Gas injection device

Abstract

The present invention discloses a gas injection device, which is installed on a scanning electron microscope. The gas injection device relates to the field of precision instrument technology. The gas injection device includes: a fixing assembly, which is arranged on the outside of the scanning electron microscope and has a mounting hole defined in the middle. The fixing assembly includes a connecting member and a supporting member, and the connecting member is connected to the scanning electron microscope; a gas injection member, which is passed through the mounting hole and mounted on the supporting member; a plurality of adjusting members, which are arranged at intervals along the circumference of the mounting hole. The adjusting member is movably provided in one of the connecting member and the supporting member, and the adjusting member is suitable for abutting against the other of the connecting member and the supporting member. The gas injection device according to an embodiment of the present invention, by providing an adjusting member in one of the connecting member and the supporting member, and the adjusting member can abut against the other of the connecting member and the supporting member, can ensure that the end of the gas injection member is aligned with the confocal point, improve the accuracy of the data obtained by the operator, and facilitate operation.

Description

Technical Field

[0001] The present invention relates to the technical field of precision instruments, and in particular to a gas injection device. Background Art

[0002] When FIB gas injection technology is used in a scanning electron microscope, the gas injection device needs to pass through the scanning electron microscope from the outside to the inside. The gas injection device outside the scanning electron microscope is under atmospheric pressure, and the gas injection device inside the scanning electron microscope is in a vacuum state.

[0003] In the related art, the traditional gas injection device generally first aligns the gas output end inside the scanning electron microscope with the common focal position where the ion beam and electron beam converge in the scanning electron microscope, and then fixes it to the scanning electron microscope. However, the gas output end is easily deviated during the installation of the gas injection device, resulting in the gas output end not being aligned with the common focal position, thereby reducing the accuracy of the data obtained by the operator in later use, making it impossible to use in subsequent operations, and the operation is inconvenient, and there is room for improvement. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, one object of the present invention is to provide a gas injection device that can improve the accuracy of data obtained by an operator and is easy to operate.

[0005] According to an embodiment of the present invention, a gas injection device is installed on a scanning electron microscope, and the gas injection device includes: a fixing component, the fixing component is arranged on the outside of the scanning electron microscope and has a mounting hole defined in the middle, the fixing component includes a connecting member and a supporting member, the connecting member is connected to the scanning electron microscope, at least a portion of the supporting member is located on one side of at least a portion of the connecting member in the axial direction of the mounting hole, and the two are sealed and connected by a first sealing member; a gas injection member, the gas injection member is passed through the mounting hole and installed on the supporting member; a plurality of adjusting members, the plurality of adjusting members are arranged at intervals along the circumference of the mounting hole, the adjusting member is movably provided in one of the connecting member and the supporting member, and the adjusting member is suitable for abutting against the other of the connecting member and the supporting member, the adjusting member can move relative to the connecting member to drive a portion of the supporting member to move in a direction close to or away from the first sealing member to adjust the inclination angle of the support member to change the extension direction of the gas injection member.

[0006] According to the gas injection device of an embodiment of the present invention, a plurality of adjustment members arranged at circumferential intervals along the mounting hole are provided on one of the connecting member and the supporting member, and the plurality of adjustment members can abut against the other of the connecting member and the supporting member, so that the adjustment members can drive the supporting member to drive the gas injection member to tilt in different directions, thereby ensuring that the end of the gas injection member is aligned with the common focal point position where the ion beam and electron beam in the scanning electron microscope converge inside the scanning electron microscope, thereby improving the accuracy of the data obtained by the operator and facilitating operation.

[0007] In addition, compared with the solution in which the operator disassembles and reassembles the gas injection device so that the end of the gas injection component is aligned with the confocal position of the scanning electron microscope, the end of the gas injection component can be realigned with the confocal position of the scanning electron microscope inside the scanning electron microscope, which is conducive to the continued use of the gas injection device in subsequent operations, facilitates operation, and saves operating costs. At the same time, it can ensure the airtightness of the scanning electron microscope, prevent air from entering the vacuum environment inside the scanning electron microscope during the process of aligning the end of the gas injection component with the confocal position, and improve the accuracy of the data obtained by the operator.

