An integrated vacuum system

Abstract

This invention discloses an integrated vacuum system, characterized by: a housing, a first vacuum pump and a second vacuum pump disposed within the housing; the top of the second vacuum pump is connected to the bottom of the first vacuum pump via a mounting plate; a crossbeam is provided on each side of the housing, and the two sides of the first vacuum pump are connected to the crossbeams via support feet; a connection port is provided on the mounting plate, and the air inlet at the top of the second vacuum pump is connected to the air outlet at the bottom of the first vacuum pump via the connection port. This invention improves the convenience of installation and debugging, and also improves the vacuum effect.

Description

Technical Field

[0001] This invention relates to a vacuum pump system, and more particularly to an integrated vacuum system. Background Technology

[0002] In many vacuum applications, a single vacuum pump cannot fully meet the actual process requirements. Different types of vacuum pumps have completely different cost-effective ultimate vacuum or pumping capabilities. Different types of vacuum pumps also have different adaptability to different process media. Furthermore, different vacuum processes require various auxiliary systems to ensure that the vacuum pump or vacuum pump unit can operate stably and reliably.

[0003] For example, in the prior art, application number 202210470415.X, patent title: A highly integrated vacuum integrated system, has the following shortcomings:

[0004] 1. The bottom fixing method is adopted. However, due to the limitations of the enclosure, the installation and disassembly are carried out by installing or disassembling each vacuum pump individually, which is very inconvenient. At the same time, the installation of the vacuum pump is also limited by the enclosure, making the installation inconvenient.

[0005] 2. The two vacuum pumps used are a Roots vacuum pump and a dry vacuum pump. The vacuum pumping effect of these two types of vacuum pumps is not very good, and they are difficult to meet the needs of applications requiring higher vacuum levels.

[0006] 3. Dust or working impurities can easily accumulate at the connection between the two vacuum pumps, resulting in a high maintenance rate and short service life for the vacuum pumps;

[0007] 4. The outlet and inlet positions of the two vacuum pumps need to be adjusted or aligned. Connecting them with pipes will increase the space occupied, resulting in a larger equipment size and a larger space footprint. Summary of the Invention

[0008] The purpose of this invention is to provide an integrated vacuum system. By using this structure, the ease of disassembly and assembly of the vacuum pump is improved, its service life is extended, and vacuum efficiency and vacuum effect are also improved.

[0009] To achieve the above objectives, the technical solution adopted by the present invention is: an integrated vacuum system, including a housing, a first vacuum pump and a second vacuum pump disposed in the housing, the top of the second vacuum pump being connected to the bottom of the first vacuum pump via a mounting plate, and a crossbeam being provided on each side of the housing, and the two sides of the first vacuum pump being connected to the crossbeam via support feet.

[0010] The mounting plate is provided with a connection port, through which the air inlet at the top of the second vacuum pump is connected to the air outlet at the bottom of the first vacuum pump.

[0011] In the above technical solution, at least one outwardly extending support foot is provided on each side of the first vacuum pump, and each support foot is respectively located directly above the corresponding crossbeam;

[0012] An elastic buffer component is provided between the support leg and the crossbeam, and the support leg is connected to the corresponding crossbeam by bolts passing through the elastic buffer component.

[0013] And / or, the first vacuum pump and the second vacuum pump are disposed between the two crossbeams on both sides.

[0014] In the above technical solution, the outer wall of the mounting plate is provided with at least one nitrogen purging inlet and at least one nitrogen purging outlet, which are connected to the connection port;

[0015] The chamber is equipped with a purging mechanism, which includes a purging plate. The purging plate has a purging channel and a return channel, which are respectively connected to a nitrogen source and a return source.

[0016] The nitrogen purging inlet is connected to the purging channel via a pipeline, and the nitrogen purging outlet is connected to the return channel via a pipeline;

[0017] And / or, the nitrogen source delivers nitrogen into the connection port through the purge channel, and returns it to the return source from the nitrogen purge outlet and the return channel.

[0018] In the above technical solution, the housing includes a support frame and an outer cover installed on the outside of the support frame;

[0019] The support includes two sets of uprights spaced apart and two sets of crossbeams spaced apart. The crossbeams are positioned between the two sets of uprights. The two ends of one crossbeam are connected to one side of each of the two sets of uprights, and the two ends of the other crossbeam are connected to the other side of each of the two sets of uprights. The first vacuum pump and the second vacuum pump are positioned between the two sets of uprights and the two sets of crossbeams. The outer cover is positioned outside the first vacuum pump, the second vacuum pump, and the support. The distance between the two sets of uprights is greater than the length of the first vacuum pump and the second vacuum pump, and the distance between the two crossbeams is greater than the width of the second vacuum pump.

[0020] And / or, a base plate is provided directly below each of the crossbeams, and the two ends of the base plate are respectively connected to the uprights on both sides;

[0021] And / or, each of the base plates is further provided with at least one upright plate, the two ends of which are perpendicularly connected to the base plate and the crossbeam respectively;

[0022] And / or, at least one bottom support plate is further provided below the second vacuum pump, the two ends of the bottom support plate being connected to the bottom plates on both sides respectively, and the bottom of the second vacuum pump being close to or abutting against the bottom support plate.

[0023] In the above technical solution, the first vacuum pump is a two-stage Roots vacuum pump. The first vacuum pump includes a first Roots pump body with a first Roots pump body cavity inside, two first connecting shafts that are rotatably installed in the first Roots pump body cavity and are parallel to each other, and a first driving component that drives the two first connecting shafts to rotate simultaneously. The first Roots pump body cavity is provided with two meshing first Roots rotor components, and each first Roots rotor component is respectively installed on one of the first connecting shafts.

[0024] The first Roots pump body cavity is provided with a first partition plate, which divides the first Roots pump body cavity into two independent first-stage first Roots pump body cavities and second-stage first Roots pump body cavities.

[0025] The first Roots rotor assembly includes a first-stage first Roots rotor assembly and a second-stage first Roots rotor assembly arranged at intervals. The two first-stage first Roots rotor assemblies mesh with each other in the first-stage first Roots pump body cavity, and the two second-stage first Roots rotor assemblies mesh with each other in the second-stage first Roots pump body cavity.

[0026] And / or, the first Roots pump body is provided with a first air inlet, a first air outlet and a first connecting air passage. The first air inlet connects the first-stage first Roots pump body cavity to the top outer wall of the first Roots pump body. The first connecting air passage connects the bottom of the first-stage first Roots pump body cavity to the top of the second-stage first Roots pump body cavity. The first air outlet connects the bottom of the second-stage first Roots pump body cavity to the bottom outer wall of the first Roots pump body, and the bottom of the first air outlet connects to the top of the connecting air passage.

[0027] And / or, when the first-stage first Roots rotor component rotates, the fluid entering through the first air inlet is sent into the cavity of the second-stage first Roots pump via the first connecting air passage; when the second-stage first Roots rotor component rotates, the fluid sent into the cavity of the second-stage first Roots pump via the first connecting air passage is sent into the connecting port.

[0028] In the above technical solution, the second vacuum pump is a hybrid vacuum pump, which includes a second pump body, a second drive component and at least two parallel second coupling shafts. The second pump body is provided with a second independent Roots pump body cavity and a second screw pump body cavity. Multiple second coupling shafts are rotatably installed in the second pump body, and the second drive component simultaneously drives multiple second coupling shafts to rotate simultaneously.

