A laser gas recovery and separation device and method

Abstract

The present invention discloses a laser gas recovery and separation device and method thereof, which relates to the field of distillation technology; in order to solve the purification problem; specifically comprises a reactor body and a reactor cover fixed to the top of the reactor body by bolts, wherein the reactor body is provided with a heating mechanism for heating; the side wall of the reactor cover is welded and connected with a reflux pipe, the inner wall of the reactor body is fixed with a transition box, the other end of the reflux pipe is connected to the transition box after being inserted into the interior of the reactor body, the side wall of the transition box is fixed and connected with an air outlet pipe, and the other end of the air outlet pipe is connected with an electromagnetic three-way valve. By setting the transition box, the evaporated gas can be heat-exchanged with the mixed liquid in the reactor body again, thereby realizing the purification function and increasing the purity of separation. At the same time, the heat exchange between the evaporated gas and the mixed liquid in the reactor body can also realize the heating function of the liquid, thereby realizing a certain amount of energy recovery.

Description

Technical Field

[0001] The invention relates to the technical field of distillation, and in particular to a laser gas recovery and separation device and a method thereof. Background Art

[0002] Neon is used in scientific research, chips, medicine and high-tech industries. Especially with the rapid development of the chip industry and the large-scale consumption, neon can be used to produce neon lasers for scientific research, medical treatment and material processing. This feature makes neon one of the important elements in the field of high-tech manufacturing. Neon is mixed with krypton or neon with argon and xenon in a certain proportion to obtain laser gas with a specific wavelength, which is used in chip lithography machines.

[0003] The neon content in the air is only 18.18×10 -6 The separation process of neon and helium containing 99.9999% purity of neon is complicated, resulting in high cost of laser gas supply. After the use of the lithography machine, the laser gas is enriched with not only neon, krypton, xenon, and argon, but also some hydrogen according to the different types of laser gases. The neon gas in the lithography machine is almost not lost during use, so recycling and separation becomes an option for chip factories.

[0004] After searching, the Chinese patent publication number CN210434007U discloses an industrial gas distillation device, including a support plate and a support frame, the support frame is symmetrically arranged at the bottom end of the support plate, a distillation kettle is arranged on the left side of the top end of the support plate, an annular electric heating plate is arranged at the lower part of the inner cavity of the distillation kettle, a slag liquid outlet pipe is arranged at the bottom of the distillation kettle, a valve is arranged on the slag liquid outlet pipe, and a stirring rod is rotatably arranged in the middle of the top wall of the inner cavity of the distillation kettle.

[0005] The above patent has the following shortcomings: it directly condenses the gas, but the liquid mixture will be heated unevenly when heated, for example, the temperature is higher near the heat source and lower far away from the heat source. This will cause some high-temperature liquids to evaporate and be mixed with impurities of other boiling points. This will result in insufficient separation purity when condensed after distillation.

[0006] To this end, the present invention proposes a laser gas recovery and separation device and method. Summary of the invention

[0007] The purpose of the present invention is to solve the shortcomings of the prior art and to propose a laser gas recovery and separation device and method.

[0008] In order to achieve the above object, the present invention adopts the following technical solutions:

[0009] A laser gas recovery and separation device, wherein the laser gas is a mixed gas of neon, krypton, xenon, argon and hydrogen, and the laser gas recovery and separation device comprises a reaction kettle body and a kettle cover fixed to the top of the reaction kettle body by bolts.

[0010] A heating mechanism for heating is provided inside the reactor body;

[0011] The side wall of the kettle cover is welded and connected with a reflux pipe, the inner wall of the reactor body is fixed with a transition box, the other end of the reflux pipe is inserted into the interior of the reactor body and then connected to the transition box, the side wall of the transition box is fixed and connected with an air outlet pipe, the other end of the air outlet pipe is connected with an electromagnetic three-way valve, one of the outlets of the electromagnetic three-way valve is connected to another electromagnetic three-way valve through a connecting pipe, the other outlet of the electromagnetic three-way valve connected to the air outlet pipe and the two outlets of the electromagnetic three-way valve connected to the tail end of the connecting pipe are both connected to the storage tank through a condenser.

