Wafer rotating mechanism of automatic wafer mounting device

Abstract

The present invention relates to a wafer rotation mechanism for an automatic wafer mounting device, comprising a flat plate, the upper end surface of which is fixedly connected to a wafer rotation mechanism, a wafer gripping mechanism, and a graphite disk moving mechanism. The wafer gripping mechanism is disposed between the wafer rotation mechanism and the graphite disk moving mechanism; the wafer gripping mechanism is adapted to grip a wafer on the wafer rotation mechanism onto a graphite disk of the graphite disk moving mechanism. The wafer gripping mechanism grips the wafer on the wafer rotation mechanism onto the graphite disk of the graphite disk moving mechanism, thereby achieving automated production, thereby increasing production speed and saving manpower and material resources.

Description

[0001] This application is a divisional application with application number 2019102033820, application date March 18, 2019, and invention name “Automatic mounting device for wafers”. Technical Field

[0002] The present invention relates to an automatic wafer mounting device, and in particular to a wafer rotating mechanism of the automatic wafer mounting device. Background Art

[0003] Currently, in the processing procedure of installing wafers on graphite disks, wafers are generally stored on wafer expansion rings. Removing wafers from the wafer expansion rings requires manual use of suction cups, and installing the wafers adsorbed on the suction cups to the corresponding positions on the graphite disk. Each time a wafer is installed to the corresponding position on the graphite disk, it is necessary to take the next wafer from the wafer expansion ring again and find the corresponding installation position on the graphite disk. Each time the wafer installation position is manually found, a lot of working time is wasted, resulting in a waste of manpower, and the output cannot meet market demand. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide an automatic wafer mounting device to solve the problem of manually mounting the wafer on a graphite disk.

[0005] The technical solution adopted by the present invention to solve its technical problem is:

[0006] Provided is an automatic wafer mounting device, comprising a flat plate, an upper end surface of which is fixedly connected a wafer rotating mechanism, a wafer grabbing mechanism, and a graphite disk moving mechanism, wherein the wafer grabbing mechanism is arranged between the wafer rotating mechanism and the graphite disk moving mechanism;

[0007] The wafer grabbing mechanism is suitable for grabbing the wafer on the wafer rotating mechanism and placing it on the graphite disk of the graphite disk moving mechanism.

[0008] Furthermore, the graphite disk moving mechanism includes a third slide base plate, a fourth slide base plate and a support plate for supporting the graphite disk, the lower end of the support plate is fixedly connected to a third nut that can slide left and right on the third slide base plate, the third slide base plate is rotatably connected to a third screw rod, the third nut is threadedly connected to the third screw rod, a third motor is fixedly connected to the side wall surface of the third slide base plate, the output shaft of the third motor is fixedly connected to the third screw rod, and the third motor drives the third screw rod to rotate so that the support plate moves left and right above the flat plate;

[0009] The lower end of the third slide base is fixedly connected to a fourth nut that can slide back and forth on the fourth slide base, the fourth slide base is rotatably connected to a fourth screw rod, the fourth nut is threadedly connected to the fourth screw rod, a fourth motor is fixedly connected to the side wall surface of the fourth slide base, the output shaft of the fourth motor is fixedly connected to the fourth screw rod, and the fourth motor drives the fourth screw rod to rotate so that the support plate moves back and forth above the flat plate;

[0010] The left end of the support plate is fixedly connected to a positioning plate, and the right end of the support plate is slidably connected to a clamping plate. A fixing area for clamping the graphite disk is formed between the upper end surface of the support plate, the right end surface of the positioning plate, and the left end surface of the clamping plate.

[0011] The positioning plate is provided with a clamping cylinder, an avoidance groove is opened on the upper end of the positioning plate, the cylinder body of the clamping cylinder is fixedly connected to the left end surface of the positioning plate, and a pressing block for sliding in the avoidance groove is fixedly connected to the push rod of the clamping cylinder, and the clamping cylinder drives the pressing block to slide left and right so that the graphite disk is clamped in the fixed area;

[0012] A displacement rod is provided between the positioning plate and the clamping plate, one end of the displacement rod is fixedly connected to the positioning plate, and the other end of the displacement rod is slidably connected to the clamping plate, a locking block is fixedly connected to the clamping plate, and the locking block cooperates with the displacement rod, the lower end of the clamping plate is fixedly connected to a displacement slider, the upper end of the support plate is fixedly connected to a displacement guide rail, the displacement slider is slidably connected to the displacement guide rail, and the clamping plate slides left and right on the support plate to make the fixed area cooperate with the graphite disk.

