Vehicles

Abstract

The present invention relates to the field of semiconductor technology, and specifically discloses a carrier. The carrier includes a base, a first adjustment block located in front of the base, a second adjustment block located in front of the first adjustment block, a first adjustment component connecting the base and the first adjustment block, a second adjustment component connecting the second adjustment block and the first adjustment block, a fixed block connected to the first adjustment block for fixing a sample, and a shield connected to the second adjustment block and located in front of the fixed block. The first adjustment component is used to adjust the position of the first adjustment block relative to the base in the lateral direction and the up-down direction, and the second adjustment component is used to adjust the position of the second adjustment block relative to the first adjustment block in the up-down direction. In the carrier provided by the present invention, the position of the fixed block relative to the base can be adjusted and changed, and the position of the shield relative to the fixed block can also be adjusted and changed. When the sample is fixed on the fixed block, the carrier can cooperate with the ion beam emitting device so that the ion beam emitted by the ion beam emitting device can accurately remove the failed part on the sample.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a carrier. Background Art

[0002] During the semiconductor manufacturing process, ion beams are used to remove failed samples for analysis. This requires maintaining the desired relative position between the sample and the ion beam emitter. Current technology typically secures the sample to the stage using adhesive, making it difficult to precisely adjust the sample's position and, therefore, preventing the ion beam from accurately removing the failed areas. Summary of the Invention

[0003] The object of the present invention is to provide a carrier that can accurately adjust the position of a sample.

[0004] To achieve the above-mentioned objectives, the present invention provides a carrier, comprising a base, a first adjusting block located on the front side of the base, a second adjusting block located on the front side of the first adjusting block, a first adjusting assembly connecting the base and the first adjusting block, a second adjusting assembly connecting the second adjusting block and the first adjusting block, a fixed block connected to the first adjusting block for fixing a sample, and a shield connected to the second adjusting block and located on the front side of the fixed block, the first adjusting assembly being used to adjust the position of the first adjusting block relative to the base in the lateral direction and the up and down direction, and the second adjusting assembly being used to adjust the position of the second adjusting block relative to the first adjusting block in the up and down direction.

[0005] As a further improvement of the present invention, the first adjustment component includes a first intermediate block arranged between the base and the first adjustment block, a first lateral adjustment structure connecting the base and the first intermediate block and used to adjust the position of the first intermediate block relative to the base in the lateral direction, and a first up-down adjustment structure connecting the first adjustment block and the first intermediate block and used to adjust the position of the first adjustment block relative to the first intermediate block in the up-down direction.

[0006] As a further improvement of the present invention, the second adjustment component is also used to adjust the position of the second adjustment block relative to the first adjustment block in the lateral direction, and includes a second intermediate block arranged between the first adjustment block and the second adjustment block, a second upper and lower adjustment structure connecting the first adjustment block and the second intermediate block and used to adjust the position of the second adjustment block relative to the second intermediate block in the up and down direction, and a second lateral adjustment structure connecting the second adjustment block and the second intermediate block and used to adjust the position of the second adjustment block relative to the second intermediate block in the lateral direction.

[0007] As a further improvement of the present invention, the first lateral adjustment structure includes a screw assembly connected to the base, and a first threaded hole opened on the first intermediate block and threadedly engaged with the screw assembly. The position of the screw assembly remains fixed relative to the base in the lateral direction, and its axis extends along the lateral direction.

[0008] As a further improvement of the present invention, the first up and down adjustment structure and the second up and down adjustment structure are respectively located on both sides of the first adjustment block in the transverse direction, a receiving groove is provided on the front side of the first adjustment block, and the second intermediate block includes a base portion at least partially arranged in the receiving groove, and a connecting portion extending from the base portion along the transverse direction to the second up and down adjustment structure to connect the second up and down adjustment structure.

[0009] As a further improvement of the present invention, a first receiving hole extending vertically is provided on the first adjustment block, and the first vertical adjustment structure includes:

[0010] a first connecting rod, connected to the first adjusting block and at least partially extending into the first receiving hole;

[0011] a first elastic member, wherein the first elastic member elastically expands and contracts in the up-down direction, and the upper and lower ends of the first elastic member respectively abut against the first adjusting block and the first connecting rod;

[0012] A first manual adjustment member is connected to the first adjustment block and at least partially extends into the first receiving hole to contact the first connecting rod, and the first manual adjustment member is used to drive the connecting rod to move relative to the first adjustment block in a direction that causes the first elastic member to contract.

