A silicon ring cleaning apparatus

Abstract

The application discloses a silicon ring cleaning equipment, which comprises a cleaning box and a plurality of cleaning tanks arranged in the cleaning box, a hanging basket is arranged in the cleaning tank, a lifting component is arranged to move the hanging basket to the next cleaning tank, a flower basket is arranged in the hanging basket to place silicon rings, the flower basket comprises two oppositely arranged side plates, a supporting plate is fixed between the two side plates, a supporting roller is rotatably connected to the bottom of the side plate, the circumferential wall of the supporting roller is in abutment with the bottom wall of the hanging basket, a clamping groove is formed in the supporting plate, the silicon ring is in abutment with the supporting roller when the silicon ring is clamped in the clamping groove, a gap is formed between the hanging basket and the flower basket to allow the flower basket to roll, a power assembly is further arranged to drive the hanging basket to swing, the supporting roller reciprocally rolls on the bottom wall of the hanging basket, the supporting roller can drive the silicon ring to swing around the axis of the supporting roller due to the abutment between the silicon ring and the supporting roller, the relative movement between the silicon ring and the flower basket is realized, the position of the silicon ring in contact with the clamping groove can be cleaned, and the cleaning quality of the silicon ring is improved.

Description

Technical Field

[0001] This invention relates to the field of silicon ring cleaning technology, and in particular, to a silicon ring cleaning device. Background Technology

[0002] In the semiconductor equipment manufacturing industry, silicon ring cleaning is a critical process. Its purpose is to remove impurities and contaminants from the surface of the silicon ring to improve its quality and performance.

[0003] Traditional silicon ring cleaning equipment typically involves first soaking the silicon ring, then cleaning it with a chemical solution, and finally transferring it to a clean water tank for ultrasonic rinsing. This cleaning process requires placing the silicon ring in a basket, which is then placed entirely into the cleaning tank. During cleaning, the silicon ring rests within a retaining groove, preventing it from moving. This results in poor cleaning at the retaining point, leaving residue and cleaning marks on the silicon ring.

[0004] Therefore, how to design a silicon ring cleaning device to improve the cleaning effect of silicon rings has become a technical problem that urgently needs to be solved by people in this field. Summary of the Invention

[0005] In order to solve at least one of the technical problems mentioned in the background art, the present invention aims to provide a silicon ring cleaning device to solve the problem of dirt residue at the snap-fit ​​position of the silicon ring and the snap-fit ​​groove.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] A silicon ring cleaning device includes a cleaning tank and several cleaning tanks disposed within the cleaning tank. Each cleaning tank contains a basket, and the device also includes a lifting component to move the basket to the next cleaning tank. A basket for holding silicon rings is placed inside the basket. The basket includes two opposing side plates, with a support plate fixed between the two side plates. A support roller is rotatably connected to the bottom of each side plate, and the peripheral wall of the support roller abuts against the bottom wall of the basket. A snap-fit ​​groove is provided on the support plate. When the silicon ring is snapped into the snap-fit ​​groove, the silicon ring abuts against the support roller. A gap is left between the basket and the basket for the basket to roll. The device also includes a power component for driving the basket to swing.

[0008] Furthermore, the power assembly includes a sliding plate, a lifting trough, an electric push rod, and a connecting plate. There are two sets of sliding plates, located on both sides of the cleaning tank and slidably connected to the side wall of the cleaning tank. The electric push rod is installed on the side wall of the cleaning tank, and its telescopic end is fixedly connected to the sliding plate. The lifting trough has a W-shaped longitudinal section, is located on the side wall of the sliding plate, and has its opening facing upward. The connecting plate is slidably connected to the cleaning tank along the height of the cleaning tank. The bottom end of the connecting plate is inserted into the lifting trough and abuts against the bottom wall of the lifting trough. The other end of the connecting plate is connected to the side wall of the suspended basket.

[0009] Furthermore, each cleaning tank has two lifting slots on the sliding plates on both sides, and the basket has two lifting rods on the same plane. There are two sets of connecting plates, which are installed on the lifting rods respectively. When the telescopic rod of the electric push rod extends or retracts, the two connecting plates on the same side of the basket rise or fall in opposite directions.

[0010] Furthermore, a roller is rotatably mounted on the connecting plate, and the peripheral wall of the roller abuts against the bottom wall of the lifting groove.

[0011] Furthermore, the connecting plate is provided with a horizontal sliding groove, and the end wall of the lifting rod is fixed with a plug-in post that is inserted into the sliding groove, and the plug-in post is slidably connected to the sliding groove.

[0012] Furthermore, the longitudinal section of the groove is transversely rhomboid.

[0013] Furthermore, the lifting component is equipped with a gripping assembly for gripping the lifting rod. The gripping assembly includes several mechanical grippers, each of which includes a mounting plate, a first gear, a second gear, a first clamping arm, a second clamping arm, and a third motor. The first gear and the second gear are rotatably mounted on the mounting plate and are externally meshed. The third motor is fixedly mounted on the mounting plate, and its output shaft is fixedly connected to either the first gear or the second gear. There are two first clamping arms, which are respectively fixed to the first gear and the second gear. The second clamping arm is rotatably connected to the first clamping arm via a rotating shaft. When the mechanical grippers are closed, the clamping ends of the two second clamping arms abut against each other and are in a horizontal state. The mechanical grippers also include a limiting mechanism to restrict the second clamping arms from rotating outward around the axis of rotation.

