A conveying device and vacuum coating production line

Abstract

The present invention discloses a conveying device and a vacuum coating production line. The conveying device comprises a first base and a movable conveyor for conveying a workpiece turntable. The movable conveyor is arranged on the first base in a movable and position-adjustable manner. The movable conveyor is provided with a turntable driving assembly for driving the workpiece turntable to rotate. The vacuum coating production line comprises a vacuum processing device and an external conveying line for conveying the workpiece turntable. An internal conveying device for conveying the workpiece turntable is provided in the vacuum processing device. The external conveying line is connected to the internal conveying device. The external conveying line is provided with more than one conveying device. The present invention has the advantages of being able to adjust the loading and unloading position, reducing the production and manufacturing cost and assembly difficulty, and improving the flexibility and simplicity of use.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating, and in particular to a conveying device and a vacuum coating production line. Background Art

[0002] The vacuum coating production line is mainly composed of vacuum processing equipment and external conveying lines. The vacuum processing equipment is provided with an internal conveying device for conveying the workpiece rotating rack. The external conveying line is connected to the internal conveying device. The external conveying line mainly includes functional devices such as a loading device and an unloading device, and an external conveying device connected between each functional device and the internal conveying device to convey the workpiece rotating rack. During operation, after the workpiece rotating rack is loaded with the workpiece to be coated at the loading device, it is conveyed to the internal conveying device. After the coating is completed in the vacuum processing equipment, it is output from the internal conveying device to the external conveying device and then conveyed by the external conveying device to the functional devices such as the unloading device for unloading and other operations. After that, the workpiece rotating rack that has completed unloading is conveyed to the loading device, thereby realizing the recycling of the workpiece rotating rack and automatic continuous production. Among them, when the loading device and the unloading device perform loading and unloading operations on the workpiece rotating rack, the workpiece rotating rack is lifted by the lifting assembly, and then the workpiece rotating rack is driven to rotate by the rotary drive mechanism, so that the workpieces around the workpiece rotating rack are unloaded one by one by the manipulator and the workpieces are loaded one by one around the workpiece rotating rack.

[0003] In the existing vacuum coating production line, functional devices such as the loading device and the unloading device are fixedly arranged, and the external conveying device connecting the functional devices and the vacuum processing equipment to convey the workpiece turntable also has only a single conveying function. When the setting position of the functional device needs to be adjusted due to site changes or other reasons, it is necessary to manually adjust the position of the functional device according to the actual situation, and then customize the external conveying devices of different lengths and forms for connection. There are disadvantages of high production cost, difficult assembly, and inconvenient adjustment. Moreover, after the entire production line is assembled, the position of functional devices such as the loading device and the unloading device cannot be adjusted without adding, reducing or replacing equipment, that is, the position of the unloading, loading and other operating stations cannot be adjusted, and its flexibility of use is not high. Summary of the invention

[0004] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a conveying device and a vacuum coating production line which can adjust the loading and unloading positions, reduce the production cost and assembly difficulty, and improve the flexibility and simplicity of use.

[0005] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0006] A conveying device for conveying a workpiece turntable used in a vacuum coating device comprises a first base and a movable conveyor for conveying the workpiece turntable. The movable conveyor is arranged on the first base in a movable and position-adjustable manner. The movable conveyor is provided with a turntable drive assembly for driving the workpiece turntable to rotate.

[0007] As a further improvement of the above conveying device:

[0008] The movable conveyor includes a first movable frame movably arranged on the first base, the first movable frame is provided with a first conveying component for conveying a workpiece turntable, the movable conveyor also includes a first mobile driving component for driving the first movable frame to move, and the turntable driving component is installed on the first movable frame.

[0009] The first mobile driving assembly includes a first gear mounted on the first mobile frame, a first rotating driving member driving the first gear to rotate, and a first rack fixedly arranged relative to the first base, and the first gear is meshed with the first rack.

[0010] A linear guide rail is disposed on the first base, and the first moving frame is slidably disposed on the linear guide rail in a linear reciprocating motion through a slider matched with the linear guide rail.

[0011] The first conveying assembly includes a plurality of first supporting conveying rollers and a first driving mechanism for driving the plurality of first supporting conveying rollers to rotate.

