An electric control system of a double focusing mass spectrometer, double focusing mass spectrometer

Abstract

This invention discloses an electrical control system for a dual-focusing mass spectrometer and the spectrometer itself, including a control computer and a power supply module. The control computer sends setting commands to the power supply module, which includes an analytical electromagnet power supply unit and an electrostatic analyzer power supply unit. The analytical electromagnet power supply unit converts external power into a corresponding drive current and supplies it to the analytical electromagnet according to the setting commands from the control computer, and adjusts the drive current according to the actual magnetic field strength of the analytical electromagnet. The electrostatic analyzer power supply unit converts external power into a corresponding set voltage and supplies it to the electrostatic analyzer according to the setting commands from the control computer, and adjusts the set voltage according to the actual electric field strength of the electrostatic analyzer. This invention at least solves the problem of low stability and reliability of the electrical control system in dual-focusing mass spectrometers in related technologies.

Description

Technical Field

[0001] This invention belongs to the field of large magnetic mass spectrometry technology, specifically relating to an electronic control system for a dual-focusing mass spectrometer and a dual-focusing mass spectrometer. Background Technology

[0002] High-resolution inductively coupled plasma mass spectrometry (ICP-MS) is a type of dual-focusing mass spectrometer, primarily used for the analysis and measurement of elemental isotope abundance and abundance ratios. Its principle is as follows: Samples are ionized in an ion source, acquiring a positive charge. After being extracted, accelerated, and focused by an ion lens system, an ion beam with high-speed flight is formed. This beam passes through an entrance slit and enters the mass analyzer. Sample ions with different mass-to-charge ratios follow different trajectories in the analytical electromagnet, thus separating them. The ions continue their flight into an electrostatic analyzer, where ions with the same mass-to-charge ratio but different energies are separated. Finally, sample ions meeting the specified conditions pass through the mass spectrometer's flight tube into the detector. The detector converts and amplifies the ion signal, ensuring a one-to-one correspondence between the detection signal and the mass number of the sample ions. Compared to other existing analytical techniques, dual-focusing high-resolution mass spectrometry offers advantages such as high resolution, good sensitivity, wide linear range, and low detection limit, and is widely used in environmental, geological, and archaeological fields.

[0003] A high-resolution mass spectrometer mainly comprises a sample introduction system and ion source, an interface system, an ion lens system, a dual-focusing mass analyzer, an ion detection system, and an electronic control system, as well as corresponding vacuum, water-cooling, and gas supply systems. The electronic control system is the key link connecting the underlying hardware of each system and provides power to it; therefore, it is a crucial component of the high-resolution mass spectrometer. The stability and reliability of the electronic control system significantly impact the instrument's measurement and control accuracy, directly affecting its key technical specifications, such as sensitivity and resolution. Currently, research on the electronic control systems of dual-focusing mass spectrometers is limited. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to address the above-mentioned shortcomings of the prior art by providing an electronic control system for a dual-focusing mass spectrometer and a dual-focusing mass spectrometer, which has the advantages of high stability and reliability, and can improve the measurement accuracy, sensitivity and resolution of the mass spectrometer.

[0005] In a first aspect, the present invention provides an electronic control system for a dual-focusing mass spectrometer, including a control computer and a power supply module.

[0006] A control computer is used to issue setting commands to the power supply module. The power supply module includes an analytical electromagnet power supply unit and an electrostatic analyzer power supply unit. The analytical electromagnet power supply unit, connected to an external power source and the control computer, is used to convert the external power source into a corresponding drive current and supply it to the analytical electromagnet according to the setting commands issued by the control computer, and to adjust the drive current according to the actual magnetic field strength of the analytical electromagnet. The electrostatic analyzer power supply unit, also connected to an external power source and the control computer, is used to convert the external power source into a corresponding set voltage and supply it to the electrostatic analyzer according to the setting commands issued by the control computer, and to adjust the set voltage according to the actual electric field strength of the electrostatic analyzer.

[0007] Preferably, the electromagnet power supply unit includes a magnetic field drive power supply module and a magnetofluid control module.

[0008] A magnetic field drive power supply module is connected to the external power supply, the control computer, and the electromagnetic coil of the analytical electromagnet. This module converts the external power supply into an adjustable drive current within a preset range required to set the magnetic field strength of the analytical electromagnet, based on the magnetic field strength setting command issued by the control computer, and transmits this current to the electromagnetic coil of the analytical electromagnet. A magnetocurrent control module is connected at one end to the control computer and at the other end to the magnetic induction coil of the analytical electromagnet. This module detects the actual magnetic field current in the magnetic induction coil of the analytical electromagnet and feeds it back to the control computer, allowing the control computer to adjust the magnetic field strength setting command based on the detected magnetic field current.

[0009] Preferably, the preset range is 0.2A to 8.8A.

[0010] The analysis electromagnet power supply unit also includes a power drive module. This power drive module is connected in series between the magnetic field drive power supply module and the electromagnetic coil of the analysis electromagnet. The power drive module is used to perform pulse width modulation on the current output by the magnetic field drive power supply module.

[0011] Preferably, the power supply unit for the electrostatic analyzer includes a reference voltage module and an ESA (Electrostatic Analyzer) high voltage module.

[0012] The reference voltage module, connected to the external power supply, control computer, and electrostatic analyzer, provides a reference operating voltage for the electrostatic analyzer and feeds back the actual electric field strength of the electrostatic analyzer to the control computer, enabling the control computer to adjust the voltage setting command according to the actual electric field strength of the electrostatic analyzer. The ESA high-voltage module, also connected to the external power supply, control computer, and electrostatic analyzer, converts the external power supply into the output voltage required for the electric field strength of the electrostatic analyzer according to the voltage setting command issued by the control computer, and transmits it to the electrostatic analyzer plates.

[0013] Preferably, the power supply module further includes an ICP (Inductively Coupled Plasma) ion source power supply unit, an ion lens power supply unit, and an ion current detection unit.

