A PCB plasma processing equipment

Abstract

The invention relates to the technical field of printed circuit board production, and specifically discloses a PCB plasma processing device, comprising an operation box and a processing box, wherein the processing box is fixed on the top of the operation box, and further comprising: a liftable plasma spray gun, which is installed inside the processing box; a ring gear, a sun gear, a motor and a planetary gear, wherein the ring gear is fixed inside the operation box, the sun gear is arranged inside the ring gear, and the motor is fixed at the end of the sun gear. Through the arrangement of the sun gear, the planetary gear and the ring gear, and the fixture is installed on the top of the planetary gear, multiple planetary gears and multiple clamping stations on the fixture can simultaneously install multiple copper clad plates, and the plasma spray gun can also simultaneously process multiple copper clad plates during processing, which can effectively improve the processing efficiency of the copper clad plates, and more redundant time can be freed up during the processing process to process other things, which can effectively improve the time utilization rate of personnel.

Description

Technical Field

[0001] The invention relates to the technical field of printed circuit board production, in particular to PCB plasma processing equipment. Background Art

[0002] Plasma is different from the three common forms of matter: solid, liquid and gas. It is a quasi-neutral electron flow and an ionized gas with roughly equal densities of positive ions and electrons. In the plasma state, electrons and atoms, neutral atoms, molecules and ions that are freed from atomic constraints move in disorder and have very high energy. Therefore, it can be used for surface treatment of materials such as plastics, metals, glass and rubber.

[0003] In order to improve the adhesion between the copper clad laminate and the copper foil during the PCB production process, the copper clad laminate generally needs to be roughened by plasma after cutting to increase the roughness of the copper clad laminate surface, making the copper foil and the copper clad laminate bond more firmly, thereby improving the durability of the printed circuit board.

[0004] The existing processing equipment is generally a three-axis robotic arm. The plasma spray gun is installed on the X-axis, and the copper clad laminate to be processed is placed on the Y-axis. The copper clad laminate is processed by the mutual movement of the X-axis and the Y-axis. However, during the processing, after the copper clad laminate is processed, it is necessary to manually replace the unprocessed copper clad laminate. Therefore, a dedicated operator is required to supervise the loading situation. This results in the time when the loading and unloading is not carried out being scattered and not concentrated enough, making it difficult to free up time to handle other matters, and the utilization rate of personnel is relatively low.

[0005] To this end, we propose a PCB plasma processing device. Summary of the invention

[0006] The object of the present invention is to provide a PCB plasma processing device to solve the problem that the idle time of the existing processing method proposed in the above background technology is short and scattered, and it is difficult to use the idle time to process other matters.

[0007] To achieve the above object, the present invention provides the following technical solution: a PCB plasma processing device, comprising an operating box and a processing box, wherein the processing box is fixed on the top of the operating box, and further comprising:

[0008] A plasma spray gun that can be raised and lowered and installed inside the treatment box;

[0009] A ring gear, a sun gear, a motor and a planetary gear, wherein the ring gear is fixed inside the operating box, the sun gear is arranged inside the ring gear, the motor is fixed at the end of the sun gear, and the planetary gear is meshed between the ring gear and the sun gear;

[0010] A fixture, a fixing rod and a planet carrier, wherein the fixing rod is fixed inside the planet gear, the fixture is fixed on the top of the fixing rod, the planet carrier is located at the bottom of the sun gear and rotates inside the running box, and the bottom of the fixing rod rotates inside the planet carrier;

[0011] The connecting mechanism is installed between the plasma spray gun and the planet carrier. When the planet carrier rotates, the connecting mechanism drives the height of the plasma spray gun to gradually decrease.

[0012] Among them, a through hole is opened at the bottom of the processing box, a ring is arranged in the through hole, a gap is formed between the ring and the through hole, a fixed rod revolves along the sun gear in the gap, a connecting rod is fixed to the top of the ring, the top of the connecting rod is fixed to the top of the processing box, and a movable plate is fixedly installed at the bottom of the plasma spray gun, the movable plate is slidably installed on the inner side of the connecting rod, and support members are installed on both sides of the movable plate, and the support members support the sliding plasma spray gun.

[0013] A fixing sleeve is fixedly installed on the outer side of the fixing rod, a universal ball is fixedly installed on the side of the fixing sleeve, a rolling groove is opened on the inner side of the notch, and the universal ball is located in the rolling groove.

