A double-head die bonding device

Abstract

The present invention provides a double-head die bonding device, including a wafer expansion disk and a workbench. The high-efficiency double-head die bonding device further includes a swing arm, a conveying rail, a material collecting mechanism and a swing arm driving mechanism. The workbench is slidably mounted on the conveying rail through a workbench adjusting mechanism. The swing arm driving mechanism can drive the swing arm to move between the wafer expansion disk and the workbench, and take out the wafers on the wafer blue film and install them on the wafers in the graphite disk. By slidably arranging the workbench on the conveying rail, the operations of taking wafers, die bonding and material collecting can be carried out efficiently, and the position accuracy of taking wafers and die bonding is relatively high. By driving two swing arms to rotate through a turntable, while the first swing arm performs die bonding operation, the second swing arm performs wafer taking operation, further improving the production efficiency and reducing the production cost. At the same time, the noise generated by the vertical adjusting mechanism of the eccentric wheel and the support shaft is relatively small, avoiding damage to the physical and mental health of operators caused by excessive noise.

Description

[0001] This application is a divisional application with application number 2019112920568, application date December 16, 2019, and invention name “A High-efficiency Double-headed Crystal Bonding Device”. Technical Field

[0002] The invention relates to the field of electronic component manufacturing, and in particular to a double-head die-bonding device. Background Art

[0003] In the process of packaging and bonding blue film wafers, the wafers are taken out from the blue film and mounted on the material sheets of the graphite disk by a swing arm, which is generally divided into multiple processes of crystal removal, crystal bonding and material collection. In the prior art, manual suction cups are generally used, but this method is not efficient and has high labor costs. There is also an automatic grasping method using a swing arm, in which the wafers on the blue film are picked up onto the graphite disk by the rotation of the swing arm. In the prior art, a single swing arm structure is generally used. This method has limited improvement compared to the manual method, and the existing swing arm structure generates relatively large noise, which has a certain impact on the physical and mental health of the operator. Summary of the invention

[0004] The technical problem to be solved by the present invention is that the manual suction cup and single swing arm structure in the prior art are inefficient and costly, and generate a lot of noise, which has a certain impact on the physical and mental health of the operators. The present invention provides a double-headed crystal bonding device to solve the above problems.

[0005] The technical solution adopted by the present invention to solve its technical problems is: a double-headed crystal bonding device, including a crystal expansion plate for placing a blue film of wafers to be packaged; a workbench for placing a graphite plate, in which the material sheets to be packaged are placed; the high-efficiency double-headed crystal bonding device also includes a swing arm, a conveyor rail, a material receiving mechanism and a swing arm driving mechanism, the conveyor rail is arranged on a fixed bottom plate, the workbench is slidably installed on the conveyor rail through a workbench adjustment mechanism, the swing arm driving mechanism can drive the swing arm to move between the crystal expansion plate and the workbench, and take out the wafers on the wafer blue film and install them on the material sheets in the graphite plate, and the material receiving mechanism is arranged on the bottom plate, and is used to take out the packaged graphite plate from the workbench.

[0006] Further: the number of the swing arms is two, the two swing arms are respectively a first swing arm and a second swing arm, the swing arm driving mechanism includes a turntable and a first drive motor, the first swing arm and the second swing arm are symmetrically arranged on the left and right sides of the turntable, the first drive motor is arranged on a fixed frame, the output shaft of the first drive motor is fixedly connected to the turntable and can drive the turntable to rotate to adjust the positions of the first swing arm and the second swing arm in the rotation direction, the swing arm driving mechanism also includes a first vertical adjustment unit and a second vertical adjustment unit, the first swing arm is movably arranged on the turntable through the first vertical adjustment unit, the first vertical adjustment unit can drive the first swing arm to move in the vertical direction, the second swing arm is movably arranged on the turntable through the second vertical adjustment unit, and the second vertical adjustment unit can drive the second swing arm to move in the vertical direction.

