Silicon carbide seed crystal pasting device

Abstract

The present invention belongs to the field of silicon carbide production, and specifically refers to a silicon carbide seed crystal pasting device, comprising a chassis, a uniform step-by-step exhaust mechanism, a uniform self-adjusting drying mechanism and a uniform automatic gluing mechanism, wherein a supporting frame is provided on the chassis, the uniform self-adjusting drying mechanism is arranged on the chassis, the uniform automatic gluing mechanism is arranged on the chassis, the uniform step-by-step exhaust mechanism is fixed on the supporting frame, and the uniform step-by-step exhaust mechanism is arranged directly above the uniform self-adjusting drying mechanism; the present invention solves the problem that the prior art directly pressurizes the entire crucible cover, making it difficult to perfectly fit the silicon carbide seed crystal with the crucible cover, resulting in difficulty in completely discharging the gas between the seed crystal and the bonding glue, and the problem that manual gluing is difficult to ensure uniform thickness of the glue layer.

Description

Technical Field

[0001] The invention belongs to the technical field of silicon carbide production, and specifically refers to a silicon carbide seed crystal pasting device. Background Art

[0002] In the process of preparing silicon carbide crystals, seed crystals are usually used. They serve as carriers of crystals and provide attachment points for the generated silicon carbide crystals. Generally, bonding glue is applied to the crucible cover manually, and then the bonding glue is applied to the crucible cover manually with a scraper. Then, the silicon carbide seed crystal is placed on it, and then the entire crucible cover is pressurized and heated to bond the silicon carbide seed crystal to the crucible cover. However, the surface of the seed crystal is uneven, and it is difficult to make the silicon carbide seed crystal fit perfectly with the crucible cover by directly pressurizing the entire crucible cover, which makes it difficult to completely discharge the gas between the seed crystal and the bonding glue, and bubbles are easily generated after heating, affecting the bonding quality. Moreover, manual bonding is not only labor-intensive, but also difficult to ensure uniform thickness of the glue layer, and is prone to uneven and weak bonding. Summary of the invention

[0003] In view of the above situation, in order to overcome the defects of the prior art, the present invention provides a silicon carbide seed crystal pasting device, which can not only balance the pressure on the seed crystal, but also gradually discharge the gas between the seed crystal and the bonding glue from the center to the surrounding area, thereby ensuring that the gas between the seed crystal and the bonding glue is completely discharged, and can automatically and evenly apply glue to the surface of the crucible cover, thereby solving the problem that the prior art directly pressurizes the entire crucible cover and is difficult to make the silicon carbide seed crystal and the crucible cover fit perfectly, resulting in difficulty in completely discharging the gas between the seed crystal and the bonding glue, and difficulty in ensuring uniform thickness of the glue layer due to manual gluing.

[0004] The technical solution adopted by the present invention is as follows: The present invention provides a silicon carbide seed crystal pasting device, including a chassis, a uniform step-by-step exhaust mechanism, a uniform self-adjusting drying mechanism and a uniform automatic gluing mechanism, wherein the chassis is provided with a supporting frame, the uniform self-adjusting drying mechanism is arranged on the chassis, the uniform automatic gluing mechanism is arranged on the chassis, the uniform step-by-step exhaust mechanism is fixedly arranged on the supporting frame, the uniform step-by-step exhaust mechanism is arranged directly above the uniform self-adjusting drying mechanism, the uniform self-adjusting drying mechanism includes an adjustable supporting and clamping device and a self-adjusting drying device, the self-adjusting drying device is arranged in the adjustable supporting and clamping device, the uniform automatic gluing mechanism includes a uniform gluing device and a gluing range adjusting device, the gluing range adjusting device is arranged on the uniform gluing device, the uniform step-by-step exhaust mechanism includes a multi-stage extrusion device, an air step-by-step circulation device and an automatic air supply device, the air step-by-step circulation device is arranged at the bottom of the automatic air supply device, and the multi-stage extrusion device is arranged in the air step-by-step circulation device.

[0005] Furthermore, an electric telescopic rod is provided on the top inner wall of the support frame, and a connecting plate is provided on the movable end of the electric telescopic rod. The automatic air supply device includes a connecting box, a rectangular box, a connecting pipe, an air inlet pipe, an air outlet pipe, a limiting ring, a limiting ball, a spring, a piston, an arc ring, a connecting rod, a turning handle and a motor. The connecting box is arranged at the bottom of the connecting plate, the connecting pipe is arranged on the connecting box, the rectangular box is arranged on the connecting pipe, the air inlet pipe is arranged on the connecting box, and the air outlet pipe is arranged at the bottom of the connecting box.