[0014] Among them, the clamp includes a cylinder fixed on the top of the fixing rod, and mounting plates are evenly installed on the outer wall of the cylinder. Limiting rods are slidably installed on the sides of the mounting plates, and limiting blocks are fixedly installed on the ends of the limiting rods. The limiting blocks are slidably installed on the outside of the mounting plate, and a first spring is sleeved on the outside of the limiting rod.

[0015] The support member includes a first piston cylinder, a piston rod and a second spring. The bottom of the first piston cylinder is fixed to the top of the ring, the second spring is fixed inside the first piston cylinder, the piston rod is slidably installed inside the first piston cylinder, and the top of the piston rod is fixed to the bottom of the movable plate.

[0016] Among them, the connecting mechanism includes a first screw fixed at the bottom of the planetary carrier, a first cross plate is rotatably installed on the outer side of the first screw, a first threaded sleeve is threadedly connected to the bottom of the first screw, a second cross plate is slidably installed on the outer side of the first threaded sleeve, a second piston cylinder is slidably installed on the outer side of the first threaded sleeve, and a connecting tube is connected between the second piston cylinder and the first piston cylinder.

[0017] Among them, a detection mechanism is installed on the cylinder, which detects the length and width of the copper-clad board. An adjustment mechanism is installed in the processing box, which adaptively adjusts the rotation speed of the sun gear and the working time of the motor according to the detection results of the detection mechanism.

[0018] The detection mechanism includes a pointer, an indicator rod and scale lines. The pointer is fixed on the outside of the limit rod, the indicator rod is fixed on the top of the cylinder, and the scale lines are sprayed on both sides of the indicator rod.

[0019] The adjusting mechanism includes a connecting piece, a plurality of pinion gears, a second screw, a second threaded sleeve and a controller, the connecting piece is installed between the motor and the sun gear, the pinion gear is coaxially fixed with the sun gear, the second screw is rotatably installed at the bottom of the pinion gear, the second threaded sleeve is threadedly connected to the outside of the second screw, and the bottom of the second screw is rotatably installed at the top of the planet carrier;

[0020] The controller is fixed on the top of the second horizontal plate, and the controller controls the working time of the motor.

[0021] The connecting part includes a sleeve, a slide rod and a clamping block. The sleeve is fixed to the motor shaft end, the slide rod is fixed to the top of the sun gear, the clamping block is fixed to the outside of the slide rod, and the slide rod is slidably installed in the sleeve through the clamping block.

[0022] The present invention has at least the following beneficial effects:

[0023] By setting up the sun gear, planetary gear and ring gear, and installing the fixture on the top of the planetary gear, multiple planetary gears and multiple clamping stations on the fixture can install multiple copper clad laminates at the same time, and the plasma spray gun can also process multiple copper clad laminates at the same time, which can effectively improve the processing efficiency of the copper clad laminates, and more extra time can be freed up during the processing process to handle other things, which can effectively improve the utilization of personnel's time. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0025] Figure 2 This is a schematic diagram of the structure of the present invention after it is opened as a whole;

[0026] Figure 3 It is a front cross-sectional structural schematic diagram of the present invention;

[0027] Figure 4 This is a schematic diagram of the top structure of the circular ring of the present invention;

[0028] Figure 5 This is a schematic diagram of the bottom structure of the circular ring of the present invention;

[0029] Figure 6 This is a schematic diagram of the support structure of the present invention;

[0030] Figure 7 This is a schematic diagram of the structure of the connection between the fixing rod and the notch of the present invention;

[0031] Figure 8 It is a schematic diagram of the structure of the connecting piece of the present invention;

[0032] Fig. 9 This is a schematic diagram of the connection structure between the first piston cylinder and the second piston cylinder of the present invention;

[0033] Fig.10 It is a schematic diagram of the clamp and detection mechanism of the present invention.

[0034] In the figure: 1, operating box; 2, processing box; 3, plasma spray gun; 4, gear ring; 5, sun gear; 6, motor; 7, planetary gear; 8, fixture; 9, fixing rod; 10, planetary carrier; 11, connecting mechanism; 12, through hole; 13, ring; 14, notch; 15, connecting rod; 16, movable plate; 17, support; 18, fixing sleeve; 19, universal ball; 20, rolling groove; 21, cylinder; 22, mounting plate; 23, limit rod; 24, limit block; 25, first spring Spring; 26, first piston cylinder; 27, piston rod; 28, second spring; 29, first screw; 30, first cross plate; 31, first threaded sleeve; 32, second cross plate; 33, second piston cylinder; 34, connecting pipe; 35, detection mechanism; 36, adjustment mechanism; 37, pointer; 38, indicator rod; 39, scale line; 40, connecting piece; 41, sub-gear; 42, second screw; 43, second threaded sleeve; 44, controller; 45, sleeve; 46, slide rod; 47, block. DETAILED DESCRIPTION

