Crucible charging protection device

Abstract

The invention discloses a crucible charging protection device, which relates to the field of semiconductor manufacturing technology, and comprises a crucible body, wherein an annular groove is provided on the outer ring surface of the crucible body, and a telescopic mechanism is provided on the top of the crucible body. In the invention, one end of a connecting rod is connected to an overflow pipe 1, and the connecting rod is connected to an auxiliary rod through a pin shaft 2, and the auxiliary rod is connected to a pulley 1 through a pin shaft 1. The rotation of the pulley 1 can drive the connecting rod to rise and fall, thereby adjusting the use height of the overflow pipe 1. When the overflow pipe 1 is raised and lowered, the telescopic rod and the support rod can guide the rise and fall of the overflow pipe 1 and the connecting rod respectively. After adjustment, the guide hole on the overflow pipe 1 and the guide pipe on the overflow pipe 2 can be aligned. The guide pipe and the guide member 1 can be used to guide the flow of silicon liquid, so that the silicon liquid is collected in the guide member 1, and splashing is reduced, thereby accelerating the discharge of the silicon liquid and reducing the damage of the overflow to the crucible body.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a crucible charging protection device. Background Art

[0002] A crucible is a cup-shaped vessel used to heat solids at high temperatures. Crucibles can be used in the growth process of semiconductor crystals. By heating and cooling specific compounds in the crucible, the compounds can be deposited on the crystals and grow into crystals. Large-sized, high-quality semiconductor crystals can be produced, which is the foundation of the semiconductor industry.

[0003] For example, Chinese patent CN219490232U discloses a crucible charging protection device and a crucible device, comprising: a protective cover plate, provided with a feeding hole for discharging materials into the crucible, a bearing portion for fitting with the end face of the crucible mouth of the crucible between the inner wall of the feeding hole and the outer side of the protective cover plate, and the bearing portion extends toward the center of the crucible mouth so that the distance between the inner wall of the feeding hole and the inner wall of the crucible is greater than 0.

[0004] In the above patent, although the problem of workers' clothes easily coming into contact with the inner wall of the crucible is solved by the protective cover plate and the anti-slip part, the contact area between the protective structure and the crucible is small. When the crucible collides during the production or transportation process, resulting in hidden cracks and defects, overflow is likely to occur during use. The protective cover plate cannot guide the overflow inside the crucible, cannot assist in the overflow discharge, and the overflow discharge speed is slow, which increases the damage to the crucible. Summary of the invention

[0005] The object of the present invention is to provide a crucible charging protection device to solve the problem proposed in the above background technology that when the crucible collides during the production or transportation process, produces hidden cracks and defects, it is easy to overflow during use, the protective cover plate cannot guide the overflow inside the crucible, cannot assist in the overflow discharge, the overflow discharge speed is slow, and the damage to the crucible is increased.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a crucible charging protection device, comprising a crucible body, an annular groove is provided on the outer ring surface of the crucible body, a telescopic mechanism is provided on the top of the crucible body, a guide assembly is installed on the top of the telescopic mechanism, the guide assembly comprises an overflow pipe 1, a telescopic rod and an overflow pipe 2, a guide hole is provided on one side of the overflow pipe 1, a connecting piece is fixedly connected to the outer ring surface of the overflow pipe 1, the bottom of the connecting piece is fixedly connected to the top of the telescopic rod, the overflow pipe 1 is slidably connected to the overflow pipe 2, the outer ring surface of the overflow pipe 2 is fixedly connected to the guide pipe, and the outer ring surface of the overflow pipe 2 is fixedly connected to the guide piece 1;

[0007] The overflow pipe is provided with a connecting mechanism on both sides, and the connecting mechanism includes a connecting rod, a pulley and an auxiliary rod, one end of the connecting rod is fixedly connected to the outer ring surface of the overflow pipe, a pin shaft 2 is inserted through the bottom of the connecting rod, the connecting rod is hinged to the auxiliary rod through the pin shaft 2, a pin shaft 1 is inserted through the inside of the auxiliary rod, one end of the pin shaft is fixedly connected to one side of the pulley, a plug-in rod is inserted through the inside of the pulley, one end of the plug-in rod is fixedly connected to a gear, one side of the gear is fixedly connected to an extension shaft, one end of the extension shaft is rotatably connected to the crucible body, a gear ring is meshed with the top of the gear, and the gear ring is rotatably connected to the crucible body.