[0007] Further: the first vertical adjustment unit includes a support shaft, a first connecting rod, a first guide rail and a first slider, the first guide rail is arranged on the turntable in the vertical direction, the first slider is slidably arranged on the first guide rail and is fixedly connected to the first swing arm, the support shaft is movably installed on the turntable in the vertical direction, the bottom of the support shaft is rotatably connected to one end of the first connecting rod, the other end of the first connecting rod is fixedly connected to the first slider, and the up and down movement of the support shaft can drive the first swing arm to move up and down; the first vertical adjustment unit also includes a second connecting rod, a first crank, a first eccentric wheel and a second driving motor, the second driving motor is fixedly arranged on the frame, the output shaft of the second driving motor is fixedly connected to the first eccentric wheel, one end of the first crank is hinged to the first eccentric wheel, the other end of the first crank is hinged to one end of the second connecting rod, the other end of the second connecting rod is rotatably connected to the top of the support shaft, and the first eccentric wheel rotates under the drive of the second driving motor to drive the support shaft to move up and down.

[0008] Further: the second vertical adjustment unit includes a connecting shaft, a third connecting rod, a second guide rail and a second slider, a mounting hole is provided in the support shaft, the connecting shaft is inserted into the mounting hole from top to bottom and can move up and down along the axis of the mounting hole, the second guide rail is provided on the turntable in the vertical direction, the second slider is slidably provided on the second guide rail and is fixedly connected to the second swing arm, the bottom of the support shaft is rotatably connected to one end of the third connecting rod, the other end of the third connecting rod is fixedly connected to the second slider, and the up and down movement of the connecting shaft can drive the second swing arm to move up and down; the second vertical adjustment unit also includes a fourth connecting rod, a second crank, a second eccentric wheel and a third drive motor, the third drive motor is fixedly provided on the frame, the output shaft of the third drive motor is fixedly connected to the second eccentric wheel, one end of the second crank is hinged to the second eccentric wheel, the other end of the second crank is hinged to one end of the fourth connecting rod, the other end of the fourth connecting rod is rotatably connected to the top of the connecting shaft, and the second eccentric wheel rotates under the drive of the third drive motor to drive the connecting shaft to move up and down, thereby driving the second swing arm to move up and down.

[0009] Furthermore: the material receiving mechanism includes a connecting plate and a suction nozzle arranged on the connecting plate, and the suction nozzle can absorb and lift the graphite disk on the workbench; the material receiving mechanism also includes a driving wheel, a driven wheel, a fourth driving motor, a third slider, a third guide rail and a first linear motor, the driving wheel and the driven wheel are arranged on the frame and connected by a synchronous belt, the fourth driving motor is arranged on the frame, the driving shaft of the fourth driving motor is connected to the driving wheel, the third guide rail is fixedly arranged on the frame and parallel to the synchronous belt, the third slider is fixedly connected to the synchronous belt and can move along the third guide rail, the slide rail of the first linear motor is arranged in the vertical direction and fixedly connected to the third slider, the mover seat of the first linear motor is fixedly connected to the connecting plate, and the first linear motor can drive the connecting plate to move up and down when it works.

[0010] Further: the workbench adjustment mechanism includes a second linear motor and a third linear motor, the second linear motor is arranged on the conveying rail and can move horizontally along the conveying rail, the slide rail of the third linear motor is fixedly arranged on the mover seat of the second linear motor in the horizontal direction, and is arranged perpendicular to the conveying rail, and the upper end of the mover seat of the third linear motor is fixedly connected to the workbench.

[0011] Furthermore: a ball retainer is arranged in the mounting hole, and the inner wall of the ball retainer is fitted with the outer wall of the connecting shaft.

[0012] The beneficial effect of the present invention is that a double-headed crystal fixing device of the present invention can efficiently perform crystal retrieval, crystal fixing and material collection operations by sliding the worktable on the conveyor rail, and the position accuracy of crystal retrieval and crystal fixing is high. The two swing arms are driven to rotate by the turntable. While the first swing arm performs the crystal fixing operation, the second swing arm performs the crystal retrieval operation, which further improves the production efficiency and reduces the production cost. At the same time, the vertical adjustment mechanism of the eccentric wheel and the support shaft generates less noise, thereby avoiding damage to the physical and mental health of the operator caused by excessive noise. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0014] Figure 1 It is a structural schematic diagram of a double-headed die-bonding device of the present invention;

[0015] Figure 2 It is a structural schematic diagram of the swing arm driving mechanism;

[0016] Figure 3 is a cross-sectional view of the swing arm drive mechanism;

[0017] Figure 4 It is a structural diagram of the material receiving mechanism;

[0018] Figure 5 It is a structural diagram of the workbench adjustment mechanism;

[0019] Figure 6 for Figure 3 A is an enlarged view of the middle image.