[0035] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] Embodiment 1

[0037] See also Figures 1 to 10 The present invention provides a technical solution: a PCB plasma processing device, comprising: an operation box 1 and a processing box 2, the processing box 2 is fixed on the top of the operation box 1, and a retractable plasma spray gun 3 is installed inside the processing box 2. Specifically, first, a movable plate 16 is fixedly installed at the bottom of the plasma spray gun 3, and a connecting rod 15 is slidably installed on the outer side of the movable plate 16. The top of the connecting rod 15 is fixed on the top of the processing box 2. The plasma spray gun 3 can slide on the inner side of the connecting rod 15 through the movable plate 16 to realize the extension and retraction of the plasma spray gun 3. Secondly, support members 17 are fixedly installed on both sides of the movable plate 16. The support members 17 are used to support the slidingly arranged plasma spray gun 3 so that it can be stably installed in the processing box 2.

[0038] Specifically, the support member 17 includes a first piston cylinder 26 fixed inside the processing box 2, and a second spring 28 and a piston rod 27 are provided inside the first piston cylinder 26, wherein one end of the piston rod 27 is fixed to the bottom of the movable plate 16 and the other end is fixed to the top of the second spring 28, and the movable plate 16 and the plasma spray gun 3 on the movable plate 16 are supported by the second spring 28 and the piston rod 27.

[0039] A gear ring 4 is fixedly installed inside the processing box 2, and a sun gear 5 is arranged inside the gear ring 4. The sun gear 5 is rotatably installed inside the processing box 2, that is, a through hole 12 is first opened at the bottom of the processing box 2, and a ring 13 is arranged inside the through hole 12. The bottom of the connecting rod 15 is fixedly connected to the ring 13, so the ring 13 can be fixed in the through hole 12 by the connecting rod 15, and the sun gear 5 is rotatably installed at the bottom of the ring 13, and a motor 6 is fixedly installed on the top of the ring 13. When the motor 6 rotates, it can synchronously drive the sun gear 5 to rotate, and when the sun gear 5 rotates, it will drive the planetary gear 7 to revolve along the sun gear 5. The planetary gear 7 can rotate while revolving along the sun gear 5.

[0040] A through hole 12 is provided at the bottom of the processing box 2, and a ring 13 is provided in the through hole 12. A notch 14 is formed between the ring 13 and the through hole 12. The fixed rod 9 revolves in the notch 14 along the sun gear 5. A fixed sleeve 18 is fixedly installed on the outer side of the fixed rod 9, and a universal ball 19 is fixedly installed on the side of the fixed sleeve 18. A rolling groove 20 is provided on the inner side of the notch 14, and the universal ball 19 is located in the rolling groove 20. The fixed sleeve 18 can limit the position of the fixed rod 9 to prevent it from tilting when rotating, and the universal ball 19 cooperates with the rolling groove 20 when rotating to reduce friction and make the movement smoother.

[0041] A plurality of planetary gears 7 are meshed between the ring gear 4 and the sun gear 5. The plurality of planetary gears 7 are arranged in a circular array around the axis of the sun gear 5, and a fixing rod 9 is fixedly installed inside each planetary gear 7. A clamp 8 is fixedly installed on the top of the fixing rod 9. A planet carrier 10 is rotatably installed on the bottom of the fixing rod 9. The planet carrier 10 is rotatably installed inside the operating box 1. In this embodiment, the clamp 8 is fixed to a cylinder 21 on the top of the fixing rod 9. A mounting plate 22 is evenly fixed on the outside of the cylinder 21. A limiting rod 23 is slidably installed on the side of each mounting plate 22. A fixing rod 23 is fixedly installed on the end of the limiting rod 23. A limit block 24 is provided, and a first spring 25 is sleeved on the outer side of the limit rod 23. Therefore, when installing the copper clad plate or PCB board to be processed, it only needs to be placed between the limit blocks 24. The limit blocks 24 on the upper and lower sides can fix the length direction of the copper clad plate or PCB board, and the limit blocks 24 on the left and right sides can limit the width of the copper clad plate or PCB board. After installation, the planetary gear 7 will synchronously drive the clamp 8 to revolve when it revolves, and will synchronously drive the clamp 8 to rotate when it rotates. At the same time, when the planetary gear 7 rotates, it will also synchronously drive the planetary carrier 10 to rotate.

