A repair method for electrostatic chuck metal substrate

Abstract

The invention discloses a repair method for an electrostatic chuck metal substrate, which belongs to the technical field of electrostatic chucks, and comprises: judging and classifying the cracked area of ​​the electrostatic chuck substrate, if the crack is generated on the upper and lower surfaces of the electrostatic chuck substrate, first marking the area with the crack on the surface of the electrostatic chuck substrate, drawing a first marking circle according to the maximum area of ​​the crack, wherein the first marking circle includes the crack on the entire surface; processing the area marked by the first marking circle, digging out the area of ​​the first marking circle, and the dug out part is in the shape of an inverted frustum, the size of the top surface of the inverted frustum is equal to the size of the marking circle, the bottom surface of the inverted frustum is inside the electrostatic chuck substrate, and the top surface of the inverted frustum is larger than the bottom surface of the inverted frustum; checking the remaining substrate inverted frustum after digging out the inverted frustum, until there are no cracks on the side and bottom surfaces of the substrate inverted frustum; and filling with a filler.

Description

Technical Field

[0001] The invention relates to the technical field of electrostatic chucks, and in particular to a repair method for a metal substrate of an electrostatic chuck. Background Art

[0002] Electrostatic chucks are often used in semiconductor processing equipment to support semiconductor wafers. Electrostatic chucks can use electrostatic force to adsorb substrates, thereby fixing them in the appropriate position of the processing equipment. The electrostatic chuck includes a base. If the base is damaged during the processing and manufacturing process, the electrostatic chuck will be unqualified and need to be scrapped or the base must be separated and then a good base must be used for bonding. Direct scrapping will waste manpower and material resources, and separation and bonding are cumbersome and wasteful.

[0003] In the prior art, for example, Japanese Patent Publication No. 2017-175076A discloses a method for repairing a substrate support component, which specifically includes: in step A, cutting a region including a damaged portion of an adsorption surface to form a recessed portion. The recessed portion is formed by cutting a crack and its surroundings; in step B, a small piece that fits into the recessed portion is joined to the recessed portion, but after the recessed portion is formed in step A, a small piece of a shape that fits into the recessed portion is made.

[0004] The patent with publication number CN113782479A discloses a method for repairing an electrostatic chuck base, comprising the following steps: processing the surface damaged portion of the electrostatic chuck base into a groove with a regular shape based on the surface damaged portion; measuring the size of the groove and recording the size for backup; processing and manufacturing a filling block for filling the groove according to the size of the groove, and processing the filling block to a size matching the groove; embedding the processed filling block into the groove; spraying a ceramic layer on the upper surface of the filling block; spraying the ceramic layer with atomized glue to form a bright gray-black color on the surface; and detecting various parameters of the electrostatic chuck to determine whether the repaired electrostatic chuck meets the requirements.

[0005] However, in the prior art, either glue is used for repair and then the excess part of the filler is polished, or direct splicing is used for repair. If used for too long, it is easy to become loose and fail, resulting in a large gap between the filler and the groove or even falling off. Summary of the invention

[0006] The technical problem to be solved by the present invention is to provide a repair method for a metal substrate of an electrostatic chuck to solve the problem raised in the background technology.

[0007] In order to solve the above technical problems, the technical solution of the present invention is:

[0008] A repair method for an electrostatic chuck metal substrate, the repair method comprising:

[0009] The cracked area of ​​the electrostatic chuck substrate is judged and classified. If the crack occurs on the upper and lower surfaces of the electrostatic chuck substrate, the cracked area on the surface of the electrostatic chuck substrate is first marked, and a first marking circle is drawn according to the largest area of ​​the crack, wherein the first marking circle includes the crack on the entire surface;

[0010] Processing the area marked by the first marking circle, digging out the area of ​​the first marking circle, and the dug out part is an inverted frustum, the size of the top surface of the inverted frustum is equal to the size of the marking circle, the bottom surface of the inverted frustum is inside the electrostatic chuck substrate, and the top surface of the inverted frustum is larger than the bottom surface of the inverted frustum;