[0006] Furthermore, a limiting ring is provided in both the air inlet pipe and the air outlet pipe, the spring 1 is provided in the air inlet pipe and the air outlet pipe, the limiting ball is provided in the air inlet pipe and the air outlet pipe, the limiting ball is connected to the spring 1, the motor 1 is provided on the inner wall of the rectangular box, the handle is provided on the transmission end of the motor 1, the piston is movably provided in the connecting pipe, the connecting rod is provided on the piston, the arc ring is provided on the end face of the connecting rod, and the arc ring is connected to the handle.

[0007] Furthermore, the step-by-step air circulation device includes a cylinder, a rectangular conducting port, a columnar cavity and a disc cavity. The cylinder is arranged at the bottom of the air outlet pipe, and the columnar cavity is arranged in a stepped array inside the cylinder. Rectangular conducting ports are provided between adjacent columnar cavities, and the disc cavity is arranged in a stepped manner at the bottom of the columnar cavity.

[0008] Furthermore, the multi-stage extrusion device includes a circular block, a telescopic rod, a second spring, a fixed ring, an extrusion column, an extrusion ring one, an extrusion ring two and a soft rubber pad. The fixed ring is fixedly arranged in the columnar cavity, the second spring is arranged above the fixed ring and is connected to the fixed ring, the circular block is arranged above the second spring and is connected to the second spring, the telescopic rod passes through the fixed ring and is arranged at the bottom of the circular block, the extrusion column is arranged at the inner center of the cylinder, the extrusion column is fixedly connected to the bottom of the telescopic rod, the extrusion ring one is slidably connected to the outer wall of the extrusion column, the extrusion ring one is fixedly connected to the bottom of the telescopic rod, the extrusion ring two is slidably connected to the outer wall of the extrusion ring one, the extrusion ring two is fixedly connected to the bottom of the telescopic rod, the soft rubber pad is arranged at the bottom of the extrusion column, the extrusion ring one and the extrusion ring two, and the size of the soft rubber pad is adapted to the bottom of the extrusion column, the extrusion ring one and the extrusion ring two.

[0009] Furthermore, the adjustable supporting and clamping device includes a cylindrical tube one, a cylindrical tube two, an arc block, a screw rod one and a movable column, the cylindrical tube one is arranged at the top of the chassis, the cylindrical tube two is arranged at the top of the cylindrical tube one, the bottom of the cylindrical tube one is provided with a movable groove, the bottom of the cylindrical tube two is provided with a slide groove, and the two sides of the slide groove are symmetrically arrayed with heat conduction holes, the screw rod one passes through one side of the cylindrical tube two and is engaged and rotatably connected with the cylindrical tube two, the screw rod one is arranged in the slide groove, the movable column is symmetrically arranged on the screw rod one, and the arc block is arranged at the top of the movable column.

[0010] Furthermore, the self-regulating drying device includes a heater, a support column, a fixed block, a lifting block, a moving block, a clamping block and a rotating rod, the fixed block is fixedly arranged at the inner bottom of the columnar barrel, the lifting blocks are symmetrically arrayed on both sides of the fixed block, the moving block is fixedly arranged at the bottom of the moving column, the clamping block is arranged at the bottom of the moving block, the fixed block and the lifting block are rotatably connected via a rotating rod, the moving block and the lifting block are rotatably connected via a rotating rod, the support column is arranged at the top of the lifting block, and the heater is arranged at the top of the support column.

[0011] Furthermore, the uniform glue coating device includes a fixed column, a rotating plate, a second motor, a glue storage box, a pressure nozzle, an extrusion plate, a third spring, a pressing plate and a movable column, the fixed column is arranged on the chassis, the rotating plate is rotatably arranged on the fixed column, the second motor is arranged at the bottom of the rotating plate, the glue storage box is arranged on the transmission end of the second motor, the pressure nozzle array is arranged at the bottom of the glue storage box, the movable column passes through the top of the glue storage box and is slidably connected to the glue storage box, the movable column is symmetrically arranged, the extrusion plate is arranged at the bottom of the movable column, the third spring is arranged on the outer wall of the movable column, the third spring is connected to the glue storage box, and the pressing plate is arranged at the top of the movable column and is connected to the third spring.

[0012] Furthermore, the glue coating range adjustment device includes a square box, a blocking block, a scraper and two screw rods. The square box is arranged on the glue storage box. A rectangular opening is arranged at the bottom of the square box. The two screw rods pass through one side of the square box and are engaged and rotatably connected with the square box. The two screw rods are symmetrically arranged. The blocking block is arranged on the two screw rods, and the scraper strips are symmetrically arranged at the bottom of the square box.