[0042] To sum up, when processing the copper clad laminate, the copper clad laminate is installed on the fixture 8 in sequence. After the assembly is completed, the plasma spray gun 3 works. When the fixture 8 revolves along the sun gear 5, it will drive multiple fixtures 8 to align with the plasma spray gun 3. When the fixture 8 rotates, it can drive multiple copper clad laminates on the fixture 8 to align with the plasma spray gun 3, so that each assembled copper clad laminate can be aligned with the plasma spray gun 3. When the copper clad laminate is aligned with the plasma spray gun 3, the plasma spray gun 3 processes its surface.

[0043] Since the height of the plasma spray gun 3 is always maintained at the same height during the treatment process, it can only treat a local surface of the copper clad laminate. Therefore, a connecting mechanism 11 is installed between the plasma spray gun 3 and the planetary carrier 10. The connecting mechanism 11 can drive the plasma spray gun 3 to gradually move downward during the treatment of the copper clad laminate, thereby treating the entire surface of the copper clad laminate.

[0044] Specifically, since the planet carrier 10 is rotatably mounted inside the running box 1, that is, a first transverse plate 30 is rotatably mounted on the bottom of the planet carrier 10, the first transverse plate 30 is fixed inside the running box 1, a first screw 29 is fixedly mounted on the bottom of the planet carrier 10, a first threaded sleeve 31 is threadedly connected to the outer side of the first screw 29, a second transverse plate 32 is slidably mounted on the outer side of the first threaded sleeve 31, the second transverse plate 32 is also fixed inside the running box 1, and a second piston cylinder 33 is slidably mounted on the outer side of the first threaded sleeve 31, and a connecting pipe 34 is installed between the second piston cylinder 33 and the first piston cylinder 26;

[0045] Through the above technical solution, when the motor 6 drives the sun gear 5 to rotate, it will drive the planetary gear 7 and the fixed rod 9 to revolve. When the fixed rod 9 revolves, it will drive the planetary carrier 10 to rotate. When the planetary carrier 10 rotates, it will drive the first screw 29 to rotate. When the first screw 29 rotates, it will drive the first threaded sleeve 31 to slide in the second cross plate 32, and at the same time squeeze the gas in the second piston cylinder 33. The extruded gas enters the first piston cylinder 26 through the connecting pipe 34. After the gas enters the first piston cylinder 26, it pushes the piston rod 27 downward under the action of pressure. When the piston rod 27 moves downward, it will synchronously drive the plasma spray gun 3 to move downward. When the plasma spray gun 3 moves downward, the copper clad laminate can be fully processed.

[0046] Therefore, when processing copper clad laminates or PCB boards, multiple copper clad laminates or PCB boards can be clamped at the same time through multiple clamps 8 and multiple clamping stations on the clamps 8. Since multiple copper clad laminates are processed at the same time, in order to ensure the processing effect, the processing time will be extended compared to the existing method. Therefore, the operator can free up more spare time to deal with other things during the processing of the copper clad laminates, which can effectively improve the utilization rate of the personnel's time. Moreover, processing multiple copper clad laminates at the same time can also improve the processing efficiency of the copper clad laminates.

[0047] Embodiment 2

[0048] Since the sizes of the copper clad laminate or PCB boards to be processed are different, the length and width will be different. When the length increases, if the rotation time of the sun gear 5 remains unchanged, it means that the downward distance of the plasma spray gun 3 remains unchanged, which will cause incomplete processing. Therefore, a detection mechanism 35 is installed on the fixture 8, and the detection mechanism 35 can detect the length and width of the copper clad laminate or PCB board.

[0049] Specifically, first, a pointer 37 is fixed on the limit rod 23 in the horizontal and vertical directions, and an indicator rod 38 is fixed on the cylinder 21. The indicator rod 38 is sprayed with scale lines 39, and the pointer 37 indicates on the scale lines 39. When the length and width change, the limit rod 23 will drive the pointer 37 to move on the scale lines 39, so as to detect the changes in length and width.