[0020] In the figure, 1, the crystal expansion plate, 2, the workbench, 3, the conveying rail, 4, the bottom plate, 5, the first swing arm, 6, the second swing arm, 7, the turntable, 8, the first drive motor, 9, the frame, 10, the support shaft, 11, the first connecting rod, 12, the first guide rail, 13, the first slider, 14, the second connecting rod, 15, the first crank, 16, the first eccentric wheel, 17, the second drive motor, 20, the connecting shaft, 21, the third connecting rod, 22, the second guide rail, 23, the second slider, 24, the fourth connecting rod, 25, the second crank, 26, the second eccentric wheel, 27, the third drive motor, 28, the ball retainer, 30, the connecting plate, 31, the suction nozzle, 32, the driving wheel, 33, the driven wheel, 34, the fourth drive motor, 35, the third slider, 36, the third guide rail, 37, the first linear motor, 40, the second linear motor, 41, the third linear motor. DETAILED DESCRIPTION

[0021] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and are not to be construed as limitations of the present invention. On the contrary, embodiments of the present invention include all changes, modifications and equivalents that fall within the spirit and connotation of the appended claims.

[0022] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0023] In addition, the terms "first", "second", etc. are used for descriptive purposes only and are not to be understood as indicating or implying relative importance. In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. In addition, in the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0024] Any process or method description in a flowchart or otherwise described herein may be understood to represent a module, segment or portion of code that includes one or more executable instructions for implementing the steps of a specific logical function or process, and the scope of the preferred embodiments of the present invention includes alternative implementations in which functions may not be performed in the order shown or discussed, including performing functions in a substantially simultaneous manner or in the reverse order depending on the functions involved, which should be understood by those skilled in the art to which the embodiments of the present invention belong.

[0025] like Figure 1As shown, the present invention provides a double-headed crystal bonding device, including a crystal expansion plate 1, used for placing a wafer blue film to be packaged; a workbench 2, used for placing a graphite plate, in which a sheet to be packaged is placed; the high-efficiency double-headed crystal bonding device also includes a swing arm, a conveyor rail 3, a material receiving mechanism and a swing arm driving mechanism, the conveyor rail 3 is arranged on a fixed bottom plate 4, the workbench 2 is slidably installed on the conveyor rail 3 through a workbench adjustment mechanism, the swing arm driving mechanism can drive the swing arm to move between the crystal expansion plate 1 and the workbench 2, and take out the wafer on the wafer blue film and install it on the sheet in the graphite plate, the material receiving mechanism is arranged on the bottom plate 4, and is used to take out the packaged graphite plate from the workbench 2.

[0026] During operation, the workbench adjustment mechanism drives the workbench 2 to move along the conveyor rail 3 into the moving range of the swing arm, and the swing arm driving mechanism drives the swing arm to install the wafer on the crystal expansion plate 1 onto the material sheet on the workbench 2, thereby completing the crystal fixing work. Then the workbench adjustment mechanism drives the workbench 2 to move along the conveyor rail 3 to the material receiving mechanism, and the material receiving mechanism takes the packaged graphite plate out of the workbench 2.

[0027] Combination Figure 2 and Figure 3 As shown, there are two swing arms, which are respectively a first swing arm 5 and a second swing arm 6. The swing arm driving mechanism includes a turntable 7 and a first drive motor 8. The first swing arm 5 and the second swing arm 6 are symmetrically arranged on the left and right sides of the turntable 7. The first drive motor 8 is arranged on a fixed frame 9. The output shaft of the first drive motor 8 is fixedly connected to the turntable 7 and can drive the turntable 7 to rotate to adjust the positions of the first swing arm 5 and the second swing arm 6 in the rotation direction. The swing arm driving mechanism also includes a first vertical adjustment unit and a second vertical adjustment unit. The first swing arm 5 is movably arranged on the turntable 7 through the first vertical adjustment unit. The first vertical adjustment unit can drive the first swing arm 5 to move in the vertical direction. The second swing arm 6 is movably arranged on the turntable 7 through the second vertical adjustment unit. The second vertical adjustment unit can drive the second swing arm 6 to move in the vertical direction.