[0012] The turntable driving assembly includes a rotating table, a rotating driving mechanism and a lifting driving mechanism installed on the first movable frame. The lifting driving mechanism is connected to the rotating table and can drive the rotating table to move upward to lift the workpiece turntable to be separated from the first conveying assembly and drive the rotating table to move downward to place the lifted workpiece turntable on the first conveying assembly. The rotating driving mechanism is used to drive the lifted workpiece turntable to rotate.

[0013] The rotary drive mechanism is located above the first conveying assembly and docks with the workpiece rotating rack when the workpiece rotating rack is lifted to drive the workpiece rotating rack to rotate.

[0014] A vacuum coating production line includes a vacuum processing device and an external conveying line for conveying a workpiece turntable. The vacuum processing device is provided with an internal conveying device for conveying the workpiece turntable. The external conveying line is connected to the internal conveying device. The external conveying line is provided with more than one of the above-mentioned conveying devices.

[0015] As a further improvement of the above vacuum coating production line:

[0016] The external conveying line further comprises one or more independently operated fixed conveyors for conveying the workpiece turntable, wherein the fixed conveyors are connected to at least one movable conveyor.

[0017] The fixed conveyor comprises a frame, a plurality of second supporting conveying rollers rotatably mounted on the frame, and a second driving mechanism driving the plurality of second supporting conveying rollers to rotate.

[0018] The external conveyor line is provided with more than two movable conveyors and more than one fixed conveyor, and the more than two movable conveyors and more than one fixed conveyor are connected to form a linear conveyor line for conveying the workpiece turntable along a straight line. End conveying devices for conveying the workpiece turntable are provided between one end of the linear conveyor line and the input end of the internal conveying device, and between the other end of the linear conveyor line and the output end of the internal conveying device.

[0019] The linear conveying line and the vacuum processing equipment are arranged side by side and at intervals. The linear conveying line, the vacuum processing equipment and the end conveying devices at both ends of the linear conveying line are connected to form a U-shaped layout structure.

[0020] The end conveying device includes a second base and a second mobile frame movably arranged on the second base, the second mobile frame is provided with a second conveying assembly for conveying a workpiece turntable, and the end conveying device also includes a second mobile drive assembly for driving the second mobile frame to move so that the second conveying assembly can dock with the linear conveyor line.

[0021] The second mobile driving assembly includes a second gear mounted on the second mobile frame, a second rotating driving member driving the second gear to rotate, and a second rack fixedly arranged relative to the second base, and the second gear is meshed with the second rack.

[0022] The second conveying assembly includes a plurality of third supporting conveying rollers and a third driving mechanism for driving the plurality of third supporting conveying rollers to rotate.

[0023] One end of the second conveying assembly is used as an entry and exit end for docking with a linear conveying line and a conveying device in a vacuum processing equipment to receive and output a workpiece turntable, and the other end of the second conveying assembly is provided with a blocking positioning member for blocking and positioning the workpiece turntable.

[0024] Compared with the prior art, the advantages of the present invention are:

[0025] The movable conveyor of the conveying device of the present invention is arranged on the first base in a movable and adjustable position. The turntable driving assembly arranged on the movable conveyor can drive the workpiece turntable to rotate, so as to facilitate the rotation of the workpiece turntable for loading and unloading and other operations. Since the position of the movable conveyor can be moved and adjusted, the loading and unloading position and the position for other operations on the workpiece turntable can be flexibly adjusted according to actual needs. When the setting position of the functional device needs to be adjusted due to site changes and other reasons, there is no need to manually adjust the position of the functional device, and there is no need to replace it with a different external conveying device. The adjustment is simple, which can reduce the production cost and assembly difficulty. Even after the conveying device is assembled, the loading and unloading position can be adjusted, which can improve versatility and flexibility of use.

[0026] The vacuum coating production line of the present invention adopts the conveying device of the present invention and thus also has the advantages of the conveying device. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the three-dimensional structure of the conveying device.

[0028] Figure 2 It is a side structural schematic diagram of the conveying device.

[0029] Figure 3 It is a schematic diagram of the main structure of the conveying device.

[0030] Figure 4 This is a schematic diagram of the structure of the vacuum coating production line from a top view.

[0031] Figure 5 It is a schematic diagram of the three-dimensional structure of a fixed conveyor.