[0013] Furthermore, the graphite disk moving mechanism also includes a crossbeam, the crossbeam is fixedly connected to the flat plate, a pusher seat is slidably connected to the crossbeam, the front end of the crossbeam is fixedly connected to a pusher motor, the output shaft of the pusher motor is fixedly connected to a main pusher gear, a pusher belt is meshed with the main pusher gear, the rear end of the crossbeam is rotatably connected to a secondary pusher gear, and the pusher belt is meshed with the secondary pusher gear;

[0014] The lower end of the pusher seat is fixedly connected to a tooth plate, and a moving gap is formed between the upper end surface of the tooth plate and the lower end surface of the pusher seat. The pusher belt is arranged in the moving gap, and the teeth on the tooth plate cooperate with the teeth on the pusher belt to drive the pusher seat to move back and forth on the beam;

[0015] A pushing cylinder is provided at the upper end of the pushing seat, the cylinder body of the pushing cylinder is fixedly connected to the pushing seat, a pushing plate is fixedly connected to the push rod of the pushing cylinder, and pushing pins are slidably connected to the front and rear ends of the pushing plate, and a buffer spring is provided between the two pushing pins;

[0016] A material rack is slidably connected to the side wall of the flat plate, and a plurality of storage chambers for placing graphite discs are provided on the material rack. A push port is provided on the left wall of the storage chamber, and the push plate is slidably connected to the push port. The push plate slides back and forth and moves the graphite discs in the storage chamber to the fixed area.

[0017] A feeding nut is fixedly connected to the lower end of the material rack, a feeding motor is fixedly connected to the side wall of the flat plate, a feeding screw is fixedly connected to the output shaft of the feeding motor, the feeding nut is threadedly connected to the feeding screw, and the feeding motor drives the feeding screw to rotate to move the material rack up and down.

[0018] Furthermore, the wafer rotation mechanism includes a wafer rotation support plate, the lower end of which is mounted on a flat plate;

[0019] A rotating hole is provided on the wafer rotation support plate, a fixing ring is provided in the rotating hole, the lower end of the fixing ring is rotatably connected to the rotating hole of the wafer rotation support plate, the upper end of the fixing ring is fixedly connected to a semicircular baffle and a spring seat, an L-shaped supporting groove is formed between the side wall surface of the semicircular baffle and the upper end surface of the fixing ring, and a clamping area for placing the wafer expansion ring is formed between the spring seat and the supporting groove;

[0020] The lower end of the spring seat is fixedly connected to the upper end surface of the fixing ring, and the left and right ends of the spring seat are rotatably connected to clamps, and the clamps include a clamping hand end and a tightening end. The spring on the spring seat is tightened on the tightening end of the clamp, and the clamping hand end of the clamp clamps the crystal expansion ring in the clamping area.

[0021] A first cylinder is provided on the wafer rotation support plate, and the cylinder body of the first cylinder is fixedly connected to the upper end surface of the wafer rotation support plate. The push rod of the first cylinder is pressed tightly against the pressing ends of the two clamps, and the clamping hand ends of the clamps are separated from the wafer expansion ring.

[0022] Furthermore, a transposition motor is provided on the wafer rotation support plate, a flange end of the transposition motor is fixedly connected to the lower end surface of the wafer rotation support plate, and an output shaft of the transposition motor passes through the wafer rotation support plate;

[0023] An annular tooth is provided on the outer surface of the fixing ring, and a transmission belt is meshed on the annular tooth. An output gear is fixedly connected to the output shaft of the transposition motor, and the output gear is meshed with the transmission belt. The transposition motor drives the fixing ring to rotate in the rotating hole of the wafer rotation support plate via the transmission belt.

[0024] A first slide base plate is fixedly connected to the upper end surface of the flat plate, a first screw rod and a first motor for driving the first screw rod to rotate are provided on the first slide base plate, a flange end of the first motor is fixedly connected to the side wall surface of the first slide base plate, and an output shaft of the first motor is fixedly connected to the first screw rod;

[0025] The first screw is threadedly connected to a first nut that can slide left and right on the first slide base plate. The first nut is fixedly connected to the lower end surface of the second slide base plate, and the first motor drives the first screw to rotate so that the second slide base plate moves left and right above the flat plate.

[0026] A second screw and a second motor for driving the second screw to rotate are provided on the second slide base plate, a flange end of the second motor is fixedly connected to the side wall surface of the second slide base plate, and an output shaft of the second motor is fixedly connected to the second screw;

[0027] The second screw is threadedly connected to a second nut that can slide left and right on the second slide base. The second nut is fixedly connected to the lower end surface of the wafer rotation support plate, and the second motor drives the second screw to rotate so that the wafer rotation support plate moves back and forth above the flat plate.

[0028] Furthermore, the wafer rotation support plate is provided with a lifting mechanism for lifting the wafer on the wafer expansion ring;

[0029] The lifting mechanism includes an adjustment seat and a lifting motor, the lower end surface of the adjustment seat is fixedly connected to the upper end surface of the flat plate, the flange end of the lifting motor is fixedly connected to the adjustment seat, the output shaft of the lifting motor is fixedly connected to an eccentric shaft, and the eccentric shaft is sleeved with an eccentric ring;

[0030] The adjusting seat is provided with a lifting seat, the lower end of the lifting seat is fixedly connected to the upper end of the adjusting seat, the upper end of the lifting seat is provided with a pin cap which can slide up and down, the lifting seat is provided with a through hole running through up and down, a central shaft is slidably connected in the through hole, the upper end of the central shaft is tightly pressed against the pin cap, the lower end of the central shaft is fixedly connected with a mounting fast for cooperating with the eccentric ring, the lower end of the central shaft is sleeved with a return spring, the lower end of the return spring is tightened on the mounting fast, the upper end of the return spring is tightened in the through hole of the lifting seat, the mounting fast is provided with a sliding hole, a guide rod is slidably connected in the sliding hole, the upper end of the guide rod is fixedly connected to the lifting seat, and the lifting motor drives the eccentric ring to rotate so that the central shaft drives the pin cap to move up and down.

