Sheet carrier loading and unloading device and method, and reactor system

Abstract

The present disclosure relates to the field of semiconductor or photovoltaic technology, and specifically to a sheet carrier loading and unloading device and method, and a reactor system, which solves the problem of difficulty in adjusting the position of the sheet carrier relative to the reactor when entering and exiting the reactor due to deformation of the paddle of the cantilever paddle structure. The sheet carrier loading and unloading device includes: a carrying plate, an outer furnace rail, and a push boat assembly. The carrying plate is placed horizontally on the ground or a frame. The outer furnace rail and the push boat assembly are both arranged on the carrying plate. The outer furnace rail is used to carry the sheet carrier and can be docked with the inner furnace rail of the reactor. When the outer furnace rail is docked with the inner furnace rail, the push boat assembly applies a thrust or a pull to the sheet carrier so that the sheet carrier is pushed into or pulled out of the reactor. The sheet carrier loading and unloading device replaces the cantilever paddle structure to carry the sheet carrier, and there is no deformation problem, which reduces the difficulty of adjusting the position of the sheet carrier relative to the reactor when entering and exiting the reactor.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor or photovoltaic technology, and in particular to a sheet carrier loading and unloading device and method, and a reactor system. Background Art

[0002] When processing semiconductor or photovoltaic materials, the sheet material to be processed usually needs to be fed into a specific reactor and processed under certain temperature and pressure conditions. Currently, the industry generally uses a boat structure to carry the sheet material to be processed, in process, or after processing. The boat structure is supported by a boat support, which is placed on the blade support end of a cantilever paddle structure. The cantilever paddle structure is installed on a boat pusher assembly. Driven by the boat pusher assembly, the cantilever paddle structure feeds the boat structure and the sheet material it carries into or out of the reactor.

[0003] As the weight and length of the boat structure continue to increase, the paddle of the cantilever paddle structure usually needs to be made very long. The blade support end is affected by its own gravity and the gravity of the boat support, boat structure, and sheet materials, and inevitably deforms and sags. Therefore, multiple sets of adjustment structures are needed to adjust the position of the boat support and the boat structure relative to the reactor when entering and exiting the reactor, which makes the adjustment difficult. Summary of the Invention

[0004] In view of this, the embodiments of the present disclosure provide a sheet carrier loading and unloading device and method, as well as a reactor system, which solves the problem of difficulty in adjusting the position of the sheet carrier relative to the reactor when entering and exiting the reactor due to deformation of the paddle of the cantilever paddle structure.

[0005] In a first aspect, an embodiment of the present disclosure provides a sheet carrier loading and unloading device, which is applied to a reaction furnace, wherein the reaction furnace has a reaction chamber and a furnace mouth, the furnace mouth is located on the side of the reaction chamber, and the reaction furnace also includes at least one furnace rail, and the furnace rail is arranged at the bottom of the reaction chamber; wherein the sheet carrier loading and unloading device includes: a carrying plate, which is placed horizontally on the ground or a frame; at least one furnace outer rail, which is arranged on the carrying plate and can be docked with the furnace inner rail and is configured to carry the sheet carrier, and the sheet carrier includes rollers, which can roll on the furnace outer rail and the furnace inner rail; a boat pusher assembly, which is arranged on the carrying plate and is configured to push the sheet carrier placed on the furnace outer rail. The sheet carrier applies a thrust or a pull along the extension direction of the outer furnace track; wherein, when the outer furnace track is docked with the inner furnace track, the extension direction of the outer furnace track is the same as the extension direction of the inner furnace track, wherein the push boat assembly applies a thrust along the extension direction of the outer furnace track to the sheet carrier on the outer furnace track, so that the roller rolls relative to the outer furnace track and the inner furnace track, and the sheet carrier is pushed into the reaction chamber; or, the push boat assembly applies a pull along the extension direction of the outer furnace track to the sheet carrier on the inner furnace track, so that the roller rolls relative to the outer furnace track and the inner furnace track, and the sheet carrier is pulled out of the reaction chamber.

[0006] In some embodiments, the sheet carrier loading and unloading device also includes: a limiting member, which is arranged on the supporting plate and below the outer furnace track, and the limiting member has a limiting portion, which extends to the side of the outer furnace track and is configured to limit the roller; an elastic member, which is arranged below the limiting member; wherein, in the process of the push boat assembly applying a push or pull force along the extension direction of the outer furnace track to the sheet carrier on the outer furnace track, the roller applies pressure to the limiting member to compress the elastic member, so that the roller passes over the limiting member and continues to roll on the outer furnace track.

[0007] In some embodiments, the roller includes: a first limiting wheel; a second limiting wheel; a connecting shaft, wherein the connecting shaft connects the first limiting wheel and the second limiting wheel; wherein the connecting shaft contacts the top of the outer furnace rail, the first limiting wheel contacts one side of the outer furnace rail, and the second limiting wheel contacts the other side of the outer furnace rail; wherein the limiting member has a first bearing groove, and the first bearing groove is configured to accommodate the bottom of the outer furnace rail and part of the side surface of the outer furnace rail connected to the bottom of the outer furnace rail; wherein the upper surface of the limiting portion has an arc-shaped groove, and the extension direction of the arc-shaped groove is perpendicular to the extension direction of the first bearing groove, and the arc-shaped groove can accommodate at least part of the first limiting wheel and / or at least part of the second limiting wheel.

[0008] In some embodiments, the push boat assembly includes: a clamping assembly, configured to clamp the sheet carrier; a driving assembly, disposed on the supporting plate and connected to the clamping assembly, configured to drive the clamping assembly to move along the extension direction of the external furnace track to apply a thrust or pull to the sheet carrier along the extension direction of the external furnace track.

[0009] In some embodiments, the sheet carrier loading and unloading device also includes: a first push boat slide rail, which is arranged on the supporting plate, and the extension direction of the first push boat slide rail is the same as the extension direction of the external furnace track; a first push boat slider, which is slidably connected to the first push boat slide rail and is connected to the clamping assembly so that the clamping assembly can move along the first push boat slide rail under the drive of the driving assembly.