[0032] Figure 6 It is a schematic diagram of the three-dimensional structure of the end conveying device.

[0033] Figure 7 It is a schematic diagram of the side structure of the end conveying device.

[0034] Legend:

[0035] 1. First base; 11. Linear guide; 2. Movable conveyor; 21. First mobile frame; 22. First conveying assembly; 221. First supporting conveying roller; 222. First driving mechanism; 23. First gear; 24. First rotating driving member; 25. First rack; 3. Turntable driving assembly; 31. Turntable; 32. Rotating driving mechanism; 33. Lifting driving mechanism; 4. Vacuum processing equipment; 5. External conveying line; 6. Fixed conveyor; 61. Frame; 62. Second supporting conveying roller; 63. Second driving mechanism; 7. End conveying device; 71. Second base; 72. Second mobile frame; 73. Second conveying assembly; 731. Third supporting conveying roller; 732. Third driving mechanism; 74. Second gear; 75. Second rotating driving member; 76. Second rack; 77. Blocking positioning member; 100. Workpiece turntable. DETAILED DESCRIPTION

[0036] The present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0037] Embodiment 1:

[0038] like Figures 1 to 3 As shown, the conveying device of this embodiment is used to convey the workpiece turntable 100 used in the vacuum coating equipment. The conveying device includes a first base 1 and a movable conveyor 2 for conveying the workpiece turntable 100. The movable conveyor 2 is arranged on the first base 1 in a movable and position-adjustable manner. The movable conveyor 2 is provided with a turntable driving assembly 3 for driving the workpiece turntable 100 to rotate. The movable conveyor 2 of the conveying device is arranged on the first base 1 in a movable and adjustable position. The turntable driving component 3 arranged on the movable conveyor 2 can drive the workpiece turntable 100 to rotate, so as to facilitate the rotation of the workpiece turntable 100 for loading and unloading operations. Since the position of the movable conveyor 2 can be moved and adjusted, the loading and unloading position and the position for other operations on the workpiece turntable 100 can be flexibly adjusted according to actual needs. When the setting position of the functional device needs to be adjusted due to site changes, etc., there is no need to manually adjust the position of the functional device, and there is no need to replace it with a different external conveying device. The adjustment is simple, which can reduce the production cost and assembly difficulty. Even after the conveying device is assembled, the loading and unloading position can be adjusted, which can improve versatility and flexibility of use.

[0039] In this embodiment, the movable conveyor 2 includes a first movable frame 21 movably arranged on the first base 1, and a first conveying assembly 22 for conveying the workpiece rotary frame 100 is provided on the first movable frame 21. The movable conveyor 2 also includes a first mobile driving assembly for driving the first movable frame 21 to move, and the rotary frame driving assembly 3 is installed on the first movable frame 21. The first conveying assembly 22 can convey the workpiece rotary frame 100, and can dock with other conveying devices in the vacuum coating production line to receive the workpiece rotary frame 100 or send out the workpiece rotary frame 100. The first mobile driving assembly drives the first movable frame 21 to move, and the first conveying assembly 22 and the rotary frame driving assembly 3 move together with the first movable frame 21, so that the position of the workpiece rotary frame 100 can be adjusted within the moving range of the first movable frame 21, and when the workpiece rotary frame 100 is adjusted to any position, the rotary frame driving assembly 3 can be used to drive the workpiece rotary frame 100 to rotate, so as to cooperate with operations such as loading and unloading. At the same time, the first moving frame 21 moves with the first conveying assembly 22, and the first conveying assembly 22 can dock with other conveying devices in the vacuum coating production line to receive and deliver the workpiece rotating frame 100. The movable conveyor 2 has the advantages of simple and compact structure, simple control, stable and reliable operation.

[0040] In this embodiment, the first mobile drive assembly includes a first gear 23 installed on the first mobile frame 21, a first rotating drive member 24 driving the first gear 23 to rotate, and a first rack 25 fixedly arranged relative to the first base 1, and the first gear 23 is meshed with the first rack 25. The first rotating drive member 24 drives the first gear 23 to rotate, and through the cooperation between the first gear 23 and the first rack 25, the first mobile frame 21 can be driven to move accordingly. The structure of the first mobile drive assembly is simple and compact, low in cost, and easy to control. The above-mentioned first rotating drive member 24 adopts a motor. In other embodiments, the first mobile drive assembly can also adopt other existing forms of driving mechanisms, as long as it can achieve driving the first mobile frame 21 to move.