[0008] Preferably, a guide groove is provided on one side of the connecting rod, one end of the support rod is engaged in the guide groove, the support rod is slidably connected to the connecting rod, and one side of the support rod is fixedly connected to the overflow pipe 2.

[0009] Preferably, the outer ring surface of the crucible body is fixedly connected to a fixing plate, the top of the fixing plate is connected to a driving motor via bolts, one end of the output shaft of the driving motor is fixedly connected to a second pulley, and the outer ring surface of the second pulley is drivingly connected to the belt body.

[0010] Preferably, the pulley 1 is rotationally connected to the crucible body, and there are two pulleys in total, one of which is transmission-connected to the pulley 2 through the belt body.

[0011] Preferably, an extension ring is fixedly connected to the inner ring surface of the gear ring, a guide piece 2 is fixedly connected to the top of the extension ring, the guide piece 2 is T-shaped, and one side of the guide piece 2 is inserted into the annular groove, a support ring is fixedly connected to the bottom of the guide piece 2, and the support ring is rotatably connected to the crucible body.

[0012] Preferably, the telescopic mechanism comprises an auxiliary plate, a driving plate and blades, the top of the auxiliary plate is fixedly connected to the bottom of the telescopic rod, the bottom of the auxiliary plate is engaged with a supporting plate, and a movable groove is provided on one side of the supporting plate.

[0013] Preferably, a positioning ring is fixedly connected to the bottom of the support plate, the bottom of the positioning ring is snap-connected to the crucible body, and a sealing tube is overlapped on the inner annular surface of the crucible body, and the top of the sealing tube is fixedly connected to the support plate.

[0014] Preferably, an extension end is fixedly connected to the outer ring surface of the driving disk, the extension end is slidably connected to the movable groove, a fixed block is fixedly connected to one side of the extension end, a reinforcement rod is fixedly connected to the bottom of the fixed block, and the bottom of the reinforcement rod is fixedly connected to the gear ring.

[0015] Preferably, an arc-shaped groove is provided on the top of the driving disk, a connecting shaft is slidably connected in the arc-shaped groove, the bottom of the connecting shaft is rotatably connected to the supporting disk, the connecting shaft passes through the blade, one side of the blade passes through the inner wall of the supporting disk, an auxiliary shaft is inserted through the inside of the blade, and the top of the auxiliary shaft is fixedly connected to the driving disk.

[0016] Preferably, a limiting ring is engaged at the top of the auxiliary disk, the inner ring surface of the limiting ring is fixedly connected to the second overflow pipe, and a slot is provided at the top of the auxiliary disk, and the slot is engaged and connected to the bottom of the first guide member.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] 1. In the present invention, one end of the connecting rod is connected to the overflow pipe one, the connecting rod is connected to the auxiliary rod through the pin shaft two, the auxiliary rod is connected to the pulley one through the pin shaft one, the rotation of the pulley one can drive the connecting rod to rise and fall, and then adjust the use height of the overflow pipe one, when the overflow pipe one is raised and lowered, the telescopic rod and the support rod can guide the rise and fall of the overflow pipe one and the connecting rod respectively, after adjustment, the guide hole on the overflow pipe one and the guide pipe on the overflow pipe two can be aligned, the guide pipe and the guide member one can be used to guide the flow of the silicon liquid, so that the silicon liquid is collected in the guide member one, splashing is reduced, thereby accelerating the discharge of the silicon liquid and reducing the damage of the overflow to the crucible body.

[0019] 2. In the present invention, the pulley 1 is connected to the gear through a plug-in rod. The rotation of the gear can drive the gear ring to rotate. The rotation of the gear ring and the fixed block can adjust the expansion or closing of the blades above the crucible body, thereby realizing the adjustment of the cavity area at the top of the crucible body. When the blades are retracted and closed, the top of the crucible body can be isolated from the operator, reducing the obstruction when the silicon raw material is discharged, and facilitating the rapid discharge of the silicon raw material. When the blades are unfolded, the dust and debris can be reduced from entering the interior of the crucible body, thereby realizing the wrapping and protection of the top of the crucible body.