[0014] The ICP ion source power supply unit, connected to the external power supply and the control computer, is used to convert the external power supply into the output power of the ICP radio frequency power supply according to the output power setting command issued by the control computer, and to adjust it according to the actual output power of the ICP radio frequency power supply. The ion lens power supply unit, connected to the external power supply and the control computer, is used to convert the external power supply into the set current for each electrode of the ion lens according to the current setting command issued by the control computer, and then supply it to the corresponding electrodes of the ion lens. The ion current detection unit, connected to the external power supply and the control computer, is used to detect the ion current signal and transmit it to the control computer.

[0015] Preferably, the ICP ion source power supply unit includes an RF power control unit and a mobile platform X / Y / Z control unit.

[0016] The RF (Radio Frequency) power control unit is used to ionize the analytical sample and provide a stable ion source for mass spectrometry analysis. The RF power control unit includes an ICP RF power supply and an ICP RF matching box. The ICP RF power supply, connected to the control computer, continuously generates the corresponding output power according to the output power setting instructions issued by the control computer. The ICP RF matching box, also connected to the control computer, is used to tune for impedance mismatch between the ICP RF power supply and the plasma according to the vacuum capacitance setting instructions issued by the control computer.

[0017] The X / Y / Z control unit of the mobile platform is used to control, monitor, and adjust the positions of the rectangular tube and the ICP RF matching box. The X / Y / Z control unit includes potential sensors in the X, Y, and Z directions and stepper motors. The potential sensors, connected to the control computer, provide real-time X, Y, and Z-axis position information of the mobile platform, enabling the control computer to issue X, Y, and Z-axis position setting commands. The stepper motors, also connected to the control computer, drive the mobile platform to adjust its actual position according to the X, Y, and Z-axis position setting commands issued by the control computer.

[0018] Preferably, the ion current detection unit includes an electrostatic amplification module and a voltage-frequency conversion module.

[0019] The electrostatic amplification module includes a Faraday cup electrostatic amplification module and a secondary electron multiplier electrostatic amplification module. The electrostatic amplification module, connected to the voltage-to-frequency conversion module and the ion detector, amplifies the ion current signal detected by the ion detector into a voltage signal and transmits it to the voltage-to-frequency conversion module. The voltage-to-frequency conversion module, connected to the control computer, the Faraday cup electrostatic amplification module, and the secondary electron multiplier electrostatic amplification module, converts the received voltage signal into a pulse frequency signal and transmits it to the control computer.

[0020] Preferably, the Faraday cup electrostatic amplification module is connected to the Faraday cup of the ion detector to receive the ion current of 6.0 × 10⁻¹⁴ A to 2.7 × 10⁻¹⁰ A detected by the Faraday cup. The secondary electron multiplier electrostatic amplification module is connected to the secondary electron multiplier of the ion detector to receive the ion current of 1.6 × 10⁻¹⁸ A to 6.0 × 10⁻¹⁴ A detected by the secondary electron multiplier.

[0021] The electrostatic amplification module of the secondary electron multiplier also includes a pulse amplifier. The pulse amplifier is used to amplify the current pulses generated by the ions entering the secondary electron multiplier and transmit them to the counting input terminal.

[0022] Preferably, the power supply module further includes an auxiliary power supply unit.

[0023] An auxiliary power supply unit is used to convert the external power supply into a set current or voltage for the auxiliary device and then supply it to the auxiliary device. The auxiliary device includes a peristaltic pump, a vacuum pump, a gas supply system, a water cooling system, and an exhaust system.

[0024] Preferably, the electrical control system further includes a controller. The controller is connected in series between the control computer and the power supply module, and is used to control the conversion and transmission of digital and analog signals between the control computer and each power supply unit.

[0025] Preferably, the electrical control system also includes a UPS uninterruptible power supply and a control panel.

[0026] The control panel, connected in series between the external power supply and the power supply module, is used for power management of each power supply unit in the power supply module. The UPS (Uninterruptible Power Supply), connected to the power supply module, provides emergency power to the power supply module.

[0027] Secondly, the present invention also provides a dual-focusing mass spectrometer, including an ICP ion source, an analytical electromagnet, an electrostatic analyzer, and an ion detector, and further including the electronic control system of the dual-focusing mass spectrometer described in the first aspect. The electronic control system is connected to the ICP ion source, the analytical electromagnet, the electrostatic analyzer, and the ion detector, respectively.

[0028] The present invention provides an electronic control system and a dual-focusing mass spectrometer, comprising a control computer and a power supply module. The power supply module includes an analytical electromagnet power supply unit, which converts external power into a corresponding driving current based on magnetic field strength setting commands issued by the control computer and supplies it to the analytical electromagnet; and adjusts the driving current according to the actual magnetic field strength of the analytical electromagnet. Additionally, the power supply module includes an electrostatic analyzer power supply unit, which converts external power into a corresponding set voltage based on voltage setting commands issued by the control computer and supplies it to the electrostatic analyzer; and adjusts the set voltage according to the actual electric field strength of the electrostatic analyzer. Under the control commands of the control computer, not only are the power supply functions required by each system completed, but the output current and output voltage can also be adjusted in real time according to the actual magnetic field strength or electric field strength, thereby achieving constant magnetic field strength and stable electric field strength, improving the stability and reliability of the mass spectrometer. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the electrical control system of a dual-focusing mass spectrometer according to Embodiment 1 of the present invention;

[0030] Figure 2 This is a schematic diagram of the electrical control system of another dual-focusing mass spectrometer according to Embodiment 1 of the present invention;

[0031] Figure 3 This is a structural block diagram of the electromagnet power supply unit according to Embodiment 1 of the present invention;

[0032] Figure 4 This is a schematic diagram of the electromagnet control circuit design in Embodiment 1 of the present invention;

[0033] Figure 5 Structural block diagram of the electrostatic analyzer power supply unit of Embodiment 1 of the present invention;

[0034] Figure 6 This is a schematic diagram of the electrostatic analyzer control circuit design according to Embodiment 1 of the present invention;

[0035] Figure 7 This is a structural block diagram of the ICP ion source power supply unit according to Embodiment 1 of the present invention;

[0036] Figure 8 This is a structural block diagram of the ion current detection unit in Embodiment 1 of the present invention. Detailed Implementation

[0037] To enable those skilled in the art to better understand the technical solution of the present invention, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0038] It is understood that the specific embodiments and accompanying drawings described herein are merely for explaining the invention and are not intended to limit the invention.

