COG type ceramic dielectric material and preparation method thereof and multilayer chip ceramic capacitor

Abstract

The present invention provides a COG type ceramic dielectric material and its preparation method and a multilayer chip ceramic capacitor, which relates to the technical field of ceramic dielectric materials. The COG type ceramic dielectric material mainly consists of a main component, a modified component and a sintering aid component; the main component is (Ba x Sr 1‑x ) z Zr h O3, where 0.2<x<0.5, 0.99

Description

Technical Field

[0001] The present invention relates to the technical field of ceramic dielectric materials, in particular to a COG type ceramic dielectric material and a preparation method thereof, and a multilayer chip ceramic capacitor. Background Art

[0002] Multilayer ceramic capacitors are abbreviated as MLCC. MLCC consists of three parts: inner electrode, ceramic layer and terminal electrode. The ceramic layer dielectric material and the inner electrode are stacked in an offset manner and sintered at high temperature to form a shape. Then, a metal layer is sealed on both ends of the ceramic body to form the terminal electrode. The terminal electrode is connected to the inner electrode to obtain a structure similar to a monolith. Therefore, MLCC is often called a "monolithic capacitor". It has the characteristics of high specific capacitance, high reliability, high voltage resistance and good frequency characteristics. It is an electronic device that is widely used in the fields of electronic information, computer, automatic control and communication.

[0003] With the development of electronic technology, MLCC's small size, high capacity, high voltage resistance, high frequency, low cost and high reliability are developing rapidly, and the market demand for these high-performance MLCCs is increasing.

[0004] The MLCC Electronics Industry Association (EIA) specifies the capacitance temperature coefficient of COG in Class I porcelain, which is that within the temperature range of -55°C to +125°C, with 25°C as the reference, the capacitance changes between -30ppm / °C and +30ppm / °C.

[0005] To reduce costs, ceramic dielectric materials must possess a high dielectric constant. However, existing technologies that meet COG characteristics and produce MLCCs with a dielectric constant between 29 and 35 make it difficult to achieve high capacity and low cost. Furthermore, some ceramic dielectric materials inevitably use B2O3 during manufacturing, which reacts with the binder during MLCC formulation, resulting in a jelly-like MLCC slurry that is difficult to cast, hindering MLCC production. Furthermore, the low withstand voltage makes it difficult to achieve high reliability.

[0006] In view of this, the present invention is proposed. Summary of the Invention

[0007] One of the objectives of the present invention is to provide a COG type ceramic dielectric material to alleviate at least one of the above technical problems.

[0008] A second object of the present invention is to provide a method for preparing a COG type ceramic dielectric material.

[0009] A third object of the present invention is to provide a multilayer ceramic capacitor.

[0010] In order to achieve the above-mentioned purpose of the present invention, the following technical solutions are adopted:

[0011] In the first aspect of the present invention, a COG type ceramic dielectric material is provided, which mainly consists of a main component, a modifying component and a sintering aid component;

[0012] The main component is (Ba h , ,

[0022] Sr 1-x ) z Zr h O3, where 0.2 < x < 0.5, 0.99 < z < 1.01, 0.99 < h < 1.01 and 0.98 < z / h < 1.02;

[0013] The modifying component includes CaTiO3, Re2O3, BaCO3 and CaCO3, where Re is selected from at least one of Y, Ho, Yb, Gd, Dy, Sm, Nd and Er;

[0014] The sintering aid component is MnSiO3.

[0015] Furthermore, calculated by the amount of substance of the main component, the amount of the modifying component is 3.5 mol% to 6.4 mol%, and the amount of the sintering aid component is 1.2 mol% to 1.7 mol%.

[0016] Furthermore, in the modifying component, the amount of CaTiO3 is 3.0 mol% to 5.0 mol%; the amount of Re2O3 is 0.15 mol% to 0.4 mol%; the amount of BaCO3 is 0.15 mol% to 0.4 mol% and the amount of CaCO3 is 0.2 mol% to 0.6 mol%. [[ID=2??]]

[0017] Furthermore, the particle size of the main component is 250 nm to 300 nm.

[0018] Preferably, the particle size of the CaTiO3 is 200 nm to 250 nm, and the particle sizes of Re2O3, BaCO3 and CaCO3 are each independently less than 200 nm. <??000100>Preferably, the particle size of the MnSiO3 is less than 200 nm.