[0010] In some embodiments, the sheet carrier unloading and loading device also includes: a driving source, arranged on the carrying plate, configured to provide driving force; a second push boat slide rail, arranged on the carrying plate, and the extension direction of the second push boat slide rail is the same as the extension direction of the outside-furnace track; at least one second push boat slider, slidably connected to the second push boat slide rail, and is located below the outside-furnace track and connected to the outside-furnace track, and the driving source is connected to the outside-furnace track, wherein, under the drive of the driving source, the outside-furnace track drives the second push boat slider to move along the second push boat slide rail so that the outside-furnace track is docked with the inside-furnace track.

[0011] In some embodiments, the number of the second push boat sliders is multiple; wherein the sheet carrier unloading and loading device also includes: a connecting plate, which is arranged on the multiple second push boat sliders and connected to the multiple second push boat sliders; a support block, which is arranged on the connecting plate and connected to the connecting plate, and the support block has a second bearing groove, and the second bearing groove is configured to accommodate the bottom of the out-furnace rail and a portion of the side of the out-furnace rail connected to the bottom of the out-furnace rail.

[0012] In some embodiments, the sheet carrier loading and unloading device further includes: at least one sensor, disposed on the carrying plate, configured to detect whether the sheet carrier exists on the external furnace track, or to detect the position of the sheet carrier.

[0013] In some embodiments, there are multiple external furnace rails, and the multiple external furnace rails are symmetrically arranged relative to the push boat assembly.

[0014] In a second aspect, an embodiment of the present disclosure provides a reactor system, comprising: a reactor having a reaction chamber and a furnace mouth, the furnace mouth being located on the side of the reaction chamber, the reactor further comprising at least one in-furnace rail, the in-furnace rail being arranged at the bottom of the reaction chamber; a sheet carrier loading and unloading device as described in the first aspect, configured to deliver the sheet carrier from the furnace mouth into the reaction chamber by docking with the in-furnace rail.

[0015] In a third aspect, an embodiment of the present disclosure provides a sheet carrier loading and unloading method, which is applied to a reaction furnace and the sheet carrier loading and unloading device described in the first aspect, wherein the reaction furnace has a reaction chamber and a furnace mouth, the furnace mouth is located on the side of the reaction chamber, and the reaction furnace further includes at least one furnace rail, and the furnace rail is arranged at the bottom of the reaction chamber; wherein the sheet carrier loading and unloading method comprises: docking the furnace outer rail of the sheet carrier loading and unloading device with the furnace inner rail, and the extension direction of the furnace outer rail is the same as the extension direction of the furnace inner rail; utilizing The push boat assembly of the sheet carrier loading and unloading device is used to apply a thrust along the extension direction of the outer furnace track to the sheet carrier placed on the outer furnace track, so that the rollers of the sheet carrier roll relative to the outer furnace track and the inner furnace track, and the sheet carrier is pushed into the reaction chamber; or, the push boat assembly is used to apply a pulling force along the extension direction of the outer furnace track to the sheet carrier on the inner furnace track, so that the rollers of the sheet carrier roll relative to the outer furnace track and the inner furnace track, and the sheet carrier is pulled out of the reaction chamber.

[0016] The present disclosure provides a sheet carrier loading and unloading device, which is applied to a reaction furnace. The reaction furnace has a reaction chamber and a furnace mouth, and the furnace mouth is located on the side of the reaction chamber. The reaction furnace also includes at least one furnace track, and the furnace track is arranged at the bottom of the reaction chamber. The sheet carrier loading and unloading device includes: a carrying plate, at least one furnace track outside the furnace, and a push boat assembly. The carrying plate is placed horizontally on the ground or a frame. At least one furnace track outside the furnace is arranged on the carrying plate and can be docked with the furnace track. It is configured to carry sheet carriers. The sheet carrier includes rollers that can roll on the furnace track outside the furnace and the furnace track. The push boat assembly is arranged on the carrying plate and is configured to apply a thrust or pull along the extension direction of the furnace track to the sheet carrier placed on the furnace track outside the furnace. When the external and internal rails are docked, the external rails extend in the same direction as the internal rails. The pusher assembly applies a thrust in the direction of the external rail to the sheet carrier on the internal rail, causing the rollers to roll relative to the external and internal rails, pushing the sheet carrier into the reaction chamber. The pusher assembly then applies a pulling force in the direction of the external rail to the internal rail, causing the rollers to roll relative to the external and internal rails, pulling the sheet carrier out of the reaction chamber. This sheet carrier loading and unloading device uses external and internal rails to support the sheet carrier, replacing a cantilever paddle structure. The rails provide strong support and are free of deformation, simplifying the adjustment of the sheet carrier's position relative to the reactor when entering and exiting the reactor. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 Shown is a schematic structural diagram of a reactor system provided in one embodiment of the present disclosure.

[0018] Figure 2 Shown is a structural schematic diagram of a sheet carrier loading and unloading device and a sheet carrier provided in one embodiment of the present disclosure.

[0019] Figure 3 Shown Figure 2 A partial enlarged view of area A is shown.

[0020] Figure 4 Shown is a schematic structural diagram of a position limiting member and an outer furnace rail provided in an embodiment of the present disclosure.

[0021] Figure 5 Shown is a schematic structural diagram of a position limiting member and an outer furnace rail provided in another embodiment of the present disclosure.

[0022] Figure 6 Shown is a cross-sectional view of a limiting member and an outer furnace rail provided in another embodiment of the present disclosure.

[0023] Figure 7 Shown is a schematic structural diagram of a push boat assembly and a supporting plate provided in one embodiment of the present disclosure.

[0024] Figure 8 Shown Figure 7 A partial enlarged view of area B is shown.

[0025] Figure 9 FIG. 1 is a top view of a push boat assembly and a load-bearing plate according to an embodiment of the present disclosure.

[0026] Figure 10 FIG2 is a top view of a sheet carrier loading and unloading device provided by an embodiment of the present disclosure, excluding a push boat assembly.

[0027] Figure 11 Shown Figure 10 A partial enlarged view of region C is shown.

[0028] Figure 12 Shown is a schematic structural diagram of a support block and an outer furnace rail provided in an embodiment of the present disclosure.

[0029] Figure 13 Shown is a cross-sectional view of a support block and an outer furnace rail provided in one embodiment of the present disclosure.

[0030] Figure 14 Shown is a top view of a sheet carrier loading and unloading device provided by one embodiment of the present disclosure.