[0031] Furthermore, the wafer grabbing mechanism includes a column, which is provided with a fixed seat and a connecting frame. The fixed seat is fixedly connected to the side wall of the column, the lower end of the connecting frame is rotatably connected to the lower end of the fixed seat, the upper end of the fixed seat is fixedly connected to a feeding motor, the output shaft of the feeding motor is fixedly connected to the upper end of the connecting frame, the lower end of the connecting frame is fixedly connected to a swing arm, a plurality of feeding holes are provided on the swing arm, and the feeding motor drives the connecting frame to rotate on the fixed seat so that the swing arm can grab the wafer on the crystal expansion ring to the graphite disk.

[0032] Furthermore, the wafer grabbing mechanism further includes a rotating rod, a fifth slide base plate and a fifth motor;

[0033] The lower end of the fifth slide base is fixedly connected to the flat plate, the flange end of the fifth motor is fixedly connected to the upper end of the fifth slide base, the output shaft of the fifth motor is fixedly connected to a fifth screw rod, and the fifth screw rod is threadedly connected to a fifth nut that can slide up and down on the fifth slide base;

[0034] The fifth nut is fixedly connected to a tray, and the tray is provided with four guide holes, in which wafer guide shafts are slidably connected, and a storage area for stacking multiple wafer expansion rings is formed between the four wafer guide shafts and the upper end surface of the tray, and the fifth motor drives the fifth lead screw to rotate so that the fifth nut drives the wafer expansion ring in the storage area to move up and down;

[0035] The rotating rod includes a fixed end and a material suction end. Four material suction grippers are fixedly connected to the material suction end of the rotating rod. The material suction grippers are provided with suction cups for sucking the wafer expansion ring.

[0036] The lower end of the column is fixedly connected to the flat plate, a lug is fixedly connected to the side wall of the column, the upper end of the lug is fixedly connected to a rotating motor, the lower end of the lug is rotatably connected to a rotating shaft, the fixed end of the rotating rod is fixedly connected to the lower end of the rotating shaft, the output shaft of the rotating motor is fixedly connected to the upper end of the rotating shaft, and the rotating motor drives the rotating rod to rotate so that the suction cup on the suction grab grabs the crystal expansion ring in the storage area to the fixed area of ​​the graphite disk moving mechanism.

[0037] Furthermore, a left lens barrel and a right lens barrel are provided on the column, the lower end of the left lens barrel is fixedly connected to a ring light, and the ring light is arranged toward the fixed area of ​​the graphite disk moving mechanism, and the lower end of the right lens barrel is fixedly connected to a light source, and the light source is arranged toward the clamping area of ​​the wafer rotation mechanism.

[0038] Furthermore, a bracket is fixedly connected to the lower end of the flat plate, and an annular cover for protecting the wafer rotating mechanism, the wafer grabbing mechanism and the graphite disk moving mechanism is provided on the upper end of the fixed plate;

[0039] A material receiving hopper is fixedly connected to the flat plate and is arranged below the material suction gripper.

[0040] The beneficial effect of the present invention is that the wafer on the wafer rotating mechanism is grabbed by the wafer grabbing mechanism and placed on the graphite disk of the graphite disk moving mechanism, so as to realize the automation of production, thereby improving the production speed and saving manpower and material resources. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] The present invention will be further described below with reference to the accompanying drawings.

[0042] Figure 1 It is a schematic diagram of a loading and unloading machine of the present invention;

[0043] Figure 2 It is an axonometric drawing of the loading and unloading machine of the present invention;

[0044] Figure 3 It is a schematic diagram of the wafer rotation mechanism in the single loading and unloading machine of the present invention;

[0045] Figure 4 This is an axonometric diagram of the wafer rotation mechanism in the single loading and unloading machine of the present invention;

[0046] Figure 5 Schematic diagram of a wafer rotation support plate in a single loading and unloading machine of the present invention;

[0047] Figure 6 It is a schematic diagram of the jacking mechanism in the loading and unloading machine of the present invention;

[0048] Figure 7 It is a schematic diagram of the adjustment seat in the loading and unloading stand-alone machine of the present invention;

[0049] Figure 8 It is a schematic diagram of the jacking seat in the loading and unloading stand-alone machine of the present invention;

[0050] Figure 9 It is a schematic diagram of the graphite disc moving mechanism in the loading and unloading stand-alone machine of the present invention;

[0051] Figure 10 This is an axonometric diagram of the graphite disc moving mechanism in the loading and unloading stand-alone machine of the present invention;

