A silicon carbide chip continuous detection device

Abstract

The present invention belongs to the field of chip detection technology, and in particular discloses a silicon carbide chip continuous detection device. Regarding the problem that the silicon carbide chips transported by the conveyor belt are not neatly arranged, making it difficult to position their pins. It includes a mounting seat, a support plate is fixedly connected to the mounting seat, the support plate and the mounting seat are connected to a lead screw for rotation together, the lead screw is threadedly connected to a sliding block, the sliding block is slidably connected to a top plate, the top plate is slidably connected to a sliding plate, the mounting seat is fixedly connected to a mounting frame, the mounting frame is slidably connected to a positioning block, the mounting frame is fixedly connected to a support block, and a probe is arranged in the positioning block. The present invention adjusts the pin orientation and detection position of the silicon carbide chip by moving the position of the top plate and the sliding plate, thereby avoiding the uneven arrangement of the silicon carbide chips, resulting in the difficulty in quickly and accurately positioning the position of the silicon carbide chip pins, which affects the detection speed of the silicon carbide chip by the device.

Description

Technical Field

[0001] The invention belongs to the technical field of chip detection, and in particular discloses a silicon carbide chip continuous detection device. Background Art

[0002] Silicon carbide chip is a high-performance semiconductor device. With its excellent high temperature resistance, high voltage resistance and high frequency characteristics, it plays an important role in power electronics, new energy vehicles and other fields. In order to ensure that the various parameters of the produced silicon carbide chips meet the specification requirements, it is necessary to use a parameter analyzer to test the electrical properties of the silicon carbide chips. When continuously testing silicon carbide chips, the working process of the existing silicon carbide chip continuous testing device is usually that the chips to be tested are transported by a conveyor belt, and the chips are neatly arranged on the conveyor belt so that the pins of the chips can be connected in sequence by the parameter analyzer for electrical performance testing. However, in the process of conveying silicon carbide chips by moving the conveyor belt stage, when the conveyor belt starts and stops, the silicon carbide chips will move slightly and deflect at an angle due to their own inertia, which makes it difficult for the parameter analyzer to quickly and accurately locate the pin position when connecting the chip pins, resulting in an increase in the detection time of a single silicon carbide chip, affecting the working efficiency and accuracy of the silicon carbide chip continuous detection device. Summary of the invention

[0003] Aiming at the problem that the silicon carbide chips transported by a conveyor belt are not neatly arranged, making it difficult to locate their pins, the present invention provides a silicon carbide chip continuous detection device.

[0004] The technical solution is: a silicon carbide chip continuous detection device, including a mounting seat, the mounting seat is rotatably connected with equidistantly distributed electric rollers, the equidistantly distributed electric rollers are jointly equipped with a conveyor belt, the mounting seat is fixedly connected with a support plate, the support plate and the mounting seat are jointly rotatably connected with a lead screw, the lead screw is threadedly connected with a sliding block slidably connected to the support plate, the sliding block is slidably connected to a top plate, one side of the support plate is fixedly connected with a mirror image limit bending rod, the mirror image limit bending rods are all extruded and matched with the top plate, the top plate is slidably connected with a mirror image sliding plate, the sliding plate and the A spring is fixed between the top plates, a mirror-image pull rope is fixed to the sliding block, the pull rope is fixed to the corresponding sliding plate, a mounting frame is fixed to the mounting seat away from the support plate, a positioning block is slidably connected to the mounting frame, a support block is fixed to the mounting frame, the positioning block is in contact with the support block, equidistantly distributed grooves are arranged in the positioning block, equidistantly distributed probes are arranged in the positioning block, the lower part of the probe is located in the groove corresponding to the positioning block, and a sequential moving mechanism for controlling the movement and alignment of the silicon carbide chip is arranged on the side of the mounting seat close to the support plate.

[0005] As a preferred embodiment of the present invention, the shortest distance between the mirror-image sliding plates is the same as the width of the silicon carbide chip, so as to accurately locate the pin position of the silicon carbide chip.

[0006] As a preferred embodiment of the present invention, the width of the groove on the positioning block is the same as the width of the silicon carbide chip pin, and is used to limit the position of the silicon carbide chip pin during the detection process.

[0007] As a preferred embodiment of the present invention, the sequential movement mechanism includes a motor, the motor is fixedly connected to the side of the mounting seat close to the support plate, the output shaft of the motor is fixedly connected to the lead screw, a first electric push rod is fixedly connected to one side of the positioning block, the telescopic end of the first electric push rod is fixedly connected to the support block, the middle part of the top plate is slidably connected to a limit pin, a spring is fixedly connected between the limit pin and the top plate, a blind hole that cooperates with the limit pin is provided on the lower side of the sliding block, an extrusion block that extrudes with the top plate is fixedly connected to the side of the mounting seat close to the motor, a bending detection component for determining whether the pins of the silicon carbide chip are significantly bent is provided on the side of the support plate close to the mounting frame, and a removal component for removing scrapped silicon carbide chips is provided on the side of the mounting seat close to the motor.

[0008] As a preferred embodiment of the present invention, the bending detection assembly includes a second electric push rod, which is fixedly connected to one side of the support plate close to the mounting frame, the telescopic end of the second electric push rod is fixedly connected to a connecting plate which is slidably connected to the support plate, the connecting plate is slidably connected to an extrusion plate, a spring is fixedly connected between the connecting plate and the extrusion plate, the extrusion plate is provided with a pressure sensing sheet which is extruded and matched with the connecting plate, the lower side of the support block is slidably connected to a measuring frame, and the mounting frame is provided with a pressure sensing sheet which is extruded and matched with the measuring frame.

[0009] As a preferred embodiment of the present invention, the removal component includes a sliding push rod, which is slidably connected to the side of the mounting seat close to the motor, a spring is fixed between the sliding push rod and the mounting seat, a third electric push rod is fixed to the side of the mounting seat close to the motor, the telescopic end of the third electric push rod is fixed to a fixed frame, a block is provided on the sliding push rod, a fourth electric push rod is provided on the fixed frame, the telescopic end of the fourth electric push rod is fixed to a limiting slider slidably connected to the fixed frame, and the limiting slider is squeezed into fit with the block on the sliding push rod.