[0013] Furthermore, the thread of the screw rod 1 is divided into two sections, and the directions of the two sections of threads are opposite.

[0014] By adopting the above structure, the present invention has the following beneficial effects:

[0015] The present scheme provides a silicon carbide seed crystal pasting device. According to the prior art, it is difficult to make the silicon carbide seed crystal and the crucible cover fit perfectly by directly pressurizing the entire crucible cover, which makes it difficult to completely discharge the gas between the seed crystal and the bonding glue, and it is difficult to ensure the uniform thickness of the glue layer by manual gluing. By combining an automatic gas supply device and a multi-stage extrusion device, the seed crystal is balanced under pressure, and the gas between the seed crystal and the bonding glue is gradually discharged from the center to the surroundings, greatly improving the gas discharge efficiency; by combining a uniform glue coating device and a glue coating range adjustment device, the glue coating range can be controlled according to the size of the crucible cover, and the crucible cover is evenly coated with glue to ensure the uniform thickness of the glue layer; and the uniform self-adjusting drying mechanism can automatically adjust the drying range according to the size of the crucible cover, so as to achieve uniform drying of the bonding glue and improve the drying efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A three-dimensional diagram of a silicon carbide seed crystal pasting device proposed by the present invention;

[0017] Figure 2 A cross-sectional view of a silicon carbide seed crystal pasting device proposed by the present invention;

[0018] Figure 3 A three-dimensional diagram of an automatic air supply device for a silicon carbide seed crystal pasting device proposed by the present invention;

[0019] Figure 4 A cross-sectional view of an automatic air supply device of a silicon carbide seed crystal pasting device proposed by the present invention;

[0020] Figure 5 A cross-sectional view of an air step-by-step circulation device of a silicon carbide seed crystal pasting device proposed by the present invention;

[0021] Figure 6 A three-dimensional diagram of a multi-stage extrusion device of a silicon carbide seed crystal pasting device proposed by the present invention;

[0022] Figure 7 A cross-sectional view showing the connection relationship between a multi-stage extrusion device and a step-by-step air circulation device of a silicon carbide seed crystal pasting device proposed by the present invention;

[0023] Figure 8 A three-dimensional diagram of a uniform self-adjusting drying mechanism of a silicon carbide seed crystal pasting device proposed by the present invention;

[0024] Fig. 9 A cross-sectional view of a uniform self-adjusting drying mechanism of a silicon carbide seed crystal pasting device proposed by the present invention;

[0025] Fig.10 A three-dimensional diagram of a self-adjusting drying device of a silicon carbide seed crystal pasting device proposed by the present invention;

[0026] Fig.11 A three-dimensional diagram of a uniform automatic gluing mechanism of a silicon carbide seed crystal pasting device proposed by the present invention;

[0027] Fig.12 The present invention provides a cross-sectional view of a uniform automatic gluing mechanism for a silicon carbide seed crystal pasting device.

[0028] Among them, 1. chassis, 2. uniform step-by-step exhaust mechanism, 3. uniform self-adjusting drying mechanism, 4. uniform automatic gluing mechanism, 5. support frame, 6. adjustable support clamping device, 7. self-adjusting drying device, 8. uniform gluing device, 9. gluing range adjustment device, 10. multi-stage extrusion device, 11. air step-by-step circulation device, 12. automatic air supply device, 13. electric telescopic rod, 14. connecting plate, 15. connecting box, 16. rectangular box, 17. connecting pipe, 18. air inlet pipe, 19. air outlet pipe, 20. limiting ring, 21. limiting ball, 22. spring one, 23. piston, 24. arc ring, 25. connecting rod, 26. turning handle, 27. motor one, 28. cylinder, 29. rectangular conduction port, 30. columnar cavity, 3 1. Disc cavity, 32. Round block, 33. Telescopic rod, 34. Spring 2, 35. Fixed ring, 36. Extrusion column, 37. Extrusion ring 1, 38. Extrusion ring 2, 39. Soft rubber pad, 40. Columnar tube 1, 41. Columnar tube 2, 42. Arc block, 43. Screw rod 1, 44. Moving column, 45. Slide groove, 46. Thermal hole, 47. Heater, 48. Support column, 49. Fixed block, 50. Lifting block, 51. Moving block, 52. Block, 53. Rotating rod, 54. Fixed column, 55. Rotating plate, 56. Motor 2, 57. Glue storage box, 58. Pressure nozzle, 59. Extrusion plate, 60. Spring 3, 61. Pressing plate, 62. Movable column, 63. Square box, 64. Blocking block, 65. Scraper, 66. Screw rod 2.

