An activated carbon adsorption system based on dynamic control of intelligent algorithms

Abstract

The application discloses an active carbon adsorption system based on intelligent algorithm dynamic regulation, wherein a gas inlet of an active carbon regenerator is communicated with a waste gas inlet, a gas outlet is communicated with a waste gas outlet; a discharge flange is communicated with a discharge screw conveyor through a frequency conversion discharger, and the discharge screw conveyor is communicated with the top of the active carbon regenerator; a regenerated active carbon outlet at the bottom of the active carbon regenerator is communicated with a middle storage bin through a filler screw conveyor, and the middle storage bin is communicated with a filler flange through a frequency conversion filler; a waste gas analyzer is used for measuring waste gas parameters, and an active carbon performance analyzer is used for analyzing active carbon performance parameters; a control center uses a control algorithm based on deep learning to control a flow field adjusting mechanism control module, a frequency conversion discharger control module and a frequency conversion filler control module so as to control the active carbon adsorption device. The application realizes self-adaptation of the active carbon adsorption device under large waste gas working condition fluctuation, improves device operation efficiency and reduces operation cost.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of organic waste gas treatment in the semiconductor manufacturing industry, and particularly relates to an activated carbon adsorption system based on intelligent algorithm dynamic regulation. BACKGROUND

[0002] At present, the domestic semiconductor industry is developing rapidly, and the semiconductor production brings great economic benefits to the society, but the problem of organic waste gas emission in the production process needs to be paid special attention, which is complex and contains hydrocarbons, aromatic hydrocarbons, alcohols, aldehydes, ketones, esters, amines, organic acids and other organic substances, which has significant harm to the environment and human health.

[0003] The semiconductor industry has the characteristics of low concentration mean, large gas volume and strong fluctuation, and the activated carbon adsorption method is a mature organic waste gas treatment method, which has the advantages of low operation cost, no secondary pollution, safety and reliability, and has a large number of successful application cases in various fields of organic waste gas treatment, and it also has good applicability to the treatment of organic waste gas emitted in the semiconductor production process. But the existing technology of activated carbon adsorption equipment control is relatively simple, and it cannot actively adapt to the fluctuation of waste gas working condition, resulting in low overall operation efficiency and high operation cost. SUMMARY

[0004] In view of the deficiencies of the prior art, the present application provides an activated carbon adsorption system based on intelligent algorithm dynamic regulation.

[0005] The specific technical scheme is as follows:

[0006] An activated carbon adsorption system based on intelligent algorithm dynamic regulation, comprising an activated carbon adsorption device and an intelligent control component; the activated carbon adsorption device comprises: a waste gas inlet, an activated carbon adsorption tower, a waste gas outlet, a variable frequency unloader, a unloading screw conveyor, an activated carbon regeneration tower, a filling screw conveyor, a middle storage bin, and a variable frequency filler; the activated carbon adsorption tower comprises: a bin body, a gas inlet, a gas outlet, a filler flange, a unloading flange, a mesh plate, and a flow field adjusting mechanism;

[0007] The bin body is in the shape of a hollow cylinder, and its axis is vertical; two layers of mesh plates are coaxially arranged in the bin body, and the flow field adjusting mechanism is arranged inside the mesh plate of the inner layer; the two layers of mesh plates extend upward and communicate with the filler flange, and extend downward and communicate with the unloading flange; the gas inlet and the gas outlet are arranged on the side wall of the bin body perpendicular to the axis;

[0008] The waste gas inlet is communicated with the gas inlet, the waste gas outlet is communicated with the gas outlet, the discharge flange is communicated with the discharge screw conveyor through the variable frequency discharger, the discharge screw conveyor is communicated with the top of the activated carbon regeneration tower, the activated carbon regeneration tower is provided with a high-concentration organic waste gas outlet and an activated carbon outlet at the bottom, and the activated carbon outlet is communicated with the packing screw conveyor; the packing screw conveyor is communicated with the middle storage bin, and the middle storage bin is communicated with the packing flange through the variable frequency packing device.

