A method for preparing a quartz crucible

Abstract

The present invention relates to the technical field of quartz crucible preparation, specifically a method for preparing a quartz crucible. A method for preparing a quartz crucible comprises the following steps: SS01, mold laying, laying out an outer mold and an inner mold in a quartz crucible preparation device, and making the outer mold and the inner mold form a molding cavity of the quartz crucible; SS02, injection, after the SS01 step, injecting a certain amount of quartz sand into the molding cavity, and after the quartz sand is injected, the interior of the molding cavity is maintained at a set vacuum degree; SS03, melting and molding, after the SS02 step, the quartz crucible preparation device melts and molds the quartz sand in the molding cavity, and after melting and molding, a quartz crucible original body is obtained. The beneficial effect of the present invention is that the present invention effectively improves the regularity of the inner and outer walls of the quartz crucible during melting by setting the inner and outer molds to have opposite rotation directions and different rotation speeds, and improves the roundness of the inner and outer walls of the quartz crucible after melting.

Description

Technical Field

[0001] The invention relates to the technical field of quartz crucible preparation, in particular to a method for preparing a quartz crucible. Background Art

[0002] As is known to all, quartz crucible is one of the essential equipment for pulling large diameter single crystal silicon. Currently, quartz crucibles are used below 1450 degrees and are roughly divided into transparent and opaque types. The semi-transparent quartz crucible made by arc method is an essential basic material for pulling large diameter single crystal silicon and developing large-scale integrated circuits. Today, the world's semiconductor industry developed countries have replaced small transparent quartz crucibles with this crucible. It has the advantages of high purity, strong temperature resistance, large size and high precision, good heat preservation, energy saving, and stable quality.

[0003] Domestically, quartz crucibles of 18 inches and 20 inches are commonly used for pulling single crystal silicon. Some manufacturers also use crucibles of 22 inches and above. At present, the 18-inch and 20-inch crucibles produced by domestic crucible manufacturers have relatively mature technology. The raw material quartz sand used in its production is mainly imported from the United States. The purity of domestically produced quartz sand does not meet its requirements. Impurities in its raw materials produce black spots and bubbles during the high-temperature melting process during production, which have a certain impact on its stability when pulling single crystal silicon.

[0004] At present, crucible production coating technology has been used by most manufacturers. It is to coat a layer of high-purity quartz sand on the surface of the crucible made of ordinary quartz sand to form a dense layer. The dense layer can prevent the reaction between silicon and quartz crucible during the high-temperature pulling process of single crystal silicon and increase the crystallization rate.

[0005] In the prior art, a patent document with publication number CN102432189B discloses a spraying device for a quartz crucible barium coating. The invention ensures that the barium coating on the inner surface of the quartz crucible is uniform in thickness and firmly adheres to the coating. The improvement of the quartz crucible by the present invention effectively prolongs the service life of the quartz crucible. After testing, the extended time reaches more than ten hours, which not only improves the yield of crystal pulling, but also enhances the strength of the quartz crucible, thereby overcoming the quality reduction of single crystal silicon caused by hot melting of the quartz crucible.

[0006] In the preparation of existing quartz crucibles, on the one hand, it is not convenient to realize automatic spraying of the coating after the preparation of the quartz crucible, and on the other hand, the solidity of the quartz crucible is low and the burr rate is high during the preparation. Based on this, the present invention provides a method for preparing a quartz crucible to solve the problems raised in the above background technology. Summary of the invention

[0007] The present invention aims at the technical problems existing in the prior art and provides a method for preparing a quartz crucible to solve the problems that, on the one hand, it is inconvenient to realize automatic spraying of a coating after the preparation of the quartz crucible, and on the other hand, the solidity of the quartz crucible is low and the burr rate is high during the preparation.