[0012] Preferably: the electromagnetic three-way valve includes a valve body and a valve core slidably connected to the inner wall of the valve body, one side of the valve body is provided with an inlet flow channel, the other side of the valve body is provided with two outlet flow channels, the inner wall of the valve core is provided with two transition flow channels corresponding to the outlet flow channel and the inlet flow channel, and the two transition flow channels are connected to each other.

[0013] Furthermore: a permanent magnet is fixed on one side of the valve core, and an electromagnet arranged opposite to the permanent magnet is fixed on the inner wall of the valve body; a second spring is buckled on the end face of the valve core, and the other end of the second spring is buckled on the inner wall of the valve body, and the electromagnet has the same magnetic pole as the permanent magnet on the opposite side.

[0014] On the basis of the above-mentioned scheme: a valve stem is fixed on the other side of the valve core, and two sets of slots are opened on the side wall of the valve stem. The inner wall of the valve body is slidably connected with an arc-head clamping rod that can cooperate with the slot. The end of the arc-head clamping rod is buckled with spring 1, and the other end of spring 1 is buckled to the inner wall of the valve body.

[0015] A better solution among the above solutions is that: two non-contacting sharp-pointed electrodes 1 are fixedly embedded in the side wall of the tail end of the connecting tube, and two non-contacting sharp-pointed electrodes 2 are fixedly embedded in the side wall of the tail end of the outlet pipe.

[0016] As a further solution of the present invention: the tip electrode 1 and the tip electrode 2 are both connected to a high-voltage power supply, the electromagnet of the electromagnetic three-way valve connected to the tail end of the outlet pipe is connected in series to the two tip electrodes 2, and the electromagnet of the electromagnetic three-way valve connected to the tail end of the connecting pipe is connected in series to the two tip electrodes 1.

[0017] At the same time, the output voltage of the high-voltage power supply connected to the tip electrode 2 is less than 21.56 eV and greater than 13.598 eV, and the output voltage of the high-voltage power supply connected to the tip electrode 1 is less than 21.56 eV and greater than 15.759 eV.

[0018] As a preferred embodiment of the present invention: the heating mechanism includes a planetary gear, a sun gear and a ring gear, the sun gear is rotatably connected to the bottom of the reactor body, the ring gear is fixed to the inner wall of the reactor body, the planetary gear is meshed with the sun gear and the opposite side of the ring gear, a planetary shaft is fixed to the top of the planetary gear, a heating plate is fixed to the top of the planetary shaft, a stirring frame is fixed to the top of the sun gear, and an electric motor is fixed to the bottom outer wall of the reactor body by bolts, and the output shaft of the motor is connected to the inner wall of the sun gear by a key.

[0019] At the same time, a sealing plate is fixed to the inner wall of the reactor body, the outer wall of the planetary shaft is rotatably connected to the same planetary carrier 1, and a mechanical seal is provided at the rotating connection between the planetary shaft and the planetary carrier 1, and the planetary carrier 1 and the sealing plate cooperate with each other through serrated protrusions.

[0020] As a more preferred solution of the present invention: the bottom outer walls of the plurality of planetary shafts are rotatably connected to the same planetary frame 2, the side walls of the planetary shafts are fixed with a conductive ring 2, the outer wall of the planetary frame 2 is fixed with a conductive ring 2 that contacts and cooperates with a spring electrode 1, the outer wall of the conductive ring 2 is fixed with a spring electrode 2, the inner wall of the reactor body is fixed with a conductive ring 1 that contacts and cooperates with the spring electrode 2, the conductive ring 1 is connected to a power supply, and the spring electrode 1 is electrically connected to the heating plate;

[0021] A laser gas recovery and separation method comprises the following steps:

[0022] S1: Cooling down the mixed gas to completely liquefy it and then inputting it into the reactor body;

[0023] S2: Start the motor to perform stirring heating;

[0024] S3: Start the power supply connected to the conductive ring 1;

[0025] S4: Subsequently, the neon gas, the gas with a higher boiling point than the neon gas, and the gas with a lower boiling point than the neon gas are separated by distillation.