[0009] The intelligent control assembly comprises a control center, a waste gas analyzer, an activated carbon performance analyzer, a flow field adjusting mechanism control module, a variable frequency discharger control module and a variable frequency packing device control module, the control center is connected with the waste gas analyzer, the activated carbon performance analyzer, the flow field adjusting mechanism control module, the variable frequency discharger control module and the variable frequency packing device control module respectively, the waste gas analyzer is communicated with the waste gas inlet through a sampling pipeline and is used for measuring waste gas parameters, the activated carbon performance analyzer is communicated with the packing screw conveyor through a sampling pipeline and is used for periodically measuring and analyzing activated carbon performance parameters, the waste gas analyzer and the activated carbon performance analyzer respectively transmit measured data to the control center, the flow field adjusting mechanism control module is used for controlling opening and closing or an opening angle of the flow field adjusting mechanism, the variable frequency discharger control module is used for controlling opening and closing or an opening size of the variable frequency discharger, and the variable frequency packing device control module is used for controlling opening and closing or an opening size of the variable frequency packing device; the control center uses a control algorithm based on deep learning, under waste gas working condition shock fluctuation conditions, according to the waste gas parameters and the activated carbon performance parameters, the best system control strategy is matched and is rapidly fed back to the flow field adjusting mechanism control module, the variable frequency discharger control module and the variable frequency packing device control module for control adjustment.

[0010] Further, a plurality of activated carbon adsorption towers are arranged, a gas outlet of a front activated carbon adsorption tower is communicated with a gas inlet of a rear activated carbon adsorption tower, a gas inlet of a first activated carbon adsorption tower is used as a total gas inlet of the activated carbon adsorption tower and is communicated with the waste gas inlet, a gas outlet of a last activated carbon adsorption tower is used as a total gas outlet of the activated carbon adsorption tower and is communicated with the waste gas outlet, the number of the variable frequency packing devices and the variable frequency dischargers is same as that of the activated carbon adsorption towers and corresponds to the activated carbon adsorption towers one by one, a plurality of variable frequency packing devices are controlled to run at different speeds through the variable frequency packing device control module, and a plurality of variable frequency dischargers are controlled to run at different speeds through the variable frequency discharger control module.

[0011] Further, the number of the activated carbon adsorption towers is 3-10.

[0012] Further, the flow field adjusting mechanism is in the form of a louver and can realize zoned control opening degree under the control of the flow field adjusting mechanism control module.

[0013] Further, the waste gas parameters comprise waste gas flow, humidity content, temperature and pollutant component concentration.

[0014] Further, the activated carbon performance parameters include: activated carbon porosity, specific surface area, saturated adsorption capacity, adsorption rate.

[0015] The beneficial effects of the present application are:

[0016] The present application comprehensively evaluates the best operation strategy of the equipment according to the organic waste gas parameters and the activated carbon performance parameters through the intelligent control assembly, and adjusts in real time feedback to the control terminal, realizes the self-adaptation of the activated carbon adsorption device under the larger fluctuation of the waste gas working condition, effectively improves the device operation efficiency, and reduces the operation cost. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 is the structure diagram of the activated carbon adsorption system based on intelligent algorithm dynamic regulation in the embodiment of the present application.

[0018] Figure 2 is the isometric view of the activated carbon adsorption tower in the embodiment of the present application.

[0019] Figure 3 is the front view of the activated carbon adsorption tower in the embodiment of the present application.

[0020] Figure 4 is the A-A sectional view of the activated carbon adsorption tower in the embodiment of the present application.