[0020] 3. In the present invention, the bottom of the positioning ring is engaged with the crucible body, and the positioning ring can be used to assist the installation of the support plate on the top of the crucible body. The sealing tube overlaps the inner ring surface of the crucible body, and the sealing tube can increase the contact area between the support plate and the crucible body, thereby improving the stability of the installation and use of the support plate, overflow pipe 1 and overflow pipe 2 above the crucible body. The support ring can increase the contact area with the outer ring surface of the crucible body, support the rotation of the gear ring, ensure the connection between the entire device and the crucible body, and thus ensure the protective effect of the entire device on the crucible. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a three-dimensional structural schematic diagram of a crucible charging protection device of the present invention;

[0022] Figure 2It is a schematic diagram of the installation of a telescopic rod structure of a crucible charging protection device of the present invention;

[0023] Figure 3 This is a schematic diagram of the structure of the guide hole of a crucible charging protection device of the present invention;

[0024] Figure 4 It is a schematic diagram of the installation of the extended end structure of a crucible charging protection device of the present invention;

[0025] Figure 5 It is a schematic diagram of the connection between the blade and the auxiliary shaft structure of a crucible charging protection device of the present invention;

[0026] Figure 6 It is a schematic diagram of the installation of a fixing block structure of a crucible charging protection device of the present invention;

[0027] Figure 7 This is a schematic diagram of the installation of a gear structure of a crucible charging protection device of the present invention;

[0028] Figure 8 The present invention is a schematic diagram of the installation of a plug-in rod and an extension shaft structure of a crucible charging protection device.

[0029] In the figure:

[0030] 1. Guide assembly; 11. Overflow pipe 1; 111. Diversion hole; 12. Connecting rod; 13. Telescopic rod; 14. Guide piece 1; 15. Overflow pipe 2; 151. Diversion pipe; 16. Connecting piece; 17. Support rod; 18. Limiting ring; 2. Telescopic mechanism; 21. Auxiliary plate; 22. Driving plate; 221. Arc groove; 222. Extension end; 23. Connecting shaft; 24. Blade; 241. Auxiliary shaft; 25. Support plate ; 26. Sealing tube; 27. Positioning ring; 28. Fixed block; 3. Pulley 1; 31. Auxiliary rod; 32. Pin 1; 33. Gear; 34. Connecting rod; 35. Reinforcement rod; 36. Pin 2; 37. Extension shaft; 4. Crucible body; 41. Annular groove; 5. Driving motor; 51. Pulley 2; 52. Fixed plate; 6. Belt body; 7. Gear ring; 71. Guide 2; 72. Support ring; 73. Extension ring. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the implementation regulations described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] Embodiment 1

[0033] Reference Figure 1-8 As shown: a crucible charging protection device, including a crucible body 4, an annular groove 41 is provided on the outer ring surface of the crucible body 4, a telescopic mechanism 2 is provided on the top of the crucible body 4, a guide assembly 1 is installed on the top of the telescopic mechanism 2, the guide assembly 1 includes an overflow pipe 11, a telescopic rod 13 and an overflow pipe 2 15, a guide hole 111 is provided on one side of the overflow pipe 11, a connecting piece 16 is fixedly connected to the outer ring surface of the overflow pipe 11, the bottom of the connecting piece 16 is fixedly connected to the top of the telescopic rod 13, the overflow pipe 11 is slidably connected to the overflow pipe 2 15, the outer ring surface of the overflow pipe 2 15 is fixedly connected to the guide pipe 151, and the outer ring surface of the overflow pipe 2 15 is fixedly connected to the guide piece 14;