[0011] Check the remaining substrate frustum after digging out the frustum, and check whether there are other cracks on the side of the substrate frustum. If there are still cracks, it is necessary to expand the dug part, and then check whether there are other cracks on the bottom surface of the substrate frustum. If there are, it is necessary to dig deeper until there are no cracks on the side and bottom surfaces of the substrate frustum;

[0012] Processing a filler, processing a first threaded hole on the bottom surface of the substrate inverted cone, processing a first filler according to the volume of the inverted cone, the first filler comprising a first filling cone and a first connecting threaded rod arranged on the bottom surface of the first filling cone, the first connecting threaded rod being cooperatively connected with the first threaded hole, the length of the first connecting threaded rod being smaller than the depth of the first threaded hole, the top surface area of ​​the first filling cone being smaller than the area of ​​the first marking circle, and the top surface central axis of the first filling cone being coincident with the central axis of the first marking circle, the side wall of the first filling cone being fitted with the side wall of the substrate inverted cone, and the bottom surface of the first filling cone being fitted with the bottom surface of the substrate inverted cone;

[0013] If the crack depth on the bottom surface of the inverted truncated cone of the substrate runs through the entire electrostatic chuck substrate, a second marking circle is drawn on the other side of the electrostatic chuck substrate, the central axis of the second marking circle coincides with the central axis of the first marking circle, the second marking circle at least encompasses the crack of the electrostatic chuck substrate on this side, material is excavated in the area marked by the second marking circle, the truncated cone is excavated, the bottom surface of the truncated cone is on the bottom surface of the electrostatic chuck substrate, and the top surface of the truncated cone is located inside the electrostatic chuck substrate, in addition to machining the first threaded hole in the portion between the top surface of the truncated cone and the bottom surface of the inverted truncated cone, a second threaded hole needs to be machined on the first connecting threaded rod, the central axis of the second threaded hole coincides with the central axis of the first threaded hole, a second filler is machined according to the shape and size of the truncated cone, the second filler includes a second filling truncated cone and a second connecting threaded rod arranged on the top surface of the second filling truncated cone, the second connecting threaded rod is matched and connected with the second threaded hole, and the length of the second connecting threaded rod is less than the depth of the second threaded hole;

[0014] Fill the first filler into the hollowed-out inverted truncated cone space, and fill the second filler into the hollowed-out truncated cone space, first screw the first connecting threaded rod into the first threaded hole to install the first filling truncated cone, and make the side wall of the first filling truncated cone contact with the side wall of the inverted truncated cone, and then screw the second connecting threaded rod into the second threaded hole to install the second filling truncated cone, and make the side wall of the second filling truncated cone contact with the side wall of the truncated cone, the top surface of the first filling truncated cone is provided with a plurality of first grooves, and the first filler is assembled by tightening the assembly tool to cooperate with the first grooves and rotating the first filler, and the bottom surface of the second filling truncated cone is provided with a plurality of second grooves, and the second filler is assembled by tightening the assembly tool to cooperate with the second grooves and rotating the second filler;

[0015] After the first filler and the second filler are filled, the top surface of the first filling truncated cone is lower than the upper surface of the electrostatic chuck substrate, the bottom surface of the first filling truncated cone is sprayed, and after spraying, the sprayed layer is polished until it is flush with the upper surface of the electrostatic chuck substrate, the bottom surface of the second filling truncated cone is higher than the bottom surface of the electrostatic chuck substrate, the bottom surface area of ​​the second filling truncated cone is sprayed, and after spraying, the sprayed layer is polished until it is flush with the bottom surface of the electrostatic chuck substrate;