[0021] In the figure, the activated carbon adsorption device 1, the waste gas inlet 1-1, the activated carbon adsorption tower 1-2; the bin body 1-21, the gas inlet 1-22, the gas outlet 1-23, the filler flange 1-24, the unloading flange 1-25, the mesh plate 1-26, the flow field adjusting mechanism 1-27; the waste gas outlet 1-3, the variable frequency unloader 1-4, the unloading screw conveyor 1-5, the activated carbon regeneration tower 1-6, the high-concentration organic waste gas outlet 1-7, the filler screw conveyor 1-8, the intermediate storage bin 1-9, the variable frequency filler 1-10; the intelligent control assembly 2, the control center 2-1, the waste gas analyzer 2-2, the activated carbon performance analyzer 2-3, the flow field adjusting mechanism control module 2-4, the variable frequency unloader control module 2-5, the variable frequency filler control module 2-6. DETAILED DESCRIPTION

[0022] The purpose and effect of the present application will become more apparent from the following detailed description of the preferred embodiments according to the drawings, and the present application will be further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0023] As Figure 1 shown, an activated carbon adsorption system based on intelligent algorithm dynamic regulation, comprising an activated carbon adsorption device 1 and an intelligent control assembly 2.

[0024] The active carbon adsorption device 1 comprises a waste gas inlet 1-1, an active carbon adsorption tower 1-2, a waste gas outlet 1-3, a variable frequency unloader 1-4, an unloading screw conveyor 1-5, an active carbon regeneration tower 1-6, a high-concentration organic waste gas outlet 1-7, a filling screw conveyor 1-8, a middle storage bin 1-9, and a variable frequency filler 1-10. The waste gas inlet 1-1 is in communication with the total gas inlet of the active carbon adsorption tower 1-2, and the waste gas outlet 1-3 is in communication with the total gas outlet of the active carbon adsorption tower 1-2. The active carbon outlet of the active carbon adsorption tower 1-2 is in communication with the unloading screw conveyor 1-5 through the variable frequency unloader 1-4, and the variable frequency unloader 1-4 can control the amount of active carbon passing by adjusting the switch or the opening size. The unloading screw conveyor 1-5 is in communication with the top of the active carbon regeneration tower 1-6, and the communication path is airtight, and the unloading screw conveyor 1-5 can transport the active carbon falling thereon to the designated position (i.e. the top of the regeneration tower 1-6). The active carbon regeneration tower 1-6 has the ability of segmental desorption and separation of various pollution components; the active carbon regeneration tower 1-6 is provided with a high-concentration organic waste gas outlet 1-3 for discharging the high-concentration organic waste gas desorbed and separated from the active carbon; the bottom of the active carbon regeneration tower 1-6 is provided with an active carbon outlet for regenerating, which is in communication with the filling screw conveyor 1-8. The filling screw conveyor 1-8 is in communication with the middle storage bin 1-9, and the communication path is airtight, and the filling screw conveyor 1-8 is used for transporting the regenerated active carbon falling thereon to the middle storage bin 1-9. The storage bin 1-9 corresponds to the active carbon adsorption tower 1-2 one by one, and the middle storage bin 1-9 is in communication with the active carbon inlet of the active carbon adsorption tower 1-2 through the variable frequency filler 1-10, and the variable frequency filler 1-10 can control the amount of active carbon passing by adjusting the switch or the opening size.