[0008] The technical solution of the present invention to solve the above technical problem is as follows: A method for preparing a quartz crucible comprises the following steps:

[0009] SS01, mold arrangement, arranging the outer mold and the inner mold in the preparation device of the quartz crucible, and making the outer mold and the inner mold form a molding cavity of the quartz crucible;

[0010] SS02, injection: after step SS01, a certain amount of quartz sand is injected into the molding cavity. After the quartz sand is injected, the interior of the molding cavity is maintained at a set vacuum degree;

[0011] SS03, melting and molding, after step SS02, the quartz crucible preparation device melts and molds the quartz sand in the molding cavity, and then obtains the quartz crucible original body after melting and molding;

[0012] SS04, spraying, spraying a barium coating evenly on the inner wall of the original quartz crucible, and then making a quartz crucible;

[0013] The preparation device of the quartz crucible includes a frame, a guide shaft driven by a first motor is rotatably connected to the frame, a first screw lifting module is installed on the frame, a lifting platform is transmission-connected to the first screw lifting module, a vibration guide module driven by the guide shaft is installed on the surface of the lifting platform, an outer cylinder is transmission-connected to the vibration guide module, an outer mold driven by the guide shaft is rotatably connected to the inner wall of the outer cylinder, a ejecting mechanism is installed at the bottom of the outer mold, an electric rotating table is installed on the frame, a rotating frame is installed on the electric rotating table, a second screw lifting module is installed on the rotating frame, the second screw lifting module is transmission-connected to the lifting frame, and an inner mold component and a blanking and spraying component are respectively installed on the lifting frame.

[0014] The beneficial effects of the present invention are:

[0015] 1. In the present invention, when the quartz crucible is melted, the inner mold and the outer mold rotate in opposite directions, and when rotating, the rotation speeds of the inner mold and the outer mold are different. By setting the inner mold and the outer mold in opposite directions and different rotation speeds, the regularity of the inner and outer walls of the quartz crucible during melting is effectively improved, and the roundness of the inner and outer walls of the quartz crucible after melting is improved. In addition, by setting the inner mold and the outer mold in opposite directions and different rotation speeds, the burr rate and burr degree of the high quartz crucible during and after melting can be effectively reduced.

[0016] 2. When the quartz crucible in the present invention is melted and formed, the guide shaft outputs a constant speed. After the guide shaft outputs the speed, the vibration frame reciprocates up and down within the set stroke. After the vibration frame reciprocates up and down within the set stroke, the outer cylinder and the inner cylinder are driven to reciprocate and vibrate within the set stroke. After the outer cylinder and the inner cylinder are reciprocated and vibrated within the set stroke, the quartz sand raw material in the molding cavity is vibrated. Through the vibration, the density of the quartz sand material during melting is effectively reduced and the bubble rate of the quartz sand material during melting is reduced. By achieving the above-mentioned technical effects, the preparation and molding effect of the quartz casserole can be effectively improved and the defect rate of the quartz casserole can be reduced.

[0017] 3. In the present invention, after the quartz crucible is melted, the lifting platform is fully moved down. After the lifting platform is moved down, the lower top seat acts on the upper top seat, and then the quartz crucible in the molding cavity is lifted up. After the quartz crucible is lifted up, the spraying component sprays the barium coating on the inner wall of the quartz crucible. After the spraying is completed, the unloading and spraying parts clamp the quartz crucible by the inner wall of the quartz crucible, and then the rapid unloading of the quartz crucible after molding can be completed.

[0018] Based on the above technical solution, the present invention can also be improved as follows.

[0019] Furthermore, the inner mold component includes a cover body, a group of T-shaped guide rods a are fixedly installed on the top surface of the cover body, each of the T-shaped guide rods a is slidably connected to the lifting frame, and a limit spring is sleeved on each of the T-shaped guide rods a and corresponding to the positions on both sides of the lifting frame, an inner cylinder is fixedly installed on the cover body, and electric heating wires are installed inside the outer cylinder and the inner cylinder, an inner mold is rotatably connected to the inner cylinder, a molding cavity is provided between the inner mold and the outer mold, a second motor is installed on the surface of the cover body, and the output shaft end of the second motor is transmission-connected to the inner mold through a belt, and an auxiliary component is installed on the cover body.

[0020] The beneficial effect of adopting the above further scheme is that when the quartz crucible is melted, the inner mold and the outer mold rotate in opposite directions, and when rotating, the rotation speeds of the inner mold and the outer mold are different. By setting the inner mold and the outer mold in opposite directions and different rotation speeds, the regularity of the inner and outer walls of the quartz crucible during melting is effectively improved, and the roundness of the inner and outer walls of the quartz crucible after melting is improved. In addition, by setting the inner mold and the outer mold in opposite directions and different rotation speeds, the burr rate and burr degree of the high quartz crucible during and after melting can be effectively reduced.

[0021] During melting, the electric heating wires in the outer mold and the inner mold raise the quartz sand in the molding cavity to a set temperature, thereby realizing the melting and molding of the quartz sand.