[0020] In the second aspect of the present invention, a preparation method of the COG type ceramic dielectric material is provided. The main component, the modifying component and the sintering aid component are mixed in proportion, and then dispersed, dried and sieved to obtain the ceramic dielectric material.

[0021] Furthermore, the preparation method of the main component (Ba x Sr 1-x ) z Zr h O3 is as follows:

[0022] It should be noted that there seems to be an error in the original text where "2??" appears in line 25. I have translated it as best as possible based on the context. If this is a specific placeholder or needs to be corrected, please provide more accurate information.BaCO3, SrCO3 and ZrO2 were weighed in proportion, added with deionized water and wet mixed in a ball mill, then transferred to a sand mill for crushing and dispersion, and then dried and calcined at 1200℃~1250℃ for 4h~5h to obtain the (Ba x Sr 1-x ) z Zr h O3.

[0023] Furthermore, the preparation method of CaTiO3 is as follows:

[0024] CaCO3 and TiO2 are weighed in proportion, deionized water is added and wet-mixed in a ball mill, and then transferred to a sand mill for crushing and dispersion. After that, the mixture is dried and calcined at 1200°C to 1230°C for 4h to 5h to obtain CaTiO3.

[0025] Furthermore, the preparation method of the sintering aid component MnSiO3 is as follows:

[0026] MnCO3 and SiO2 are weighed in proportion, deionized water is added and wet-mixed in a ball mill, and then the mixture is transferred to a sand mill for crushing and dispersion, followed by drying, and calcining at 1050°C to 1150°C for 4h to 5h. The calcined material is then wet-crushed and dried in a sand mill to obtain the MnSiO3.

[0027] A third aspect of the present invention provides a multilayer chip ceramic capacitor consisting of three parts: an inner electrode, a ceramic layer, and a terminal electrode;

[0028] The ceramic layer is formed of the COG type ceramic dielectric material described in the first aspect.

[0029] Furthermore, the thickness of the ceramic layer is greater than 5 μm.

[0030] Preferably, the dielectric constant of the multilayer ceramic capacitor is 45 to 49, and the dielectric loss is less than 5×10 -4 .

[0031] Compared with the prior art, the present invention has at least the following beneficial effects:

[0032] The COG type ceramic dielectric material provided by the present invention adopts a main component, a modified component and a sintering aid component to improve the dielectric constant of the COG type ceramic dielectric material, wherein the main component of barium strontium zirconate (Ba x Sr 1-x ) z Zr hO3 has a low dielectric constant. The size of x is controlled to make its temperature coefficient positive. CaTiO3 in the modifying component has a high dielectric constant and a negative temperature coefficient, which increases the dielectric constant of the dielectric material and at the same time the temperature coefficient meets the COG characteristics of the EIA standard; Re2O3 in the modifying component is combined with BaCO3 or / and CaCO3. On the one hand, it inhibits the abnormal growth of grains after sintering and improves the voltage resistance and lifespan of the material; on the other hand, it improves the dielectric properties of the material and enhances the insulation performance of the material. The sintering aid is MnSiO3. Compared with other sintering aids such as SiO2, Al2O3, B2O3, and H3BO3, it has stable performance and is conducive to controlling the grain size after the material is sintered; on the other hand, it is conducive to the production control of COG-type ceramic dielectric materials in the preparation of MLCCs. The above main component, modifying component, and sintering aid component cooperate with each other to make the制成的 MLCC ceramic layer have good dielectric properties and reliability.

[0033] The preparation method provided by the present invention has a simple process, a large batch processing capacity, and is suitable for large-scale industrial production.

[0034] The multilayer ceramic capacitor provided by the present invention uses a COG-type ceramic dielectric material with better performance as the ceramic layer, reduces the number of dielectric layers and electrode layers, and realizes low cost; at the same time, the COG-type ceramic dielectric material has a high dielectric constant, which increases the single-layer dielectric capacitance and further increases the capacitance of the MLCC. Detailed implementation mode

[0035] The implementation scheme of the present invention will be described in detail below in combination with the implementation mode and examples. However, those skilled in the art will understand that the following implementation mode and examples are only used to illustrate the present invention and should not be regarded as limiting the scope of the present invention. All other examples obtained by those of ordinary skill in the art based on the examples in the present invention without creative work fall within the scope of protection of the present invention.