[0039] It is understood that, without conflict, the various embodiments and features in the embodiments of the present invention can be combined with each other.

[0040] It is understood that, for ease of description, only the parts related to the present invention are shown in the accompanying drawings, while the parts unrelated to the present invention are not shown in the drawings.

[0041] It is understood that each unit or module involved in the embodiments of the present invention may correspond to only one entity structure, or may be composed of multiple entity structures, or multiple units or modules may be integrated into one entity structure.

[0042] It is understood that, without conflict, the functions and steps marked in the flowcharts and block diagrams of this invention may occur in a different order than that marked in the accompanying drawings.

[0043] It is understood that the flowcharts and block diagrams of this invention illustrate the possible architecture, functions, and operations of systems, apparatuses, devices, and methods according to various embodiments of this invention. Each block in the flowchart or block diagram may represent a unit, module, program segment, or code, containing executable instructions for implementing the specified function. Furthermore, each block or combination of blocks in the block diagram and flowchart can be implemented using a hardware-based system to achieve the specified function, or using a combination of hardware and computer instructions.

[0044] It is understood that the units and modules involved in the embodiments of the present invention can be implemented by software or by hardware. For example, the units and modules can be located in a processor.

[0045] Example 1:

[0046] like Figure 1 As shown, this embodiment provides an electronic control system for a dual-focusing mass spectrometer, which can be applied to high-resolution mass spectrometers, glow discharge mass spectrometers, or other large mass spectrometers employing a dual-focusing structure design. The electronic control system for the dual-focusing mass spectrometer includes a control computer and a power supply module.

[0047] The control computer is used to issue setting commands to the power supply module.

[0048] The power supply module includes a power supply unit for the analytical electromagnet and a power supply unit for the electrostatic analyzer.

[0049] The analysis electromagnet power supply unit is connected to an external power source and a control computer. It is used to convert the external power source into a corresponding drive current and supply it to the analysis electromagnet according to the set instructions issued by the control computer, and to adjust the drive current according to the actual magnetic field strength of the analysis electromagnet.

[0050] The electrostatic analyzer power supply unit is connected to an external power source and a control computer. It is used to convert the external power source into a corresponding set voltage and supply it to the electrostatic analyzer according to the set instructions issued by the control computer, and to adjust the set voltage according to the actual electric field strength of the electrostatic analyzer.

[0051] In this embodiment, dual-focusing refers to a mass spectrometer layout that simultaneously incorporates focusing by an analytical electromagnet and an electrostatic analyzer. Compared to single-focusing mass spectrometers, dual-focusing mass spectrometers can separate ions with the same mass-to-charge ratio but different energies. Therefore, the dual-focusing mass analyzer includes an analytical electromagnet and an electrostatic analyzer. The electronic control system in this embodiment is mainly used to precisely adjust the input of the dual-focusing mass analyzer to further improve the performance of the analytical electromagnet and electrostatic analyzer. The setting commands include magnetic field strength setting commands and voltage setting commands. Typically, the actual magnetic field strength and the actual output voltage do not perfectly match the set magnetic field strength and the set voltage, leading to deviations in the detection results and reduced accuracy. Therefore, through the automatic adjustment of the electronic control system, the actual magnetic field strength and the actual output voltage are made to approach the set magnetic field strength and the set voltage, thus achieving the stability and reliability of the mass spectrometer.

[0052] Example 2:

[0053] like Figure 2 As shown, this embodiment provides an electrical control system for a dual-focusing mass spectrometer, which can be applied to high-resolution mass spectrometers, glow discharge mass spectrometers, or other large mass spectrometers with a dual-focusing structure design. The electrical control system includes a control computer and a power supply module.

[0054] The control computer is used to issue setting commands to the power supply module.

[0055] The power supply module includes a power supply unit for the analytical electromagnet and a power supply unit for the electrostatic analyzer.

[0056] An analytical electromagnet power supply unit, connected to an external power source and a control computer, is used to convert the external power source into a corresponding drive current and supply it to the analytical electromagnet according to the setting instructions issued by the control computer, and to adjust the drive current according to the actual magnetic field strength of the analytical electromagnet. An electrostatic analyzer power supply unit, also connected to an external power source and a control computer, is used to convert the external power source into a corresponding set voltage and supply it to the electrostatic analyzer according to the setting instructions issued by the control computer, and to adjust the set voltage according to the actual electric field strength of the electrostatic analyzer.

[0057] Optionally, the electromagnet power supply unit includes a magnetic field drive power supply module and a magnetofluid control module.

[0058] A magnetic field drive power supply module is connected to the external power supply, the control computer, and the electromagnetic coil of the analytical electromagnet. This module converts the external power supply into an adjustable drive current within a preset range required to set the magnetic field strength of the analytical electromagnet, based on the magnetic field strength setting command issued by the control computer, and transmits this current to the electromagnetic coil of the analytical electromagnet. A magnetocurrent control module is connected at one end to the control computer and at the other end to the magnetic induction coil of the analytical electromagnet. This module detects the actual magnetic field current in the magnetic induction coil of the analytical electromagnet and feeds it back to the control computer, allowing the control computer to adjust the magnetic field strength setting command based on the detected magnetic field current.

[0059] In this embodiment, as Figure 3 As shown, the external power supply, the magnetic field drive power supply module, and the electromagnetic coil of the analyzing electromagnet are connected in sequence. The control computer, the magnetofluid control module, and the magnetic induction coil of the analyzing electromagnet are also connected in sequence. The external power supply is also connected to the control computer. The magnetic field drive power supply module converts the external power supply into an adjustable drive current within the required range for the magnetic field strength of the analyzing electromagnet, based on the magnetic field strength setting command issued by the control computer, and transmits it to the electromagnet coil. Furthermore, the magnetofluid control module detects the magnetic field current generated by the magnetic induction coil of the analyzing electromagnet and feeds it back to the control computer. Since there is a deviation between the actual magnetic field current generated by the analyzing electromagnet and the current corresponding to the magnetic field strength setting command, the control computer issues an adjustment command for the magnetic field strength setting of the analyzing electromagnet based on the magnetic field current generated by the magnetic induction coil. The magnetic field drive power supply module then converts the external power supply according to the adjusted magnetic field strength setting command. This cyclical control achieves long-term stability of the magnetic field strength.