[0014] Furthermore, the limiting mechanism includes a first positioning rod, a second positioning rod, a tension spring, and a limiting block. The first positioning rod is fixedly installed on the first clamping arm, the second positioning rod is fixedly installed on the second clamping arm, the rotating shaft is located between the second positioning rod and the clamping end of the second clamping arm, one end of the tension spring is hooked on the first positioning rod, and the other end is hooked on the second positioning rod. The limiting block is fixedly installed on the first clamping arm, and the bottom wall of the limiting block abuts against the top wall of the second clamping arm away from the clamping end.

[0015] Furthermore, each of the lifting rods has two corresponding mechanical grippers, and the first gears on the two mechanical grippers are poweredly connected through a transmission shaft, while the output shaft of the third motor is fixedly connected to the transmission shaft.

[0016] Furthermore, the lifting component includes a movable base and a moving assembly that drives the movable base to move along the length of the cleaning tank. The movable base is slidably connected to the side wall of the cleaning tank. The moving assembly includes a second motor, a drive gear, and a rack. The second motor is fixedly mounted on the movable base, the drive gear is fixedly connected to the output shaft of the second motor, and the rack is fixedly mounted on the side wall of the cleaning tank. The drive gear and the rack mesh with each other.

[0017] Compared with the prior art, the beneficial effects of the present invention are as follows: The present invention places the silicon ring on the support roller through the snap-fit ​​groove, and uses a power component to drive the basket to swing in the cleaning tank. Since there is a gap between the basket and the basket for the basket to roll, the support roller rolls back and forth on the bottom wall of the basket. Since the silicon ring abuts against the support roller, the support roller can drive the silicon ring to swing around its own axis, realizing the relative movement between the silicon ring and the basket, thereby cleaning the position where the silicon ring contacts the snap-fit ​​groove and improving the cleaning quality of the silicon ring.

[0018] The lifting mechanism allows the basket to be moved to the next cleaning tank, improving the cleaning efficiency of the silicon rings. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0020] Figure 2 This is a schematic diagram of the placement of the suspended basket of the present invention;

[0021] Figure 3 This is a schematic diagram of the structure of the suspended platform of the present invention;

[0022] Figure 4 This is a schematic diagram of the structure of the flower basket of the present invention;

[0023] Figure 5 This is a cross-sectional view of the flower basket;

[0024] Figure 6 This is a front view of the sliding plate;

[0025] Figure 7 This is a structural schematic diagram of the lifting component;

[0026] Figure 8 This is a schematic diagram of the mechanical gripper during clamping.

[0027] Figure 9 This is a schematic diagram of the mechanical gripper when it is deployed.

[0028] Figure 10 This is a structural diagram of the suspended platform during the grabbing process;

[0029] Figure 11 This is a schematic diagram of the installation of the lifting rod and connecting plate of the present invention;

[0030] Figure 12 This is a schematic diagram of the sliding plate installation.

[0031] In the diagram: 1. Cleaning tank; 10. Cleaning trough; 101. Lifting trough; 11. Sliding plate; 1101. Long trough; 1102. Bearing; 1103. Positioning shaft; 11031. End; 111. Lifting trough; 1111. First position; 1112. Second position; 1113. Third position; 1114. Fourth position; 1115. Fifth position; 12. Support base; 121. Guide rod; 13. Rack; 14. Electric push rod; 2. Lifting component; 20. Moving base; 201. Mounting slot; 21. Lifting assembly; 211. First motor; 212. Lead screw; 213. Lifting plate; 22. Moving assembly; 221. Positioning plate; 222. Second motor; 223. Drive gear; 23. Gripping assembly; 230. Mechanical gripper; 231. Mounting plate; 232. Third motor; 233. First gear; 234. Second gear; 235. First clamping arm; 2351. First positioning rod; 236. Second clamping arm; 2361. Supporting roller; 2362. Rotating shaft; 2363. Second positioning rod; 237. Limiting block; 238. Tension spring; 239. Drive shaft; 241. First position sensor; 242. Second position sensor; 25. Sliding block; 3. Suspended basket; 31. Lifting rod; 310. Insertion post; 311. Connecting plate; 3111. Slide groove; 312. Roller; 4. Basket; 40. Silicon ring; 41. Side plate; 42. Support plate; 421. Snap-fit ​​groove; 43. Supporting roller; 431. Support groove. Detailed Implementation

[0032] The technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0033] This embodiment provides a silicon ring cleaning device, which is mainly used to improve the cleaning effect of silicon rings and solve the problem of dirt residue at the contact position between the silicon ring and the retaining groove.