[0010] As a preferred embodiment of the present invention, it also includes a pressure control mechanism, which is arranged on one side of the positioning block, and is used to control the force of the equidistantly distributed probes squeezing the pins of the silicon carbide chip. The pressure control mechanism includes an elastic telescopic rod, which is fixed to one side of the positioning block, and the telescopic end of the elastic telescopic rod is extruded and matched with the support block. The probe is slidably connected to the positioning block, and the elastic telescopic rod is connected to a guide tube. The upper side of the positioning block is fixed with equidistantly distributed fixed cylinders, and a piston rod slidably connected to the positioning block in a sealing manner in the fixed cylinder, a spring is fixed between the piston rod and the corresponding fixed cylinder, and a through hole is provided in the piston rod, and the probe seals and slides in the corresponding through hole of the piston rod. The equidistantly distributed piston rods are commonly connected to the guide tube, a sliding baffle is slidably connected to the upper side of the piston rod, a spring is fixedly connected between the sliding baffle and the corresponding piston rod, a through hole is provided on the sliding baffle and is communicated and matched with the corresponding through hole of the piston rod, an inclined surface is provided on one side of the sliding baffle, an extrusion rod is slidably connected to the upper side of the piston rod through a mounting plate, the extrusion rod is extruded and matched with the inclined surface of the sliding baffle, the elastic telescopic rod, the guide tube, the fixed cylinder corresponding to the upper side of the piston rod and the through hole of the piston rod are all filled with hydraulic oil, a liquid storage component for temporarily storing the hydraulic oil in the equidistantly distributed fixed cylinders is provided on the mounting frame, and a reset component for assisting the telescopic end of the elastic telescopic rod to restore to an initial position is provided on the upper side of the mounting frame.

[0011] As a preferred embodiment of the present invention, the relative length of the inclined surface on the sliding baffle on the horizontal plane is equal to the diameter of the through hole thereon, and the diameter of the through hole of the sliding baffle is equal to the diameter of the through hole of the piston rod, so as to ensure the maximum connection area between the through hole of the sliding baffle and the through hole of the piston rod.

[0012] As a preferred embodiment of the present invention, the liquid storage assembly includes a liquid storage cylinder, which is fixed to the mounting frame, a circular plate is slidably connected inside the liquid storage cylinder, the liquid storage cylinder is connected to a shunt pipe, the upper sides of the equidistantly distributed fixed cylinders are commonly connected to the shunt pipe, and the shunt pipe and the lower side of the circular plate in the liquid storage cylinder are both filled with hydraulic oil.

[0013] As a preferred embodiment of the present invention, the reset assembly includes a fixing frame, the fixing frame is fixedly connected to the upper side of the mounting frame, the upper side of the fixing cylinder is connected to a pressing rod by a connecting block through a limiting sliding connection, the pressing rod is extruded and matched with the corresponding extrusion rod, and the pressing rod is extruded and matched with the fixing frame.

[0014] Compared with the prior art, the present invention has the following advantages: 1. The present invention adjusts the pin orientation and detection position of the silicon carbide chip by moving the position of the top plate and the sliding plate, thereby avoiding the uneven arrangement of the silicon carbide chip, which makes it difficult to quickly and accurately locate the position of the silicon carbide chip pins and affects the detection speed of the device for the silicon carbide chip.

[0015] 2. The present invention determines whether the pins of the silicon carbide chip are significantly tilted by the relative positions of the connecting plate and the extrusion plate in the bending detection assembly, thereby shortening the detection steps of the device for scrapped silicon carbide chips and improving the speed of the device for continuous detection of silicon carbide chips.

[0016] 3. The present invention achieves the purpose of quickly determining and removing unqualified silicon carbide chips by moving the position of the limit slider in the removal component, thereby reducing the possibility that the silicon carbide chips cannot work normally and ensuring the quality of the final product of the device.

[0017] 4. The present invention controls the connection state between the piston rod through hole and the sliding baffle through hole in the pressure control mechanism, so that the probe maintains a stable extrusion force on the silicon carbide chip pin, thereby ensuring the safety of the silicon carbide chip pin. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0019] Figure 2 It is a three-dimensional structural schematic diagram of the parts of the sliding push rod and the third electric push rod of the present invention;

[0020] Figure 3 It is a three-dimensional structural schematic diagram of the parts of the support plate and the lead screw of the present invention;

[0021] Figure 4 It is a three-dimensional structural schematic diagram of the parts at the top plate and the sliding plate of the present invention;

[0022] Figure 5 It is a three-dimensional structural schematic diagram of the sliding block and the pull rope parts of the present invention;

[0023] Figure 6 It is a three-dimensional structural schematic diagram of the parts of the elastic telescopic rod and the guide pipe of the present invention;

[0024] Figure 7 It is a cross-sectional view of the parts at the positioning block and the supporting block of the present invention;

[0025] Figure 8 It is a cross-sectional view of the parts of the mounting frame and the fixing cylinder of the present invention;

[0026] Fig. 9 It is a three-dimensional structural schematic diagram of the parts at the connecting plate and the extrusion plate of the present invention;

[0027] Fig.10 It is a schematic diagram of the three-dimensional structure of the parts of the fourth electric push rod and the limit slider of the present invention;

[0028] Fig.11 It is a three-dimensional structural schematic diagram of the parts at the sliding baffle and the extrusion rod of the present invention.