[0022] Furthermore, the auxiliary component includes a vacuum pump installed on the top surface of the cover body, the cover body is fixedly connected to a vacuum generating tube, the vacuum generating port of the vacuum pump is fixedly connected to the vacuum generating tube, an air pressure probe is fixedly installed on the vacuum generating tube, the cover body is fixedly connected to an injection valve that cooperates with the molding cavity, a heat dissipation cavity is fixedly opened at the axial position of the inner cylinder, a ventilation valve connected to the heat dissipation cavity is fixedly installed on the top surface of the inner cylinder, an axial flow heat dissipation fan is fixedly installed on the inner wall of the heat dissipation cavity, a single-chip microcomputer is installed on the rotating frame, and the data end of the air pressure probe is connected to the data of the single-chip microcomputer.

[0023] The beneficial effect of adopting the above further scheme is that before the melting operation, a sufficient amount of quartz sand raw material is injected into the interior of the molding cavity by setting the injection valve. After a certain amount of quartz sand raw material is injected, the interior of the molding cavity is maintained at a set vacuum degree by setting the vacuum pump.

[0024] When the inside of the molding cavity is maintained at a set vacuum degree, the melting operation of the quartz sand raw material can then be carried out;

[0025] After the quartz crucible is melted and formed, it is first cooled naturally. After the natural cooling setting time, the ventilation valve is opened. After the ventilation valve is opened, the axial flow cooling fan discharges air upward, thereby accelerating the natural cooling of the quartz crucible.

[0026] During melting, the ventilation valve is closed;

[0027] Furthermore, the vibration guide module includes a vibration frame fixedly connected to the outer cylinder, the inner wall of the vibration frame is rotatably connected to a lower sleeve driven by a guide shaft, the lower sleeve is transmission-connected to the outer mold through a chain, the upper sleeve and the side shaft are rotatably connected on the lifting platform, a return spring is provided on the guide shaft and corresponds to the position between the lower sleeve and the upper sleeve, the upper sleeve is driven by the guide shaft, differential bevel gears are installed on the upper sleeve and the side shaft, the two differential bevel gears are meshed with each other, a half-face gear is fixedly installed on the side shaft, a linkage tooth plate transmission-connected to the half-face gear is fixedly installed on the vibration frame, a T-shaped guide rod b is fixedly installed on the vibration frame, and the T-shaped guide rod b is slidably connected to the lifting platform.

[0028] The beneficial effect of adopting the above further scheme is that when the quartz crucible is melted and formed, the guide shaft outputs a constant speed, and after the guide shaft outputs a speed, the vibration frame reciprocates up and down within a set stroke, and after the vibration frame reciprocates up and down within the set stroke, the outer cylinder and the inner cylinder are driven to reciprocate and vibrate within the set stroke;

[0029] After the outer cylinder and the inner cylinder are reciprocated and excited within the set stroke, the quartz sand raw material in the molding cavity is vibrated and compacted. Through the compaction, the density of the quartz sand material during melting and the bubble rate of the quartz sand material during melting are effectively reduced. By achieving the above-mentioned technical effects, the preparation and molding effect of the quartz sand pot can be effectively improved and the defect rate of the quartz sand pot can be reduced.

[0030] Furthermore, the lower sleeve and the upper sleeve are provided with shaft grooves with openings at both ends and slidingly connected to the guide shaft, the cross-sections of the shaft grooves and the guide shaft are both regular polygons, and the bottom surface of the outer mold is fixedly mounted with a driven shaft connected to the chain drive.

[0031] The shaft groove and the regular polygonal cross section of the guide shaft are arranged so that the outer mold can be continuously driven by the guide shaft during the lifting process;

[0032] Furthermore, the vibration guide module also includes a guide frame fixed on the lifting frame, and two limiting guide grooves are provided on the guide frame. A guide bar slidably connected to the limiting guide groove is provided on the outer cylinder and at a position corresponding to each limiting guide groove.

[0033] Furthermore, the ejection mechanism includes a sealing groove opened at the bottom of the outer mold, the sealing groove is provided with an ejection plate, the bottom surface of the ejection plate is fixedly installed with an ejection shaft, the driven shaft is fixedly provided with a guide groove with a bottom opening and linked to the ejection shaft, the cross-sections of the guide groove and the ejection shaft are both regular polygons, the bottom end of the ejection shaft is rotatably connected with an upper ejection seat, the ejection shaft and the position corresponding to the position between the upper ejection seat and the driven shaft are provided with a compression spring, and the frame and the position corresponding to the position directly below the upper ejection seat are provided with a lower ejection seat cooperating with the upper ejection seat.