[0034] like Figure 1 As shown, the cleaning equipment includes a cleaning tank 1 placed on the ground with its opening facing upward. The cleaning tank 1 contains several cleaning tanks 10 arranged in sequence. In this embodiment, there are four cleaning tanks 10. Each cleaning tank 10 contains a different cleaning liquid. When cleaning, the silicon ring 40 needs to pass through each cleaning tank 10 in sequence to rinse the impurities and stains on the surface of the silicon ring 40.

[0035] To achieve the placement of the silicon ring 40, in this embodiment, as follows: Figure 2 , Figure 3 and Figure 4As shown, it includes a flower basket 4 for storing silicon ring 40 and a hanging basket 3 for storing flower basket 4, wherein flower basket 4 is placed in the inner cavity of hanging basket 3.

[0036] To facilitate the transfer of the suspended basket 3 from one cleaning tank 10 to the next, in this embodiment, the cleaning tank 1 is also equipped with a lifting component 2 for transferring the suspended basket 3, such as... Figure 1 and Figure 7 As shown, the lifting component 2 includes a gripping assembly 23 for gripping the basket 3, a lifting assembly 21 for raising and lowering the basket 3, and a moving assembly 22 for driving the lifting assembly 21 to move along the length of the cleaning tank 1. The gripping assembly 23 is mounted on the lifting assembly 21, and the lifting assembly 21 is mounted on the moving assembly 22. The moving assembly 22 can drive the lifting assembly 21 and the gripping assembly 23 to move, thereby moving the basket 3 above different cleaning tanks 10. The lifting assembly 21 can lift and lower the basket 3. When the basket 3 needs to be moved to the next cleaning tank 10, the lifting assembly 21 can lift the basket 3 upward from the cleaning tank 10 to prevent the basket 3 from touching the inner wall of the cleaning tank 10 during the movement. When the basket 3 moves above the corresponding cleaning tank 10, the lifting assembly 21 drives the basket 3 downward, and then the gripping assembly 23 engages to grip the basket 3, thus realizing the movement of the basket 3.

[0037] It is worth noting that, due to the special material of the silicon ring 40, if the gripping component 23 directly grips the flower basket 4, the gripping component 23 is likely to come into contact with the silicon ring 40 in the flower basket 4, which may cause damage to the silicon ring 40. Therefore, in this embodiment, the flower basket 4 is placed in the hanging basket 3, and the flower basket 4 and the silicon ring 40 can be moved by lifting the hanging basket 3.

[0038] To achieve the placement of the silicon ring 40, in this embodiment, as follows: Figure 4 As shown, the flower basket 4 has an upward-facing opening and includes two opposing side panels 41. A support plate 42, perpendicular to both side panels 41, is fixedly mounted on each side panel 41. The support plate 42 has a snap-fit ​​groove 421. In this embodiment, as shown... Figure 4 As shown, the support plate 42 is provided with two sets on the same horizontal plane, and the snap-fit ​​grooves 421 on the two support plates 42 are aligned with each other. When the silicon ring 40 is placed, the silicon ring 40 can be snapped into the snap-fit ​​groove 421, thereby completing the placement of the silicon ring 40.

[0039] It is worth noting that, in order to facilitate the placement of the silicon ring 40, the opening of the snap-fit ​​groove 421 is V-shaped in this embodiment.

[0040] Under normal circumstances, after the silicon ring 40 is placed inside the basket 4, the silicon ring 40 will be snapped into the snap-fit ​​groove 421. During the cleaning process, the silicon ring 40 and the basket 4 are relatively stationary. At this time, the contact point between the silicon ring 40 and the snap-fit ​​groove 421 is prone to stains, resulting in incomplete cleaning of the silicon ring 40 and affecting its quality.

[0041] Therefore, in this embodiment, as Figure 4 and Figure 5 As shown, a support roller 43 is rotatably connected to the bottom of the flower basket 4. After the flower basket 4 is placed inside the hanging basket 3, the peripheral wall of the support roller 43 abuts against the bottom wall of the hanging basket 3, and the flower basket 4 can roll inside the hanging basket 3 via the support roller 43. Specifically, in order to improve the cleaning effect of the silicon ring 40, the silicon ring 40 needs to move relative to the flower basket 4 during the cleaning process, so as to thoroughly clean the engagement position between the silicon ring 40 and the engagement groove 421 and improve the cleaning effect. In order to achieve the movement of the silicon ring 40, in this embodiment, as follows... Figure 4 As shown, the peripheral wall of the support roller 43 is provided with an annular support groove 431, wherein the number of support grooves 431 corresponds to the number of snap-fit ​​grooves 421. When the silicon ring 40 is snapped into the snap-fit ​​groove 421, the bottom of the silicon ring 40 is snapped into the support groove 431. The cleaning box 1 is also provided with a power component for driving the flower basket 4 to move in the hanging basket 3.

[0042] With the above setup, when the hanging basket 3 and the flower basket 4 are placed in the cleaning tank 10, the silicon ring 40 is immersed in the cleaning solution. The power component drives the flower basket 4 to roll in the inner cavity of the hanging basket 3. At this time, the support roller 43 rotates. The friction between the support roller 43 and the silicon ring 40 can drive the silicon ring 40 to rotate relative to each other. Thus, the position where the silicon ring 40 contacts the snap-fit ​​groove 421 is exposed in the cleaning solution, thereby improving the cleaning quality of the silicon ring 40.