[0029] Markings in the accompanying drawings: 1-mounting seat, 2-electric roller, 3-conveyor belt, 4-support plate, 5-screw, 6-sliding block, 7-top plate, 8-limiting bending rod, 9-sliding plate, 10-pull rope, 11-mounting frame, 12-positioning block, 13-support block, 14-probe, 201-motor, 202-first electric push rod, 203-limiting pin, 204-extrusion block, 301-second electric push rod, 302-connecting plate, 303- Extrusion plate, 304-measurement frame, 401-sliding push rod, 402-third electric push rod, 403-fixed frame, 404-fourth electric push rod, 405-limiting slider, 501-elastic telescopic rod, 502-guide tube, 503-fixed cylinder, 504-piston rod, 505-sliding baffle, 506-extrusion rod, 601-liquid storage cylinder, 602-round plate, 603-diverter tube, 701-fixed frame, 702-pressing rod. DETAILED DESCRIPTION

[0030] The following is combined with Figure 1-Figure 11 , the technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0031] Example 1: During operation of the silicon carbide chip continuous detection device, the conveyor belt transports the silicon carbide chips in a staged movement. When the conveyor belt starts and stops, the silicon carbide chips on the conveyor belt will move and deflect due to the action of inertia, causing the silicon carbide chips on the conveyor belt to be arranged unevenly, making it difficult for the parameter analyzer to quickly and accurately locate the position of the silicon carbide chip pins, resulting in an increase in the detection time of a single chip, thereby reducing the working efficiency of the silicon carbide chip detection device.

[0032] A silicon carbide chip continuous detection device, please refer to Figure 1-Figure 7As shown, it includes a mounting seat 1, on which a plurality of equally spaced electric rollers 2 are rotatably connected, and a conveyor belt 3 is jointly mounted on the plurality of electric rollers 2. A mechanical arm (not shown in the figure) is arranged on the right side of the mounting seat 1, which is used to place the silicon carbide chips to be detected on the conveyor belt 3 in sequence, and the conveyor belt 3 rotates counterclockwise (from front to back) to transport the equally spaced silicon carbide chips thereon to the left, and a control panel is arranged on the mounting seat 1, and a support plate 4 is fixedly connected to the front side of the mounting seat 1, and the support plate 4 is located above the conveyor belt 3, and a lead screw 5 is rotatably connected to the lead screw 5, and a sliding block 6 is threadedly connected to the sliding block 6, and the sliding block 6 is slidably connected to the support plate 4, and the sliding block 6 is T-shaped, and a top plate 7 is slidably connected to the lower side of the sliding block 6, and the support plate One side of the block 4 is fixedly connected with two limit bending rods 8 of left and right mirror images, the limit bending rods 8 are L-shaped, and the two limit bending rods 8 are squeezed and matched with the top plate 7, so that the top plate 7 pushes the silicon carbide chip to move to the specified detection position, and the top plate 7 is slidably connected with two sliding plates 9 of left and right mirror images, and the shortest distance between the two sliding plates 9 is the same as the width of the silicon carbide chip, which is used to accurately locate the pin position of the silicon carbide chip. The two sliding plates 9 complete the adjustment of the pin orientation of the silicon carbide chip by clamping the silicon carbide chip, which is convenient for subsequent rapid detection of the silicon carbide chip. A spring is fixedly connected between the sliding plate 9 and the top plate 7, and two left-right symmetrical rotating wheels are arranged on the top plate 7. The sliding block 6 is fixedly connected with two left-right mirror image pull ropes 10, and the pull ropes 10 are connected to the corresponding rotating wheels on the top plate 7 and the corresponding sliding wheels. The movable plate 9 is fixedly connected, and is used to make the two sliding plates 9 approach or move away when the sliding block 6 and the top plate 7 move relative to each other. A mounting frame 11 is fixedly connected to the rear side of the mounting seat 1, and a positioning block 12 is slidably connected to the mounting frame 11. A supporting block 13 is fixedly connected to the mounting frame 11, and the positioning block 12 contacts and cooperates with the supporting block 13. The positioning block 12 is located on the upper side of the supporting block 13, and the positioning block 12 and the supporting block 13 are initially in a state of being away from each other. Three grooves equidistantly distributed on the left and right are arranged in the positioning block 12, and three probes 14 equidistantly distributed on the left and right are arranged in the positioning block 12. The spacing between the three probes 14 is the same as the spacing between the three grooves in the positioning block 12, and the lower part of the probe 14 is located in the groove corresponding to the positioning block 12. The three probes 14 are externally connected to a parameter analyzer (the parameter analyzer is a conventional There is a mechanism, not shown in the figure), the parameter analyzer is electrically connected to the silicon carbide chip pins through three probes 14, which is used to detect the breakdown voltage, on-resistance, gate threshold voltage and other data of the silicon carbide chip, and determine whether the silicon carbide chip meets the specification requirements. The width of the groove on the positioning block 12 is the same as the width of the silicon carbide chip pin, which is used to limit the position of the silicon carbide chip pin during the detection process. The front side of the mounting seat 1 is provided with a sequential moving mechanism for controlling the movement and alignment of the silicon carbide chip. The electric roller 2 and the sequential moving mechanism are electrically connected to the control panel. By moving the positions of the two sliding plates 9 and the top plate 7, the orientation and detection position of the silicon carbide chip pins can be quickly located to avoid the silicon carbide chip being arranged in an untidy manner, resulting in the inability to quickly locate the silicon carbide chip pins.Affects the efficiency of the device in continuous detection of silicon carbide chips.

[0033] Please refer to Figure 2-Figure 5 , Figure 7 and Figure 8 As shown, the sequential moving mechanism includes a motor 201, which is fixedly connected to the front side of the mounting base 1, and the output shaft of the motor 201 is fixedly connected to the lead screw 5. A first electric push rod 202 is fixedly connected to the left side of the positioning block 12, and the telescopic end of the first electric push rod 202 is fixedly connected to the support block 13. The positioning block 12 and the support block 13 are controlled to move away from or approach each other by extending or contracting the telescopic end of the first electric push rod 202. The middle part of the top plate 7 is slidably connected to a limit pin 203, and a spring is fixedly connected between the limit pin 203 and the top plate 7. A blind hole is provided on the lower side of the sliding block 6, and the blind hole of the sliding block 6 is limitedly matched with the limit pin 203. The upper part of the limit pin 203 is a hemisphere, and only the hemisphere part of the limit pin 203 cooperates with the blind hole of the sliding block 6. At the beginning, the hemispherical part of the limit pin 203 is located in the blind hole of the sliding block 6, the sliding block 6 is relatively fixed to the top plate 7, the front side of the mounting seat 1 is fixedly connected with an extrusion block 204, the extrusion block 204 is extruded and matched with the top plate 7, the extrusion block 204 is located above the conveyor belt 3, the rear side of the support plate 4 is provided with a bending detection component for determining whether the pins of the silicon carbide chip are greatly bent, the front side of the mounting seat 1 is provided with a removal component for removing scrapped silicon carbide chips, the removal component, the bending detection component, the motor 201 and the first electric push rod 202 are all electrically connected to the control panel, the relative movement state of the sliding block 6 and the top plate 7 is limited by the limit pin 203, so that the sliding plate 9 is first adjusted to the silicon carbide chip with a large deflection and then positioned and fixed.