[0028] During operation, the first drive motor 8 drives the turntable 7 to rotate, adjusts the first swing arm 5 to the position of the crystal expansion plate 1, and the first vertical adjustment mechanism drives the first swing arm 5 to move in the vertical direction to perform crystal retrieval operation. Then the first drive motor 8 drives the turntable 7 to rotate again, adjusts the first swing arm 5 to the position of the workbench 2, and the first vertical adjustment mechanism drives the first swing arm 5 to move in the vertical direction to perform crystal fixing operation. At the same time, the second swing arm 6 is adjusted to the position of the crystal expansion plate 1, and the second vertical adjustment mechanism drives the second swing arm 6 to move in the vertical direction to perform crystal retrieval operation, thereby achieving the purpose of double-head efficient crystal retrieval and fixation.

[0029] Combination Figure 6 As shown, the first vertical adjustment unit includes a support shaft 10, a first connecting rod 11, a first guide rail 12 and a first slider 13, the first guide rail 12 is arranged on the turntable 7 along the vertical direction, the first slider 13 is slidably arranged on the first guide rail 12 and is fixedly connected to the first swing arm 5, the support shaft 10 is movably installed on the turntable 7 along the vertical direction, the bottom of the support shaft 10 is rotatably connected to one end of the first connecting rod 11, the other end of the first connecting rod 11 is fixedly connected to the first slider 13, and the up and down movement of the support shaft 10 can drive the first swing arm 5 to move up and down; the first vertical The adjusting unit also includes a second connecting rod 14, a first crank 15, a first eccentric wheel 16 and a second drive motor 17. The second drive motor 17 is fixedly arranged on the frame 9. The output shaft of the second drive motor 17 is fixedly connected to the first eccentric wheel 16. One end of the first crank 15 is hinged to the first eccentric wheel 16. The other end of the first crank 15 is hinged to one end of the second connecting rod 14. The other end of the second connecting rod 14 is rotatably connected to the top of the support shaft 10. The first eccentric wheel 16 rotates under the drive of the second drive motor 17 to drive the support shaft 10 to move up and down.

[0030] The second vertical adjustment unit includes a connecting shaft 20, a third connecting rod 21, a second guide rail 22 and a second slider 23. A mounting hole is provided in the support shaft 10. The connecting shaft 20 is inserted into the mounting hole from top to bottom and can move up and down along the axial direction of the mounting hole. The second guide rail 22 is provided on the turntable 7 along the vertical direction. The second slider 23 is slidably provided on the second guide rail 22 and is fixedly connected to the second swing arm 6. The bottom of the support shaft 10 is rotatably connected to one end of the third connecting rod 21, and the other end of the third connecting rod 21 is fixedly connected to the second slider 23. The up and down movement of the connecting shaft 20 can drive the second swing arm 6 to move up and down. The second vertical adjustment unit also includes a fourth connecting rod 24, a second crank 25, a second eccentric wheel 26 and a third drive motor 27. The third drive motor 27 is fixedly arranged on the frame 9. The output shaft of the third drive motor 27 is fixedly connected to the second eccentric wheel 26. One end of the second crank 25 is hinged to the second eccentric wheel 26. The other end of the second crank 25 is hinged to one end of the fourth connecting rod 24. The other end of the fourth connecting rod is rotatably connected to the top of the connecting shaft 20. The second eccentric wheel 26 rotates under the drive of the third drive motor 27 to drive the connecting shaft 20 to move up and down, thereby driving the second swing arm 6 to move up and down.

[0031] The first eccentric wheel 16 is rotated to drive the support shaft 10 to move up and down, thereby driving the first swing arm 5 to perform crystal retrieval and crystal bonding operations; at the same time, the second eccentric wheel 26 is rotated to drive the connecting shaft 20 to move up and down, thereby driving the second swing arm 6 to perform crystal retrieval and crystal bonding operations. The eccentric wheel driving method has good position repeatability, and at the same time, this adjustment method generates less noise, thereby avoiding excessive noise causing physical and psychological harm to the operator. The adjustment accuracy is higher by driving the eccentric wheel to rotate through the driving motor. By controlling the rotation amount of the driving motor, the movement parameters of the swing arm in the vertical direction can be accurately controlled, thereby achieving accurate control of the swing arm's position in the vertical direction.