[0029] The second screw pump body cavity is provided with two meshing screw rotor components, and each screw rotor component is respectively mounted on a second coupling shaft;

[0030] The second Roots pump body cavity is provided with at least one second Roots rotor assembly, the second Roots rotor assembly includes two meshing second Roots rotor parts, each of the second Roots rotor parts is respectively mounted on a second coupling shaft;

[0031] And / or, the second pump body is provided with a second air inlet, a second air outlet and a second connecting air passage, the second air inlet connecting the second Roots pump body cavity to the top outer wall of the second pump body, and the top of the second air inlet connecting the bottom of the connecting air passage; the second connecting air passage connecting the second Roots pump body cavity to the second screw pump body cavity, and the second air outlet connecting the second screw pump body cavity to the outer wall of the first pump body;

[0032] And / or, when the second Roots rotor assembly rotates, the fluid fed into the second air inlet through the connection port is fed into the second connecting air passage, and when the screw rotor assembly rotates, the fluid fed into the second screw pump cavity through the second connecting air passage is discharged from the second air outlet.

[0033] In the above technical solution, the second Roots pump body cavity includes an independent first-stage second Roots pump body cavity and a second-stage second Roots pump body cavity, and the second Roots rotor assembly consists of two sets, which are respectively installed in the first-stage second Roots pump body cavity and the second-stage second Roots pump body cavity;

[0034] The second air inlet is connected to the top of the first-stage second Roots pump body cavity, and the second pump body is provided with a central connecting air passage that connects the bottom of the first-stage second Roots pump body cavity and the top of the second-stage second Roots pump body cavity.

[0035] In the above technical solution, there are two second connecting shafts, and the middle part of the two second connecting shafts is rotatably connected to the second pump body;

[0036] Two spaced-apart second Roots rotor components are mounted on each of the second coupling shafts;

[0037] And / or, there is a gap between the second coupling end away from the second Roots pump body cavity and the second screw pump body cavity, one end of the screw rotor component is disposed near the end face of the second screw pump body cavity on the side of the second Roots pump body cavity, and there is a gap between the other end of the screw rotor component and the other end of the second screw pump body cavity.

[0038] In the above technical solution, there are three second connecting shafts, including a middle connecting shaft, a first side connecting shaft and a second side connecting shaft respectively arranged parallel to both sides of the middle connecting shaft;

[0039] The two screw rotor components are respectively mounted on the intermediate connecting shaft and the first side connecting shaft;

[0040] The second Roots rotor assembly includes a first-stage second Roots rotor assembly and a second-stage second Roots rotor assembly. The first-stage second Roots rotor assembly is disposed within the first-stage second Roots pump body cavity, and the second-stage second Roots rotor assembly is disposed within the second-stage second Roots pump body cavity. The first-stage second Roots rotor assembly includes two first-stage second Roots rotor components, and the second-stage second Roots rotor assembly includes two second-stage second Roots rotor components.

[0041] The two first-stage second Roots rotor components are respectively mounted on the intermediate connecting shaft and the first side connecting shaft;

[0042] The two secondary second Roots rotor components are respectively mounted on the intermediate connecting shaft and the second side connecting shaft.

[0043] In the above technical solution, the outer wall of the second pump body is provided with a notch that communicates with the second connecting air passage, and a sealing component is installed on the second pump body to seal the notch;

[0044] And / or, a fluid handling component may be detachably installed in the second connecting air passage at the notch.

[0045] Due to the application of the above-mentioned technical solution, the present invention has the following advantages compared with the prior art:

[0046] 1. In this invention, two vacuum pumps are connected by a mounting plate, and a connection hole is provided on the mounting plate to connect the outlet and inlet of the two vacuum pumps. This eliminates the need to adjust the position of the outlets of the two vacuum pumps, reduces the distance between the two vacuum pumps, makes the entire vacuum system more flat, reduces the volume of the vacuum system, and reduces the space occupied.

[0047] 2. In this invention, the first vacuum pump is directly connected to the crossbeam of the housing via the support feet, so that the second vacuum pump is a suspended structure, which improves the convenience of installation. The two vacuum pumps can be assembled outside the housing and then directly hoisted into the housing and connected to the crossbeam, which improves the convenience of installation.

[0048] 3. In this invention, an elastic buffer component is provided between the support foot and the crossbeam, which can buffer and absorb the vibration during the operation of the vacuum pump, minimize the vibration of the housing itself, and prevent rigid collisions with the installation position of the vacuum system.

[0049] 4. The present invention is provided with a purging mechanism, which blows the connection port of the mounting plate to remove dust and other debris accumulated in the connection port, as well as some dust and other debris accumulated in the second vacuum pump, thereby extending the service life of the vacuum pump, reducing the maintenance rate, and ensuring the stability of the vacuum pump.

[0050] 5. In this invention, the first vacuum pump is a two-stage Roots vacuum pump, which has a stronger vacuuming effect, thereby improving the vacuuming effect and vacuum level of the vacuum system;

[0051] 6. In this invention, the second vacuum pump is a hybrid vacuum pump, which includes a Roots pump and a screw pump. The same drive component is used to drive both the Roots pump and the screw pump simultaneously. This reduces the number of drive components, saves energy, and lowers costs. At the same time, it can further improve the vacuuming effect and vacuum level.

[0052] 7. The mixing vacuum pump in this invention can adopt a dual-shaft structure or a tri-shaft structure. Regardless of whether it is a dual-shaft or tri-shaft structure, it can be driven by the same driving component at the same time, effectively ensuring the vacuuming effect. Attached Figure Description

[0053] Figure 1 This is a schematic diagram of the integrated vacuum system according to Embodiment 1 of the present invention;

[0054] Figure 2 This is a schematic diagram of the bottom structure of the integrated vacuum system in Embodiment 1 of the present invention;

[0055] Figure 3 This is a half-section three-dimensional structural diagram of the integrated vacuum system in Embodiment 1 of the present invention;

[0056] Figure 4 This is a schematic diagram of a half-section of the purge plate in Embodiment 1 of the present invention;

[0057] Figure 5 This is a partial cross-sectional view of the connection port of the mounting plate in Embodiment 1 of the present invention;

[0058] Figure 6 This is a cross-sectional structural schematic diagram of the first vacuum pump in Embodiment 1 of the present invention (the first Roots rotor component is not shown);

[0059] Figure 7 This is a schematic diagram of the structure of the first Roots rotor component and the first coupling shaft in Embodiment 1 of the present invention;

[0060] Figure 8 This is a schematic diagram of the end face cross-sectional structure of the first-stage Roots pump body in Embodiment 1 of the present invention;

[0061] Figure 9This is a schematic diagram of the end face cross-sectional structure of the first Roots pump body in Embodiment 1 of the present invention;

[0062] Figure 10 This is a cross-sectional view of the second-stage first Roots pump body from another perspective in Embodiment 1 of the present invention;

[0063] Figure 11 This is a schematic diagram of the structure of the second vacuum pump in one embodiment of the present invention (using a structure with two third coupling shafts);

[0064] Figure 12 yes Figure 11 A schematic diagram of the cross-sectional structure;

[0065] Figure 13 yes Figure 11 A partial enlarged view of the connection between the second coupling and the screw rotor assembly;

[0066] Figure 14 This is a schematic diagram of the gas flow in the second vacuum pump in one embodiment of the present invention (using a two-coupling structure and a double-Roots pump cavity structure);

[0067] Figure 15 This is a schematic diagram of the installation structure of the second Roots rotor component and the second coupling shaft in one embodiment of the present invention (using a two-shaft second coupling shaft structure);

[0068] Figure 16 This is a schematic diagram of the gas flow in the second vacuum pump in another embodiment of the present invention (using a two-coupling structure and a single Roots pump cavity structure);

[0069] Figure 17 This is a schematic diagram of the structure of the second vacuum pump in another embodiment of the present invention (using a three-coupling structure);

[0070] Figure 18 yes Figure 17 Top view;

[0071] Figure 19 yes Figure 17 Schematic diagram of the cross-sectional structure of AA;

[0072] Figure 20 yes Figure 18 Schematic diagram of the cross-sectional structure of the middle FF;

[0073] Figure 21 yes Figure 17 Schematic diagram of the cross-sectional structure of BB;

[0074] Figure 22 yes Figure 17 A schematic diagram of the cross-sectional structure of the C-C section;

[0075] Figure 23 yes Figure 17 Schematic diagram of the cross-sectional structure of DD;

[0076] Figure 24 yes Figure 17 A cross-sectional view of the EE structure;

[0077] Figure 25 This is a partially enlarged cross-sectional view of the second connecting air passage of the second vacuum pump in this invention.