[0008] According to some embodiments of the present invention, the connecting member defines a limiting groove, which extends circumferentially along the mounting hole, at least a portion of the support member is located in the limiting groove, the first sealing member is arranged between the groove wall of the limiting groove and the support member, each of the adjusting members is arranged on the connecting member and threadedly engaged with the connecting member, and the adjusting member is suitable for abutting against the side of the support member facing away from the first sealing member.

[0009] In some examples, the support member includes: a support body and a clamping foot, the middle portion of the support body defines a portion of the mounting hole, the clamping foot is provided at one end of the support body, and at least a portion of the clamping foot is located on the side of the one end of the support body away from the mounting hole, the clamping foot is inserted into the limiting groove, and the first sealing member is provided between the clamping foot and the groove wall of the limiting groove.

[0010] In some examples, the support member further includes a support ring, which is disposed in the middle of the support body and surrounds the gas injection member, and the gas injection member is in sliding cooperation with the support ring.

[0011] In some examples, a limiting ring is provided on a side of the clamping foot close to the first sealing member. The limiting ring extends along the circumference of the first sealing member and is spaced apart from a groove wall of the limiting groove.

[0012] In some examples, the connecting member includes a connecting flange and a pressure cover, the connecting flange is installed on the scanning electron microscope, the pressure cover is arranged on a side of the connecting flange away from the scanning electron microscope, and the pressure cover is connected to the connecting flange and defines the limiting groove.

[0013] According to some embodiments of the present invention, the gas injection device further includes: a telescopic part, which is mounted on at least a portion of the gas injection part, one end of the telescopic part is sealedly connected to the fixed component, and the other end of the telescopic part is sealedly connected to the gas injection part, and the telescopic part is configured to telescope when the gas injection part moves.

[0014] In some examples, the gas injection device further includes: a second sealing member, the outer periphery of the gas injection member has a limiting boss, the first end of the telescopic member is connected to the limiting boss and is sealed by the second sealing member.

[0015] In some examples, the gas injection device further includes: a third sealing member, and the second end of the telescopic member is connected to the support member and is sealed by the third sealing member.

[0016] In some examples, the telescopic member includes: a plurality of fixing members and a flexible member, the plurality of fixing members are arranged along the extension direction of the gas injection member, and the flexible member is provided between two adjacent fixing members and connected to the fixing members.

[0017] Additional aspects and advantages of the present invention will be set forth in part in the description which follows and, in part, will be obvious from the description which follows, or may be learned by practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the following description of the embodiments with reference to the accompanying drawings, in which:

[0019] Figure 1 is a schematic structural diagram of a gas injection device according to some embodiments of the present invention;

[0020] Figure 2 is a cross-sectional view of a gas injection device according to some embodiments of the present invention;

[0021] Figure 3 yes Figure 2 A magnified view of the structure in the middle;

[0022] Figure 4 yes Figure 2 A magnified view of the structure in middle B;

[0023] Figure 5 is a cross-sectional view of a connector according to some embodiments of the present invention;

[0024] Figure 6 2 is a schematic structural diagram of a telescopic member according to some embodiments of the present invention.

[0025] Reference numerals:

[0026] Gas injection device 100,

[0027] Fixing assembly 10, mounting hole 101, limiting slot 102,

[0028] Connecting piece 11, connecting flange 111, pressure cover 112, supporting piece 12, supporting body 121, clamping foot 122, limiting ring 1221, supporting ring 123,

[0029] Gas injection member 20, limiting boss 21,

[0030] Telescopic part 30, fixed part 31, flexible part 32,

[0031] A first sealing member 40 , a second sealing member 41 , and a third sealing member 42 . DETAILED DESCRIPTION

[0032] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0033] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, features defined as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0034] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0035] Reference below Figures 1-6 A gas injection device 100 according to an embodiment of the present invention is described.