[0029] The accompanying drawings are used to provide further understanding of the present invention and constitute a part of the specification. They are used to explain the present invention together with the embodiments of the present invention and do not constitute a limitation of the present invention. DETAILED DESCRIPTION

[0030] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments; based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0031] In the description of the present invention, it should be understood that terms such as “upper”, “lower”, “front”, “back”, “left”, “right”, “top”, “bottom”, “inside” and “outside” indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as limiting the present invention.

[0032] like Figure 1 , Fig.11As shown, the present invention proposes a silicon carbide seed crystal pasting device, including a chassis 1, a uniform step-by-step exhaust mechanism 2, a uniform self-adjusting drying mechanism 3 and a uniform automatic gluing mechanism 4, the chassis 1 is provided with a support frame 5, the uniform self-adjusting drying mechanism 3 is arranged on the chassis 1, the uniform automatic gluing mechanism 4 is arranged on the chassis 1, the uniform step-by-step exhaust mechanism 2 is fixedly arranged on the support frame 5, the uniform step-by-step exhaust mechanism 2 is arranged just above the uniform self-adjusting drying mechanism 3, the uniform self-adjusting drying mechanism 3 includes an adjustable support clamping device 6 and a self-adjusting drying device 7, the self-adjusting drying device 7 is arranged in the adjustable supporting and clamping device 6, the uniform automatic gluing mechanism 4 includes a uniform gluing device 8 and a gluing range adjusting device 9, the gluing range adjusting device 9 is arranged on the uniform gluing device 8, the uniform step-by-step exhaust mechanism 2 includes a multi-stage extrusion device 10, an air step-by-step circulation device 11 and an automatic air supply device 12, the air step-by-step circulation device 11 is arranged at the bottom of the automatic air supply device 12, and the multi-stage extrusion device 10 is arranged in the air step-by-step circulation device 11.

[0033] like Figure 2 , Figure 3 , Figure 4 As shown, an electric telescopic rod 13 is provided on the top inner wall of the support frame 5, and a connecting plate 14 is provided on the movable end of the electric telescopic rod 13. The automatic air supply device 12 includes a connecting box 15, a rectangular box 16, a connecting pipe 17, an air inlet pipe 18, an air outlet pipe 19, a limiting ring 20, a limiting ball 21, a spring 22, a piston 23, an arc ring 24, a connecting rod 25, a turning handle 26 and a motor 27. The connecting box 15 is arranged at the bottom of the connecting plate 14, the connecting pipe 17 is arranged on the connecting box 15, the rectangular box 16 is arranged on the connecting pipe 17, the air inlet pipe 18 is arranged on the connecting box 15, and the air outlet pipe 19 is arranged at the bottom of the connecting box 15.

[0034] like Figure 4 As shown, a limiting ring 20 is provided in the air inlet pipe 18 and the air outlet pipe 19, the spring 22 is provided in the air inlet pipe 18 and the air outlet pipe 19, the limiting ball 21 is provided in the air inlet pipe 18 and the air outlet pipe 19, the limiting ball 21 is connected to the spring 22, the motor 27 is provided on the inner wall of the rectangular box 16, the turning handle 26 is provided on the transmission end of the motor 27, the piston 23 is movably provided in the connecting pipe 17, the connecting rod 25 is provided on the piston 23, the arc ring 24 is provided on the end face of the connecting rod 25, and the arc ring 24 is connected to the turning handle 26.

[0035] like Figure 1 , Figure 5As shown, the step-by-step air circulation device 11 includes a cylinder 28, a rectangular conducting port 29, a columnar cavity 30 and a disc cavity 31. The cylinder 28 is arranged at the bottom of the air outlet pipe 19. The columnar cavities 30 are arranged in a stepped array in the cylinder 28. Rectangular conducting ports 29 are arranged between adjacent columnar cavities 30. The disc cavity 31 is arranged at the bottom of the columnar cavity 30 in a stepped manner. An air release valve is provided on the cylinder 28.