[0016] If the crack appears on the side wall of the electrostatic chuck substrate, a removal block including the crack on the side wall is processed and removed, the removal block includes a first portion of the electrostatic chuck substrate with a cracked side wall and a second portion connected to the first portion, the size of the second portion at the connection with the first portion is larger than the size of the first portion at the connection with the second portion, the second portion is located in the electrostatic chuck substrate, a filling block is processed, the filling block includes an arc-shaped side wall, the filling block fills the area where the removal block is dug out, the second frustum is processed and dug out, a portion of the second frustum is located on the second portion, and the remaining portion of the second frustum is located on the electrostatic chuck substrate, and a third screw is processed on the bottom surface of the second frustum The third threaded hole is located on the electrostatic chuck substrate, and a third filler is processed. The third filler includes a third filling cone and a third connecting threaded rod arranged on the bottom surface of the third filling cone. The third connecting threaded rod cooperates with the third threaded hole. The length of the third connecting threaded rod is less than the depth of the third threaded hole. The top surface of the third filling cone is provided with a third groove. The third filler is screwed in by tightening the assembly tool to complete the installation. After the installation is completed, the top surface of the third filling cone is lower than the surface of the electrostatic chuck substrate. Spraying is performed on the top surface area of ​​the third filling cone. After spraying, it is polished to be flush with the surface of the electrostatic chuck substrate. Similarly, the side wall is also polished to be aligned with the side wall of the electrostatic chuck substrate.

[0017] Preferably, the material of the first filler, the second filler, the third filler, and the filling block is the same as the material of the electrostatic chuck substrate.

[0018] Preferably, the first groove, the second groove and the third groove are all rectangular grooves.

[0019] Preferably, the tightening assembly tool includes a tightening head that cooperates with the first groove, the second groove, and the third groove.

[0020] The above technical solution has the following beneficial effects:

[0021] With this technical solution, a first filler, a second filler, and a third filler are provided, which respectively include a first filling cone, a second filling cone, and a third filling cone, and are filled by threaded connection. The side wall is fitted in the shape of a cone, so that the filler and the electrostatic chuck substrate fit more closely and are not easy to loosen and fail after long-term use. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic cross-sectional structure diagram of the electrostatic chuck substrate after the rupture area is dug out in Example 1;

[0023] Figure 2This is a schematic cross-sectional view of the connection between the first filler and the electrostatic chuck substrate in Example 1;

[0024] Figure 3 It is a schematic cross-sectional structure diagram of the electrostatic chuck substrate after the rupture area is dug out in Example 2;

[0025] Figure 4 This is a schematic cross-sectional view of the connection between the first filler, the second filler and the electrostatic chuck substrate in Example 2;

[0026] Figure 5 It is a schematic cross-sectional structure diagram of the electrostatic chuck substrate after the rupture area is dug out in Example 3;

[0027] Figure 6 This is a schematic cross-sectional view of the connection between the filling block, the third filler and the electrostatic chuck in Example 3. DETAILED DESCRIPTION

[0028] The following is further described in conjunction with the specific embodiments of the present invention. It should be noted that the description of these embodiments is used to help understand the present invention, but does not constitute a limitation of the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0029] Example 1

[0030] A method for repairing a metal substrate of an electrostatic chuck, comprising:

[0031] refer to Figure 1 and Figure 2 , judging and classifying the cracked area of ​​the electrostatic chuck substrate 1. If the crack occurs on the upper and lower surfaces of the electrostatic chuck substrate 1, first mark the cracked area on the surface of the electrostatic chuck substrate 1, and draw a first marking circle according to the largest area of ​​the crack, and the first marking circle includes the cracks on the entire surface;

[0032] The area marked by the first marking circle is processed, and the area of ​​the first marking circle is dug out, and the dug out part is in the shape of an inverted frustum, the size of the top surface of the inverted frustum is equal to the size of the marking circle, the bottom surface of the inverted frustum is inside the electrostatic chuck substrate 1, and the top surface of the inverted frustum is larger than the bottom surface of the inverted frustum;

