Substrate bearing structure

Abstract

A substrate supporting structure includes: a body having a first surface and a second surface opposite to each other; at least one opening formed through the body and connecting the first surface and the second surface, and having at least one corner; at least one first support member, arranged on the body and adjacent to the corner; at least one second support member, arranged on the body and adjacent to the corner, and spaced from the first support member; and at least one third support member, arranged on the body and located at the corner, and spaced from the second support member.

Description

Technical Field

[0001] The invention relates to a substrate bearing structure, and in particular to a bearing structure for a small-sized substrate. Background Art

[0002] After laser drilling, the dielectric material of the existing semiconductor substrate will produce residual glue in the hole, at the bottom of the hole and on the surface. In order to prevent the residual glue from affecting the subsequent copper plating and electroplating performance, the semiconductor substrate will be cleaned in a plasma cleaning device. The existing plasma cleaning equipment adopts the form of placing the substrate vertically into the cavity, and the treatment for fixing the vertically placed substrate has upper and lower rope type, frame type, clamp hanging type, etc., generally based on the maximum substrate size.

[0003] As a glue removal device, the mechanism of plasma cleaning equipment needs to have a certain degree of bite amount and uniformity of the dielectric material. Before the substrate is put into production, a small-sized substrate that can reflect the position of the substrate needs to be used to test the bite amount and uniformity of the bite. However, in the above-mentioned conventional fixture form, it is difficult to fix and accurately test the relative position of the substrate for the bite amount and uniformity of the small-sized substrate. In addition, the splint fixture is mostly a single-piece clamp, which has a high cost of use, and is more difficult to clamp and fix for thin substrates, and there is often a problem of plastic deformation of the substrate due to clamping.

[0004] Therefore, how to overcome the various problems of the above-mentioned prior art has become a topic that needs to be solved urgently. Summary of the invention

[0005] In view of the various deficiencies of the above-mentioned prior art, the present invention provides a substrate supporting structure, comprising: a main body, having a first surface and a second surface opposite to each other; at least one opening, which is formed through the main body and connects the first surface and the second surface, and has at least one corner; at least one first support member, which is arranged on the main body and adjacent to the corner; at least one second support member, which is arranged on the main body and adjacent to the corner, and is spaced apart from the first support member; and at least one third support member, which is arranged on the main body and located at the corner, and is spaced apart from the second support member.

[0006] As in the aforementioned substrate supporting structure, the body is extended along a first axis, a second axis and a third axis which are perpendicular to each other, and the opening is through along the third axis.

[0007] As in the aforementioned substrate supporting structure, the first supporting member, the second supporting member and the third supporting member have the same thickness along the third axis.

[0008] As in the aforementioned substrate supporting structure, the thicknesses of the first support member, the second support member and the third support member along the third axis are different.

[0009] As in the aforementioned substrate supporting structure, the extension directions of the first supporting member and the second supporting member are respectively oblique to the first axis and the second axis.

[0010] As in the aforementioned substrate supporting structure, the first supporting member, the second supporting member and the third supporting member are staggered with each other.

[0011] As in the aforementioned substrate supporting structure, the first supporting member and the second supporting member are in the shape of long strips, and the third supporting member is in the shape of a triangle.

[0012] As in the aforementioned substrate supporting structure, the first supporting member and the third supporting member are flush with the first surface, and the second supporting member is flush with the second surface.

[0013] As in the aforementioned substrate supporting structure, the second supporting member is located between the first supporting member and the third supporting member.

[0014] As in the aforementioned substrate supporting structure, a channel having a plurality of bending points is formed between the first supporting member, the second supporting member and the third supporting member.

[0015] In summary, the above-mentioned design of the substrate supporting structure of the present invention can be effectively used in plasma cleaning equipment for vertically placed substrates, and can also be used in plasma cleaning equipment for horizontally placed substrates and various horizontal production stations for the test of the amount and uniformity of small-sized substrates, such as horizontal etching lines, various pre-treatment lines (such as browning, micro-etching, etc.). The substrate supporting structure of the present invention can achieve the purpose of supporting the substrate and avoiding the generation of clamping marks or dents on the corners or sides of the substrate due to clamping, and can be applied to a variety of situations, such as the test substrate for the amount and uniformity of the 100x100 mm bite, and the removal of residual adhesive on the surface of a finished or semi-finished substrate with a size of 100x100 mm. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall top surface of the substrate supporting structure of the present invention.

[0017] Figure 2 It is a partial top view of the substrate supporting structure of the present invention.