[0050] According to the changes in the detected length and width, an adjustment mechanism 36 is installed inside the operating box 1. The adjustment mechanism 36 includes a controller 44. The controller 44 is electrically connected to the motor 6. The controller 44 controls the working time of the motor 6. Therefore, when the length changes during use, the operator can adjust the controller 44 according to the change distance of the pointer 37, so that the controller 44 controls the change in the working time of the motor 6. When the distance increased by the pointer 37 is greater, the working time of the motor 6 is longer. In this way, the descending distance of the plasma spray gun 3 is adaptively adjusted according to the height change of the copper clad laminate to meet the processing requirements of copper clad laminates or PCB boards of different lengths.

[0051] It should be added that the plasma spray gun 3 processes the copper-clad laminate from top to bottom. When the length changes, the copper-clad laminate will drive the limit block 24 to move upward for a distance, and this distance will exceed the highest point processed by the plasma spray gun 3. Therefore, when the clamp 8 is set, the limit block 24 at the top can be set to be fixed, and the limit block 24 at the bottom can be set to be retractable. The copper-clad laminate is detected by the retractable limit block 24 at the bottom. At this time, when the copper-clad laminate is clamped, it will not exceed the processing range of the plasma spray gun 3, and the processing effect will be more thorough.

[0052] When the width of the copper clad laminate changes, when the width of the copper clad laminate becomes larger, the plasma spray gun 3 processes a larger area in the same time. In order to ensure the processing effect of the copper clad laminate, the adjustment mechanism 36 also includes a connecting member 40, and the connecting member 40 is installed between the motor 6 and the sun gear 5. Specifically, the connecting member 40 includes a sleeve 45 fixed to the shaft end of the motor 6 and a slide rod 46 fixed to the top of the sun gear 5. A block 47 is fixedly installed on the outer side of the slide rod 46. The slide rod 46 is slidably installed in the sleeve 45 through the block 47. Therefore, when the motor 6 rotates, it will drive the sleeve 45 to rotate. When the sleeve 45 rotates, it drives the slide rod 46 to rotate through the limiting effect of the block 47, thereby realizing the rotation of the sun gear 5. At the same time, when the sun gear 5 slides downward, it will drive the slide rod 46 to slide in the sleeve 45, thereby changing the length of the overall connecting member 40.

[0053] A plurality of pinion gears 41 are fixedly mounted at the bottom of the sun gear 5. The pinion gears 41 have different numbers of teeth and can all mesh with the planetary gears 7. A second screw 42 is rotatably mounted at the bottom of the pinion gear 41. A second threaded sleeve 43 is threadedly connected to the outer side of the second screw 42. The bottom of the second threaded sleeve 43 is rotatably mounted on the top of the planetary carrier 10.

[0054] Through the above technical solution, when the detection mechanism 35 detects that the width has changed, the operator can rotate the second threaded sleeve 43. When the second threaded sleeve 43 rotates, it cooperates with the second screw 42 to drive the second screw 42 to move downward. When the second screw 42 moves downward, it will synchronously drive the sub-gear 41, the sun gear 5 and the sliding rod 46 to slide in the sliding sleeve 45. When the sub-gear 41 slides downward, the sub-gear 41 with different numbers of teeth will be meshed with the planetary gear 7. For example, when the width of the copper clad laminate becomes larger, the rotation and revolution speed of the clamp 8 should be slowed down. Therefore, when adjusting the sub-gear 41, the sub-gear 41 with more teeth can be meshed with the planetary gear 7 to achieve processing of copper clad laminates of different widths.