[0052] Figure 11 Schematic diagram of the third slide base plate and the fourth slide base plate in the loading and unloading stand-alone machine of the present invention;

[0053] Figure 12 It is a schematic diagram of the crossbeam in the loading and unloading machine of the present invention;

[0054] Figure 13 It is a schematic diagram of the material rack of the loading and unloading single machine of the present invention;

[0055] Figure 14It is a schematic diagram of the wafer grabbing mechanism in the single loading and unloading machine of the present invention;

[0056] Figure 15 Schematic diagram of the storage area in the wafer grabbing mechanism of the single loading and unloading machine of the present invention;

[0057] Figure 16 It is a schematic diagram of the swing arm in the loading and unloading stand-alone machine of the present invention;

[0058] Figure 17 It is a schematic diagram of the rotating rod in the loading and unloading machine of the present invention;

[0059] Among them; flat plate 1, bracket 11, annular cover 12, receiving hopper 13;

[0060] Wafer rotation mechanism 2, wafer rotation support plate 21, rotation hole 211, fixing ring 22, semicircular baffle 221, spring seat 23, clamping 231, first cylinder 24, transposition motor 25, output gear 251, transmission belt 26, first slide base plate 27, first screw rod 271, first motor 272, first nut 273, second slide base plate 28, second screw rod 281, second motor 282, second nut 283,

[0061] Wafer grabbing mechanism 3, column 31, rotating rod 32, suction gripper 321, suction cup 322, fifth slide base 33, fifth motor 34, fifth screw 341, fifth nut 342, tray 35, wafer guide shaft 351, lug 36, rotating motor 361, rotating shaft 362, fixing seat 37, material removal motor 371, connecting frame 38, swing arm 381, material removal hole 382;

[0062] Graphite disk moving mechanism 4, third slide base plate 41, third screw rod 411, third motor 412, fourth nut 413, fourth slide base plate 42, fourth screw rod 421, fourth motor 422, supporting plate 43, third nut 431, positioning plate 432, clamping plate 433, clamping cylinder 434, pressing block 44, displacement rod 45, locking block 46, displacement slider 47, displacement guide rail 471, crossbeam 48, pushing seat 481, pushing motor 482, pushing belt 483, tooth plate 484, pushing cylinder 485, pushing plate 486, pushing pin 487, buffer spring 488, material rack 49, storage chamber 491, pushing port 492, feeding nut 493, feeding motor 494, feeding screw rod 495;

[0063] Crystal expansion ring 5;

[0064] Lifting mechanism 6, adjusting seat 61, lifting motor 62, eccentric shaft 63, lifting seat 64, ejector cap 641, spindle 642, return spring 643, fastener 65, guide rod 66;

[0065] Left lens barrel 7, ring light 71;

[0066] Right lens barrel 8, light source 81. DETAILED DESCRIPTION

[0067] The present invention will now be further described with reference to the accompanying drawings, which are simplified schematic diagrams illustrating the basic structure of the present invention in a schematic manner, and thus only show components related to the present invention.

[0068] like Figures 1 to 17 As shown;

[0069] Provided is an automatic mounting device for wafers, comprising a flat plate 1, the upper end surface of which is fixedly connected to a wafer rotating mechanism 2, a wafer grabbing mechanism 3, and a graphite disk moving mechanism 4, the wafer grabbing mechanism 3 being arranged between the wafer rotating mechanism 2 and the graphite disk moving mechanism 4, the wafer grabbing mechanism 3 being suitable for grabbing the wafer on the wafer rotating mechanism 2 to the graphite disk of the graphite disk moving mechanism 4, the lower end of the flat plate 1 being fixedly connected to a bracket 11, and the upper end of the fixed plate being provided with an annular cover 12 for protecting the wafer rotating mechanism 2, the wafer grabbing mechanism 3, and the graphite disk moving mechanism 4.

[0070] The graphite disk moving mechanism 4 includes a third slide base plate 41, a fourth slide base plate 42 and a support plate 43 for supporting the graphite disk, the lower end of the support plate 43 is fixedly connected to a third nut 431 that can slide left and right on the third slide base plate 41, the third slide base plate 41 is rotatably connected to a third screw rod 411, the third nut 431 is threadedly connected to the third screw rod 411, and a third motor 412 is fixedly connected to the side wall surface of the third slide base plate 41, the output shaft of the third motor 412 is fixedly connected to the third screw rod 411, and the third motor 412 drives the third screw rod 411 to rotate so that the support plate 43 moves left and right above the flat plate 1;