[0078] The components include: 1. Housing; 10. Crossbeam; 11. Support leg; 12. Elastic buffer component; 13. Positioning component; 14. Outer cover; 15. Stand; 16. Control panel; 17. Switch; 18. Base plate; 19. Stand plate; 101. Bottom support plate;

[0079] 2. Mounting plate; 21. Connection port; 22. Nitrogen purging inlet; 23. Nitrogen purging outlet; 24. Purging plate; 25. Purging channel; 26. Return channel; 27. Piping;

[0080] 3. First vacuum pump; 31. First Roots pump body cavity; 310. First-stage first Roots pump body cavity; 311. Second-stage first Roots pump body cavity; 32. First Roots pump body; 321. First-stage first Roots pump body; 322. Second-stage first Roots pump body; 33. First coupling shaft; 34. First Roots rotor assembly; 340. First-stage first Roots rotor assembly; 341. Second-stage first Roots rotor assembly; 35. First partition plate; 36. First air inlet; 37. First air outlet; 38. First connecting air passage; 381. First-stage first connecting air passage; 382. Second-stage first connecting air passage;

[0081] 6. Second vacuum pump; 61. Second pump body; 62. Second drive component; 63. Second coupling; 64. Second Roots pump body cavity; 65. Second screw pump body cavity; 66. Screw rotor assembly; 67. Second Roots rotor assembly; 68. Middle connecting air passage; 69. Second partition plate;

[0082] 610. Second Roots pump body; 611. Second screw pump body; 612. Connecting components;

[0083] 621. Second motor assembly; 622. Gear;

[0084] 631. Intermediate connecting shaft; 632. First side connecting shaft; 633. Second side connecting shaft;

[0085] 641. First-stage second Roots pump body cavity; 642. Second-stage second Roots pump body cavity;

[0086] 671. First-stage second Roots rotor assembly; 672. Second-stage second Roots rotor assembly;

[0087] 681. Primary mid-airway connection; 682. Secondary mid-airway connection;

[0088] 6101, First stage second Roots pump body; 6102, Second stage second Roots pump body;

[0089] 81. Second air inlet; 82. Second air outlet; 83. Second connecting air passage; 831. Left second connecting air passage; 832. Right second connecting air passage; 833. Roots connecting passage; 834. Screw connecting passage;

[0090] 9. Sealing component; 91. Frame; 92. Sealing cover; 93. Connecting cavity; 94. Through groove. Detailed Implementation

[0091] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0092] Example 1: See Figure 1-25 As shown, an integrated vacuum system includes a housing 1, a first vacuum pump 3 and a second vacuum pump 6 disposed inside the housing 1. The top of the second vacuum pump 6 is connected to the bottom of the first vacuum pump 3 via a mounting plate 2. A crossbeam 10 is provided on each side of the housing 1, and the two sides of the first vacuum pump 3 are connected to the crossbeam 10 via support feet 11.

[0093] The mounting plate 2 is provided with a connection port 21, and the air inlet at the top of the second vacuum pump 6 is connected to the air outlet at the bottom of the first vacuum pump 3 through the connection port 21.

[0094] In this embodiment, the gas delivered by the first vacuum pump is fed into the connection port of the mounting plate, and then through the connection port to the second vacuum pump. The second vacuum pump then performs another vacuuming operation, resulting in a better vacuum effect. Alternatively, the negative pressure generated by the second vacuum pump during operation is transmitted to the first vacuum pump through the connection port. Combined with the negative pressure generated by the first vacuum pump, this results in a greater negative pressure at the inlet of the first vacuum pump, leading to a better vacuum effect. In this method, the first and second vacuum pumps are directly connected via the mounting plate. A connection port is provided on the mounting plate, with its two ends connecting to the outlet of the first vacuum pump and the inlet of the second vacuum pump, respectively. This allows for connection between the two vacuum pumps regardless of the location of the outlet or inlet, enabling a more streamlined and compact vacuum system that effectively reduces space requirements. Meanwhile, the two vacuum pumps are connected by the support feet on the side of the first vacuum pump and the crossbeam of the housing. This makes the second vacuum pump a suspended structure, and its bottom does not directly touch the bottom of the housing, which makes it easy to adjust the position and level of the two vacuum pumps.

[0095] See Figure 3 As shown, at least one outwardly extending support leg 11 is provided on each side of the first vacuum pump 3, and each support leg 11 is provided directly above the corresponding crossbeam 10; in this embodiment, two outwardly extending support legs 11 are provided on the front and rear sides of the first vacuum pump 3, and two crossbeams 10 are provided on the front and rear sides of the first vacuum pump 3 and the second vacuum pump 6, respectively.

[0096] See Figure 3 As shown, an elastic buffer component 12 is provided between the support leg 11 and the crossbeam 10, and the support leg 11 is connected to the corresponding crossbeam 10 by bolts passing through the elastic buffer component 12;

[0097] The first vacuum pump 3 and the second vacuum pump 6 are disposed between the two crossbeams 10 on both sides.

[0098] In this embodiment, the elastic buffer component is made of rubber, which plays a buffering role. When the two vacuum pumps vibrate during operation, the elastic buffer component can buffer the vibration, so that the vibration force is not transmitted to the housing as much as possible, thus preventing the housing from vibrating and preventing large vibrations between the housing and the ground or the installation position of the housing.

[0099] Furthermore, each crossbeam 10 is equipped with a positioning component 13 matching the number of corresponding elastic buffer components 12. The center of each positioning component 13 has a positioning groove penetrating its top and bottom. The elastic buffer components are placed within the positioning groove, with their tops positioned above the top of the groove. The positioning groove limits the movement of the elastic buffer components. A screw hole is provided on the crossbeam at the bottom of the positioning groove, and a through hole is provided on the support leg. A through hole is also provided on the elastic buffer component. The bottom of a bolt passes through the through hole, the through hole, and the screw hole to connect the support leg and the crossbeam, thus limiting the movement of the elastic buffer component. The diameter of the through hole on the support leg is slightly larger than the bolt diameter but smaller than the diameter of the bolt head. Simultaneously, when the elastic buffer component is used for an extended period, after being compressed and lowered to a certain position, the bottom of the support leg will rest against the positioning component, providing mechanical support and positioning.

[0100] See Figure 1-3 As shown, the housing 1 includes a support frame and an outer cover 14 installed on the outside of the support frame;

[0101] The support includes two sets of uprights 15 spaced apart and two crossbeams 10 spaced apart. The crossbeams 10 are positioned between the two sets of uprights 15. The two ends of one crossbeam 10 are connected to the front sides of the two sets of uprights 15, and the two ends of the other crossbeam 10 are connected to the rear sides of the two sets of uprights 15. The first vacuum pump 3 and the second vacuum pump 6 are positioned between the two sets of uprights 15 and the two crossbeams 10. The outer cover 14 is positioned outside the first vacuum pump 3, the second vacuum pump 6, and the support. The distance between the two uprights 15 is greater than the length of the first vacuum pump 3 and the second vacuum pump 6, and the distance between the two crossbeams 10 is greater than the width of the second vacuum pump 6.

