly, the second driving assembly being mounted on the second base, the second driving assembly being arranged in parallel with the first driving assembly, and the second driving assembly and the first driving assembly being operated synchronously; A second linear guide assembly, the second linear guide assembly is mounted on the second base, and the second linear guide assembly is arranged in parallel with the first linear guide assembly; a second mounting seat, the second mounting seat being mounted on the second linear guide rail assembly; A third linear guide assembly is mounted on the second mounting seat, the third linear guide assembly is parallel to the second moving assembly, and the third linear guide assembly is connected to the exposure mechanism.

6. The dual-stage exposure machine according to claim 1, characterized in that: Also includes: A liquid cooling system is used to cool the controller.

7. The dual-stage exposure machine according to claim 1, characterized in that: Also includes: A hood, the hood being provided to cover at least the exposure mechanism and the controller; An air cooling system is used to cool the interior space of the hood.

8. The dual-stage exposure machine according to claim 7, characterized in that: The hood is provided with an air inlet and an air outlet, the height of the air inlet is higher than the height of the controller, and the height of the air outlet is lower than the height of the controller.

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