[0036] like Figures 1-6 As shown, according to a gas injection device 100 of an embodiment of the present invention, the gas injection device 100 is installed on a scanning electron microscope. The gas injection device 100 includes: a fixing component 10, a gas injection member 20 and a plurality of adjustment members. The fixing component 10 is arranged outside the scanning electron microscope, and a mounting hole 101 is defined in the middle of the fixing component 10. The mounting hole 101 can connect the outside and the inside of the scanning electron microscope.

[0037] The fixing assembly 10 includes a connecting member 11 and a supporting member 12. The connecting member 11 is connected to the scanning electron microscope and extends in the direction of the axis of the mounting hole 101 (eg Figure 2 In the up-down direction shown in FIG, at least a portion of the support member 12 is located on one side of at least a portion of the connector 11, and the support member 12 and the connector 11 are sealed and connected by a first sealing member 40, thereby achieving sealing of the fixed assembly 10 to prevent air from entering the vacuum environment in the scanning electron microscope through the gap in the fixed assembly 10.

[0038] It is understood that the support member 12 can be sleeved on the connecting member 11; or the connecting member 11 can be sleeved on the support member 12; or the support member 12 can be located on the side of the connecting member 11 away from the scanning electron microscope (such as Figure 2 upper side shown).

[0039] The gas injection member 20 can be passed through the mounting hole 101, and the gas injection member 20 can be installed on the support member 12, and then the movement of the support member 12 can drive the gas injection member 20 to move; a plurality of adjustment members are arranged at intervals along the circumference of the mounting hole 101, and the adjustment members are movably set on the connecting member 11, and the adjustment members can abut against the support member 12, and the adjustment members can move relative to the connecting member 11 to drive a part of the support member 12 to move toward or away from the first sealing member 40. On the basis of improving the sealing effect of the fixed component 10, the deflection of the axis of the support member 12 can be achieved, and the deflection angle of the support member 12 can be adjusted to change the extension direction of the gas injection member 20; or, the adjustment member can be movably set on the support member 12, and the adjustment member can abut against the connecting member 11.

[0040] Among them, multiple adjustment members are arranged at intervals along the circumference of the mounting hole 101. By driving different adjustment members to move, the deflection angle of the axis of the support member 12 can be adjusted in different directions to achieve multi-directional deflection of the axis of the support member 12, which can improve the precision of the position adjustment of the support member 12 to ensure that the end of the gas injection member 20 (such as Figure 1 The lower end as shown in the figure is aligned with the common focal point where the ion beam and electron beam converge in the scanning electron microscope, thereby improving the accuracy of the data obtained by the operator and facilitating operation.

[0041] According to the gas injection device 100 of an embodiment of the present invention, a plurality of adjustment members arranged at circumferential intervals along the mounting hole 101 are provided on one of the connecting member 11 and the supporting member 12, and the plurality of adjustment members can abut against the other of the connecting member 11 and the supporting member 12, so that the adjustment members can drive the supporting member 12 to drive the gas injection member 20 to tilt in different directions, thereby ensuring that the end of the gas injection member 20 is aligned with the common focal point position where the ion beam and electron beam in the scanning electron microscope converge inside the scanning electron microscope, thereby improving the accuracy of the data obtained by the operator and facilitating operation.

[0042] In addition, compared with the solution in which the operator disassembles and reassembles the gas injection device 100 so that the end of the gas injection component 20 is aligned with the confocal position of the scanning electron microscope, the end of the gas injection component 20 can be realigned with the confocal position of the scanning electron microscope inside the scanning electron microscope, which is conducive to the continued use of the gas injection device 100 in subsequent operations, facilitates operation, and saves operating costs. At the same time, it can ensure the airtightness of the scanning electron microscope, prevent air from entering the vacuum environment inside the scanning electron microscope during the process of aligning the end of the gas injection component 20 with the confocal position, and improve the accuracy of the data obtained by the operator.