[0034] A connecting mechanism is provided on both sides of the overflow pipe 11, and the connecting mechanism includes a connecting rod 12, a pulley 3 and an auxiliary rod 31. One end of the connecting rod 12 is fixedly connected to the outer ring surface of the overflow pipe 11, a pin shaft 2 36 is inserted through the bottom of the connecting rod 12, and the connecting rod 12 is hinged to the auxiliary rod 31 through the pin shaft 2 36. A pin shaft 32 is inserted through the inside of the auxiliary rod 31, and one end of the pin shaft 32 is fixedly connected to one side of the pulley 3. A plug-in rod 34 is inserted through the inside of the pulley 3, and one end of the plug-in rod 34 is fixedly connected to a gear 33, and one side of the gear 33 is fixedly connected to an extension shaft 37, and one end of the extension shaft 37 is rotatably connected to the crucible body 4. A gear ring 7 is meshed with the top of the gear 33, and the gear ring 7 is rotatably connected to the crucible body 4. A guide groove is provided on one side of the connecting rod 12, and one end of a support rod 17 is engaged in the guide groove. The support rod 17 is slidably connected to the connecting rod 12, and one side of the support rod 17 is fixedly connected to the overflow pipe 2 15.

[0035] In this embodiment, the annular groove 41 can be used to guide the rotation of the subsequent guide member 2 71, thereby improving the stability of the guide member 2 71 during rotation. The overflow pipe 11 and the overflow pipe 2 15 are slidably connected to facilitate adjustment of the protruding length of the overflow pipe 11 inside the overflow pipe 2 15, thereby changing the use height of the overflow pipe 11. The guide hole 111 is opened on the overflow pipe 11, and when overflow occurs, the silicon liquid can be accelerated to be discharged from the inside of the overflow pipe 11. By adjusting the height of the overflow pipe 11, the guide hole 111 can be connected to the guide pipe 151, so that the guide pipe 151 is used to drain the silicon liquid, so that the silicon liquid enters the guide member 14 and is quickly discharged. When the height of the overflow pipe 11 is adjusted, the side wall of the overflow pipe 11 can block one side of the guide pipe 151, and the side wall of the overflow pipe 2 15 is the guide hole 11. 1 is blocked on one side, the guide hole 111 is not connected with the guide pipe 151, and the silicon liquid cannot be discharged from the side walls of the overflow pipe 11 and the overflow pipe 2 15. Since support rods 17 are installed on both sides of the overflow pipe 2 15, and the support rods 17 are slidably connected with the connecting rod 12, when the overflow pipe 11 is raised and lowered, the support rods 17 can guide the movement of the connecting rod 12. The two ends of the telescopic rod 13 are respectively connected to the connecting piece 16 and the auxiliary disk 21. The auxiliary disk 21 can be used to reinforce the bottom of the telescopic rod 13. The connection between the top of the telescopic rod 13 and the overflow pipe 11 can be achieved through the connecting piece 16. The inner rod and the outer rod of the telescopic rod 13 are slidably connected. Therefore, when the overflow pipe 11 is raised and lowered, the telescopic rod 13 can support both sides of the overflow pipe 11, thereby improving the stability of the overflow pipe 11 when it is raised and lowered;

[0036] At the same time, a pin shaft 2 36 is inserted through one end of the overflow pipe 11 of the connecting rod 12, and the connecting rod 12 and the auxiliary rod 31 can be hinged through the pin shaft 2 36, and the auxiliary rod 31 can be connected to the pulley 1 3 through the pin shaft 1 32. When the pulley 1 3 rotates, one end of the auxiliary rod 31 rotates with the pulley 1 3 around the axis of the pulley 1 3. Since the length of the auxiliary rod 31 is fixed, the inclination angle of the auxiliary rod 31 can be adjusted during the rotation of the auxiliary rod 31, thereby applying an upward force to the connecting rod 12 to drive the connecting rod 1 2 moves upward, so that the overflow pipe 11 can be driven to move upward by the connecting rod 12 to achieve the height adjustment of the overflow pipe 11. Since the connecting rod 12 is arranged on both sides of the overflow pipe 11, the two gears 33 are driven to rotate by the gear ring 7, and the auxiliary rod 31 and the connecting rod 12 are driven to move by the two pulleys 13, so that the synchronization of the lifting and lowering of the two connecting rods 12 can be ensured. The overflow pipe 11 is driven to move upward by the two connecting rods 12, and the force of the overflow pipe 11 can be averaged, so as to avoid the tilting inside the overflow pipe 2 15 caused by the imbalance of the force of the overflow pipe 11.

