A method for preparing a ceramic matrix composite material

Abstract

This invention discloses a method for preparing ceramic matrix composite materials, comprising the following steps: 1. Placing the target material in a water-cooled copper crucible in a vacuum chamber, and placing the preform above the target material; 2. Heating the preform with an electron beam; 3. Evaporating the target material with an electron beam, and preparing a structurally and functionally integrated ceramic matrix and coating on the preform. This invention offers high efficiency and a short manufacturing cycle; the electron beam enhances gas-phase penetration, resulting in a high-density composite material; the preparation temperature and atmosphere do not damage the fibers, resulting in a composite material with good mechanical properties; the preform is not limited and can be made of carbon fiber, carbide fiber, oxide fiber, etc., and can be in various forms such as fiber felt, two-dimensional, and three-dimensional; the ceramic matrix is ​​not limited and can be one or more ceramic matrices such as carbon, carbide, oxide, boride, and silicide; the ceramic matrix has strong design flexibility, enabling the preparation of structurally and functionally integrated multiphase ceramic matrices and coatings.

Description

Technical Field

[0001] This invention belongs to the field of materials science and technology, and specifically relates to a method for preparing ceramic matrix composite materials. Background Technology

[0002] Ceramic matrix composites possess excellent properties such as low density, high strength, high toughness, high temperature resistance, and ablation resistance, making them a strategic emerging material that has risen with the development of aerospace technology. Currently, methods for preparing ceramic matrix composites include: hot pressing (HP), spark plasma sintering (SPS), reactive hot pressing (RHP), pressureless sintering (PS), precursor impregnation pyrolysis (PIP), reactive melt infiltration (RMI), chemical vapor infiltration (CVI), and slurry infiltration (SI).

[0003] Reference 1 (Gui Kaixuan. Preparation and Performance Study of ZrB2-based Nanoscale Ultra-high Temperature Ceramic Composites. Master's Thesis in Engineering. Harbin Institute of Technology. 2013.7) prepared carbon fiber reinforced ZrB2-SiC nanoscale ultra-high temperature ceramic materials using nanopowder and a low-temperature multi-step sintering method. Reference 2 (Zhang Zhaoting. Preparation and Performance Study of ZrB2-based Ultra-high Temperature Ceramics Containing Highly Conductive Graphite Fibers. Master's Thesis. Harbin Institute of Technology. 2014.6) prepared highly conductive graphite fiber reinforced ZrB2-based ultra-high temperature ceramic materials using the HP method. Reference 3 (Lin Jia. Microstructure and Performance Study of 3Y-ZrO2 Fiber Toughened ZrB2-based Ultra-high Temperature Ceramic Materials. Doctoral Dissertation in Engineering. Harbin Institute of Technology. 2013.6) prepared ZrO2 fiber toughened ZrB2-based ultra-high temperature ceramic composites using the HP method. Due to limitations in the preparation process, sintering methods are generally only used for the preparation of two-dimensional composite materials.

[0004] The invention patent with publication number CN101503305A uses alternating CVI silicon carbide and boron carbide matrices and a three-layer silicon carbide coating by chemical vapor deposition to prepare a self-healing silicon carbide ceramic matrix composite material. The invention patent with publication number CN103265303A uses the CVI method to prepare a wave-transparent fiber-toughened boron nitride ceramic matrix wave-transparent composite material. The CVI method has a long preparation cycle and high cost. Due to the "bottleneck effect," the material density is low (generally with 10%–15% porosity), thus affecting the mechanical properties and oxidation resistance of the ceramic matrix composite material.

[0005] The invention patent with publication number CN102093055A uses a PIP method with titanium dichlorodicyclopentadiene and hyperbranched polycarbosilane to prepare silicon carbide / titanium carbide multiphase ceramics. Reference 4 (Zhou Yanchun, Zhang Weigang, Zheng Liya. C...) fMicrostructure characterization of ZrC-ZrB2-SiC-C ultra-high temperature ceramic composites. Progress in Materials in China, 2012, 31(8):21-24) and reference 5 (Xie Changming. Research on integral antioxidant ultra-high temperature composites. Master's thesis. Graduate School of Chinese Academy of Sciences. 2012.3) reported the preparation of C using PCS, ZrC precursor and ZrB2 precursor PIP method. f / ZrC-ZrB2-SiC-C ultra-high temperature ceramic composites. The PIP method for preparing ceramic matrix composites under pressureless or low-pressure conditions is prone to matrix cracking due to the combined effects of solvent and low-molecular-weight component volatilization and small structural groups decomposition; the precursor pyrolysis yield is low, the composite material preparation cycle is long, and the material density is low (generally exhibiting 10%–15% porosity); oxides in the zirconium-based precursor pyrolysis products may react with carbon fibers, causing fiber damage and a decrease in the mechanical properties of the composite material.

