A laser gas recovery frozen solid particle separation device

Abstract

The present invention discloses a laser gas recovery frozen solid particle separation device, which relates to the technical field of impurity separation; it comprises: a high-pressure liquefaction separation device cold box, a first-level gas-liquid separator is arranged in the high-pressure liquefaction separation device cold box, the input end of the first-level gas-liquid separator is connected to a laser gas recovery gas input pipe, and a condensed impurity output pipe is arranged at the bottom of the first-level gas-liquid separator; a first-level heat exchange mechanism, the first-level heat exchange mechanism is arranged in the high-pressure liquefaction separation device cold box, and is used to cool the laser gas recovery gas input pipe; a first-level crude neon delivery pipe, the first-level crude neon delivery pipe is installed at the output end of the first-level gas-liquid separator. The present invention sets a resistance measuring instrument at the inlet and outlet of the spiral tube heat exchanger; when the resistance has a tendency to increase, the control module allows the normal temperature recovery gas to enter the spiral tube heat exchanger through the reheating delivery pipe through the second electric control valve, heats and melts the solidified solids in the spiral tube heat exchanger, and increases the flow rate to blow away the blocked solid impurities to ensure the continuity of the process.

Description

Technical Field

[0001] The invention relates to the technical field of impurity separation, and in particular to a laser gas recovery frozen solid particle separation device. Background Art

[0002] Neon is used in scientific research, chips, medicine and high-tech industries, especially with the rapid development of chip and other industries, it is consumed in large quantities. The demand for special gases such as neon has increased dramatically. Neon is a rare gas with stable chemical characteristics. It does not react with other elements. Neon is non-renewable and irreplaceable. Neon can be used to produce neon lasers, which are used in scientific research, medical treatment and material processing. This feature makes helium one of the important elements in the field of high-tech manufacturing. Neon and krypton or neon and argon, xenon are mixed in a certain proportion to obtain laser gas with a specific wavelength, which is used in chip lithography machines.

[0003] At present, almost all the helium used in China comes from the United States or other countries such as the Middle East and Australia. Only a small amount of neon comes from the non-condensable gas in the lower tower of the air separation unit, which is then separated from neon to obtain pure neon. Due to the scarcity of large-scale air separation equipment with neon-helium concentration equipment, the neon content in the air is only 18.18×10 -6 The separation process of neon and helium containing 99.9999% purity is complicated, resulting in high cost of laser gas supply. There is almost no loss of neon gas during the use of the lithography machine, and recycling and separation has become an option for chip factories.

[0004] After the use of the lithography machine, the laser gas is enriched with neon, krypton, xenon, and argon, depending on the type of laser gas. It is also enriched with some air and hydrogen. Under normal pressure, xenon solidifies at around -112°C, and krypton solidifies at around -157°C. Therefore, in the neon purification process, the risk of solidification clogging the heat exchanger or increasing the temperature due to the high krypton and xenon concentrations at low temperatures when removing krypton and xenon should be avoided. The disadvantages of high boiling point krypton, xenon, and argon being difficult to separate should be avoided.

[0005] After searching, the application scheme of Chinese patent application No. 201720096764.4 discloses a double helical tube condensing heat exchanger, the key points of its technical scheme are that it includes a box shell, the box shell is respectively provided with a high-temperature flue gas inlet, a low-temperature flue gas outlet, a first water flow joint, a second water flow joint and a condensing water joint, a first spiral tube and a second spiral tube are arranged side by side in the box shell, one end of the first spiral tube is connected to one end of the second spiral tube, the other end of the first spiral tube is connected to the first water flow joint, and the other end of the second spiral tube is connected to the second water flow joint. The double helical tube condensing heat exchanger in the above document has the following shortcomings: it cannot deal well with the situation where the solidified solid blocks the spiral tube, and there is room for improvement. Summary of the invention

[0006] The purpose of the present invention is to solve the shortcomings of the prior art and to propose a laser gas recovery frozen solid particle separation device.