[0060] Optionally, the preset range is 0.2A to 8.8A. The power supply unit for the analytical electromagnet also includes a power drive module. The power drive module is connected in series between the magnetic field drive power supply module and the electromagnetic coil of the analytical electromagnet, and is used to perform pulse width modulation on the current output by the magnetic field drive power supply module.

[0061] In this embodiment, the analytical electromagnet power supply unit provides a stable power supply to the electromagnet coil and ensures that a stable magnetic field is continuously generated between the magnetic poles of the analytical electromagnet. The magnetic field strength can be adjusted as necessary by the control computer software. The analytical electromagnet power supply unit consists of a magnetic field drive power supply module, a power drive module, and a magnetofluidic control module. The magnetic field drive power supply module provides an adjustable drive current within the range of 0.2 to 8.8 A to the analytical electromagnet coil, and the power supply stability is better than relevant standards within a specified time. The power drive module uses pulse width modulation to stably adjust the current in the analytical electromagnet coil from 0.2 to 8.8 A. The magnetofluidic control module is used to stably control the magnetic field strength generated by the analytical electromagnet near a set value and provides real-time feedback to the control computer on the magnetic field current generated by the magnetic induction coil of the analytical electromagnet. Preferably, a scanning stabilizer is connected in series between the magnetofluidic control module and the induction coil of the analytical electromagnet. Under certain conditions, the magnetic field current strength corresponds to the relative mass of the ion beam passing through the magnetic field.

[0062] Specifically, the electromagnet control circuit is analyzed as follows: Figure 4 As shown, the electromagnet control circuit includes a magnetofluidic control module and a magnetic field drive power supply module. The magnetofluidic control module detects the magnetic field strength generated by the electromagnet, providing feedback to the closed-loop regulation of the magnetic field drive power supply module. It serves as a magnetic field reference, ensuring stable magnetic field adjustment. Compared to constant voltage or constant current drive methods, using magnetic field strength as the adjustment target is beneficial for instrument stability. The magnetic field sensor, as a core component, determines the accuracy of the electromagnet's magnetic field strength and ultimately impacts the stability of the instrument's signal strength. Specifically, the magnetofluidic control module detects the voltage, current, and temperature of the electromagnet coil in the mass analyzer. The detection results are conditioned and transmitted to the ADC controller. The ADC controller converts the signal and transmits it to the control computer. The control computer then transmits the setting command for adjusting the electromagnet's magnetic field strength to the DAC controller, causing the magnetic field drive module to convert the external power supply into a corresponding drive current and transmit it to the electromagnet coil in the mass analyzer. The magnetic field drive power supply module generates a current to drive the magnet based on the set magnetic field strength and adjusts the drive current according to the magnetic field strength signal provided by the magnetofluidic control module, achieving a constant magnetic field strength.

[0063] Optionally, the electrostatic analyzer power supply unit includes a reference voltage module and an ESA high voltage module.

[0064] The reference voltage module, connected to the external power supply, control computer, and electrostatic analyzer, provides a reference operating voltage for the electrostatic analyzer and feeds back the actual electric field strength of the electrostatic analyzer to the control computer, enabling the control computer to adjust the voltage setting command according to the actual electric field strength of the electrostatic analyzer. The ESA high-voltage module, also connected to the external power supply, control computer, and electrostatic analyzer, converts the external power supply into the output voltage required for the electric field strength of the electrostatic analyzer according to the voltage setting command issued by the control computer, and transmits it to the electrostatic analyzer plates.

[0065] In this embodiment, as Figure 5 As shown, the external power supply is connected to the electrostatic analyzer through a reference voltage module and an ESA high-voltage module. The reference voltage module provides a reference operating voltage for the electrostatic analyzer and feeds back the actual electric field strength of the analyzer to the control computer. Since the actual electric field strength of the electrostatic analyzer during mass spectrometry operation differs from the electric field strength corresponding to the voltage setting command, the control computer issues an adjustment command to the output voltage setting of the ESA high-voltage module based on the actual electric field strength of the analyzer. The ESA high-voltage module then converts the external power supply into the output voltage required for the electric field strength of the electrostatic analyzer according to the voltage setting command issued by the control computer and transmits it to the electrostatic analyzer plates. The ESA high-voltage module continuously adjusts the output voltage according to the setting command of the control computer, and this cyclical control achieves long-term stability of the electric field strength. By ensuring the continuous stability of the magnetic field strength and electromagnetic intensity of the mass spectrometer, the stability and reliability of the electronic control system are achieved, thereby improving the measurement accuracy, sensitivity, and resolution of the mass spectrometer.

[0066] Specifically, the electrostatic analyzer (ESA) control circuit is as follows: Figure 6 As shown, it includes a reference voltage module and a high voltage module. The reference voltage module provides the operating voltage for the ESA and includes functions for ESA voltage setting, signal conditioning, high voltage module, and voltage, current, and temperature detection, and transmits the parameters to the control computer. The high voltage module provides high voltage for the ESA and has an isolated voltage output. After signal conditioning and power amplifier driving the isolated switching high voltage transformer, it uses full-wave rectification and filtering to output the operating voltage required by the ESA. It also has functions such as differential voltage input, drive current feedback, output high voltage feedback, and module temperature detection.

[0067] Optionally, the power supply module also includes an ICP ion source power supply unit, an ion lens power supply unit, and an ion current detection unit.

[0068] The ICP ion source power supply unit is connected to the external power supply and the control computer. It is used to convert the external power supply into the output power of the ICP radio frequency power supply according to the output power setting command issued by the control computer, and to adjust it according to the actual output power of the ICP radio frequency power supply.

[0069] The ion lens power supply unit is connected to the external power supply and the control computer. It is used to convert the external power supply into the set current for each electrode of the ion lens according to the current setting command issued by the control computer, and then supply it to the corresponding electrode of the ion lens.

[0070] An ion current detection unit, connected to the external power supply and control computer, is used to detect ion current signals and transmit them to the control computer.

[0071] In this embodiment, the ICP ion source power supply unit provides a stable ion source for mass spectrometry analysis. The ion lens power supply unit constrains the ion flow to generate a stable ion beam. The ion current detection unit detects the ion current received by the ion detector or Faraday cup and transmits it to the control computer in real time.