[0043] To facilitate the lifting of the suspended platform 3, in this embodiment, as follows: Figure 2 and Figure 3 As shown, a horizontal lifting rod 31 is fixedly provided on the basket 3. When it is necessary to lift the basket 3, the lifting rod 31 can be grabbed by the gripping component 23.

[0044] In order to enable relative movement between the silicon ring 40 and the basket 4, the above solution achieves this through the rotation of the support roller 43. Under normal circumstances, the rotation of the support roller 43 can be achieved by a motor. However, since the basket 4 needs to be immersed in the cleaning solution, the motor also needs electricity to drive it. This requires improvements to the basket 4, which increases the cost of the basket 4. In addition, the motor being immersed in the cleaning solution also poses a risk of leakage and motor damage.

[0045] Therefore, in order for the support roller 43 on the flower basket 4 to rotate, in this embodiment, as... Figure 2 As shown, the power component drives the suspended basket 3 to tilt at an angle, causing the bottom wall of the inner cavity of the suspended basket 3 to tilt at an angle. At this time, the support roller 43 on the basket 4 can roll on the bottom wall of the suspended basket 3, thereby driving the silicon ring 40 to rotate.

[0046] In order to enable the flower basket 4 to move within the inner cavity of the hanging basket 3, in this embodiment, as follows: Figure 5 As shown, the width of the inner cavity of the hanging basket 3 is greater than the width of the flower basket 4. After the flower basket 4 is placed in the inner cavity of the hanging basket 3, a distance H is left between the side wall of the flower basket 4 and the side wall of the hanging basket 3 to allow the flower basket 4 to move in the inner cavity of the hanging basket 3.

[0047] To improve the stability of the suspended basket 3 during lifting and to allow the suspended basket 3 to tilt at an angle within the cleaning tank 10, in this embodiment, as follows: Figure 2 and Figure 3 As shown, the lifting rod 31 is provided in two sets and located on the same horizontal plane. The power assembly includes a sliding plate 11, an electric push rod 14, a lifting groove 111, and a connecting plate 311. Here, the direction is redefined as follows: Figure 2 As shown in the spatial coordinate system, the length direction of the cleaning tank 1 is the X-axis direction, the width direction of the cleaning tank 1 is the Y-axis direction, and the height direction of the cleaning tank 1 is the Z-axis direction. The sliding plate 11 is set along the X-axis direction and is slidably connected to the side wall of the cleaning tank 1. The lifting groove 111 is set on the side wall of the sliding plate 11, and the bottom wall of the lifting groove 111 is defined as the lifting rail. The connecting plate 311 is installed on the end wall of the lifting rod 31. The side wall of the connecting plate 311 is slidably connected to the side wall of the cleaning tank 1 along the Z-axis direction. The connecting plate 311 extends vertically downward and is slidably connected to the lifting rail. The housing of the electric push rod 14 is installed on the side wall of the cleaning tank 1, and the telescopic end of the electric push rod 14 is fixedly connected to the sliding plate 11.

[0048] To improve the stability of the sliding plate 11, in this embodiment, as follows: Figure 6 and Figure 12 As shown, the sliding plate 11 has an elongated groove 1101, which is arranged along the X-axis. The side wall of the cleaning tank 1 is fixed with a positioning shaft 1103, which is arranged along the Y-axis and extends outward through the elongated groove 1101. The end of the positioning shaft 1103 is provided with an end head 11031, and the side wall of the end head 11031 abuts against the side wall of the sliding plate 11 to restrict the sliding plate 11 from flipping outward and improve the stability of the sliding plate 11.

[0049] To reduce the resistance of the sliding plate 11 sliding along the X-axis direction, in this embodiment, as follows: Figure 12As shown, a bearing 1102 is sleeved on the positioning shaft 1103. The outer ring of the bearing 1102 abuts against the inner wall of the long groove 1101. The bearing 1102 bears the weight of the sliding plate 11. During the movement of the sliding plate 11 along the X-axis, the bearing 1102 rolls in the long groove 1101, reducing the resistance when the sliding plate 11 moves.

[0050] It is worth noting that both sets of lifting rods 31 are equipped with connecting plates 311. When the telescopic rod of the electric push rod 14 extends outward or retracts, one of the lifting rods 31 is raised upward and the other lifting rod 31 is lowered downward, thereby tilting the basket 3 so that the flower basket 4 can slide in the inner cavity of the basket 3. By using the reciprocating extension and retraction of the electric push rod 14, the basket 3 can be swayed. At this time, the support roller 43 can continuously roll, thereby driving the silicon ring 40 to rotate in the support groove 431 and the snap-fit ​​groove 421, improving the cleaning effect.