[0007] In order to achieve the above object, the present invention adopts the following technical solutions:

[0008] A laser gas recovery frozen solid particle separation device, comprising:

[0009] A high-pressure liquefaction separation device cold box, wherein a first-stage gas-liquid separator is arranged in the high-pressure liquefaction separation device cold box, an input end of the first-stage gas-liquid separator is connected to a laser gas recovery gas input pipe, and a condensed impurity output pipe is arranged at the bottom of the first-stage gas-liquid separator;

[0010] The first-stage heat exchange mechanism is arranged in the cold box of the high-pressure liquefaction separation device and is used to cool the laser gas recovery gas input pipe;

[0011] A primary crude neon delivery pipe, which is installed at the output end of the primary gas-liquid separator and is provided with a first electric control valve;

[0012] A cryogenic container, wherein a cryogenic adsorber is arranged in the cryogenic container;

[0013] A vacuum pump, which is installed on the cryogenic container and connected to the cryogenic adsorber;

[0014] A secondary gas-liquid separator, the secondary gas-liquid separator is installed in the low-temperature container, the secondary gas-liquid separator is connected to the low-temperature adsorber, and a separator top is provided on the secondary gas-liquid separator;

[0015] A secondary heat exchange mechanism, the secondary heat exchange mechanism is installed in the cryogenic container;

[0016] A spiral tube heat exchanger, the spiral tube heat exchanger is wound around the outer surface of the low-temperature adsorber, the output end of the spiral tube heat exchanger is connected to the secondary gas-liquid separator through a secondary crude neon delivery pipe, and the inlet and outlet of the spiral tube heat exchanger are provided with a resistance measuring element;

[0017] A reheating delivery pipe, one end of which is connected to the primary crude neon delivery pipe, the reheating delivery pipe passes through the primary heat exchanger to reheat the gas inside to a normal temperature state, the other end of which is connected to the primary crude neon delivery pipe, and the two ends of the reheating delivery pipe connected to the primary crude neon delivery pipe are located on both sides of the first electric control valve; a second electric control valve is arranged on the reheating delivery pipe;

[0018] A control module controls the opening and closing of the first electrically controlled valve and the second electrically controlled valve based on the measurement of the resistance measuring instrument.

[0019] As a preferred embodiment of the present invention: the first-level heat exchange mechanism includes:

[0020] The first-stage heat exchanger is arranged in the cold box of the high-pressure liquefaction separation device, and is used to cool the laser gas recovery gas input pipe;

[0021] A low-temperature cold source input pipe, the low-temperature cold source input pipe is connected to the primary heat exchanger, and one end of the primary heat exchanger is connected to the low-temperature cold source output pipe;

[0022] The reheating transport pipe passes through a primary heat exchanger.

[0023] As a preferred embodiment of the present invention: the secondary heat exchange mechanism includes:

[0024] A secondary heat exchanger, the secondary heat exchanger is installed in the cryogenic container;

[0025] A liquid nitrogen input pipe is installed on the cryogenic container, and one end of the liquid nitrogen input pipe is connected to the secondary heat exchanger;

[0026] A pure neon output pipe is installed at the output end of the secondary heat exchanger, and one end of the secondary gas-liquid separator is connected to the secondary heat exchanger.

[0027] As a preferred embodiment of the present invention: the laser gas recovery gas input pipe is connected in series with an auxiliary cooler, and the auxiliary cooler comprises:

[0028] The cooling chamber is a hollow disc-shaped structure as a whole, with an input end provided on one side of the cooling chamber and an output end provided on the other side of the cooling chamber;

[0029] A rotating roller, the rotating roller is sealed and rotated in the cooling chamber, a mounting seat is arranged in the middle of the rotating roller, a plurality of cooling blades are arranged on the outer side of the mounting seat, and a main cold source channel and an auxiliary cold source channel are respectively arranged in the rotating roller and the cooling blades;

[0030] Cold source branch pipes, two cold source branch pipes are respectively connected to the main cold source channels at both ends of the roller, one cold source branch pipe is connected to the low-temperature cold source input pipe, and the other cold source branch pipe is connected to the low-temperature cold source output pipe; a third electric control valve is arranged on the cold source branch pipe.

[0031] As a preferred embodiment of the present invention: an annular connecting seat is provided at both ends of the rotating roller, an annular chamber is installed on the outer side of the annular connecting seat, the annular connecting seat is sealingly rotatably connected to the inner wall of the annular chamber, the cold source branch pipe is installed on the outer wall of one side of the annular chamber, and the cold source branch pipe is connected to each main cold source channel through the annular chamber and the annular connecting seat.