[0036] The first aspect of the present invention provides a COG-type ceramic dielectric material, which is mainly composed of a main component, a modifying component, and a sintering aid component;

[0037] The main component is (Ba x Sr 1-x ) z Zr h O3, where 0.2 < x < 0.5, 0.99 < z < 1.01, 0.99 < h < 1.01 and 0.98 < z / h < 1.02;

[0038] The modifying component includes CaTiO3, Re2O3, BaCO3, and CaCO3, where Re is selected from at least one of Y, Ho, Yb, Gd, Dy, Sm, Nd, and Er;

[0039] The sintering aid component is MnSiO3.

[0040] The COG type ceramic dielectric material provided by the present invention adopts a main component, a modified component and a sintering aid component to improve the dielectric constant of the COG type ceramic dielectric material, wherein the main component of barium strontium zirconate (Ba x Sr 1-x ) z Zr h O3, with its low dielectric constant, controls the size of x to achieve a positive temperature coefficient. CaTiO3, a modified component, has a high dielectric constant and a negative temperature coefficient, improving the dielectric constant of the dielectric material while also meeting EIA standard COG characteristics. The modified component, Re2O3, combined with BaCO3 and / or CaCO3, inhibits abnormal grain growth after sintering, improving the material's withstand voltage and lifespan, while also improving the material's dielectric properties and insulation performance. MnSiO3, a sintering aid, offers more stable performance than other sintering aids such as SiO2, Al2O3, B2O3, and H3BO3, facilitating post-sintering grain size control and facilitating production control of COG-type ceramic dielectric materials in MLCC production. The combination of these main components, modified components, and sintering aids results in MLCC ceramic layers with excellent dielectric properties and reliability.

[0041] In the specific implementation process of the present invention, the main component (Ba x Sr 1-x ) z Zr h O3 can be Ba 0.4 Sr 0.6 Zr 0.995 O3、(Ba 0.4 Sr 0.6 ) 0.992 Zr 0.995 O3、(Ba 0.4 Sr 0.6 ) 1.05 Zr 0.995 O3 or Ba 0.3 Sr 0.7 Zr 0.995 O3.

[0042] The present invention limits the value of z / h because z / h determines (Ba x Sr 1-x ) z Zr hThe calcination temperature and particle size of O3. Within the range of 0.98 < z / h < 1.02, its calcination temperature is 1200 - 1250 °C and the particle size is 250 - 300 nm. If not within this range, on the one hand, the particle size will be uneven during calcination, affecting the product performance; on the other hand, it will cause a relatively high calcination temperature, which is not conducive to production control.

[0043] Further, calculated according to the amount of substance of the main component, the dosage of the modifying component is 3.5 mol% - 6.4 mol%, and the dosage of the sintering aid component is 1.2 mol% - 1.7 mol%.

[0044] It should be noted that mol% refers to mole percentage, that is, the amount of substance percentage. Based on the amount of substance of the main component, the amount of substance of the modifying component is 3.5% - 6.4% of the amount of substance of the main component, and the amount of substance of the sintering aid component is 1.2% - 1.7% of the amount of substance of the main component.

[0045] Typical but non - restrictive, calculated according to the amount of substance of the main component, the dosage of the modifying component can be 3.5 mol%, 4 mol%, 4.5 mol%, 5 mol%, 5.5 mol%, 6 mol% or 6.4 mol%, or any value within the range of 3.5 mol% - 6.4 mol%.

[0046] Typical but non - restrictive, calculated according to the amount of substance of the main component, the dosage of the sintering aid component can be 1.2 mol%, 1.3 mol%, 1.4 mol%, 1.5 mol%, 1.6 mol% or 1.7 mol%, or any value within the range of 1.2 mol% - 1.7 mol%.