[0034] Please refer to Figure 3 , Figure 4 and Figure 7-Figure 9As shown, the bending detection assembly includes a second electric push rod 301, which is fixedly connected to the rear side of the support plate 4, and a connecting plate 302 is fixedly connected to the telescopic end of the second electric push rod 301. The connecting plate 302 is slidably connected to the support plate 4, and a squeezing plate 303 is slidably connected to the lower side of the connecting plate 302. A spring is fixedly connected between the connecting plate 302 and the squeezing plate 303, and a pressure sensing sheet is arranged on the squeezing plate 303, and the pressure sensing sheet is squeezed and matched with the connecting plate 302. A measuring frame 304 is slidably connected to the lower side of the support block 13, and the measuring frame 304 is composed of three equidistant cylinders on the upper part and a flat plate on the lower part. The diameter of the cylinder is larger than the diameter of the probe 14, and a mounting frame 11 is provided with The pressure sensing sheet is squeezed and matched with the measuring frame 304. Initially, only the weight of the measuring frame 304 acts on the pressure sensing sheet on the mounting frame 11. The pressure sensing sheet on the mounting frame 11, the pressure sensing sheet on the extrusion plate 303 and the second electric push rod 301 are all electrically connected to the control panel. According to whether the extrusion plate 303 slides on the connecting plate 302, combined with the signal feedback of the pressure sensing sheet on the mounting frame 11 and the pressure sensing sheet on the extrusion plate 303, it is quickly determined whether the pins of the silicon carbide chip are tilted significantly and whether to continue the subsequent detection process, so as to achieve the purpose of not detecting scrapped silicon carbide chips by the device and improve the speed of the device in detecting silicon carbide chips.

[0035] Please refer to Figure 2 and Fig.10 As shown, the removal component includes a sliding push rod 401, which is slidably connected to the front side of the mounting seat 1, a spring is fixedly connected between the sliding push rod 401 and the mounting seat 1, a third electric push rod 402 is fixedly connected to the front side of the mounting seat 1, the third electric push rod 402 is located on the right side of the sliding push rod 401, the sliding push rod 401 is not on the moving path of the telescopic end of the third electric push rod 402, the telescopic end of the third electric push rod 402 is fixedly connected to a fixed frame 403, a block is provided on the sliding push rod 401, and a fourth electric push rod 404 is provided on the fixed frame 403, the telescopic end of the fourth electric push rod 404 is fixedly connected to a limiting slider 405, the limiting slider 405 is initially located in front of the block on the sliding push rod 401 in the front-to-back direction, the limiting slider 405 is slidably connected to the fixed frame 403, the limiting slider 405 is squeezed and matched with the block on the sliding push rod 401, and the third electric push rod 402 and the fourth electric push rod 404 are both electrically connected to the control panel.

[0036] When the device is used to continuously detect silicon carbide chips, the robot arm first places the silicon carbide chips to be detected on the conveyor belt 3 at equal intervals, and then starts the electric roller 2 through the control panel. The electric roller 2 rotates step by step, and several electric rollers 2 drive the conveyor belt 3 to rotate counterclockwise (from front to back), so that the silicon carbide chips on the conveyor belt 3 are transported to the left in stages. During the step-by-step rotation of the conveyor belt 3, the distance that the silicon carbide chip moves at a time is the distance between two adjacent silicon carbide chips. After the conveyor belt 3 transports the silicon carbide chips to the left for a fixed distance, the electric roller 2 stops rotating. After a period of time, the electric roller 2 starts again to repeat the above rotation operation. At the same time, the robot arm continues to place the silicon carbide chips to be detected on the conveyor belt 3, so that the conveyor belt 3 continues to transport the chips to be detected that are evenly distributed to the left. When the silicon carbide chips move to the bottom of the support plate 4, the electric roller 2 just stops. During the staged transportation of the silicon carbide chips by the conveyor belt 3, there is a certain inclination due to inertia. At this time, the control panel starts the motor 201, and the output shaft of the motor 201 drives the screw 5 to rotate. The rotation of the screw 5 causes the sliding block 6 to drive the parts connected to it to move backward.

[0037] In the process of the sliding block 6 driving the connected parts to move backward, the two sliding plates 9 move backward and pass the left and right sides of the silicon carbide chip respectively. If the silicon carbide chip tilts greatly, the two sliding plates 9 push the pins of the silicon carbide chip to swing backward, so that the pins of the silicon carbide chip face the rear side, and then the top plate 7 contacts and drives the silicon carbide chip to move backward. When the top plate 7 contacts the two limit bending rods 8, the top plate 7 stops moving. As the sliding block 6 moves backward under the rotation of the lead screw 5, the blind hole of the sliding block 6 squeezes the limit pin 203, and the limit pin 203 moves downward and compresses the connected spring. The limit pin 203 moves out of the blind hole of the sliding block 6, and the sliding block 6 moves backward relative to the top plate 7. When the sliding block 6 loses contact with the limit pin 203, the limit pin 203 extends upward under the action of the connected spring.

[0038] During the process of the sliding block 6 moving backward relative to the top plate 7, the sliding block 6 pulls the two sliding plates 9 through the two pull ropes 10, and the two sliding plates 9 approach each other and compress the connected springs. When the two sliding plates 9 move to the extreme position, the control panel turns off the motor 201, and the sliding block 6 moves backward on the screw 5 to the extreme position. The two sliding plates 9 complete the clamping of the left and right sides of the silicon carbide chip, and the pins of the silicon carbide chip face the rear side. At this point, the positioning and fixation of the silicon carbide chip are completed. By moving the position of the top plate 7 and the two sliding plates 9, the three surfaces of the silicon carbide chip are clamped and fixed, which is convenient for the device to quickly connect to detect the pins of the silicon carbide chip, thereby shortening the detection time of a single silicon carbide chip.