[0034] The beneficial effect of adopting the above further scheme is that after the quartz crucible is melted, the lifting platform is fully moved down. After the lifting platform is moved down, the lower top seat acts on the upper top seat, and then the quartz crucible in the molding cavity is lifted up. After the quartz crucible is lifted up, the spraying component sprays the barium coating on the inner wall of the quartz crucible. After the spraying is completed, the quartz crucible is clamped by the inner wall of the quartz crucible by the unloading and spraying parts, and then the quartz crucible can be quickly unloaded after molding.

[0035] Furthermore, the unloading and spraying components include an unloading plate fixedly connected to the lifting frame, and a group of unloading clamps distributed in a circular array are slidably connected to the unloading plate, and a transmission pressure plate is provided on the unloading plate. A connecting rod is hinged between the transmission pressure plate and each unloading clamp, a clamping push rod is installed between the transmission pressure plate and the unloading plate, and a spraying assembly is provided on the unloading plate.

[0036] Furthermore, the spray assembly includes a spray ring tube fixed on a feed plate, a group of nozzles distributed in a circular array are installed on the spray ring tube, a paint box is installed on the feed plate, a paint pump is provided inside the paint box, and a paint outlet port of the paint pump is connected to the inner cavity of the spray ring tube through a pipe.

[0037] The beneficial effect of adopting the above further solution is that, when in use, a sufficient amount of barium coating is stored inside the paint box, and then the barium coating can be sprayed and prepared.

[0038] Furthermore, the angle between the axis of the spray ring tube and the axis of the cover body is 90°. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 The overall structural schematic diagram of a quartz crucible preparation device used in a quartz crucible preparation method of the present invention;

[0040] Figure 2 For the present invention Figure 1 A schematic diagram of the local enlarged structure at point A in the middle;

[0041] Figure 3 For the present invention Figure 1 A schematic diagram of the local enlarged structure at B in the middle;

[0042] Figure 4 It is a schematic diagram of the structure of the outer cylinder and the rotating frame of the present invention;

[0043] Figure 5 For the present invention Figure 4 The structural diagram at C in the middle;

[0044] Figure 6 It is a schematic cross-sectional structure diagram of the heat dissipation cavity and the electric rotating table of the present invention;

[0045] Figure 7 For the present invention Figure 6 A schematic diagram of the local enlarged structure at D in the middle;

[0046] Figure 8 For the present invention Figure 6 A schematic diagram of the local enlarged structure at E in the middle;

[0047] Fig. 9 For the present invention Figure 6 Schematic diagram of the local enlarged structure at F in the middle.

[0048] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0049] 1. Frame; 2. First motor; 3. Guide shaft; 4. First screw lifting module; 5. Lifting platform; 6. Outer cylinder; 7. Outer mold; 8. Electric rotating platform; 9. Rotary frame; 10. Second screw lifting module; 11. Lifting frame; 12. Cover; 13. T-shaped guide rod a; 14. Limit spring; 15. Inner cylinder; 16. Heating wire; 17. Inner mold cylinder; 18. Second motor; 19. Vacuum pump; 20. Vacuum generating tube; 21. Air pressure probe; 22. Injection valve; 23. Heat dissipation chamber; 24. Ventilation valve ; 25. Paint box; 26. Axial flow cooling fan; 27. Single chip microcomputer; 28. Vibration frame; 29. ​​Lower bushing; 30. Upper bushing; 31. Side shaft; 32. Return spring; 33. Half-face gear; 34. Linkage gear plate; 35. T-shaped guide rod b; 36. Driven shaft; 37. Guide frame; 38. Ejector plate; 39. Ejector shaft; 40. Upper ejector seat; 41. Compression spring; 42. Lower ejector seat; 43. Unloading plate; 44. Unloading clamp; 45. Transmission pressure plate; 46. Connecting rod; 47. Clamping push rod; 48. Spraying ring tube. DETAILED DESCRIPTION

[0050] The principles and features of the present invention are described below in conjunction with the accompanying drawings. The examples given are only used to explain the present invention and are not used to limit the scope of the present invention.