[0032] As a preferred embodiment of the present invention: the cooling blade is detachably mounted on the outer side of the mounting seat;

[0033] The mounting seat is provided with sockets distributed in pairs on the circumferential outer wall, and a connector matched with the sockets is provided on the outer wall of one side of the cooling blade, and an opening is provided on one side of the connector;

[0034] A blocking column is movably mounted on the inner side of the mounting seat through a spring, an annular groove is provided on the outer wall of the central circumference of the blocking column, and the diameter of the blocking column is adapted to the inner diameter of the socket;

[0035] When the connector is not inserted, the plugging column plugs the socket based on the support of the spring, and the position of the annular groove is adapted to the main cold source channel, and one end of the main cold source channel is connected to the other end of the main cold source channel through the annular groove;

[0036] When the connector is inserted, the middle part of the main cold source channel is blocked by the connector, but the two ends of the main cold source channel are connected to the auxiliary cold source channel through openings respectively to form a new passage. An annular groove is provided on the inner side of the socket, and a sealing ring matched with the annular groove is installed on the connector. When the connector is inserted into the socket, the sealing ring is stuck in the annular groove.

[0037] As a preferred embodiment of the present invention, the auxiliary cold source channel is shaped like a "bow".

[0038] As a preferred embodiment of the present invention: an elastic film is provided on the inner side of the cooling blade.

[0039] As a preferred embodiment of the present invention: the auxiliary cooler further comprises a support frame, and the support frame is installed on one side of the cooling chamber;

[0040] The support frame is provided with a driving mechanism for driving the roller to rotate, and the driving mechanism comprises:

[0041] A control motor, which is mounted on a support frame;

[0042] A driving gear, the shaft of which is drivingly connected to the output end of the control motor;

[0043] The outer cylinder is installed on the shaft of the rotating roller, and the outer cylinder is rotatably installed on the supporting frame;

[0044] The driven gear is mounted on the shaft of the outer cylinder and meshes with the driving gear.

[0045] As a preferred embodiment of the present invention: the shaft of the roller is rotatably installed in the outer cylinder, an electric locking cylinder is installed on one side of the outer cylinder through a bracket, and the position of the output end of the electric locking cylinder is adapted to the shaft of the roller.

[0046] The beneficial effects of the present invention are:

[0047] 1. The present invention sets a resistance measuring instrument at the inlet and outlet of the spiral tube heat exchanger; when the resistance tends to increase, the control module allows the recovery gas at room temperature to enter the spiral tube heat exchanger through the reheating conveying pipe through the second electric control valve, heats and melts the solidified solids in the spiral tube heat exchanger, and increases the flow rate to blow away the clogging solid impurities to ensure the continuity of the process.

[0048] 2. The present invention provides an auxiliary cooler, which can keep the mounting seat and cooling blades at a relatively low temperature through a cold source. When the gas passes through the cooling chamber, it is in full contact with the cooling blades and the mounting seat, thereby achieving reliable cooling.

[0049] 3. The present invention meets the demand for cold source transportation by setting up structures such as an annular connecting seat and an annular chamber, and at the same time does not affect the rotation of the structure, thereby improving reliability; by setting up a detachable cooling blade, the assembly of the cooling blade can be adjusted according to needs, thereby changing the heat transfer effect; in addition, different cooling passages are formed before and after the installation of the cooling blade, thereby ensuring the reliability of cooling, and the auxiliary cold source channel with a "bow" shaped structure can further improve the cooling effect.

[0050] 4. The present invention is provided with structures such as an electric locking cylinder and a control motor, and can lock the axes of the outer cylinder and the roller according to actual needs through the operation of the electric locking cylinder; based on the operation of the control motor, the outer cylinder and the roller are driven to rotate synchronously under the transmission of the driving gear and the driven gear. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] Figure 1 This is a schematic diagram of the structure of a laser gas recovery frozen solid particle separation device proposed by the present invention;

[0052] Figure 2 This is a schematic diagram of the structure of an auxiliary cooler in a laser gas recovery frozen solid particle separation device proposed by the present invention;

[0053] Figure 3 This is a schematic diagram of the structure of a driving mechanism in a laser gas recovery frozen solid particle separation device proposed by the present invention;

[0054] Figure 4 This is a schematic structural diagram of a cross-section of an annular chamber and an annular connecting seat in a laser gas recovery frozen solid particle separation device proposed by the present invention;

[0055] Figure 5 This is a schematic structural diagram of a cross-section of a cooling chamber in a laser gas recovery frozen solid particle separation device proposed by the present invention;

[0056] Figure 6 This is a schematic structural diagram of a cross-section of a mounting base in a laser gas recovery frozen solid particle separation device proposed by the present invention;

[0057] Figure 7 This is a schematic diagram of the structure with the cooling blades removed in a laser gas recovery frozen solid particle separation device proposed by the present invention.