[0031] Figure 15 The figure shows a side view of an embodiment of the present disclosure when the outer rail of the furnace and the inner rail of the furnace are not connected.

[0032] Figure 16 Shown is a side view of the external furnace rail and the internal furnace rail provided by an embodiment of the present disclosure when they are docked.

[0033] Figure 17 Shown is a flow chart of a sheet carrier loading and unloading method provided by one embodiment of the present disclosure.

[0034] Reference numerals:

[0035] 1. Reactor system; 10. Sheet carrier loading and unloading device; 100. Carrying plate; 200. External rail; 210. Top of external rail; 220. Bottom of external rail; 300. Push boat assembly; 310. Clamping assembly; 3110. Clamping claw; 3120. Clamping support seat; 320. Driving assembly; 3210. Servo motor; 3220. Lead screw; 400. Limiting member; 410. Limiting portion; 4101. Arc groove; 420. First bearing groove; 500. Elastic member; 600. First A boat push rail; 700, a first boat push slider; 800, a driving source; 900, a second boat push rail; 1000, a second boat push slider; 1100, a connecting plate; 1200, a support block; 1201, a second bearing groove; 1300, a sensor; 20, a reactor; 201, a reaction chamber; 202, a furnace mouth; 203, a track inside the furnace; 2, a sheet carrier; 21, a boat support; 211, a roller; 2111, a first limiting wheel; 2112, a second limiting wheel; 2113, a connecting shaft; 22, a boat structure. DETAILED DESCRIPTION

[0036] The following will clearly and completely describe the technical solutions in the embodiments of the present disclosure in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present disclosure without making any creative efforts shall fall within the scope of protection of the present disclosure.

[0037] When processing semiconductor or photovoltaic materials, the sheet material to be processed usually needs to be fed into a specific reactor and processed under certain temperature and pressure conditions. Currently, the industry generally uses a boat structure to carry the sheet material to be processed, in process, or after processing. The boat structure is supported by a boat support, which is placed on the blade support end of a cantilever paddle structure. The cantilever paddle structure is installed on a boat pusher assembly. Driven by the boat pusher assembly, the cantilever paddle structure feeds the boat structure and the sheet material it carries into or out of the reactor.

[0038] As the weight and length of the boat structure continue to increase, the paddle of the cantilever paddle structure usually needs to be made very long. The blade support end is affected by its own gravity and the gravity of the boat support, boat structure, and sheet materials, and inevitably deforms and sags. Therefore, multiple sets of adjustment structures are needed to adjust the position of the boat support and the boat structure relative to the reactor when entering and exiting the reactor, which makes the adjustment difficult.

[0039] In addition, when the boat structure carries different quantities or different types of sheet materials, the force conditions of the paddles of the cantilever paddle structure are different, and thus the deformation degrees of the paddles of the cantilever paddle structure are different, resulting in different adjustment degrees of the boat structure and the boat support, further increasing the adjustment difficulty, adjustment time and adjustment cost.

[0040] Furthermore, the cantilever paddle structure vibrates during entry and exit of the reactor, resulting in poor operational stability. This can cause sheet materials to collide with the boat structure, damaging them and impacting the yield of the sheet materials. It can also cause deformation or damage to the boat structure and the boat support. Furthermore, due to the deformation of the cantilever paddle structure, the number of sheet materials that the paddle can carry at a time is limited, impacting the overall productivity of the reactor.

[0041] In response to the above-mentioned problems, an embodiment of the present disclosure provides a sheet carrier loading and unloading device, which is applied to a reaction furnace. The reaction furnace has a reaction chamber and a furnace mouth, and the furnace mouth is located on the side of the reaction chamber. The reaction furnace also includes at least one furnace rail, and the furnace rail is arranged at the bottom of the reaction chamber. The sheet carrier loading and unloading device includes: a carrying plate, at least one furnace rail and a push boat assembly. The carrying plate is placed horizontally on the ground or a frame. At least one furnace rail is arranged on the carrying plate and can be docked with the furnace rail. It is configured to carry sheet carriers. The sheet carrier includes rollers that can roll on the furnace rail and the furnace rail. The push boat assembly is arranged on the carrying plate and is configured to apply a thrust or pull along the extension direction of the furnace rail to the sheet carrier placed on the furnace rail. When the external and internal rails are docked, the external rails extend in the same direction as the internal rails. The pusher assembly applies a thrust in the direction of the external rail to the sheet carrier on the internal rail, causing the rollers to roll relative to the external and internal rails, pushing the sheet carrier into the reaction chamber. The pusher assembly then applies a pulling force in the direction of the external rail to the internal rail, causing the rollers to roll relative to the external and internal rails, pulling the sheet carrier out of the reaction chamber. This sheet carrier loading and unloading device uses external and internal rails to support the sheet carrier, replacing a cantilever paddle structure. The rails provide strong support and are free of deformation, simplifying the adjustment of the sheet carrier's position relative to the reactor when entering and exiting the reactor.

[0042] Furthermore, the sheet carrier loading and unloading mechanism does not vibrate during movement, ensuring excellent operational stability. This prevents damage to the sheet material from colliding with the sheet carrier, resulting in a higher yield rate for the sheet material and preventing deformation or damage to the sheet carrier. Furthermore, since it is no longer restricted by the deformation of the cantilever paddle structure, the sheet carrier can carry more sheet material at a time, resulting in higher overall reactor capacity while maintaining the same reactor dimensions.

[0043] The specific structure of the sheet carrier loading and unloading device is described below in conjunction with embodiments.

[0044] Figure 1 Shown is a schematic structural diagram of a reactor system provided in one embodiment of the present disclosure. Figure 2Shown is a structural schematic diagram of a sheet carrier loading and unloading device and a sheet carrier provided in one embodiment of the present disclosure. Figure 3 Shown Figure 2 A partial enlarged view of area A shown in FIG. Figures 1 to 3 As shown, the sheet carrier loading and unloading device 10 is applied to a reaction furnace 20. The reaction furnace 20 has a reaction chamber 201 and a furnace opening 202. The furnace opening 202 is located on the side of the reaction chamber 201. The reaction furnace 20 also includes at least one internal furnace track 203, which is disposed at the bottom of the reaction chamber 201. The sheet carrier loading and unloading device 10 includes a carrier plate 100, at least one external furnace track 200, and a push boat assembly 300. The carrier plate 100 is placed horizontally on the ground or a frame. The external furnace track 200 is disposed on the carrier plate 100 and can dock with the internal furnace track 203. It is configured to carry the sheet carrier 2. The sheet carrier 2 includes rollers 211 that can roll on the external furnace track 200 and the internal furnace track 203.