[0006] To improve the density and preparation efficiency of ceramic matrix composites, a variety of methods were also adopted.

[0007] Reference 6 (Jiang Jinming.C) f Preparation and Performance Study of ZrC-SiC Ultra-High Temperature Resistant Ceramic Matrix Composites. Master's Thesis in Engineering. Graduate School of National University of Defense Technology. 2012.11) ZrC-SiC was prepared using a PIP combined with RMI method. f A novel ultra-high temperature resistant ceramic matrix composite material of ZrC-SiC. Patent CN101774806A uses Si to introduce BC4 particles into a porous C / C or C / SiC composite material, followed by RMI (Regenerative Mechanical Intervention) to introduce Si, thus preparing a SiB4-modified C / SiC composite material. Patent CN102515870A uses the PIP (Polymerization Injection) method to introduce BC4 and C into a C / SiC composite material, followed by in-situ RMI to prepare a C / SiC-ZrB2-ZrC composite material. Patent CN103992115A uses the PIP method to introduce C into a C / SiC composite material or directly uses a C / C preform, followed by in-situ RMI to prepare a C / SiC-HfC ultra-high temperature ceramic matrix composite material. The invention patent with publication number CN104628407A describes a process where a porous Al2O3 / SiC preform is impregnated with a slurry using the SI method, followed by Al or Al-Si alloy melt infiltration using the RMI method to prepare an Al2O3 fiber-reinforced MAX phase ceramic matrix composite. During the RMI in-situ reaction, the melt, such as Si or Si alloy, inevitably reacts with the carbon fibers, causing fiber erosion and a decrease in the composite's mechanical properties. Simultaneously, a certain amount of low-melting-point melt remains in the composite, leading to a reduction in its creep resistance.

[0008] Patent CN101786897A first uses the PIP method to prepare fiber-reinforced carbon-based composite materials, and then uses the CVI method to prepare C / C-BN composite materials. Patent CN103804006A first uses the PIP method to prepare loose Si3N4 / Si3N4 composite materials with high porosity, and then uses the CVI method to prepare a dense Si3N4 matrix and coating. Patent CN105016759A first uses the PIP method to prepare C / SiC composite materials on a carbon fiber preform with a PyC interface, and then uses the SPS method to rapidly prepare C / SiC composite materials from multiple single-layer composite materials. Combining multiple methods can improve the preparation efficiency of ceramic matrix composites compared to using a single method. However, due to the limitations of PIP or CVI processes, the material density is low (generally with a porosity of 10% to 15%), which affects the mechanical properties and oxidation resistance of ceramic matrix composites.

[0009] Currently, some new methods for preparing ceramic matrix composites have emerged.

[0010] The invention patent with publication number CN103833370A firstly uses a three-dimensional printing (3DP) method to directly form components through bonding between particles, and then prepares stable Si3N4 / SiC composite ceramics through sintering and PIP methods. Reference 7 (Feng Liyun, Yin Xiaowei, Li Xiangming. Preparation of Si3N4-SiC multiphase ceramics by three-dimensional printing combined with chemical vapor infiltration. Aerospace Manufacturing Technology, 2012, 4: 62-65) uses three-dimensional printing (3DP) technology to form porous Si3N4 ceramics, and then uses the CVI method to prepare Si3N4-SiC multiphase ceramics. Due to limitations in the preparation process, this method is generally only used for the preparation of multiphase ceramics or two-dimensional composite materials reinforced by particles, whiskers, or short fibers. Summary of the Invention

[0011] The technical problem to be solved by this invention is to provide a method for preparing ceramic matrix composite materials, addressing the shortcomings of the prior art. This method is highly efficient, has a short manufacturing cycle, and saves more than 50% of the time compared to traditional CVI or PIP methods.