[0058] In the figure: 1 low temperature adsorber, 2 spiral tube heat exchanger, 3 secondary gas-liquid separator, 4 low temperature container, 5 secondary heat exchanger, 6 high pressure liquefaction separation device cold box, 7 primary heat exchanger, 8 primary gas-liquid separator, 9 vacuum pump, 10 resistance measuring instrument, 11 first electric control valve, 12 second electric control valve, 13 cooling chamber, 14 cold source branch pipe, 15 third electric control valve, 16 input end, 17 output end, 18 control motor, 19 driving gear, 20 driven gear, 21 annular chamber, 22 electric locking cylinder, 23 support frame, 24 outer cylinder, 25 Annular connecting seat, 26 main cold source channel, 27 roller, 28 cooling blade, 29 mounting seat, 30 elastic membrane, 31 sealing ring, 32 spring, 33 auxiliary cold source channel, 34 opening, 35 socket, 36 annular groove, 37 blocking column, 38 connector, 101 laser gas recovery gas input pipe, 102 condensed impurity output pipe, 103 first-level crude neon delivery pipe, 104 low-temperature cold source input pipe, 105 low-temperature cold source output pipe, 106 second-level crude neon delivery pipe, 107 pure neon output pipe, 108 reheating delivery pipe, 109 separator top. DETAILED DESCRIPTION

[0059] The technical solution of the present invention is further described in detail below in conjunction with specific implementation methods.

[0060] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0061] Embodiment 1:

[0062] A laser gas recovery frozen solid particle separation device, such as Figure 1-7 As shown, including:

[0063] A high-pressure liquefaction separation device cold box 6, in which a primary gas-liquid separator 8 is arranged, an input end of the primary gas-liquid separator 8 is connected to a laser gas recovery gas input pipe 101, and a condensed impurity output pipe 102 is arranged at the bottom of the primary gas-liquid separator 8;

[0064] The first-stage heat exchange mechanism is arranged in the cold box 6 of the high-pressure liquefaction separation device, and is used to cool the laser gas recovery gas input pipe 101;

[0065] A primary crude neon delivery pipe 103, which is installed at the output end of the primary gas-liquid separator 8, and a first electric control valve 11 is provided on the primary crude neon delivery pipe 103;

[0066] A low temperature container 4, wherein a low temperature adsorber 1 is arranged in the low temperature container 4;

[0067] A vacuum pump 9, which is installed on the cryogenic container 4 and connected to the cryogenic adsorber 1;

[0068] A secondary gas-liquid separator 3, which is installed in a low-temperature container 4, is connected to the low-temperature adsorber 1, and is provided with a separator top 109;

[0069] A secondary heat exchange mechanism is installed in the low temperature container 4;

[0070] A spiral tube heat exchanger 2, the spiral tube heat exchanger 2 is wound around the outer surface of the low-temperature adsorber 1, the output end of the spiral tube heat exchanger 2 is connected to the secondary gas-liquid separator 3 through a secondary crude neon delivery pipe 106, and the inlet and outlet of the spiral tube heat exchanger 2 are provided with a resistance measuring element 10;

[0071] A reheating delivery pipe 108, one end of which is connected to the primary crude neon delivery pipe 103, the reheating delivery pipe 108 passes through the primary heat exchanger 7 to reheat the gas inside to a normal temperature state, and the other end of the reheating delivery pipe 108 is connected to the primary crude neon delivery pipe 103, and the two ends of the reheating delivery pipe 108 connected to the primary crude neon delivery pipe 103 are located on both sides of the first electric control valve 11; a second electric control valve 12 is provided on the reheating delivery pipe 108;

[0072] The control module controls the opening and closing of the first electrically controlled valve 11 and the second electrically controlled valve 12 based on the measurement of the resistance measuring instrument 10 .

[0073] In order to facilitate heat exchange; Figure 1 As shown, the primary heat exchange mechanism includes:

[0074] The primary heat exchanger 7 is disposed in the cold box 6 of the high-pressure liquefaction separation device, and is used to cool the laser gas recovery gas input pipe 101;

[0075] A low-temperature cold source input pipe 104, the low-temperature cold source input pipe 104 is connected to the primary heat exchanger 7, and one end of the primary heat exchanger 7 is connected to a low-temperature cold source output pipe 105;

[0076] The reheating transport pipe 108 passes through the primary heat exchanger 7 .