[0045] The boat push assembly 300 is disposed on the carrier plate 100 and is configured to apply a pushing force or a pulling force along the extending direction of the external rail 200 to the sheet carrier 2 placed on the external rail 200 .

[0046] When the external furnace track 200 is docked with the internal furnace track 203, the extension direction of the external furnace track 200 is the same as the extension direction of the internal furnace track 203. The push boat assembly 300 applies a thrust along the extension direction of the external furnace track 200 to the sheet carrier 2 on the external furnace track 200, so that the roller 211 rolls relative to the external furnace track 200 and the internal furnace track 203, and the sheet carrier 2 is pushed into the reaction chamber 201; the push boat assembly 300 applies a pulling force along the extension direction of the external furnace track 200 to the sheet carrier 2 on the internal furnace track 203, so that the roller 211 rolls relative to the external furnace track 200 and the internal furnace track 203, and the sheet carrier 2 is pulled out of the reaction chamber 201.

[0047] The vertical cross-section of the reaction chamber 201 may be circular, rectangular, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0048] The vertical cross-section of the furnace opening 202 may be circular, rectangular, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0049] The vertical cross-section of the furnace rail 203 may be circular, arc-shaped, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0050] The furnace track 203 is fixedly connected to the bottom of the reaction chamber 201. The furnace track 203 can be non-detachably connected to the bottom of the reaction chamber 201 by welding, bonding, etc., or the furnace track 203 can be detachably connected to the bottom of the reaction chamber 201 by bolts, nuts, screws, snaps, magnetism, etc.

[0051] When the supporting plate 100 is placed horizontally on the rack, the supporting plate 100 is fixedly connected to the rack. The supporting plate 100 can be non-detachably connected to the rack by welding, bonding, etc., or the supporting plate 100 can be detachably connected to the rack by bolts, nuts, screws, snaps, magnets, etc.

[0052] The horizontal cross-sectional shape of the supporting plate 100 may be a rectangle, a parallelogram, a trapezoid, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0053] The vertical cross-sectional shape of the outer furnace rail 200 may be circular, arc-shaped, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0054] The external furnace rail 200 is disposed on the supporting plate 100 and can be slidably connected to the supporting plate 100 . The sliding direction of the external furnace rail 200 can be the same as the extending direction of the external furnace rail 200 .

[0055] The sheet carrier 2 includes a boat support 21 and a boat structure 22. A plurality of rollers 211 are disposed below and on either side of the boat support 21 and are rotatably connected to the boat support 21. The boat support 21 is configured to support the boat structure 22, which is configured to support sheet materials, such as silicon wafers, solar panels, and glass substrates.

[0056] The boat push assembly 300 may be a robotic arm or other structures, which is not specifically limited in the present disclosure.

[0057] The boat push assembly 300 can be fixedly connected to the supporting plate 100. The boat push assembly 300 can be non-detachably connected to the supporting plate 100 through welding, bonding, etc., or the boat push assembly 300 can be detachably connected to the supporting plate 100 through bolts, nuts, screws, snaps, magnetism, etc.

[0058] The sheet carrier loading and unloading device 10 provided in the embodiment of the present disclosure is applied to a reaction furnace 20. The reaction furnace 20 has a reaction chamber 201 and a furnace opening 202. The furnace opening 202 is located on the side of the reaction chamber 201. The reaction furnace 20 also includes at least one internal furnace track 203. The internal furnace track 203 is arranged at the bottom of the reaction chamber 201. The sheet carrier loading and unloading device 10 includes: a carrier plate 100, at least one external furnace track 200, and a push boat assembly 300. The carrier plate 100 is placed horizontally on the ground or a frame. The external furnace track 200 is arranged on the carrier plate 100 and can be docked with the internal furnace track 203. It is configured to carry the sheet carrier 2. The sheet carrier 2 includes rollers 211. The rollers 211 can roll on the external furnace track 200 and the internal furnace track 203.

[0059] The boat push assembly 300 is disposed on the carrier plate 100 and is configured to apply a pushing force or a pulling force along the extending direction of the external rail 200 to the sheet carrier 2 placed on the external rail 200 .

[0060] When the external furnace track 200 is docked with the internal furnace track 203, the extension direction of the external furnace track 200 is the same as the extension direction of the internal furnace track 203. The push boat assembly 300 applies a thrust along the extension direction of the external furnace track 200 to the sheet carrier 2 on the external furnace track 200, so that the roller 211 rolls relative to the external furnace track 200 and the internal furnace track 203, and the sheet carrier 2 is pushed into the reaction chamber 201; the push boat assembly 300 applies a pulling force along the extension direction of the external furnace track 200 to the sheet carrier 2 on the internal furnace track 203, so that the roller 211 rolls relative to the external furnace track 200 and the internal furnace track 203, and the sheet carrier 2 is pulled out of the reaction chamber 201. The sheet carrier loading and unloading device 10 uses an external furnace rail 200 and an internal furnace rail 203 to carry the sheet carrier 2, replacing the cantilever paddle structure. The rail has strong supporting force and there is no deformation problem, thereby reducing the difficulty of adjusting the position of the sheet carrier 2 relative to the reactor 20 when entering and exiting the reactor 20.

[0061] Furthermore, the sheet carrier loading and unloading device 10 does not vibrate during movement, providing excellent operational stability. This prevents sheet materials from colliding with the sheet carrier 2 and causing damage, resulting in a higher yield of sheet materials and preventing deformation or damage to the sheet carrier 2. Furthermore, since it is no longer limited by the deformation of the cantilever paddle structure, the sheet carrier 2 can carry a greater number of sheet materials at a time. This allows the overall production capacity of the reactor 10 to be higher, while maintaining the same overall dimensions.