[0013] As a further improvement of the present invention, the first adjustment block is further provided with a second receiving hole extending in the up-down direction, and the second up-down adjustment structure includes:

[0014] a connecting assembly connected to the second intermediate block and at least partially extending into the second receiving hole;

[0015] The second manual adjustment member is connected to the first adjustment block and at least partially extends into the second receiving hole to connect to the connecting assembly. The second manual adjustment member is used to drive the connecting assembly to move relative to the first adjustment block in the up and down directions.

[0016] As a further improvement of the present invention, it is characterized in that the second lateral adjustment structure includes an adjusting knob, a second threaded hole opened on the second intermediate block and extending in the front-to-back direction, and a slot opened on the second adjusting block and extending in the lateral direction. The adjusting knob includes a supporting portion located on the front side of the second adjusting block, and a screw portion threadedly connected to the second threaded hole and connected to the supporting portion through the slot.

[0017] As a further improvement of the present invention, it is characterized in that the carrier also includes an angle adjustment structure connecting the first adjustment block and the fixed block and used to adjust the deflection angle of the fixed block relative to the first adjustment block in the front-rear direction.

[0018] As a further improvement of the present invention, it is characterized in that the angle adjustment structure includes a rotating block rotatably connected to the first adjusting block in a front-rear direction, a lever connected to the outer periphery of the rotating block, a first threaded member and an elastic component respectively arranged on both sides of the radial direction of the lever, a threaded member threadedly connected to the first adjusting block for tightening the outer peripheral surface of the rotating block, the first threaded member is connected to the first adjusting block for abutting one side of the lever, the two ends of the elastic component respectively abut the first adjusting block and the other side of the lever, and the fixed block is connected to the rotating block.

[0019] Beneficial effects:

[0020] In the carrier provided by the present invention, the position of the fixed block relative to the base can be adjusted and changed, and the position of the shield relative to the fixed block can also be adjusted and changed. When the sample is fixed on the fixed block, the carrier can cooperate with the ion beam emission device so that the ion beam emitted by the ion beam emission device can accurately remove the failed parts on the sample. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic structural diagram of a carrier provided in one embodiment of the present invention;

[0022] Figure 2 for Figure 1 A front view of the vehicle in FIG;

[0023] Figure 3 for Figure 1 A top view of the vehicle in ;

[0024] Figure 4 for Figure 3 A cross-sectional view of the carrier in FIG. 1 after being cut along the CC direction;

[0025] Figure 5 for Figure 1 An exploded diagram of the vehicle in [ ].

[0026] Figure 6 for Figure 1 A schematic diagram of the structure of the vehicle after removing some structures;

[0027] Figure 7 for Figure 2 A cross-sectional view of the vehicle in FIG. 1 along the AA direction;

[0028] Figure 8 for Figure 2 A cross-sectional view of the vehicle in FIG. 1 after being cut along the BB direction;

[0029] Figure 9 for Figure 1 Another exploded diagram of the vehicle in ;

[0030] Figure 10 for Figure 5 Schematic diagram of the vehicle after being cut open along the DD direction.

[0031] In the picture:

[0032] 10. Vehicle;

[0033] 1. Base; 11. Groove;

[0034] 2. First adjustment block; 21. Receiving groove; 22. First receiving hole; 23. Second receiving hole;

[0035] 3. The second adjustment block;

[0036] 4. First adjustment assembly; 41. First intermediate block; 411. First block body; 412. Raised portion; 42. First lateral adjustment structure; 421. Screw assembly; 4211. Screw; 4212. Screw head; 4213. First threaded sleeve; 4214. Second threaded sleeve; 4215. Top screw; 422. First threaded hole; 423. Elastic supporting member; 43. First vertical adjustment structure; 431. First connecting rod; 432. First elastic member; 433. First manual adjustment member;

[0037] 5. Second adjustment assembly; 51. Second intermediate block; 511. Base portion; 512. Connecting portion; 52. Second vertical adjustment structure; 521. Connecting assembly; 5211. Second connecting rod; 5212. Connecting sleeve; 522. Second manual adjustment member; 53. Second lateral adjustment structure; 531. Adjustment knob; 5311. Abutment portion; 5312. Screw portion; 532. Second threaded hole; 533. Slot;

[0038] 6. Fixed block;

[0039] 7. Shield;

[0040] 8. Angle adjustment structure; 81. Rotating block; 82. Driving rod; 83. First threaded member; 84. Elastic assembly; 841. Abutting block; 842. Second elastic member; 85. Second threaded member;

[0041] 20. Sample; 201. Box body. DETAILED DESCRIPTION

[0042] The present invention will be described in detail below with reference to the embodiments shown in the accompanying drawings. However, the embodiments do not limit the present invention, and any modifications to the mechanisms, methods, or functions made by those skilled in the art based on the embodiments are all within the scope of protection of the present invention.