[0039] When the motor 201 stops, the control panel starts the first electric push rod 202 and the second electric push rod 301, and the telescopic end of the second electric push rod 301 extends a fixed distance and then stops. The telescopic end of the second electric push rod 301 extends and drives the extrusion plate 303 to move downward through the connecting plate 302, which is used to judge whether the pins of the silicon carbide chip are greatly tilted. If the pins of the silicon carbide chip are in a greatly tilted state, there is an angle between the silicon carbide chip and the conveyor belt 3, and the extrusion plate 303 contacts and extrude the silicon carbide chip during the downward movement. As the telescopic end of the second electric push rod 301 extends, the extrusion plate 303 moves upward relative to the connecting plate 302, the spring between the connecting plate 302 and the extrusion plate 303 is compressed, and the pressure sensing sheet on the extrusion plate 303 is squeezed by the connecting plate 302 and feedbacks a signal to the control panel. If the pins of the silicon carbide chip are not greatly tilted, the extrusion plate 303 will eventually only contact the silicon carbide chip, and the extrusion plate 303 and the connecting plate 302 will not move relative to each other.

[0040] When the first electric push rod 202 is started, the telescopic end of the first electric push rod 202 contracts, and the movement of the telescopic end of the first electric push rod 202 makes the positioning block 12 and the supporting block 13 approach each other, and finally the facing surfaces of the positioning block 12 and the supporting block 13 contact and fit, and the three pins of the silicon carbide chip enter the three grooves on the lower side of the positioning block 12, and the three probes 14 in the positioning block 12 contact with the corresponding pins of the silicon carbide chip. At this time, the parameter analyzer is started, and the parameter analyzer is electrically connected to the pins of the silicon carbide chip through the three probes 14, and the breakdown voltage, on-resistance, gate threshold voltage and other data of the silicon carbide chip are detected to determine whether the silicon carbide chip meets the specification requirements. When the silicon carbide chip detection is completed, if the electrical connection inside the silicon carbide chip is unqualified, the parameter analyzer will feedback a signal to the control panel.

[0041] When the silicon carbide chip detection is completed, the control panel starts the first electric push rod 202 and the second electric push rod 301, the telescopic end of the first electric push rod 202 extends, the positioning block 12 and the support block 13 move away from each other and restore to their initial positions, the first electric push rod 202 is closed, and at the same time, the telescopic end of the second electric push rod 301 contracts, the telescopic end of the second electric push rod 301 drives the connecting plate 302 and the extrusion plate 303 to restore to their initial positions, and the second electric push rod 301 is closed.

[0042] After the second electric push rod 301 is closed, the control panel controls the output shaft of the motor 201 to reverse, the sliding block 6 moves forward on the screw 5 to reset, the two pull ropes 10 are relaxed, and the two sliding plates 9 move away from each other and return to their initial positions under the elastic force of the connected springs. Subsequently, the sliding block 6 drives the top plate 7 and the connected parts to move forward and return to their initial positions through the limit pin 203. When the top plate 7 contacts the extrusion block 204, the top plate 7 stops moving, and the lower edge of the sliding block 6 squeezes the limit pin 203. The limit pin 203 moves downward and compresses the connected spring. As the sliding block 6 moves forward, when the limit pin 203 is aligned with the blind hole of the sliding block 6, the limit pin 203 moves upward under the elastic force of the connected spring and is inserted into the blind hole of the sliding block 6. The sliding block 6 and the top plate 7 return to their initial relative positions. At this time, the sliding block 6 returns to its initial position, the control panel turns off the motor 201 and starts the electric roller 2 to perform a rotation operation, conveying the silicon carbide chip that has been tested to the left, and at the same time conveying the next silicon carbide chip to be tested to the bottom of the support plate 4.

[0043] When the electric roller 2 completes a single rotation operation, the control panel starts the third electric push rod 402, and the telescopic end of the third electric push rod 402 performs an extension and retraction operation, and then the third electric push rod 402 is closed. Before the third electric push rod 402 is started, if the pressure sensing piece on the extrusion plate 303 feeds back a signal to the control panel, the control panel starts the fourth electric push rod 404, and the telescopic end of the fourth electric push rod 404 extends, and the telescopic end of the fourth electric push rod 404 drives the limit slider 405 to move a distance to the left and then stops. At this time, the third electric push rod 402 The push rod 402 is started, and the telescopic end of the third electric push rod 402 drives the fixed frame 403 and the limit slider 405 to move backward. The limit slider 405 contacts and pushes the upper stopper of the sliding push rod 401, and the sliding push rod 401 moves backward. The sliding push rod 401 compresses the spring connected to it, and the sliding push rod 401 pushes the silicon carbide chip with a greatly tilted pin out of the device, so as to achieve the purpose of screening the silicon carbide chip. Similarly, if the parameter analyzer feeds back a signal to the control panel, the fourth electric push rod 404 is also started, and the sliding push rod 401 pushes The device is pushed out corresponding to the silicon carbide chip. When the telescopic end of the third electric push rod 402 is contracted, the sliding push rod 401 moves and resets under the elastic force of the connected spring. At the same time, the telescopic end of the fourth electric push rod 404 drives the limit slider 405 to restore the initial position. The control panel closes the fourth electric push rod 404. If the pressure sensing piece on the extrusion plate 303 does not feedback a signal to the control panel, it means that the silicon carbide chip is qualified, and the sliding push rod 401 will not be driven. The above-mentioned silicon carbide chip alignment, positioning, detection and screening operations are repeated continuously to complete the continuous detection of the silicon carbide chip. If the pressure sensing piece on the extrusion plate 303 feedbacks a signal to the control panel, the first electric push rod 202 is not started, and the related operations of reversing the output shaft of the above-mentioned motor 201 are directly performed. The silicon carbide chip is subsequently removed by the related operations at the sliding push rod 401 to avoid the detection of scrapped silicon carbide chips, thereby speeding up the speed of continuous detection of silicon carbide chips by the device. When the use of the device is completed, the operator turns off the electric roller 2 through the control panel, and all parts are restored to their initial states.

