Temperature and humidity control device and method

Abstract

The present invention discloses a temperature and humidity control device and method, which relates to the technical field of temperature and humidity control of semiconductor device production equipment, in order to overcome the technical problem that the glue coating and developing equipment existing in the prior art cannot be used normally, resulting in reduced production efficiency and increased costs. The temperature and humidity control device includes a controller, at least two thermoelectric elements and at least two water vapor sensors. The water vapor sensor is used to monitor the air pipeline of the thermoelectric element to obtain the water vapor content in the air around the air pipeline. The controller is electrically connected to the water vapor sensor and the thermoelectric element, and the controller controls the start and stop of the thermoelectric element corresponding to the water vapor sensor. The temperature and humidity control method includes monitoring the water vapor content in the air around the air pipeline of the first thermoelectric element in a working state; when the water vapor content exceeds a preset range, the first thermoelectric element is turned off and the second thermoelectric element is started at the same time.

Description

Technical Field

[0001] The present invention relates to the technical field of temperature and humidity control of semiconductor device production equipment, and in particular to a temperature and humidity control device and method. Background Art

[0002] In the production process of semiconductor devices, from raw materials to finished products, each process is often carried out in sequence to improve production efficiency. If a problem occurs in the equipment in one of the process links, production will not be able to continue, resulting in losses.

[0003] In the prior art, thermoelectric elements are generally used to control and adjust the temperature and humidity of the glue coating and developing equipment in the production process of semiconductor devices.

[0004] However, during the use of thermoelectric elements, the air pipelines of the thermoelectric elements are easily rubbed against the heat in the air to generate water vapor, causing leakage or even short circuit, resulting in the inability to use the coating and developing equipment normally, reducing production efficiency and increasing costs. Summary of the invention

[0005] The object of the present invention is to provide a temperature and humidity control device and method for overcoming the technical problem in the prior art that the glue coating and developing equipment cannot be used normally, resulting in reduced production efficiency and increased costs.

[0006] In order to achieve the above-mentioned purpose, in a first aspect, the present invention provides a temperature and humidity control device, comprising a controller, at least two thermoelectric elements and at least two water vapor sensors, wherein the thermoelectric elements are used to adjust and control the temperature and humidity of an external device. One thermoelectric element corresponds to at least one water vapor sensor, and the water vapor sensor is used to monitor the air pipeline of the thermoelectric element to obtain the water vapor content in the air around the air pipeline. The controller is electrically connected to the water vapor sensor and the thermoelectric element, and the controller is used to receive the water vapor content signal in the air around the air pipeline monitored by the water vapor sensor. The controller controls the start and stop of the thermoelectric element corresponding to the water vapor sensor according to the water vapor content signal.

[0007] When the above technical solution is adopted, when a thermoelectric element is in working state, the water vapor sensor corresponding to the thermoelectric element in working state is used to monitor the air pipeline of the thermoelectric element to obtain the water vapor content on the air pipeline of the thermoelectric element in working state. At the same time, the water vapor sensor sends the water vapor content signal on the monitored air pipeline to the controller. When the water vapor content received by the controller exceeds the preset range, the controller controls the corresponding thermoelectric element to stop working to avoid excessive water vapor content, causing leakage of the thermoelectric element or even short circuit, and avoiding damage to the thermoelectric element. At the same time, the controller controls another thermoelectric element to start to adjust and control the temperature and humidity of the external device. In this way, there is always a thermoelectric element to control and adjust the temperature and humidity of the external device to avoid interruption. When the external device is a glue coating and developing device, it can ensure the normal use of the glue coating and developing device, avoid production interruption, improve production efficiency, and reduce costs.

[0008] In some possible implementations, the temperature and humidity control device also includes a drying mechanism, which is used to dry the air pipeline; the controller is also electrically connected to the drying mechanism, and the controller is also used to control the start and stop of the drying mechanism according to the water vapor content signal.

[0009] In some possible implementations, the drying mechanism includes multiple fans, which are used to blow air to dry the air pipeline, and one thermoelectric element corresponds to at least one fan; the controller is electrically connected to the fan, and according to the water vapor content signal, the controller is used to control the start and stop of the fan.