[0025] As Figures 2-4As shown, the activated carbon adsorption tower 1-2 comprises: a bin body 1-21, a gas inlet 1-22, a gas outlet 1-23, a filler flange 1-24, a discharge flange 1-25, a mesh plate 1-26, and a flow field adjusting mechanism 1-27. The bin body 1-21 is hollow inside and has a cylindrical shape with the axis direction vertical. The inner and outer mesh plates 1-26 are coaxially arranged inside the bin body 1-21. The inner mesh plate 1-26 is provided with the flow field adjusting mechanism 1-27 inside. The flow field adjusting mechanism 1-27 is in the form of louvers. The single-sided flow field adjusting mechanism 1-27 is composed of about 100-120 louver blades. Each 10 louver blades form a group. Each group of louver blades is controlled by a driving motor. Each group of louver blades is controlled by the flow field adjusting mechanism control module 2-4 of the intelligent control assembly 2. The opening adjustment range of each group of louver blades is 0-100%. By adjusting the opening of the louver blades, the local flow resistance can be changed, the flow speed and flow area of the gas in the activated carbon layer can be effectively controlled, and the flow posture of the gas in the reactor can be adjusted to cope with the fluctuation of the front-end flue gas working condition. The upper inner and outer mesh plates 1-26 extend upward and toward the axis, and the filler flange 1-24 is arranged at the intersection. The lower inner and outer mesh plates 1-26 extend downward and toward the axis, and the discharge flange 1-25 is arranged at the intersection. The filler flange 1-24, the passages between the inner and outer mesh plates 1-26, and the discharge flange 1-25 are sequentially connected. The gas inlet 1-22 and the gas outlet 1-23 are symmetrically arranged on the side wall of the bin body 1-21 perpendicular to the axis. Preferably, the communication aperture of the gas inlet 1-22 with the bin body 1-21 is larger than that of the gas outlet 1-23 with the bin body 1-21, which is beneficial to increasing the preliminary contact area of the waste gas and the activated carbon. The waste gas inlet 1-1 is connected to the gas inlet 1-22 of the activated carbon adsorption tower 1-2 through a pipeline, and the gas outlet 1-23 of the activated carbon adsorption tower 1-2 is connected to the waste gas outlet 1-3 through a pipeline. The filler flange 1-24 of the activated carbon adsorption tower 1-2 is connected to the filler screw conveyor 1-8 through the variable-frequency filler 1-10, and the discharge flange 1-25 of the activated carbon adsorption tower 1-2 is connected to the discharge screw conveyor 1-5 through the variable-frequency discharge device 1-4.

[0026] According to the requirements, the system can be connected in parallel with 3-10 activated carbon adsorption towers 1-2 to efficiently obtain better adsorption effect through the intelligent control assembly 2. The gas outlet 1-23 of the previous activated carbon adsorption tower 1-2 is connected to the gas inlet 1-22 of the next activated carbon adsorption tower 1-2. The gas inlet 1-22 of the first activated carbon adsorption tower 1-2 is the total gas inlet of the activated carbon adsorption tower 1-2, and the gas outlet 1-23 of the last activated carbon adsorption tower 1-2 is the total gas outlet of the activated carbon adsorption tower 1-2. Each activated carbon adsorption tower 1-2 can be controlled discretely.

[0027] As shown in FIG. 1, the system comprises: a waste gas inlet 1-1, an activated carbon adsorption tower 1-2, a waste gas outlet 1-3, a variable-frequency filler 1-10, a filler screw conveyor 1-8, a variable-frequency discharge device 1-4, a discharge screw conveyor 1-5, and an intelligent control assembly 2. Figure 1As shown, the intelligent control assembly 2 comprises: a control center 2-1, a waste gas analyzer 2-2, an activated carbon performance analyzer 2-3, a flow field adjusting mechanism control module 2-4, a variable frequency unloader control module 2-5, and a variable frequency filler control module 2-6. The waste gas analyzer 2-2 is connected to the waste gas inlet 1-1 through a sampling pipeline, and is used to measure key parameters such as waste gas flow, moisture content, temperature, and pollutant component concentration. The relevant parameters are transmitted to the control center 2-1. The activated carbon performance analyzer 2-3 is connected to the filler screw conveyor 1-8 through a sampling pipeline, and is used to periodically sample and analyze the activated carbon inside the system. The key parameters such as activated carbon porosity, specific surface area, saturated adsorption capacity, and adsorption rate can be analyzed. The relevant parameters are transmitted to the control center 2-1. The flow field adjusting mechanism control module 2-4 controls the flow field adjusting mechanism 1-27 through electrical signals, the variable frequency unloader control module 2-5 controls the variable frequency unloader 1-4 through electrical signals, and the variable frequency filler control module 2-6 controls the variable frequency filler 1-10 through electrical signals. The number of the variable frequency fillers 1-4 and the variable frequency unloaders 1-10 is the same, and they correspond one-to-one to the activated carbon adsorption towers 1-2, and can be individually controlled by the control modules to control the running speed. The waste gas analyzer 2-2, the activated carbon performance analyzer 2-3, the flow field adjusting mechanism control module 2-4, the variable frequency unloader control module 2-5, and the variable frequency filler control module 2-6 all interact with the control center 2-1 for data exchange and deployment.