[0037] Embodiment 2

[0038] according to Figure 1-Figure 8As shown, a fixing plate 52 is fixedly connected to the outer ring surface of the crucible body 4, a driving motor 5 is connected to the top of the fixing plate 52 by bolts, a pulley 2 51 is fixedly connected to one end of the output shaft of the driving motor 5, a belt body 6 is drivingly connected to the outer ring surface of the pulley 2 51, a pulley 1 3 is rotatably connected to the crucible body 4, there are two pulleys 1 3, one of which is drivingly connected to the pulley 2 51 through the belt body 6, an extension ring 73 is fixedly connected to the inner ring surface of the gear ring 7, a guide member 2 71 is fixedly connected to the top of the extension ring 73, the guide member 2 71 is T-shaped, and one side of the guide member 2 71 is inserted into the annular groove 41, a support ring 72 is fixedly connected to the bottom of the guide member 2 71, and the support ring 72 is rotatably connected to the crucible body 4.

[0039] In this example, the connection between the crucible body 4 and the driving motor 5 can be achieved by using the fixing plate 52. The fixing plate 52 can provide stable support for the bottom of the driving motor 5, thereby facilitating the stable installation and use of the driving motor 5 on one side of the crucible body 4. The driving motor 5 can drive the pulley 2 51 to rotate, and the pulley 1 3 on one side is driven to rotate under the action of the belt body 6. As the power source of the pulley 1 3, the stable operation of the entire device can be guaranteed. Since the pulley 1 3 is coaxially connected with the gear 33, the rotation of the pulley 1 3 and the gear 33 can drive the gear ring 7 to rotate. The extension ring 73 is connected to the gear ring 7 to assist the connection between the guide member 2 71 and the gear ring 7. One side of the guide member 2 71 is rotatably connected to the crucible body 4, which can guide the rotation of the gear ring 7, thereby improving the stability of the gear ring 7 during rotation, and further ensuring the meshing effect between the bottom of the gear ring 7 and the gear 33. The bottom of the guide member 2 71 is fixedly connected to the support ring 72. The support ring 72 can increase the contact area with the outer ring surface of the crucible body 4, thereby improving the stability of the gear ring 7 during rotation.

[0040] Embodiment 3

[0041] according to Figure 1-Figure 6As shown, the telescopic mechanism 2 includes an auxiliary disk 21, a driving disk 22 and a blade 24. The top of the auxiliary disk 21 is fixedly connected to the bottom of the telescopic rod 13. A supporting disk 25 is engaged with the bottom of the auxiliary disk 21. A moving groove is provided on one side of the supporting disk 25. A positioning ring 27 is fixedly connected to the bottom of the supporting disk 25. The bottom of the positioning ring 27 is engaged with the crucible body 4. A sealing tube 26 is overlapped on the inner annular surface of the crucible body 4. The top of the sealing tube 26 is fixedly connected to the supporting disk 25. An extension end 222 is fixedly connected to the outer annular surface of the driving disk 22. The extension end 222 is slidably connected to the moving groove. A fixed block 28 is fixedly connected to one side of the extension end 222. The bottom of the fixed block 28 is fixedly connected to the bottom of the fixed block 28. A reinforcing rod 35 is fixedly connected to the top of the driving disk 22, and the bottom of the reinforcing rod 35 is fixedly connected to the gear ring 7. An arc groove 221 is provided at the top of the driving disk 22, and a connecting shaft 23 is slidably connected in the arc groove 221. The bottom of the connecting shaft 23 is rotatably connected to the supporting disk 25, and the connecting shaft 23 passes through the blade 24. One side of the blade 24 passes through the inner wall of the supporting disk 25, and an auxiliary shaft 241 is inserted through the inside of the blade 24. The top of the auxiliary shaft 241 is fixedly connected to the driving disk 22, and the top of the auxiliary disk 21 is engaged with a limiting ring 18, and the inner ring surface of the limiting ring 18 is fixedly connected to the overflow pipe 15, and a slot is provided at the top of the auxiliary disk 21, and the slot is engaged with the bottom of the guide member 14.