[0012] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is: a method for preparing ceramic matrix composite materials, characterized by comprising the following steps:

[0013] Step 1: Place the target material corresponding to the ceramic matrix to be prepared in a water-cooled copper crucible in a vacuum chamber, and place the preform above the target material;

[0014] Step 2: Heat the preform described in Step 1 using an electron beam;

[0015] Step 3: The target material described in Step 1 is heated and evaporated using an electron beam to prepare a ceramic matrix and coating with integrated structure and function on the preform, thereby obtaining a ceramic matrix composite material.

[0016] The method for preparing a ceramic matrix composite material described above is characterized in that the vacuum degree of the vacuum chamber in step one is not greater than 5 × 10⁻⁶. -2 Pa.

[0017] The method for preparing a ceramic matrix composite material described above is characterized in that the distance between the upper surface of the target material and the lower surface of the preform in step one is 150mm to 550mm.

[0018] The above-mentioned method for preparing a ceramic matrix composite material is characterized in that the preform in step one includes a carbon fiber preform, a carbide fiber preform, or an oxide fiber preform, and the form of the preform includes fiber felt, two-dimensional or three-dimensional.

[0019] The method for preparing a ceramic matrix composite material described above is characterized in that the target material in step one is a single-phase target material or a composite target material.

[0020] The method for preparing a ceramic matrix composite material described above is characterized in that, when the ceramic matrix to be prepared in step one contains carbides, a metal target is used, and the partial pressure of the carbon atmosphere in the vacuum chamber is controlled to achieve the preparation of the carbide-containing ceramic.

[0021] The method for preparing a ceramic matrix composite material described above is characterized in that, in step two, the electron beam power for heating the preform is 10kW to 60kW, and the heating temperature of the preform is set according to the type of preform and the type of target material.

[0022] The method for preparing a ceramic matrix composite material described above is characterized in that, in step three, the electron beam power of the heated target is 10kW to 60kW, and the heating and evaporation time is 60min to 600min.

[0023] Compared with the prior art, the present invention has the following advantages:

[0024] 1. The method of the present invention has high efficiency and short manufacturing cycle in preparing ceramic matrix composites, saving more than 50% of the time compared with the traditional CVI or PIP methods.

[0025] 2. The vacuum degree of the preparation environment in the method of the present invention is no greater than 5 × 10⁻⁶. -2Pa, the vaporized gaseous atoms or atomic groups have a large free path and can diffuse well between single-filament fiber bundles. During electron beam heating, the penetration of gaseous atoms or atomic groups can be enhanced, resulting in high density of the prepared composite material.

[0026] 3. The preform of the present invention has a low temperature in the vacuum chamber, generally below 1000°C, so the preparation temperature does not damage the fiber. The atmosphere of the vacuum chamber is generally gaseous atoms or atomic groups of the ceramic matrix, so the preparation atmosphere does not damage the fiber.

[0027] 4. This invention utilizes gaseous atoms or atomic groups in a ceramic matrix with a density not exceeding 5 × 10⁻⁶. -2 The fiber preforms can be permeated and deposited in a vacuum environment of Pa, so there are no restrictions on the type of fiber preforms. They can be made of carbon fiber, carbide fiber, oxide fiber, etc., and can be made of various forms such as fiber felt, two-dimensional, and three-dimensional preforms.

[0028] 5. The method of the present invention uses a high-temperature electron beam that can melt and evaporate any existing material. Therefore, there are no restrictions on the ceramic matrix, and one or more of carbon, carbides, oxides, borides, silicides, etc. can be used as the ceramic matrix.

[0029] 6. The preparation process of the present invention can be designed with strong performance. For non-meltable carbides, the carbides can be added to other meltable ceramics to form composite targets. Alternatively, corresponding metal targets can be used to control the partial pressure of carbon atmosphere in the vacuum chamber to achieve gaseous reaction synthesis of carbides and prepare ceramic matrices containing carbides.

[0030] 7. The ceramic matrix of this invention offers high design flexibility, enabling the preparation of one-phase or multi-phase ceramic matrices containing carbon, carbides, oxides, borides, silicides, etc., on preforms such as carbon fibers, carbide fibers, and oxide fibers. The ceramic phases within the matrix are uniformly mixed and achieve atomic or cluster-level composite formation, resulting in excellent matrix performance. Depending on requirements, multiphase, gradient ceramic matrices and their coatings can be prepared, enabling the fabrication of structurally and functionally integrated ceramic matrix composites.

[0031] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description

[0032] Figure 1 Scanning electron microscope (SEM) image of the permeation between monofilaments at a depth of 4 mm in the ZrC-ZrB2-SiC ceramic matrix composite material prepared in Example 1 of this invention.