[0071] The lower end of the third slide base plate 41 is fixedly connected to a fourth nut 413 that can slide back and forth on the fourth slide base plate 42, and a fourth screw rod 421 is rotatably connected to the fourth slide base plate 42. The fourth nut 413 is threadedly connected to the fourth screw rod 421, and a fourth motor 422 is fixedly connected to the side wall surface of the fourth slide base plate 42. The output shaft of the fourth motor 422 is fixedly connected to the fourth screw rod 421, and the fourth motor 422 drives the fourth screw rod 421 to rotate so that the support plate 43 moves back and forth above the flat plate 1; the left end of the support plate 43 is fixedly connected to a positioning plate 432, The right end of the support plate 43 is slidably connected to a clamping plate 433, and a fixed area for clamping the graphite disk is formed between the upper end surface of the support plate 43, the right end surface of the positioning plate 432, and the left end surface of the clamping plate 433; a clamping cylinder 434 is provided on the positioning plate 432, and an avoidance groove is provided at the upper end of the positioning plate 432. The cylinder body of the clamping cylinder 434 is fixedly connected to the left end surface of the positioning plate 432, and a pressing block 44 for sliding in the avoidance groove is fixedly connected to the push rod of the clamping cylinder 434, and the clamping cylinder 434 drives the pressing block 44 to slide left and right so that the graphite disk is clamped in the fixed area;

[0072] A displacement rod 45 is provided between the positioning plate 432 and the clamping plate 433, one end of the displacement rod 45 is fixedly connected to the positioning plate 432, and the other end of the displacement rod 45 is slidably connected to the clamping plate 433, and a locking block 46 is fixedly connected to the clamping plate 433, and the locking block 46 cooperates with the displacement rod 45, and the lower end of the clamping plate 433 is fixedly connected to a displacement slider 47, and the upper end of the support plate 43 is fixedly connected to a displacement guide rail 471, and the displacement slider 47 is slidably connected to the displacement guide rail 471, and the clamping plate 433 slides left and right on the support plate 43 to make the fixed area cooperate with the graphite disk.

[0073] The graphite disk moving mechanism 4 also includes a crossbeam 48, which is fixedly connected to the flat plate 1, and a pusher seat 481 is slidably connected to the crossbeam 48. The front end of the crossbeam 48 is fixedly connected to a pusher motor 482, and the output shaft of the pusher motor 482 is fixedly connected to a main pusher gear, and a pusher belt 483 is engaged with the main pusher gear. The rear end of the crossbeam 48 is rotatably connected to a secondary pusher gear, and the pusher belt 483 is engaged with the secondary pusher gear. The lower end of the pushing seat 481 is fixedly connected to a tooth plate 484, and a moving gap is formed between the upper end surface of the tooth plate 484 and the lower end surface of the pushing seat 481. The pushing belt 483 is arranged in the moving gap, and the teeth on the tooth plate 484 cooperate with the teeth on the pushing belt 483 to drive the pushing seat 481 to move back and forth on the beam 48; the upper end of the pushing seat 481 is provided with a pushing cylinder 485, and the cylinder body of the pushing cylinder 485 is fixedly connected to the pushing seat 481. A push plate 486 is fixedly connected to the push rod of the push cylinder 485, and a push pin 487 is slidably connected to the front and rear ends of the push plate 486, and a buffer spring 488 is provided between the two push pins 487; a material rack 49 is slidably connected to the side wall of the flat plate 1, and a plurality of storage chambers 491 for placing graphite disks are provided on the material rack 49, and a push port 492 is provided on the left wall of the storage chamber 491, and the push plate 486 is slidably connected to the push port 492 , and the push plate 486 slides back and forth and moves the graphite disk in the storage chamber 491 to the fixed area; the lower end of the material rack 49 is fixedly connected to the feeding nut 493, and the side wall surface of the flat plate 1 is fixedly connected to the feeding motor 494, and the output shaft of the feeding motor 494 is fixedly connected to the feeding screw 495, and the feeding nut 493 is threadedly connected to the feeding screw 495, and the feeding motor 494 drives the feeding screw 495 to rotate to make the material rack 49 move up and down.

[0074] The wafer rotation mechanism 2 includes a wafer rotation support plate 21, the lower end of which is mounted on the flat plate 1; a rotation hole 211 is provided on the wafer rotation support plate 21, a fixing ring 22 is provided in the rotation hole 211, and the lower end of the fixing ring 22 is rotatably connected to the rotation hole 211 of the wafer rotation support plate 21. In order to facilitate the control of the rotation angle of the fixing ring 22 in the rotation hole 211, a sensor can be installed on the wafer rotation support plate 21, and the upper end of the fixing ring 22 is fixedly connected to a semicircular baffle 221 and a spring seat 23. An L-shaped support groove is formed between the side wall surface of the semicircular baffle 221 and the upper end surface of the fixing ring 22, and the spring seat 23 and the support groove are connected. The clamping area of ​​the wafer expansion ring 5 for placing the wafer is formed therebetween; the lower end of the spring seat 23 is fixedly connected to the upper end face of the fixed ring 22, and the left and right ends of the spring seat 23 are rotatably connected with clamps 231 respectively, and the clamps 231 include a clamping hand end and a tightening end, and the spring on the spring seat 23 is tightened on the tightening end of the clamp 231, and the clamping hand end of the clamp 231 clamps the wafer expansion ring 5 in the clamping area; a first cylinder 24 is provided on the wafer rotation support plate 21, and the cylinder body of the first cylinder 24 is fixedly connected to the upper end face of the wafer rotation support plate 21, and the push rod of the first cylinder 24 is tightened on the tightening ends of the two clamps 231, and the clamping hand end of the clamp 231 is separated from the wafer expansion ring 5.