[0047] Further, in the modifying component, the dosage of CaTiO3 is 3.0 mol% - 5.0 mol%; the dosage of Re2O3 is 0.15 mol% - 0.4 mol%; the dosage of BaCO3 is 0.15 mol% - 0.4 mol% and the dosage of CaCO3 is 0.2 mol% - 0.6 mol%. <00并在0.98<z / h<1.02的范围内,其煅烧温度在1200-1250℃,颗粒大小在250-300nm。若不在此范围,一方面,颗粒在煅烧过程中会出现大小不均,影响产品性能;另一方面会造成煅烧温度偏高,不利于生产控制。

[0048] Similarly, according to the amount of the main component, the amount of CaTiO3 can be 3.0 mol%, 3.5 mol%, 4.0 mol%, 4.5 mol% or 5.0 mol%, or any value within the range of 3.0 mol% to 5.0 mol%. According to the amount of the main component, the amount of Re2O3 can be 0.15 mol%, 0.20 mol%, 0.25 mol%, 0.30 mol%, 0.35 mol% or 0.4 mol%, or any value within the range of 0.15 mol% to 0.4 mol%. % or any value within the range of 0.15 mol% to 0.4 mol%; calculated according to the amount of the main component, the amount of BaCO3 can be 0.15 mol%, 0.20 mol%, 0.25 mol%, 0.30 mol%, 0.35 mol% or 0.4 mol%, or any value within the range of 0.15 mol% to 0.4 mol%; calculated according to the amount of the main component, the amount of CaCO3 can be 0.2 mol%, 0.3 mol%, 0.4 mol%, 0.5 mol% or 0.6 mol%, or any value within the range of 0.2 mol% to 0.6 mol%.

[0049] Furthermore, the particle size of the main component is 250nm to 300nm.

[0050] Typically, but not limiting, the particle size of the main component may be, for example, 250 nm, 260 nm, 270 nm, 280 nm, 290 nm or 300 nm, or any value within the range of 250 nm to 300 nm.

[0051] Preferably, the particle size of the CaTiO3 is 200 nm to 250 nm, and the particle sizes of Re2O3, BaCO3 and CaCO3 are each independently less than 200 nm.

[0052] Preferably, the particle size of the MnSiO3 is less than 200 nm.

[0053] By controlling the raw material particle size within the above range, the sintered grains are small, reducing the thickness of the single-layer dielectric and increasing the number of dielectric layers, achieving high capacity. At the same time, the number of grain boundaries in the single-layer dielectric increases, improving the breakdown voltage and enhancing reliability.

[0054] The second aspect of the present invention provides a method for preparing the COG type ceramic dielectric material, comprising mixing the main component, the modifying component and the sintering aid component in proportion, and then dispersing, drying and sieving to obtain the ceramic dielectric material.

[0055] The preparation method provided by the invention has simple process, large batch processing capacity, and is suitable for large-scale industrial production.

[0056] Furthermore, the main component (Ba x Sr 1-x ) z Zr h The preparation method of O3 is as follows:

[0057] BaCO3, SrCO3 and ZrO2 were weighed in proportion, added with deionized water and wet mixed in a ball mill, then transferred to a sand mill for crushing and dispersion, and then dried and calcined at 1200℃~1250℃ for 4h~5h to obtain the (Ba x Sr 1-x ) z Zr h O3.

[0058] Furthermore, the preparation method of CaTiO3 is as follows:

[0059] CaCO3 and TiO2 are weighed in proportion, deionized water is added and wet-mixed in a ball mill, and then transferred to a sand mill for crushing and dispersion. After that, the mixture is dried and calcined at 1200°C to 1230°C for 4h to 5h to obtain CaTiO3.

[0060] Furthermore, the preparation method of the sintering aid component MnSiO3 is as follows:

[0061] MnCO3 and SiO2 are weighed in proportion, deionized water is added and wet-mixed in a ball mill, and then the mixture is transferred to a sand mill for crushing and dispersion, followed by drying, and calcining at 1050°C to 1150°C for 4h to 5h. The calcined material is then wet-crushed and dried in a sand mill to obtain the MnSiO3.

[0062] A third aspect of the present invention provides a multilayer chip ceramic capacitor consisting of three parts: an inner electrode, a ceramic layer, and a terminal electrode;

[0063] The ceramic layer is formed of the COG type ceramic dielectric material described in the first aspect.

[0064] The multilayer chip ceramic capacitor provided by the present invention uses a COG-type ceramic dielectric material with better performance as the ceramic layer, reducing the number of dielectric layers and electrode layers, thereby achieving low cost; at the same time, the COG-type ceramic dielectric material has a high dielectric constant, which increases the single-layer dielectric capacity and thus increases the capacity of the MLCC.

[0065] Furthermore, the thickness of the ceramic layer is greater than 5 μm.