[0026] The beneficial effects of the present invention are:

[0027] 1. In the present invention, by setting a transition box, the evaporated gas can be heat-exchanged with the mixed liquid in the reactor again, thereby realizing the purification function and increasing the purity of separation. At the same time, the heat exchange between the evaporated gas and the mixed liquid in the reactor can also realize the heating function of the liquid, thereby realizing a certain amount of energy recovery.

[0028] 2. The present invention, by setting an arc head clamping rod and a clamping groove, the two groups of clamping grooves correspond to the two working positions of the electromagnetic three-way valve respectively, so that the limiting effect of the arc head clamping rod and the clamping groove can be used to ensure the stability of the working position state. In addition, by setting a sealing ring, it can ensure the sealing effect, thereby further increasing the separation purity.

[0029] 3. The present invention conducts targeted circuit design according to the characteristics of the boiling point and ionization voltage of the gas, thereby being able to utilize the difference in ionization voltage to realize the automatic switching function of the two electromagnetic three-way valve positions.

[0030] 4. The present invention, by setting planetary gears, sun gears and ring gears, can achieve stirring of the liquid on the one hand, and on the other hand, can enable the heating plate as a heating source to have two movements relative to the liquid, thereby increasing the uniformity of contact between the heating plate and the liquid, increasing the uniformity of heating, and effectively suppressing the defect of low separation purity caused by local uneven heating.

[0031] 5. The present invention, by arranging spring electrode 1 and conductive ring 2, spring electrode 2 and conductive ring 1, adopts a double-layer transition form to offset the rotation and revolution of the heating plate respectively, thereby effectively preventing the risk of wire entanglement and breakage. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 This is a schematic diagram of the overall structure of a laser gas recovery and separation device proposed by the present invention;

[0033] Figure 2 This is a schematic cross-sectional view of a laser gas recovery and separation device proposed by the present invention;

[0034] Figure 3 A schematic diagram of the pipeline structure of a laser gas recovery and separation device proposed by the present invention;

[0035] Figure 4 This is a schematic diagram of the structure of an electromagnetic three-way valve of a laser gas recovery and separation device proposed by the present invention;

[0036] Figure 5 This is a schematic diagram of the cross-sectional structure of a laser gas recovery and separation device proposed by the present invention, before the electromagnetic three-way valve moves;

[0037] Figure 6 This is a schematic cross-sectional structure diagram of a laser gas recovery and separation device proposed by the present invention after the electromagnetic three-way valve is moved;

[0038] Figure 7 This is a schematic diagram of the installation position structure of the tip electrode 1 and the tip electrode 2 of a laser gas recovery and separation device proposed by the present invention;

[0039] Figure 8 A schematic diagram of the heating mechanism structure of a laser gas recovery and separation device proposed by the present invention;

[0040] Fig. 9 A laser gas recovery and separation device proposed by the present invention Figure 8 The enlarged structural diagram of part A in the middle;

[0041] Fig.10 This is a schematic structural diagram of a conductive ring 1, a conductive ring 2, a spring electrode 1, and a spring electrode 2 of a laser gas recovery and separation device proposed by the present invention;

[0042] Fig.11 The present invention is a schematic flow chart of a laser gas recovery and separation method proposed in the present invention.

[0043] In the figure: 1. reactor body; 2. outlet pipe; 3. connecting pipe; 4. electromagnetic three-way valve; 5. reflux pipe; 6. plugging cover; 7. feed port; 8. reactor cover; 9. heating mechanism; 10. transition box; 11. valve body; 12. transition flow channel; 13. valve core; 14. sealing ring; 15. valve stem; 16. electromagnet; 17. permanent magnet; 18. spring one; 19. arc head clamping rod; 20. clamping groove; 21. tip electrode one; 22. tip electrode two; 23. stirring frame; 24. heating plate; 25. planet carrier one; 26. planetary gear; 27. planetary shaft; 28. sun gear; 29. ​​motor; 30. gear ring; 31. sealing plate; 32. sawtooth protrusion; 33. conductive ring one; 34. conductive ring two; 35. spring electrode one; 36. spring electrode two; 37. planet carrier two; 38. spring two. DETAILED DESCRIPTION

[0044] The technical solution of the present invention is further described in detail below in conjunction with specific implementation methods.