[0018] Figure 3 It is a partial bottom view of the substrate supporting structure of the present invention.

[0019] Figure 4 for Figure 2 Schematic diagram of the cross section along the AA section line.

[0020] Figure 5 This is a top view of the application of the substrate supporting structure of the present invention.

[0021] Figure 6This is an application bottom view of the substrate supporting structure of the present invention.

[0022] Main component symbols

[0023] 1. Substrate bearing structure

[0024] 10 body

[0025] 10a First surface

[0026] 10b Second surface

[0027] 11 Opening

[0028] 111 Corner

[0029] 12. First support member

[0030] 13. Second support member

[0031] 14 Third support member

[0032] 2 substrate

[0033] C Channel

[0034] X1 First axis

[0035] X2 Second axis

[0036] X3 third axis. DETAILED DESCRIPTION

[0037] The following describes the implementation of the present invention through specific embodiments. Those skilled in the art can easily understand other advantages and technical effects of the present invention from the contents disclosed in this specification.

[0038] It should be noted that the structures, proportions, sizes, etc. shown in the attached drawings of this specification are only used to match the contents disclosed in the specification for the understanding and reading of those skilled in the art, and are not used to limit the limiting conditions for the implementation of the present invention, so they have no substantial technical significance. Any modification of the structure, change of the proportion relationship or adjustment of the size, without affecting the technical effects and purposes that can be achieved by the present invention, should still fall within the scope of the technical contents disclosed in the present invention. At the same time, the terms such as "first", "second", "third", "at least one" and the like cited in this specification are only for the convenience of description, and are not used to limit the scope of the implementation of the present invention. The change or adjustment of their relative relationship should also be regarded as the scope of the implementation of the present invention without substantially changing the technical contents.

[0039] See also Figures 1 to 4The substrate supporting structure 1 of the present invention includes a body 10 , at least one opening 11 , at least one first supporting member 12 , at least one second supporting member 13 and at least one third supporting member 14 .

[0040] The main body 10 is extended along a first axis X1, a second axis X2 and a third axis X3 which are perpendicular to each other, and is roughly a square plate, and has a first surface 10a and a second surface 10b opposite to each other, wherein the first surface 10a and the second surface 10b are defined by extending along the first axis X1 and the second axis X2, and the thickness of the main body 10 is defined by the third axis X3.

[0041] The opening 11 is formed along the third axis X3 through the body 10 and connects the first surface 10a and the second surface 10b, and has at least one corner 111. In this embodiment, the opening 11 is square and has four corners 111, but the present invention is not limited thereto. In addition, the number of the openings 11 on the body 10 can be 9, but the present invention is not limited thereto.

[0042] The first support member 12 is in the shape of a strip and is disposed on the body 10 and adjacent to the corner 111. Its extension direction is oblique to the first axis X1 and the second axis X2, respectively, and is flush with the first surface 10a. In one embodiment, the angle between the two opposite ends of the first support member 12 and the body 10 can be 45 degrees, but the present invention is not limited thereto.

[0043] The second support member 13 is in the shape of a strip, and is disposed on the body 10 and adjacent to the corner 111. Its extension direction is oblique to the first axis X1 and the second axis X2, and is flush with the second surface 10b, and is spaced apart from the first support member 12. In addition, the second support member 13 is located between the first support member 12 and the third support member 14, and can be parallel to the first support member 12. In one embodiment, the angle between the two opposite ends of the second support member 13 and the body 10 can be 45 degrees, but the present invention is not limited thereto.

[0044] The third support member 14 is triangular in shape, disposed on the body 10 and located at the corner 111 , flush with the first surface 10 a , and spaced apart from the second support member 13 .

[0045] In this embodiment, the first support member 12, the second support member 13 and the third support member 14 are staggered with each other, for example, along Figure 4 The first support member 12, the second support member 13 and the third support member 14 are staggered and equidistant from each other in the horizontal direction, and are also staggered from each other along the third axis X3. In other embodiments, the first support member 12, the second support member 13 and the third support member 14 may also be staggered but not equidistant from each other, and the present invention is not limited thereto.

[0046] In this embodiment, the thickness of the first support member 12, the second support member 13 and the third support member 14 along the third axis X3 are the same, and the thickness can be equal to, less than or greater than half of the overall thickness of the body 10, but the present invention is not limited thereto, and the thickness of the first support member 12, the second support member 13 and the third support member 14 along the third axis X3 can also be different. The thickness of the first support member 12, the second support member 13 and the third support member 14 of the present invention can be designed according to the thickness of the substrate 2 used later to determine the clamping force of the first support member 12, the second support member 13 and the third support member 14 on the substrate 2.