[0066] Preferably, the dielectric constant of the multilayer ceramic capacitor is 45 to 49, and the dielectric loss is less than 5×10 -4 .

[0067] The present invention is further illustrated below by specific examples and comparative examples. However, it should be understood that these examples are merely for the purpose of further explanation and should not be construed as limiting the present invention in any form. The raw materials used in the examples and comparative examples of the present invention, unless otherwise specified, were prepared under conventional conditions or conditions recommended by the manufacturer. Reagents or instruments used without manufacturer's indication are all commercially available conventional products.

[0068] Examples 1-17 and Comparative Examples 1-4

[0069] The proportions of the raw materials in the examples and comparative examples are shown in Table 1. In comparative examples 1-4, B2O3, H3BO3, Al2O3, and SiO2 were used to replace the MnSiO3 in the present invention.

[0070] Table 1

[0071]

[0072]

[0073] The preparation methods of the above embodiments and comparative examples are as follows:

[0074] 1. Use high-purity, ultrafine BaCO3, SrCO3, and ZrO2 in a ball mill according to the composition ratio in Table 1 for wet mixing, and then transfer to a sand mill for crushing / dispersion. The medium is 0.3mm spherical zirconium balls. After drying and calcining, (Ba x Sr 1-x ) z Zr h O3, the calcination temperature is 1230℃, the holding time is 4h, and the powder particle size after calcination is about 260nm.

[0075] 2. High-purity, ultrafine CaCO3 and TiO2 were wet-mixed in a ball mill according to the composition ratio in Table 1, and then transferred to a sand mill for crushing / dispersion. The medium used was 0.3 mm spherical zirconium balls. After that, they were dried and calcined to obtain CaTiO3. The calcination temperature was 1220 ° C, the holding time was 4 hours, and the powder particle size after calcination was about 220 nm.

[0076] 3. High-purity, ultrafine MnCO3 and SiO2 were wet-mixed in a ball mill according to the composition ratio in Table 1, and then transferred to a sand mill for crushing / dispersion. The medium was 0.3 mm spherical zirconium balls. After drying and calcination, the calcination temperature was 1100 ° C and the holding time was 2.5 h. The calcined material was then crushed in a sand mill using 0.3 mm spherical zirconium balls as the medium. After drying, MnSiO3 was obtained with a powder particle size of about 180 nm.

[0077] 4. The main component, modifying component, and sintering aid component were wet-mixed in a ball mill according to the composition ratio in Table 1, and then transferred to a sand mill for dispersion. The medium used was 0.3 mm spherical zirconium balls. The mixture was then dried in a centrifugal spray dryer to obtain a COG type ceramic medium material.

[0078] Examples 18-34 and Comparative Examples 5-8

[0079] These Examples and Comparative Examples provide MLCCs, manufactured using the COG-type ceramic dielectric materials obtained in Examples 1-17 and Comparative Examples 1-4 according to the MLCC manufacturing process: slurry preparation, tape casting, screen printing, lamination, isostatic pressing, cutting, binder removal, sintering, chamfering, end capping, and end sintering. The MLCCs are 0805 in size, have a dielectric thickness of 6 μm, 40 dielectric layers, and nickel internal electrodes. The resulting green compacts are sintered at 1230°C in a reducing atmosphere of 1.0% H₂. Copper external electrodes are then capped at both ends of the chamfered product. The product is then heat treated at 800°C in a nitrogen atmosphere to yield the corresponding MLCCs.

[0080] Test Case

[0081] The MLCCs obtained from Examples 18-34 and Comparative Examples 5-8 were subjected to dielectric property tests.

[0082] At room temperature (25°C) and 45-65% RH, the capacitance C and dielectric loss DF of MLCC were tested at 1 MHz and 1 Vrm using an Agilent 4284A bridge. The dielectric constant was calculated based on the thickness of the dielectric layer, effective electrode area, screen factor, number of dielectric layers, and capacitance.

[0083] The MLCC insulation resistance IR was tested using a TH2683 insulation resistance tester at 125°C for 60 seconds, and RC was calculated.

[0084] The withstand voltage (BDV) of MLCC was tested using the CJ2671S withstand voltage tester under the conditions of charging current <20mA and voltage application rate 200V / 60S.

[0085] Use a high and low temperature test chamber to test the capacity of MLCC between -55℃ and 125℃, and calculate the capacitance temperature coefficient TCC.