[0045] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0046] Embodiment 1: A laser gas recovery and separation device, the laser gas is a mixed gas of neon, krypton, xenon, argon and hydrogen, such as Figure 1-Figure 10 As shown, the laser gas recovery and separation device comprises a reaction kettle body 1 and a kettle cover 8 fixed to the top of the reaction kettle body 1 by bolts, and a heating mechanism 9 for heating is arranged inside the reaction kettle body 1.

[0047] The side wall of the kettle cover 8 is welded and connected with a reflux pipe 5, a transition box 10 is fixed to the inner wall of the reactor body 1, the other end of the reflux pipe 5 is inserted into the interior of the reactor body 1 and then connected to the transition box 10, the side wall of the transition box 10 is fixed and connected with an air outlet pipe 2, the other end of the air outlet pipe 2 is connected with an electromagnetic three-way valve 4, one of the outlets of the electromagnetic three-way valve 4 is connected to another electromagnetic three-way valve 4 through a connecting pipe 3, and the other outlet of the electromagnetic three-way valve 4 connected to the air outlet pipe 2 and the two outlets of the electromagnetic three-way valve 4 connected to the tail end of the connecting pipe 3 are both connected to the storage tank through a condenser.

[0048] The side wall of the kettle cover 8 is provided with a feed port 7, and the outer wall of the feed port 7 is fixed with a plug cover 6 by bolts.

[0049] When the device is in use, the mixed gas is cooled and completely liquefied, and then input into the reactor body 1, and then heated by the heating mechanism 9. During the heating process, the gas with a boiling point higher than that of neon is evaporated first. At this time, the electromagnetic three-way valve 4 connected to the tail end of the gas outlet pipe 2 is controlled so that the gas outlet pipe 2 is not connected to the connecting pipe 3. The gas will enter one of the condensers through the electromagnetic three-way valve 4 for condensation and then enter the storage tank for continuous heating. After the temperature of the mixed system rises, neon is evaporated. At this time, the electromagnetic three-way valve 4 connected to the tail end of the gas outlet pipe 2 connects the gas outlet pipe 2 with the connecting pipe 3, and the neon enters the storage tank for storage after condensation through one of the outlets of another electromagnetic three-way valve 4 until the neon is After the gas is evaporated, it is condensed and stored with the gas from the other outlet of the electromagnetic three-way valve 4, and in this process, after the evaporated gas enters the reflux pipe 5, it will pass through the reactor body 1 again along the reflux pipe 5, and exchange heat with the mixed liquid in the reactor body 1. Since the temperature of the entire mixed liquid will be near the boiling point of the evaporated gas during the evaporation process, even if there is uneven heating, a small amount of high-boiling-point gas will be evaporated and will exchange heat with the liquid in the reactor body 1, and will be directly condensed and stored in the transition box 10 until the temperature of the mixed liquid is further increased, and the liquid in the transition box 10 is heated and evaporated, and enters the subsequent condensation and storage step together with the gas outlet pipe 2.

[0050] In this device, by setting up a transition box 10, the evaporated gas can be heat-exchanged with the mixed liquid in the reactor body 1 again, thereby realizing the purification function and increasing the purity of separation. At the same time, the heat exchange between the evaporated gas and the mixed liquid in the reactor body 1 can also realize the heating function of the liquid, thereby realizing a certain amount of energy recovery.

[0051] To solve the switching problem; Figure 4 , 5 As shown, the electromagnetic three-way valve 4 includes a valve body 11 and a valve core 13 slidably connected to the inner wall of the valve body 11, one side of the valve body 11 is provided with an inlet flow channel, and the other side of the valve body 11 is provided with two outlet flow channels, and the inner wall of the valve core 13 is provided with two transition flow channels 12 corresponding to the outlet flow channel and the inlet flow channel, and the two transition flow channels 12 are connected to each other.