[0010] In some possible implementations, the drying mechanism also includes a heating component, and the heat outlet end of the heating component is located between the fan and the air pipeline; the controller is electrically connected to the heating component, and the controller is also used to control the start and stop of the heating component according to the water vapor content signal.

[0011] In some possible implementations, the heating component includes:

[0012] A heater for generating heat;

[0013] At least two transmission tubes are connected to the outlet end of the heater for receiving and transmitting heat; the outlet end of the transmission tube is located between the fan and the air pipeline; one thermoelectric element corresponds to at least one transmission tube.

[0014] In some possible implementations, the number of the thermoelectric elements is two.

[0015] In some possible implementations, the thermoelectric elements correspond one to one with the water vapor sensors.

[0016] In a second aspect, the present invention provides a temperature and humidity control method, which uses the temperature and humidity control device described in the first aspect or any possible implementation of the first aspect to control the temperature and humidity of an external device. The temperature and humidity control method includes:

[0017] monitoring the water vapor content in the air around the air pipeline of the first thermoelectric element in the working state;

[0018] When the water vapor content exceeds a preset range, the first thermoelectric element is turned off and the second thermoelectric element is started.

[0019] The beneficial effects of the temperature and humidity control method described in the second aspect can refer to the beneficial effects of the above-mentioned temperature and humidity control device, which will not be repeated here.

[0020] In some possible implementations, after turning off the first thermoelectric element and starting the second thermoelectric element when the water vapor content exceeds a preset range, the temperature and humidity control method further includes:

[0021] The air line of the first thermoelectric element is dried.

[0022] In some possible implementations, after drying the air pipeline of the first thermoelectric element, the temperature and humidity control method further includes:

[0023] monitoring the water vapor content in the air around the air pipeline of the second thermoelectric element in working state;

[0024] When the water vapor content in the air around the air pipeline of the second thermoelectric element exceeds a preset range, the second thermoelectric element is turned off and the first thermoelectric element is started at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0026] Figure 1 A schematic diagram of a temperature and humidity control method provided in an embodiment of the present invention Figure 1 ;

[0027] Figure 2 A schematic diagram of a temperature and humidity control method provided in an embodiment of the present invention Figure 2 . DETAILED DESCRIPTION

[0028] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0029] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0030] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined. The meaning of "several" is one or more, unless otherwise clearly and specifically defined.

[0031] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by the terms "up", "down", "front", "back", "left", "right", etc. are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0032] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] In the production process of semiconductor devices, from the input of raw materials to the production of finished products, each process is often carried out in sequence to improve production efficiency. For example, the photolithography equipment and the coating and developing equipment in the photolithography process are connected together in an online manner. If any of the equipment has a problem, it will lead to the inability to produce normally, resulting in losses. In the prior art, thermoelectric elements are generally used to control and adjust the temperature and humidity of the coating and developing equipment.

[0034] However, during the use of thermoelectric elements, the air pipelines of the thermoelectric elements are easily rubbed against the heat in the air to generate water vapor, causing leakage or even short circuit, which not only shortens the service life of the thermoelectric elements, but also causes the coating and developing equipment to be unable to use normally, resulting in reduced production efficiency and increased costs.

[0035] In order to solve the technical problems existing in the above-mentioned prior art, an embodiment of the present invention provides a temperature and humidity control device, including a controller, at least two thermoelectric elements and at least two water vapor sensors, wherein the thermoelectric elements are used to adjust and control the temperature and humidity of external equipment. One thermoelectric element corresponds to at least one water vapor sensor, and the water vapor sensor is used to monitor the air pipeline of the thermoelectric element to obtain the water vapor content in the air around the air pipeline. The controller is electrically connected to the water vapor sensor and the thermoelectric element, and the controller is used to receive the water vapor content signal in the air around the air pipeline monitored by the water vapor sensor. The controller controls the start and stop of the thermoelectric element corresponding to the water vapor sensor according to the water vapor content signal.