[0062] In some embodiments, the sheet carrier loading and unloading device 10 further includes a stopper 400 and an elastic member 500. The stopper 400 is disposed on the carrier plate 100 and below the external rail 200. The stopper 400 has a stopper portion 410 that extends to the side of the external rail 200 and is configured to limit the position of the roller 211 so that the sheet carrier 2 can be accurately placed on the external rail 200, thereby facilitating precise connection between the push boat assembly 300 and the sheet carrier 2 on the external rail 200. The elastic member 500 is disposed below the stopper 400. During the process of the push boat assembly 300 applying a thrust or a pull along the extension direction of the outer furnace track 200 to the sheet carrier 2 on the outer furnace track 200, the roller 211 applies pressure to the limit member 400 to compress the elastic member 500, so that the roller 211 passes over the limit member 400 and continues to roll on the outer furnace track 200. The elastic member 500 can prevent the roller 211 from vibrating during the process of passing over the limit member 400, thereby preventing the sheet material from being broken due to vibration.

[0063] Figure 5 Shown is a schematic structural diagram of a position limiting member and an outer furnace rail provided in another embodiment of the present disclosure. Figure 6 FIG. 1 is a cross-sectional view of a stopper and an outer furnace rail provided by another embodiment of the present disclosure. Figures 5 and 6 As shown, the limiting member 400 is arranged above the top 210 of the outer furnace track. The limiting member 400 has an arc-shaped groove. The center part of the roller 211 is located in the arc-shaped groove to limit the roller 211.

[0064] Illustratively, a limiting hole is provided on the outer furnace rail 200 , which passes through the outer furnace rail 200 longitudinally; a limiting block is provided on the roller 211 , which is inserted into the limiting hole to limit the roller 211 .

[0065] Exemplarily, a limiting member 400 is sleeved on the outer rail 200 of the furnace, and the top of the limiting member 400 exceeds the top 210 of the outer rail of the furnace. The limiting member 400 abuts against the outer edge of the hub of the roller 211 to limit the roller 211.

[0066] Exemplarily, the limiting member 400 is arranged below the outer furnace rail 200, and accommodates the bottom 220 of the outer furnace rail and part of the side surface of the outer furnace rail 200 connected to the bottom 220 of the outer furnace rail. An arc-shaped groove is provided on the limiting member 400, and the outer edge of the hub of the roller 211 is located in the arc-shaped groove to limit the roller 211.

[0067] In some embodiments, the roller 211 includes a first limiting wheel 2111, a second limiting wheel 2112, and a connecting shaft 2113. The connecting shaft 2113 connects the first limiting wheel 2111 and the second limiting wheel 2112. The connecting shaft 2113 contacts the top 210 of the external rail. The first limiting wheel 2111 contacts one side of the external rail 200, and the second limiting wheel 2112 contacts the other side of the external rail 200. The limiting member 400 has a first bearing groove 420, which is configured to accommodate the bottom 220 of the external rail and a portion of the side surface of the external rail 200 connected to the bottom 220. The upper surface of the limiting member 410 has an arcuate groove 4101, which extends perpendicularly to the direction of extension of the first bearing groove 420.

[0068] In some embodiments, there is one limiting portion 410 , which extends to the side of the outer furnace rail 200 , and the arc-shaped groove 4101 can accommodate at least a portion of the first limiting wheel 2111 .

[0069] In some embodiments, there is one limiting portion 410 , which extends to the other side of the outer furnace rail 200 , and the arc-shaped groove 4101 can accommodate at least a portion of the second limiting wheel 2112 .

[0070] In some embodiments, there are two limiting portions 410, one limiting portion 410 extends to the side of the external furnace track 200, and the other limiting portion 410 extends to the other side of the external furnace track 200, and the two arc-shaped grooves 4101 can respectively accommodate at least part of the first limiting wheel 2111 and at least part of the second limiting wheel 2112.

[0071] The arc groove 4101 is used to limit the roller 211 so that the roller 211 rolls out of or into the arc groove 4101 when the boat push assembly 300 applies a pushing force or a pulling force along the extension direction of the outer furnace track 200 to the sheet carrier 2 on the outer furnace track 200 .

[0072] In some embodiments, the boat pusher assembly 300 includes a clamping assembly 310 and a driving assembly 320. The clamping assembly 310 is configured to clamp the sheet carrier 2. The driving assembly 320 is disposed on the carrier plate 100 and connected to the clamping assembly 310. The driving assembly 320 is configured to drive the clamping assembly 310 to move along the extension direction of the external furnace track 200 to apply a pushing or pulling force to the sheet carrier 2 along the extension direction of the external furnace track 200. The clamping assembly 310 clamps the sheet carrier 2 to prevent the sheet carrier 2 from shaking during movement along the extension direction of the external furnace track 200.

[0073] In some embodiments, the clamping assembly 310 includes at least one clamping jaw 3110 and a clamping support 3120. The clamping jaw 3110 is connected to the clamping support 3120 and is configured to clamp the sheet carrier 2. The driving assembly 320 includes a servo motor 3210 and a lead screw 3220. The servo motor 3210 is disposed on the carrier plate 100 and connected to one side of the lead screw 3220. The other side of the lead screw 3220 is rotatably connected to the carrier plate 100. The lead screw 3220 extends in the same direction as the external furnace rail 200. The clamping support 3120 is rotatably connected to the lead screw 3220. The servo motor 3210 drives the lead screw 3220 to rotate, which in turn drives the clamping support 3120 to move, thereby causing the clamping assembly 310 to move along the extension direction of the external furnace rail 200, thereby applying a pushing or pulling force to the sheet carrier 2 along the extension direction of the external furnace rail 200.

[0074] For example, Figure 9 As shown, the clamping assembly 310 includes two clamping jaws 3110 , which are symmetrically arranged relative to the lead screw 3220 to improve the stability of the clamping jaws 3110 on the sheet carrier 2 .

[0075] The vertical cross-sectional shape of the clamping support seat 3120 can be L-shaped, U-shaped, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0076] The servo motor 3210 is fixedly connected to the carrier plate 100. The servo motor 3210 can be non-detachably connected to the carrier plate 100 through welding, bonding, etc., or the servo motor 3210 can be detachably connected to the carrier plate 100 through bolts, nuts, screws, snaps, magnetism, etc.