[0036] like Figure 1 , Figure 6 , Figure 7 As shown, the multi-stage extrusion device 10 includes a circular block 32, a telescopic rod 33, a second spring 34, a fixed ring 35, an extrusion column 36, an extrusion ring 1 37, an extrusion ring 2 38 and a soft rubber pad 39. The fixed ring 35 is fixedly arranged in the columnar cavity 30, the second spring 34 is arranged above the fixed ring 35 and connected to the fixed ring 35, the circular block 32 is arranged above the second spring 34 and connected to the second spring 34, the telescopic rod 33 passes through the fixed ring 35 and is arranged at the bottom of the circular block 32, and the extrusion column 36 is arranged at the inner center of the cylinder 28. The extrusion column 36 is fixedly connected to the bottom of the telescopic rod 33, the extrusion ring 1 37 is slidably connected to the outer wall of the extrusion column 36, the extrusion ring 1 37 is fixedly connected to the bottom of the telescopic rod 33, the extrusion ring 2 38 is slidably connected to the outer wall of the extrusion ring 1 37, the extrusion ring 2 38 is fixedly connected to the bottom of the telescopic rod 33, and the soft rubber pad 39 is arranged at the bottom of the extrusion column 36, the extrusion ring 1 37 and the extrusion ring 2 38. The size of the soft rubber pad 39 is adapted to the bottom of the extrusion column 36, the extrusion ring 1 37 and the extrusion ring 2 38.

[0037] like Figure 1 , Figure 8 , Fig. 9 As shown, the adjustable supporting clamping device 6 includes a cylindrical barrel 40, a cylindrical barrel 41, an arc block 42, a screw rod 43 and a movable column 44. The cylindrical barrel 40 is arranged at the top of the chassis 1, the cylindrical barrel 41 is arranged at the top of the cylindrical barrel 40, the bottom of the cylindrical barrel 40 is provided with a movable groove, the bottom of the cylindrical barrel 41 is provided with a slide groove 45, and the two sides of the slide groove 45 are symmetrically arrayed with heat conduction holes 46. The screw rod 43 passes through one side of the cylindrical barrel 41 and is engaged and rotatably connected with the cylindrical barrel 41. The screw rod 43 is arranged in the slide groove 45, and the movable column 44 is symmetrically arranged on the screw rod 43. The arc block 42 is arranged at the top of the movable column 44; the thread of the screw rod 43 is divided into two sections, and the directions of the two sections of the thread are opposite.

[0038] like Figure 1 , Fig. 9 , Fig.10As shown, the self-adjusting drying device 7 includes a heater 47, a support column 48, a fixed block 49, a lifting block 50, a moving block 51, a clamping block 52 and a rotating rod 53. The fixed block 49 is fixedly arranged at the inner bottom of the columnar barrel 40, the lifting blocks 50 are symmetrically arranged on both sides of the fixed block 49, the moving block 51 is fixedly arranged at the bottom of the moving column 44, the clamping block 52 is arranged at the bottom of the moving block 51, the fixed block 49 and the lifting block 50 are rotatably connected by the rotating rod 53, the moving block 51 and the lifting block 50 are rotatably connected by the rotating rod 53, the support column 48 is arranged at the top of the lifting block 50, and the heater 47 is arranged at the top of the support column 48.

[0039] like Figure 1 , Fig.11 , Fig.12 As shown, the uniform glue coating device 8 includes a fixed column 54, a rotating plate 55, a second motor 56, a glue storage box 57, a pressure nozzle 58, an extrusion plate 59, a third spring 60, a pressing plate 61 and a movable column 62, wherein the fixed column 54 is arranged on the chassis 1, the rotating plate 55 is rotatably arranged on the fixed column 54, the second motor 56 is arranged at the bottom of the rotating plate 55, the glue storage box 57 is arranged on the transmission end of the second motor 56, the pressure nozzle 58 array is arranged at the bottom of the glue storage box 57, the movable column 62 passes through the top of the glue storage box 57 and is slidably connected to the glue storage box 57, the movable column 62 is symmetrically arranged, the extrusion plate 59 is arranged at the bottom of the movable column 62, the third spring 60 is sleeved on the outer wall of the movable column 62, the third spring 60 is connected to the glue storage box 57, the pressing plate 61 is arranged at the top of the movable column 62 and is connected to the third spring 60; the glue storage box 57 is provided with a glue injection hole.

[0040] like Figure 1 , Fig.12 As shown, the glue coating range adjustment device 9 includes a square box 63, a blocking block 64, a scraper strip 65 and a second screw rod 66. The square box 63 is arranged on the glue storage box 57. A rectangular opening is arranged at the bottom of the square box 63. The second screw rod 66 passes through one side of the square box 63 and is engaged and rotatably connected with the square box 63. The second screw rod 66 is symmetrically arranged. The blocking block 64 is arranged on the second screw rod 66. The scraper strip 65 is symmetrically arranged at the bottom of the square box 63.