[0044] In the above embodiment, the three probes 14 are fixedly connected to the positioning block 12 . However, in subsequent embodiments, the three probes 14 are slidably connected to the positioning block 12 .

[0045] Example 2: When performing continuous inspection on silicon carbide chips, the pins of the silicon carbide chips usually have a small up and down tilt, which makes it difficult to control the movement distance of the probe that contacts the pins of the silicon carbide chip, resulting in different squeezing forces of the probe on the pins of different silicon carbide chips. It is easy for the probe to exert excessive squeezing force on the pins of the silicon carbide chip, causing the pins of the silicon carbide chip to deform, resulting in the scrapping of the silicon carbide chip and affecting the working quality of the silicon carbide chip continuous inspection device.

[0046] Based on Example 1, please refer to Figure 6-Figure 8 and Fig.11 As shown, it also includes a pressure control mechanism, which is arranged on the right side of the positioning block 12. The pressure control mechanism is used to control the strength of the three probes 14 squeezing the pins of the silicon carbide chip. The pressure control mechanism includes an elastic telescopic rod 501, which is fixed to the right side of the positioning block 12. The telescopic end of the elastic telescopic rod 501 is squeezed and matched with the support block 13. The telescopic end of the elastic telescopic rod 501 is initially in an extended state. The probe 14 is slidably connected to the positioning block 12. The elastic telescopic rod 501 is connected to a guide tube 502. Three fixed cylinders 503 equidistantly distributed on the left and right are fixed to the upper side of the positioning block 12. The fixed cylinder 503 is sealed and slidably connected to a piston rod 504. The piston rod 504 is connected to the The positioning block 12 is slidably connected, and a spring is fixedly connected between the piston rod 504 and the corresponding fixed cylinder 503 to provide the probe 14 with an extrusion force on the silicon carbide chip pin. A through hole is set in the piston rod 504, and the probe 14 slides in the corresponding through hole of the piston rod 504 in a sealed manner. The three piston rods 504 are connected to the guide tube 502 together, and the guide tube 502 penetrates the three fixed cylinders 503. The upper side of the piston rod 504 is slidably connected with a sliding baffle 505, which initially blocks the through hole of the corresponding piston rod 504. The through hole of the piston rod 504 and the corresponding probe 14 are combined to act like a hydraulic cylinder. A spring is fixedly connected between the sliding baffle 505 and the corresponding piston rod 504 to assist the sliding baffle 505 and When the piston rod 504 through hole is reset and blocked, a through hole is set on the sliding baffle 505, and the through hole on the sliding baffle 505 is connected and matched with the corresponding piston rod 504 through hole. The relative length of the inclined surface on the sliding baffle 505 in the horizontal plane is equal to the diameter of the through hole thereon, and the diameter of the through hole of the sliding baffle 505 is equal to the diameter of the through hole of the piston rod 504, which is used to ensure the maximum connection area between the through hole of the sliding baffle 505 and the through hole of the piston rod 504. An inclined surface is set on the right side of the sliding baffle 505, and the upper side of the piston rod 504 is slidably connected with an extrusion rod 506 through a mounting plate. The extrusion rod 506 is extruded and matched with the inclined surface of the corresponding sliding baffle 505, which is used to limit the limit compression length of the spring connected to the piston rod 504, and the elastic telescopic rod 501, the guide tube 502, the upper side of the piston rod 504 corresponding to the fixed cylinder 503 and the through hole of the piston rod 504 are all filled with hydraulic oil. The mounting frame 11 is provided with a liquid storage component for temporarily storing the hydraulic oil in the equidistantly distributed fixed cylinder 503. The upper side of the mounting frame 11 is provided with a reset component for assisting the telescopic end of the elastic telescopic rod 501 to restore the initial position. By controlling the connection and misalignment between the through hole of the sliding baffle 505 and the through hole of the piston rod 504, the compression distance of the spring connected to the piston rod 504 is guaranteed to be consistent, ensuring that the extrusion pressure of the probe 14 on the silicon carbide chip pin remains stable, avoiding excessive extrusion pressure on the silicon carbide chip pin to cause deformation, resulting in the scrapping of the silicon carbide chip and affecting the detection quality of the device.

[0047] Please refer to Figure 3 and Figure 6-Figure 8As shown, the liquid storage assembly includes a liquid storage cylinder 601, which is fixed to the mounting frame 11, and a circular plate 602 is slidably connected inside the liquid storage cylinder 601. The circular plate 602 is used to keep the inflow and outflow of the hydraulic oil in the liquid storage cylinder 601 stable, so as to avoid gas entering the hydraulic oil delivery path and affecting the control of the probe 14 on the squeezing force of the silicon carbide chip pin. The liquid storage cylinder 601 is connected to a shunt pipe 603, and the upper sides of the equidistantly distributed fixed cylinders 503 are commonly connected to the shunt pipe 603, and the shunt pipe 603 and the lower side of the circular plate 602 inside the liquid storage cylinder 601 are both filled with hydraulic oil.

[0048] Please refer to Figure 2 , Figure 3 , Figure 7 , Figure 8 and Fig.11 As shown, the reset assembly includes a fixing frame 701, which is fixedly connected to the upper side of the mounting frame 11. The upper side of the fixing cylinder 503 is slidably connected to a pressing rod 702 through a connecting block. The pressing rod 702 initially moves downward. The cross-section of the pressing rod 702 is circular. The pressing rod 702 enters the corresponding fixing cylinder 503 and slides in a sealed manner. The extrusion rod 506 cannot pop out of the fixing cylinder 503. The pressing rod 702 is extruded and matched with the corresponding extrusion rod 506. The pressing rod 702 is extruded and matched with the fixing frame 701, so that the fixing frame 701 controls the extrusion rod 506 to release the blockage of the through hole of the piston rod 504, thereby ensuring the smooth reflux of the hydraulic oil in the elastic telescopic rod 501.