[0052] Sealing rings 14 are fixed to the outer walls of the valve core 13 on both sides of the transition channel 12 .

[0053] A permanent magnet 17 is fixed to one side of the valve core 13 , and an electromagnet 16 arranged opposite to the permanent magnet 17 is fixed to the inner wall of the valve body 11 . The electromagnet 16 and the permanent magnet 17 have the same magnetic pole on the opposite side.

[0054] A valve stem 15 is fixed to the other side of the valve core 13, and two sets of slots 20 are opened on the side wall of the valve stem 15. The inner wall of the valve body 11 is slidably connected with an arc-head clamping rod 19 that can cooperate with the slot 20. The end of the arc-head clamping rod 19 is buckled with a spring 18, and the other end of the spring 18 is buckled to the inner wall of the valve body 11.

[0055] A second spring 38 is buckled on the end surface of the valve core 13 , and the other end of the second spring 38 is buckled on the inner wall of the valve body 11 .

[0056] When current flows through the electromagnet 16, the electromagnet 16 generates a magnetic field, thereby generating a magnetic repulsion force between the electromagnet 16 and the permanent magnet 17. At this time, the valve stem 15 overcomes the limiting effect of the arc head clamping rod 19 on the clamping groove 20 and moves, so that the valve core 13 moves. Figure 5 :

[0057] Before moving: the top of the transition channel 12 on the left is connected to the inlet channel, and the bottom of the transition channel 12 on the right is connected to the outlet channel on the right;

[0058] After the movement, the bottom of the transition channel 12 on the left is connected to the outlet channel, and the top of the transition channel 12 on the right is connected to the inlet channel;

[0059] Thereby realizing the workstation switching.

[0060] In this device, an arc head clamping rod 19 and a clamping groove 20 are provided, and two groups of clamping grooves 20 correspond to two working positions of the electromagnetic three-way valve 4 respectively, so that the limiting effect of the arc head clamping rod 19 and the clamping groove 20 can be utilized to ensure the stability of the working position state. In addition, by providing a sealing ring 14, it can ensure the sealing effect, thereby further increasing the separation purity.

[0061] In order to solve the automation control problem; Figure 6 As shown, two non-contacting sharp electrodes 1 21 are fixedly embedded in the side wall of the tail end of the connecting pipe 3, and two non-contacting sharp electrodes 2 22 are fixedly embedded in the side wall of the tail end of the outlet pipe 2.

[0062] The tip electrode 1 21 and the tip electrode 2 22 are both connected to a high-voltage power supply, the electromagnet 16 of the electromagnetic three-way valve 4 connected to the tail end of the outlet pipe 2 is connected in series to the two tip electrodes 2 22, and the electromagnet 16 of the electromagnetic three-way valve 4 connected to the tail end of the connecting pipe 3 is connected in series to the two tip electrodes 1 21.

[0063] Since the mixed gas is neon, krypton, xenon, argon and hydrogen, its boiling point and ionization voltage are as follows:

[0064] gas Boiling point℃ Ionization voltage eV hydrogen -252.87 13.598 Neon -246.08 21.56 Krypton -153.15 13.999 Xenon -108.1 12.130 Argon -185.8 15.759

[0065] It can be seen from the above table that the gases with boiling points higher than neon are krypton, xenon and argon, and the gas with a boiling point lower than neon is hydrogen. According to the ionization voltage, in this embodiment, the output voltage of the high-voltage power supply connected to the tip electrode 22 is less than 21.56eV and greater than 13.598eV, and at the same time, the output voltage of the high-voltage voltage connected to the tip electrode 1 21 is less than 21.56eV and greater than 15.759eV.