[0042] In this embodiment, the auxiliary plate 21 can be used to support the bottom of the overflow pipe 215 and the limiting ring 18, so as to limit the installation position of the limiting ring 18, which is convenient for the installation and removal of the limiting ring 18 on the top of the auxiliary plate 21. The auxiliary plate 21 is engaged with the support plate 25, which is convenient for the connection and separation of the auxiliary plate 21 on the top of the support plate 25. The moving groove opened on one side of the support plate 25 can guide the movement of the driving plate 22 and the extension end 222, thereby reducing the movement interference of the extension end 222 on the side wall of the support plate 25, and further The moving range of the driving plate 22 and the extension end 222 is limited, and the positioning ring 27 can assist the connection between the bottom of the support plate 25 and the crucible body 4, so as to facilitate the stable installation of the support plate 25 on the top of the crucible body 4. The outer annular surface of the sealing tube 26 fits the inner wall of the crucible body 4, which can increase the contact area between the bottom of the support plate 25 and the crucible body 4, and increase the friction between the support plate 25 and the crucible body 4, thereby improving the stability of the support plate 25 during installation and preventing the support plate 25 from being separated from the crucible body 4 during use.

[0043] The extended end 222 can be used to assist the connection between the driving disk 22 and the fixed block 28. The fixed block 28 can be connected to the gear ring 7 through the reinforcing rod 35, so that the fixed block 28 and the gear ring 7 can be rotated synchronously, and then the fixed block 28 is driven to rotate when the gear ring 7 rotates, so that the extended end 222 and the driving disk 22 rotate. When the driving disk 22 rotates, the auxiliary shaft 241 and the driving disk 22 rotate synchronously with the axis of the auxiliary disk 21. At this time, the blades 24 can be driven to rotate with the connecting shaft 23 as the axis, and the multiple blades 24 are contracted, and the arc groove 221 rotates with the driving disk 22, and one end of the connecting shaft 23 passes through the arc groove 221. Therefore, when the driving disk 22 rotates, it will not cause movement interference to the connecting shaft 23. By shrinking the blades 24, the leakage area at the top of the crucible body 4 can be increased, which is convenient for the subsequent silicon raw materials to enter the crucible body 4. At the same time, the auxiliary disk 21 is arranged on the top of the crucible body 4 to avoid the contact between the clothes of the staff and the inner wall of the crucible body 4. The blades 24 are made of stainless steel material with high strength, not easy to deform and high temperature resistance. The card groove on the top of the auxiliary disk 21 can assist the connection between the auxiliary disk 21 and the guide member 14, support and reinforce the bottom of the guide member 14, thereby improving the stability of the guide member 14 when in use.

[0044] The method of using the device and the working principle are as follows: first, the entire device is combined with the crucible body 4, and the driving motor 5 is used to drive the pulley 2 51 to rotate. The pulley 2 51 drives one of the pulleys 3 to rotate under the action of the belt body 6, and the pulley 3 drives the coaxial gear 33 to rotate. The gear 33 is used to drive the gear ring 7 to rotate. When the gear ring 7 rotates, it drives another gear 33 to rotate, thereby realizing the rotation of another gear 33 and the pulley 1 3. When the two pulleys 1 3 rotate, both can drive one end of the pin shaft 1 32 to rotate, so that the inclination angle of the pin shaft 1 32 changes. The connecting rod 12 is driven upward by the pin shaft 36, and the two connecting rods 12 exert force on the overflow pipe 11 at the same time. At this time, the connecting rod 12 drives the overflow pipe 11 to slide inside the overflow pipe 15, and the inner rod of the telescopic rod 13 slides inside the outer rod. The connecting piece 16 moves upward with the inner rod to change the use height, and the use height of the overflow pipe 11 is changed. At this time, the guide hole 111 on the overflow pipe 11 is aligned with the guide pipe 151, and the overflow pipe 11 reaches the upper limit of the rise, the driving motor 5 stops working, the gear 33 and the gear ring 7 stop rotating, and the overflow pipe 11 is kept at this height for use;