[0033] Check the remaining substrate rounded platform 2 after digging out the rounded platform, and check whether there are other cracks on the side of the substrate rounded platform 2. If there are still cracks, it is necessary to expand the dug part, and then check whether there are other cracks on the bottom surface of the substrate rounded platform 2. If there are, it is necessary to dig deeper until there are no cracks on the side and bottom surfaces of the substrate rounded platform 2;

[0034] Processing fillers, processing a first threaded hole 3 on the bottom surface of the substrate inverted cone 2, processing a first filler according to the volume of the inverted cone, the first filler includes a first filling cone 4 and a first connecting threaded rod 5 arranged on the bottom surface of the first filling cone 4, the first connecting threaded rod 5 is matched and connected with the first threaded hole 3, the length of the first connecting threaded rod 5 is less than the depth of the first threaded hole 3, the top surface area of ​​the first filling cone 4 is less than the area of ​​the first marking circle, after the first filling cone 4 is filled and installed, a spray coating 6 is sprayed on its surface, and the central axis of the top surface of the first filling cone 4 coincides with the central axis of the first marking circle, the side wall of the first filling cone 4 fits with the side wall of the substrate inverted cone 2, and the bottom surface of the first filling cone 4 fits with the bottom surface of the substrate inverted cone 2;

[0035] For defects such as cracks on the electrostatic chuck substrate 1, the defective part is first dug out, and then a first filler is prepared. The side wall of the filler is an inverted first filling cone 4, and a first connecting threaded rod 5 is arranged at the bottom. The electrostatic chuck substrate 1 is provided with a first threaded hole 3 that matches the first connecting threaded rod 5. During assembly, the first filling cone 4 is rotated to allow the first connecting threaded rod 5 to enter the first threaded hole 3. After the first connecting threaded rod 5 is screwed to the bottom, the side wall of the first filling cone 4 is just in contact with the remaining side wall of the dug out part of the electrostatic chuck substrate 1. Under the dual restrictions of fitting and threaded connection, a stable connection and a tight fit can be ensured. The tight fit can ensure that the performance of the precision chuck is not affected, and the stable connection can ensure the service life.

[0036] Example 2

[0037] refer to Figure 1 to Figure 4 If the crack depth on the bottom surface of the substrate inverted truncated cone 2 runs through the entire electrostatic chuck substrate 1, a second marking circle is drawn on the other side of the electrostatic chuck substrate 1, and the central axis of the second marking circle coincides with the central axis of the first marking circle. The second marking circle at least includes the crack of the electrostatic chuck substrate 1 on this side, and material is excavated in the area marked by the second marking circle to remove the truncated cone 7. The bottom surface of the truncated cone 7 is on the bottom surface of the electrostatic chuck substrate 1, and the top surface of the truncated cone 7 is located inside the electrostatic chuck substrate 1. In addition to processing the first threaded hole 3 in the portion between the top surface of the truncated cone 7 and the bottom surface of the inverted truncated cone, a second threaded hole needs to be processed on the first connecting threaded rod 5, and the central axis of the second threaded hole coincides with the central axis of the first threaded hole 3. A second filler is processed according to the shape and size of the truncated cone 7. The second filler includes a second filling truncated cone 8 and a second connecting threaded rod 9 arranged on the top surface of the second filling truncated cone 8. The second connecting threaded rod 9 is matched and connected with the second threaded hole, and the length of the second connecting threaded rod 9 is less than the depth of the second threaded hole.