[0041] When in use, first add glue into the glue storage box 57, then put the crucible cover into the columnar tube 2 41, then rotate the screw rod 1 43, the screw rod 1 43 drives the moving columns 44 at both ends to move toward the middle, and the moving columns 44 drives the arc block 42 to move toward the middle until the arc block 42 is tightly pressed against the crucible cover, thereby fixing the crucible cover. At the same time, the moving columns 44 drive the moving blocks 51 and the card blocks 52 to move toward the middle along the moving groove, and the moving blocks 51 drive the rotating rods 53 on both sides of the lifting block 50 to rotate, so that the rotating rods 53 drive the lifting blocks 50 to move upward and gradually gather toward the center, and the lifting blocks 50 drive the supporting columns 48 and the heater 47 to move upward and gradually gather toward the center, thereby automatically adjusting the position of the heater 47 according to the size of the crucible cover, changing the heating range, and achieving more uniform heating of the crucible cover; after the crucible cover is fixed, the rotating plate 55 is rotated counterclockwise by ninety degrees, so that the rotating plate 55 drives the uniform glue coating device 8 and the glue coating range adjustment device The device 9 is placed just above the crucible cover, and the scraper 65 is in contact with the surface of the crucible cover. Then, the glue coating range is adjusted according to the size of the crucible cover. The screw rod 2 66 only needs to be rotated. The screw rod 2 66 drives the blocking block 64 to move from both ends to the center. When the blocking block 64 moves toward the center, it will gradually block the pressure nozzle 58, thereby adjusting the glue coating range. After the adjustment is completed, the pressing plate 61 is pressed, and the pressing plate 61 drives the movable column 62 and the extrusion plate 59 to move downward, and the spring 3 60 is forced to shrink. The squeezing plate 59 pushes the glue inside the glue storage box 57 to be sprayed out from the unblocked pressure nozzle 58, and the glue is evenly sprayed on the crucible cover. Then the motor 2 56 is started, and the motor 2 56 drives the glue storage box 57 and the square box 63 below to rotate together, and the square box 63 drives the scraper to rotate, so that the glue on the surface of the crucible cover is evenly applied. After the glue is applied, the motor 2 56 is turned off, and the rotating plate 55 is rotated clockwise by 90 degrees to reset, and then the seed crystal is evenly placed on the glue;Finally, the bubbles between the seed crystal and the crucible cover are removed, and the electric telescopic rod 13 is started, so that the electric telescopic rod 13 drives the automatic air supply device 12, the step-by-step air circulation device 11 and the multi-stage extrusion device 10 to move downward to the lowest point. At this time, the soft rubber pad 39 is still a distance away from the crucible cover. Then, the motor 27 is started, and the motor 27 drives the handle 26 to rotate. The handle 26 drives the arc ring 24, the connecting rod 25 and the piston 23 to reciprocate left and right. When the piston 23 moves to the left, suction is generated on the limit ball 21 in the air inlet pipe 18 and the air outlet pipe 19, and the limit ball 21 in the air inlet pipe 18 is When the piston 23 moves to the left, the spring 1 22 is forced to contract, and the external air is sucked into the connecting box 15, but the limiting ball 21 in the air outlet pipe 19 cannot move due to the limit of the limiting ring 20. When the piston 23 moves to the right, a thrust is generated on the limiting balls 21 in the air inlet pipe 18 and the air outlet pipe 19, and the limiting ball 21 in the air outlet pipe 19 moves downward. The spring 1 22 is forced to contract, and the internal air is pushed into the cylinder 28, but the limiting ball 21 in the air inlet pipe 18 cannot move due to the limit of the air inlet pipe 18. The air is continuously pushed into the cylinder 28, and the air first pushes the uppermost circular block 32 downward. The circular block 32 drives the telescopic rod 33 and the squeezing column 36 to move downward, the spring 2 34 is forced to shrink, and the squeezing column 36 drives the soft rubber pad 39 to squeeze the seed crystal at the center of the crucible cover to remove the bubbles between the seed crystal at the center and the crucible cover. When the squeezing column 36 drops to the lowest point, the circular block 32 moves to the bottom of the uppermost rectangular conduction port 29, and then the subsequent air will enter the uppermost rectangular conduction port 29, and then push the middle circular block 32 to move downward, the circular block 32 drives the telescopic rod 33 and the squeezing ring 1 37 to move downward, the spring 2 34 is forced to shrink, and the squeezing ring 1 37 drives the soft rubber pad 39 to squeeze the seed crystal at the center of the crucible cover to remove the bubbles between the seed crystal at the center and the crucible cover. The pad 39 squeezes the seed crystal outside the center of the crucible cover to remove the bubbles between the seed crystal outside the center and the crucible cover, and so on, until the squeezing ring 2 38 drives the soft rubber pad 39 to squeeze the seed crystal on the outermost layer of the crucible cover to remove the bubbles between the outermost seed crystal and the crucible cover. After the bubbles are removed, the heater 47 is started, and the heat reaches the bottom of the crucible cover from the heat conduction hole 46. Through heat transfer, the glue is dried, so that the seed crystal and the crucible cover are more firmly bonded. After drying, the heater 47 is turned off, the air release valve on the cylinder 28 is opened, and the electric telescopic rod 13 is reset. ;