[0075] The wafer rotation support plate 21 is provided with a transposition motor 25, the flange end of the transposition motor 25 is fixedly connected to the lower end surface of the wafer rotation support plate 21, and the output shaft of the transposition motor 25 passes through the wafer rotation support plate 21; the outer surface of the fixing ring 22 is provided with an annular tooth, and the annular tooth is meshed with a transmission belt 26, and the output shaft of the transposition motor 25 is fixedly connected to an output gear 251, and the output gear 251 is meshed with the transmission belt 26, and the transposition motor 25 drives the fixing ring 22 to rotate in the rotation hole 211 of the wafer rotation support plate 21 via the transmission belt 26; a first slide base plate 27 is fixedly connected to the upper end surface of the flat plate 1, and a first screw rod 271 and a first motor 272 for driving the first screw rod 271 to rotate are provided on the first slide base plate 27, and the flange end of the first motor 272 is fixedly connected to the side wall surface of the first slide base plate 27, and the output shaft of the first motor 272 is fixedly connected to the first screw rod 271. 271; the first screw rod 271 is threadedly connected with a first nut 273 which can slide left and right on the first slide base plate 27, the first nut 273 is fixedly connected to the lower end surface of the second slide base plate 28, and the first motor 272 drives the first screw rod 271 to rotate so that the second slide base plate 28 moves left and right above the plate 1; the second slide base plate 28 is provided with a second screw rod 281 and a second motor 282 for driving the second screw rod 281 to rotate, the flange end of the second motor 282 is fixedly connected to the side wall surface of the second slide base plate 28, and the output shaft of the second motor 282 is fixedly connected to the second screw rod 281; the second screw rod 281 is threadedly connected with a second nut 283 which can slide left and right on the second slide base plate 28, the second nut 283 is fixedly connected to the lower end surface of the wafer rotation support plate 21, and the second motor 282 drives the second screw rod 281 to rotate so that the wafer rotation support plate 21 moves back and forth above the plate 1.

[0076] The wafer rotation support plate 21 is provided with a lifting mechanism 6 for lifting the wafer on the wafer expansion ring 5;

[0077] The lifting mechanism 6 includes an adjusting seat 61 and a lifting motor 62. The lower end surface of the adjusting seat 61 is fixedly connected to the upper end surface of the flat plate 1. The flange end of the lifting motor 62 is fixedly connected to the adjusting seat 61. The output shaft of the lifting motor 62 is fixedly connected to an eccentric shaft 63. The eccentric shaft 63 is sleeved with an eccentric ring 631. A lifting seat 64 is provided on the adjusting seat 61. The lower end of the lifting seat 64 is fixedly connected to the upper end of the adjusting seat 61. The upper end of the lifting seat 64 is provided with a pin cap 641 that can slide up and down. A through hole is opened on the lifting seat 64, and a core shaft 64 is slidably connected in the through hole. 2. The upper end of the spindle 642 is tightly pressed against the thimble cap 641, and the lower end of the spindle 642 is fixedly connected to a fastener 65 for cooperating with the eccentric ring 631. The lower end of the spindle 642 is sleeved with a return spring 643, and the lower end of the return spring 643 is tightly pressed against the fastener 65. The upper end of the return spring 643 is tightly pressed against the through hole of the lifting seat 64. A sliding hole is provided on the fastener 65, and a guide rod 66 is slidably connected in the sliding hole. The upper end of the guide rod 66 is fixedly connected to the lifting seat 64, and the lifting motor 62 drives the eccentric ring 631 to rotate so that the spindle 642 drives the thimble cap 641 to move up and down.

[0078] The wafer grabbing mechanism 3 includes a column 31, which is provided with a fixed seat 37 and a connecting frame 38. The fixed seat 37 is fixedly connected to the side wall of the column 31, and the lower end of the connecting frame 38 is rotatably connected to the lower end of the fixed seat 37. The upper end of the fixed seat 37 is fixedly connected to a feeding motor 371, and the output shaft of the feeding motor 371 is fixedly connected to the upper end of the connecting frame 38. The lower end of the connecting frame 38 is fixedly connected to a swing arm 381, and a plurality of feeding holes 382 are provided on the swing arm 381. The feeding motor 371 drives the connecting frame 38 to rotate on the fixed seat 37 so that the swing arm 381 can grab the wafer on the crystal expansion ring 5 to the graphite disk.