[0033] Figure 2 The Si3N prepared in Example 2 of this invention 4f Scanning electron microscope (SEM) image of the permeation between monofilaments at a depth of 4 mm in Si3N4 ceramic matrix composite material.

[0034] Figure 3 3Y-ZrO prepared in Example 3 of this invention 2f Scanning electron microscope image of the permeation between monofilaments at a depth of 4 mm in the / 5Y-ZrO2-MoSi2 ceramic matrix composite material.

[0035] Figure 4 C prepared in Example 4 of this invention f Scanning electron microscope (SEM) image of the permeation between monofilaments at a depth of 4 mm in the / 5Y-ZrO2-MoSi2-ZrB2 ceramic matrix composite material.

[0036] Figure 5 The SiC prepared in Example 5 of this invention W / Scanning electron microscope images of the fracture surfaces of TaC ceramic matrix composites and coatings. Detailed Implementation

[0037] Example 1

[0038] This embodiment prepares a ZrC-ZrB2-SiC ceramic matrix composite material, and the specific preparation method includes the following steps:

[0039] Step 1: Fix a silicon carbide fiber felt preform measuring 150mm × 150mm × 4mm onto a rotating workpiece holder in the center of the vacuum chamber. Place a ZrSi target (Zr:Si molar ratio 4:1) with a diameter of Φ68.5mm and a height of 50mm and a ZrB2 target in a water-cooled copper crucible at the bottom of the vacuum chamber. The distance between the upper plane of the target and the lower surface of the carbon fiber felt preform is 550mm. The vacuum level of the vacuum chamber should not exceed 5 × 10⁻⁶. -2 Pa;

[0040] Step 2: The silicon carbide fiber felt preform is heated by an electron beam with a focusing diameter of Φ30mm. The electron beam power is 10kW, the heating temperature of the fiber felt preform is 900℃, and the rotational angular velocity of the fiber felt preform is 1 revolution per minute (1rpm).

[0041] Step 3: A ZrSi target is heated and evaporated using an electron beam with a focusing diameter of Φ15mm and an electron beam power of 30kW. Simultaneously, a ZrB2 target is heated and evaporated using an electron beam with a focusing diameter of Φ15mm and an electron beam power of 60kW. The vacuum pressure is 4×10⁻⁶. -2Pa, C2H2 gas flow rate of 100 mL / min, ZrC-ZrB2-SiC multiphase ceramic matrix and coating were prepared on silicon carbide fiber felt preform at 900℃ and 1 rpm in step two to obtain ZrC-ZrB2-SiC ceramic matrix composite material; electron beam heating evaporation time of 600 min, ZrC-ZrB2-SiC multiphase ceramic coating thickness of 800 μm, and ZrC:ZrB2:SiC molar ratio of 3:1:1 in ZrC-ZrB2-SiC multiphase ceramic matrix and coating.

[0042] Figure 1 This is a scanning electron microscope image of the ZrC-ZrB2-SiC composite ceramic between monofilaments on the upper surface of the fiber felt (4 mm from the lower deposition surface, i.e., 4 mm of vapor phase penetration depth) in this embodiment. It can be seen that even after a penetration distance of 4 mm, the penetration between monofilaments is still good, and the prepared composite material has high density.

[0043] Example 2

[0044] This embodiment prepares Si3N 4f The preparation method of the Si3N4 ceramic matrix composite material includes the following steps:

[0045] Step 1: Fix a 2D silicon nitride fiber preform with dimensions of Φ800mm×4mm on a rotating workpiece holder in the middle of the vacuum chamber. Place a Si target with a diameter of Φ68.5mm and a height of 50mm in a water-cooled copper crucible at the bottom of the vacuum chamber. The distance between the upper plane of the target and the lower surface of the preform is 150mm. The vacuum degree of the vacuum chamber is no greater than 5×10⁻⁶. -2 Pa;

[0046] Step 2: The silicon nitride fiber preform is heated by an electron beam with a focusing diameter of Φ15mm, the electron beam power is 60kW, the heating temperature of the carbon fiber felt preform is 800℃, and the rotational angular velocity of the silicon nitride fiber preform is 1 revolution per minute (1 rpm).