[0077] In order to facilitate heat exchange; Figure 1 As shown, the secondary heat exchange mechanism includes:

[0078] A secondary heat exchanger 5, the secondary heat exchanger 5 is installed in the low-temperature container 4;

[0079] A liquid nitrogen input pipe, the liquid nitrogen input pipe is installed on the low-temperature container 4, and one end of the liquid nitrogen input pipe is connected to the secondary heat exchanger 5;

[0080] The pure neon output pipe 107 is installed at the output end of the secondary heat exchanger 5 , and one end of the secondary gas-liquid separator 3 is connected to the secondary heat exchanger 5 .

[0081] In a practical application, the mixed laser gas recovered from the lithography machine is recovered to the exhaust chamber and then enters the gas storage bag, and the components are (96.5% Ne, 1.75% Ar, 10ppm Xe, 1.23% Kr and O2, N2, H2O, H2 and trace He). After adding excess oxygen to remove hydrogen in the catalyst furnace, it enters the dryer to remove moisture. The dried recovered laser gas is pressurized to 5.5MPa and then input through the laser gas recovery gas input pipe 101, and is partially liquefied by liquid oxygen cooling in the high-pressure liquefaction separation device cold box 6. The recovered laser gas after high-pressure liquefaction removes most of the impurities such as krypton, xenon, and fluoride through the primary crude neon delivery pipe 103 and enters the low-temperature container 4 for further purification; the separated heavy components (~23.2NM3 / h, 7.5% Ne, 2.2% Ar, 17ppm Xe, 1.99% Kr and 88% O2 and trace N2) are decompressed by the valve and then output through the condensation impurity output pipe 1 02 venting or recycling; the primary gas-liquid separator 8 extracts non-condensable crude neon 46.79NM3 / h (79.2% Ne, 0.65% Ar, 0.03ppm Xe, 682ppm Kr and 20.07% O2 and trace amounts of N2 and He) from the primary crude neon delivery pipe 103 of the high-pressure liquefaction separation device cold box 6, and then is decompressed to 3MPa through the valve 11 and enters the spiral tube heat exchanger 2 in the low-temperature container 4. The spiral tube heat exchanger 2 is sleeved on the outer surface of the low-temperature adsorber 1. The laser gas recovery gas in the spiral tube is cooled and liquefied in the negative pressure liquid nitrogen contained in the low-temperature container 4, and partially solidified. The high-speed movement of the laser gas in the spiral tube is used to bring the solidified impurities to the lower secondary gas-liquid separator 3. After the laser gas recovery gas separates most of the krypton, xenon and fluoride, it enters the lower secondary gas-liquid separator 3 to separate the oxygen and nitrogen liquid impurities. The top 109 of the separator (99.69% Ne, 194ppm The exhaust gas (Ar, 0.173ppmKr and 0.283% O2 ​​and trace amounts of N2 and He) enters the low-temperature adsorber 1, and the residual impurities such as oxygen, argon, nitrogen, krypton, xenon, fluoride, etc. are removed by adsorption by the adsorbent to obtain pure neon gas. The pure neon gas is reheated and used as the raw material of laser gas to be bottled or enters the neon-helium separation equipment to further remove the residual helium in the neon gas and then fill the bottle. The high-purity neon gas after filling the bottle is recycled as the raw material of laser gas.

[0082] A resistance measuring instrument 10 is set at the inlet and outlet of the spiral tube heat exchanger 2; when the resistance tends to increase, the control module allows the recovered gas at room temperature to enter the spiral tube heat exchanger 2 through the reheating conveying pipe 108 through the second electric control valve 12, heats and melts the solidified solids in the spiral tube heat exchanger 2, and increases the flow rate to blow away the clogged solid impurities to ensure the continuity of the process.

[0083] After the low temperature container 4 is drained of liquid nitrogen and then heated to room temperature, the krypton-xenon fluoride solids solidified in the spiral tube heat exchanger 2 and the secondary gas-liquid separator 3 melt and return to gas, and these impurity gases are taken out of the recovery device by nitrogen.