[0079] The wafer grabbing mechanism 3 further includes a rotating rod 32, a fifth slide base plate 33 and a fifth motor 34;

[0080] The lower end of the fifth slide base plate 33 is fixedly connected to the flat plate 1, the flange end of the fifth motor 34 is fixedly connected to the upper end of the fifth slide base plate 33, the output shaft of the fifth motor 34 is fixedly connected to a fifth screw rod 341, the fifth screw rod 341 is threadedly connected to a fifth nut 342 that can slide up and down on the fifth slide base plate 33; the fifth nut 342 is fixedly connected to a tray 35, the tray 35 is provided with four guide holes, the guide holes are slidably connected to the wafer guide shafts 351, and the four wafer guide shafts 351 are in contact with the upper surface of the tray 35. A storage area for stacking multiple crystal expansion rings 5 ​​is formed between the end faces, and the fifth motor 34 drives the fifth screw rod 341 to rotate so that the fifth nut 342 drives the crystal expansion ring 5 in the storage area to move up and down; the rotating rod 32 includes a fixed end and a suction end, and four suction grips 321 are fixedly connected to the suction end of the rotating rod 32, and the suction grips 321 are provided with suction cups 322 for sucking the crystal expansion ring 5; the lower end of the column 31 is fixedly connected to the flat plate 1, and the flat plate 1 is fixedly connected to a receiving hopper 13, and the receiving hopper 13 is arranged below the suction grip 321. A lug 36 is fixedly connected to the side wall of the column 31. The upper end of the lug 36 is fixedly connected to a rotary motor 361. The lower end of the lug 36 is rotatably connected to a rotary shaft 362. The fixed end of the rotary rod 32 is fixedly connected to the lower end of the rotary shaft 362. The output shaft of the rotary motor 361 is fixedly connected to the upper end of the rotary shaft 362. The rotary motor 361 drives the rotary rod 32 to rotate so that the suction cup 322 on the suction gripper 321 grabs the wafer expansion ring 5 in the storage area and moves it to the fixed area of ​​the graphite disk moving mechanism 4. The column 31 is provided with a left lens barrel 7 and a right lens barrel 8. The lower end of the left lens barrel 7 is fixedly connected to a ring light 71, and the ring light 71 is arranged toward the fixed area of ​​the graphite disk moving mechanism 4. The lower end of the right lens barrel 8 is fixedly connected to a light source 81, and the light source 81 is arranged toward the clamping area of ​​the wafer rotating mechanism 2.

[0081] In actual operation, multiple wafer expansion rings 5 ​​with wafers installed are stacked in the storage area formed by the four wafer guide shafts 351 and the upper end surface of the tray 35, and the rotating motor 361 drives the rotating rod 32 to rotate so that the suction cup 322 on the suction grip 321 grabs the wafer expansion ring 5 in the storage area to the clamping area of ​​the wafer rotation mechanism 2, and the fifth motor 34 drives the fifth screw rod 341 to rotate so that the fifth nut 342 drives the wafer expansion ring 5 in the storage area to move upward one station to prepare for the next operation. The wafer expansion ring 5 grabbed onto the wafer rotation mechanism 2 is clamped in the clamping area by the clamping hand ends of the two clamping grips 231, and the eccentric ring 631 is driven by the lifting motor 62 to rotate so that the spindle 642 drives the ejector cap 641 to move up and down. When the ejector cap 641 moves upward, it lifts up a wafer on the wafer expansion ring 5, and the swing arm 381 is used to lift the ejector cap 641. The wafer is grabbed and the material picking motor 371 drives the connecting frame 38 to rotate on the fixed seat 37 so that the swing arm 381 drives the grabbed wafer to rotate to the graphite disk in the fixed area of ​​the graphite disk moving mechanism 4. The first motor 272 drives the first screw rod 271 to rotate so that the second slide base plate 28 moves left and right above the flat plate 1. The second motor 282 drives the second screw rod 281 to rotate so that the wafer rotation support plate 21 moves back and forth above the flat plate 1. The transposition motor 25 drives the fixed ring 22 to rotate in the rotating hole 211 of the wafer rotation support plate 21 through the transmission belt 26, so that the swing arm 381 repeats the above operation and grabs all the wafers on the wafer expansion ring 5 to the graphite disk. The rotating motor 361 drives the rotating rod 32 to rotate so that the suction cup 322 on the material suction grab 321 grabs the wafer expansion ring 5 in the clamping area of ​​the wafer rotation mechanism 2 to the receiving hopper 13;

[0082] After the operation on the graphite disk in the fixed area of ​​the graphite disk moving mechanism 4 is completed, the completed graphite disk is removed, and the pushing motor 482 drives the pushing seat 481 to move back and forth on the crossbeam 48, and the feeding motor 494 drives the feeding screw 495 to rotate to move the material rack 49 upward, so that the pushing plate 486 pushes the graphite disk in the storage chamber 491 of the material rack 49 onto the supporting plate 43, and then the clamping cylinder 434 drives the pressing block 44 to slide left and right so that the graphite disk is clamped in the fixed area, so as to realize the rapid replacement of the graphite disk in the fixed area of ​​the graphite disk moving mechanism 4;

[0083] In summary, when performing the operation process of wafers and graphite disks, manual operation is no longer required, and the effect of operation automation is achieved, thereby effectively improving the production speed.

[0084] With the above-described preferred embodiments of the present invention as a guide, and with reference to the above description, relevant personnel are fully capable of making various changes and modifications without departing from the technical scope of this invention. The technical scope of this invention is not limited to the contents of the specification and must be determined according to the scope of the claims.