[0072] Optionally, such as Figure 7 As shown, the ICP ion source power supply unit includes an RF power control unit and a mobile platform X / Y / Z control unit.

[0073] The RF power control unit is used to ionize the analytical sample and provide a stable ion source for mass spectrometry analysis. The RF power control unit includes an ICP RF power supply and an ICP RF matching box. The ICP RF power supply, connected to the control computer, continuously generates the corresponding output power according to the output power setting commands issued by the control computer. The ICP RF matching box, also connected to the control computer, tunes for impedance mismatch between the ICP RF power supply and the plasma according to the vacuum capacitance value setting commands issued by the control computer. The X / Y / Z control unit of the moving platform is used to control, monitor, and adjust the positions of the rectangular tube and the ICP RF matching box. The X / Y / Z control unit of the moving platform includes potential sensors in the X, Y, and Z directions and stepper motors. The potential sensors, connected to the control computer, provide real-time X, Y, and Z-axis position information of the moving platform to the control computer, enabling the control computer to issue X, Y, and Z-axis position setting commands. The stepper motors, connected to the control computer, drive the moving platform to adjust its actual position according to the X, Y, and Z-axis position setting commands issued by the control computer.

[0074] In this embodiment, the ICP RF power supply is also connected to the ignition coil. After the ICP ion source ignites, the actual output power of the ICP RF power supply is strongly correlated with the stability of the ICP ion source. However, the flame intensity and brightness characteristics of the ICP ion source are not necessarily better the stronger they are. The ICP ion source needs to remain stable within a suitable range. To keep the ion source stable, the set output power needs to be continuously adjusted to maintain the stability of the actual output function and thus keep the ion source stable.

[0075] Optionally, such as Figure 8 As shown, the ion current detection unit includes an electrostatic amplification module and a voltage-to-frequency conversion module. The electrostatic amplification module includes a Faraday cup electrostatic amplification module and a secondary electron multiplier electrostatic amplification module. The electrostatic amplification module, connected to the voltage-to-frequency conversion module and the ion detector, amplifies the ion current signal detected by the ion detector into a voltage signal and transmits it to the voltage-to-frequency conversion module. The voltage-to-frequency conversion module, connected to the control computer, the Faraday cup electrostatic amplification module, and the secondary electron multiplier electrostatic amplification module, converts the received voltage signal into a pulse frequency signal and transmits it to the control computer.

[0076] Optionally, the Faraday cup electrostatic amplification module is connected to the Faraday cup of the ion detector to receive the ion current of 6.0 × 10⁻¹⁴ A to 2.7 × 10⁻¹⁰ A detected by the Faraday cup. The secondary electron multiplier electrostatic amplification module is connected to the secondary electron multiplier of the ion detector to receive the ion current of 1.6 × 10⁻¹⁸ A to 6.0 × 10⁻¹⁴ A detected by the secondary electron multiplier. The secondary electron multiplier electrostatic amplification module also includes a pulse amplifier, which amplifies the current pulses generated by the ions entering the secondary electron multiplier and transmits them to the counting input terminal.

[0077] In this embodiment, both the Faraday cup and the secondary electron multiplier detector can only detect ion beams within a certain range, and each has relatively better detection performance within that range. Their combined operation is necessary for better ion beam detection. Furthermore, converting the voltage signal into a pulse frequency signal provides strong anti-interference capabilities during signal transmission.

[0078] Optionally, the power supply module further includes an auxiliary power supply unit. The auxiliary power supply unit is used to convert the external power supply into a set current or voltage for the auxiliary devices and then supply it to the auxiliary devices, wherein the auxiliary devices include a peristaltic pump, a vacuum pump, a gas supply system, a water cooling system, and an exhaust system.

[0079] Optionally, the electrical control system also includes a controller. The controller, connected in series between the control computer and the power supply module, is used to control the conversion and transmission of digital and analog signals between the control computer and each power supply unit. It should be noted that the number of controllers can be one or more; when there are multiple controllers, their number corresponds one-to-one with the number of power supply units, such as... Figure 2 The ADC / DAC controller shown is illustrated. The control computer establishes communication with the power supply module through a communication module (such as an optical fiber or the USB-CAN module shown in the figure). Each power supply unit of the power supply module and the communication module is equipped with a controller (such as the ADC / DAC controller shown in the figure) for the conversion and transmission of digital and analog signals between the control computer and each power supply unit.

[0080] Optionally, the electrical control system may also include a UPS uninterruptible power supply and a control panel.

[0081] The control panel, connected in series between the external power supply and the power supply module, is used for power management of each power supply unit in the power supply module. The UPS (Uninterruptible Power Supply), connected to the power supply module, provides emergency power to the power supply module.

[0082] The electronic control system of the dual-focusing mass spectrometer in this embodiment, through the aforementioned communication connection, continuously adjusts and controls the set power, set current, and set voltage based on actual output power, actual magnetic field strength, and actual electric field strength. The aim is to maintain the system stability and reliability of the mass spectrometer. By effectively controlling, precisely adjusting, and acquiring data from each component of the dual-focusing high-resolution mass spectrometer, the system achieves the management and control requirements for automated operation, effectively enhancing the overall system stability and analytical precision of the dual-focusing mass spectrometer.

[0083] Example 3:

[0084] like Figure 2 As shown, this embodiment provides an electronic control system for a dual-focusing mass spectrometer, including: a control computer and a power supply module. The power supply module includes an ICP ion source power supply unit connected to an external power source, an ion lens power supply unit, an analytical electromagnet power supply unit, an electrostatic analyzer power supply unit, an ion current detection unit, and an auxiliary power supply unit.

[0085] The control computer establishes communication connections with the ICP ion source power supply unit, ion lens power supply unit, analytical electromagnet power supply unit, electrostatic analyzer power supply unit, and ion current detection unit, respectively.

[0086] The ICP ion source power supply unit is used to convert external power into the current required for the output power of the ICP ion source and supply it to the ICP ion source according to the setting command of the ICP ion source set power issued by the control computer.