[0043] Terms used herein to denote relative spatial positions, such as "upper," "lower," "left," "right," "front," and "back," are used for ease of explanation to describe the relationship of one feature relative to another, as shown in the accompanying drawings. It should be understood that, depending on the placement of the product, these terms may be intended to encompass orientations other than those depicted in the drawings and should not be construed as limitations on the claims. Furthermore, the descriptor "horizontal" as used herein does not necessarily mean perpendicular to gravity, although a certain degree of tilt is permitted.

[0044] like Figure 1-3 As shown, one embodiment of the present invention provides a carrier 10 that can be used in semiconductor production and testing. For example, the carrier 10 can be used in conjunction with an ion beam emitter to remove defective portions of a semiconductor sample 20 (hereinafter referred to as sample 20). The carrier 10 can also be used in other applications.

[0045] The carrier 10 includes a base 1, a first adjustment block 2 located in front of the base 1, a second adjustment block 3 located in front of the first adjustment block 2, a first adjustment assembly 4 connecting the base 1 and the first adjustment block 2, a second adjustment assembly 5 connecting the second adjustment block 3 and the first adjustment block 2, a fixed block 6 connected to the first adjustment block 2, and a shield 7 connected to the second adjustment block 3. The fixed block 6 is used to fix the sample 20, and the shield 7 is located in front of the fixed block 6. The first adjustment assembly 4 is used to adjust the position of the first adjustment block 2 relative to the base 1 in the horizontal direction and the vertical direction, and the second adjustment assembly 5 is used to adjust the position of the second adjustment block 3 relative to the first adjustment block 2 in the vertical direction.

[0046] It should be noted that, in this article, the up and down directions refer to the direction in which the carrier 10 is located. Figure 2 The vertical direction in the state shown is the horizontal direction when the carrier 10 is in the Figure 2 The left and right directions in the state shown are the front and back directions of the vehicle 10. Figure 3 In the up and down directions in the shown state, the lower side is the front side and the upper side is the rear side.

[0047] The sample 20 can first be placed in a box body 201 made of acrylic or other materials, and then the box body 201 can be fixed to the fixed block 6 by gluing or other methods. In order to remove the failed parts on the sample 20, the carrier 10 needs to be used in conjunction with the ion beam emission device. The base 1 of the carrier 10 can be fixed on a microscope or other equipment. The ion beam emission device is located on the front side of the carrier 10 and is used to emit ion beams backward. By adjusting the first adjustment component 4, the position of the first adjustment block 2 relative to the base 1 can be adjusted in the lateral direction and the vertical direction. When the position of the first adjustment block 2 changes, the position of the sample 20 relative to the base 1 will also change. In this way, the sample 20 can be adjusted to a preset position, and the ion beam emitted from the ion beam emission device can act on the sample 20.

[0048] Adjusting the second adjustment assembly 5 adjusts the position of the second adjustment block 3 relative to the first adjustment block 2 in the vertical direction. This change in the position of the second adjustment block 3 also changes the position of the shield 7 relative to the fixed block 6 and the sample 20. Shield 7 shields the sample 20, meaning that the ion beam emitted by the ion beam emitter cannot penetrate shield 7. By changing the position of shield 7 relative to the sample 20, a portion of the sample 20 can be exposed to shield 7. The ion beam emitted by the ion beam emitter will only remove the area of ​​the sample 20 exposed to shield 7. The area of ​​the sample 20 exposed to shield 7 should be understood as the area of ​​the sample 20 not covered by shield 7 when viewed from the front to the back.