[0032] Combination Figure 4 As shown, the material receiving mechanism includes a connecting plate 30 and a suction nozzle 31 arranged on the connecting plate 30, and the suction nozzle 31 can absorb and lift the graphite disk on the workbench 2; the material receiving mechanism also includes a driving wheel 32, a driven wheel 33, a fourth driving motor 34, a third slider 35, a third guide rail 36 and a first linear motor 37, the driving wheel 32 and the driven wheel 33 are arranged on the frame 9 and are connected by a synchronous belt, the fourth driving motor 34 is arranged on the frame 9, the driving shaft of the fourth driving motor 34 is connected to the driving wheel 32, the third guide rail 36 is fixedly arranged on the frame 9 and parallel to the synchronous belt, the third slider 35 is fixedly connected to the synchronous belt and can move along the third guide rail 36, the slide rail of the first linear motor 37 is arranged in the vertical direction and fixedly connected to the third slider 35, the mover seat of the first linear motor 37 is fixedly connected to the connecting plate 30, and the first linear motor 37 can drive the connecting plate 30 to move up and down when it works.

[0033] The fourth driving motor 34 is used to rotate and drive the connecting plate 30 to move in the horizontal direction. This adjustment method has high adjustment accuracy. The vertical adjustment distance of the connecting plate 30 is driven by the first linear motor 37. This adjustment mechanism has good self-locking ability and can effectively maintain the current vertical position to avoid vertical displacement that affects the suction nozzle 31 from adsorbing the graphite disk.

[0034] Combination Figure 5As shown, the workbench adjustment mechanism includes a second linear motor 40 and a third linear motor 41. The second linear motor 40 is arranged on the conveying rail 3 and can move horizontally along the conveying rail 3. The slide rail of the third linear motor 41 is fixedly arranged on the mover seat of the second linear motor 40 in the horizontal direction and is arranged perpendicular to the conveying rail 3. The upper end of the mover seat of the third linear motor 41 is fixedly connected to the workbench 2. Through the cooperation of the second linear motor 40 and the third linear motor 41, the graphite disk on the workbench 2 can be moved within the motion range of the swing arm and the suction nozzle 31, which is convenient for the swing arm to perform crystal fixing work and the suction nozzle 31 to perform material receiving work.

[0035] A ball retainer 28 is provided in the mounting hole, and the inner wall of the ball retainer 28 is fitted with the outer wall of the connecting shaft 20. On the one hand, the ball retainer 28 can support the connecting shaft 20 in the radial direction to prevent the connecting shaft 20 from being deflected, shaken, etc., which causes interference with the support shaft 10, thereby improving the rigidity and stability of the connecting shaft 20 and greatly improving its load-bearing capacity. At the same time, the balls on the ball retainer 28 provide the connecting shaft 20 with sufficient degrees of freedom, so that the connecting shaft 20 can move smoothly up and down in the vertical direction.