[0028] The control center 2-1 uses a control algorithm based on deep learning. Under the condition of waste gas working condition oscillation and fluctuation, the control center 2-1 can quickly match the best system control strategy according to the waste gas parameters measured by the waste gas analyzer 2-2 and the activated carbon performance parameters measured by the activated carbon performance analyzer 2-3, and quickly feedback to the flow field adjusting mechanism control module 2-4, the variable frequency unloader control module 2-5, and the variable frequency filler control module 2-6 for control and adjustment.

[0029] In order to further understand the activated carbon adsorption system based on intelligent algorithm dynamic regulation proposed by the present application, the system operation process is described as follows:

[0030] Step one: load the activated carbon between the inner and outer two layers of mesh plates 1-26 in the activated carbon adsorption tower 1-2, and adjust the variable frequency unloader 1-4 and the variable frequency filler 1-10 to make the activated carbon flow uniformly at a certain speed from top to bottom.

[0031] Step two: the waste gas is connected to the system through the waste gas inlet 1-1, flows into the gas inlet 1-22 of the activated carbon adsorption tower 1-2 from the waste gas inlet 1-1, first flows through the flow field adjusting mechanism 1-27, and the flow rate and flow area of the waste gas are controlled by the flow field adjusting mechanism 1-27. Then, the waste gas passes through the activated carbon layer through the mesh plate 1-26. The organic matter in the waste gas is adsorbed by the activated carbon layer, and the purified waste gas is discharged through the waste gas outlet 1-23.

[0032] Step three: the activated carbon after adsorption is unloaded by the frequency conversion unloader 1-4 to the unloading screw conveyor 1-5, and then sent to the activated carbon regeneration tower 1-6 by the unloading screw conveyor 1-5 for desorption. The high-concentration organic waste gas obtained after desorption is discharged through the high-concentration organic waste gas outlet 1-3 and then uniformly treated. The desorbed activated carbon is distributed to each intermediate storage bin 1-9 by the filling screw conveyor 1-8, and then re-sent to each activated carbon adsorption tower 1-2 by the frequency conversion filler 1-10.

[0033] During the whole process of step one to step three, when the waste gas condition fluctuates, the waste gas analyzer 2-2 transmits the relevant parameter data of the waste gas to the control center 2-1. The control center 2-1 combines the current activated carbon performance parameters given by the activated carbon performance analyzer 2-3, and gives the optimal control strategy of the activated carbon adsorption tower 1-2 through the built-in system control algorithm based on deep learning. The control center 2-1 transmits the control signal to the flow field adjusting mechanism control module 2-4 to control the opening of the flow field adjusting mechanism 1-27 and adjust the internal flow field flow state. At the same time, the control signal is synchronously transmitted to the frequency conversion unloader control module 2-5 to control the running speed of the frequency conversion unloader 1-4. The control signal is transmitted to the frequency conversion filler control module 2-6 to control the running speed of the frequency conversion filler 1-10, so as to adjust the flow speed of the activated carbon in the activated carbon adsorption tower 1-2 and ensure the efficient adsorption of the organic waste gas in the activated carbon layer.

[0034] Those skilled in the art can understand that the above description is only a preferred example of the application and is not used to limit the application, although the application has been described in detail with reference to the foregoing examples, and those skilled in the art can still modify the technical solutions recorded in the foregoing examples or make equivalent replacement for part of the technical features. Any modification, equivalent replacement, etc. made within the spirit and principles of the application shall be included in the protection scope of the application.