[0077] The servo motor 3210 is fixedly connected to the lead screw 3220. The servo motor 3210 can be non-detachably connected to the lead screw 3220 by welding, bonding, etc., or the servo motor 3210 can be detachably connected to the lead screw 3220 by bolts, nuts, screws, snaps, magnetism, etc.

[0078] In some embodiments, the sheet carrier loading and unloading device 10 further includes a first push boat rail 600 and a first push boat slider 700. The first push boat rail 600 is disposed on the carrier plate 100 and extends in the same direction as the external furnace rail 200. The first push boat slider 700 is slidably connected to the first push boat rail 700 and is connected to the clamping assembly 310, so that the clamping assembly 310 can move along the first push boat rail 600 under the drive of the drive assembly 320. The first push boat rail 600 guides the movement of the clamping assembly 310.

[0079] The first boat push rail 600 is fixedly connected to the supporting plate 100. The first boat push rail 600 can be non-detachably connected to the supporting plate 100 by welding, bonding, etc., or the first boat push rail 600 can be detachably connected to the supporting plate 100 by bolts, nuts, screws, snaps, magnetism, etc.

[0080] The first boat pushing slider 700 is fixedly connected to the clamping support seat 3120 of the clamping assembly 310. The first boat pushing slider 700 can be non-detachably connected to the clamping support seat 3120 by welding, bonding, etc., or the first boat pushing slider 700 can be detachably connected to the clamping support seat 3120 by bolts, nuts, screws, snaps, magnetism, etc.

[0081] Exemplarily, the sheet carrier loading and unloading device 10 includes two first boat push rails 600 and two first boat push sliders 700 , which are symmetrically arranged relative to the screw 3220 , and the two first boat push sliders 700 are fixedly connected to the lower sides of the clamping support seat 3120 .

[0082] In some embodiments, the sheet carrier loading and unloading device 10 further includes: a driving source 800, a second push boat slide 900, and at least one second push boat slider 1000. The driving source 800 is disposed on the carrier plate 100 and is configured to provide a driving force. The second push boat slide 900 is disposed on the carrier plate 100, and the extension direction of the second push boat slide 900 is the same as the extension direction of the external furnace track 200. The second push boat slider 1000 is slidably connected to the second push boat slide 900, and is located below the external furnace track 200 and connected to the external furnace track 200. The driving source 800 is connected to the external furnace track 200. Under the drive of the driving source 800, the external furnace track 200 drives the second push boat slider 1000 to move along the second push boat slide 900, so that the external furnace track 200 is docked with the internal furnace track 203.

[0083] During the movement of the outer furnace track 200 along the second push boat slide rail 900, the push boat assembly 300 clamps the sheet carrier 2 and drives the sheet carrier 2 to move synchronously and in the same direction as the outer furnace track 200. During this process, the sheet carrier 2 and the outer furnace track 200 have no relative movement until the outer furnace track 200 docks with the inner furnace track 203 or moves away from the inner furnace track 203.

[0084] The driving source 800 is fixedly connected to the supporting plate 100. The driving source 800 can be non-detachably connected to the supporting plate 100 by welding, bonding, or the like, or can be detachably connected to the supporting plate 100 by bolts, nuts, screws, snaps, magnets, or the like. The driving source 800 can be an air cylinder, an oil cylinder, or other structure capable of providing driving force, and this disclosure does not specifically limit this.

[0085] The second boat push rail 900 is fixedly connected to the supporting plate 100. The second boat push rail 900 can be non-detachably connected to the supporting plate 100 by welding, bonding, etc., or the second boat push rail 900 can be detachably connected to the supporting plate 100 by bolts, nuts, screws, snaps, magnetism, etc.

[0086] The second boat push slider 1000 is fixedly connected to the outer furnace track 200. The second boat push slider 1000 can be non-detachably connected to the outer furnace track 200 through welding, bonding, etc., or the second boat push slider 1000 can be detachably connected to the outer furnace track 200 through bolts, nuts, screws, snaps, magnetism, etc.

[0087] In some embodiments, there are multiple second boat pusher sliders 1000, and the sheet carrier loading and unloading device 10 further includes: a connecting plate 1100 and a support block 1200. The connecting plate 1100 is disposed on and connected to the multiple second boat pusher sliders 1000. The support block 1200 is disposed on and connected to the connecting plate 1100. The support block 1200 has a second bearing groove 1201, which is configured to accommodate the bottom 220 of the external furnace rail and a portion of the side surface of the external furnace rail 200 connected to the bottom 220 of the external furnace rail. The weight of the sheet carrier 2 is distributed across the multiple second boat pusher sliders 1000, so that the second boat pusher sliders 1000 and the second boat pusher rail 900 are evenly stressed, thereby improving the sliding effect.

[0088] Exemplarily, the connecting plate 1100 is arranged horizontally, and the connecting plate 1100 is fixedly connected to the second push boat slider 1000. The connecting plate 1100 can be non-detachably connected to the second push boat slider 1000 by welding, bonding, etc., or the connecting plate 1100 can be detachably connected to the second push boat slider 1000 by bolts, nuts, screws, snaps, magnetism, etc.

[0089] The driving source 800 is fixedly connected to the connecting plate 1100. The driving source 800 can be non-detachably connected to the connecting plate 1100 through welding, bonding, etc., or the driving source 800 can be detachably connected to the connecting plate 1100 through bolts, nuts, screws, snaps, magnetism, etc.

[0090] The horizontal cross-sectional shape of the connecting plate 1100 may be a rectangle, a parallelogram, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0091] The support block 1200 is fixedly connected to the connecting plate 1100. The support block 1200 can be non-detachably connected to the connecting plate 1100 by welding, bonding, etc., or the support block 1200 can be detachably connected to the connecting plate 1100 by bolts, nuts, screws, snaps, magnetism, etc.

[0092] The vertical cross-sectional shape of the support block 1200 may be a rectangle, a parallelogram, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0093] The support block 1200 is fixedly connected to the outer furnace track 200. The support block 1200 can be non-detachably connected to the outer furnace track 200 through welding, bonding, etc., or the support block 1200 can be detachably connected to the outer furnace track 200 through bolts, nuts, screws, snaps, magnetism, etc.