[0051] The present invention provides the following preferred embodiments

[0052] like Figure 1-9 As shown, a method for preparing a quartz crucible comprises the following steps:

[0053] SS01, mold arrangement, arranging the outer mold 7 and the inner mold 17 in the preparation device of the quartz crucible, and making the outer mold 7 and the inner mold 17 form a molding cavity of the quartz crucible;

[0054] SS02, injection: after step SS01, a certain amount of quartz sand is injected into the molding cavity. After the quartz sand is injected, the interior of the molding cavity is maintained at a set vacuum degree;

[0055] SS03, melting and molding, after step SS02, the quartz crucible preparation device melts and molds the quartz sand in the molding cavity, and then obtains the quartz crucible original body after melting and molding;

[0056] SS04, spraying, spraying a barium coating evenly on the inner wall of the original quartz crucible, and then making a quartz crucible;

[0057] The quartz crucible preparation device includes a frame 1, a guide shaft 3 driven by a first motor 2 is rotatably connected to the frame 1, a first screw lifting module 4 is installed on the frame 1, a lifting platform 5 is transmission-connected to the first screw lifting module 4, a vibration guide module group driven by the guide shaft 3 is installed on the surface of the lifting platform 5, an outer cylinder 6 is transmission-connected to the vibration guide module group, and an outer mold 7 driven by the guide shaft 3 is rotatably connected to the inner wall of the outer cylinder 6;

[0058] The vibration guide module includes a vibration frame 28 fixedly connected to the outer cylinder 6, the inner wall of the vibration frame 28 is rotatably connected to a lower sleeve 29 driven by a guide shaft 3, the lower sleeve 29 is transmission-connected to the outer mold 7 by a chain, an upper sleeve 30 and a side shaft 31 are rotatably connected to the lifting platform 5, a return spring 32 is sleeved on the guide shaft 3 and corresponds to the position between the lower sleeve 29 and the upper sleeve 30, and the upper sleeve 30 is driven by the guide shaft 3;

[0059] The lower sleeve 29 and the upper sleeve 30 are both provided with shaft grooves with openings at both ends and slidingly connected to the guide shaft 3. The cross-sections of the shaft grooves and the guide shaft 3 are both regular polygons. The bottom surface of the outer mold 7 is fixedly mounted with a driven shaft 36 connected to the chain drive.

[0060] The shaft groove and the regular polygonal cross section of the guide shaft rod 3 are arranged so that the outer mold 7 can be continuously driven by the guide shaft rod 3 during the lifting process;

[0061] Differential bevel gears are installed on the upper sleeve 30 and the side shaft 31, and the two differential bevel gears are meshed with each other. A half-face gear 33 is fixedly installed on the side shaft 31, and a linkage gear plate 34 connected to the half-face gear 33 is fixedly installed on the vibration frame 28. A T-shaped guide rod b35 is fixedly installed on the vibration frame 28, and the T-shaped guide rod b35 is slidably connected to the lifting platform 5.

[0062] When the quartz crucible is melted and formed, the guide shaft 3 outputs a constant speed. After the guide shaft 3 outputs a speed, the vibration frame 28 reciprocates up and down within the set stroke. After the vibration frame 28 reciprocates up and down within the set stroke, the outer cylinder 6 and the inner cylinder 15 are driven to reciprocate and vibrate within the set stroke.

[0063] After the outer cylinder 6 and the inner cylinder 15 are reciprocated and excited within the set stroke, the quartz sand raw material in the molding cavity is vibrated and compacted. Through the compaction, the density of the quartz sand material during melting and the bubble rate of the quartz sand material during melting are effectively reduced. By achieving the above-mentioned technical effects, the preparation and molding effect of the quartz casserole can be effectively improved and the defect rate of the quartz casserole can be reduced.

[0064] The vibration guide module also includes a guide frame 37 fixed on the lifting frame 11. Two limiting guide grooves are provided on the guide frame 37. A guide bar slidably connected to the limiting guide groove is provided on the outer cylinder 6 at a position corresponding to each limiting guide groove.