[0038] During installation, the first filling cone 4 is filled into the inverted cone by screwing the first connecting threaded rod 5 into the first threaded hole 3, and the side wall of the first filling cone 4 fits with the side wall of the inverted cone, and the bottom of the first filling cone 4 fits with the bottom of the inverted cone. The threaded connection and the fitting of the side wall can maintain the stability of the connection. The fitting of the side wall and the bottom can prevent the threaded connection from loosening, so that the connection remains stable and reliable, and the problem of cracks is solved, which can be removed and then repaired. Similarly, the first filling cone 4 can fit tightly with the cone, ensuring that the second filling cone 8 is more stably and firmly installed in the cone. At the same time, the second connecting threaded rod 9 is screwed into the second threaded hole, so that the first filling cone 4 and the second filling cone 8 are connected together, making the installation of the two more firm and reliable;

[0039] Fill the first filler into the hollowed-out inverted truncated cone space, and fill the second filler into the hollowed-out truncated cone space. First, screw the first connecting threaded rod 5 into the first threaded hole 3 to install the first filling truncated cone 4, so that the side wall of the first filling truncated cone 4 contacts the side wall of the inverted truncated cone, and then screw the second connecting threaded rod 9 into the second threaded hole to install the second filling truncated cone 8, so that the side wall of the second filling truncated cone 8 contacts the side wall of the truncated cone. The top surface of the first filling truncated cone 4 is provided with a plurality of first grooves, and the first filler is assembled by tightening the assembly tool and rotating the first grooves. The bottom surface of the second filling truncated cone 8 is provided with a plurality of second grooves, and the second filler is assembled by tightening the assembly tool and rotating the second grooves.

[0040] After the first filler and the second filler are filled, the top surface of the first filling truncated cone 4 is lower than the upper surface of the electrostatic chuck substrate 1, the bottom surface of the first filling truncated cone 4 is sprayed to form a spray layer 6, and the spray layer is polished after spraying to be flush with the upper surface of the electrostatic chuck substrate 1, the bottom surface of the second filling truncated cone 8 is higher than the bottom surface of the electrostatic chuck substrate 1, the bottom surface area of ​​the second filling truncated cone 8 is sprayed to form a second spray layer 17, and the spray layer is polished after spraying to be flush with the bottom surface of the electrostatic chuck substrate 1;

[0041] Example 3

[0042] refer to Figure 5-6If the crack appears on the side wall of the electrostatic chuck substrate 1, a removal block including the crack on the side wall is processed and removed, the removal block includes a first portion 12 of the electrostatic chuck substrate 1 having a cracked side wall and a second portion 11 connected to the first portion 12, the size of the second portion 11 at the connection with the first portion 12 is larger than the size of the first portion 12 at the connection with the second portion 11, the second portion 11 is located in the electrostatic chuck substrate 1, a filling block 14 is processed, the filling block 14 includes an arc-shaped side wall, the filling block 14 fills the area where the removal block is dug out, the second rounded table 10 is processed and dug out, a part of the second rounded table 10 is located on the second portion 11, and the remaining part of the second rounded table 10 is located on the electrostatic chuck substrate 1, and a third threaded hole 15 is processed on the bottom surface of the second rounded table 10 , the third threaded hole 15 is located on the electrostatic chuck substrate 1, and a third filler is processed. The third filler includes a third filling cone 13 and a third connecting threaded rod 16 arranged on the bottom surface of the third filling cone 13. The third connecting threaded rod 16 cooperates with the third threaded hole 15. The length of the third connecting threaded rod 16 is less than the depth of the third threaded hole 15. The top surface of the third filling cone 13 is provided with a third groove. The third filler is screwed in by tightening the assembly tool to complete the installation. After the installation is completed, the top surface of the third filling cone 13 is lower than the surface of the electrostatic chuck substrate 1. The top surface area of ​​the third filling cone 13 is sprayed. The sprayed material can be ceramic. After spraying, it is polished to be flush with the surface of the electrostatic chuck substrate 1. Similarly, the side wall is also polished to be aligned with the side wall of the electrostatic chuck substrate 1;

[0043] The first part 12 dug out is used to remove the cracked area on the side wall of the substrate, and eliminate the cracks on the side wall of the substrate. The size of the second part 11 at the connection with the first part 12 is larger than the size of the first part 12 at the connection with the second part 11. On the one hand, it is convenient to position the filler when installing it. On the other hand, after the filler is installed, through this stepped design, after cooperating with the third filling truncated cone 13, the third filling truncated cone 13 can give it a force away from the center of the substrate, so that the filler can be better and more stably installed in the dug out area, ensuring the stability of the connection. The third filling is installed and fixed by connecting the third connecting threaded rod 16 with the third threaded hole 15;