[0045] At the same time, when the pulley 3 rotates, the gear 33 meshes with the gear ring 7, and the gear ring 7 can be driven to rotate along the outer ring surface of the crucible body 4. The gear ring 7 is connected to the fixed block 28 through the reinforcing rod 35. Therefore, when the gear ring 7 rotates, the fixed block 28 and the extension end 222 can be driven to rotate. The extension end 222 moves along the moving groove of the support plate 25, and then drives the driving plate 22 to rotate around the axis of the crucible body 4. The driving plate 22 drives the auxiliary shaft 241 to rotate, and applies a force to the blade 24, so that the blade 24 rotates around the connecting shaft 23 as the axis, thereby realizing the contraction of the blade 24, and contracting the blade 24 in the supporting plate 25. When the driving plate 22 rotates, the arc groove 221 rotates with the driving plate 22, and the inner wall of the arc groove 221 slides with the outer ring surface of the connecting shaft 23, and the bottom of the connecting shaft 23 is connected. The support plate 25 is rotatably connected to the crucible body 4. At this time, the shielding area of ​​the top of the inner cavity of the crucible body 4 is small, and the silicon raw material can be sent from the overflow pipe 11 into the crucible body 4. The silicon raw material is processed by the crucible body 4. During the processing of the silicon raw material, if overflow occurs, the silicon liquid moves up into the overflow pipe 11, and the silicon liquid can be discharged from the guide holes 111 at different heights, and then enter the guide pipe 151, and is discharged through the guide pipe 151. The silicon liquid discharged through the guide pipes 151 at different heights can enter the guide member 14 and be collected, thereby realizing the centralized discharge of the silicon liquid. A collecting device is placed at the end of the guide member 14 to quickly collect the discharged silicon liquid. The guide member 14 can be used to guide the discharge of the silicon liquid, thereby accelerating the discharge of the silicon liquid, which is convenient for the staff to take countermeasures in time;

[0046] When the entire device is not in use, the driving motor 5 is used to drive the pulley 2 51 to rotate in the opposite direction, and the pulley 13 drives one end of the auxiliary rod 31 to rotate, so that the connecting rod 12 and the overflow pipe 11 are moved downward, and the connecting rod 12 moves downward along one end of the support rod 17, and the overall length of the telescopic rod 13 is contracted, and the use height of the overflow pipe 11 is adjusted until the bottom of the overflow pipe 11 overlaps with the inner wall of the overflow pipe 2 15 and reaches the lower limit of the movement of the overflow pipe 11, and the side wall of the overflow pipe 11 is used to block one side of the guide pipe 151, and the side wall of the overflow pipe 2 15 blocks one side of the guide hole 111. While the pulley 3 rotates, the gear 33 drives the gear ring 7 to rotate, and the gear ring 7 drives the fixed block 28 and the extension end 222 to rotate, the drive disc 22 and the auxiliary shaft 241 rotate, and the drive blade 24 rotates in the opposite direction, and the blade 24 is extended to block the top of the inner cavity of the crucible body 4, thereby reducing the exposed area of ​​the top of the inner cavity of the crucible body 4, thereby reducing the entry of dust into the crucible body 4.