[0066] The specific switching principle is as follows:

[0067] ①: In the early stage of heating, hydrogen with a lower boiling point is evaporated first. Since the voltage of the tip electrode 22 is between 21.56eV and 13.598eV, the hydrogen will be partially ionized, so that current is generated in the electromagnet 16, so that the valve core 13 connected to the tail end of the outlet pipe 2 is moved by the magnetic repulsion of the electromagnet 16, and the spring 2 38 is compressed until the hydrogen is completely evaporated. The temperature of the entire mixed liquid system rises to the boiling point of neon, and the neon is evaporated. When the neon passes through the tail end of the outlet pipe 2, due to the small voltage between the tip electrode 22, the neon cannot be ionized, so there is no current in the electromagnet 16, and the valve core 13 is reset by the elastic force of the spring 2 38, and the channel is switched;

[0068] ②: After the channel is switched, the outlet pipe 2 is connected to the connecting pipe 3, and the neon gas enters the connecting pipe 3. At this time, since the voltage of the tip electrode 21 is also lower than the ionization voltage of the neon gas, the neon gas will not be ionized, and the neon gas will be condensed and stored after passing through one of the flow channels of the electromagnetic three-way valve 4;

[0069] ③: When the neon gas is completely evaporated and the temperature of the entire mixed liquid system is further increased, the remaining gas evaporates and enters the tail end of the connecting tube 3. The gas between the tip electrode 21 is ionized, thereby generating current in the electromagnet 16 of the electromagnetic three-way valve 4 connected to the tail end of the connecting tube 3, and the valve core 13 at this location switches its position.

[0070] The device is designed with targeted circuits according to the characteristics of the boiling point and ionization voltage of the gas, so that the automatic switching function of the four positions of the two electromagnetic three-way valves can be realized by utilizing the difference in ionization voltage.

[0071] To solve the heating problem; Figure 7 , 8As shown in Figure 9, the heating mechanism 9 includes a planetary gear 26, a sun gear 28 and a ring gear 30. The sun gear 28 is rotatably connected to the bottom of the reactor body 1, and the ring gear 30 is fixed to the inner wall of the reactor body 1. The planetary gear 26 is meshed with the sun gear 28 and the opposite side of the ring gear 30. A planetary shaft 27 is fixed to the top of the planetary gear 26, a heating plate 24 is fixed to the top of the planetary shaft 27, a stirring frame 23 is fixed to the top of the sun gear 28, and a motor 29 is fixed to the outer wall of the bottom of the reactor body 1 by bolts, and the output shaft of the motor 29 is connected to the inner wall of the sun gear 28 by a key.

[0072] When the motor 29 is started, it can drive the sun gear 28 to rotate, thereby driving the stirring frame 23 to rotate to stir the liquid. At the same time, the rotation of the sun gear 28 will drive the planetary gear 26 to rotate and revolve, so that the heating plate 24 spins while rotating along the axis of the sun gear 28.

[0073] The device, by providing the planetary gear 26, the sun gear 28 and the ring gear 30, can achieve the stirring of the liquid on the one hand, and on the other hand, can enable the heating plate 24 as the heating source to have two movements relative to the liquid, thereby increasing the contact uniformity between the heating plate 24 and the liquid, increasing the uniformity of heating, and effectively suppressing the defect of low separation purity caused by local uneven heating.

[0074] In order to solve the sealing problem; Figure 8 As shown, a sealing plate 31 is fixed to the inner wall of the reactor body 1, the outer wall of the planetary shaft 27 is rotatably connected to the same planetary carrier 25, and a mechanical seal is provided at the rotating connection between the planetary shaft 27 and the planetary carrier 25, and the planetary carrier 25 and the sealing plate 31 cooperate with each other through the serrated protrusion 32.

[0075] To address security issues, such as Fig. 9 As shown, the bottom outer walls of the plurality of planetary shafts 27 are rotatably connected to the same planetary carrier 2 37, a conductive ring 2 34 is fixed to the side wall of the planetary shaft 27, a conductive ring 2 34 that contacts and cooperates with a spring electrode 1 35 is fixed to the outer wall of the planetary carrier 2 37, a spring electrode 2 36 is fixed to the outer wall of the conductive ring 2 34, a conductive ring 1 33 that contacts and cooperates with the spring electrode 2 36 is fixed to the inner wall of the reactor body 1, and the conductive ring 1 33 is connected to a power supply, and the spring electrode 1 35 is electrically connected to the heating plate 24.