[0049] Continue to cooperate with reference Figure 4-10 As shown, the first adjustment assembly 4 includes a first intermediate block 41 disposed between the base 1 and the first adjustment block 2, a first transverse adjustment structure 42 connecting the base 1 and the first intermediate block 41, and a first vertical adjustment structure 43 connecting the first adjustment block 2 and the first intermediate block 41. The first intermediate block 41 is movably connected to the base 1 in the transverse direction, and the first transverse adjustment structure 42 is used to adjust the position of the first intermediate block 41 relative to the base 1 in the transverse direction. The second adjustment block 3 is movably connected to the first intermediate block 41 in the vertical direction, and the first vertical adjustment structure 43 is used to adjust the position of the first adjustment block 2 relative to the first intermediate block 41 in the vertical direction. As can be seen, by adjusting the first transverse adjustment structure 42 and the first vertical adjustment structure 43, the position of the first adjustment block 2 relative to the base 1 in the transverse and vertical directions can be changed. The fixed block 6 is connected to the first adjustment block 2, and the sample 20 is fixed to the fixed block 6. Therefore, by adjusting the first transverse adjustment structure 42 and the first vertical adjustment structure 43, the position of the sample 20 relative to the base 1 in the transverse and vertical directions can be changed.

[0050] To enable transverse movement of the first intermediate block 41 relative to the base 1, the two can be connected by a miniature cross-roller track. Similarly, to enable vertical movement of the first adjustment block 2 relative to the first intermediate block 41, the two can also be connected by a miniature cross-roller track. The carrier 10 of this embodiment is a compact device suitable for the use of a miniature cross-roller track, which takes up very little space.

[0051] The second adjustment assembly 5 is also used to adjust the position of the second adjustment block 3 relative to the first adjustment block 2 in the lateral direction. When the position of the second adjustment block 3 relative to the first adjustment block 2 is adjusted in the lateral direction, the position of the shield 7 will also change with the second adjustment block 3. In this way, the shield 7 can be used in multiple positions in the lateral direction.

[0052] The second adjustment assembly 5 includes a second intermediate block 51 disposed between the first adjustment block 2 and the second adjustment block 3, a second vertical adjustment structure 52 connecting the first adjustment block 2 and the second intermediate block 51, and a second lateral adjustment structure 53 connecting the second adjustment block 3 and the second intermediate block 51. The second intermediate block 51 is movably connected to the first adjustment block 2 in the vertical direction, and the second vertical adjustment structure 52 is used to adjust the position of the second intermediate block 51 relative to the first adjustment block 2 in the vertical direction. The second adjustment block 3 is movably connected to the second intermediate block 51 in the lateral direction, and the second lateral adjustment structure 53 is used to adjust the position of the second adjustment block 3 relative to the second intermediate block 51 in the lateral direction. Because the shield 7 is connected to the second adjustment block 3, the position of the shield 7 relative to the sample 20 in the vertical direction can be changed by adjusting the second vertical adjustment structure 52, and the position of the shield 7 relative to the sample 20 in the lateral direction can be changed by adjusting the second lateral adjustment structure 53.

[0053] In order to enable the second intermediate block 51 to move in the vertical direction relative to the first adjusting block 2, the two can be connected together by a miniature cross roller track. In order to enable the second adjusting block 3 to move in the horizontal direction relative to the second intermediate block 51, the two can be connected together by a miniature slide rail and slider.

[0054] The first lateral adjustment structure 42 includes a screw assembly 421 rotatably connected to the base 1 and a first threaded hole 422 opened on the first intermediate block 41. The screw assembly 421 is threadedly connected to the first threaded hole 422. The position of the screw assembly 421 remains fixed relative to the base 1 in the lateral direction, and its axis extends along the lateral direction.

[0055] When it is necessary to adjust the position of the first intermediate block 41 relative to the base 1 in the transverse direction, the screw assembly 421 can be driven to rotate. Since the screw assembly 421 remains fixed relative to the base 1 in the transverse direction, when the screw assembly 421 rotates, the screw assembly 421 will drive the first intermediate block 41 to move laterally relative to the base 1 through the first threaded hole 422 to adjust the position of the first intermediate block 41 in the transverse direction relative to the base 1. The first transverse adjustment structure 42 also includes an elastic abutment 423, which is elastically retractable in the transverse direction, and its two ends in the transverse direction respectively abut the base 1 and the first intermediate block 41. When the screw assembly 421 and the first threaded hole 422 are threadedly engaged, a gap exists between the two. By using the elastic abutment 423 to abut the base 1 and the first intermediate block 41, the first intermediate block 41 can be prevented from shaking relative to the base 1. The elastic abutment 423 can specifically be a helical compression spring.