[0087] The ion lens power supply unit is used to convert the external power supply into the set current of each electrode of the ion optical lens according to the current setting instructions of each electrode of the ion optical lens issued by the control computer, and then supply it to the corresponding electrode of the ion optical lens.

[0088] The power supply unit for the analytical electromagnet is used to convert external power into an adjustable current within the required range of magnetic field strength for the analytical electromagnet, based on the magnetic field strength setting command issued by the control computer, and then supply it to the analytical electromagnet.

[0089] The electrostatic analyzer power supply unit is used to convert the external power supply into the voltage required for the electrostatic analyzer's electric field strength according to the setting command for the electrostatic analyzer's electric field strength issued by the control computer, and then supply it to the electrostatic analyzer.

[0090] The ion current detection unit is used to detect the ion current received by the ion detector and finally convert it into a pulse frequency signal and transmit it to the control computer.

[0091] Through the aforementioned communication connection, effective control, precise adjustment, and data acquisition of each component of the dual-focusing high-resolution mass spectrometer can be achieved, fulfilling the management and control requirements for the automated operation of the dual-focusing mass spectrometer and effectively enhancing the overall system stability and analytical precision of the dual-focusing mass spectrometer.

[0092] In this embodiment, the ICP ion source power supply unit mainly includes: an RF power control unit and a mobile platform X / Y / Z control unit. The RF power control unit is mainly used to ionize the analytical sample and provide a stable ion source for mass spectrometry analysis. It mainly consists of an ICP RF power supply and an ICP RF matching box. The ICP RF power supply is connected to a control computer via a controller. The control computer sends a command to the ICP RF power supply to set the power level, and the ICP RF power supply continuously generates output power. The ICP RF matching box is connected to the control computer via a controller. The control computer sends a command to the ICP RF matching box to set the vacuum capacitance value, and the ICP RF matching box tunes for impedance mismatch between the ICP RF power supply and the plasma.

[0093] The X / Y / Z control unit of the mobile platform mainly consists of potential sensors in the X, Y, and Z directions and stepper motors, used to control, monitor, and adjust the positions of the rectangular tube and the ICP RF matching box. The potential sensors and stepper motors are connected to the control computer via controllers. Based on the real-time X, Y, and Z-direction position information of the mobile platform fed back by the potential sensors, the control computer issues commands to set the X, Y, and Z-direction positions through the controllers, and the X, Y, and Z-direction stepper motors drive the mobile platform to perform actual position adjustments.

[0094] In this embodiment, the power supply unit for the analytical electromagnet includes a magnetic field drive power supply module, a power drive module, and a magnetocurrent control module. The external power supply, the magnetic field drive power supply module, the power drive module, and the electromagnetic coil of the analytical electromagnet are connected in sequence. The control computer, the magnetocurrent control module, and the magnetic induction coil of the analytical electromagnet are also connected in sequence. The magnetic field drive power supply module converts the external power supply into an adjustable drive current within the range of 0.2 to 8.8 A. The power drive module performs pulse width modulation on the current output by the magnetic field drive power supply module, thereby providing an adjustable drive current within the range required for setting the magnetic field strength of the analytical electromagnet and transmitting it to the electromagnet coil. The magnetocurrent control module detects the magnetic field current generated by the magnetic induction coil of the analytical electromagnet and feeds it back to the control computer. The control computer adjusts the magnetic field strength setting command of the analytical electromagnet based on the magnetic field current generated by the magnetic induction coil and issues commands to the magnetic field drive power supply module and the power drive module to adjust the current strength of the analytical electromagnet.

[0095] The analytical electromagnet power supply unit provides a stable power supply to the electromagnet coil and ensures a continuous and stable magnetic field between the electromagnet poles. The magnetic field strength can be adjusted as needed via control computer software. The analytical electromagnet power supply unit consists of a magnetic field drive power supply module, a power drive module, and a magnetocurrent control module. The magnetic field drive power supply module provides an adjustable drive current within the range of 0.2–8.8A to the analytical electromagnet coil, and its power stability is superior to relevant standards within a specified time. The power drive module uses pulse width modulation to stably adjust the current in the analytical electromagnet coil from 0.2–8.8A. The magnetocurrent control module is used to stably control the magnetic field strength generated by the analytical electromagnet near a set value and provides real-time feedback to the control computer on the magnetic field current generated by the analytical electromagnet's magnetic induction coil.

[0096] In this embodiment, the electrostatic analyzer power supply unit mainly includes a reference voltage module and an ESA high-voltage module. External power supplies are connected to the electrostatic analyzer through the reference voltage module and the ESA high-voltage module, respectively. The reference voltage module primarily provides a reference operating voltage for the electrostatic analyzer and feeds back the electric field strength of the electrostatic analyzer to the control computer. The control computer issues an adjustment command to the output voltage setting of the ESA high-voltage module based on the electric field strength setting command issued by the control computer, thereby achieving long-term stability of the electric field strength. The ESA high-voltage module primarily converts the external power supply into the output voltage required for the electric field strength of the electrostatic analyzer according to the electric field strength setting command issued by the control computer and transmits it to the electrostatic analyzer plates.

[0097] In this embodiment, the ion current detection unit includes an ion detection module, an electrostatic amplification module, and a voltage-to-frequency conversion module. A control computer is connected to the voltage-to-frequency conversion module, which is also connected to a Faraday cup electrostatic amplification module and a secondary electron multiplier electrostatic amplification module. The Faraday cup electrostatic amplification module and the secondary electron multiplier electrostatic amplification module are connected to the ion detection module. After capturing the ion current signal, the ion detector of the ion detection module amplifies it into a voltage signal through the electrostatic amplification module and transmits it to the voltage-to-frequency conversion module. The voltage-to-frequency conversion module converts the voltage signal into a pulse frequency signal and transmits it to the control computer.

[0098] In this embodiment, the Faraday cup electrostatic amplification module corresponds to and is connected to the Faraday cup of the ion detector, and is used to receive the ion current of 6.0 × 10⁻¹⁴ A to 2.7 × 10⁻¹⁰ A detected by the corresponding Faraday cup. The secondary electron multiplier electrostatic amplification module corresponds to and is connected to the secondary electron multiplier of the ion detector, and is used to receive the ion current of 1.6 × 10⁻¹⁸ A to 6.0 × 10⁻¹⁴ A detected by the corresponding secondary electron multiplier.