[0094] The vertical cross-sectional shape of the second bearing groove 1201 may be an arc, a rectangle, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0095] Exemplarily, the shape of the outer furnace rail 200 is circular, the shape of the second supporting groove 1201 is arc-shaped, the bottom 220 of the outer furnace rail and the partial side surface of the outer furnace rail 200 connected to the bottom 220 of the outer furnace rail are placed in the second supporting groove 1201, and the outer furnace rail 200 is fixedly connected to the support block 1200 by screws.

[0096] Figure 13 Shown is a cross-sectional view of a support block and an outer furnace rail provided in another embodiment of the present disclosure. Figure 13 Four other vertical cross-sectional shapes and connection methods of the external furnace rail 200 and the support block 1200 are shown.

[0097] In some embodiments, the sheet carrier loading and unloading device 10 further includes: at least one sensor 1300 , which is disposed on the carrier plate 100 and configured to detect whether there is a sheet carrier 2 on the external furnace track 200 , or to detect the position of the sheet carrier 2 .

[0098] The sensor 1300 is fixedly connected to the carrier plate 100. The sensor 1300 can be non-detachably connected to the carrier plate 100 by welding, bonding, etc., or the sensor 1300 can be detachably connected to the carrier plate 100 by bolts, nuts, screws, snaps, magnetism, etc.

[0099] The sensor 1300 may be a photoelectric sensor, a micro switch, or other types of sensors, which is not specifically limited in this disclosure.

[0100] In some embodiments, there are multiple external furnace rails 200 , and the multiple external furnace rails 200 are symmetrically arranged relative to the boat pusher assembly 300 so that the sheet carrier 2 is subjected to uniform force.

[0101] For example, Figure 14 As shown, there are two external furnace rails 200 , and the two external furnace rails 200 are symmetrically arranged relative to the push boat assembly 300 .

[0102] The present disclosure also provides a reactor system, such as Figures 1 to 3 As shown, the reactor system 1 includes: the sheet carrier loading and unloading device 10 mentioned in the above embodiment and a reactor 20. The reactor 20 has a reaction chamber 201 and a furnace opening 202. The furnace opening 202 is located on the side of the reaction chamber 201. The reactor 20 also includes at least one furnace track 203. The furnace track 203 is arranged at the bottom of the reaction chamber 201. The sheet carrier loading and unloading device 10 is configured to deliver the sheet carrier 2 from the furnace opening 202 into the reaction chamber 201 by docking with the furnace track 203.

[0103] Since the reactor system 1 includes the sheet carrier loading and unloading device 10 , the reactor system 1 has all the technical features and technical effects of the sheet carrier loading and unloading device 10 , which will not be described in detail here.

[0104] The embodiment of the present disclosure also provides a sheet carrier loading and unloading method, which is applied to the reaction furnace 20 and the sheet carrier loading and unloading device 10 mentioned in the above embodiment. The reaction furnace 20 has a reaction chamber 201 and a furnace mouth 202. The furnace mouth 202 is located on the side of the reaction chamber 201. The reaction furnace 20 also includes at least one furnace rail 203, and the furnace rail 203 is arranged at the bottom of the reaction chamber 201.

[0105] Figure 17 The figure shows a flow chart of a sheet material carrier loading and unloading method provided by an embodiment of the present disclosure. Figure 17 As shown, the sheet carrier loading and unloading method includes the following steps.

[0106] Step 171 , docking the outer rail of the sheet carrier loading and unloading device with the inner rail, and the extension direction of the outer rail is the same as the extension direction of the inner rail.

[0107] In step 172, the push boat assembly of the sheet carrier loading and unloading device applies a thrust along the extension direction of the outer furnace track to the sheet carrier placed on the outer furnace track, so that the rollers of the sheet carrier roll relative to the outer furnace track and the inner furnace track, and the sheet carrier is pushed into the reaction chamber.

[0108] In step 173 , a pulling force is applied to the sheet carrier on the inner furnace track along the extension direction of the outer furnace track by using the push boat assembly, so that the rollers of the sheet carrier roll relative to the outer furnace track and the inner furnace track, and the sheet carrier is pulled out of the reaction chamber.

[0109] Optionally, before step 171, the following steps may be performed:

[0110] Step 174 , placing the sheet carrier on the track outside the furnace, and limiting the position of the rollers with the limiting members.

[0111] In step 175 , the clamping assembly clamps the sheet carrier.

[0112] Step 176 , the boat pusher assembly pushes the sheet carrier, and the outer rail of the furnace carries the sheet carrier to move toward the reaction furnace. During this process, the sheet carrier and the outer rail of the furnace do not move relative to each other.

[0113] Optionally, after step 172, the following steps may be further performed:

[0114] In step 177 , the reaction furnace processes the sheet material carried by the sheet carrier.

[0115] Optionally, after step 173, the following steps may be further performed:

[0116] Step 178: The push boat assembly pushes the sheet carrier, and the outer track of the furnace carries the sheet carrier to move away from the reaction furnace. During this process, the sheet carrier and the outer track of the furnace do not move relative to each other.

[0117] References in the specification to "one embodiment," "an embodiment," and the like indicate that the described embodiment may include a particular feature, structure, or characteristic, but not every embodiment necessarily includes that particular feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Furthermore, when a particular feature, structure, or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not.

[0118] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” means not only “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” includes not only the meaning of “above” or “over,” but also includes the meaning of “above” or “over” with no intervening features or layers therebetween (i.e., directly on something).

[0119] Additionally, spatially relative terms, such as "below," "beneath," "beneath," "above," and the like, may be used herein for ease of description to describe the relationship of one component or feature relative to other components or features as depicted in the figures. Spatially relative terms are intended to encompass different orientations of a component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein should be interpreted accordingly.

[0120] It should be noted that, in this document, the terms "comprises," "includes," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus comprising a series of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of other identical elements in the process, method, article, or apparatus comprising the element.

[0121] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the scope of protection of the present disclosure.