[0086] The reliability life of MLCC was tested in a reliability test chamber at 140°C and 150V DC voltage for 96 hours, and the number of failed pieces was used as the reliability evaluation result.

[0087] The results are shown in Table 2 below.

[0088] Table 2

[0089]

[0090]

[0091] Table 2 shows that within the requirements of the present invention, dielectric materials with excellent dielectric properties and reliability lifespan can be obtained. Comparative Examples 5 and 6, where B2O3 and H3BO3 are used as sintering aids, fail to cast the resulting MLCCs. Comparative Examples 7 and 8, where SiO2 and Al2O3 are used as sintering aids, exhibit poor dielectric properties and / or reliability lifespan.

[0092] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A COG type ceramic dielectric material, characterized in that: It is mainly composed of main components, modifying components and burning-aiding components; The main component is (Ba x Sr 1-x ), z Zr h O3, where 0.2 < x < 0.5, 0.99 < z < 1.01, 0.99 < h < 1.01 and 0.98 < z / h < 1.02; The modifying component includes CaTiO3, Re2O3, BaCO3 and CaCO3, wherein Re is selected from at least one of Y, Ho, Yb, Gd, Dy, Sm, Nd and Er; The sintering component is MnSiO3; Calculated based on the amount of the main component, the amount of the modifying component is 3.5 mol% to 6.4 mol%, and the amount of the sintering aid component is 1.2 mol% to 1.7 mol%.

2. The COG type ceramic dielectric material according to claim 1, characterized in that: Among the modified components, the amount of CaTiO3 is 3.0mol%~5.0mol%; the amount of Re2O3 is 0.15mol%~0.4mol%; the amount of BaCO3 is 0.15mol%~0.4mol% and the amount of CaCO3 is 0.2mol%~0.6mol%.

3. The COG type ceramic dielectric material according to claim 1 or 2, characterized in that: The particle size of the main component is 250nm~300nm.

4. The COG type ceramic dielectric material according to claim 1 or 2, characterized in that: The particle size of the CaTiO3 is 200nm-250nm, and the particle sizes of Re2O3, BaCO3 and CaCO3 are each independently less than 200nm.

5. The COG type ceramic dielectric material according to claim 1 or 2, characterized in that: The particle size of the MnSiO3 is less than 200 nm.

6. A method for preparing the COG type ceramic dielectric material according to any one of claims 1 to 5, characterized in that: The main component, the modifying component and the sintering aid component are mixed in proportion, and then dispersed, dried and sieved to obtain the ceramic dielectric material.

7. The preparation method according to claim 6, characterized in that The principal component (Ba x Sr 1-x ) z Zr h The preparation method of O3 is as follows: BaCO3, SrCO3 and ZrO2 were weighed in proportion, added with deionized water and wet mixed in a ball mill, then transferred to a sand mill for crushing and dispersion, and then dried and calcined at 1200℃~1250℃ for 4h~5h to obtain the (Ba x Sr 1-x ) z Zr h O3.

8. The preparation method according to claim 6, characterized in that The preparation method of CaTiO3 is as follows: Weigh CaCO3 and TiO2 according to the proportion, add deionized water and wet mix in a ball mill, then transfer to a sand mill for crushing and dispersion, and then dry and calcine at 1200℃~1230℃ for 4h~5h to obtain CaTiO3.

9. The preparation method according to claim 6, characterized in that The preparation method of the sintering aid component MnSiO3 is as follows: MnCO3 and SiO2 are weighed in proportion, deionized water is added and wet-mixed in a ball mill, and then transferred to a sand mill for crushing and dispersion, followed by drying, and calcining at 1050°C~1150°C for 4h~5h. The calcined material is then wet-crushed and dried in a sand mill to obtain the MnSiO3.

10. A multilayer chip ceramic capacitor, characterized in that: It consists of three parts: inner electrode, ceramic layer and terminal electrode; The ceramic layer is formed of the COG type ceramic dielectric material according to any one of claims 1 to 5.

11. The multilayer ceramic capacitor according to claim 10, wherein The thickness of the ceramic layer is greater than 5 μm.

12. The multilayer ceramic capacitor according to claim 10, wherein The dielectric constant of the multilayer ceramic capacitor is 45-49, and the dielectric loss is less than 5×10 -4 .

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