[0051] It is worth noting that, since the connecting plate 311 slides along the Z-axis of the cleaning tank 1, when the connecting plate 311 pushes the basket 3 into an inclined state via the lifting rods 31, the distance between the two lifting rods 31 is a fixed value. If the connecting plate 311 is fixedly connected to the lifting rods 31, it is easy to cause the basket 3 to jam. Therefore, in this embodiment, if... Figure 11 As shown, the end wall of the lifting rod 31 is fixedly connected with a plug-in post 310, and the side wall of the connecting plate 311 is provided with a sliding groove 3111, wherein the sliding groove 3111 has a horizontal rhomboid structure, the plug-in post 310 is inserted into the sliding groove 3111, and the plug-in post 310 can slide in the sliding groove 3111, thus solving the problem of jamming during the lifting and lowering of the suspended basket 3.

[0052] In order to ensure that the connecting plate 311 slides stably along the Z-axis direction of the cleaning box 1, in this embodiment, the cleaning box 1 is provided with a slot for the connecting plate 311 to be inserted. The slot is aligned with the opening of the lifting groove 111. When the connecting plate 311 is inserted into the slot, the side wall of the slot abuts against the side wall of the connecting plate 311.

[0053] It is worth noting that, under normal circumstances, in order to solve the problem of the suspended basket 3 getting stuck, the slide groove 3111 can be a waist-shaped groove. In order to accommodate the impact of the suspended basket 3 getting stuck when swinging, the plug-in post 310 will slide in the slide groove 3111 to accommodate the swinging of the suspended basket 3. Based on the case of the slide groove 3111 being a waist-shaped groove, when the lifting component 2 moves the suspended basket 3 to the precise position of the cleaning tank 10, since the connecting plate 311 can slide in the slide groove 3111, the position of the connecting plate 311 is uncertain. Therefore, during the downward placement of the suspended basket 3, the connecting plate 311 cannot accurately pass through the groove opening and enter the lifting tank 111.

[0054] It is worth noting that in this embodiment, setting the slide 3111 into a horizontal rhomboid structure can solve this problem, such as... Figure 11 As shown, when the suspended basket 3 moves downward under the action of the lifting component 2, due to the gravity of the connecting plate 311 itself, the top wall of the rhomboid slide 3111 tilts at an angle, and the top wall abuts against the peripheral wall of the insertion column 310, so that the insertion column 310 can contact the highest point of the rhomboid slide 3111, and the position of the connecting plate 311 can be adjusted appropriately to ensure that the connecting plate 311 can be accurately inserted into the lifting groove 111 through the slot. When the lifting rod 31 is lifted upward, the insertion column 310 abuts against the lower bottom wall of the rhomboid slide 3111, thereby lifting the suspended basket 3 upward.

[0055] Specifically, in this embodiment, such as Figure 2 and Figure 6 As shown, the longitudinal section of the lifting groove 111 is W-shaped. The lifting rail is sequentially provided with a first point 1111, a second point 1112, a third point 1113, a fourth point 1114, and a fifth point 1115. The line connecting the five points forms a downward-opening V-shape. The first point 1111 and the fifth point 1115 are on the same horizontal plane, the second point 1112 and the fourth point 1114 are on the same horizontal plane, and the position of the second point 1112 is higher than the horizontal plane of the first point 1111. The horizontal plane of the third point 1113 is higher than the horizontal plane of the second point 1112. Each cleaning tank 10 has two lifting grooves 111 on its side. The connecting plates 311 at the ends of the two lifting rods 31 are respectively inserted into the corresponding lifting grooves 111. Figure 6 As shown, when the suspended platform 3 is placed, one of the connecting plates 311 contacts the second point 1112, and the other connecting plate 311 contacts the fourth point 1114; or, when one of the connecting plates 311 contacts the first point 1111, the other connecting plate 311 contacts the third point 1113; or, when one of the connecting plates 311 contacts the third point 1113, the other connecting plate 311 contacts the fifth point 1115.

[0056] To reduce friction between the connecting plate 311 and the lifting rail, in this embodiment, as follows: Figure 2 and Figure 6 As shown, a roller 312 is rotatably connected to the connecting plate 311, wherein the roller 312 is rotatably connected to the lifting rail.

[0057] It is worth noting that when the basket 3 is placed inside the cleaning tank 10, the lifting rod 31 is set along the Y-axis and the two lifting rods 31 are distributed along the X-axis. When the basket 4 is placed in the inner cavity of the basket 3, the axis of the silicon ring 40 in the basket 4 is parallel to the Y-axis.

[0058] When the suspended basket 3 is placed in the cleaning tank 10, in order to ensure the accuracy of the placement of the suspended basket 3, in this embodiment, as follows: Figure 1 and Figure 2 As shown, the side wall of the cleaning tank 10 is fixedly provided with a lifting groove 101, wherein the lifting groove 101 has a V-shaped structure with the opening facing upward. When the basket 3 is placed, the lifting rod 31 can be placed in the corresponding lifting groove 101.