[0043] like Figure 2-Figure 5As shown, according to some embodiments of the present invention, the connecting member 11 defines a limiting groove 102, which extends circumferentially along the mounting hole 101, and at least a portion of the support member 12 is located in the limiting groove 102. On the one hand, on the basis of ensuring that the support member 12 is connected to the connecting member 11, the support member 12 can be limited, thereby reducing the probability of the support member 12 and the connecting member 11 being separated, and improving the connection effect between the support member 12 and the connecting member 11. On the other hand, the gap between the support member 12 and the connecting member 11 can be extended, thereby reducing the probability of air passing through the gap, which is beneficial to improving the airtightness of the scanning electron microscope.

[0044] The first sealing member 40 is arranged between the groove wall of the limiting groove 102 and the support member 12. The first sealing member 40 can contact the groove wall of the limiting groove 102 and the support member 12 respectively, which can improve the sealing effect of the fixing component 10 and prevent air from entering the scanning electron microscope through the gap between the support member 12 and the limiting groove 102, which is beneficial to improving the airtightness of the scanning electron microscope.

[0045] Each adjusting member is provided on the connecting member 11, and each adjusting member is threadedly engaged with the connecting member 11. The adjusting member can be engaged with the side of the supporting member 12 away from the first sealing member 40 (such as Figure 3 The adjusting member abuts against the support member 12 (as shown in the upper side), and by rotating the adjusting member, the adjusting member can press the support member 12 downward, wherein a portion of the support member 12 squeezes the first sealing member 40 due to the downward force of the adjusting member. Therefore, on the basis of maintaining the sealing effect of the first sealing member 40 on the fixed assembly 10, the multi-directional deflection of the axis of the support member 12 can be achieved to change the extension direction of the gas injection member 20; it can be understood that the adjusting member can be a bolt.

[0046] It should be noted that the number of adjusting parts can be at least three. For example, if the number of adjusting parts is three, it is beneficial to reduce costs based on the cooperation of multiple adjusting parts to achieve multi-directional deflection of the axis of the support member 12; or, the number of adjusting parts can be more, which is beneficial to improve the precision of the position adjustment of the support member 12, and can ensure that the end of the gas injection member 20 is aligned with the confocal position of the scanning electron microscope, thereby improving the accuracy of the data obtained by the operator.

[0047] like Figure 2-Figure 5 As shown, in some examples, the support member 12 includes: a support body 121 and a foot 122, and a portion of the mounting hole 101 is defined in the middle of the support body 121, that is, Figure 2 As shown, at least a portion of the support member 12 is located inside the connector 11, which ensures that the outer wall of the gas injection member 20 is spaced from the inner wall of the connector 11, thereby preventing the gas injection member 20 from being inserted into the connector 11 at its end (e.g., Figure 1The lower end shown in the figure interferes with the connecting piece 11 during the process of aligning the ion beam and electron beam in the scanning electron microscope at the common focal point, which is beneficial to improving the service life of the gas injection device 100.

[0048] The foot 122 is provided at one end of the support body 121 (eg Figure 3 The lower end shown in FIG), and at least a portion of the foot 122 is located on a side of one end of the support body 121 away from the mounting hole 101 (as shown in FIG). Figure 3 As shown in the outer side of the figure, the card foot 122 is inserted into the limiting groove 102. On the one hand, on the basis of ensuring the connection between the support member 12 and the connecting member 11, the support member 12 can be limited, thereby reducing the probability of the support member 12 and the connecting member 11 being separated, and improving the connection effect of the support member 12 and the connecting member 11. On the other hand, the gap between the support member 12 and the connecting member 11 can be extended, thereby reducing the probability of air passing through the gap, which is beneficial to improving the air tightness of the scanning electron microscope.