[0042] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0043] The present invention and its embodiments are described above, and such description is not restrictive. The drawings show only one embodiment of the present invention, and the actual structure is not limited thereto. In short, if ordinary technicians in the field are inspired by it, without departing from the purpose of the invention, they can design a structure and embodiment similar to the technical solution without creativity, which should belong to the protection scope of the present invention.

Claims

1. A silicon carbide seed crystal pasting device, characterized in that: The invention comprises a chassis (1), a uniform step-by-step exhaust mechanism (2), a uniform self-adjusting drying mechanism (3) and a uniform automatic gluing mechanism (4), wherein the chassis (1) is provided with a support frame (5), the uniform self-adjusting drying mechanism (3) is arranged on the chassis (1), the uniform automatic gluing mechanism (4) is arranged on the chassis (1), the uniform step-by-step exhaust mechanism (2) is fixedly arranged on the support frame (5), the uniform step-by-step exhaust mechanism (2) is arranged directly above the uniform self-adjusting drying mechanism (3), the uniform self-adjusting drying mechanism (3) comprises an adjustable support clamping device (6) and a self-adjusting drying device (7), the self-adjusting drying device (7) is arranged in the adjustable support clamping device (6), and the uniform automatic gluing mechanism (4) is arranged on the chassis (1). 4) comprises a uniform glue coating device (8) and a glue coating range adjustment device (9), wherein the glue coating range adjustment device (9) is arranged on the uniform glue coating device (8), the uniform step-by-step exhaust mechanism (2) comprises a multi-stage extrusion device (10), an air step-by-step circulation device (11) and an automatic air supply device (12), wherein the air step-by-step circulation device (11) is arranged at the bottom of the automatic air supply device (12), and the multi-stage extrusion device (10) is arranged in the air step-by-step circulation device (11), an electric telescopic rod (13) is arranged on the inner wall of the top of the support frame (5), and a connecting plate (14) is arranged on the movable end of the electric telescopic rod (13), and the automatic air supply device (12) comprises a connecting box (15), a rectangular box (16), a connecting pipe (17), and a connecting tube (18). (17), an air inlet pipe (18), an air outlet pipe (19), a limiting ring (20), a limiting ball (21), a spring (22), a piston (23), an arc ring (24), a connecting rod (25), a turning handle (26) and a motor (27), wherein the connecting box (15) is arranged at the bottom of the connecting plate (14), the connecting pipe (17) is arranged on the connecting box (15), the rectangular box (16) is arranged on the connecting pipe (17), the air inlet pipe (18) is arranged on the connecting box (15), the air outlet pipe (19) is arranged at the bottom of the connecting box (15), the air inlet pipe (18) and the air outlet pipe (19) are both provided with limiting rings (20), the spring (22) is arranged in the air inlet pipe (18) and the air outlet pipe (19), the A limiting ball (21) is arranged in the air inlet pipe (18) and the air outlet pipe (19), the limiting ball (21) is connected to a spring (22), the motor (27) is arranged on the inner wall of the rectangular box (16), the turning handle (26) is arranged on the transmission end of the motor (27), the piston (23) is movably arranged in the connecting pipe (17), the connecting rod (25) is arranged on the piston (23), the arc ring (24) is arranged on the end surface of the connecting rod (25), the arc ring (24) is connected to the turning handle (26), the step-by-step air circulation device (11) comprises a cylinder (28), a rectangular conducting port (29), a columnar cavity (30) and a disc cavity (31), the cylinder (28) is arranged at the bottom of the air outlet pipe (19),The columnar cavities (30) are arranged in a stepped array in the cylinder (28), and a rectangular conducting opening (29) is provided between adjacent columnar cavities (30). The disc cavity (31) is arranged in a stepped manner at the bottom of the columnar cavity (30). The multi-stage extrusion device (10) comprises a circular block (32), a telescopic rod (33), a second spring (34), a fixing ring (35), an extrusion column (36), an extrusion ring one (37), an extrusion ring two (38) and a soft rubber pad (39). The fixing ring (35) is fixedly arranged in the columnar cavity (30), the second spring (34) is arranged above the fixing ring (35) and connected to the fixing ring (35), the circular block (32) is arranged above the second spring (34) and connected to the second spring (34), and the telescopic rod (33) penetrates The fixing ring (35) is arranged at the bottom of the circular block (32); the extrusion column (36) is arranged at the inner center of the cylinder (28); the extrusion column (36) is fixedly connected to the bottom of the telescopic rod (33); the extrusion ring 1 (37) is slidably connected to the outer wall of the extrusion column (36); the extrusion ring 1 (37) is fixedly connected to the bottom of the telescopic rod (33); the extrusion ring 2 (38) is slidably connected to the outer wall of the extrusion ring 1 (37); the extrusion ring 2 (38) is fixedly connected to the bottom of the telescopic rod (33); the soft rubber pad (39) is arranged at the bottom of the extrusion column (36), the extrusion ring 1 (37) and the extrusion ring 2 (38); the size of the soft rubber pad (39) is adapted to the bottom of the extrusion column (36), the extrusion ring 1 (37) and the extrusion ring 2 (38).