[0076] Since the heating plate 24 has multiple movements and needs to be connected to electricity to generate heat, the wires may become entangled and broken when connected using wires. Based on this, the device sets spring electrode 1 35 and conductive ring 2 34, spring electrode 2 36 and conductive ring 1 33, and adopts a double-layer transition form to offset the rotation and revolution of the heating plate 24, thereby effectively preventing the risk of wire entanglement and breakage.

[0077] When the present embodiment is in use, the mixed gas is cooled and completely liquefied, and then input into the reactor body 1, and then heated by the heating mechanism 9. During the heating process, the gas with a boiling point higher than that of neon is evaporated first. At this time, the electromagnetic three-way valve 4 connected to the tail end of the gas outlet pipe 2 is controlled so that the gas outlet pipe 2 is not connected to the connecting pipe 3. The gas will enter one of the condensers through the electromagnetic three-way valve 4 for condensation and then enter the storage tank for continuous heating. After the temperature of the mixed system rises, neon is evaporated. At this time, the electromagnetic three-way valve 4 connected to the tail end of the gas outlet pipe 2 connects the gas outlet pipe 2 with the connecting pipe 3, and the neon enters the storage tank for storage after condensation through one of the outlets of another electromagnetic three-way valve 4 until After the neon gas is evaporated, it is condensed and stored with the gas from the other outlet of the electromagnetic three-way valve 4. In this process, after the evaporated gas enters the reflux pipe 5, it will pass through the reactor body 1 again along the reflux pipe 5 and exchange heat with the mixed liquid in the reactor body 1. Since the temperature of the entire mixed liquid will be near the boiling point of the evaporated gas during the evaporation process, even if there is uneven heating, a small amount of high-boiling-point gas will be evaporated and will exchange heat with the liquid in the reactor body 1, and will be directly condensed and stored in the transition box 10 until the temperature of the mixed liquid is further increased. The liquid in the transition box 10 is heated and evaporated, and enters the subsequent condensation and storage step together with the outlet pipe 2.

[0078] Embodiment 2: A laser gas recovery and separation method, such as Fig.11 As shown, it includes the following steps:

[0079] S1: Cooling down the mixed gas to completely liquefy it and then inputting it into the reactor body 1;

[0080] S2: Start the motor 29 to perform stirring heating;

[0081] S3: Start the power supply connected to the conductive ring 33;

[0082] S4: Subsequently, the neon gas, the gas with a higher boiling point than the neon gas, and the gas with a lower boiling point than the neon gas are separated by distillation.

[0083] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A laser gas recovery and separation device, wherein the laser gas is a mixed gas of neon, krypton, xenon, argon and hydrogen, and the laser gas recovery and separation device comprises a reaction vessel body (1) and a vessel cover (8) fixed to the top of the reaction vessel body (1) by bolts, characterized in that: A heating mechanism (9) for heating is arranged inside the reaction kettle body (1); The side wall of the kettle cover (8) is welded and connected to a reflux pipe (5); a transition box (10) is fixed to the inner wall of the reactor body (1); the other end of the reflux pipe (5) is inserted into the interior of the reactor body (1) and then connected to the transition box (10); the side wall of the transition box (10) is fixed and connected to an air outlet pipe (2); the other end of the air outlet pipe (2) is connected to an electromagnetic three-way valve (4); one of the outlets of the electromagnetic three-way valve (4) is connected to another electromagnetic three-way valve (4) via a connecting pipe (3); the other outlet of the electromagnetic three-way valve (4) connected to the air outlet pipe (2) and the two outlets of the electromagnetic three-way valve (4) connected to the tail end of the connecting pipe (3) are both connected to a storage tank via a condenser; The electromagnetic three-way valve (4) comprises a valve body (11) and a valve core (13) slidably connected to the inner wall of the valve body (11); one side of the valve body (11) is provided with an inlet flow channel, and the other side of the valve body (11) is provided with two outlet flow channels; the inner wall of the valve core (13) is provided with two transition flow channels (12) corresponding to the outlet flow channel and the inlet flow channel, and the two transition flow channels (12) are connected to each other; A permanent magnet (17) is fixed to one side of the valve core (13), and an electromagnet (16) arranged opposite to the permanent magnet (17) is fixed to the inner wall of the valve body (11); a second spring (38) is buckled on the end surface of the valve core (13), and the other end of the second spring (38) is buckled on the inner wall of the valve body (11); the magnetic poles of the electromagnet (16) and the permanent magnet (17) on the opposite side are the same; A valve stem (15) is fixed to the other side of the valve core (13), and the side wall of the valve stem (15) is provided with two groups of slots (20). The inner wall of the valve body (11) is slidably connected with an arc-headed clamping rod (19) that can cooperate with the slots (20), and the end of the arc-headed clamping rod (19) is buckled with a spring 1 (18), and the other end of the spring 1 (18) is buckled with the inner wall of the valve body (11); The side wall of the tail end of the connecting tube (3) is fixedly embedded with two non-contacting sharp-pointed electrodes 1 (21), and the side wall of the tail end of the air outlet tube (2) is fixedly embedded with two non-contacting sharp-pointed electrodes 2 (22); The tip electrode 1 (21) and the tip electrode 2 (22) are both connected to a high-voltage power supply, the electromagnet (16) of the electromagnetic three-way valve (4) connected to the tail end of the outlet pipe (2) is connected in series to the two tip electrodes 2 (22), and the electromagnet (16) of the electromagnetic three-way valve (4) connected to the tail end of the connecting pipe (3) is connected in series to the two tip electrodes 1 (21); The output voltage of the high-voltage power supply connected to the tip electrode 2 (22) is less than 21.56 eV and greater than 13.598 eV, and the output voltage of the high-voltage power supply connected to the tip electrode 1 (21) is less than 21.56 eV and greater than 15.759 eV.