[0049] The first sealing member 40 is arranged between the clamping foot 122 and the groove wall of the limiting groove 102. The first sealing member 40 can contact the groove wall of the limiting groove 102 and the clamping foot 122 respectively, which can improve the sealing effect of the fixing component 10 and prevent air from entering the scanning electron microscope through the gap between the clamping foot 122 and the limiting groove 102, which is beneficial to improving the airtightness of the scanning electron microscope.

[0050] like Figure 2 As shown, in some examples, the support member 12 further includes: a support ring 123, which is arranged in the middle of the support body 121 and surrounds the gas injection member 20 to fill the gap between the gas injection member 20 and the support body 121, thereby improving the sealing effect of the gas injection device 100 and reducing the probability of air entering the scanning electron microscope through the gap. The gas injection member 20 can be movable relative to the support ring 123. On the basis of maintaining the sealing effect of the gas injection device 100, the length of the gas injection member 20 extending into the scanning electron microscope can be adjusted, which is beneficial to the end of the gas injection member 20 (such as Figure 1 The lower end shown in the figure is aligned with the confocal position in the scanning electron microscope.

[0051] like Figure 3 As shown, in some examples, the side of the foot 122 close to the first seal 40 (such as Figure 3A limit ring 1221 is provided on the lower side of the first sealing member 40, and the limit ring 1221 extends along the circumference of the first sealing member 40, which can limit the first sealing member 40 and prevent the first sealing member 40 from moving when the gas injection member 20 is aligned with the confocal point, thereby ensuring that the first sealing member 40 is tightly fitted to the connecting member 11 and the supporting member 12 respectively, thereby improving the sealing effect of the fixed component 10 and improving the airtightness of the scanning electron microscope.

[0052] The limiting ring 1221 is spaced apart from the groove wall of the limiting groove 102, as shown in FIG. Figure 3 As shown, based on the clamping foot 122 located on the inner side of the limiting ring 1221 (as shown Figure 3 On the basis that the portion of the inner side shown in FIG. 1 is in contact with the first sealing member 40, one side of the limiting ring 1221 (as shown in FIG. Figure 3 The gap between the lower side of the support member 12 and the groove wall of the limiting groove 102 can ensure that a part of the support member 12 moves downward when subjected to the downward force of the adjusting member, preventing the support member 12 from interfering with the connecting member 11, thereby facilitating the adjustment of the deflection angle of the axis of the support member 12.

[0053] It can be understood that the first sealing component 40 can be a sealing ring, and the groove wall of the limiting groove 102 can be provided with an annular limiting groove, the annular limiting groove surrounds the mounting hole 101, and a part of the sealing ring is located in the annular limiting groove, which can improve the limiting effect of the first sealing component 40; or, the groove wall of the limiting groove 102 can be provided with an annular limiting rib, the annular limiting rib surrounds the mounting hole 101, and the sealing ring is arranged between the limiting ring 1221 and the annular limiting rib, which can improve the limiting effect of the first sealing component 40.

[0054] like Figure 2 and Figure 5 As shown, in some examples, the connector 11 includes a connecting flange 111 and a pressure cap 112. The connecting flange 111 is mounted on the scanning electron microscope, and the pressure cap 112 is arranged on a side of the connecting flange 111 away from the scanning electron microscope (e.g., Figure 2 The upper side shown in the figure), and the pressure cover 112 can be connected to the connecting flange 111 to define the limiting groove 102, and then by removing the pressure cover 112 from the connecting flange 111, the support member 12 can be taken out from the limiting groove 102. Based on improving the connection effect between the support member 12 and the connecting member 11, the convenience of disassembly and assembly of the fixing component 10 can be improved, and maintenance is convenient.