[0041] In this embodiment, a linear guide rail 11 is provided on the first base 1, and the first movable frame 21 is slidably arranged on the linear guide rail 11 in a linear reciprocating motion through a slider that cooperates with the linear guide rail 11. It has the advantages of simple structure, low cost, and accurate and reliable motion. In other embodiments, the first movable frame 21 can also be movably arranged on the first base 1 by using other existing mechanisms.

[0042] In this embodiment, the first conveying assembly 22 includes a plurality of first supporting conveying rollers 221 and a first driving mechanism 222 for driving the plurality of first supporting conveying rollers 221 to rotate. The plurality of first supporting conveying rollers 221 can support the workpiece rotating frame 100, and when the first driving mechanism 222 drives and rotates, the workpiece rotating frame 100 is moved, thereby realizing the conveying of the workpiece rotating frame 100. The above-mentioned first driving mechanism 222 adopts a combination of a motor and a sprocket mechanism, and the motor drives all the first supporting conveying rollers 221 to rotate synchronously through the sprocket mechanism. In other embodiments, the first driving mechanism 222 can also adopt other existing structural forms, as long as it can realize the synchronous rotation of all the first supporting conveying rollers 221. Preferably, the plurality of first supporting conveying rollers 221 are divided into two rows of wheel groups, each row of wheel groups includes two or more first supporting conveying rollers 221 arranged in sequence along the conveying direction, and the two rows of wheel groups are arranged at intervals in a direction perpendicular to the conveying direction, so as to facilitate the setting of the rotating frame driving assembly 3.

[0043] In this embodiment, the turret drive assembly 3 includes a rotating table 31, a rotating drive mechanism 32, and a lifting drive mechanism 33 installed on the first mobile frame 21. The lifting drive mechanism 33 is connected to the rotating table 31 and can drive the rotating table 31 to move upward to lift the workpiece turret 100 to be separated from the first conveying assembly 22 and drive the rotating table 31 to move downward to place the lifted workpiece turret 100 on the first conveying assembly 22. The rotating drive mechanism 32 is used to drive the lifted workpiece turret 100 to rotate. When working, the lifting drive mechanism 33 is first used to lift the workpiece turret 100 to be separated from the first conveying assembly 22, so that the workpiece turret 100 is docked with the rotating drive mechanism 32, and then the lifted workpiece turret 100 is driven to rotate by the rotating drive mechanism 32, so as to avoid the workpiece turret 100 being carried on the first conveying assembly 22 and affecting its rotation. The turret drive assembly 3 has a simple structure, stable and reliable operation, and is easy to control. The lifting drive mechanism 33 comprises a lifting seat and a telescopic cylinder for driving the lifting seat to move up and down. The rotating platform 31 is rotatably mounted on the lifting seat.

[0044] In the present embodiment, the rotary drive mechanism 32 is located above the first conveying assembly 22 and docks with the workpiece rotating frame 100 when the workpiece rotating frame 100 is lifted to drive the workpiece rotating frame 100 to rotate. The rotary drive mechanism 32 is located above the first conveying assembly 22, and can make full use of the space above the first conveying assembly 22, avoid occupying the space below the first conveying assembly 22, and provide space for installing other devices below the first conveying assembly 22. In other embodiments, the rotary drive mechanism 32 can also be integrated on the lifting drive mechanism 33. The rotary drive mechanism 32 of the present embodiment includes a motor and a drive disk connected to the output shaft of the motor, which is disengaged from the drive disk when the workpiece rotating frame 100 is lowered, and docked with the drive disk when the workpiece rotating frame 100 is lifted to be driven to rotate.

[0045] Embodiment 2:

[0046] like Figure 4 As shown, the vacuum coating production line of this embodiment includes a vacuum processing device 4 and an external conveying line 5 for conveying a workpiece rotating rack 100. The vacuum processing device 4 is provided with an internal conveying device for conveying the workpiece rotating rack 100. The external conveying line 5 is connected to the internal conveying device. The external conveying line 5 is provided with one or more conveying devices of Embodiment 1. Since the vacuum coating production line adopts the conveying device of Embodiment 1, it also has the advantages of the conveying device.