[0036] When the above technical solution is adopted, when a thermoelectric element is in working state, the water vapor sensor corresponding to the thermoelectric element in working state is used to monitor the air pipeline of the thermoelectric element to obtain the water vapor content in the air around the air pipeline of the thermoelectric element in working state. At the same time, the water vapor sensor sends the water vapor content signal in the air around the monitored air pipeline to the controller. When the water vapor content received by the controller exceeds the preset range, the controller controls the corresponding thermoelectric element to stop working to avoid excessive water vapor content, causing leakage of the thermoelectric element or even short circuit, and avoiding damage to the thermoelectric element. At the same time, the controller controls another thermoelectric element to start to adjust and control the temperature and humidity of the external device. In this way, there is always a thermoelectric element to control and adjust the temperature and humidity of the external device to avoid interruption. When the external device is a glue coating and developing device, it can ensure the normal use of the glue coating and developing device, avoid production interruption, improve production efficiency, and reduce production costs.

[0037] During specific implementation, the number of thermoelectric elements can be two, three, four or more, and correspondingly, the number of water vapor sensors can be two, three, four or more. Moreover, one thermoelectric element can correspond to one water vapor sensor. Of course, one thermoelectric element can also correspond to multiple water vapor sensors. There is no specific limitation here, and the actual situation shall prevail. It should be noted that when the number of thermoelectric elements is multiple, only one thermoelectric element can be in working state, and the other thermoelectric elements are in off state. The water vapor sensor, also called moisture sensor, can sense the water vapor content in the gas and convert it into a usable output signal. The water vapor sensor can feedback the monitored water vapor content to the controller in real time.

[0038] The following takes the number of thermoelectric elements as three as an example to illustrate the specific use of the temperature and humidity control device provided in the embodiment of the present invention. Of course, this is just an example and is not a specific limitation.

[0039] Now define three thermoelectric elements as the first thermoelectric element, the second thermoelectric element and the third thermoelectric element. Assume that at the beginning, the first thermoelectric element is in working state, and the second thermoelectric element and the third thermoelectric element are in off state. The water vapor sensor corresponding to the first thermoelectric element monitors the content of water vapor in the air around the air pipeline of the first thermoelectric element in real time, and sends the water vapor content signal to the controller in real time. After the controller receives the water vapor content signal, it compares it with the stored water vapor preset range. When the water vapor content received by the controller exceeds the preset range, the controller controls the first thermoelectric element to stop working. At the same time, the controller can control the second thermoelectric element to start to adjust and control the temperature and humidity of the external device. At the same time, the water vapor sensor corresponding to the second thermoelectric element monitors the content of water vapor in the air around the air pipeline of the second thermoelectric element in real time, and sends the water vapor content signal to the controller in real time. After the controller receives the water vapor content signal, it compares it with the stored water vapor preset range. At this time, the air pipeline of the first thermoelectric element can be dried in a natural state. When the water vapor content received by the controller exceeds the preset range, the controller controls the second thermoelectric element to stop working, and at the same time, the controller can control the third thermoelectric element or the first thermoelectric element to start. In this way, the temperature and humidity control device provided by the present application can not only avoid damage to the thermoelectric element, but also always have a thermoelectric element to control and adjust the temperature and humidity of the external device, avoiding interruption, ensuring the normal use of the external device, improving production efficiency and reducing costs.

[0040] In a possible implementation, the temperature and humidity control device provided by an embodiment of the present invention also includes a drying mechanism, which is used to dry the air pipeline. The controller is also electrically connected to the drying mechanism, and according to the water vapor content signal, the controller is used to control the start and stop of the drying mechanism. When the water vapor content monitored by the water vapor sensor exceeds the preset range, the controller controls the corresponding thermoelectric element to stop working, and at the same time, the controller controls the drying mechanism to start, so as to dry the air pipeline with excessive water vapor content in the surrounding air. The setting of the drying mechanism can accelerate the drying of the air pipeline, shorten the drying time of the air pipeline, and at the same time, improve the drying effect of the air pipeline.