[0102] In this embodiment, since the distance between the two uprights is greater than the length of the first and second vacuum pumps, and the width between the two crossbeams is greater than the width of the second vacuum pump, the first and second vacuum pumps, after being pre-assembled outside the housing, are directly lowered from above the support frame by hoisting. The first and second vacuum pumps are positioned between the two crossbeams and the two uprights, with the support feet on both sides facing the crossbeams. When the support feet abut against the crossbeams (each support foot abuts against its corresponding elastic buffer component), bolts are used to connect the support feet to the crossbeams. This allows for quick installation and disassembly of the first and second vacuum pumps and the support frame, without being limited by the housing size, thus improving the speed of installation, disassembly, and maintenance of the first and second vacuum pumps. After the first and second vacuum pumps and other components are installed, the outer cover is then installed outside the support frame, making installation convenient and quick. Furthermore, a control panel 16 and a switch 17 are installed on the outer cover 14, electrically connected to the first vacuum pump 3 and the second vacuum pump 6, for controlling the operation of the vacuum system.

[0103] See Figure 2 , 3 As shown, a base plate 18 is provided directly below each of the crossbeams 10, and the two ends of the base plate 18 are respectively connected to the uprights 15 on both sides.

[0104] Each of the base plates 18 is further provided with at least one upright plate 19, the two ends of which are perpendicularly connected to the base plate 18 and the crossbeam 10, respectively.

[0105] The base plate and uprights increase the overall strength of the support structure and the support strength of the crossbeams, effectively preventing deformation of the crossbeams.

[0106] See Figure 2 As shown, at least one bottom support plate 101 is provided below the second vacuum pump 3. The two ends of the bottom support plate 101 are respectively connected to the bottom plates 18 on both sides. The bottom of the second vacuum pump 3 is close to or abuts against the bottom support plate 101.

[0107] In this embodiment, a bottom support plate may or may not be provided. Preferably, due to the provision of the elastic buffer component, there is a gap between the bottom support plate and the bottom of the second vacuum pump in this embodiment. A second elastic support component is provided between the bottom support plate and the second vacuum pump. The two ends of the second elastic support component are in contact with the top surface of the bottom support plate and the bottom of the second vacuum pump, respectively. The crossbeam provides the main support for the first vacuum pump, and the addition of the bottom support plate provides auxiliary support for the second vacuum pump, thereby ensuring the installation firmness and support strength of the two vacuum pumps and the housing.

[0108] Further, see Figure 4 , 5 As shown, the outer wall of the mounting plate 2 is provided with at least one nitrogen purging inlet 22 and at least one nitrogen purging outlet 23, which are connected to the connection port 21.

[0109] The chamber is equipped with a purging mechanism, which includes a purging plate 24. The purging plate 24 is provided with a purging channel 25 and a return channel 26. The purging channel 25 and the return channel 26 are respectively connected to a nitrogen source and a return source.

[0110] The nitrogen purging inlet 22 is connected to the purging channel 25 via pipeline 27, and the nitrogen purging outlet 23 is connected to the return channel 26 via pipeline 27.

[0111] The nitrogen source delivers nitrogen into the connection port through the purging channel, and the nitrogen flows back to the return source from the nitrogen purging outlet and the return channel.

[0112] In this embodiment, the nitrogen purging inlet, nitrogen purging outlet, and connection port are connected. The nitrogen source sends nitrogen into the connection port, which can purge dust and other impurities generated during the vacuuming process from the connection port. The impurities are then blown out through the nitrogen purging outlet. At the same time, since the connection port is connected to the first and second vacuum pumps, some dust and impurities inside the first and second vacuum pumps at the connection point can also be blown away, thereby extending the service life of the two vacuum pumps and ensuring the stability of the vacuum pumps during operation (because the gaps between the rotor components in the vacuum pump are small, and the gaps between the rotor components and the inner wall of the vacuum pump are also relatively small, if there is a lot of dust or impurities, it will cause damage to the rotor components and the pump casing of the vacuum pump, resulting in poor operational stability and short service life).

[0113] Furthermore, by setting up a purge plate with purge and return channels inside, the number of nitrogen purge inlets and outlets is usually more than one, typically multiple. Therefore, the purge plate has a corresponding number of holes connected to the purge and return channels, which are then connected via pipelines to achieve synchronous nitrogen purge and synchronous return. The nitrogen source provides the nitrogen, and the return source can be a negative pressure mechanism. When nitrogen is purged into the connection port by the nitrogen source, the return source simultaneously draws away nitrogen and dust / debris under negative pressure, thereby improving cleaning efficiency and quality. Cleaning is performed when the vacuum pump is not operating. This method eliminates the need for disassembly for cleaning.

[0114] Furthermore, the first and second vacuum pumps are equipped with cooling chambers for cooling, and the purge channels and return channels on the purge plate are also cooled through the pipes and cooling chambers, thereby accelerating the cooling of the first and second vacuum pumps. More preferably, a solenoid valve can be installed on each pipe to control the connection of the corresponding pipe.

[0115] See Figure 6-10 As shown, the first vacuum pump 3 is a two-stage Roots vacuum pump. The first vacuum pump 3 includes a first Roots pump body 32 with a first Roots pump body cavity 31 inside, two first connecting shafts 33 that are rotatably installed in the first Roots pump body cavity 31 and are parallel to each other, and a first driving component (not shown in the figure) that drives the two first connecting shafts 33 to rotate simultaneously. The first Roots pump body cavity 31 is provided with two meshing first Roots rotor components 34, and each first Roots rotor component 34 is respectively installed on one of the first connecting shafts 33.

[0116] The first Roots pump body cavity 31 is provided with a first partition 35, which divides the first Roots pump body cavity 31 into two independent first-stage first Roots pump body cavities 310 and second-stage first Roots pump body cavities 311.

[0117] The first Roots rotor component 34 includes a first-stage first Roots rotor component 340 and a second-stage first Roots rotor component 341 arranged at intervals. The two first-stage first Roots rotor components 340 mesh with each other in the first-stage first Roots pump body cavity 310, and the two second-stage first Roots rotor components 341 mesh with each other in the second-stage first Roots pump body cavity 311.

[0118] The first Roots pump body 32 is provided with a first air inlet 36, a first air outlet 37 and a first connecting air passage 38. The first air inlet 36 connects the first-stage first Roots pump body cavity 310 to the top outer wall of the first Roots pump body 32. The first connecting air passage 38 connects the bottom of the first-stage first Roots pump body cavity 310 to the top of the second-stage first Roots pump body cavity 311. The first air outlet 37 connects the bottom of the second-stage first Roots pump body cavity 311 to the bottom outer wall of the first Roots pump body 32. The bottom of the first air outlet 36 is connected to the top of the connecting port 21.

[0119] When the first-stage first-roots rotor assembly 340 rotates, the fluid entering the first-stage first-roots pump body cavity 310 through the first air inlet 37 is sent to the second-stage first-roots pump body cavity 311 through the first connecting air passage 38; when the second-stage first-roots rotor assembly 341 rotates, the fluid sent into the second-stage first-roots pump body cavity 311 through the first connecting air passage 38 is sent to the connecting port 21.