[0047] In this embodiment, the external conveyor line 5 also includes more than one independently operated fixed conveyor 6 for conveying the workpiece turntable 100, and the fixed conveyor 6 is connected to at least one movable conveyor 2. The independently operated fixed conveyor 6 plays a buffering role. When the workpiece turntable 100 on the movable conveyor 2 is loading and unloading, the workpiece turntable 100 conveyed from the front end can be stored and then transported to the movable conveyor 2 as needed, or the workpiece turntable 100 sent by the movable conveyor 2 can be stored and then transported to the next process as needed, which can meet the needs of different production rhythms of the entire production line, as well as meet and coordinate the different processing times of different processing equipment.

[0048] In this embodiment, Figure 5 As shown, the fixed conveyor 6 includes a frame 61, a plurality of second supporting conveying rollers 62 rotatably mounted on the frame 61, and a second driving mechanism 63 driving the plurality of second supporting conveying rollers 62 to rotate. The plurality of second supporting conveying rollers 62 can support the workpiece rotating frame 100, and when the second driving mechanism 63 drives the rotation, the workpiece rotating frame 100 is moved, thereby realizing the conveying of the workpiece rotating frame 100. The above-mentioned second driving mechanism 63 adopts a combination of a motor and a sprocket mechanism, and the motor drives all the second supporting conveying rollers 62 to rotate synchronously through the sprocket mechanism. In other embodiments, the second driving mechanism 63 can also adopt other existing structural forms, as long as it can realize the driving of all the second supporting conveying rollers 62 to rotate synchronously. Preferably, the plurality of second supporting conveying rollers 62 are divided into two rows of wheel groups, each row of wheel groups includes more than two second supporting conveying rollers 62 arranged in sequence along the conveying direction, and the two rows of wheel groups are arranged at intervals in a direction perpendicular to the conveying direction.

[0049] In this embodiment, the external conveyor line 5 is provided with more than two movable conveyors 2 and more than one fixed conveyor 6, and the two or more movable conveyors 2 and more than one fixed conveyor 6 are connected to form a linear conveyor line for conveying the workpiece rotating rack 100 along a straight line, and an end conveyor 7 for conveying the workpiece rotating rack 100 is provided between one end of the linear conveyor line and the input end of the internal conveying device, and between the other end of the linear conveyor line and the output end of the internal conveying device. The movable conveyor 2, the fixed conveyor 6 and the end conveyor 7 are all independent devices, which can be designed and manufactured in a modular manner, and then combined according to needs to form a vacuum coating production line, which is highly flexible.

[0050] In this embodiment, the linear conveyor line and the vacuum processing equipment 4 are arranged side by side and at intervals, and the linear conveyor line, the vacuum processing equipment 4 and the end conveying devices 7 at both ends of the linear conveyor line are connected to form a square-shaped layout structure. This square-shaped layout structure has the advantages of compact structure and small space occupation. And it is composed of the linear conveyor line, the vacuum processing equipment 4 and the end conveying device 7, which is convenient for manufacturing and assembly.

[0051] In this embodiment, Figure 6 and Figure 7 As shown, the end conveying device 7 includes a second base 71 and a second mobile frame 72 movably arranged on the second base 71, and a second conveying assembly 73 for conveying the workpiece rotating frame 100 is arranged on the second mobile frame 72. The end conveying device 7 also includes a second mobile drive assembly for driving the second mobile frame 72 to move so that the second conveying assembly 73 can dock with the linear conveying line. The second conveying assembly 73 itself can convey the workpiece rotating frame 100, and can dock with the internal conveying device or the linear conveying line, so as to receive the workpiece rotating frame 100 or send the workpiece rotating frame 100 out. The second mobile drive assembly drives the second mobile frame 72 to move, and the second conveying assembly 73 moves with the second mobile frame 72, so as to dock with the internal conveying device or the linear conveying line, so as to receive and send out the workpiece rotating frame 100. The end conveying device 7 has the advantages of simple and compact structure, simple control, and stable and reliable operation. The above-mentioned second mobile frame 72 is installed on the second base 71 through a guide rail and a slider mechanism to realize movement on the second base 71.