[0065] A material ejection mechanism is installed at the bottom of the outer mold 7;

[0066] The ejection mechanism includes a sealing groove opened at the bottom of the outer mold 7, on which a ejection plate 38 is provided, and a ejection shaft 39 is fixedly installed on the bottom surface of the ejection plate 38. A guide groove with a bottom opening and linked to the ejection shaft 39 is fixedly opened on the driven shaft 36. The cross-sections of the guide groove and the ejection shaft 39 are both regular polygons. The bottom end of the ejection shaft 39 is rotatably connected to an upper ejection seat 40, and a compression spring 41 is sleeved on the ejection shaft 39 and at a position corresponding to the position between the upper ejection seat 40 and the driven shaft 36. A lower ejection seat 42 cooperating with the upper ejection seat 40 is installed on the frame 1 and at a position corresponding to the position directly below the upper ejection seat 40.

[0067] When the quartz crucible is melted, the lifting platform 5 is fully moved down. After the lifting platform 5 is moved down, the lower top seat 42 acts on the upper top seat 40, and then the quartz crucible in the molding cavity is lifted up. After the quartz crucible is lifted up, the spraying component sprays the barium coating on the inner wall of the quartz crucible. After the spraying is completed, the quartz crucible is clamped by the inner wall of the quartz crucible by the material discharge and spraying parts, and then the quartz crucible can be quickly discharged after molding;

[0068] An electric rotating table 8 is installed on the frame 1, a rotating frame 9 is installed on the electric rotating table 8, a second screw lifting module 10 is installed on the rotating frame 9, the second screw lifting module 10 is transmission-connected with a lifting frame 11, and the lifting frame 11 is respectively installed with inner mold components and blanking and spraying components.

[0069] The inner mold component includes a cover body 12, and a group of T-shaped guide rods a13 are fixedly installed on the top surface of the cover body 12, each T-shaped guide rod a13 is slidably connected to the lifting frame 11, and a limit spring 14 is sleeved on each T-shaped guide rod a13 and at the positions corresponding to the two sides of the lifting frame 11. An inner cylinder 15 is fixedly installed on the cover body 12, and electric heating wires 16 are installed inside the outer cylinder 6 and the inner cylinder 15. An inner mold 17 is rotatably connected to the inner cylinder 15, and a molding cavity is provided between the inner mold 17 and the outer mold 7. A second motor 18 is installed on the surface of the cover body 12, and the output shaft end of the second motor 18 is transmission-connected to the inner mold 17 through a belt, and an auxiliary component is installed on the cover body 12.

[0070] When the quartz crucible is melted, the inner mold 17 and the outer mold 7 rotate in opposite directions, and when rotating, the inner mold 17 and the outer mold 7 have different rotation speeds. By setting the inner mold 17 and the outer mold 7 to rotate in opposite directions and at different speeds, the regularity of the inner and outer walls of the quartz crucible during melting is effectively improved, and the roundness of the inner and outer walls of the quartz crucible after melting is improved. In addition, by setting the inner mold 17 and the outer mold 7 to rotate in opposite directions and at different speeds, the burr rate and burr degree of the high quartz crucible during and after melting can be effectively reduced.

[0071] During melting, the electric heating wires 16 in the outer mold 7 and the inner mold 17 raise the quartz sand material in the molding cavity to a set temperature, thereby realizing the melting molding of the quartz sand material.

[0072] The auxiliary components include a vacuum pump 19 installed on the top surface of the cover body 12, a vacuum generating tube 20 is fixedly connected to the cover body 12, the vacuum generating port of the vacuum pump 19 is fixedly connected to the vacuum generating tube 20, an air pressure probe 21 is fixedly installed on the vacuum generating tube 20, an injection valve 22 which cooperates with the molding cavity is fixedly connected to the cover body 12, a heat dissipation cavity 23 is fixedly opened at the axial position of the inner cylinder 15, a ventilation valve 24 which is connected to the heat dissipation cavity 23 is fixedly installed on the top surface of the inner cylinder 15, an axial flow heat dissipation fan 26 is fixedly installed on the inner wall of the heat dissipation cavity 23, a single-chip microcomputer 27 is installed on the rotating frame 9, and the data end of the air pressure probe 21 is connected to the data of the single-chip microcomputer 27.

[0073] Before the melting operation, a sufficient amount of quartz sand raw material is injected into the interior of the molding cavity by setting the injection valve 22. After a certain amount of quartz sand raw material is injected, the interior of the molding cavity is maintained at a set vacuum degree by setting the vacuum pump 19.