[0047] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A crucible charging protection device, comprising a crucible body (4), wherein an annular groove (41) is formed on the outer ring surface of the crucible body (4), characterized in that: A telescopic mechanism (2) is provided on the top of the crucible body (4), a guide assembly (1) is installed on the top of the telescopic mechanism (2), the guide assembly (1) comprises an overflow pipe 1 (11), a telescopic rod (13) and an overflow pipe 2 (15), a guide hole (111) is provided on one side of the overflow pipe 1 (11), a connecting piece (16) is fixedly connected to the outer ring surface of the overflow pipe 1 (11), the bottom of the connecting piece (16) is fixedly connected to the top of the telescopic rod (13), the overflow pipe 1 (11) and the overflow pipe 2 (15) are slidably connected, the outer ring surface of the overflow pipe 2 (15) is fixedly connected to the guide pipe (151), and the outer ring surface of the overflow pipe 2 (15) is fixedly connected to the guide piece 1 (14); Both sides of the overflow pipe (11) are provided with a connection mechanism, the connection mechanism comprising a connection rod (12), a pulley (3) and an auxiliary rod (31); one end of the connection rod (12) is fixedly connected to the outer ring surface of the overflow pipe (11); a second pin (36) is inserted through the bottom of the connection rod (12); the connection rod (12) is hinged to the auxiliary rod (31) through the second pin (36); a pin (32) is inserted through the inside of the auxiliary rod (31); one end of the pin (32) is fixedly connected to one side of the pulley (3); a plug-in rod (34) is inserted through the inside of the pulley (3); one end of the plug-in rod (34) is fixedly connected to a gear (33); one side of the gear (33) is fixedly connected to an extension shaft (37), one end of the extension shaft (37) is rotatably connected to the crucible body (4), the top of the gear (33) is meshed with a toothed ring (7), the toothed ring (7) and the crucible body (4) are rotatably connected, the outer ring surface of the crucible body (4) is fixedly connected to a fixing plate (52), the top of the fixing plate (52) is connected to a driving motor (5) by bolts, one end of the output shaft of the driving motor (5) is fixedly connected to a pulley 2 (51), the outer ring surface of the pulley 2 (51) is drivingly connected to a belt body (6), the pulley 1 (3) is rotatably connected to the crucible body (4), there are two pulleys 1 (3), one of which is drivingly connected to the pulley 2 (51) through the belt body (6).

2. A crucible charging protection device according to claim 1, characterized in that: A guide groove is provided on one side of the connecting rod (12), one end of a support rod (17) is engaged in the guide groove, the support rod (17) and the connecting rod (12) are slidably connected, and one side of the support rod (17) is fixedly connected to the second overflow pipe (15).

3. The crucible charging protection device according to claim 1, characterized in that: An extension ring (73) is fixedly connected to the inner ring surface of the gear ring (7), a second guide member (71) is fixedly connected to the top of the extension ring (73), the second guide member (71) is T-shaped, and one side of the second guide member (71) is inserted into the annular groove (41), and a support ring (72) is fixedly connected to the bottom of the second guide member (71), and the support ring (72) is rotatably connected to the crucible body (4).

4. The crucible charging protection device according to claim 1, characterized in that: The telescopic mechanism (2) comprises an auxiliary disk (21), a driving disk (22) and blades (24); the top of the auxiliary disk (21) is fixedly connected to the bottom of the telescopic rod (13); a supporting disk (25) is engaged with the bottom of the auxiliary disk (21); and a moving groove is provided on one side of the supporting disk (25).

5. A crucible charging protection device according to claim 4, characterized in that: A positioning ring (27) is fixedly connected to the bottom of the support plate (25), the bottom of the positioning ring (27) is snap-connected to the crucible body (4), and a sealing tube (26) is overlapped on the inner annular surface of the crucible body (4), the top of the sealing tube (26) is fixedly connected to the support plate (25).

6. A crucible charging protection device according to claim 4, characterized in that: An extension end (222) is fixedly connected to the outer ring surface of the driving disk (22), and the extension end (222) is slidably connected to the movable groove. A fixed block (28) is fixedly connected to one side of the extension end (222), and a reinforcement rod (35) is fixedly connected to the bottom of the fixed block (28), and the bottom of the reinforcement rod (35) is fixedly connected to the gear ring (7).

7. A crucible charging protection device according to claim 4, characterized in that: The driving disk (22) is provided with an arc-shaped groove (221) at the top, a connecting shaft (23) is slidably connected in the arc-shaped groove (221), the bottom of the connecting shaft (23) is rotatably connected to the supporting disk (25), the connecting shaft (23) passes through the blade (24), one side of the blade (24) passes through the inner wall of the supporting disk (25), an auxiliary shaft (241) is inserted through the inside of the blade (24), and the top of the auxiliary shaft (241) is fixedly connected to the driving disk (22).

8. The crucible charging protection device according to claim 4, characterized in that: The top of the auxiliary disk (21) is engaged with a limiting ring (18), the inner ring surface of the limiting ring (18) is fixedly connected to the second overflow pipe (15), and a slot is provided on the top of the auxiliary disk (21), and the slot is engaged with the bottom of the first guide member (14).

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