[0052] In this embodiment, the second mobile drive assembly includes a second gear 74 installed on the second mobile frame 72, a second rotating drive member 75 driving the second gear 74 to rotate, and a second rack 76 fixedly arranged relative to the second base 71, and the second gear 74 is meshed with the second rack 76. The second rotating drive member 75 drives the second gear 74 to rotate, and the second mobile frame 72 can be driven to move accordingly through the cooperation of the second gear 74 and the second rack 76. The second mobile drive assembly has a simple and compact structure, low cost, and simple control. The above-mentioned second rotating drive member 75 adopts a motor. In other embodiments, the second mobile drive assembly can also adopt other existing forms of driving mechanisms, as long as it can achieve driving the second mobile frame 72 to move.

[0053] In this embodiment, the second conveying assembly 73 includes a plurality of third supporting conveying rollers 731 and a third driving mechanism 732 for driving the plurality of third supporting conveying rollers 731 to rotate. The plurality of third supporting conveying rollers 731 can support the workpiece rotating rack 100, and when the third driving mechanism 732 drives the rotation, the workpiece rotating rack 100 is moved, thereby realizing the conveying of the workpiece rotating rack 100. The third driving mechanism 732 adopts a combination of a motor and a sprocket mechanism, and the motor drives all the third supporting conveying rollers 731 to rotate synchronously through the sprocket mechanism. In other embodiments, the third driving mechanism 732 may also adopt other existing structural forms, as long as it can realize driving all the third supporting conveying rollers 731 to rotate synchronously.

[0054] In this embodiment, one end of the second conveying assembly 73 is used as an entry and exit end for docking with the linear conveying line and the conveying device in the vacuum processing equipment 4 to receive and output the workpiece rotating rack 100, and the other end of the second conveying assembly 73 is provided with a blocking positioning member 77 for blocking and positioning the workpiece rotating rack 100. The blocking positioning member 77 has the function of blocking and positioning the workpiece rotating rack 100, which can improve the stability of the workpiece rotating rack 100 during the conveying process. In this embodiment, the blocking positioning member 77 is a baffle, and preferably an arc-shaped baffle adapted to the shape of the workpiece rotating rack 100 is used to improve the stability and reliability of the blocking positioning.

[0055] In this embodiment, the vacuum processing equipment 4 is a prior art, for example, it may include an inlet chamber, an outlet chamber, and one or more coating chambers arranged between the inlet chamber and the outlet chamber. The internal conveying device extends from the inlet end to the outlet end of the vacuum processing equipment 4, and is used to convey the workpiece turntable 100. The internal conveying device can be configured with reference to the structural form of the first conveying component 22, the fixed conveyor 6 and the second conveying component 73.

[0056] The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. For those skilled in the art, improvements and changes obtained without departing from the technical concept of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A conveying device for conveying a workpiece turntable (100) for a vacuum coating device, characterized in that: It comprises a first base (1) and a movable conveyor (2) for conveying the workpiece turntable (100), the movable conveyor (2) being arranged on the first base (1) in a movable and position-adjustable manner, and the movable conveyor (2) being provided with a turntable drive assembly (3) for driving the workpiece turntable (100) to rotate; The movable conveyor (2) comprises a first movable frame (21) movably arranged on the first base (1); the first movable frame (21) is provided with a first conveying component (22) for conveying a workpiece turntable (100); the first conveying component (22) can be docked with other conveying devices in the vacuum coating production line to receive and deliver the workpiece turntable (100); the movable conveyor (2) further comprises a first movable drive component for driving the first movable frame (21) to move; the turntable drive component (3) is mounted on the first movable frame (21).

2. The conveying device according to claim 1, characterized in that: The first mobile drive assembly comprises a first gear (23) mounted on a first mobile frame (21), a first rotating drive member (24) driving the first gear (23) to rotate, and a first rack (25) fixedly arranged relative to the first base (1), the first gear (23) being meshed with the first rack (25).

3. The conveying device according to claim 1, characterized in that: A linear guide rail (11) is provided on the first base (1), and the first movable frame (21) is slidably mounted on the linear guide rail (11) in a linear reciprocating motion via a slider that cooperates with the linear guide rail (11).