[0084] Embodiment 2:

[0085] A laser gas recovery frozen solid particle separation device, such as Figure 2-7 As shown, in order to better cool down, this embodiment makes the following improvements on the basis of embodiment 1: the laser gas recovery gas input pipe 101 is connected in series with an auxiliary cooler, and the auxiliary cooler includes:

[0086] A cooling chamber 13, the cooling chamber 13 is in a hollow disc-shaped structure as a whole, an input end 16 is provided on one side of the cooling chamber 13, and an output end 17 is provided on the other side of the cooling chamber 13;

[0087] A rotating roller 27, the rotating roller 27 is sealed and rotated in the cooling chamber 13, a mounting seat 29 is arranged in the middle of the rotating roller 27, a plurality of cooling blades 28 are arranged outside the mounting seat 29, and a main cold source channel 26 and an auxiliary cold source channel 33 are respectively arranged in the rotating roller 27 and the cooling blades 28;

[0088] Cold source branch pipes 14, two cold source branch pipes 14 are respectively connected to the main cold source channels 26 at both ends of the roller 27, one cold source branch pipe 14 is connected to the low-temperature cold source input pipe 104, and the other cold source branch pipe 14 is connected to the low-temperature cold source output pipe 105; the cold source branch pipe 14 is provided with a third electric control valve 15;

[0089] By providing an auxiliary cooler, the mounting seat 29 and the cooling blades 28 can be kept at a relatively low temperature through a cold source. When the gas passes through the cooling chamber 13, it is in full contact with the cooling blades 28 and the mounting seat 29, thereby achieving reliable cooling.

[0090] In order to facilitate the transportation of cold sources; Figure 3-5 As shown, both ends of the roller 27 are provided with an annular connection seat 25, an annular chamber 21 is installed outside the annular connection seat 25, the annular connection seat 25 is sealingly rotatably connected to the inner wall of the annular chamber 21, and the cold source branch pipe 14 is installed on the outer wall of one side of the annular chamber 21, and the cold source branch pipe 14 is connected with each main cold source channel 26 through the annular chamber 21 and the annular connection seat 25;

[0091] By providing the annular connecting seat 25, the annular chamber 21 and other structures, the demand for cold source transportation is met, while the rotation of the structure is not affected, thereby improving reliability.

[0092] In order to adjust the structural layout and the cooling effect; Figure 5-7 As shown, the cooling blade 28 is detachably mounted on the outside of the mounting seat 29;

[0093] The mounting seat 29 is provided with sockets 35 distributed in pairs on the circumferential outer wall, and a connector 38 matching with the sockets 35 is provided on the outer wall of one side of the cooling blade 28, and an opening 34 is provided on one side of the connector 38;

[0094] A blocking column 37 is movably mounted on the inner side of the mounting seat 29 via a spring 32. An annular groove 36 is provided on the outer wall of the central circumference of the blocking column 37. The diameter of the blocking column 37 is adapted to the inner diameter of the socket 35.

[0095] When the connector 38 is not inserted, the blocking column 37 blocks the socket 35 based on the support of the spring 32, and the position of the annular groove 36 is adapted to the main cold source channel 26, and one end of the main cold source channel 26 is connected to the other end of the main cold source channel 26 through the annular groove 36;

[0096] When the connector 38 is inserted, the middle of the main cold source channel 26 is blocked by the connector 38, but the two ends of the main cold source channel 26 are connected to the auxiliary cold source channel 33 through the openings 34, forming a new passage. An annular groove is provided on the inner side of the socket 35, and a sealing ring 31 adapted to the annular groove is installed on the connector 38. When the connector 38 is inserted into the socket 35, the sealing ring 31 is stuck in the annular groove;

[0097] The auxiliary cold source channel 33 is shaped like a “bow”;

[0098] By providing a detachable cooling blade 28, the assembly condition of the cooling blade 28 can be adjusted according to needs, thereby changing the heat transfer effect; in addition, different cooling passages are formed before and after the installation of the cooling blade 28, thereby ensuring the reliability of cooling, and the auxiliary cold source channel 33 with a "bow"-shaped structure can further improve the cooling effect.

[0099] Wherein, an elastic membrane 30 is disposed inside the cooling blade 28 .

[0100] Embodiment 3:

[0101] A laser gas recovery frozen solid particle separation device, such as Figure 2-7 As shown, in order to better control; this embodiment makes the following improvements on the basis of embodiment 2: the auxiliary cooler also includes a support frame 23, and the support frame 23 is installed on one side of the cooling chamber 13;

[0102] The support frame 23 is provided with a driving mechanism for driving the roller 27 to rotate, and the driving mechanism includes:

[0103] A control motor 18, wherein the control motor 18 is mounted on a support frame 23;

[0104] A driving gear 19, the shaft of which is drivingly connected to the output end of the control motor 18;

[0105] The outer cylinder 24 is mounted on the shaft of the roller 27, and the outer cylinder 24 is rotatably mounted on the support frame 23;

[0106] The driven gear 20 is mounted on the shaft of the outer cylinder 24 , and the driven gear 20 is meshed with the driving gear 19 .