[0074] When the inside of the molding cavity is maintained at a set vacuum degree, the melting operation of the quartz sand raw material can then be carried out;

[0075] After the quartz crucible is melted and formed, it is first cooled naturally. After the natural cooling time is set, the ventilation valve 24 is opened. After the ventilation valve 24 is opened, the axial flow cooling fan 26 discharges air upward, thereby accelerating the natural cooling of the quartz crucible.

[0076] During melting, the ventilation valve 24 is in a closed state;

[0077] The unloading and spraying components include an unloading plate 43 fixedly connected to the lifting frame 11, and a group of unloading clamps 44 distributed in a circular array are slidably connected to the unloading plate 43. A transmission pressure plate 45 is provided on the unloading plate 43, and a connecting rod 46 is hinged between the transmission pressure plate 45 and each unloading clamp 44. A clamping push rod 47 is installed between the transmission pressure plate 45 and the unloading plate 43, and a spraying component is provided on the unloading plate 43.

[0078] The spray assembly includes a spray ring tube 48 fixed on a feed plate 43, on which a group of nozzles distributed in a circular array are installed. A paint box 25 is installed on the feed plate 43, and a paint pump is provided inside the paint box 25. The paint outlet port of the paint pump is connected to the inner cavity of the spray ring tube 48 through a pipeline.

[0079] When in use, the paint box 25 stores a sufficient amount of barium paint inside, and then the barium coating can be sprayed and prepared. The angle between the axis of the spray ring tube 48 and the axis of the cover body 12 is 90°.

[0080] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0081] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0082] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A method for preparing a quartz crucible, characterized in that: The following steps are involved: SS01, mold arrangement, arranging the outer mold (7) and the inner mold (17) in a quartz crucible preparation device, so that the outer mold (7) and the inner mold (17) form a molding cavity of the quartz crucible; SS02, injection: after step SS01, a certain amount of quartz sand is injected into the molding cavity. After the quartz sand is injected, the interior of the molding cavity is maintained at a set vacuum degree; SS03, melting and molding, after step SS02, the quartz crucible preparation device melts and molds the quartz sand in the molding cavity, and then obtains the quartz crucible original body after melting and molding; SS04, spraying, spraying a barium coating evenly on the inner wall of the original quartz crucible, and then making a quartz crucible; The quartz crucible preparation device comprises a frame (1), the frame (1) is rotatably connected to a guide shaft (3) driven by a first motor (2), the frame (1) is mounted with a first screw lifting module (4), the first screw lifting module (4) is transmission-connected to a lifting platform (5), the surface of the lifting platform (5) is mounted with a vibration guide module group driven by the guide shaft (3), the vibration guide module group is transmission-connected to an outer cylinder (6), the inner wall of the outer cylinder (6) is rotatably connected to an outer mold (7) driven by the guide shaft (3), a top-feeding mechanism is mounted at the bottom of the outer mold (7), an electric rotating table (8) is mounted on the frame (1), a rotating frame (9) is mounted on the rotating frame (9), a second screw lifting module (10) is transmission-connected to a lifting frame (11) on the second screw lifting module (10), an inner mold component and a blanking and spraying component are respectively mounted on the lifting frame (11); The inner mold component comprises a cover body (12), a group of T-shaped guide rods a (13) are fixedly mounted on the top surface of the cover body (12), each of the T-shaped guide rods a (13) is slidably connected to the lifting frame (11), and a limit spring (14) is sleeved on each of the T-shaped guide rods a (13) and at positions corresponding to both sides of the lifting frame (11); an inner cylinder (15) is fixedly mounted on the cover body (12), and electric heating wires (16) are installed inside the outer cylinder (6) and the inner cylinder (15); an inner mold (17) is rotatably connected to the inner cylinder (15), and a molding cavity is provided between the inner mold (17) and the outer mold (7); a second motor (18) is mounted on the surface of the cover body (12), and an output shaft end of the second motor (18) is transmission-connected to the inner mold (17) via a belt; and an auxiliary component is mounted on the cover body (12); The vibration guide module comprises a vibration frame (28) fixedly connected to the outer cylinder (6); the inner wall of the vibration frame (28) is rotatably connected to a lower sleeve (29) driven by a guide shaft (3); the lower sleeve (29) is transmission-connected to the outer mold (7) via a chain; an upper sleeve (30) and a side shaft (31) are rotatably connected to the lifting platform (5); a return spring (32) is sleeved on the guide shaft (3) and corresponds to the position between the lower sleeve (29) and the upper sleeve (30); The upper shaft sleeve (30) is driven by the guide shaft (3); the upper shaft sleeve (30) and the side shaft (31) are both provided with differential bevel gears, the two differential bevel gears meshing with each other; a half-face gear (33) is fixedly provided on the side shaft (31); a linkage toothed plate (34) drivingly connected to the half-face gear (33) is fixedly provided on the vibration frame (28); a T-shaped guide rod b (35) is fixedly provided on the vibration frame (28); and the T-shaped guide rod b (35) is slidably connected to the lifting platform (5); The inner mold (17) and the outer mold (7) rotate in opposite directions and at different speeds.