[0049] During the contraction of the telescopic end of the first electric push rod 202, the telescopic end of the elastic telescopic rod 501 squeezes the support block 13, the telescopic end of the elastic telescopic rod 501 contracts, and the hydraulic oil in the elastic telescopic rod 501 enters the three piston rod 504 through holes through the guide tube 502. Since the through hole of the sliding baffle 505 and the through hole of the piston rod 504 are in a misaligned state at the initial stage, the hydraulic oil in the piston rod 504 increases, causing the corresponding probe 14 to move downward. Taking the probe 14 on the right as an example, when the probe 14 contacts the pin of the silicon carbide chip, the probe 14 stops moving, and the piston rod 504 moves upward relative to the fixed cylinder 503. The piston rod 504 compresses the spring connected to it, and the squeezing force of the probe 14 on the corresponding pin of the silicon carbide chip gradually increases.

[0050] In the process of piston rod 504 moving upward relative to fixed cylinder 503, when the extrusion force of probe 14 on silicon carbide chip pin reaches the set size, extrusion rod 506 contacts the inner top surface of fixed cylinder 503, extrusion rod 506 stops moving, as hydraulic oil enters piston rod 504, piston rod 504 continues to move upward relative to fixed cylinder 503, extrusion rod 506 squeezes the right side inclined surface of sliding baffle 505, sliding baffle 505 moves to the left and compresses the connected spring, the through hole of sliding baffle 505 is connected with the through hole of piston rod 504, hydraulic oil in piston rod 504 passes through fixed cylinder 503 and shunt pipe 6 03 enters the liquid storage cylinder 601, the circular plate 602 moves upward, and the piston rod 504 stops moving upward in the fixed cylinder 503. When the positioning block 12 and the supporting block 13 are fitted, as the hydraulic oil in the piston rod 504 flows into the fixed cylinder 503, the piston rod 504 moves slightly downward, and the sliding baffle 505 moves to the right and resets under the elastic force of the connected spring. At this point, no matter how much the small inclination angle of the silicon carbide chip pin is, the extrusion pressure of the probe 14 remains consistent, avoiding excessive extrusion pressure of the probe 14 on the silicon carbide chip pin, resulting in deformation of the silicon carbide chip pin and causing the silicon carbide chip to be scrapped.

[0051] During the downward movement of the probe 14, if there is no silicon carbide chip pin in the groove of the positioning block 12 corresponding to the probe 14, the probe 14 continues to move downward, and the probe 14 contacts the extrusion measuring frame 304. The pressure sensing sheet on the mounting frame 11 is squeezed by the measuring frame 304 and feedbacks the signal to the control panel. The control panel also starts the fourth electric push rod 404, and the sliding push rod 401 pushes the corresponding unqualified silicon carbide chip out of the device. At this time, the silicon carbide chip pin is broken or tilted to the left or right, and the silicon carbide chip cannot be used. During the process of the telescopic end of the first electric push rod 202 extending to reset the positioning block 12 and the support block 13, the support block 13 drives the three fixed cylinders 503 and the parts connected thereto to move upward, and the elastic extension The telescopic end of the retractable rod 501 extends out, and the hydraulic oil in the guide tube 502 and the shunt tube 603 flows in the opposite direction. The probe 14 moves upward relative to the corresponding piston rod 504 to restore the initial position. The piston rod 504 moves downward and resets under the elastic force of the connected spring. The circular plate 602 moves downward. When the pressing rod 702 on the fixed cylinder 503 contacts and squeezes the fixed frame 701, the pressing rod 702 moves the sliding baffle 505 to the left through the squeezing rod 506. The sliding baffle 505 compresses the connected spring, and part of the hydraulic oil in the fixed cylinder 503 flows back to the elastic telescopic rod 501 through the piston rod 504 and the guide tube 502. The telescopic end of the elastic telescopic rod 501 extends to the initial position. At this point, all parts are restored to their initial positions.

[0052] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A silicon carbide chip continuous detection device, comprising a mounting seat (1), to which equidistantly distributed electric rollers (2) are rotatably connected, and the equidistantly distributed electric rollers (2) are jointly provided with a conveyor belt (3), characterized in that: The invention also comprises a support plate (4), wherein the support plate (4) is fixedly connected to the mounting seat (1), the support plate (4) and the mounting seat (1) are rotatably connected to a lead screw (5), the lead screw (5) is threadedly connected to a sliding block (6) slidably connected to the support plate (4), the sliding block (6) is slidably connected to a top plate (7), a mirror image limit bending rod (8) is fixedly connected to one side of the support plate (4), the mirror image limit bending rod (8) is pressed and matched with the top plate (7), the top plate (7) is slidably connected to a mirror image sliding plate (9), a spring is fixedly connected between the sliding plate (9) and the top plate (7), the sliding block (6) is fixedly connected to a mirror image pull rope (10), the pull rope ( 10) is fixedly connected to the corresponding sliding plate (9), a mounting frame (11) is fixedly connected to the side of the mounting seat (1) away from the support plate (4), a positioning block (12) is slidably connected to the mounting frame (11), a support block (13) is fixedly connected to the mounting frame (11), the positioning block (12) is in contact with the support block (13), the positioning block (12) is provided with grooves distributed at equal intervals, the positioning block (12) is provided with probes (14) distributed at equal intervals, the lower part of the probe (14) is located in the groove corresponding to the positioning block (12), and a sequential moving mechanism for controlling the movement and alignment of the silicon carbide chip is provided on the side of the mounting seat (1) close to the support plate (4).

2. The silicon carbide chip continuous detection device according to claim 1, characterized in that: The shortest distance between the mirror-image sliding plates (9) is the same as the width of the silicon carbide chip, and is used to accurately locate the pin position of the silicon carbide chip.

3. The silicon carbide chip continuous detection device according to claim 1, characterized in that: The width of the groove on the positioning block (12) is the same as the width of the silicon carbide chip pin, and is used to limit the position of the silicon carbide chip pin during the detection process.