[0044] The materials of the first filler, the second filler, the third filler, and the filling block 14 are the same as the material of the electrostatic chuck substrate 1;

[0045] The first groove, the second groove and the third groove are all rectangular grooves, which are convenient for the tightening head to enter and drive the rotation of the first filling truncated cone 4, the second filling truncated cone 8 and the third filling truncated cone 13, and the first filling truncated cone 4, the second filling truncated cone 8 and the third filling truncated cone 13 are threadedly connected and installed at corresponding positions;

[0046] The tightening assembly tool includes a tightening head matched with the first groove, the second groove and the third groove, and also includes a handle, and the tightening head and the handle are connected by a connecting rod for easy operation;

[0047] By setting the first filler, the second filler and the third filler, which respectively include the first filling cone 4, the second filling cone 8 and the third filling cone 13, and filling them by threaded connection, the side wall is fitted in the shape of a cone, so that the filler and the electrostatic chuck substrate 1 are more closely fitted and are not easy to loosen and fail after long-term use.

[0048] The above is a detailed description of the embodiments of the present invention, but the present invention is not limited to the described embodiments. For those skilled in the art, various changes, modifications, substitutions and variations of these embodiments are made without departing from the principles and spirit of the present invention, and still fall within the scope of protection of the present invention.

Claims

1. A method for repairing a metal substrate of an electrostatic chuck, characterized in that: The repair method comprises: The cracked area of ​​the electrostatic chuck substrate is judged and classified. If the crack occurs on the upper and lower surfaces of the electrostatic chuck substrate, the cracked area on the surface of the electrostatic chuck substrate is first marked, and a first marking circle is drawn according to the largest area of ​​the crack, wherein the first marking circle includes the crack on the entire surface; Processing the area marked by the first marking circle, digging out the area of ​​the first marking circle, and the dug out part is an inverted frustum, the size of the top surface of the inverted frustum is equal to the size of the marking circle, the bottom surface of the inverted frustum is inside the electrostatic chuck substrate, and the top surface of the inverted frustum is larger than the bottom surface of the inverted frustum; Check the remaining substrate frustum after digging out the frustum, and check whether there are other cracks on the side of the substrate frustum. If there are still cracks, it is necessary to expand the dug part, and then check whether there are other cracks on the bottom surface of the substrate frustum. If there are, it is necessary to dig deeper until there are no cracks on the side and bottom surfaces of the substrate frustum; Processing a filler, processing a first threaded hole on the bottom surface of the substrate inverted cone, processing a first filler according to the volume of the inverted cone, the first filler comprising a first filling cone and a first connecting threaded rod arranged on the bottom surface of the first filling cone, the first connecting threaded rod being cooperatively connected with the first threaded hole, the length of the first connecting threaded rod being smaller than the depth of the first threaded hole, the top surface area of ​​the first filling cone being smaller than the area of ​​the first marking circle, and the top surface central axis of the first filling cone being coincident with the central axis of the first marking circle, the side wall of the first filling cone being fitted with the side wall of the substrate inverted cone, and the bottom surface of the first filling cone being fitted with the bottom surface of the substrate inverted cone; If the crack depth on the bottom surface of the inverted truncated cone of the substrate runs through the entire electrostatic chuck substrate, a second marking circle is drawn on the other side of the electrostatic chuck substrate, the central axis of the second marking circle coincides with the central axis of the first marking circle, the second marking circle at least encompasses the crack of the electrostatic chuck substrate on this side, material is excavated in the area marked by the second marking circle, the truncated cone is excavated, the bottom surface of the truncated cone is on the bottom surface of the electrostatic chuck substrate, and the top surface of the truncated cone is located inside the electrostatic chuck substrate, in addition to machining the first threaded hole in the portion between the top surface of the truncated cone and the bottom surface of the inverted truncated cone, a second threaded hole needs to be machined on the first connecting