[0041] In some embodiments, the drying mechanism includes a plurality of fans, which are used to blow dry air pipelines, and one thermoelectric element corresponds to at least one fan. The controller is electrically connected to the fan, and the controller is also used to control the start and stop of the fan according to the water vapor content signal. When the fan is in use, it can generate airflow to accelerate the flow of air, take away the water vapor in the air around the air pipeline, and thus dry the air pipeline. In specific implementation, a thermoelectric element can correspond to one, two, three or more fans, which are not specifically limited here. Of course, under the condition of ensuring the blowing and drying effect, the fewer the number of fans set, the lower the cost of the equipment used. In this application, it is preferred to set one fan. When the water vapor content monitored by the water vapor sensor corresponding to the thermoelectric element in working state exceeds the preset range, the controller controls the fan corresponding to the thermoelectric element to start, and blows the air pipeline of the thermoelectric element dry.

[0042] As an optional method, the drying mechanism also includes a heating component, and the heat outlet end of the heating component is located between the fan and the air pipeline. The controller is electrically connected to the heating component, and the controller is also used to control the start and stop of the heating component according to the water vapor content signal. In this way, the setting of the heating component increases the temperature of the air. When the fan blows, the airflow generated guides the heat generated by the heating component to the air pipeline, so that the air pipeline and the hot air exchange heat, so that the water vapor adsorbed on the air pipeline and the water vapor around the air pipeline evaporate, thereby improving the drying efficiency of the air pipeline.

[0043] Furthermore, the heating assembly includes a heater and at least two transmission tubes. The heater is used to generate heat. The transmission tube is connected to the outlet end of the heater and is used to receive and transmit heat. The outlet end of the transmission tube is located between the fan and the air pipeline. One thermoelectric element corresponds to at least one transmission tube. In specific implementation, one thermoelectric element can correspond to one heater, and one heater transmits heat to multiple transmission tubes. Of course, a valve is provided on each transmission tube. When heat needs to be transmitted, the valve is opened. The valve is electrically connected to the controller, and the controller is used to control the opening and closing of the valve. When the water vapor content monitored by the water vapor sensor corresponding to the thermoelectric element in working state exceeds the preset range, the controller controls the heater to start, controls the valve of the transmission tube corresponding to the thermoelectric element to open, and controls the fan corresponding to the thermoelectric element to start, so as to accelerate the drying of the air pipeline of the thermoelectric element.

[0044] In one example, the number of thermoelectric elements is two. In addition, each thermoelectric element may correspond to a water vapor sensor, a fan, and a transmission tube. In this way, the service life of the thermoelectric element is extended while ensuring the safety of the thermoelectric element, and the normal operation of the external equipment is ensured.

[0045] In addition to the above, an embodiment of the present invention provides a temperature and humidity control method, which uses the temperature and humidity control device described in the first aspect or any possible implementation of the first aspect to control the temperature and humidity of an external device. Figure 1 As shown, the temperature and humidity control method includes the following steps:

[0046] Step S1: monitoring the water vapor content in the air around the air pipeline of the first thermoelectric element in working state;

[0047] Step S2: When the water vapor content exceeds a preset range, the first thermoelectric element is turned off and the second thermoelectric element is started at the same time.

[0048] When the above technical solution is adopted, when the first thermoelectric element is in working state, a water vapor sensor can be used to monitor the water vapor content in the air around the air pipeline of the first thermoelectric element in real time, and the water vapor content signal can be sent to the controller in real time. After the controller receives the water vapor content signal, it is compared with the stored water vapor preset range. When the water vapor content received by the controller exceeds the preset range, the controller controls the first thermoelectric element to stop working. At the same time, the controller can control the second thermoelectric element to start, so as to adjust and control the temperature and humidity of the external device. The temperature and humidity control method provided in the present application can not only avoid damage to the thermoelectric element, but also avoid interruption, and can ensure the normal use of the external equipment, improve production efficiency and reduce costs.

[0049] In one possible implementation, see Figure 2 As shown, when the water vapor content exceeds a preset range, the first thermoelectric element is turned off and the second thermoelectric element is started at the same time, the temperature and humidity control method provided by the present application also includes:

[0050] Step S3: Drying the air pipeline of the first thermoelectric element.

[0051] In specific implementation, a fan and a heating assembly can be used to dry the air pipeline of the first thermoelectric element to improve the drying efficiency of the air pipeline of the first thermoelectric element, shorten the air pipeline drying time, and at the same time, improve the drying effect of the air pipeline of the first thermoelectric element.