[0059] In order to move the lifting component 2 along the length of the cleaning tank 1, that is, along the X-axis direction, in this embodiment, as follows: Figure 1 and Figure 7 As shown, the lifting component 2 includes a movable seat 20 that is slidably connected to the cleaning tank 1 along the X-axis direction. The moving component 22 includes a positioning plate 221, a second motor 222, a drive gear 223, and a rack 13. The rack 13 is fixedly installed on the side wall of the cleaning tank 1, the positioning plate 221 is fixedly installed on the side wall of the movable seat 20, the second motor 222 is fixedly installed on the positioning plate 221, the drive gear 223 is fixedly connected to the output shaft of the second motor 222, and the drive gear 223 meshes with the rack 13.

[0060] With the above settings, the second motor 222 is driven, which in turn drives the drive gear 223 to rotate. Since the rack 13 is fixedly installed on the cleaning box 1 and the moving seat 20 is slidably connected to the cleaning box 1, the drive gear 223 and the rack 13 move relative to each other, which in turn drives the lifting component 2 to move and changes the position of the lifting component 2 to facilitate the lifting operation of the basket 3.

[0061] To ensure the stability of the movement of the movable seat 20, in this embodiment, as follows: Figure 1 and Figure 7 As shown, a support base 12 is fixedly provided on the side wall of the cleaning tank 1, and a guide rod 121 is provided on the support base 12 along the X-axis direction. A sliding block 25 is fixedly provided on the movable seat 20, wherein the sliding block 25 is slidably connected to the guide rod 121.

[0062] In this embodiment, in order to improve the accuracy of the movement of the movable seat 20, the second motor 222 is a stepper motor.

[0063] In order to lift or lower the suspended basket 3, in this embodiment, as follows: Figure 1As shown, the lifting assembly 21 includes a first motor 211, a lead screw 212, and a lifting plate 213. The movable seat 20 is provided with a mounting groove 201. The lifting plate 213 is installed in the mounting groove 201, and the side wall of the lifting plate 213 is slidably connected to the side wall of the mounting groove 201. The first motor 211 is fixedly installed on the movable seat 20, and the output shaft of the first motor 211 is fixedly connected to the lead screw 212. The lead screw 212 is arranged along the Z-axis direction and is threadedly connected to the lifting plate 213. The gripping assembly 23 is installed on the lifting plate 213 to grip the lifting rod 31.

[0064] With the above settings, the first motor 211 can rotate in the forward or reverse direction, thereby driving the lead screw 212 to rotate. Since the side wall of the lifting plate 213 is slidably connected to the side wall of the mounting groove 201, and the lead screw 212 is threadedly connected to the lifting plate 213, the lifting plate 213 can be driven to move up and down, thereby lifting or lowering the basket 3.

[0065] When the bottom wall of the suspended platform 3 is higher than the top wall of the cleaning tank 10, the lifting of the suspended platform 3 can be stopped. When the suspended platform 3 descends to a certain height from the bottom wall of the cleaning tank 10, the descent of the suspended platform 3 can be stopped. Therefore, in this embodiment, as... Figure 1 and Figure 7 As shown, the side wall of the movable seat 20 is also fixedly provided with a first position sensor 241 and a second position sensor 242 arranged sequentially along the Z-axis direction. The position of the first position sensor 241 is lower than that of the second position sensor 242. When the lifting plate 213 is aligned with the first position sensor 241, the basket 3 is lowered to the designated position. When the lifting plate 213 is aligned with the second position sensor 242, the basket 3 is raised or lowered to the designated position.

[0066] It is worth noting that lowering the basket 3 to a designated position means lowering the basket 3 to a certain height to facilitate its placement into the cleaning tank 10. Raising or lowering the basket 3 to a designated position means raising or lowering the basket 3 to a certain height, i.e., the bottom wall of the basket 3 exceeds the top wall of the cleaning tank 1, so that the basket 3 will not touch the cleaning tank 1 during movement.

[0067] In order to enable the lifting and scooping of the suspended platform 3, in this embodiment, as follows: Figure 7 As shown, the gripping component 23 includes a mechanical gripper 230, which can be used to grip the lifting rod 31.

[0068] To improve the stability of the basket 3 after it is gripped, each lifting rod 31 is gripped by two mechanical grippers 230. In this embodiment, four mechanical grippers 230 are provided, each corresponding to one of the two lifting rods 31.

[0069] To facilitate gripping of the lifting rod 31, such as Figure 1 and Figure 7 As shown, two mechanical grippers 230 that lift the same lifting rod 31 are connected by a drive shaft 239. The system also includes a third motor 232, which is fixedly connected to the drive shaft 239. The third motor 232 controls the opening or closing of the same set of mechanical grippers 230.

[0070] During the cleaning process, the power component drives the sliding plate 11 to move back and forth, which in turn drives the basket 3 to swing. Conventional mechanical grippers 230 cannot easily grasp the lifting rod 31 on the basket 3.