[0056] Specifically, the first intermediate block 41 includes a first block body 411, a protrusion 412 protruding backward from the first block body 411, a groove 11 for accommodating the protrusion 412 is formed on the base 1, and a first threaded hole 422 is formed on the protrusion 412. The two ends of the elastic supporting member 423 respectively support the side walls of the protrusion 412 and the groove 11.

[0057] The screw assembly 421 includes a screw 4211, a screw head 4212 connected to one end of the screw 4211, a first threaded sleeve 4213 and a second threaded sleeve 4214 threadedly connected to the screw 4211. The screw assembly 421 passes through the base 1 in the transverse direction. The first threaded sleeve 4213 and the second threaded sleeve 4214 respectively abut against the base 1 on both sides in the transverse direction, so that the screw assembly 421 cannot move relative to the base 1 in the transverse direction. The screw 4211 is threadedly connected to the first threaded hole 422. By turning the screw head 4212, the screw 4211 can be rotated. The base 1 is formed with matching holes that match the first threaded sleeve 4213 and the second threaded sleeve 4214 respectively. When the screw 4211 rotates, the first threaded sleeve 4213 and the second threaded sleeve 4214 rotate simultaneously, and friction is generated between the hole walls of the matching holes.

[0058] The first threaded sleeve 4213 presses against the screw head 4212, and the second threaded sleeve 4214 is located at the tail end of the screw 4211 away from the screw head 4212. The screw assembly 421 also includes a top screw 4215 threadedly connected to the second threaded sleeve 4214 and pressing against one end of the screw 4211 away from the screw head 4212. The top screw 4215 can prevent relative rotation between the screw 4211 and the second threaded sleeve 4214.

[0059] In other embodiments, the screw assembly 421 may be connected to the first intermediate block 41 , and the first threaded hole 422 may be opened on the base 1 . Thus, by rotating the screw assembly 421 , the first intermediate block 41 may also move laterally relative to the base 1 .

[0060] In this embodiment, the first vertical adjustment structure 43 and the second vertical adjustment structure 52 are located on either side of the first adjustment block 2 in the transverse direction. A receiving slot 21 is provided on the front side of the first adjustment block 2. The second intermediate block 51 includes a base portion 511 at least partially disposed within the receiving slot 21, and a connecting portion 512 extending transversely from the base portion 511 to the second vertical adjustment structure 52 for connection thereto. The base portion 511 is smaller than the first adjustment block 2. With this arrangement, the carrier 10 becomes more compact and symmetrical.

[0061] Specifically, a first receiving hole 22 extending up and down is defined on the first adjusting block 2 , and the first up and down adjusting structure 43 includes a first connecting rod 431 , a first elastic member 432 and a first manual adjusting member 433 .

[0062] The first connecting rod 431 is connected to the first intermediate block 41 and at least partially extends into the first receiving hole 22. The first elastic member 432 is elastically extended and retracted in the up and down directions, and its upper and lower ends respectively abut against the first adjustment block 2 and the first connecting rod 431. The first manual adjustment member 433 is connected to the first adjustment block 2 and at least partially extends into the first receiving hole 22 to contact the first connecting rod 431. The first manual adjustment member 433 is used to drive the first connecting rod 431 to move relative to the first adjustment block 2 in the direction of contracting the first elastic member 432.

[0063] like Figure 7 As shown, the first manual adjustment member 433 is located below the first connecting rod 431. When the output end of the first manual adjustment member 433 moves upward, the first adjustment block 2 moves downward relative to the first intermediate block 41, and the first elastic member 432 contracts. If the output end of the first manual adjustment member 433 moves downward, the first elastic member 432 causes the first adjustment block 2 to move upward relative to the first intermediate block 41. Thus, by adjusting the first manual adjustment member 433, the position of the first adjustment block 2 relative to the first intermediate block 41 can be adjusted in the vertical direction.

[0064] The first adjusting block 2 is further provided with a second receiving hole 23 extending in the up-down direction. The second up-down adjusting structure 52 includes a connecting assembly 521 and a second manual adjusting member 522 .