[0107] In order to facilitate the adjustment of the rotation mode of the roller 27; Figure 4 As shown, the shaft of the roller 27 is rotatably installed in the outer cylinder 24, and an electric locking cylinder 22 is installed on one side of the outer cylinder 24 through a bracket, and the position of the output end of the electric locking cylinder 22 is adapted to the shaft of the roller 27;

[0108] By setting up structures such as the electric locking cylinder 22 and the control motor 18, the axes of the outer cylinder 24 and the roller 27 can be locked through the operation of the electric locking cylinder 22 according to actual needs; based on the operation of the control motor 18, the outer cylinder 24 and the roller 27 are driven to rotate synchronously under the transmission of the driving gear 19 and the driven gear 20.

[0109] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A laser gas recovery frozen solid particle separation device, characterized in that: include: A high-pressure liquefaction separation device cold box (6), wherein a primary gas-liquid separator (8) is arranged in the high-pressure liquefaction separation device cold box (6), an input end of the primary gas-liquid separator (8) is connected to a laser gas recovery gas input pipe (101), and a condensed impurity output pipe (102) is arranged at the bottom of the primary gas-liquid separator (8); A primary heat exchange mechanism, the primary heat exchange mechanism is arranged in a cold box (6) of the high-pressure liquefaction separation device and is used to cool the laser gas recovery gas input pipe (101); A primary crude neon delivery pipe (103), the primary crude neon delivery pipe (103) is installed at the output end of the primary gas-liquid separator (8), and a first electric control valve (11) is provided on the primary crude neon delivery pipe (103); A low-temperature container (4), wherein a low-temperature adsorber (1) is arranged in the low-temperature container (4); A vacuum pump (9), the vacuum pump (9) is installed on the cryogenic container (4), and the vacuum pump (9) is connected to the cryogenic adsorber (1); A secondary gas-liquid separator (3), the secondary gas-liquid separator (3) is installed in the low-temperature container (4), the secondary gas-liquid separator (3) is connected to the low-temperature adsorber (1), and a separator top (109) is provided on the secondary gas-liquid separator (3); A secondary heat exchange mechanism, the secondary heat exchange mechanism is installed in the low-temperature container (4); A spiral tube heat exchanger (2), the spiral tube heat exchanger (2) is wound around the outer surface of the low-temperature adsorber (1), the output end of the spiral tube heat exchanger (2) is connected to the secondary gas-liquid separator (3) via a secondary crude neon delivery pipe (106), and the inlet and outlet of the spiral tube heat exchanger (2) are provided with a resistance measuring element (10); a reheating delivery pipe (108), one end of which is connected to the primary crude neon delivery pipe (103); the reheating delivery pipe (108) passes through the primary heat exchanger (7) to reheat the gas inside to a normal temperature state; the other end of the reheating delivery pipe (108) is connected to the primary crude neon delivery pipe (103); the two ends of the reheating delivery pipe (108) connected to the primary crude neon delivery pipe (103) are located on both sides of the first electric control valve (11); and a second electric control valve (12) is provided on the reheating delivery pipe (108); A control module, the control module controls the opening and closing of the first electrically controlled valve (11) and the second electrically controlled valve (12) based on the measurement conditions of the resistance measuring instrument (10); The primary heat exchange mechanism comprises: A primary heat exchanger (7), the primary heat exchanger (7) is arranged in a cold box (6) of the high-pressure liquefaction separation device, and the primary heat exchanger (7) is used to cool the laser gas recovery gas input pipe (101); A low-temperature cold source input pipe (104), the low-temperature cold source input pipe (104) is connected to the primary heat exchanger (7), and one end of the primary heat exchanger (7) is connected to the low-temperature cold source output pipe (105); The reheating transport pipe (108) passes through a primary heat exchanger (7); The secondary heat exchange mechanism comprises: A secondary heat exchanger (5), the secondary heat exchanger (5) is installed in the low-temperature container (4); A liquid nitrogen input pipe, the liquid nitrogen input pipe is installed on the low-temperature container (4), and one end of the liquid nitrogen input pipe is connected to the secondary heat exchanger (5); A pure neon output tube (107) is installed at the output end of the secondary heat exchanger (5), and one end of the secondary gas-liquid separator (3) is connected to the secondary heat exchanger (5).