threaded rod, the central axis of the second threaded hole coincides with the central axis of the first threaded hole, a second filler is machined according to the shape and size of the truncated cone, the second filler includes a second filling truncated cone and a second connecting threaded rod arranged on the top surface of the second filling truncated cone, the second connecting threaded rod is matched and connected with the second threaded hole, and the length of the second connecting threaded rod is less than the depth of the second threaded hole; Fill the first filler into the hollowed-out inverted truncated cone space, and fill the second filler into the hollowed-out truncated cone space, first screw the first connecting threaded rod into the first threaded hole to install the first filling truncated cone, and make the side wall of the first filling truncated cone contact with the side wall of the inverted truncated cone, and then screw the second connecting threaded rod into the second threaded hole to install the second filling truncated cone, and make the side wall of the second filling truncated cone contact with the side wall of the truncated cone, the top surface of the first filling truncated cone is provided with a plurality of first grooves, and the first filler is assembled by tightening the assembly tool to cooperate with the first grooves and rotating the first filler, and the bottom surface of the second filling truncated cone is provided with a plurality of second grooves, and the second filler is assembled by tightening the assembly tool to cooperate with the second grooves and rotating the second filler; After the first filler and the second filler are filled, the top surface of the first filling truncated cone is lower than the upper surface of the electrostatic chuck substrate, the bottom surface of the first filling truncated cone is sprayed, and after spraying, the sprayed layer is polished until it is flush with the upper surface of the electrostatic chuck substrate, the bottom surface of the second filling truncated cone is higher than the bottom surface of the electrostatic chuck substrate, the bottom surface area of ​​the second filling truncated cone is sprayed, and after spraying, the sprayed layer is polished until it is flush with the bottom surface of the electrostatic chuck substrate; If the crack appears on the side wall of the electrostatic chuck substrate, a removal block including the crack on the side wall is processed and removed, the removal block includes a first portion of the electrostatic chuck substrate with a cracked side wall and a second portion connected to the first portion, the size of the second portion at the connection with the first portion is larger than the size of the first portion at the connection with the second portion, the second portion is located in the electrostatic chuck substrate, a filling block is processed, the filling block includes an arc-shaped side wall, the filling block fills the area where the removal block is dug out, the second frustum is processed and dug out, a portion of the second frustum is located on the second portion, and the remaining portion of the second frustum is located on the electrostatic chuck substrate, and a third screw is processed on the bottom surface of the second frustum The third threaded hole is located on the electrostatic chuck substrate, and a third filler is processed. The third filler includes a third filling cone and a third connecting threaded rod arranged on the bottom surface of the third filling cone. The third connecting threaded rod cooperates with the third threaded hole. The length of the third connecting threaded rod is less than the depth of the third threaded hole. The top surface of the third filling cone is provided with a third groove. The third filler is screwed in by tightening the assembly tool to complete the installation. After the installation is completed, the top surface of the third filling cone is lower than the surface of the electrostatic chuck substrate. Spraying is performed on the top surface area of ​​the third filling cone. After spraying, it is polished to be flush with the surface of the electrostatic chuck substrate. Similarly, the side wall is also polished to be aligned with the side wall of the electrostatic chuck substrate.

2. A method for repairing a metal substrate of an electrostatic chuck according to claim 1, characterized in that: The material of the first filler, the second filler, the third filler, and the filling block is the same as that of the electrostatic chuck substrate.

3. A method for repairing a metal substrate of an electrostatic chuck according to claim 1, characterized in that: The first groove, the second groove and the third groove are all rectangular grooves.

4. A method for repairing a metal substrate of an electrostatic chuck according to claim 3, characterized in that: The tightening assembly tool includes a tightening head that cooperates with the first groove, the second groove, and the third groove.

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