Claims

1. An activated carbon adsorption system dynamically controlled by intelligent algorithms, characterized in that: It includes an activated carbon adsorption device and an intelligent control component; the activated carbon adsorption device includes: an exhaust gas inlet, an activated carbon adsorption tower, an exhaust gas outlet, a variable frequency discharger, a discharge screw conveyor, an activated carbon regeneration tower, a filler screw conveyor, an intermediate storage bin, and a variable frequency filler; the activated carbon adsorption tower includes: a bin body, a gas inlet, a gas outlet, a filler flange, a discharge flange, a mesh plate, and a flow field adjustment mechanism; The silo is hollow and cylindrical, with its axis vertically aligned. An inner and outer mesh plate are coaxially arranged within the silo, with a flow field regulating mechanism disposed within the inner mesh plate. The inner and outer mesh plates extend upward and communicate with the packing flange, and extend downward and communicate with the discharge flange. A gas inlet and a gas outlet are disposed on the side wall of the silo perpendicular to the axis. The waste gas inlet is connected to the gas inlet, and the waste gas outlet is connected to the gas outlet; the discharge flange is connected to the discharge screw conveyor through a frequency conversion discharger, and the discharge screw conveyor is connected to the top of the activated carbon regeneration tower; a high-concentration organic waste gas outlet is provided on the activated carbon regeneration tower, and a regenerated activated carbon outlet is provided at the bottom, which is connected to the packing screw conveyor; the packing screw conveyor is connected to the intermediate storage bin, and the intermediate storage bin is connected to the packing flange through a frequency conversion filler; The intelligent control component includes: a control center, an exhaust gas analyzer, an activated carbon performance analyzer, a flow field regulating mechanism control module, a variable frequency discharger control module, and a variable frequency filler control module. The control center is connected to the exhaust gas analyzer, the activated carbon performance analyzer, the flow field regulating mechanism control module, the variable frequency discharger control module, and the variable frequency filler control module respectively; the exhaust gas analyzer is connected to the exhaust gas inlet through a sampling pipeline for measuring exhaust gas parameters; the activated carbon performance analyzer is connected to the filler screw conveyor through a sampling pipeline for periodically measuring and analyzing the activated carbon performance parameters; the exhaust gas analyzer and the activated carbon performance analyzer are connected to the exhaust gas inlet through a sampling pipeline for periodic measurement and analysis of the activated carbon performance parameters. The analyzers transmit the measured data to the control center respectively; the flow field regulating mechanism control module is used to control the opening and closing or opening angle of the flow field regulating mechanism, the variable frequency discharger control module is used to control the switch or opening size of the variable frequency discharger, and the variable frequency filler control module is used to control the switch or opening size of the variable frequency filler; the control center uses a control algorithm based on deep learning to match the optimal system control strategy according to the exhaust gas parameters and activated carbon performance parameters under the conditions of fluctuating exhaust gas working conditions, and quickly feeds back to the flow field regulating mechanism control module, the variable frequency discharger control module, and the variable frequency filler control module for control and adjustment; The flow field regulating mechanism is in the form of a louver, and can realize zone-controlled opening under the control of the flow field regulating mechanism control module.

2. The activated carbon adsorption system based on dynamic control of intelligent algorithm according to claim 1 is characterized in that: Multiple activated carbon adsorption towers are arranged, and the gas outlet of the previous activated carbon adsorption tower is connected to the gas inlet of the next activated carbon adsorption tower; the gas inlet of the first activated carbon adsorption tower serves as the total gas inlet of the activated carbon adsorption tower and is connected to the exhaust gas inlet; the gas outlet of the last activated carbon adsorption tower serves as the total gas outlet of the activated carbon adsorption tower and is connected to the exhaust gas outlet; the number of variable frequency fillers and variable frequency unloaders is the same as that of the activated carbon adsorption towers and corresponds one to one, the operating speed of the multiple variable frequency fillers is independently controlled by the variable frequency filler control module, and the operating speed of the multiple variable frequency unloaders is independently controlled by the variable frequency unloader control module.

3. The activated carbon adsorption system based on dynamic control of intelligent algorithm according to claim 2 is characterized in that: The activated carbon adsorption towers are provided in 3 to 10 pieces.

4. The activated carbon adsorption system based on dynamic control of intelligent algorithm according to claim 1 is characterized in that: The exhaust gas parameters include: exhaust gas flow rate, moisture content, temperature, and pollutant component concentration.

5. The activated carbon adsorption system based on dynamic control of intelligent algorithm according to claim 1 is characterized in that: The performance parameters of the activated carbon include: activated carbon porosity, specific surface area, saturated adsorption capacity, and adsorption rate.

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