[0047] Step 3: The Si target material is heated and evaporated using an electron beam with a focusing diameter of Φ30mm. The electron beam power is 10kW, and the vacuum pressure is 4×10⁻⁶. -2 Pa, N2 gas flow rate of 100 mL / min, Si3N was prepared on a silicon nitride fiber preform at 800 °C and 1 rpm in step two. 4f / Si3N4 ceramic matrix composite material and coating; electron beam heating evaporation time 60 min, Si3N4 ceramic coating thickness 50 μm.

[0048] Figure 2This is a scanning electron microscope image of the permeation of Si3N4 ceramic between the monofilaments on the upper surface of the Si3N4 fiber preform (4 mm from the lower deposition surface, i.e., a vapor phase penetration depth of 4 mm). As can be seen from the image, the permeation between the monofilaments is still good after a 4 mm permeation distance, and the prepared composite material has high density.

[0049] Example 3

[0050] This embodiment prepares 3Y-ZrO 2f The preparation method of the / 5Y-ZrO2-MoSi2 multiphase ceramic matrix composite material includes the following steps:

[0051] Step 1: Fix a three-dimensional 3Y-ZrO2 fiber preform measuring 150mm × 150mm × 4mm onto a rotating workpiece holder in the center of the vacuum chamber. Place a 5Y-ZrO2 target (Φ68.5mm in diameter and 50mm in height) and a MoSi2 target in a water-cooled copper crucible at the bottom of the vacuum chamber. The distance between the upper plane of the target and the lower surface of the 3Y-ZrO2 fiber preform should be 400mm. The vacuum level of the vacuum chamber should not exceed 5 × 10⁻⁶. -2 Pa;

[0052] Step 2: The 3Y-ZrO2 fiber preform is heated by an electron beam with a focusing diameter of Φ30mm. The electron beam power is 10kW, the heating temperature of the 3Y-ZrO2 fiber preform is 900℃, and the rotational angular velocity of the 3Y-ZrO2 fiber preform is 1 revolution per minute (1rpm).

[0053] Step 3: A 5Y-ZrO2 target is evaporated using an electron beam with a focusing diameter of Φ15mm and an electron beam power of 50kW. Simultaneously, a MoSi2 target is evaporated using an electron beam with a focusing diameter of Φ15mm and an electron beam power of 40kW. The vacuum pressure is 4×10⁻⁶. -2 Pa, 3Y-ZrO2 fiber preform prepared at 900℃ and 1rpm in step two. 2f / 5Y-ZrO2-MoSi2 multiphase ceramic matrix and coating; electron beam heating evaporation time 300 min, 5Y-ZrO2-MoSi2 multiphase ceramic coating thickness 700 μm; 5Y-ZrO2:MoSi2 molar ratio in 5Y-ZrO2-MoSi2 multiphase ceramic matrix and coating is 4:1.

[0054] Figure 3 This is a scanning electron microscope (SEM) image of the infiltration of 5Y-ZrO2-MoSi2 composite ceramic between monofilaments on the upper surface of the 3Y-ZrO2 fiber preform (4 mm from the lower deposition surface, with a vapor phase penetration depth of 4 mm). As can be seen from the image, the infiltration between monofilaments remains good even after a 4 mm infiltration distance, and the prepared composite material has high density.

[0055] Example 4

[0056] This embodiment prepares C f The preparation method of the / 5Y-ZrO2-MoSi2-ZrB2 multiphase ceramic matrix composite material includes the following steps:

[0057] Step 1: Fix a 3D carbon fiber preform with dimensions of Φ500mm×4mm onto a rotating workpiece holder in the center of the vacuum chamber. Place a 5Y-ZrO2-ZrB2 target (5Y-ZrO2:ZrB2 molar ratio of 9:1) with a diameter of Φ68.5mm and a height of 50mm and a MoSi2 target in a water-cooled copper crucible at the bottom of the vacuum chamber. The distance between the upper plane of the target and the lower surface of the 3D carbon fiber preform is 300mm. The vacuum level of the vacuum chamber should not exceed 5×10⁻⁶. -2 Pa;

[0058] Step 2: The 3D carbon fiber preform is heated by an electron beam with a focusing diameter of Φ20mm, an electron beam power of 30kW, a heating temperature of 900℃, and a rotational angular velocity of 1 revolution per minute (1rpm).