[0052] Furthermore, after drying the air pipeline of the first thermoelectric element, the temperature and humidity control method provided by the embodiment of the present invention further includes:

[0053] Step S4: monitoring the water vapor content in the air around the air pipeline of the second thermoelectric element in working state;

[0054] Step S5: When the water vapor content in the air around the air pipeline of the second thermoelectric element exceeds a preset range, the second thermoelectric element is turned off and the first thermoelectric element is started at the same time.

[0055] In this way, a water vapor sensor can be used to monitor the water vapor content in the air around the air pipeline of the second thermoelectric element in real time, and the water vapor content signal can be sent to the controller in real time. After the controller receives the water vapor content signal, it is compared with the stored preset range of water vapor. When the water vapor content received by the controller exceeds the preset range, the controller controls the second thermoelectric element to stop working, turns off the second thermoelectric element, and starts the first thermoelectric element. At this time, not only can the second thermoelectric element be prevented from leaking or even short-circuiting, but there is always a thermoelectric element to control and adjust the temperature and humidity of the external equipment to avoid interruptions, which can ensure the normal use of the external equipment, improve production efficiency, and reduce costs.

[0056] The beneficial effects of the temperature and humidity control method provided in the present application can refer to the beneficial effects of the above-mentioned temperature and humidity control device, which will not be repeated here.

[0057] In order to solve the technical problems existing in the above-mentioned prior art, the embodiment of the present invention provides a

[0058] In the description of the above embodiments, specific features, structures, materials or characteristics may be combined in a suitable manner in any one or more embodiments or examples.

[0059] The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art who is familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention shall be based on the protection scope of the claims.

Claims

1. A temperature and humidity control method for a temperature and humidity control device, characterized in that: The temperature and humidity control device comprises: At least two thermoelectric elements, the thermoelectric elements including a first thermoelectric element and a second thermoelectric element, the thermoelectric elements being used to adjust and control the temperature and humidity of an external device; At least two water vapor sensors, one thermoelectric element corresponds to at least one water vapor sensor, and the thermoelectric elements correspond to the water vapor sensors one by one; the water vapor sensor is used to monitor the air pipeline of the first thermoelectric element and the air pipeline of the second thermoelectric element in working state to obtain the water vapor content in the air around the air pipeline; A drying mechanism, the drying mechanism being used to dry the air pipeline; A controller is electrically connected to both the water vapor sensor and the thermoelectric element, the controller is used to receive a signal of the water vapor content in the air around the air pipeline monitored by the water vapor sensor, the controller is also electrically connected to the drying mechanism, the controller is also used to control the start and stop of the drying mechanism according to the water vapor content signal, the temperature and humidity control method comprises: when the water vapor content in the air around the air pipeline of the first thermoelectric element in a working state exceeds a preset range, the first thermoelectric element is turned off, and the second thermoelectric element is started at the same time to dry the air pipeline of the first thermoelectric element; when the water vapor content in the air around the air pipeline of the second thermoelectric element in a working state is detected to exceed a preset range, the second thermoelectric element is turned off, and the first thermoelectric element is started at the same time.

2. The temperature and humidity control method of the temperature and humidity control device according to claim 1, characterized in that: The drying mechanism includes a plurality of fans, and the fans are used to blow air to dry the air pipeline. One thermoelectric element corresponds to at least one fan. The controller is electrically connected to the fan, and is used to control the start and stop of the fan according to the water vapor content signal.

3. The temperature and humidity control method of the temperature and humidity control device according to claim 2, characterized in that: The drying mechanism also includes a heating component, and the heat outlet end of the heating component is located between the fan and the air pipeline; the controller is electrically connected to the heating component, and the controller is also used to control the start and stop of the heating component according to the water vapor content signal.

4. The temperature and humidity control method of the temperature and humidity control device according to claim 3, characterized in that: The heating assembly comprises: A heater for generating heat; At least two transmission tubes are connected to the outlet end of the heater for receiving and transmitting heat; the outlet end of the transmission tube is located between the fan and the air pipeline; one thermoelectric element corresponds to at least one transmission tube.

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