[0071] Therefore, in this embodiment, as Figure 8 As shown, the mechanical gripper 230 includes a mounting plate 231, on which a first gear 233 and a second gear 234 are rotatably mounted. The output shaft of a third motor 232 is fixedly connected to the first gear 233. A first gripping arm 235 is fixedly connected to both the first gear 233 and the second gear 234. A second gripping arm 236 is rotatably connected to each of the first gripping arms 235 via a rotating shaft 2362. The end of the second gripping arm 236 furthest from the rotating shaft 2362 is defined as the gripping end. A first positioning rod 2351 is fixedly provided on the first clamping arm 235, and a second positioning rod 2363 is fixedly provided on the side of the second clamping arm 236 away from the clamping end. A rotating shaft 2362 is located between the clamping end and the second positioning rod 2363. A tension spring 238 is hooked between the second positioning rod 2363 and the first positioning rod 2351. A limiting block 237 is also fixedly provided on the first clamping arm 235, and the limiting block 237 abuts against the top wall on the side away from the clamping end to restrict the second clamping arm 236 from rotating outward. In the initial state, the two second clamping arms 236 are horizontally arranged. Figure 8 As shown, when it is necessary to release the clamp on the lifting rod 31, the third motor 232 drives the first gear 233 and the second gear 234 to rotate, which in turn drives the second clamping arm 236 to open through the first clamping arm 235, thereby releasing the lifting rod 31. Figure 9 As shown by the dashed line in the image.

[0072] The inward and outward directions of the mechanical gripper 230 are redefined here, as follows: Figure 8 The direction indicated by the middle arrow is the inside of the mechanical gripper 230. Figure 9 The direction of the downward arrow is the outer side of the mechanical gripper 230.

[0073] With the above settings, it is worth noting that the first gear 233 and the second gear 234 are in external meshing mode. In the initial state, the tension spring 238 provides tension to the second clamping arm 236, causing the second clamping arm 236 to rotate around the rotating shaft 2362. When the top wall of the second clamping arm 236 abuts against the bottom wall of the limiting block 237, the second clamping arm 236 stops rotating. At the same time, the third motor 232 causes the mechanical gripper 230 to be in a closed state through the first gear 233 and the second gear 234.

[0074] When it is necessary to clamp the lifting rod 31, the first motor 211 drives the lifting plate 213 to move downward, so that the first position sensor 241 is aligned with the lifting plate 213. Figure 8 and Figure 10 As shown, at this time, the suspended platform 3 will tilt at an angle α, causing the two lifting rods 31 to be at different heights. Figure 10 The lifting rod 31 on the left side is in its lowest position. Figure 10 The right-side lifting lever 31 is at its highest position; when the mechanical gripper 230 moves to the designated position, the right-side lifting lever 31 rises and pushes against the two second gripping arms 236, as... Figure 8 As shown, the second clamping arm 236 moves from the solid line position to the dashed line position, opening the mechanical gripper 230. When the lifting rod 31 moves to its highest point, the tension spring 238 pulls the second clamping arm 236 back to its original position around the pivot 2362, thus completing the clamping of the lifting rod 31. Since the top wall of the second clamping arm 236 abuts against the bottom wall of the limiting block 237, the second clamping arm 236 is prevented from flipping downwards, thereby maintaining the right lifting rod 31 at its highest point. As the electric push rod 14 continues to move, the left lifting rod 31 continues to move upwards. As the left lifting rod 31 continues to be held by the mechanical gripper 230, the first motor 211 can drive the lifting plate 213 to move upward, thereby lifting the basket 3 upward. When the lifting plate 213 is aligned with the second position sensor 242, the basket 3 is lifted out of the cleaning tank 10. The moving component 22 drives the lifting component 2 to move, moving the basket 3 above the next cleaning tank 10. Then, the basket 3 is released downward. When the basket 3 descends to the corresponding height, the third motor 232 drives the mechanical gripper 230 to open, from... Figure 9 The solid line position is switched to the dashed line position, which allows the lifting rod 31 to be released, thus solving the problem of the swaying effect during the lifting process of the basket 3.

[0075] In this embodiment, in order to smoothly grip the lifting rod 31 with the mechanical gripper 230, as shown in the example... Figure 8 and Figure 9As shown, the clamping end of the second clamping arm 236 is rotatably equipped with a support roller 2361. When the lifting rod 31 is clamping, the peripheral wall of the lifting rod 31 will abut against the support roller 2361. As the lifting rod 31 moves upward, the support roller 2361 will rotate, reducing the resistance of the lifting rod 31 to push open the mechanical gripper 230. In the initial state, the peripheral walls of the two support rollers 2361 abut against each other.

[0076] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within the present invention.

Claims

1. A silicon ring cleaning device, comprising a cleaning tank (1) and a plurality of cleaning tanks (10) disposed in the cleaning tank (1), wherein a basket (3) is provided in the cleaning tank (10), and further comprising a lifting component (2) for moving the basket (3) to the next cleaning tank (10), characterized in that: The basket (3) contains a flower basket (4) for placing a silicon ring (40). The flower basket (4) includes two opposing side plates (41). A support plate (42) is fixed between the two side plates (41). A support roller (43) is rotatably connected to the bottom of the side plate (41). The peripheral wall of the support roller (43) abuts against the bottom wall of the basket (3). A snap-fit ​​groove (421) is provided on the support plate (42). When the silicon ring (40) is snapped into the snap-fit ​​groove (421), the silicon ring (40) abuts against the support roller (43). A gap is left between the basket (3) and the flower basket (4) for the flower basket (4) to roll. The basket (3) also includes a power component for driving the basket (3) to swing.