[0055] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0056] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A PCB plasma processing device, comprising an operating box (1) and a processing box (2), wherein the processing box (2) is fixed on the top of the operating box (1), characterized in that: Also includes: A liftable plasma spray gun (3), wherein the plasma spray gun (3) is installed inside the processing box (2); A ring gear (4), a sun gear (5), a motor (6) and a planetary gear (7), wherein the ring gear (4) is fixed inside the operating box (1), the sun gear (5) is arranged inside the ring gear (4), the motor (6) is fixed at an end of the sun gear (5), and the planetary gear (7) is meshed between the ring gear (4) and the sun gear (5); A clamp (8), a fixing rod (9) and a planet carrier (10), wherein the fixing rod (9) is fixed inside the planet gear (7), the clamp (8) is fixed to the top of the fixing rod (9), the planet carrier (10) is located at the bottom of the sun gear (5) and rotates inside the operating box (1), and the bottom of the fixing rod (9) rotates inside the planet carrier (10); The bottom of the processing box (2) is provided with a through hole (12), a circular ring (13) is provided in the through hole (12), a notch (14) is formed between the circular ring (13) and the through hole (12), the fixed rod (9) revolves in the notch (14) along the sun gear (5), a connecting rod (15) is fixed to the top of the circular ring (13), the top of the connecting rod (15) is fixed to the top of the processing box (2), a movable plate (16) is fixedly installed at the bottom of the plasma spray gun (3), the movable plate (16) is slidably installed on the inner side of the connecting rod (15), and support members (17) are installed on both sides of the movable plate (16), and the support members (17) support the slidably arranged plasma spray gun (3); A connecting mechanism (11), the connecting mechanism (11) being installed between the plasma spray gun (3) and the planetary carrier (10), the connecting mechanism (11) driving the height of the plasma spray gun (3) to gradually decrease when the planetary carrier (10) rotates, the connecting mechanism (11) comprising a first screw rod (29) fixed to the bottom of the planetary carrier (10), a first transverse plate (30) being rotatably installed on the outer side of the first screw rod (29), a first threaded sleeve (31) being threadedly connected to the bottom of the first screw rod (29), a second transverse plate (32) being slidably installed on the outer side of the first threaded sleeve (31), a second piston cylinder (33) being slidably installed on the outer side of the first threaded sleeve (31), and a connecting pipe (34) being connected between the second piston cylinder (33) and the first piston cylinder (26).

2. The PCB plasma processing equipment according to claim 1, characterized in that: A fixing sleeve (18) is fixedly mounted on the outer side of the fixing rod (9), a universal ball (19) is fixedly mounted on the side of the fixing sleeve (18), a rolling groove (20) is formed on the inner side of the notch (14), and the universal ball (19) is located in the rolling groove (20).

3. The PCB plasma processing equipment according to claim 1, characterized in that: The clamp (8) comprises a cylinder (21) fixed on the top of a fixing rod (9), a mounting plate (22) being evenly mounted on the outer wall of the cylinder (21), a limiting rod (23) being slidably mounted on the side edge of the mounting plate (22), a limiting block (24) being fixedly mounted on the end of the limiting rod (23), the limiting block (24) being slidably mounted on the outside of the mounting plate (22), and a first spring (25) being sleeved on the outside of the limiting rod (23).

4. The PCB plasma processing equipment according to claim 1, characterized in that: The support member (17) comprises a first piston cylinder (26), a piston rod (27) and a second spring (28); the bottom of the first piston cylinder (26) is fixed to the top of the ring (13); the second spring (28) is fixed inside the first piston cylinder (26); the piston rod (27) is slidably mounted inside the first piston cylinder (26), and the top of the piston rod (27) is fixed to the bottom of the movable plate (16).

5. The PCB plasma processing equipment according to claim 3, characterized in that: The cylinder (21) is provided with a detection mechanism (35) for detecting the length and width of the copper-clad laminate. The processing box (2) is provided with an adjustment mechanism (36) for adaptively adjusting the rotation speed of the sun gear (5) and the working time of the motor (6) according to the detection result of the detection mechanism (35).

6. The PCB plasma processing equipment according to claim 5, characterized in that: The detection mechanism (35) comprises a pointer (37), an indicator rod (38) and scale lines (39), wherein the pointer (37) is fixed on the outside of the limit rod (23), the indicator rod (38) is fixed on the top of the cylinder (21), and the scale lines (39) are sprayed on both sides of the indicator rod (38).

7. The PCB plasma processing equipment according to claim 5, characterized in that: The adjustment mechanism (36) comprises a connecting member (40), a plurality of pinion gears (41), a second screw rod (42), a second threaded sleeve (43) and a controller (44); the connecting member (40) is mounted between the motor (6) and the sun gear (5); the pinion gear (41) is coaxially fixed to the sun gear (5); the second screw rod (42) is rotatably mounted on the bottom of the pinion gear (41); the second threaded sleeve (43) is threadedly connected to the outside of the second screw rod (42); and the bottom of the second screw rod (42) is rotatably mounted on the top of the planet carrier (10); The controller (44) is fixed on the top of the second horizontal plate (32), and the controller (44) controls the working time of the motor (6).

8. The PCB plasma processing equipment according to claim 7, characterized in that: The connecting member (40) comprises a sliding sleeve (45), a sliding rod (46) and a clamping block (47); the sliding sleeve (45) is fixed to the shaft end of the motor (6); the sliding rod (46) is fixed to the top of the sun gear (5); the clamping block (47) is fixed to the outside of the sliding rod (46); and the sliding rod (46) is slidably mounted in the sliding sleeve (45) via the clamping block (47).

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