[0120] In this embodiment, taking the illustrated direction as an example, the first Roots pump body 32 includes a split-structure first-stage first Roots pump body 321 and a second-stage first Roots pump body 322. The first-stage first Roots pump body cavity 310 is disposed inside the first-stage first Roots pump body 321, and its right end is connected to the right end face of the first-stage first Roots pump body 321. The second-stage first Roots pump body cavity 311 is disposed inside the second-stage first Roots pump body 322, and its left end is connected to the left end face of the second-stage first Roots pump body 322. The first partition plate 35 is disposed between the first-stage first Roots pump body 321 and the second-stage first Roots pump body 322. The top of the first air inlet 36 is connected to the top surface of the first-stage first Roots pump body 321, and the bottom of the first air inlet 36 is connected to the top left side of the first-stage first Roots pump body cavity 310. The first connecting air passage 38 includes a primary first connecting air passage 381 and a secondary first connecting air passage 382. One end of the primary first connecting air passage 381 is connected to the bottom of the primary first roots pump body cavity 310, and the other end of the primary first connecting air passage 381 is connected to the right end face of the primary first roots pump body 321. The secondary first connecting air passage 382 is arranged around the secondary first roots pump body 322 outside the secondary first roots pump body cavity 311. One end of the secondary first connecting air passage 382 is connected to the left end face of the secondary first roots pump body 322 and is positioned opposite to the right end of the primary first connecting air passage 381, and is connected to it. The other end of the secondary first connecting air passage 382 is connected to the top of the secondary first roots pump body cavity 311. The top of the first air outlet 37 is connected to the bottom right side of the secondary first roots pump body cavity 311, and the bottom of the first air outlet 37 is connected to the bottom surface of the secondary first roots pump body 322.

[0121] When the first vacuum pump is working, the two first coupling shafts rotate, one clockwise and the other counterclockwise, causing the first Roots rotor assembly mounted on them to rotate in tandem. During rotation, the gas entering the first-stage first Roots pump chamber above the first-stage first Roots rotor assembly through the first inlet is delivered below the first-stage first Roots rotor assembly, then sequentially through the first-stage first connecting gas passage and the second-stage first connecting gas passage into the second-stage first Roots pump chamber above the second-stage first Roots rotor assembly. Simultaneously, because the second-stage first Roots rotor assembly also rotates, it delivers the gas above it into the second-stage first Roots pump chamber below it, then exits through the first outlet and is delivered into the second vacuum pump through the connection port.

[0122] See Figure 11-25 As shown, the second vacuum pump 6 is a hybrid vacuum pump, which includes a second pump body 61, a second drive component 62, and at least two parallel second coupling shafts 63. The second pump body 61 has independent second Roots pump body chambers 64 and second screw pump body chambers 65. Multiple second coupling shafts 63 are rotatably installed in the second pump body 61. The second drive component 62 simultaneously drives multiple second coupling shafts 63 to rotate. The second drive component 62 is a combination of a second motor assembly 621 and a gear 622. Taking the direction shown in the figure as an example, each second coupling shaft 63 has a gear 622 at its left end. The gears on multiple second coupling shafts mesh with each other. The second motor assembly is connected to one of the gears. Thus, when one gear is driven to rotate, multiple second coupling shafts will be driven to rotate synchronously through the gears.

[0123] The second screw pump body cavity 65 is provided with two meshing screw rotor components 66, and each screw rotor component 66 is respectively mounted on a second coupling shaft 63;

[0124] The second Roots pump body cavity 64 is provided with at least one second Roots rotor assembly, the second Roots rotor assembly includes two meshing second Roots rotor parts 67, each of the second Roots rotor parts 67 is respectively mounted on a second coupling shaft 63;

[0125] The second pump body 61 is provided with a second air inlet 81, a second air outlet 82, and a second connecting air passage 83. The second air inlet 82 connects the second Roots pump body cavity 64 to the top outer wall of the second pump body 61, and the top of the second air inlet 81 connects to the bottom of the connecting port 21. The second connecting air passage 83 connects the second Roots pump body cavity 64 to the second screw pump body cavity 65, and the second air outlet 82 connects the second screw pump body cavity 65 to the outer wall of the second pump body 61.

[0126] When the second Roots rotor assembly rotates, the fluid sent from the connection port 21 to the second air inlet 81 is sent into the second connecting air passage 83. When the screw rotor component 66 rotates, the fluid sent from the second connecting air passage 83 to the second screw pump body cavity 65 is discharged from the second air outlet 82.

[0127] In this invention, the screw rotor assembly and the second Roots rotor assembly are mounted on a coupling driven by the same second drive component. The mixing pump is a combination of a Roots vacuum pump and a screw vacuum pump, with both pumps driven simultaneously by the same second drive component. Gas delivered from the first vacuum pump passes through the Roots pump, then the screw pump, and finally is discharged. This invention, by simultaneously driving the screw vacuum pump and the Roots vacuum pump within the second vacuum pump through the same second drive mechanism, results in lower energy consumption, lower cost, and smaller space requirement.

[0128] Alternatively, in this invention, since the screw pump is located at the very end of the gas flow, during the rotation of the screw pump, the pitch of the screw rotor component gradually decreases from left to right. When the screw pump is working, the rotation of the two screw rotor components generates a negative pressure on the left side. This negative pressure is applied to the Roots vacuum pump at its left end, that is, to the cavity of the second Roots pump at the left end, increasing the negative pressure in the cavity of the second Roots pump. At the same time, when the two second Roots rotor components rotate, they apply a larger negative pressure to the second air inlet, which is transmitted to the first vacuum pump through the connection port, further increasing the vacuuming effect of the first vacuum pump. Therefore, in this invention, it is equivalent to three vacuum pumps working together to form a vacuum system with excellent vacuum effect.

[0129] In this invention, the second pump body 61 includes a second roots pump body 610 and a second screw pump body 611 connected to each other. A second roots pump body cavity 64 is disposed within the second roots pump body 610, and a second screw pump body cavity 65 is disposed within the second screw pump body 611. A second air inlet 81 is disposed on the second roots pump body 610, with its top communicating with the top surface of the second roots pump body 610 and its bottom communicating with the top of the second roots pump body cavity 64. One end of the second air outlet 82 is connected to the right end of the second screw pump body cavity 65, and the other end of the second air outlet 82 is connected to the outer wall of the second screw pump body 611. The second connecting air passage 83 includes a left second connecting air passage 831 and a right second connecting air passage 832. The left second connecting air passage 831 is disposed on the second Roots pump body 610. The left end of the left second connecting air passage 831 communicates with the second Roots pump body cavity 64, and the right end of the left second connecting air passage 831 communicates with the right end face of the second Roots pump body 610. The right end of the left second connecting air passage 831 is connected to the left end of the right second connecting air passage 832. The right second connecting air passage 832 is disposed on the second screw pump body 611. One end of the right second connecting air passage 832 communicates with the left end of the second screw pump body cavity 65, and the left end of the right second connecting air passage 832 communicates with the left end face of the second screw pump body 611. The left end of the right second connecting air passage is connected to the right end of the left second connecting air passage. In this invention, when the second vacuum pump is operating, the second Roots rotor assembly rotates, drawing gas from the second inlet into the second Roots pump body cavity below the second Roots rotor assembly. The gas then passes through the left and right second connecting air passages into the second screw pump body cavity. After the screw rotor assembly rotates, the gas is discharged from the second outlet. Alternatively, the negative pressure from the rotating screw rotor assembly is transmitted to the second Roots pump body cavity via the second connecting air passage, and then, as the second Roots rotor assembly rotates, this negative pressure is transmitted to the second inlet, and finally to the first vacuum pump via the connecting port. This enables high-efficiency and high-quality vacuuming of the vacuum system.

[0130] In one embodiment, the second Roots rotor assembly is a set; therefore, the Roots pump is a single-stage Roots pump. See [link to relevant documentation]. Figure 16 The diagram shows the gas flow path. In this embodiment, the vacuum system is equivalent to four vacuum pumps. The first vacuum pump is a two-stage Roots vacuum pump, which is equivalent to two independent vacuum pumps. The second vacuum pump includes a single-stage Roots pump and a screw pump. Therefore, this vacuum system is equivalent to four vacuum pumps, resulting in a strong vacuum effect.

[0131] In another embodiment, see Figure 11-15As shown, the second Roots pump body cavity 64 includes a primary second Roots pump body cavity 641 and a secondary second Roots pump body cavity 642 that are independent of each other. The second Roots rotor assembly consists of two sets, and the two sets of second Roots rotor assemblies are respectively installed in the primary second Roots pump body cavity 641 and the secondary second Roots pump body cavity 642.

[0132] The second air inlet 81 is connected to the top of the first-stage second Roots pump body cavity 641. The second pump body 61 is provided with a central connecting air passage 68 that connects the bottom of the first-stage second Roots pump body cavity 641 to the top of the second-stage second Roots pump body cavity 642.

[0133] The second vacuum pump is a two-stage Roots pump, which has two structures. In one embodiment, the first structure is as follows: (See...) Figure 11-15 As shown, there are two second connecting shafts 63, and the middle part of the two second connecting shafts 63 is rotatably connected to the second pump body 61.

[0134] Two spaced-apart second Roots rotor components 67 are mounted on each of the second coupling shafts 63.

[0135] In this embodiment, the Roots vacuum pump is a two-stage Roots vacuum pump, which has a similar structure to the first vacuum pump. In this embodiment, the second Roots pump body 610 includes a split structure: a primary second Roots pump body 6101 and a secondary second Roots pump body 6102. The primary second Roots pump body cavity 641 is disposed within the primary second Roots pump body 6101, with its right end communicating with the right end face of the primary second Roots pump body 641. The secondary second Roots pump body cavity 6102 is disposed within the secondary second Roots pump body 6102, with its left end communicating with the left end face of the secondary second Roots pump body 6102. A second partition 69 is disposed between the primary second Roots pump body cavity 641 and the secondary second Roots pump body cavity 642. The second partition 69 is disposed between the primary second Roots pump body 6101 and the secondary second Roots pump body 6102. The top of the second air inlet 81 communicates with the top surface of the primary second Roots pump body 6101, and the bottom of the second air inlet 81 communicates with the top left side of the primary second Roots pump body cavity 641. This structure facilitates the assembly and commissioning of the two-stage Roots pump.

[0136] The central connecting airway 68 includes a primary central connecting airway 681 and a secondary central connecting airway 682. One end of the primary central connecting airway 681 is connected to the bottom of the primary second Roots pump body cavity 641, and the other end of the primary central connecting airway 681 is connected to the right end face of the primary second Roots pump body 6101. The secondary central connecting airway 682 is arranged around the secondary second Roots pump body 6102 outside the secondary second Roots pump body cavity 642. One end of the secondary central connecting airway 682 is connected to the left end face of the secondary second Roots pump body cavity 642 and is positioned opposite to the right end of the primary central connecting airway 681, and they are connected to each other. The other end of the secondary middle connecting air passage 682 is connected to the top of the secondary second Roots pump body cavity 642, the left end of the second connecting air passage 83 is connected to the bottom right side of the secondary second Roots pump body cavity 642, and the right end of the second connecting air passage 83 is connected to the left end of the second screw pump body cavity 65.

[0137] During operation, the second Roots rotor assembly inside the first-stage second Roots pump body cavity sends gas from the second air inlet to the middle connecting air passage, and then into the top of the second-stage second Roots pump body cavity. Through the second Roots rotor assembly inside, the gas is sent from the second connecting air passage into the second screw pump body cavity, and then through the screw rotor component to the second air outlet for discharge.

[0138] In this embodiment, the two sides of the middle section of the connecting shaft are rotatably connected to the left end of the first-stage second Roots pump body and the right end of the second-stage second Roots pump body via bearings. Each connecting shaft is equipped with two second Roots rotor components and one screw rotor component. The second drive mechanism includes a second motor assembly and two gears. The two gears are connected to the left ends of the two connecting shafts and mesh with each other. The second motor assembly is connected to one gear. When the second motor assembly simultaneously drives the two connecting shafts to rotate, gas can be drawn from the second inlet into the first-stage second Roots pump body cavity, then sent through the intermediate connecting air passage into the second-stage second Roots pump body cavity, then into the second screw pump body cavity, and finally discharged from the second outlet. In this embodiment, the vacuum system is equivalent to five connected vacuum pumps. The first vacuum pump is a two-stage Roots vacuum pump, equivalent to two vacuum pumps. The mixing pump includes one two-stage Roots vacuum pump and one screw vacuum pump, meaning the second vacuum pump is equivalent to three vacuum pumps. Therefore, the entire vacuum system has excellent vacuuming effect and high vacuuming quality.

[0139] In this embodiment, the two-stage Roots vacuum pump includes a split-structure first-stage second Roots pump body and a second Roots pump body, which facilitates the installation and commissioning of the internal second Roots rotor components.

[0140] Meanwhile, in this invention, there is a gap between the end of the second coupling shaft, which is away from the second Roots pump cavity, and the second screw pump cavity. One end of the screw rotor component is positioned close to the end face of the second screw pump cavity on the side of the second Roots pump cavity, and there is a gap between the other end of the screw rotor component and the other end of the second screw pump cavity. That is, the right end of the coupling shaft, the right end of the screw rotor component, and the right end of the second screw pump cavity do not contact each other. The right end of the coupling shaft is a suspended structure, and the right end of the screw rotor component is also a suspended structure. In other words, the screw rotor component is a cantilever screw rotor component. This structure facilitates adjustment during assembly, allowing for adjustment of the gap between the two screw rotor components to ensure meshing between them. The two screw rotor components do not contact each other, but there is only a micro-gap between them, preventing mutual friction and ensuring vacuum quality.

[0141] The second vacuum pump is a two-stage Roots pump, which has two structures. In another embodiment, the second structure is as follows: See Figure 17-25 As shown, there are three second connecting shafts 63, including a middle connecting shaft 631, a first side connecting shaft 632 and a second side connecting shaft 633 respectively arranged in parallel on both sides of the middle connecting shaft 631.

[0142] The two screw rotor components 66 are respectively mounted on the intermediate connecting shaft 631 and the first side connecting shaft 632;

[0143] The second Roots rotor assembly includes a first-stage second Roots rotor assembly and a second-stage second Roots rotor assembly. The first-stage second Roots rotor assembly is disposed within the first-stage second Roots pump body cavity 641, and the second-stage second Roots rotor assembly is disposed within the second-stage second Roots pump body cavity 642. The first-stage second Roots rotor assembly includes two first-stage second Roots rotor components 671, and the second-stage second Roots rotor assembly includes two second-stage second Roots rotor components 672.

[0144] The two first-stage second Roots rotor components 671 are respectively mounted on the intermediate connecting shaft 631 and the first side connecting shaft 632;

[0145] The two secondary second Roots rotor components 672 are respectively mounted on the intermediate connecting shaft 631 and the second side connecting shaft 633.

[0146] In this embodiment, the second pump body 61 includes a second roots pump body 610, a second screw pump body 611, and two sets of connecting components 612. A primary second roots pump body cavity 641 and a secondary second roots pump body cavity 642 are respectively disposed within the second roots pump body 610. The left end of the primary second roots pump body cavity 641 communicates with the left end face of the second roots pump body 610, and the right end of the secondary second roots pump body cavity 642 communicates with the right end face of the second roots pump body 6410. The two sets of connecting components 612 are located at both ends of the second roots pump body 610, sealing the ends of the primary second roots pump body cavity 641 and the secondary second roots pump body cavity 642, and also serving as rotational support for the corresponding second coupling shaft. The intermediate coupling shaft passes through the primary and secondary second roots pump body cavities. The connecting components have holes for mounting the second coupling shaft, facilitating its insertion into the second roots pump body and the second screw pump body. The three second connecting shafts are set on the same plane, and a gear is installed on the left end of each second connecting shaft. The three gears mesh with each other. The second motor assembly is connected to a gear. In this way, when the middle connecting shaft rotates, the first side connecting shaft and the second side connecting shaft rotate in the same direction, while the middle connecting shaft rotates in the opposite direction to the first side connecting shaft and the second side connecting shaft.

[0147] Taking the counterclockwise rotation of the intermediate connecting shaft as an example, the first and second side connecting shafts will rotate clockwise. Therefore, in this embodiment, the bottom of the intermediate connecting air passage connects the bottom cavity of the first-stage second Roots pump body and the bottom of the second-stage second Roots pump body cavity. The second connecting air passage connects the top of the second-stage second Roots pump body cavity and the left end of the second screw pump body cavity. During this process, the two first-stage second Roots rotor components send the gas from the second inlet downward into the intermediate connecting air passage, and then into the second-stage second Roots pump body cavity below the two second-stage second Roots rotor components. Since three second connecting shafts are used, the two second-stage second Roots rotor components will send the gas upward into the upper part of the second-stage second Roots pump body cavity, and then into the second screw pump body cavity through the second connecting air passage. Finally, the screw rotor components discharge the gas from the second outlet.

[0148] In this embodiment, the first-stage second Roots pump body cavity and the second-stage second Roots pump body cavity are located within the same second Roots pump body. This ensures a unified machining datum and higher machining accuracy when processing the two Roots pump body cavities. Furthermore, only the intermediate connecting shaft has two Roots rotor components and one screw rotor component installed; the first side connecting shaft only requires one Roots rotor component and one screw rotor component, and the second side connecting shaft only requires one Roots rotor component. This simplifies assembly and debugging, ensuring assembly accuracy and quality, and further guaranteeing vacuuming effect and stability.

[0149] In this invention, the second vacuum pump employs a direct connection and combination of a Roots vacuum pump and a screw vacuum pump, driven by the same second drive mechanism. This allows the Roots vacuum pump to first pressurize the screw vacuum pump, improving vacuuming efficiency and effectiveness. Simultaneously, the Roots pump in the second vacuum pump is a two-stage Roots vacuum pump, ensuring compression at each stage. This prevents heat from concentrating at the second outlet of the screw pump, effectively preventing excessively high exhaust temperatures that could lead to coking and blockage of the hydrocarbon mixture, ensuring smooth vacuuming, preventing screw pump damage, reducing maintenance rates, and extending service life. Furthermore, the two-stage Roots vacuum pump in the second vacuum pump effectively prevents dust and other impurities from entering the screw pump, preventing powder buildup and blockages, further reducing maintenance rates and extending service life. Moreover, since the first vacuum pump also uses a two-stage Roots vacuum pump, it further separates dust and other impurities. A purging mechanism then purifies the connection port, minimizing dust buildup and further reducing maintenance rates and extending service life.

[0150] Also see Figure 17 , 20 As shown in Figure 25, the second vacuum pump adopts a triaxial structure. The outer wall of the second pump body 61 is provided with a notch that communicates with the second connecting air passage 83. A sealing component 9 is installed on the second pump body 61 to seal the notch. A fluid handling component (not shown in the figure) can also be detachably installed in the second connecting air passage 83 at the notch. In this way, the second connecting air passage can connect the second-stage Roots pump body cavity and the second screw pump body cavity.

[0151] In this embodiment, the second connecting air passage 83 includes a Roots connecting channel 833 and a screw connecting channel 834. The bottom of the Roots connecting channel 833 communicates with the top of the secondary second Roots pump body cavity 642, and the top of the Roots connecting channel 833 communicates with the top of the second Roots pump body 610 and is located close to the second screw pump body 611. The bottom of the screw connecting channel 834 communicates with the second screw pump body cavity 65, and the top of the screw connecting channel 834 communicates with the top of the connecting component 612. Thus, the Roots connecting channel 833 and the top of the screw connecting channel 834 form the notch.

[0152] The sealing component 9 includes a frame 91 and a sealing cap 92. The frame 91 is a hollow structure with an open top. A connecting cavity 93 is provided at the top of the frame 91. Two through slots 94 are provided on the bottom surface of the frame 91, which communicate with the connecting cavity 93. The two through slots 94 are respectively positioned opposite the top of the Roots connecting channel 833 and the top of the screw connecting channel 834. The two ends of the frame are respectively installed on the top of the second Roots pump body and the connecting component, so that the two through slots abut against the top of the Roots connecting channel and the screw connecting channel respectively. In this way, the gas delivered from the Roots connecting channel will enter the connecting cavity through the corresponding through slot. The sealing cap seals the top of the connecting cavity. In this way, the gas delivered from the secondary second Roots pump body cavity enters the connecting cavity through the Roots connecting channel and the corresponding through slot, and then enters the screw connecting channel through another through slot in the connecting cavity, thus entering the second screw pump body cavity. In this way, the Roots connecting channel, the screw connecting channel and the connecting cavity constitute a complete second connecting gas channel. In this method, operators can directly open the sealing cover and frame, exposing the Roots connection channel and screw connection channel. Operators can observe the internal structure through these channels, allowing for simple inspections without disassembling the pump body. Subsequent targeted disassembly and maintenance can then proceed without completely disassembling the second pump body, improving the convenience of future maintenance. Furthermore, during the assembly and commissioning of the mixing pump, the internal structure can be observed through the Roots connection channel and screw connection channel, allowing calipers to be inserted to check assembly clearances and facilitating adjustments.

[0153] Furthermore, a filter screen can be installed in the channel to filter dust and other debris in the Roots connection channel and the screw connection channel. At the same time, during the assembly process, it can also prevent debris from entering the corresponding secondary Roots pump body cavity or screw pump body cavity through the channel.

[0154] Furthermore, a fluid processing component (not shown in the figure) can be detachably installed in the second connecting air passage at the notch. This fluid processing component can be placed directly inside the connecting cavity to process the fluid flowing through the second connecting air passage. The fluid processing component can be a filter, an alkali bag, a cooler, or a heater. The filter can filter dust and other impurities flowing through the second connecting air passage. The alkali bag adsorbs water vapor, preventing dust and water vapor from mixing and clogging adjacent screw rotor components or the second screw pump cavity. If the temperature of the gas entering the second screw pump cavity is too high, a cooler can be installed to lower the gas temperature and prevent coking of hydrocarbon mixtures. If the temperature of the gas entering the second screw pump cavity is too low, condensation can easily occur, leading to dust and condensate mixing and clogging the second screw pump cavity. In this case, a heater can be used to heat the gas and prevent condensation. Of course, there are other situations as well. You can choose according to different construction environments. This makes it more scalable, has a wider range of applications, can effectively ensure the vacuuming effect of the mixing pump, extend its service life, and reduce the maintenance rate.

[0155] In the description of this invention, it should be understood that the terms "upper," "lower," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0156] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. For instance, the two components can be mechanically connected by contact or abutting; they can also be directly hooked or connected by an intermediate medium; or they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