Claims

1. A sheet carrier loading and unloading device, characterized in that: Applicable to a reaction furnace, the reaction furnace comprises a reaction chamber and a furnace opening, the furnace opening is located on the side of the reaction chamber, the reaction furnace further comprises at least one furnace rail, the furnace rail is arranged at the bottom of the reaction chamber; Wherein, the sheet carrier loading and unloading device includes: The load plate is placed horizontally on the ground or rack; At least one external furnace track is provided on the carrying plate and can be docked with the internal furnace track and is configured to carry a sheet carrier, wherein the sheet carrier includes rollers that can roll on the external furnace track and the internal furnace track; a push boat assembly, disposed on the carrying plate, configured to apply a pushing force or a pulling force along an extending direction of the outer furnace track to the sheet carrier placed on the outer furnace track; a limiting member, disposed on the carrying plate and below the outer furnace rail, the limiting member having a limiting portion, the limiting portion extending to the side of the outer furnace rail and configured to limit the roller; an elastic member, disposed below the limiting member; Wherein, when the outer furnace track is docked with the inner furnace track, the extension direction of the outer furnace track is the same as the extension direction of the inner furnace track, wherein the push boat assembly applies a thrust along the extension direction of the outer furnace track to the sheet carrier on the outer furnace track, so that the roller rolls relative to the outer furnace track and the inner furnace track, and the sheet carrier is pushed into the reaction chamber; or, the push boat assembly applies a pulling force along the extension direction of the outer furnace track to the sheet carrier on the inner furnace track, so that the roller rolls relative to the outer furnace track and the inner furnace track, and the sheet carrier is pulled out of the reaction chamber; Wherein, when the push boat assembly applies a pushing force or a pulling force along the extension direction of the outer furnace track to the sheet carrier on the outer furnace track, the roller applies pressure to the limiter to compress the elastic member, so that the roller passes over the limiter and continues to roll on the outer furnace track; Wherein, the roller comprises: The first limiting wheel; The second limiting wheel; a connecting shaft connecting the first limiting wheel and the second limiting wheel; The connecting shaft contacts the top of the outer rail of the furnace, the first limiting wheel contacts one side of the outer rail of the furnace, and the second limiting wheel contacts the other side of the outer rail of the furnace; The limiting member has a first bearing groove, and the first bearing groove is configured to accommodate the bottom of the external furnace rail and a portion of the side surface of the external furnace rail connected to the bottom of the external furnace rail; The upper surface of the limiting portion has an arcuate groove, the extension direction of the arcuate groove is perpendicular to the extension direction of the first bearing slot, and the arcuate groove can accommodate at least part of the first limiting wheel and / or at least part of the second limiting wheel.

2. The sheet carrier loading and unloading device according to claim 1, characterized in that: The push boat assembly comprises: a clamping assembly configured to clamp the sheet carrier; The driving assembly is arranged on the carrying plate and connected to the clamping assembly, and is configured to drive the clamping assembly to move along the extension direction of the outer furnace track to apply a pushing force or pulling force to the sheet carrier along the extension direction of the outer furnace track.

3. The sheet carrier loading and unloading device according to claim 2, characterized in that: Also includes: a first boat pushing slide rail, provided on the carrying plate, wherein the extending direction of the first boat pushing slide rail is the same as the extending direction of the furnace outer track; The first boat pushing slider is slidably connected to the first boat pushing slide rail and is connected to the clamping assembly, so that the clamping assembly can move along the first boat pushing slide rail under the drive of the driving assembly.

4. The sheet carrier loading and unloading device according to claim 1, characterized in that: Also includes: a driving source, disposed on the carrying plate and configured to provide a driving force; a second boat pushing slide rail, provided on the carrying plate, wherein the extension direction of the second boat pushing slide rail is the same as the extension direction of the furnace outer track; At least one second boat pushing slider is slidably connected to the second boat pushing slide rail, and is located below the outside-furnace track and connected to the outside-furnace track. The driving source is connected to the outside-furnace track, wherein, under the drive of the driving source, the outside-furnace track drives the second boat pushing slider to move along the second boat pushing slide rail so that the outside-furnace track and the inside-furnace track are docked.

5. The sheet carrier loading and unloading device according to claim 4, characterized in that: There are multiple second boat pushing sliders; Wherein, the sheet carrier loading and unloading device further includes: a connecting plate, provided on the plurality of second boat pushing sliders and connected to the plurality of second boat pushing sliders; A support block is arranged on the connecting plate and connected to the connecting plate, and the support block has a second bearing groove, which is configured to accommodate the bottom of the outer furnace rail and a portion of the side surface of the outer furnace rail connected to the bottom of the outer furnace rail.

6. The sheet carrier loading and unloading device according to claim 1, characterized in that: Also includes: At least one sensor is disposed on the carrying plate and is configured to detect whether the sheet carrier exists on the external track of the furnace and / or detect the position of the sheet carrier.

7. The sheet carrier loading and unloading device according to claim 1, characterized in that: There are multiple external furnace rails, and the multiple external furnace rails are symmetrically arranged relative to the push boat assembly.

8. A reactor system, characterized in that: include: A reaction furnace having a reaction chamber and a furnace opening, wherein the furnace opening is located on the side of the reaction chamber, and the reaction furnace further comprises at least one furnace rail, wherein the furnace rail is arranged at the bottom of the reaction chamber; The sheet carrier loading and unloading device according to any one of claims 1 to 7 is configured to deliver the sheet carrier from the furnace opening into the reaction chamber by docking with the furnace rail.

9. A sheet carrier loading and unloading method, characterized in that: The sheet carrier loading and unloading device is applied to a reaction furnace and any one of claims 1 to 7, wherein the reaction furnace comprises a reaction chamber and a furnace opening, wherein the furnace opening is located on the side of the reaction chamber, and the reaction furnace further comprises at least one furnace rail, wherein the furnace rail is provided at the bottom of the reaction chamber; The sheet carrier loading and unloading method includes: The outer rail of the sheet carrier loading and unloading device is docked with the inner rail, and the extension direction of the outer rail is the same as the extension direction of the inner rail; The push boat assembly of the sheet carrier loading and unloading device is used to apply a thrust along the extension direction of the outer furnace track to the sheet carrier placed on the outer furnace track, so that the rollers of the sheet carrier roll relative to the outer furnace track and the inner furnace track, and the sheet carrier is pushed into the reaction chamber; or, the push boat assembly is used to apply a pulling force along the extension direction of the outer furnace track to the sheet carrier on the inner furnace track, so that the rollers of the sheet carrier roll relative to the outer furnace track and the inner furnace track, and the sheet carrier is pulled out of the reaction chamber.

Images