[0099] The ion current signals captured by each Faraday cup of the ion detector are amplified into voltage signals by the amplification resistor of the Faraday cup electrostatic amplification module and transmitted to the voltage-to-frequency converter. The secondary electron multiplier electrostatic amplification module is similar to the Faraday cup electrostatic amplification module, with an amplification resistor of approximately 10⁸ Ω. The voltage-to-frequency converter is designed to convert the voltage signals output from the Faraday cup and secondary electron multiplier electrostatic amplification modules into pulse frequency signals, with voltage and frequency values ​​being proportional. After conversion, the voltage signal exhibits strong anti-interference capabilities during signal transmission. The voltage-to-frequency converter is equipped with a voltage-to-frequency conversion module; its input channel is connected to the output channel of the electrostatic amplification module, converting the voltage signal into a pulse frequency signal through continuous integration of the input signal. The pulse frequency signal is acquired by the input / output controller and transmitted to the control computer.

[0100] In this embodiment, the electrostatic amplification module of the secondary electron multiplier also includes a pulse amplifier. When the secondary electron multiplier operates in ion counting mode, each ion entering the secondary electron multiplier generates a current pulse at the output terminal of the multiplier. This current pulse signal is amplified by the pulse amplifier and transmitted to the counting input terminal of the input / output control unit. The amplified pulse width is not less than 40 ns, the maximum frequency is not greater than 3 MHz, and the charge is not less than 10⁻¹⁴ C.

[0101] In this embodiment, an auxiliary power supply unit is also included. The auxiliary power supply unit is connected to both an external power source and a control computer, and establishes a communication connection with the control computer. The auxiliary power supply unit is used to convert the external power source into a set current or voltage for the auxiliary device according to the auxiliary device current or voltage setting command issued by the control computer, and then supply it to the corresponding auxiliary device.

[0102] In this embodiment, the auxiliary devices mainly include: peristaltic pump, ignition coil, vacuum pump, gas supply system, water cooling system, exhaust system, slit system, etc., and the auxiliary power supply unit correspondingly includes power supply modules for each auxiliary device.

[0103] The auxiliary power supply unit also includes a second I / O controller, which is used for the control and communication between the computer and the various power modules of the auxiliary power supply unit.

[0104] In this embodiment, the ion lens power supply unit employs a ±8kV high-voltage stabilizer to provide a stable high-voltage power supply to each electrode of the ion optical lens. The reference voltage of the high-voltage stabilizer is provided by a standard high-voltage module, and the voltage on different lens electrodes is adjusted through a high-voltage regulation circuit. The high-voltage stabilizer is designed with a high-voltage switching switch; when the voltage is switched, the output voltage on the high-voltage stabilizer will decrease proportionally. By adjusting the voltage between each electrode in the ion lens assembly, the ion transmission efficiency is optimized, effectively improving the instrument's sensitivity.

[0105] In this embodiment, each line connecting the external power supply to the power supply module is equipped with a corresponding control panel and a UPS uninterruptible power supply. The power control panel is used for power supply management of each sub-module in the power supply module, and the UPS uninterruptible power supply is used to provide emergency power to the power supply module in the event of a power outage.

[0106] The power control panel consists of multiple power distribution boards, power switches, etc. It is primarily used for power management of the instrument's various units. Power supply methods include standby power, auxiliary equipment power, and power supply to the main working units via a UPS. In the event of a sudden external power outage, the UPS can provide emergency power to the high-resolution mass spectrometer's control computer and main execution units, ensuring the normal operation of the mass spectrometer's protection functions, completing the current detection task, and executing the normal shutdown procedure, preventing damage to the equipment and data loss caused by sudden power failure.

[0107] In this embodiment, the control computer establishes a communication link with the power supply module through a communication module. Each power supply unit of the power supply module and the communication module is equipped with an A / D conversion controller to control the conversion and transmission of digital and analog signals between the computer and each power supply unit. In addition, the electronic control system also includes a vacuum gauge, an ion pump, and a peristaltic pump, which are connected to the control computer through A / D converters and the communication module.

[0108] Example 4:

[0109] This embodiment provides a dual-focusing mass spectrometer, including an ICP ion source, an analytical electromagnet, an electrostatic analyzer, an ion detector, and an electronic control system of the dual-focusing mass spectrometer described in Embodiment 1, Embodiment 2, or Embodiment 3.

[0110] The electronic control system is connected to the ICP ion source, the analytical electromagnet, the electrostatic analyzer, and the ion detector, respectively.

[0111] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of the present invention, and the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. An electric control system of a double focusing mass spectrometer, characterized by, Includes control computer and power supply module, The control computer is used to send setting commands to the power supply module. The power supply module includes a power supply unit for the analytical electromagnet and a power supply unit for the electrostatic analyzer. The analysis electromagnet power supply unit is connected to an external power source and a control computer. It is used to convert the external power source into a corresponding drive current and supply it to the analysis electromagnet according to pre-set instructions issued by the control computer. It is also used to adjust the drive current according to the actual magnetic field strength of the analysis electromagnet. The electrostatic analyzer power supply unit, connected to an external power source and a control computer, is used to convert the external power source into a corresponding set voltage and supply it to the electrostatic analyzer according to the set instructions issued by the control computer, and to adjust the set voltage according to the actual electric field strength of the electrostatic analyzer. The electrostatic analyzer power supply unit includes a reference voltage module and an ESA high voltage module. The reference voltage module is connected to the external power supply, the control computer, and the electrostatic analyzer, respectively. It provides a reference operating voltage to the electrostatic analyzer and feeds back the actual electric field strength of the electrostatic analyzer to the control computer, enabling the control computer to adjust the voltage setting command according to the actual electric field strength of the electrostatic analyzer. The ESA high-voltage module is connected to the external power supply, the control computer, and the electrostatic analyzer, respectively. It converts the external power supply into the output voltage required for the electric field strength of the electrostatic analyzer based on voltage setting commands issued by the control computer, and transmits this voltage to the electrostatic analyzer plates. In the power supply unit circuit of the electrostatic analyzer, the reference voltage module has ESA voltage setting, signal conditioning, high voltage module and voltage, current and temperature detection functions, and transmits the parameters to the control computer; the ESA high voltage module has isolated voltage output, which, after signal conditioning and power amplifier driving the isolated switching high voltage transformer, uses full-wave rectification and filtering to output the working voltage required by ESA, and also has differential voltage input, drive current feedback, output high voltage feedback and module temperature detection functions.