2. The method for preparing a quartz crucible according to claim 1, characterized in that: The auxiliary component comprises a vacuum pump (19) mounted on the top surface of the cover body (12); a vacuum generating tube (20) is fixedly connected to the cover body (12); a vacuum generating port of the vacuum pump (19) is fixedly connected to the vacuum generating tube (20); a pressure probe (21) is fixedly mounted on the vacuum generating tube (20); an injection valve (22) matched with a molding cavity is fixedly connected to the cover body (12); a heat dissipation cavity (23) is fixedly opened at an axial position of the inner cylinder (15); a ventilation valve (24) connected to the heat dissipation cavity (23) is fixedly mounted on the top surface of the inner cylinder (15); an axial heat dissipation fan (26) is fixedly mounted on the inner wall of the heat dissipation cavity (23); a single chip microcomputer (27) is mounted on the rotary frame (9); and a data end of the pressure probe (21) is data-connected to the single chip microcomputer (27).

3. The method for preparing a quartz crucible according to claim 2, characterized in that: The lower shaft sleeve (29) and the upper shaft sleeve (30) are each provided with a shaft groove with both ends open and slidably connected to the guide shaft rod (3); the cross-sections of the shaft groove and the guide shaft rod (3) are both regular polygons; and a driven shaft (36) connected to a chain drive is fixedly mounted on the bottom surface of the outer mold (7).

4. The method for preparing a quartz crucible according to claim 3, characterized in that: The vibration guide module also includes a guide frame (37) fixed on the lifting frame (11), the guide frame (37) being provided with two limit guide grooves, and a guide bar slidably connected to the limit guide groove is provided on the outer cylinder (6) at a position corresponding to each limit guide groove.

5. The method for preparing a quartz crucible according to claim 4, characterized in that: The ejection mechanism comprises a sealing groove formed at the bottom of the outer mold (7), the sealing groove being provided with an ejection plate (38), the bottom surface of the ejection plate (38) being fixedly provided with an ejection shaft (39), the driven shaft (36) being fixedly provided with a guide groove with a bottom opening and linked to the ejection shaft (39), the cross-sections of the guide groove and the ejection shaft (39) being both regular polygons, the bottom end of the ejection shaft (39) being rotatably connected with an upper ejection seat (40), a compression spring (41) being sleeved on the ejection shaft (39) and corresponding to a position between the upper ejection seat (40) and the driven shaft (36), and a lower ejection seat (42) cooperating with the upper ejection seat (40) being installed on the frame (1) and corresponding to a position directly below the upper ejection seat (40).

6. The method for preparing a quartz crucible according to claim 5, characterized in that: The material unloading and spraying components include a material unloading plate (43) fixedly connected to the lifting frame (11), a group of material unloading clamps (44) distributed in a circular array are slidably connected to the material unloading plate (43), a transmission pressure plate (45) is provided on the material unloading plate (43), a connecting rod (46) is hinged between the transmission pressure plate (45) and each material unloading clamp (44), a clamping push rod (47) is installed between the transmission pressure plate (45) and the material unloading plate (43), and a spraying assembly is provided on the material unloading plate (43).

7. The method for preparing a quartz crucible according to claim 6, characterized in that: The spray assembly comprises a spray ring tube (48) fixed on a feed plate (43), a group of spray heads distributed in a circular array being mounted on the spray ring tube (48), a paint box (25) being mounted on the feed plate (43), a paint pump being arranged inside the paint box (25), and a paint outlet port of the paint pump being connected to an inner cavity of the spray ring tube (48) via a pipeline.

8. The method for preparing a quartz crucible according to claim 7, characterized in that: The angle between the axis of the spray ring tube (48) and the axis of the cover body (12) is 90°.

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