2. A laser gas recovery and separation device according to claim 1, characterized in that: The heating mechanism (9) comprises a planetary gear (26), a sun gear (28) and a ring gear (30); the sun gear (28) is rotatably connected to the bottom of the reaction kettle body (1); the ring gear (30) is fixed to the inner wall of the reaction kettle body (1); the planetary gear (26) is meshed with the sun gear (28) and the opposite side of the ring gear (30); a planetary shaft (27) is fixed to the top of the planetary gear (26); a heating plate (24) is fixed to the top of the planetary shaft (27); a stirring frame (23) is fixed to the top of the sun gear (28); and a motor (29) is fixed to the outer wall of the bottom of the reaction kettle body (1) by bolts; an output shaft of the motor (29) is connected to the inner wall of the sun gear (28) by a key.

3. A laser gas recovery and separation device according to claim 2, characterized in that: A sealing plate (31) is fixed to the inner wall of the reactor body (1); the outer wall of the planetary shaft (27) is rotatably connected to the same planetary carrier (25); a mechanical seal is provided at the rotatable connection between the planetary shaft (27) and the planetary carrier (25); the planetary carrier (25) and the sealing plate (31) cooperate with each other via a serrated protrusion (32).

4. The laser gas recovery and separation device according to claim 3, characterized in that: The bottom outer walls of the plurality of planetary shafts (27) are rotatably connected to the same planetary frame 2 (37); a conductive ring 2 (34) is fixed to the side wall of the planetary shaft (27); a conductive ring 2 (34) that contacts and cooperates with a spring electrode 1 (35) is fixed to the outer wall of the planetary frame 2 (37); a spring electrode 2 (36) is fixed to the outer wall of the conductive ring 2 (34); a conductive ring 1 (33) that contacts and cooperates with the spring electrode 2 (36) is fixed to the inner wall of the reactor body (1); the conductive ring 1 (33) is connected to a power supply; and the spring electrode 1 (35) is electrically connected to the heating plate (24).

5. A laser gas recovery and separation method, which is a method for using a laser gas recovery and separation device according to claim 4, characterized in that: The following steps are involved: S1: Cooling down the mixed gas to completely liquefy it and then inputting it into the reactor body (1); S2: starting the motor (29) to perform stirring heating; S3: Start the power supply connected to the conductive ring 1 (33); S4: Subsequently, the neon gas, the gas with a higher boiling point than the neon gas, and the gas with a lower boiling point than the neon gas are separated by distillation.

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