4. The silicon carbide chip continuous detection device according to claim 1, characterized in that: The sequential movement mechanism comprises a motor (201), the motor (201) being fixedly connected to a side of the mounting seat (1) close to the support plate (4), the output shaft of the motor (201) being fixedly connected to the lead screw (5), a first electric push rod (202) being fixedly connected to one side of the positioning block (12), the telescopic end of the first electric push rod (202) being fixedly connected to the support block (13), a limit pin (203) being slidably connected to the middle of the top plate (7), the limit pin (203) being fixedly connected to the top plate (7). A spring is connected, a blind hole is provided on the lower side of the sliding block (6) for limiting the limit pin (203), an extrusion block (204) is fixedly connected to the side of the mounting seat (1) close to the motor (201) for extrusion matching the top plate (7), a bending detection component for determining whether the pins of the silicon carbide chip are significantly bent is provided on the side of the support plate (4) close to the mounting frame (11), and a removal component for removing scrapped silicon carbide chips is provided on the side of the mounting seat (1) close to the motor (201).

5. The silicon carbide chip continuous detection device according to claim 4, characterized in that: The bending detection assembly comprises a second electric push rod (301), the second electric push rod (301) is fixedly connected to a side of the support plate (4) close to the mounting frame (11), the telescopic end of the second electric push rod (301) is fixedly connected to a connecting plate (302) slidably connected to the support plate (4), the connecting plate (302) is slidably connected to an extrusion plate (303), a spring is fixedly connected between the connecting plate (302) and the extrusion plate (303), a pressure sensing sheet extruded and matched with the connecting plate (302) is provided on the extrusion plate (303), a measuring frame (304) is slidably connected to the lower side of the support block (13), and a pressure sensing sheet extruded and matched with the measuring frame (304) is provided on the mounting frame (11).

6. The silicon carbide chip continuous detection device according to claim 4, characterized in that: The removal component comprises a sliding push rod (401), the sliding push rod (401) being slidably connected to a side of the mounting seat (1) close to the motor (201), a spring being fixedly connected between the sliding push rod (401) and the mounting seat (1), a third electric push rod (402) being fixedly connected to a side of the mounting seat (1) close to the motor (201), a telescopic end of the third electric push rod (402) being fixedly connected to a fixed frame (403), a stopper being provided on the sliding push rod (401), a fourth electric push rod (404) being provided on the fixed frame (403), a limit slider (405) being fixedly connected to a slidable connection with the fixed frame (403) at the telescopic end of the fourth electric push rod (404), and the limit slider (405) being pressed and fitted with the stopper on the sliding push rod (401).

7. The silicon carbide chip continuous detection device according to claim 5, characterized in that: The device also includes a pressure control mechanism, which is arranged on one side of the positioning block (12). The pressure control mechanism is used to control the force with which the equally spaced probes (14) squeeze the pins of the silicon carbide chip. The pressure control mechanism includes an elastic telescopic rod (501), which is fixed to one side of the positioning block (12). The telescopic end of the elastic telescopic rod (501) is squeezed and matched with the support block (13). The probe (14) is slidably connected to the positioning block (12). The elastic telescopic rod (501) is connected to a guide tube (502); the upper side of the positioning block (12) is fixedly connected to equidistantly distributed fixed cylinders (503); a piston rod (504) slidably connected to the positioning block (12) is sealed and slidably connected in the fixed cylinder (503); a spring is fixedly connected between the piston rod (504) and the corresponding fixed cylinder (503); a through hole is provided in the piston rod (504); the probe (14) seals and slides in the through hole corresponding to the piston rod (504); the equidistantly distributed piston rods (504) The piston rod (504) is connected to the guide tube (502) together, the upper side of the piston rod (504) is slidably connected to a sliding baffle (505), a spring is fixedly connected between the sliding baffle (505) and the corresponding piston rod (504), the sliding baffle (505) is provided with a through hole that is connected and matched with the through hole of the corresponding piston rod (504), one side of the sliding baffle (505) is provided with an inclined surface, the upper side of the piston rod (504) is slidably connected to an extrusion rod (506) through a mounting plate, and the extrusion rod (506) The elastic telescopic rod (501), the guide tube (502), the upper side of the piston rod (504) and the through hole of the piston rod (504) are all filled with hydraulic oil in order to be pressed and matched with the inclined surface corresponding to the sliding baffle (505). The mounting frame (11) is provided with a liquid storage component for temporarily storing the hydraulic oil in the equidistantly distributed fixed cylinders (503). The upper side of the mounting frame (11) is provided with a reset component for assisting the telescopic end of the elastic telescopic rod (501) to return to an initial position.

8. The silicon carbide chip continuous detection device according to claim 7, characterized in that: The relative length of the upper inclined surface of the sliding baffle (505) on the horizontal plane is equal to the diameter of the through hole thereon, and the diameter of the through hole of the sliding baffle (505) is equal to the diameter of the through hole of the piston rod (504), so as to ensure the maximum connection area between the through hole of the sliding baffle (505) and the through hole of the piston rod (504).

9. The silicon carbide chip continuous detection device according to claim 7, characterized in that: The liquid storage assembly comprises a liquid storage cylinder (601), the liquid storage cylinder (601) is fixedly connected to the mounting frame (11), a circular plate (602) is slidably connected inside the liquid storage cylinder (601), the liquid storage cylinder (601) is connected to a shunt pipe (603), the upper sides of the equidistantly distributed fixed cylinders (503) are commonly connected to the shunt pipe (603), and the shunt pipe (603) and the lower side of the circular plate (602) inside the liquid storage cylinder (601) are both filled with hydraulic oil.

10. The silicon carbide chip continuous detection device according to claim 9, characterized in that: The reset assembly comprises a fixing frame (701), the fixing frame (701) being fixedly connected to the upper side of the mounting frame (11), the upper side of the fixing cylinder (503) being connected to a pressing rod (702) in a limited sliding manner via a connecting block, the pressing rod (702) being pressed and matched with the corresponding pressing rod (506), and the pressing rod (702) being pressed and matched with the fixing frame (701).

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