2. The laser gas recovery frozen solid particle separation device according to claim 1 is characterized in that: An auxiliary cooler is connected in series to the laser gas recovery gas input pipe (101), and the auxiliary cooler comprises: A cooling chamber (13), the cooling chamber (13) being in the shape of a hollow disk as a whole, an input end (16) being provided on one side of the cooling chamber (13), and an output end (17) being provided on the other side of the cooling chamber (13); A rotating roller (27), the rotating roller (27) is sealed and rotated in the cooling chamber (13), a mounting seat (29) is arranged in the middle of the rotating roller (27), a plurality of cooling blades (28) are arranged outside the mounting seat (29), and a main cold source channel (26) and a secondary cold source channel (33) are respectively arranged in the rotating roller (27) and the cooling blades (28); Cold source branch pipes (14), the two cold source branch pipes (14) are respectively connected to the main cold source channels (26) at both ends of the roller (27), one cold source branch pipe (14) is connected to the low-temperature cold source input pipe (104), and the other cold source branch pipe (14) is connected to the low-temperature cold source output pipe (105); and a third electric control valve (15) is arranged on the cold source branch pipe (14).

3. The laser gas recovery frozen solid particle separation device according to claim 2 is characterized in that: An annular connecting seat (25) is provided at both ends of the rotating roller (27), an annular chamber (21) is installed outside the annular connecting seat (25), the annular connecting seat (25) is sealingly rotatably connected to the inner wall of the annular chamber (21), a cold source branch pipe (14) is installed on the outer wall of one side of the annular chamber (21), and the cold source branch pipe (14) is connected to each main cold source channel (26) through the annular chamber (21) and the annular connecting seat (25).

4. The laser gas recovery frozen solid particle separation device according to claim 3 is characterized in that: The cooling blade (28) is detachably mounted on the outside of the mounting seat (29); The mounting seat (29) is provided with sockets (35) distributed in pairs on the circumferential outer wall, and a connector (38) matched with the sockets (35) is provided on the outer wall of one side of the cooling blade (28), and an opening (34) is provided on one side of the connector (38); A blocking column (37) is movably mounted on the inner side of the mounting seat (29) via a spring (32), an annular groove (36) is provided on the outer wall of the central circumference of the blocking column (37), and the diameter of the blocking column (37) is adapted to the inner diameter of the socket (35); When the connector (38) is not inserted, the blocking column (37) blocks the socket (35) based on the support of the spring (32), and at the same time, the position of the annular groove (36) is adapted to the main cold source channel (26), and one end of the main cold source channel (26) is connected to the other end of the main cold source channel (26) through the annular groove (36); When the connector (38) is inserted, the middle of the main cold source channel (26) is blocked by the connector (38), but the two ends of the main cold source channel (26) are connected to the auxiliary cold source channel (33) through the openings (34) to form a new passage. An annular groove is provided on the inner side of the socket (35). A sealing ring (31) adapted to the annular groove is installed on the connector (38). When the connector (38) is inserted into the socket (35), the sealing ring (31) is inserted into the annular groove.

5. The laser gas recovery frozen solid particle separation device according to claim 4 is characterized in that: The auxiliary cold source channel (33) is arranged in a "bow" shape.

6. The laser gas recovery frozen solid particle separation device according to claim 5, characterized in that: An elastic film (30) is arranged inside the cooling blade (28).

7. The laser gas recovery frozen solid particle separation device according to claim 2 is characterized in that: The auxiliary cooler further comprises a support frame (23), and the support frame (23) is installed on one side of the cooling chamber (13); The support frame (23) is provided with a driving mechanism for driving the roller (27) to rotate, and the driving mechanism comprises: A control motor (18), wherein the control motor (18) is mounted on a support frame (23); A driving gear (19), the shaft of which is drivingly connected to the output end of the control motor (18); An outer cylinder (24), the outer cylinder (24) is mounted on the shaft of the rotating roller (27), and the outer cylinder (24) is rotatably mounted on the supporting frame (23); The driven gear (20) is mounted on the shaft of the outer cylinder (24), and the driven gear (20) is meshed with the driving gear (19).

8. The laser gas recovery frozen solid particle separation device according to claim 7 is characterized in that: The shaft of the rotating roller (27) is rotatably mounted in the outer cylinder (24); an electric locking cylinder (22) is mounted on one side of the outer cylinder (24) via a bracket; the position of the output end of the electric locking cylinder (22) is matched with the shaft of the rotating roller (27).

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