[0059] Step 3: 5Y-ZrO2-ZrB2 target material is evaporated using an electron beam with a focusing diameter of Φ15mm and an electron beam power of 60kW. Simultaneously, MoSi2 target material is evaporated using an electron beam with a focusing diameter of Φ15mm and an electron beam power of 40kW. The vacuum pressure is 4×10⁻⁶. -2 Pa, in step two, C was prepared on a 3D carbon fiber preform at 900°C and 1 rpm. f / 5Y-ZrO2-MoSi2-ZrB2 multiphase ceramic matrix and coating; electron beam heating evaporation time 400 min, 5Y-ZrO2-MoSi2-ZrB2 multiphase ceramic coating thickness 900 μm; 5Y-ZrO2:MoSi2:ZrB2 molar ratio in 5Y-ZrO2-MoSi2-ZrB2 multiphase ceramic matrix and coating is 75:20:5.

[0060] Figure 4 This is a scanning electron microscope (SEM) image of the infiltration of 5Y-ZrO2-MoSi2-ZrB2 composite ceramic between monofilaments on the upper surface of the carbon fiber preform (4 mm from the lower surface of the deposition, i.e., 4 mm EBPVI vapor phase penetration depth). As can be seen from the image, the infiltration between monofilaments is still good after a 4 mm infiltration distance, and the prepared composite material has high density.

[0061] Example 5

[0062] This embodiment prepares SiC W / TaC ceramic matrix composites and coatings, the specific preparation method includes the following steps:

[0063] Step 1: Fix a SiC whisker preform with dimensions of 400mm × 400mm × 4mm on a rotating workpiece holder in the middle of the vacuum chamber. Place a Ta target with a diameter of Φ68.5mm and a height of 50mm in a water-cooled copper crucible at the bottom of the vacuum chamber. The distance between the upper plane of the target and the plane of the preform is 400mm. The vacuum degree of the vacuum chamber is no greater than 5 × 10⁻⁶. -2 Pa;

[0064] Step 2: The SiC whisker preform is heated by an electron beam with a focusing diameter of Φ20mm, an electron beam power of 30kW, a heating temperature of 950℃, and a rotational angular velocity of 1 revolution per minute (1 rpm).

[0065] Step 3: The Ta target material is heated and evaporated using an electron beam with a focusing diameter of Φ15mm, an electron beam power of 50kW, and a vacuum pressure of 1.5×10⁻⁶. -2 Pa, C2H2 gas flow rate of 100 mL / min, SiC is prepared on the SiC whisker preform at 950℃ and 1 rpm as described in step two. W / TaC ceramic matrix composite material and coating; electron beam heating evaporation time 150 min, TaC ceramic coating thickness 200 μm.

[0066] Figure 5 It is SiC W Scanning electron microscope images of the fracture surfaces of the TaC ceramic matrix composite material and its coating show that the prepared composite material has high density and the coating is dense.

[0067] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Any simple modifications, alterations, or equivalent changes made to the above embodiments based on the technical essence of the present invention shall still fall within the protection scope of the present invention.

Claims

1. A method for preparing a ceramic matrix composite material, characterized in that, Includes the following steps: Step 1: Place the target material corresponding to the ceramic matrix to be prepared in a water-cooled copper crucible in a vacuum chamber, and place the fiber preform above the target material; the vacuum degree of the vacuum chamber is no greater than 5 × 10⁻⁶. -2 Pa; the distance between the upper surface of the target material and the lower surface of the fiber preform is 150mm to 550mm; Step 2: Heat the fiber preform described in Step 1 using an electron beam; the electron beam power for heating the fiber preform is 10kW to 60kW, and the heating temperature of the fiber preform is set according to the type of fiber preform and the type of target material. Step 3: The target material described in Step 1 is heated and evaporated using an electron beam to prepare a structurally and functionally integrated ceramic matrix and coating on the fiber preform, thereby obtaining a ceramic matrix composite material; The electron beam power of the heated target is 10kW to 60kW, and the heating and evaporation time is 60min to 600min.

2. The method for preparing a ceramic matrix composite material according to claim 1, characterized in that, The fiber preform mentioned in step one includes carbon fiber preform, carbide fiber preform, or oxide fiber preform, and the fiber preform can be two-dimensional or three-dimensional.

3. The method for preparing a ceramic matrix composite material according to claim 1, characterized in that, The target material mentioned in step one is a single-phase target material or a composite target material.

4. The method for preparing a ceramic matrix composite material according to claim 1, characterized in that, When the ceramic matrix to be prepared in step one contains carbides, a metal target is used, and the partial pressure of the carbon atmosphere in the vacuum chamber is controlled to prepare the carbide-containing ceramic.

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