2. The silicon ring cleaning equipment according to claim 1, characterized in that: The power assembly includes a sliding plate (11), a lifting groove (111), an electric push rod (14), and a connecting plate (311). The sliding plate (11) is provided in two sets, which are located on both sides of the cleaning box (1) and are slidably connected to the side wall of the cleaning box (1). The electric push rod (14) is installed on the side wall of the cleaning box (1), and the telescopic end of the electric push rod (14) is fixedly connected to the sliding plate (11). The lifting groove (111) has a W-shaped longitudinal section, is located on the side wall of the sliding plate (11), and has an upward opening. The connecting plate (311) is slidably connected to the cleaning box (1) along the height of the cleaning box (1). The bottom end of the connecting plate (311) is inserted into the lifting groove (111) and abuts against the bottom wall of the lifting groove (111). The other end of the connecting plate (311) is connected to the side wall of the basket (3).

3. The silicon ring cleaning equipment according to claim 2, characterized in that: Each cleaning tank (10) has two lifting slots (111) on the sliding plates (11) on both sides. The basket (3) has two lifting rods (31) on the same plane. The connecting plates (311) are provided in two sets and are installed on the lifting rods (31). When the telescopic rod of the electric push rod (14) extends or retracts, the two connecting plates (311) on the same side of the basket (3) rise or fall in opposite directions.

4. The silicon ring cleaning equipment according to claim 3, characterized in that: A roller (312) is rotatably mounted on the connecting plate (311), and the peripheral wall of the roller (312) abuts against the bottom wall of the lifting groove (111).

5. A silicon ring cleaning device according to claim 3 or 4, characterized in that: The connecting plate (311) is provided with a horizontal sliding groove (3111), and the end wall of the lifting rod (31) is fixedly provided with a plug-in post (310) that is inserted into the sliding groove (3111), and the plug-in post (310) is slidably connected to the sliding groove (3111).

6. The silicon ring cleaning equipment according to claim 5, characterized in that: The longitudinal section of the groove (3111) is a transversely placed rhombus.

7. The silicon ring cleaning equipment according to claim 5, characterized in that: The lifting component (2) is equipped with a gripping assembly (23) for gripping the lifting rod (31). The gripping assembly (23) includes a plurality of mechanical grippers (230). Each mechanical gripper (230) includes a mounting plate (231), a first gear (233), a second gear (234), a first clamping arm (235), a second clamping arm (236), and a third motor (232). The first gear (233) and the second gear (234) are rotatably mounted on the mounting plate (231) and are externally meshed. The third motor (232) is fixedly mounted on the mounting plate. On plate (231), the output shaft of the third motor (232) is fixedly connected to the first gear (233) or the second gear (234). There are two first clamping arms (235) and they are respectively fixed on the first gear (233) and the second gear (234). The second clamping arm (236) is rotatably connected to the first clamping arm (235) through the rotating shaft (2362). When the mechanical gripper (230) is closed, the clamping ends of the two second clamping arms (236) abut against each other and are in a horizontal state. The mechanical gripper (230) also includes a limiting mechanism that restricts the second clamping arm (236) from rotating outward around the rotating shaft (2362).

8. The silicon ring cleaning equipment according to claim 7, characterized in that: The limiting mechanism includes a first positioning rod (2351), a second positioning rod (2363), a tension spring (238), and a limiting block (237). The first positioning rod (2351) is fixedly installed on the first clamping arm (235), the second positioning rod (2363) is fixedly installed on the second clamping arm (236), the rotating shaft (2362) is located between the second positioning rod (2363) and the clamping end of the second clamping arm (236), one end of the tension spring (238) is hooked on the first positioning rod (2351), and the other end is hooked on the second positioning rod (2363). The limiting block (237) is fixedly installed on the first clamping arm (235), and the bottom wall of the limiting block (237) abuts against the top wall of the second clamping arm (236) away from the clamping end.

9. A silicon ring cleaning device according to claim 8, characterized in that: Each of the lifting rods (31) has two mechanical grippers (230), and the first gear (233) on the two mechanical grippers (230) is poweredly connected through the transmission shaft (239). The output shaft of the third motor (232) is fixedly connected to the transmission shaft (239).

10. A silicon ring cleaning device according to claim 8, characterized in that: The lifting component (2) includes a movable seat (20) and a moving assembly (22) that drives the movable seat (20) to move along the length of the cleaning tank (1). The movable seat (20) is slidably connected to the side wall of the cleaning tank (1). The moving assembly (22) includes a second motor (222), a drive gear (223), and a rack (13). The second motor (222) is fixedly mounted on the movable seat (20). The drive gear (223) is fixedly connected to the output shaft of the second motor (222). The rack (13) is fixedly mounted on the side wall of the cleaning tank (1). The drive gear (223) and the rack (13) mesh with each other.

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