[0065] The connecting assembly 521 is connected to the second intermediate block 51 and at least partially extends into the second receiving hole 23. The second manual adjustment member 522 is connected to the first adjusting block 2 and at least partially extends into the second receiving hole 23 to connect to the connecting assembly 521. The second manual adjustment member 522 is used to drive the connecting assembly 521 to move vertically relative to the first adjusting block 2. When the second manual adjustment member 522 drives the connecting assembly 521 to move vertically relative to the first adjusting block 2, the second intermediate block 51 can move vertically relative to the first adjusting block 2. Thus, by adjusting the second manual adjustment member 522, the position of the second intermediate block 51 relative to the first adjusting block 2 can be adjusted vertically. The connecting assembly 521 is specifically connected to the connecting portion 512 of the second intermediate block 51 and includes a second connecting rod 5211 connected to the connecting portion 512, and a connecting sleeve 5212 connecting the second connecting rod 5211 and the second manual adjustment member 522. Micrometer knobs are preferably used for the first and second manual adjustment members.

[0066] The second lateral adjustment structure 53 includes an adjusting knob 531, a second threaded hole 532 opened on the second intermediate block 51 and extending in the front-to-back direction, and a slot 533 opened on the second adjusting block 3 and extending in the lateral direction. The adjusting knob 531 includes a supporting portion 5311 located on the front side of the second adjusting block 3, and a screw portion 5312 threadedly connected to the second threaded hole 532 and connected to the supporting portion 5311 through the slot 533.

[0067] Under normal circumstances, the screw portion 5312 extends into the second threaded hole 532 to the maximum extent, so that the abutting portion 5311 abuts the front side of the second adjustment block 3. At this time, due to the friction between the abutting portion 5311 and the second adjustment block 3, the second adjustment block 3 cannot move laterally relative to the second intermediate block 51. When it is necessary to adjust the position of the second adjustment block 3 relative to the second intermediate block 51 in the laterally direction, the abutting portion 5311 is turned to move the entire adjustment knob 531 forward. The abutting portion 5311 no longer abuts the second adjustment block 3, and the second adjustment block 3 can now move laterally relative to the second intermediate block 51. When the second adjustment block 3 moves to the appropriate position, the abutting portion 5311 is turned to abut against the second adjustment block 3, thereby fixing the position of the second adjustment block 3.

[0068] The carrier 10 further includes an angle adjustment structure 8 connecting the first adjustment block 2 and the fixed block 6 and used to adjust the deflection angle of the fixed block 6 relative to the first adjustment block 2 in the front-back direction. By adjusting the angle adjustment structure 8, the sample 10 can be positioned at a preset angle relative to the base 1.

[0069] Specifically, the angle adjustment structure 8 includes a rotating block 81 rotatably connected to the first adjustment block 2 in the front-to-rear direction, a lever 82 connected to the outer periphery of the rotating block 81, a first threaded member 83 and an elastic component 84 respectively provided on either side of the lever 82 in the radial direction, and a second threaded member 85 threadedly connected to the first adjustment block 2 for tightening the rotating block 81. The first threaded member 83 is connected to the first adjustment block 2 to abut one side of the lever 82, and the two ends of the elastic component 84 respectively abut the first adjustment block 2 and the other side of the lever 82. The fixed block 6 is connected to the rotating block 81 and can rotate with the rotating block 81.

[0070] When the angle of the rotating block 81 needs to be adjusted, the second threaded member 85 is first loosened to disengage the second threaded member 85 from the rotating block 81. Then, the first threaded member 83 is screwed. With the cooperation of the first threaded member 83 and the elastic component 84, the lever 82 can be driven by the first threaded member 83 or the elastic component 84 to rotate, thereby driving the rotating block 81 to rotate. When the rotating block 81 is rotated to the appropriate angle, the second threaded member 85 is tightened to press against the rotating block 81, and the rotating block 81 cannot rotate. The elastic component 84 specifically includes a supporting block 841 for supporting the lever 82, and a second elastic member 842 provided between the supporting block 841 and the first adjustment block 2. The second elastic member 842 can specifically be a helical compression spring.

[0071] To sum up, in the carrier 10 provided by the present invention, the position of the fixed block 6 relative to the base 1 can be adjusted and changed, and the position of the shield 7 relative to the fixed block 6 can also be adjusted and changed. When the sample 20 is fixed on the fixed block 6, the carrier 10 can cooperate with the ion beam emission device so that the ion beam emitted by the ion beam emission device can accurately remove the failed parts on the sample 20.

[0072] It should be understood that although this specification is described according to embodiments, not every embodiment contains only one independent technical solution. This narrative style of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0073] The above embodiments are only used to illustrate the technical solutions of the present application and are not intended to limit the present application. