Overhead crane task scheduling method and device based on MES system collaboration
By working in collaboration with the MES system, the production plan and real-time status information of the semiconductor processing production line are obtained, the associated Tianche is determined and the initial handling task instruction sequence is generated, and the emergency dispatch instructions are sent to the target Tianche is based on the abnormal status information, which solves the existing technology The problem of the impact of abnormal state was not effectively considered, achieving more efficient material handling.
Patent Information
- Application Number
- CN202411066939.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-06
- Publication Date
- 2025-02-07
- Estimated Expiration
- 2044-08-06
AI Technical Summary
The existing Tianche dispatch method fails to effectively consider the impact of abnormal state of semiconductor processing production lines on material transportation, resulting in blockage and even paralysis of transportation tracks during material transportation, which greatly affects the efficiency of material handling.
By working in collaboration with the MES system, the production plan and real-time status information of the semiconductor processing production line are obtained, the associated Tianche is determined and the initial handling task instruction sequence is generated, and the emergency dispatch instructions are sent to the target Tianche is based on the abnormal status information, and the operation parameters are adjusted to respond. The production line is abnormal.
It minimizes the impact of abnormal states in semiconductor processing production lines on material handling efficiency, avoids blockage and paralysis of transportation tracks, and improves the efficiency and reliability of material handling.
Smart Images

Figure CN118607883B_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of automation control technology, and in particular to a method and device for scheduling overhead crane tasks based on MES system collaboration. Background Art
[0002] With the rapid development of the Automatic Material Handling System (AMHS) and its application in semiconductor processing plants, the processing efficiency of semiconductor processing plants has been significantly improved. As the main material handling tool in the AMHS system, overhead cranes are gradually playing an increasingly important role in semiconductor material transportation.
[0003] The scheduling mode of the overhead crane in the existing AMHS system is to generate material handling task instructions based on the pre-set semiconductor processing plan and send them to the overhead crane. The overhead crane moves the material from the starting position to the target position based on the material handling task instructions. The efficiency and speed of material handling can be improved by rationally planning the handling path. However, the existing overhead crane scheduling method does not consider the impact of abnormal conditions of semiconductor processing production lines on material transportation, resulting in blockages and even paralysis of the transportation track during material transportation, which greatly affects the efficiency of material handling. Summary of the invention
[0004] The present application provides a method and device for scheduling overhead crane tasks based on MES system collaboration to minimize the impact of abnormal conditions of semiconductor processing production lines on material handling efficiency.
[0005] The present application provides a method for scheduling overhead crane tasks based on MES system collaboration, the method comprising:
[0006] Obtain a preset production plan from the MES system, determine the associated overhead crane based on the production plan, and generate an initial handling task instruction sequence corresponding to each associated overhead crane; the production plan includes a production sub-plan corresponding to each semiconductor processing production line, each production sub-plan includes an execution plan for the production task corresponding to the current semiconductor processing production line, and the execution plan for each production task includes the execution start and end time of the current production task, the required material quantity, the location of the associated process node, and the process start and end time; any handling task instruction in the initial handling task instruction sequence includes an operation start point, an operation end point, and an operation start and end time;
[0007] Schedule the work of each associated overhead crane based on the initial handling task instruction sequence corresponding to each associated overhead crane, and obtain abnormal status information of the semiconductor processing production line from the MES system;
[0008] Based on the abnormal status information of the semiconductor processing production line and the current operating status of each associated overhead crane, an emergency dispatch instruction is sent to the target overhead crane to control the target overhead crane to adjust the operating parameters; the target overhead crane is an associated overhead crane whose handling operation is affected by the abnormal status of the semiconductor processing production line.
[0009] According to a method for scheduling overhead crane tasks based on MES system collaboration provided by the present application, the method of determining the associated overhead cranes based on the production plan and generating the initial handling task instruction sequence corresponding to each associated overhead crane specifically includes:
[0010] Determine a target semiconductor processing line having a production task based on a production sub-plan corresponding to each semiconductor processing line in the production plan;
[0011] Determine the associated overhead crane of the target semiconductor processing production line based on the required material quantity of the production task in the production sub-plan corresponding to the target semiconductor processing production line, the position of the associated process node and the initial position of each overhead crane;
[0012] Based on the execution start and end time of the production tasks in the production sub-plan corresponding to the target semiconductor processing production line, the location of the associated process nodes and the process start and end time, an initial handling task instruction sequence corresponding to each associated overhead crane is generated.
[0013] According to a method for scheduling overhead crane tasks based on MES system collaboration provided by the present application, the method determines the associated overhead cranes of the target semiconductor processing production line based on the required material quantity of the production tasks in the production sub-plan corresponding to the target semiconductor processing production line, the positions of the associated process nodes and the initial positions of each overhead crane, specifically including:
[0014] Determine the number of overhead cranes required based on the material quantity required for the production task in the production sub-plan corresponding to the target semiconductor processing production line;
[0015] Based on the position of the initial associated process node of the production task in the production sub-plan corresponding to the target semiconductor processing production line, the initial position of each overhead crane and the number of required overhead cranes, the associated overhead cranes of the target semiconductor processing production line are determined.
[0016] According to a method for scheduling overhead crane tasks based on MES system collaboration provided by the present application, the execution start and end time of the production task in the production sub-plan corresponding to the target semiconductor processing production line and the process start and end time of the associated process node are used to generate the initial handling task instruction sequence corresponding to each associated overhead crane, specifically including:
[0017] Based on the execution start and end time of the production task in the production sub-plan corresponding to the target semiconductor processing production line, the location of the associated process node and the process start and end time, determine the operation starting point, operation end point and operation start and end time corresponding to multiple handling sub-tasks of each associated overhead crane; the handling sub-task refers to the handling task of transporting materials from one process node to the next process node;
[0018] Based on the operation starting points, operation end points and operation start and end times corresponding to the multiple handling subtasks of each associated overhead crane, an initial handling task instruction sequence corresponding to each associated overhead crane is generated.
[0019] According to a method for scheduling overhead crane tasks based on MES system collaboration provided by the present application, the work scheduling of each associated overhead crane based on the initial handling task instruction sequence corresponding to each associated overhead crane specifically includes:
[0020] For any associated overhead crane, the initial handling task instruction sequence corresponding to the associated overhead crane is sent to the associated overhead crane, so as to control the associated overhead crane to complete the corresponding handling subtasks in sequence.
[0021] According to a method for scheduling overhead crane tasks based on MES system collaboration provided by the present application, based on the abnormal status information of the semiconductor processing production line and the current operating status of each associated overhead crane, an emergency scheduling instruction is sent to the target overhead crane to control the target overhead crane to adjust the operating parameters, specifically including:
[0022] Based on the abnormal state information of the semiconductor processing production line, determine the target process node where the abnormality occurs and the abnormality type of the target process node;
[0023] Based on the target process node, the abnormal type of the target process node and the current operating status of the associated overhead cranes of the semiconductor processing production line, determine the target overhead cranes and generate emergency dispatch instructions corresponding to each target overhead crane;
[0024] Sending a corresponding emergency dispatch instruction to the target overhead crane to control the target overhead crane to adjust the operating parameters of the target handling task instruction in the initial handling task instruction sequence; the emergency dispatch instruction includes the target handling task instruction and indication information of the revised operating parameters corresponding to the target handling task instruction.
[0025] According to a method for scheduling overhead crane tasks based on MES system collaboration provided by the present application, the target overhead crane is determined based on the target process node, the abnormal type of the target process node and the current operating status of the associated overhead crane of the semiconductor processing production line, and emergency scheduling instructions corresponding to each target overhead crane are generated, specifically including:
[0026] Based on the abnormal type of the target process node, the execution start and end time of the current production task and the change in the process start and end time of the associated process node are determined; based on the execution start and end time of the current production task, the change in the process start and end time of the associated process node and the handling subtask currently being executed by the associated overhead crane of the semiconductor processing production line, the target overhead crane is determined and emergency dispatch instructions corresponding to each target overhead crane are generated.
[0027] The present application also provides an overhead crane task scheduling device based on MES system collaboration, the device comprising:
[0028] An initial handling task instruction sequence generating unit is used to obtain a preset production plan from the MES system, determine the associated overhead crane based on the production plan, and generate an initial handling task instruction sequence corresponding to each associated overhead crane; the production plan includes a production sub-plan corresponding to each semiconductor processing production line, each production sub-plan includes an execution plan for the production task corresponding to the current semiconductor processing production line, and the execution plan for each production task includes the execution start and end time of the current production task, the required material quantity, the location of the associated process node, and the process start and end time; any handling task instruction in the initial handling task instruction sequence includes an operation start point, an operation end point, and an operation start and end time;
[0029] A work scheduling and abnormality monitoring unit is used to schedule the work of each associated overhead crane based on the initial handling task instruction sequence corresponding to each associated overhead crane, and obtain abnormal status information of the semiconductor processing production line from the MES system;
[0030] The emergency processing unit is used to send an emergency dispatch instruction to the target overhead crane based on the abnormal status information of the semiconductor processing production line and the current operating status of each associated overhead crane to control the target overhead crane to adjust the operating parameters; the target overhead crane is an associated overhead crane whose handling operation is affected by the abnormal status of the semiconductor processing production line.
[0031] The present application also provides a non-transitory computer-readable storage medium having a computer program stored thereon. When the computer program is executed by a processor, the steps of the overhead crane task scheduling method based on MES system collaboration as described in any one of the above are implemented.
[0032] The present application also provides a computer program product, including a computer program, which, when executed by a processor, implements the steps of any of the above-mentioned methods for overhead crane task scheduling based on MES system collaboration.
[0033] The overhead crane task scheduling method and device based on MES system collaboration provided in the present application obtain a preset production plan from the MES system, determine the associated overhead cranes based on the production plan, and generate an initial handling task instruction sequence corresponding to each associated overhead crane; the production plan includes a production sub-plan corresponding to each semiconductor processing production line, each production sub-plan includes an execution plan for the production task corresponding to the current semiconductor processing production line, and the execution plan of each production task includes the execution start and end time of the current production task, the required material quantity, the location of the associated process node, and the process start and end time; any handling task instruction in the initial handling task instruction sequence includes the operation start point, operation end point, and operation start and end time. The method comprises the following steps: first, determining the operation point and the start and end time of the operation; second, scheduling the work of each associated overhead crane based on the initial handling task instruction sequence corresponding to each associated overhead crane, and obtaining the abnormal status information of the semiconductor processing production line from the MES system; third, sending an emergency scheduling instruction to the target overhead crane based on the abnormal status information of the semiconductor processing production line and the current operating status of each associated overhead crane to control the target overhead crane to adjust the operation parameters; the target overhead crane is an associated overhead crane whose handling operation is affected by the abnormal status of the semiconductor processing production line, and can obtain the abnormal status information of the semiconductor processing production line from the MES system in time, and perform emergency scheduling on the overhead crane, thereby minimizing the impact of the abnormal status of the semiconductor processing production line on the material handling efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0034] In order to more clearly illustrate the technical solutions in the present application or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0035] Figure 1 It is a flowchart of the overhead crane task scheduling method based on MES system collaboration provided by this application;
[0036] Figure 2 It is a schematic diagram of the determination process of the associated overhead crane and the corresponding initial handling task instruction sequence provided by the present application;
[0037] Figure 3 It is a flowchart of emergency dispatch of overhead crane provided by this application;
[0038] Figure 4 It is a structural diagram of an overhead crane task scheduling device based on MES system collaboration provided by the present application;
[0039] Figure 5 It is a schematic diagram of the structure of the electronic device provided by this application. DETAILED DESCRIPTION
[0040] In order to make the purpose, technical solutions and advantages of this application clearer, the technical solutions in this application will be clearly and completely described below in conjunction with the drawings in this application. Obviously, the described embodiments are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0041] Figure 1 The flowchart of the overhead crane task scheduling method based on MES system collaboration provided in this application is as follows: Figure 1 As shown, the method includes:
[0042] Step 101, obtain a preset production plan from the MES system, determine the associated overhead crane based on the production plan and generate an initial handling task instruction sequence corresponding to each associated overhead crane; the production plan includes a production sub-plan corresponding to each semiconductor processing production line, each production sub-plan includes an execution plan for the production task corresponding to the current semiconductor processing production line, and the execution plan for each production task includes the execution start and end time of the current production task, the required material quantity, the location of the associated process node and the process start and end time; any handling task instruction in the initial handling task instruction sequence includes the operation start point, operation end point and operation start and end time.
[0043] Based on the above content, it can be known that the scheduling mode of the overhead crane in the existing AMHS system is to generate material handling task instructions based on the pre-set semiconductor processing plan and send them to the overhead crane. The overhead crane moves the material from the starting position to the target position based on the material handling task instructions. By rationally planning the handling path, the efficiency and speed of material handling can be improved. However, the existing overhead crane scheduling method does not take into account the impact of the abnormal state of the semiconductor processing production line on material transportation, resulting in blockages or even paralysis of the transportation track during material transportation, which greatly affects the efficiency of material handling. In response to this problem, this application combines the characteristics of the MES (Manufacturing Execution System) system that can supervise and control the entire production process, and proposes a method for scheduling overhead crane tasks based on the collaboration of the MES system, aiming to obtain the production plan and real-time status of the semiconductor processing production line through the MES system, and schedule the overhead crane tasks based on the production plan and real-time status of the semiconductor processing production line, thereby minimizing the impact of the abnormal state of the semiconductor processing production line on the material handling efficiency.
[0044] Specifically, the embodiment of the present application first obtains a preset production plan from the MES system. It is understandable that the production plan can be automatically generated by the MES system based on the production order, or it can be actively entered into the MES system by the user based on production needs, and the embodiment of the present application does not specifically limit this. The production plan includes a production sub-plan corresponding to each semiconductor processing production line, and each production sub-plan includes an execution plan for the production task corresponding to the current semiconductor processing production line. The execution plan of each production task includes the execution start and end time of the current production task, the required material quantity, the location of the associated process node, and the process start and end time; any handling task instruction in the initial handling task instruction sequence includes the operation starting point, the operation end point, and the operation start and end time. It is worth noting that a semiconductor processing plant usually includes multiple processing production lines, and therefore, the production plan includes a production sub-plan corresponding to each semiconductor processing production line. The output requirements, time limit requirements and process flow requirements of different production tasks may be different. Therefore, the execution start and end times, required material quantities, associated process nodes and process start and end times of the associated process nodes corresponding to the production tasks are also different. Based on this, the execution plan of each production task in the embodiment of the present application includes the execution start and end times of the current production task, the required material quantity, the location of the associated process nodes and the process start and end times. Based on this, the overhead crane (i.e., the associated overhead crane) and the operating parameters of the overhead crane that need to perform material handling operations can be accurately determined, and then the initial handling task instruction sequence corresponding to each associated overhead crane is generated based on the operating parameters of the associated overhead crane. Any handling task instruction in the initial handling task instruction sequence includes the operation starting point, operation end point and operation start and end time (i.e., operation parameters). Based on this, the associated overhead crane can be task scheduled based on the initial handling task instruction sequence. More specifically, Figure 2 It is a schematic diagram of the determination process of the associated overhead crane and the corresponding initial handling task instruction sequence provided by the present application, such as Figure 2 As shown, the method of determining the associated overhead cranes based on the production plan and generating the initial handling task instruction sequence corresponding to each associated overhead crane specifically includes:
[0045] Step 1011, based on the production sub-plans corresponding to the various semiconductor processing production lines in the production plan, determine the target semiconductor processing production line that has the production task.
[0046] It is understandable that, based on actual production needs, not all semiconductor processing lines in a semiconductor processing plant will necessarily be put into use, that is, some semiconductor processing lines may not have production tasks. Therefore, the embodiment of the present application first determines the target semiconductor processing lines with production tasks based on the production sub-plans corresponding to each semiconductor processing line in the production plan. Specifically, the embodiment of the present application preferably sets the production sub-plan corresponding to the semiconductor processing line without production tasks to empty, based on which, the target semiconductor processing line with production tasks can be quickly determined.
[0047] Step 1012, determining the associated overhead crane of the target semiconductor processing production line based on the required material quantity of the production task in the production sub-plan corresponding to the target semiconductor processing production line, the position of the associated process node and the initial position of each overhead crane.
[0048] Specifically, determining the associated overhead crane of the target semiconductor processing production line based on the required material quantity of the production task in the production sub-plan corresponding to the target semiconductor processing production line, the position of the associated process node and the initial position of each overhead crane specifically includes:
[0049] Determine the number of overhead cranes required based on the material quantity required for the production task in the production sub-plan corresponding to the target semiconductor processing production line;
[0050] Based on the position of the initial associated process node of the production task in the production sub-plan corresponding to the target semiconductor processing production line, the initial position of each overhead crane and the number of required overhead cranes, the associated overhead cranes of the target semiconductor processing production line are determined.
[0051] It is understandable that since the material transport volume of a single overhead crane is known, the number of overhead cranes required can be quickly determined after the material volume required for the production task in the production sub-plan corresponding to the target semiconductor processing production line is determined. It is worth noting that since the material volume required for the production task is usually large, each associated process node usually needs to process the materials in batches. At the same time, there is waiting time during the process of the process node. Therefore, in order to improve the utilization rate of the overhead crane, a single overhead crane can be used to carry out multiple material handling to reduce the idle rate of the overhead crane, and at the same time, the number of overhead cranes required can also be reduced.
[0052] After determining the number of required overhead cranes, the associated overhead cranes of the target semiconductor processing production line can be determined based on the position of the initial associated process node of the production task in the production sub-plan corresponding to the target semiconductor processing production line, the initial position of each overhead crane and the number of required overhead cranes. It can be understood that the first step of transportation of the production task is to transport the materials to be processed to the initial associated process node (i.e., the process node corresponding to the first processing step). Therefore, in order to maximize the efficiency of material transportation, the closer the overhead crane is to the initial process node, the better. Based on this, the embodiment of the present application first determines the overhead cranes near the initial associated process node of the target semiconductor processing production line based on the position of the initial associated process node of the production task in the production sub-plan corresponding to the target semiconductor processing production line and the initial position of each overhead crane, and then based on the number of required overhead cranes, it can determine multiple overhead cranes (equal to the number of required overhead cranes) closest to the initial associated process node as the associated overhead cranes of the target semiconductor processing production line.
[0053] Step 1013, based on the execution start and end time of the production task in the production sub-plan corresponding to the target semiconductor processing production line, the location of the associated process node and the process start and end time, generate an initial handling task instruction sequence corresponding to each associated overhead crane.
[0054] Specifically, the initial handling task instruction sequence corresponding to each associated overhead crane is generated based on the execution start and end time of the production task in the production sub-plan corresponding to the target semiconductor processing production line and the process start and end time of the associated process node, specifically including:
[0055] Based on the execution start and end time of the production task in the production sub-plan corresponding to the target semiconductor processing production line, the location of the associated process node and the process start and end time, determine the operation starting point, operation end point and operation start and end time corresponding to multiple handling sub-tasks of each associated overhead crane; the handling sub-task refers to the handling task of transporting materials from one process node to the next process node;
[0056] Based on the operation starting points, operation end points and operation start and end times corresponding to the multiple handling subtasks of each associated overhead crane, an initial handling task instruction sequence corresponding to each associated overhead crane is generated.
[0057] It can be understood that the start and end time are the start time and the end time. In the process of formulating the production plan, the execution period of the production task will be set, and the start time and the end time of the production task can be determined based on the execution period. For a single semiconductor processing production line, its process is based on a fixed process execution (that is, processes A, B, and C are executed in sequence based on a fixed process). Therefore, the handling task performed by the associated trolley in the same period is to transport materials from one process node to the next process node. It is worth noting that the associated process nodes of the embodiment of the present application include the loading and unloading points of the semiconductor processing production line in addition to the nodes that require processing processes such as lithography. Based on this, after the execution start and end time of the production task, the position of the associated process node and the process start and end time in the production sub-plan corresponding to the target semiconductor processing production line, the operation starting point, operation end point and operation start and end time corresponding to the multiple handling sub-tasks of each associated overhead crane can be quickly and accurately determined; wherein, the handling sub-task refers to the handling task of transporting materials from one process node to the next process node. After determining the operation starting points, operation end points and operation start and end times corresponding to the multiple handling subtasks of each associated overhead crane, the initial handling task instruction sequence corresponding to each associated overhead crane can be generated based on the operation starting points, operation end points and operation start and end times corresponding to the multiple handling subtasks of each associated overhead crane. It can also be understood that the multiple handling task instructions in the initial handling task instruction sequence are arranged in sequence based on the operation start time of the corresponding handling subtasks, based on which the overhead crane can be controlled to perform orderly operations.
[0058] Step 102 : scheduling the work of each associated overhead crane based on the initial handling task instruction sequence corresponding to each associated overhead crane, and obtaining abnormal status information of the semiconductor processing production line from the MES system.
[0059] Specifically, the work scheduling of each associated overhead crane based on the initial handling task instruction sequence corresponding to each associated overhead crane specifically includes:
[0060] For any associated overhead crane, the initial handling task instruction sequence corresponding to the associated overhead crane is sent to the associated overhead crane to control the associated overhead crane to sequentially complete the corresponding handling subtasks. It can be understood that after receiving the initial handling task instruction sequence, the associated overhead crane can accurately determine the operation parameters such as the operation starting point, operation end point and operation start and end time of each handling subtask, and then perform route planning, and carry out orderly material handling based on the planned route.
[0061] Step 103, based on the abnormal state information of the semiconductor processing production line and the current operating state of each associated overhead crane, an emergency dispatch instruction is sent to the target overhead crane to control the target overhead crane to adjust the operating parameters; the target overhead crane is an associated overhead crane whose handling operation is affected by the abnormal state of the semiconductor processing production line.
[0062] Specifically, based on the above content, it can be seen that the existing overhead crane scheduling method does not take into account the impact of the abnormal state of the semiconductor processing production line on material transportation, resulting in blockage or even paralysis of the transportation track during material transportation. The specific reason is that the abnormal state of the semiconductor processing production line may cause the process progress of the production line to be delayed or even stopped. If the overhead crane still carries out material transportation according to the original plan at this time, it will cause the material to be unable to be loaded or unloaded in time, and then cause the overhead crane to stay in the loading area or unloading area for a long time, and then block or even paralyze the transportation track. In response to this problem, the embodiment of the present application will obtain the abnormal state information of the semiconductor processing production line from the MES system in real time based on the initial handling task instruction sequence corresponding to each associated overhead crane, and make timely adjustments to the overhead crane task scheduling plan. More specifically, the embodiment of the present application sends an emergency scheduling instruction to the target overhead crane based on the abnormal state information of the semiconductor processing production line and the current operating state of each associated overhead crane to control the target overhead crane to adjust the operation parameters; the target overhead crane is an associated overhead crane whose handling operation is affected by the abnormal state of the semiconductor processing production line. Figure 3 This is a flowchart of the emergency dispatch of the overhead crane provided by this application, such as Figure 3 As shown, the method of sending an emergency dispatch instruction to a target overhead crane based on the abnormal status information of the semiconductor processing production line and the current operating status of each associated overhead crane to control the target overhead crane to adjust the operating parameters specifically includes:
[0063] Step 1031, based on the abnormal state information of the semiconductor processing production line, determine the target process node where the abnormality occurs and the abnormality type of the target process node.
[0064] It can be understood that the abnormal status information of the semiconductor processing production line includes indication information of the target process node where the abnormality occurs and the abnormal type of the target process node. Therefore, the embodiment of the present application can quickly and accurately determine the target process node where the abnormality occurs and the abnormal type of the target process node based on the abnormal status information of the semiconductor processing production line.
[0065] Step 1032, based on the target process node, the abnormal type of the target process node and the current operating status of the associated overhead cranes of the semiconductor processing production line, determine the target overhead cranes and generate emergency dispatch instructions corresponding to each target overhead crane.
[0066] Specifically, the present application has found through research that the following two situations in the semiconductor processing production line will cause the actual production progress to deviate from the preset production plan, thereby causing congestion or even paralysis of the transportation track: the first is process parameter modification, and the second is process equipment failure. Based on this, the embodiment of the present application divides the abnormality types into process parameter changes and process equipment failures. On this basis, the target crane is determined based on the target process node, the abnormality type of the target process node, and the current operating status of the associated crane of the semiconductor processing production line, and the emergency dispatch instructions corresponding to each target crane are generated, specifically including:
[0067] Based on the abnormal type of the target process node, the execution start and end time of the current production task and the change in the process start and end time of the associated process node are determined; based on the execution start and end time of the current production task, the change in the process start and end time of the associated process node and the handling subtask currently being executed by the associated overhead crane of the semiconductor processing production line, the target overhead crane is determined and emergency dispatch instructions corresponding to each target overhead crane are generated.
[0068] Specifically, it is worth noting that the abnormal status information of the semiconductor processing production line also includes the associated information of the abnormal type of the target process node. For example, when the abnormal type is a process parameter change, the associated information of the abnormal type includes the adjustment amount of the process parameter; when the abnormal type is a process equipment failure, the associated information of the abnormal type includes the failure type.
[0069] Therefore, when the abnormality type is process parameter modification, the execution start and end time of the current production task and the change in the process start and end time of the associated process node can be determined based on the adjustment amount of the process parameter, and then based on the execution start and end time of the current production task, the change in the process start and end time of the associated process node and the handling subtask currently being performed by the associated overhead crane of the semiconductor processing production line, the target overhead crane is determined and the emergency dispatch instruction corresponding to each target overhead crane is generated. It can be understood that after determining the handling subtask currently being performed by the associated overhead crane, the process node corresponding to the handling subtask currently being performed by the associated overhead crane can be determined, and when the execution start and end time of the current production task and the change in the process start and end time of the associated process node are known, it can be determined whether the handling operation of the associated overhead crane is affected by the abnormal state of the semiconductor processing production line (that is, whether the associated overhead crane is the target overhead crane). For example, the production line includes four continuous process nodes A, B, C, and D. If it is monitored that there is a process parameter modification in process node C, resulting in changes in the process start and end times of process nodes C and D, and the associated overhead crane is currently performing the transport subtask from A to B, it is obvious that the transport operation of the associated overhead crane will be affected by the abnormal state of the semiconductor processing production line, which is the target overhead crane. In response to this situation, it is necessary to adjust the start and end time of the target overhead crane to perform the transport subtasks from B to C and C to D. Based on this, the embodiment of the present application can determine the adjustment amount of the target overhead crane to perform the transport subtasks from B to C and C to D based on the execution start and end time of the current production task and the change in the process start and end time of the associated process node, and then generate an emergency dispatch instruction corresponding to the target overhead crane.
[0070] When the abnormality type is a process equipment failure, since the equipment maintenance time is uncertain, it is first necessary to pre-calculate the equipment maintenance time corresponding to the failure type, and then determine the execution start and end time of the current production task and the change in the process start and end time of the associated process node based on the equipment maintenance time. Then, based on the execution start and end time of the current production task, the change in the process start and end time of the associated process node and the handling subtask currently being executed by the associated overhead crane of the semiconductor processing production line, the target overhead crane can be determined and emergency dispatch instructions corresponding to each target overhead crane can be generated.
[0071] Step 1033, sending a corresponding emergency dispatch instruction to the target overhead crane to control the target overhead crane to adjust the operating parameters of the target handling task instruction in the initial handling task instruction sequence; the emergency dispatch instruction includes the target handling task instruction and indication information of the modified operating parameters corresponding to the target handling task instruction.
[0072] Specifically, based on the foregoing, it can be understood that based on the execution start and end time of the current production task, the change in the process start and end time of the associated process node, and the handling subtask currently being performed by the associated overhead crane of the semiconductor processing production line, the target overhead crane and the handling subtask for which the target overhead crane needs to adjust the operating parameters and the specific adjustment amount are determined. Based on this, the embodiment of the present application can generate an emergency dispatch instruction including the target handling task instruction and the indication information of the corrected operating parameters corresponding to the target handling task instruction. After receiving the emergency dispatch instruction, the target overhead crane can quickly adjust the operating parameters of the target handling task instruction in the initial handling task instruction sequence, thereby minimizing the impact of the abnormal state of the semiconductor processing production line on the material handling efficiency.
[0073] The method provided in the embodiment of the present application obtains a preset production plan from the MES system, determines the associated overhead crane based on the production plan, and generates an initial handling task instruction sequence corresponding to each associated overhead crane; the production plan includes a production sub-plan corresponding to each semiconductor processing production line, each production sub-plan includes an execution plan for the production task corresponding to the current semiconductor processing production line, and the execution plan for each production task includes the execution start and end time of the current production task, the required material quantity, the location of the associated process node, and the process start and end time; any handling task instruction in the initial handling task instruction sequence includes the operation start point, operation end point, and operation start and end time ; Schedule the work of each associated overhead crane based on the initial handling task instruction sequence corresponding to each associated overhead crane, and obtain the abnormal status information of the semiconductor processing production line from the MES system; send an emergency dispatch instruction to the target overhead crane based on the abnormal status information of the semiconductor processing production line and the current operating status of each associated overhead crane to control the target overhead crane to adjust the operating parameters; the target overhead crane is an associated overhead crane whose handling operation is affected by the abnormal status of the semiconductor processing production line, and can obtain the abnormal status information of the semiconductor processing production line from the MES system in time, and perform emergency dispatch on the overhead crane, thereby minimizing the impact of the abnormal status of the semiconductor processing production line on the material handling efficiency.
[0074] The following is a description of the overhead crane task scheduling device based on MES system collaboration provided by the present application. The overhead crane task scheduling device based on MES system collaboration described below and the overhead crane task scheduling method based on MES system collaboration described above can refer to each other.
[0075] Based on any of the above embodiments, Figure 4 is a structural diagram of an overhead crane task scheduling device based on MES system collaboration provided by this application, such as Figure 4 As shown, the device comprises:
[0076] The initial handling task instruction sequence generating unit 201 is used to obtain a preset production plan from the MES system, determine the associated overhead crane based on the production plan, and generate an initial handling task instruction sequence corresponding to each associated overhead crane; the production plan includes a production sub-plan corresponding to each semiconductor processing production line, each production sub-plan includes an execution plan of the production task corresponding to the current semiconductor processing production line, and the execution plan of each production task includes the execution start and end time of the current production task, the required material quantity, the location of the associated process node and the process start and end time; any handling task instruction in the initial handling task instruction sequence includes the operation start point, operation end point and operation start and end time;
[0077] The work scheduling and abnormality monitoring unit 202 is used to schedule the work of each associated overhead crane based on the initial handling task instruction sequence corresponding to each associated overhead crane, and obtain abnormal status information of the semiconductor processing production line from the MES system;
[0078] The emergency processing unit 203 is used to send an emergency dispatch instruction to the target overhead crane based on the abnormal state information of the semiconductor processing production line and the current operating state of each associated overhead crane to control the target overhead crane to adjust the operating parameters; the target overhead crane is an associated overhead crane whose handling operation is affected by the abnormal state of the semiconductor processing production line.
[0079] In the device provided by the embodiment of the present application, the initial handling task instruction sequence generation unit 201 obtains a preset production plan from the MES system, determines the associated overhead crane based on the production plan, and generates an initial handling task instruction sequence corresponding to each associated overhead crane; the production plan includes a production sub-plan corresponding to each semiconductor processing production line, each production sub-plan includes an execution plan for the production task corresponding to the current semiconductor processing production line, and the execution plan for each production task includes the execution start and end time of the current production task, the required material quantity, the location of the associated process node and the process start and end time; any handling task instruction in the initial handling task instruction sequence includes the operation start point, operation end point and operation start and end time; the work The scheduling and abnormal monitoring unit 202 schedules the work of each associated overhead crane based on the initial handling task instruction sequence corresponding to each associated overhead crane, and obtains the abnormal state information of the semiconductor processing production line from the MES system; the emergency processing unit 203 sends an emergency scheduling instruction to the target overhead crane based on the abnormal state information of the semiconductor processing production line and the current operating state of each associated overhead crane to control the target overhead crane to adjust the operating parameters; the target overhead crane is an associated overhead crane whose handling operation is affected by the abnormal state of the semiconductor processing production line, and can obtain the abnormal state information of the semiconductor processing production line from the MES system in time, and perform emergency scheduling on the overhead crane, thereby minimizing the impact of the abnormal state of the semiconductor processing production line on the material handling efficiency.
[0080] Based on the above embodiment, determining the associated overhead cranes based on the production plan and generating the initial handling task instruction sequence corresponding to each associated overhead crane specifically includes:
[0081] Determine a target semiconductor processing line having a production task based on a production sub-plan corresponding to each semiconductor processing line in the production plan;
[0082] Determine the associated overhead crane of the target semiconductor processing production line based on the required material quantity of the production task in the production sub-plan corresponding to the target semiconductor processing production line, the position of the associated process node and the initial position of each overhead crane;
[0083] Based on the execution start and end time of the production tasks in the production sub-plan corresponding to the target semiconductor processing production line, the location of the associated process nodes and the process start and end time, an initial handling task instruction sequence corresponding to each associated overhead crane is generated.
[0084] Based on any of the above embodiments, determining the associated overhead crane of the target semiconductor processing production line based on the required material quantity of the production task in the production sub-plan corresponding to the target semiconductor processing production line, the position of the associated process node and the initial position of each overhead crane specifically includes:
[0085] Determine the number of overhead cranes required based on the material quantity required for the production task in the production sub-plan corresponding to the target semiconductor processing production line;
[0086] Based on the position of the initial associated process node of the production task in the production sub-plan corresponding to the target semiconductor processing production line, the initial position of each overhead crane and the number of required overhead cranes, the associated overhead cranes of the target semiconductor processing production line are determined.
[0087] Based on any of the above embodiments, the initial handling task instruction sequence corresponding to each associated overhead crane is generated based on the execution start and end time of the production task in the production sub-plan corresponding to the target semiconductor processing production line and the process start and end time of the associated process node, specifically including:
[0088] Based on the execution start and end time of the production task in the production sub-plan corresponding to the target semiconductor processing production line, the location of the associated process node and the process start and end time, determine the operation starting point, operation end point and operation start and end time corresponding to multiple handling sub-tasks of each associated overhead crane; the handling sub-task refers to the handling task of transporting materials from one process node to the next process node;
[0089] Based on the operation starting points, operation end points and operation start and end times corresponding to the multiple handling subtasks of each associated overhead crane, an initial handling task instruction sequence corresponding to each associated overhead crane is generated.
[0090] Based on any of the above embodiments, the work scheduling of each associated overhead crane based on the initial handling task instruction sequence corresponding to each associated overhead crane specifically includes:
[0091] For any associated overhead crane, the initial handling task instruction sequence corresponding to the associated overhead crane is sent to the associated overhead crane, so as to control the associated overhead crane to complete the corresponding handling subtasks in sequence.
[0092] Based on any of the above embodiments, the sending of an emergency dispatch instruction to a target overhead crane based on the abnormal status information of the semiconductor processing production line and the current operating status of each associated overhead crane to control the target overhead crane to adjust the operating parameters specifically includes:
[0093] Based on the abnormal state information of the semiconductor processing production line, determine the target process node where the abnormality occurs and the abnormality type of the target process node;
[0094] Based on the target process node, the abnormal type of the target process node and the current operating status of the associated overhead cranes of the semiconductor processing production line, determine the target overhead cranes and generate emergency dispatch instructions corresponding to each target overhead crane;
[0095] Sending a corresponding emergency dispatch instruction to the target overhead crane to control the target overhead crane to adjust the operating parameters of the target handling task instruction in the initial handling task instruction sequence; the emergency dispatch instruction includes the target handling task instruction and indication information of the revised operating parameters corresponding to the target handling task instruction.
[0096] Based on any of the above embodiments, determining the target overhead crane and generating the emergency dispatch instruction corresponding to each target overhead crane based on the target process node, the abnormal type of the target process node and the current operation status of the associated overhead crane of the semiconductor processing production line specifically includes:
[0097] Based on the abnormal type of the target process node, the execution start and end time of the current production task and the change in the process start and end time of the associated process node are determined; based on the execution start and end time of the current production task, the change in the process start and end time of the associated process node and the handling subtask currently being executed by the associated overhead crane of the semiconductor processing production line, the target overhead crane is determined and emergency dispatch instructions corresponding to each target overhead crane are generated.
[0098] Figure 5 An example of a physical structure diagram of an electronic device is shown in FIG. Figure 5As shown, the electronic device may include: a processor (processor) 301, a communication interface (Communications Interface) 302, a memory (memory) 303 and a communication bus 304, wherein the processor 301, the communication interface 302, and the memory 303 communicate with each other through the communication bus 304. The processor 301 can call the logic instructions in the memory 303 to execute the overhead crane task scheduling method based on the MES system collaboration provided by the above methods, the method comprising: obtaining a preset production plan from the MES system, determining the associated overhead cranes based on the production plan and generating an initial handling task instruction sequence corresponding to each associated overhead crane; the production plan includes a production sub-plan corresponding to each semiconductor processing production line, each production sub-plan includes an execution plan of the production task corresponding to the current semiconductor processing production line, and the execution plan of each production task includes the execution start and end time of the current production task, the required material quantity, the location of the associated process node and the process start and end time; any handling task instruction in the initial handling task instruction sequence includes an operation start point, an operation end point and an operation start and end time; scheduling the work of each associated overhead crane based on the initial handling task instruction sequence corresponding to each associated overhead crane, and obtaining abnormal state information of the semiconductor processing production line from the MES system; sending an emergency scheduling instruction to the target overhead crane based on the abnormal state information of the semiconductor processing production line and the current operating state of each associated overhead crane to control the target overhead crane to adjust the operation parameters; the target overhead crane is an associated overhead crane whose handling operation is affected by the abnormal state of the semiconductor processing production line.
[0099] In addition, the logic instructions in the above-mentioned memory 303 can be implemented in the form of a software functional unit and can be stored in a computer-readable storage medium when it is sold or used as an independent product. Based on this understanding, the technical solution of the present application can be essentially or partly embodied in the form of a software product that contributes to the prior art. The computer software product is stored in a storage medium, including several instructions to enable a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present application. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), disk or optical disk, etc. Various media that can store program codes.
[0100] On the other hand, the present application also provides a computer program product, which includes a computer program, which can be stored on a non-transitory computer-readable storage medium. When the computer program is executed by a processor, the computer can execute the overhead crane task scheduling method based on the MES system collaboration provided by the above-mentioned methods, and the method includes: obtaining a preset production plan from the MES system, determining the associated overhead cranes based on the production plan and generating an initial handling task instruction sequence corresponding to each associated overhead crane; the production plan includes a production sub-plan corresponding to each semiconductor processing production line, and each production sub-plan includes an execution plan for the production task corresponding to the current semiconductor processing production line, and each production task The execution plan includes the execution start and end time of the current production task, the required material quantity, the location of the associated process node and the process start and end time; any handling task instruction in the initial handling task instruction sequence includes the operation start point, operation end point and operation start and end time; based on the initial handling task instruction sequence corresponding to each associated overhead crane, each associated overhead crane is scheduled to work, and the abnormal status information of the semiconductor processing production line is obtained from the MES system; based on the abnormal status information of the semiconductor processing production line and the current operating status of each associated overhead crane, an emergency scheduling instruction is sent to the target overhead crane to control the target overhead crane to adjust the operation parameters; the target overhead crane is an associated overhead crane whose handling operation is affected by the abnormal status of the semiconductor processing production line.
[0101] On the other hand, the present application also provides a non-transitory computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, is implemented to execute the overhead crane task scheduling method based on the MES system collaboration provided by the above-mentioned methods, the method comprising: obtaining a preset production plan from the MES system, determining the associated overhead cranes based on the production plan and generating an initial handling task instruction sequence corresponding to each associated overhead crane; the production plan includes a production sub-plan corresponding to each semiconductor processing production line, each production sub-plan includes an execution plan for the production task corresponding to the current semiconductor processing production line, and each production task execution plan includes the current production task Execution start and end time, required material quantity, location of associated process nodes and process start and end time; any handling task instruction in the initial handling task instruction sequence includes the operation start point, operation end point and operation start and end time; each associated overhead crane is scheduled for work based on the initial handling task instruction sequence corresponding to each associated overhead crane, and abnormal status information of the semiconductor processing production line is obtained from the MES system; based on the abnormal status information of the semiconductor processing production line and the current operating status of each associated overhead crane, an emergency dispatch instruction is sent to the target overhead crane to control the target overhead crane to adjust the operating parameters; the target overhead crane is an associated overhead crane whose handling operation is affected by the abnormal status of the semiconductor processing production line.
[0102] The device embodiments described above are merely illustrative, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of this embodiment. Ordinary technicians in this field can understand and implement it without paying creative labor.
[0103] Through the description of the above implementation methods, those skilled in the art can clearly understand that each implementation method can be implemented by means of software plus a necessary general hardware platform, and of course, can also be implemented by hardware. Based on this understanding, the above technical solution is essentially or the part that contributes to the prior art can be embodied in the form of a software product, and the computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, a disk, an optical disk, etc., including a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in each embodiment or some parts of the embodiments.
[0104] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.
Claims
1. A method for scheduling overhead crane tasks based on MES system collaboration, characterized in that: The method comprises: Obtain a preset production plan from the MES system, determine the associated overhead crane based on the production plan, and generate an initial handling task instruction sequence corresponding to each associated overhead crane; the production plan includes a production sub-plan corresponding to each semiconductor processing production line, each production sub-plan includes an execution plan for the production task corresponding to the current semiconductor processing production line, and the execution plan for each production task includes the execution start and end time of the current production task, the required material quantity, the location of the associated process node, and the process start and end time; any handling task instruction in the initial handling task instruction sequence includes an operation start point, an operation end point, and an operation start and end time; Schedule the work of each associated overhead crane based on the initial handling task instruction sequence corresponding to each associated overhead crane, and obtain abnormal status information of the semiconductor processing production line from the MES system; Based on the abnormal state information of the semiconductor processing production line and the current operating state of each associated overhead crane, an emergency dispatch instruction is sent to the target overhead crane to control the target overhead crane to adjust the operating parameters; the target overhead crane is an associated overhead crane whose handling operation is affected by the abnormal state of the semiconductor processing production line; The sending of an emergency dispatch instruction to a target overhead crane based on the abnormal status information of the semiconductor processing production line and the current operating status of each associated overhead crane to control the target overhead crane to adjust the operating parameters specifically includes: Based on the abnormal state information of the semiconductor processing production line, determine the target process node where the abnormality occurs and the abnormality type of the target process node; the abnormality type of the target process node includes process parameter changes and process equipment failures; Based on the target process node, the abnormal type of the target process node and the current operating status of the associated overhead cranes of the semiconductor processing production line, determine the target overhead cranes and generate emergency dispatch instructions corresponding to each target overhead crane; Sending a corresponding emergency dispatch instruction to the target overhead crane to control the target overhead crane to adjust the operating parameters of the target handling task instruction in the initial handling task instruction sequence; the emergency dispatch instruction includes the target handling task instruction and indication information of the modified operating parameters corresponding to the target handling task instruction; The determining of the target overhead crane and generating the emergency dispatch instruction corresponding to each target overhead crane based on the target process node, the abnormal type of the target process node and the current operation status of the associated overhead crane of the semiconductor processing production line specifically includes: Based on the abnormal type of the target process node, the execution start and end time of the current production task and the change in the process start and end time of the associated process node are determined; based on the execution start and end time of the current production task, the change in the process start and end time of the associated process node and the handling subtask currently being executed by the associated overhead crane of the semiconductor processing production line, the target overhead crane is determined and emergency dispatch instructions corresponding to each target overhead crane are generated.
2. The method for scheduling overhead crane tasks based on MES system collaboration according to claim 1 is characterized in that: The step of determining the associated overhead cranes based on the production plan and generating the initial handling task instruction sequence corresponding to each associated overhead crane specifically includes: Determine a target semiconductor processing line having a production task based on a production sub-plan corresponding to each semiconductor processing line in the production plan; Determine the associated overhead crane of the target semiconductor processing production line based on the required material quantity of the production task in the production sub-plan corresponding to the target semiconductor processing production line, the position of the associated process node and the initial position of each overhead crane; Based on the execution start and end time of the production tasks in the production sub-plan corresponding to the target semiconductor processing production line, the location of the associated process nodes and the process start and end time, an initial handling task instruction sequence corresponding to each associated overhead crane is generated.
3. The method for scheduling overhead crane tasks based on MES system collaboration according to claim 2 is characterized in that: The step of determining the associated overhead crane of the target semiconductor processing production line based on the required material quantity of the production task in the production sub-plan corresponding to the target semiconductor processing production line, the position of the associated process node and the initial position of each overhead crane specifically includes: Determine the number of overhead cranes required based on the material quantity required for the production task in the production sub-plan corresponding to the target semiconductor processing production line; Based on the position of the initial associated process node of the production task in the production sub-plan corresponding to the target semiconductor processing production line, the initial position of each overhead crane and the number of required overhead cranes, the associated overhead cranes of the target semiconductor processing production line are determined.
4. The method for scheduling overhead crane tasks based on MES system collaboration according to claim 3 is characterized in that: The generating of the initial handling task instruction sequence corresponding to each associated overhead crane based on the execution start and end time of the production task in the production sub-plan corresponding to the target semiconductor processing production line and the process start and end time of the associated process node specifically includes: Based on the execution start and end time of the production task in the production sub-plan corresponding to the target semiconductor processing production line, the location of the associated process node and the process start and end time, determine the operation starting point, operation end point and operation start and end time corresponding to multiple handling sub-tasks of each associated overhead crane; the handling sub-task refers to the handling task of transporting materials from one process node to the next process node; Based on the operation starting points, operation end points and operation start and end times corresponding to the multiple handling subtasks of each associated overhead crane, an initial handling task instruction sequence corresponding to each associated overhead crane is generated.
5. The method for scheduling overhead crane tasks based on MES system collaboration according to claim 4 is characterized in that: The work scheduling of each associated overhead crane based on the initial handling task instruction sequence corresponding to each associated overhead crane specifically includes: For any associated overhead crane, the initial handling task instruction sequence corresponding to the associated overhead crane is sent to the associated overhead crane, so as to control the associated overhead crane to complete the corresponding handling subtasks in sequence.
6. A crane task scheduling device based on MES system collaboration, characterized in that: The device comprises: An initial handling task instruction sequence generating unit is used to obtain a preset production plan from the MES system, determine the associated overhead crane based on the production plan, and generate an initial handling task instruction sequence corresponding to each associated overhead crane; the production plan includes a production sub-plan corresponding to each semiconductor processing production line, each production sub-plan includes an execution plan for the production task corresponding to the current semiconductor processing production line, and the execution plan for each production task includes the execution start and end time of the current production task, the required material quantity, the location of the associated process node, and the process start and end time; any handling task instruction in the initial handling task instruction sequence includes an operation start point, an operation end point, and an operation start and end time; A work scheduling and abnormality monitoring unit is used to schedule the work of each associated overhead crane based on the initial handling task instruction sequence corresponding to each associated overhead crane, and obtain abnormal status information of the semiconductor processing production line from the MES system; An emergency processing unit is used to send an emergency dispatch instruction to a target overhead crane based on abnormal state information of a semiconductor processing production line and the current operating state of each associated overhead crane to control the target overhead crane to adjust operating parameters; the target overhead crane is an associated overhead crane whose handling operation is affected by the abnormal state of the semiconductor processing production line; the emergency processing unit is also used to determine the target process node where an abnormality occurs and the abnormal type of the target process node based on the abnormal state information of the semiconductor processing production line; the abnormal type of the target process node includes process parameter changes and process equipment failures; based on the target process node, the abnormal type of the target process node and the current operating state of the associated overhead cranes of the semiconductor processing production line, the target overhead crane is determined and the corresponding operation parameters of each target overhead crane are generated. sending a corresponding emergency dispatch instruction to a target overhead crane to control the target overhead crane to adjust the operating parameters of the target handling task instruction in the initial handling task instruction sequence; the emergency dispatch instruction includes the target handling task instruction and indication information of the corrected operating parameters corresponding to the target handling task instruction; the emergency processing unit also determines the execution start and end time of the current production task and the change in the process start and end time of the associated process node based on the abnormal type of the target process node, and determines the target overhead crane and generates the emergency dispatch instruction corresponding to each target overhead crane based on the execution start and end time of the current production task, the change in the process start and end time of the associated process node and the handling subtask currently being executed by the associated overhead crane of the semiconductor processing production line.
7. An electronic device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that: When the processor executes the program, the steps of the overhead crane task scheduling method based on MES system collaboration as described in any one of claims 1 to 5 are implemented.
8. A non-transitory computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the overhead crane task scheduling method based on MES system collaboration as described in any one of claims 1 to 5 are implemented.
Citation Information
Patent Citations
Intelligent crown block scheduling integrated management system
CN113885456A