[0047] Since the first support member 12 , the second support member 13 and the third support member 14 are offset from each other, a channel C having a plurality of bending points can be formed between the first support member 12 , the second support member 13 and the third support member 14 .

[0048] In this embodiment, the number of the first support member 12, the second support member 13 and the third support member 14 in each opening 11 can be four respectively, so as to correspond to the four corners 111 of the opening 11 respectively, but the present invention is not limited thereto. If the opening 11 is a triangle with three corners 111, the number of the first support member 12, the second support member 13 and the third support member 14 is three respectively. The shape of the opening 11 and the number of the first support member 12, the second support member 13 and the third support member 14 can be designed according to the requirements, and the present invention is not limited thereto.

[0049] In one embodiment, the body 10 , the first support member 12 , the second support member 13 and the third support member 14 in the substrate supporting structure of the present invention may be integrally formed, but the present invention is not limited thereto.

[0050] See also Figure 5 and Figure 6, the substrate supporting structure 1 of the present invention can be used to fix a substrate 2 (e.g., a small-sized substrate of 100 x 100 mm). A corner of the substrate 2 is inserted into the channel C, and is limited by the first support member 12, the second support member 13, and the third support member 14 to achieve the purpose of fixing the substrate 2. The third support member 14 can prevent the substrate 2 from being too thin and causing the substrate 2 to be suspended after being placed on the first support member 12, thereby reducing the risk of the substrate 2 being creased and scrapped during the process. The second support member 13 can prevent the risk of the substrate 2 falling during the horizontal or vertical process. In this embodiment, the shape of the substrate 2 matches or is slightly smaller than the cross-section of the opening 11, so that the four corners of the substrate 2 are limited by different first support members 12, second support members 13, and third support members 14. The above embodiment is described by taking the four corners of the substrate 2 being limited by the third support member 14 as an example, but the present invention is not limited to this. In other embodiments, the four corners of the substrate 2 may not be limited by the third support member 14 (ie, not contacting the third support member 14 ), but only limited by the first support member 12 and the second support member 13 , depending on the size of the substrate 2 .

[0051] In summary, the above-mentioned design of the substrate supporting structure of the present invention can be effectively used in plasma cleaning equipment for vertically placed substrates, and can also be used in plasma cleaning equipment for horizontally placed substrates and various horizontal production stations for the test of the amount and uniformity of small-sized substrates, such as horizontal etching lines, various pre-treatment lines (such as browning, micro-etching, etc.). The substrate supporting structure of the present invention can achieve the purpose of supporting the substrate and avoiding the generation of clamping marks or dents on the corners or sides of the substrate due to clamping, and can be applied to a variety of situations, such as the test substrate for the amount and uniformity of the 100x100 mm bite, and the removal of residual adhesive on the surface of a finished or semi-finished substrate with a size of 100x100 mm.

[0052] The above embodiments are only used to illustrate the principles and technical effects of the present invention, and are not used to limit the present invention. Those skilled in the art may modify the above embodiments without violating the concept and scope of the present invention. Therefore, the scope of protection of the present invention should be as listed in the claims.

Claims

1. A substrate bearing structure, comprising: A body having a first surface and a second surface opposite to each other; At least one opening is formed through the body and communicates with the first surface and the second surface, and has at least one corner; At least one first support member, disposed on the body and adjacent to the corner; at least one second support member, disposed on the body and adjacent to the corner and spaced apart from the first support member; and At least one third support member is disposed on the body and located at the corner and is spaced apart from the second support member. The body is formed by extending along a first axis, a second axis and a third axis which are perpendicular to each other, and the opening is connected along the third axis. The extension directions of the first support member and the second support member are respectively oblique to the first axis and the second axis. The first support member, the second support member and the third support member are staggered with each other. The first support member and the third support member are flush with the first surface and protrude toward the second surface, and the second support member is flush with the second surface and protrudes toward the first surface. Wherein, a channel with a plurality of bending points is formed between the first support member, the second support member and the third support member.

2. The substrate supporting structure according to claim 1, wherein: The first support member, the second support member and the third support member have the same thickness along the third axis.

3. The substrate supporting structure according to claim 1, wherein: The first support member, the second support member and the third support member have different thicknesses along the third axis.

4. The substrate supporting structure according to claim 1, wherein: The first support member and the second support member are in the shape of long strips, and the third support member is in the shape of a triangle.

5. The substrate supporting structure according to claim 1, wherein: The second supporting member is located between the first supporting member and the third supporting member.

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