2. The silicon carbide seed crystal pasting device according to claim 1, characterized in that: The adjustable supporting and clamping device (6) comprises a columnar tube (40), a columnar tube (41), an arc block (42), a screw rod (43) and a movable column (44), wherein the columnar tube (40) is arranged at the top of the chassis (1), the columnar tube (41) is arranged at the top of the columnar tube (40), the bottom of the columnar tube (40) is provided with a movable groove, the bottom of the columnar tube (41) is provided with a slide groove (45), and the two sides of the slide groove (45) are symmetrically arrayed with heat conduction holes (46), the screw rod (43) passes through one side of the columnar tube (41) and is engaged and rotatably connected with the columnar tube (41), the screw rod (43) is arranged in the slide groove (45), the movable column (44) is symmetrically arranged on the screw rod (43), and the arc block (42) is arranged at the top of the movable column (44).

3. The silicon carbide seed crystal pasting device according to claim 2, characterized in that: The self-adjusting drying device (7) comprises a heater (47), a support column (48), a fixed block (49), a lifting block (50), a moving block (51), a clamping block (52) and a rotating rod (53); the fixed block (49) is fixedly arranged at the inner bottom of the columnar barrel (40); the lifting blocks (50) are symmetrically arranged in an array on both sides of the fixed block (49); the moving block (51) is fixedly arranged at the bottom of the moving column (44); the clamping block (52) is arranged at the bottom of the moving block (51); the fixed block (49) and the lifting block (50) are rotatably connected via the rotating rod (53); the moving block (51) and the lifting block (50) are rotatably connected via the rotating rod (53); the support column (48) is arranged at the top of the lifting block (50); and the heater (47) is arranged at the top of the support column (48).

4. The silicon carbide seed crystal pasting device according to claim 3, characterized in that: The uniform glue coating device (8) comprises a fixed column (54), a rotating plate (55), a second motor (56), a glue storage box (57), a pressure nozzle (58), an extrusion plate (59), a third spring (60), a pressing plate (61) and a movable column (62), wherein the fixed column (54) is arranged on the chassis (1), the rotating plate (55) is rotatably arranged on the fixed column (54), the second motor (56) is arranged at the bottom of the rotating plate (55), and the glue storage box (57) is arranged at the transmission end of the second motor (56). The pressure nozzle (58) array is arranged at the bottom of the glue storage box (57), the movable column (62) passes through the top of the glue storage box (57) and is slidably connected to the glue storage box (57), the movable column (62) is symmetrically arranged, the extrusion plate (59) is arranged at the bottom of the movable column (62), the spring three (60) is sleeved on the outer wall of the movable column (62), the spring three (60) is connected to the glue storage box (57), and the pressing plate (61) is arranged at the top of the movable column (62) and is connected to the spring three (60).

5. The silicon carbide seed crystal pasting device according to claim 4, characterized in that: The glue coating range adjustment device (9) comprises a square box (63), a blocking block (64), a scraper strip (65) and a second screw rod (66); the square box (63) is arranged on the glue storage box (57); a rectangular opening is arranged at the bottom of the square box (63); the second screw rod (66) passes through one side of the square box (63) and is engaged and rotatably connected with the square box (63); the second screw rod (66) is symmetrically arranged; the blocking block (64) is arranged on the second screw rod (66); and the scraper strip (65) is symmetrically arranged at the bottom of the square box (63).

6. The silicon carbide seed crystal pasting device according to claim 5, characterized in that: The thread of the screw rod 1 (43) is divided into two sections, and the directions of the two sections of threads are opposite.

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