2. The electronic control system according to claim 1, characterized in that, The electromagnet power supply unit consists of a magnetic field drive power supply module and a magnetofluid control module. The magnetic field drive power supply module is connected to the external power supply, the control computer, and the electromagnetic coil of the analysis electromagnet, respectively. The magnetic field drive power supply module is used to convert the external power supply into an adjustable drive current within a preset range required for setting the magnetic field strength of the analytical electromagnet, based on the magnetic field strength setting command issued by the control computer, and transmit it to the electromagnetic coil of the analytical electromagnet. The magnetofluid control module is connected at one end to the control computer and at the other end to the magnetic induction coil of the electromagnet. The magnetofluidic control module is used to detect and analyze the actual magnetic field current of the electromagnet's magnetic induction coil and feed it back to the control computer so that the control computer can adjust the magnetic field strength setting command according to the detected magnetic field current.

3. The electronic control system according to claim 2, characterized in that, The preset range is 0.2A to 8.8A. The analysis also shows that the electromagnet power supply unit also includes a power drive module. The power drive module is connected in series between the magnetic field drive power module and the electromagnetic coil of the analysis electromagnet. The power drive module is used to perform pulse width modulation on the current output by the magnetic field drive power module.

4. The electronic control system according to claim 1, characterized in that, The power supply module also includes an ICP ion source power supply unit, an ion lens power supply unit, and an ion current detection unit. The ICP ion source power supply unit, connected to the external power supply and the control computer, is used to convert the external power supply into the output power of the ICP radio frequency power supply according to the output power setting command issued by the control computer, and to adjust the output power according to the actual output power of the ICP radio frequency power supply. The ion lens power supply unit, connected to the external power supply and the control computer, is used to convert the external power supply into the set current for each electrode of the ion lens according to the current setting command issued by the control computer, and then supply it to the corresponding electrode of the ion lens. An ion current detection unit, connected to the external power supply and control computer, is used to detect ion current signals and transmit them to the control computer.

5. The electronic control system according to claim 4, characterized in that, The ICP ion source power supply unit includes an RF power control unit and a mobile platform X / Y / Z control unit. The RF power control unit is used to ionize the analytical sample and provide a stable ion source for mass spectrometry analysis. The RF power control unit includes the ICP RF power supply and the ICP RF matching box. The ICP RF power supply, connected to the control computer, continuously generates the corresponding output power according to the output power setting command issued by the control computer. The ICP RF matching box, connected to the control computer, is used to tune the impedance mismatch between the ICP RF power supply and the plasma according to the vacuum capacitance setting instructions issued by the control computer. The mobile platform's X / Y / Z control unit is used to control, monitor, and adjust the positions of the rectangular tube and the ICP RF matching box. The mobile platform X / Y / Z control unit includes potential sensors and stepper motors in the X, Y, and Z directions. The potential sensor, connected to the control computer, is used to feed back real-time X, Y, and Z-axis position information of the mobile platform to the control computer, so that the control computer can issue position setting commands in the X, Y, and Z axes. The stepper motor, connected to the control computer, is used to drive the moving platform to adjust its actual position according to the X, Y, and Z position setting commands issued by the control computer.

6. The electronic control system according to claim 4, characterized in that, The ion current detection unit includes an electrostatic amplification module and a voltage-frequency conversion module. The electrostatic amplification module includes a Faraday cup electrostatic amplification module and a secondary electron multiplier electrostatic amplification module. The electrostatic amplification module, connected to the voltage-to-frequency conversion module and the ion detector, amplifies the ion current signal detected by the ion detector into a voltage signal and transmits it to the voltage-to-frequency conversion module. The voltage-frequency conversion module is connected to the control computer, the Faraday cup electrostatic amplifier module, and the secondary electron multiplier electrostatic amplifier module, respectively. It is used to convert the received voltage signal into a pulse frequency signal and transmit it to the control computer.

7. The electronic control system according to claim 6, characterized in that, The Faraday cup electrostatic amplification module is connected to the Faraday cup of the ion detector to receive the ion current of 6.0 × 10⁻¹⁴ A to 2.7 × 10⁻¹⁰ A detected by the Faraday cup. The electrostatic amplification module of the secondary electron multiplier is connected to the secondary electron multiplier of the ion detector to receive the ion current of 1.6 × 10⁻¹⁸ A to 6.0 × 10⁻¹⁴ A detected by the secondary electron multiplier. The secondary electron multiplier electrostatic amplification module also includes a pulse amplifier. The pulse amplifier is used to amplify the current pulses generated by the ions entering the secondary electron multiplier and transmit them to the counting input.

8. The electronic control system according to claim 1, characterized in that, The power supply module also includes an auxiliary power supply unit. An auxiliary power supply unit is used to convert the external power supply into a set current or voltage for the auxiliary device and then supply it to the auxiliary device. The auxiliary device includes a peristaltic pump, a vacuum pump, a gas supply system, a water cooling system, and an exhaust system.

9. The electronic control system according to claim 1, characterized in that, The electronic control system also includes a controller. The controller, connected in series between the control computer and the power supply module, is used to control the conversion and transmission of digital and analog signals between the control computer and each power supply unit.

10. The electronic control system according to claim 1, characterized in that, The electrical control system also includes a UPS uninterruptible power supply and a control panel. The control panel, connected in series between the external power supply and the power supply module, is used for power supply management of each power supply unit in the power supply module. An UPS (Uninterruptible Power Supply) is connected to the power supply module and is used to provide emergency power to the power supply module.

11. A double-focusing mass spectrometer, characterized in that, It includes an ICP ion source, an analytical electromagnet, an electrostatic analyzer, and an ion detector, and also includes the electronic control system of the dual-focusing mass spectrometer as described in any one of claims 1-10. The electronic control system is connected to the ICP ion source, the analytical electromagnet, the electrostatic analyzer, and the ion detector, respectively.

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