[0055] like Figure 1 、 Figure 2 and Figure 6As shown, according to some embodiments of the present invention, the gas injection device 100 further includes: a telescopic member 30, which can be sleeved on at least a portion of the gas injection member 20, for example, the telescopic member 30 can be sleeved on the lower side of the support member 12 (such as Figure 2 The lower side shown in FIG), one end of the telescopic member 30 (as shown Figure 2 The upper end shown in FIG) is sealed and connected to the fixed assembly 10, and the other end of the telescopic member 30 (as ... Figure 2 The lower end of the support ring 123 is sealed and connected to the gas injection piece 20. The telescopic piece 30 can be extended and retracted when the gas injection piece 20 moves. Based on the ability to adjust the length of the gas injection piece 20 extending into the scanning electron microscope, the sealing effect of the gas injection device 100 can be improved to prevent air from entering the vacuum environment in the scanning electron microscope when the gas injection piece 20 and the support ring 123 slide relative to each other.

[0056] like Figure 1 、 Figure 3 and Figure 4 As shown, in some examples, the gas injection device 100 further includes: a second sealing member 41, a gas injection member 20 having a limiting boss 21 on its periphery, a first end of the telescopic member 30 (such as Figure 4 The lower end of the telescopic member 30 is connected to the limiting boss 21, and the telescopic member 30 is sealed with the limiting boss 21 through the second sealing member 41; specifically, the second sealing member 41 is arranged between the lower end surface of the telescopic member 30 and the limiting boss 21, and the second sealing member 41 can contact the lower end surface of the telescopic member 30 and the limiting boss 21 respectively to prevent air from entering the scanning electron microscope through the gap between the telescopic member 30 and the limiting boss 21, thereby improving the air tightness of the scanning electron microscope; it can be understood that the second sealing member 41 can be a sealing ring.

[0057] like Figure 3 As shown, in some examples, the gas injection device 100 further includes: a third sealing member 42, a second end of the telescopic member 30 (such as Figure 3 The upper end of the telescopic member 30 is connected to the support member 12, and the telescopic member 30 is sealed with the support member 12 through the third sealing member 42; specifically, the third sealing member 42 is arranged between the upper end surface of the telescopic member 30 and the support member 12, and the third sealing member 42 can contact the upper end surface of the telescopic member 30 and the support member 12 respectively to prevent air from entering the scanning electron microscope through the gap between the telescopic member 30 and the support member 12, thereby improving the air tightness of the scanning electron microscope; it can be understood that the third sealing member 42 can be a sealing ring.

[0058] like Figure 6 As shown, in some examples, the telescopic member 30 includes: a plurality of fixing members 31 and a flexible member 32, wherein the plurality of fixing members 31 extend along the extension direction of the gas injection member 20 (eg, Figure 6The flexible member 32 is arranged between two adjacent fixing members 31, and both ends of each flexible member 32 (such as Figure 6 The upper and lower ends shown in the figure are respectively connected to two adjacent fixing members 31, which can improve the structural strength of the telescopic member 30 and help reduce the probability of damage of the telescopic member 30 after multiple deformations.

[0059] The number of the fixing members 31 can be two, and the flexible member 32 is connected to the two fixing members 31 respectively; or Figure 6 For example, the number of fixing parts 31 can be three, the first fixing part 31 can be sealed to the limiting boss 21 of the gas injection part 20 through the second sealing part 41, the second fixing part 31 is sealed to the support part 12 through the third sealing part 42, and the third fixing part 31 is located between the remaining two fixing parts 31 to support the flexible part 32, so that when the flexible part 32 is damaged, the maintenance cost of the gas injection device 100 can be reduced by replacing a damaged flexible part 32; of course, the number of fixing parts 31 can be more.

[0060] In some examples, the sealing compression amount of the sealing ring can be a%-b%, based on improving the airtightness of the scanning electron microscope. If a or b is too large, the sealing ring is easily damaged when squeezed. If a or b is too small, the elastic force of the sealing ring is small when squeezed, which can easily lead to sealing failure of the sealing ring.

[0061] Therefore, a can be 15, b can be 30, the sealing compression amount of the sealing ring can be limited to between 15% and 30%, and the sealing compression amount of the sealing ring can be any point value among 15%, 18%, 21%, 24%, 27%, 30% or a range value between any two of them. On the basis of increasing the elastic force of the sealing ring, the sealing ring can be prevented from being damaged due to extrusion, the sealing performance of the sealing ring to the gas injection device 100 can be improved, and the airtightness of the scanning electron microscope can be improved; in addition, the sealing compression amount of the first sealing component 40 can be c%, and c% can be limited between a% and b%, specifically, c% can be (a%+b%) / 2.