Claims

1. An integrated vacuum system, characterized in that: The device includes a housing, a first vacuum pump and a second vacuum pump disposed within the housing. The top of the second vacuum pump is connected to the bottom of the first vacuum pump via a mounting plate. A crossbeam is provided on each side of the housing, and the two sides of the first vacuum pump are connected to the crossbeams via support feet. The mounting plate is provided with a connection port, and the air inlet at the top of the second vacuum pump is connected to the air outlet at the bottom of the first vacuum pump through the connection port; the second vacuum pump is a suspended structure, and its bottom does not directly touch the bottom of the box. The first vacuum pump is provided with at least one outwardly extending support foot on each side, and each support foot is provided directly above the corresponding crossbeam. An elastic buffer component is provided between the support leg and the crossbeam, and the support leg is connected to the corresponding crossbeam by bolts passing through the elastic buffer component. The second vacuum pump is a hybrid vacuum pump, which includes a second pump body, a second drive component, and at least two parallel second coupling shafts. The second pump body is provided with a second independent Roots pump body cavity and a second screw pump body cavity. Multiple second coupling shafts are rotatably installed in the second pump body. The second drive component simultaneously drives multiple second coupling shafts to rotate simultaneously. The second screw pump body cavity is provided with two meshing screw rotor components, and each screw rotor component is respectively mounted on a second coupling shaft; The second Roots pump body cavity is provided with at least one second Roots rotor assembly, the second Roots rotor assembly includes two meshing second Roots rotor parts, each of the second Roots rotor parts is respectively mounted on a second coupling shaft; There is a gap between the end of the second coupling shaft away from the second Roots pump body cavity and the second screw pump body cavity; one end of the screw rotor component is disposed near the end face of the second screw pump body cavity on the side close to the second Roots pump body cavity; and there is a gap between the other end of the screw rotor component and the other end of the second screw pump body cavity. The second pump body is provided with a second air inlet, a second air outlet and a second connecting air passage. The second air inlet connects the second Roots pump body cavity to the top outer wall of the second pump body, and the top of the second air inlet connects to the bottom of the connecting air passage. The second connecting air passage connects the second Roots pump body cavity to the second screw pump body cavity, and the second air outlet connects the second screw pump body cavity to the outer wall of the second pump body. When the second Roots rotor assembly rotates, the fluid fed into the second air inlet through the connection port is fed into the second connecting air passage. When the screw rotor assembly rotates, the fluid fed into the second screw pump body cavity through the second connecting air passage is discharged from the second air outlet. The outer wall of the second pump body is provided with a notch that communicates with the second connecting air passage. A sealing component is installed on the second pump body to seal the notch. The second connecting air passage includes a Roots connecting channel and a screw connecting channel. The sealing component includes a frame and a sealing cap. The frame is a hollow structure with an open top. A connecting cavity is provided at the top of the frame. Two through slots are provided on the bottom surface of the frame that communicate with the connecting cavity. The two through slots are respectively positioned opposite the top of the Roots connecting channel and the top of the screw connecting channel. A fluid handling component can also be detachably installed in the second connecting air passage at the notch; The outer wall of the mounting plate is provided with at least one nitrogen purging inlet and at least one nitrogen purging outlet, which are connected to the connection port; The chamber is equipped with a purging mechanism, which includes a purging plate. The purging plate has a purging channel and a return channel, which are respectively connected to a nitrogen source and a return source. The nitrogen purging inlet is connected to the purging channel via a pipeline, and the nitrogen purging outlet is connected to the return channel via a pipeline; The nitrogen source delivers nitrogen into the connection port through the purging channel, and the nitrogen flows back to the return source from the nitrogen purging outlet and the return channel.

2. The integrated vacuum system according to claim 1, characterized in that: The enclosure includes a support frame and an outer cover installed on the outside of the support frame; The support includes two sets of uprights spaced apart and two sets of crossbeams spaced apart. The crossbeams are positioned between the two sets of uprights. The two ends of one crossbeam are connected to one side of each of the two sets of uprights, and the two ends of the other crossbeam are connected to the other side of each of the two sets of uprights. The first vacuum pump and the second vacuum pump are positioned between the two sets of uprights and the two sets of crossbeams. The outer cover is positioned outside the first vacuum pump, the second vacuum pump, and the support. The distance between the two sets of uprights is greater than the length of the first vacuum pump and the second vacuum pump, and the distance between the two crossbeams is greater than the width of the second vacuum pump. And / or, a base plate is provided directly below each of the crossbeams, and the two ends of the base plate are respectively connected to the uprights on both sides; And / or, each of the base plates is further provided with at least one upright plate, the two ends of which are perpendicularly connected to the base plate and the crossbeam respectively; And / or, at least one bottom support plate is provided below the second vacuum pump, with both ends of the bottom support plate connected to the bottom plates on both sides respectively, and the bottom of the second vacuum pump approaching or abutting the bottom support plate.

3. The integrated vacuum system according to claim 1, characterized in that: The first vacuum pump is a two-stage Roots vacuum pump. The first vacuum pump includes a first Roots pump body with a first Roots pump body cavity inside, two first connecting shafts that are rotatably installed in the first Roots pump body cavity and are parallel to each other, and a first driving component that drives the two first connecting shafts to rotate simultaneously. The first Roots pump body cavity is provided with two meshing first Roots rotor components, and each first Roots rotor component is respectively installed on one of the first connecting shafts. The first Roots pump body cavity is provided with a first partition plate, which divides the first Roots pump body cavity into two independent first-stage first Roots pump body cavities and second-stage first Roots pump body cavities. The first Roots rotor assembly includes a first-stage first Roots rotor assembly and a second-stage first Roots rotor assembly arranged at intervals. The two first-stage first Roots rotor assemblies mesh with each other in the first-stage first Roots pump body cavity, and the two second-stage first Roots rotor assemblies mesh with each other in the second-stage first Roots pump body cavity. And / or, the first Roots pump body is provided with a first air inlet, a first air outlet and a first connecting air passage. The first air inlet connects the first-stage first Roots pump body cavity to the top outer wall of the first Roots pump body. The first connecting air passage connects the bottom of the first-stage first Roots pump body cavity to the top of the second-stage first Roots pump body cavity. The first air outlet connects the bottom of the second-stage first Roots pump body cavity to the bottom outer wall of the first Roots pump body, and the bottom of the first air outlet connects to the top of the connecting air passage. And / or, when the first-stage first Roots rotor component rotates, the fluid entering through the first air inlet is sent into the cavity of the second-stage first Roots pump via the first connecting air passage; when the second-stage first Roots rotor component rotates, the fluid sent into the cavity of the second-stage first Roots pump via the first connecting air passage is sent into the connecting port.

4. The integrated vacuum system according to claim 1, characterized in that: The second Roots pump body cavity includes a primary second Roots pump body cavity and a secondary second Roots pump body cavity that are independent of each other. The second Roots rotor assembly consists of two sets, and the two sets of second Roots rotor assemblies are respectively installed in the primary second Roots pump body cavity and the secondary second Roots pump body cavity. The second air inlet is connected to the top of the first-stage second Roots pump body cavity, and the second pump body is provided with a central connecting air passage that connects the bottom of the first-stage second Roots pump body cavity and the top of the second-stage second Roots pump body cavity.

5. The integrated vacuum system according to claim 4, characterized in that: The second connecting shaft consists of two shafts, and the middle of the two second connecting shafts is rotatably connected to the second pump body; Two spaced-apart second Roots rotor components are mounted on each of the second coupling shafts; And / or, there is a gap between the end of the second coupling shaft away from the second Roots pump body cavity and the second screw pump body cavity, one end of the screw rotor component is disposed near the end face of the second screw pump body cavity on the side of the second Roots pump body cavity, and there is a gap between the other end of the screw rotor component and the other end of the second screw pump body cavity.

6. The integrated vacuum system according to claim 4, characterized in that: The second connecting shaft consists of three shafts, including a middle connecting shaft, a first side connecting shaft and a second side connecting shaft respectively arranged parallel to both sides of the middle connecting shaft; The two screw rotor components are respectively mounted on the intermediate connecting shaft and the first side connecting shaft; The second Roots rotor assembly includes a first-stage second Roots rotor assembly and a second-stage second Roots rotor assembly. The first-stage second Roots rotor assembly is disposed within the first-stage second Roots pump body cavity, and the second-stage second Roots rotor assembly is disposed within the second-stage second Roots pump body cavity. The first-stage second Roots rotor assembly includes two first-stage second Roots rotor components, and the second-stage second Roots rotor assembly includes two second-stage second Roots rotor components. The two first-stage second Roots rotor components are respectively mounted on the intermediate connecting shaft and the first side connecting shaft; The two secondary second Roots rotor components are respectively mounted on the intermediate connecting shaft and the second side connecting shaft.

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