4. The conveying device according to claim 1, characterized in that: The first conveying assembly (22) comprises a plurality of first supporting conveying rollers (221) and a first driving mechanism (222) for driving the plurality of first supporting conveying rollers (221) to rotate.

5. The conveying device according to any one of claims 1 to 4, characterized in that: The rotary table driving assembly (3) comprises a rotary table (31), a rotary driving mechanism (32) and a lifting driving mechanism (33) mounted on the first movable frame (21); the lifting driving mechanism (33) is connected to the rotary table (31); the lifting driving mechanism (33) can drive the rotary table (31) to move upward and downward; when the rotary table (31) moves upward, the workpiece rotary table (100) can be lifted to be separated from the first conveying assembly (22); when the rotary table (31) moves downward, the lifted workpiece rotary table (100) can be placed on the first conveying assembly (22); and the rotary driving mechanism (32) is used to drive the lifted workpiece rotary table (100) to rotate.

6. The conveying device according to claim 5, characterized in that: The rotary drive mechanism (32) is located above the first conveying assembly (22) and docks with the workpiece rotating rack (100) when the workpiece rotating rack (100) is lifted to drive the workpiece rotating rack (100) to rotate.

7. A vacuum coating production line, comprising a vacuum processing device (4) and an external conveying line (5) for conveying a workpiece rotating rack (100), wherein the vacuum processing device (4) is provided with an internal conveying device for conveying the workpiece rotating rack (100), and the external conveying line (5) is connected to the internal conveying device, characterized in that: The external conveying line (5) is provided with a conveying device as claimed in any one of claims 1 to 6.

8. The vacuum coating production line according to claim 7, characterized in that: The external conveyor line (5) further comprises one or more independently operated fixed conveyors (6) for conveying the workpiece turntable (100), wherein the fixed conveyors (6) are connected to at least one movable conveyor (2).

9. The vacuum coating production line according to claim 8, characterized in that: The fixed conveyor (6) comprises a frame (61), a plurality of second supporting conveying rollers (62) rotatably mounted on the frame (61), and a second driving mechanism (63) for driving the plurality of second supporting conveying rollers (62) to rotate.

10. The vacuum coating production line according to claim 8, characterized in that: The external conveyor line (5) is provided with more than two movable conveyors (2) and more than one fixed conveyor (6), and the two or more movable conveyors (2) and the more than one fixed conveyor (6) are connected to form a linear conveyor line for conveying a workpiece turntable (100) along a straight line, and an end conveying device (7) for conveying the workpiece turntable (100) is provided between one end of the linear conveyor line and the input end of the internal conveying device, and between the other end of the linear conveyor line and the output end of the internal conveying device.

11. The vacuum coating production line according to claim 10, characterized in that: The linear conveyor line and the vacuum processing equipment (4) are arranged side by side and at intervals, and the linear conveyor line, the vacuum processing equipment (4) and the end conveying devices (7) at both ends of the linear conveyor line are connected to form a U-shaped layout structure.

12. The vacuum coating production line according to claim 10, characterized in that: The end conveying device (7) comprises a second base (71) and a second movable frame (72) movably arranged on the second base (71); the second movable frame (72) is provided with a second conveying assembly (73) for conveying a workpiece rotating frame (100); the end conveying device (7) further comprises a second moving drive assembly for driving the second movable frame (72) to move so that the second conveying assembly (73) docks with the linear conveyor line.

13. The vacuum coating production line according to claim 12, characterized in that: The second mobile drive assembly comprises a second gear (74) mounted on the second mobile frame (72), a second rotating drive member (75) driving the second gear (74) to rotate, and a second rack (76) fixedly arranged relative to the second base (71), and the second gear (74) is meshed with the second rack (76).

14. The vacuum coating production line according to claim 12, characterized in that: The second conveying assembly (73) comprises a plurality of third supporting conveying rollers (731) and a third driving mechanism (732) for driving the plurality of third supporting conveying rollers (731) to rotate.

15. The vacuum coating production line according to claim 14, characterized in that: One end of the second conveying assembly (73) serves as an entry and exit end for docking with a linear conveying line and a conveying device in a vacuum processing device (4) to receive and output a workpiece turntable (100), and the other end of the second conveying assembly (73) is provided with a blocking positioning member (77) for blocking and positioning the workpiece turntable (100).

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