Claims

1. A wafer rotating mechanism of an automatic wafer mounting device, fixedly arranged on the upper end surface of a flat plate (1), characterized in that: The wafer rotation mechanism (2) comprises a wafer rotation support plate (21), and the lower end of the wafer rotation support plate (21) is mounted on the flat plate (1); A rotating hole (211) is provided on the wafer rotating support plate (21), a fixing ring (22) is provided in the rotating hole (211), the lower end of the fixing ring (22) is rotatably connected to the rotating hole (211) of the wafer rotating support plate (21), the upper end of the fixing ring (22) is fixedly connected to a semicircular baffle (221) and a spring seat (23), an L-shaped supporting groove is formed between the side wall surface of the semicircular baffle (221) and the upper end surface of the fixing ring (22), and a clamping area for placing the wafer expansion ring (5) is formed between the spring seat (23) and the supporting groove; The lower end of the spring seat (23) is fixedly connected to the upper end surface of the fixed ring (22), and the left and right ends of the spring seat (23) are rotatably connected to clamps (231), and the clamps (231) include a clamping end and a tightening end. The spring on the spring seat (23) is tightened on the tightening end of the clamp (231), and the clamping end of the clamp (231) clamps the crystal expansion ring (5) in the clamping area. A first cylinder (24) is provided on the wafer rotation support plate (21), the cylinder body of the first cylinder (24) is fixedly connected to the upper end surface of the wafer rotation support plate (21), and the push rod of the first cylinder (24) is pressed against the pressing ends of the two clamps (231) and causes the clamping ends of the clamps (231) to separate from the wafer expansion ring (5); A transposition motor (25) is provided on the wafer rotation support plate (21), a flange end of the transposition motor (25) is fixedly connected to the lower end surface of the wafer rotation support plate (21), and an output shaft of the transposition motor (25) passes through the wafer rotation support plate (21); The outer surface of the fixed ring (22) is provided with an annular tooth, and a transmission belt (26) is meshed on the annular tooth. An output gear (251) is fixedly connected to the output shaft of the transposition motor (25), and the output gear (251) is meshed with the transmission belt (26). The transposition motor (25) drives the fixed ring (22) to rotate in the rotation hole (211) of the wafer rotation support plate (21) via the transmission belt (26); A first slide base plate (27) is fixedly connected to the upper end surface of the flat plate (1), and a first screw rod (271) and a first motor (272) for driving the first screw rod (271) to rotate are provided on the first slide base plate (27), a flange end of the first motor (272) is fixedly connected to the side wall surface of the first slide base plate (27), and an output shaft of the first motor (272) is fixedly connected to the first screw rod (271); The first screw rod (271) is threadedly connected to a first nut (273) that can slide left and right on the first slide base plate (27), the first nut (273) is fixedly connected to the lower end surface of the second slide base plate (28), and the first motor (272) drives the first screw rod (271) to rotate so that the second slide base plate (28) moves left and right above the flat plate (1); The second slide base plate (28) is provided with a second screw rod (281) and a second motor (282) for driving the second screw rod (281) to rotate, the flange end of the second motor (282) is fixedly connected to the side wall surface of the second slide base plate (28), and the output shaft of the second motor (282) is fixedly connected to the second screw rod (281); The second screw rod (281) is threadedly connected to a second nut (283) that can slide left and right on the second slide base plate (28), the second nut (283) is fixedly connected to the lower end surface of the wafer rotation support plate (21), and the second motor (282) drives the second screw rod (281) to rotate so that the wafer rotation support plate (21) moves back and forth above the flat plate (1); The wafer rotation support plate (21) is provided with a lifting mechanism (6) for lifting the wafer on the wafer expansion ring (5); The lifting mechanism (6) includes an adjustment seat (61) and a lifting motor (62), the lower end surface of the adjustment seat (61) is fixedly connected to the upper end surface of the plate (1), the flange end of the lifting motor (62) is fixedly connected to the adjustment seat (61), and an eccentric shaft (63) is fixedly connected to the output shaft of the lifting motor (62), and an eccentric ring (631) is sleeved on the eccentric shaft (63); The adjusting seat (61) is provided with a lifting seat (64), the lower end of the lifting seat (64) is fixedly connected to the upper end of the adjusting seat (61), the upper end of the lifting seat (64) is provided with a pin cap (641) that can slide up and down, the lifting seat (64) is provided with a through hole that passes through the top and bottom, a core shaft (642) is slidably connected in the through hole, the upper end of the core shaft (642) is tightly pressed against the pin cap (641), and the lower end of the core shaft (642) is fixedly connected to a fastener (65) for cooperating with the eccentric ring (631). The lower end of the spindle (642) is sleeved with a return spring (643), the lower end of the return spring (643) is pressed against the mounting fastener (65), the upper end of the return spring (643) is pressed against the through hole of the jacking seat (64), the mounting fastener (65) is provided with a sliding hole, a guide rod (66) is slidably connected in the sliding hole, the upper end of the guide rod (66) is fixedly connected to the jacking seat (64), and the jacking motor (62) drives the eccentric ring (631) to rotate so that the spindle (642) drives the thimble cap (641) to move up and down.

Images