[0036] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0037] Based on the above ideal embodiments of the present invention, the relevant staff can make various changes and modifications without departing from the technical concept of the present invention through the above description. The technical scope of the present invention is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A double-head die bonding device, comprising a wafer expansion disk (1) for placing the wafer blue film to be encapsulated; a workbench (2) for placing a graphite disk, and a wafer to be encapsulated is placed in the graphite disk; It is characterized in that: The high-efficiency double-head die bonding device further comprises a swing arm, a conveying rail (3), a material collecting mechanism and a swing arm driving mechanism. The conveying rail (3) is arranged on a fixed bottom plate (4). The workbench (2) is slidably installed on the conveying rail (3) through a workbench adjusting mechanism. The swing arm driving mechanism can drive the swing arm to move between the wafer expansion disk (1) and the workbench (2), take out the wafer on the wafer blue film and install it on the wafer in the graphite disk. The material collecting mechanism is arranged on the bottom plate (4) and is used to take out the encapsulated graphite disk from the workbench (2); The number of the swing arms is two. The two swing arms are respectively a first swing arm (5) and a second swing arm (6). The swing arm driving mechanism comprises a turntable (7) and a first driving motor (8). The first swing arm (5) and the second swing arm (6) are symmetrically arranged on the left and right sides of the turntable (7). The first driving motor (8) is arranged on a fixed frame (9). The output shaft of the first driving motor (8) is fixedly connected to the turntable (7) and can drive the turntable (7) to rotate to adjust the positions of the first swing arm (5) and the second swing arm (6) in the rotation direction. The swing arm driving mechanism further comprises a first vertical adjustment unit and a second vertical adjustment unit. The first swing arm (5) is movably arranged on the turntable (7) through the first vertical adjustment unit. The first vertical adjustment unit can drive the first swing arm (5) to move in the vertical direction. The second swing arm (6) is movably arranged on the turntable (7) through the second vertical adjustment unit. The second vertical adjustment unit can drive the second swing arm (6) to move in the vertical direction; The first vertical adjustment unit includes a support shaft (10), a first connecting rod (11), a first guide rail (12) and a first slider (13). The first guide rail (12) is arranged on the turntable (7) in the vertical direction. The first slider (13) is slidably arranged on the first guide rail (12) and is fixedly connected to the first swing arm (5). The support shaft (10) is movably installed on the turntable (7) in the vertical direction. The bottom of the support shaft (10) is rotatably connected to one end of the first connecting rod (11). The other end of the first connecting rod (11) is fixedly connected to the first slider (13). The up and down movement of the support shaft (10) can drive the up and down movement of the first swing arm (5). The first vertical adjustment unit further includes a second connecting rod (14), a first crank (15), a first eccentric wheel (16) and a second drive motor (17). The second drive motor (17) is fixedly arranged on the frame (9). The output shaft of the second drive motor (17) is fixedly connected to the first eccentric wheel (16). One end of the first crank (15) is hinged to the first eccentric wheel (16). The other end of the first crank (15) is hinged to one end of the second connecting rod (14). The other end of the second connecting rod (14) is rotatably connected to the top of the support shaft (10). The rotation of the first eccentric wheel (16) driven by the second drive motor (17) can drive the up and down movement of the support shaft (10). The workbench adjustment mechanism includes a second linear motor (40) and a third linear motor (41). The second linear motor (40) is arranged on the conveying rail (3) and can move horizontally along the conveying rail (3). The slide rail of the third linear motor (41) is fixedly arranged on the moving seat of the second linear motor (40) in the horizontal direction and is perpendicular to the conveying rail (3). The upper end of the moving seat of the third linear motor (41) is fixedly connected to the workbench (2). The material receiving mechanism includes a connecting plate (30) and a suction nozzle (31) provided on the connecting plate (30). The suction nozzle (31) can adsorb and lift the graphite plate on the workbench (2). The material receiving mechanism further includes a driving wheel (32), a driven wheel (33), a fourth driving motor (34), a third slider (35), a third guide rail (36), and a first linear motor (37). The driving wheel (32) and the driven wheel (33) are arranged on the frame (9) and connected by a synchronous belt. The fourth driving motor (34) is arranged on the frame (9), and the driving shaft of the fourth driving motor (34) is connected to the driving wheel (32). The third guide rail (36) is fixedly arranged on the frame (9) and is parallel to the synchronous belt. The third slider (35) is fixedly connected to the synchronous belt and can move along the third guide rail (36). The slide rail of the first linear motor (37) is arranged in the vertical direction and is fixedly connected to the third slider (35). The moving seat of the first linear motor (37) is fixedly connected to the connecting plate (30). When the first linear motor (37) works, it can drive the connecting plate (30) to move up and down.

2. A double-head die bonding device according to claim 1, characterized in that: The second vertical adjustment unit includes a connecting shaft (20), a third connecting rod (21), a second guide rail (22), and a second slider (23). An installation hole is provided in the support shaft (10). The connecting shaft (20) is inserted into the installation hole from top to bottom and can move up and down along the axial direction of the installation hole. The second guide rail (22) is arranged on the turntable (7) in the vertical direction. The second slider (23) is slidably arranged on the second guide rail (22) and is fixedly connected to the second swinging arm (6). The bottom of the support shaft (10) is rotatably connected to one end of the third connecting rod (21). The other end of the third connecting rod (21) is fixedly connected to the second slider (23). When the connecting shaft (20) moves up and down, it can drive the second swinging arm (6) to move up and down. The second vertical adjustment unit further includes a fourth connecting rod (24), a second crank (25), a second eccentric wheel (26), and a third driving motor (27). The third driving motor (27) is fixedly arranged on the frame (9). The output shaft of the third driving motor (27) is fixedly connected to the second eccentric wheel (26). One end of the second crank (25) is hinged to the second eccentric wheel (26). The other end of the second crank (25) is hinged to one end of the fourth connecting rod (24). The other end of the fourth connecting rod is rotatably connected to the top of the connecting shaft (20). When the second eccentric wheel (26) rotates driven by the third driving motor (27), it can drive the connecting shaft (20) to move up and down, and further drive the second swinging arm (6) to move up and down.

Images