[0062] The remaining components and operations of the gas injection device 100 according to the embodiment of the present invention are well known to those skilled in the art and will not be described in detail here. In the description of the present invention, "first feature" and "second feature" may include one or more of these features. The vertical, horizontal, and front-to-back directions are based on the vertical, left-right, and front-to-back directions shown in the figure.

[0063] In the description of the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or the first and second features being in contact not directly but through another feature therebetween. Furthermore, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is at a higher level than the second feature.

[0064] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, illustrative uses of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0065] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the claims and their equivalents.

Claims

1. A gas injection device, which is installed on a scanning electron microscope, characterized in that: include: A fixing assembly, the fixing assembly being disposed on the exterior of the scanning electron microscope and defining a mounting hole in the middle thereof, the fixing assembly comprising a connecting member and a supporting member, the connecting member being connected to the scanning electron microscope, the connecting member defining a limiting groove, the limiting groove extending circumferentially along the mounting hole, at least a portion of the supporting member being located within the limiting groove, the connecting member comprising a connecting flange and a gland, the connecting flange being mounted on the scanning electron microscope, the gland being disposed on a side of the connecting flange away from the scanning electron microscope, the gland being connected to the connecting flange and defining the limiting groove; At least a portion of the support member is located on one side of at least a portion of the connector in the direction of the central axis of the mounting hole, and the two are sealed by a first sealing member, and the first sealing member is provided between the groove wall of the limiting groove and the support member; The support member includes: a support body and a foot, wherein a portion of the mounting hole is defined in a middle portion of the support body, the foot is provided at one end of the support body, and at least a portion of the foot is located on a side of the one end of the support body away from the mounting hole, the foot is inserted into the limiting groove, and the first sealing member is provided between the foot and the groove wall of the limiting groove; a gas injection member, the gas injection member being inserted into the mounting hole and mounted on the support member, the support member further comprising a support ring, the support ring being disposed in the middle portion of the support body and surrounding the gas injection member, the gas injection member being in sliding engagement with the support ring; A plurality of adjusting members are arranged at intervals along the circumference of the mounting hole, each adjusting member is provided on the connecting member and is threadedly engaged with the connecting member, the adjusting member is suitable for abutting against a side of the support member facing away from the first sealing member, the adjusting member can move relative to the connecting member to drive a part of the support member to move toward or away from the first sealing member to adjust the inclination angle of the support member, so as to change the extension direction of the gas injection member.

2. The gas injection device according to claim 1, characterized in that A limiting ring is provided on one side of the clamping foot close to the first sealing member. The limiting ring extends along the circumference of the first sealing member, and the limiting ring is spaced apart from the groove wall of the limiting groove.

3. The gas injection device according to claim 1, characterized in that Also includes: A telescopic member is provided around at least a portion of the gas injection member, one end of the telescopic member is sealedly connected to the fixed assembly, the other end of the telescopic member is sealedly connected to the gas injection member, and the telescopic member is configured to telescope when the gas injection member moves.

4. The gas injection device according to claim 3, characterized in that Also includes: A second sealing member, wherein the outer periphery of the gas injection member is provided with a limiting boss, the first end of the telescopic member is connected to the limiting boss and is sealed by the second sealing member.

5. The gas injection device according to claim 3, characterized in that Also includes: A third sealing member, wherein the second end of the telescopic member is connected to the supporting member and is sealed by the third sealing member.

6. The gas injection device according to claim 3, characterized in that The telescopic member includes: a plurality of fixing members and a flexible member. The plurality of fixing members are arranged along the extension direction of the gas injection member. The flexible member is arranged between two adjacent fixing members and connected to the fixing members.

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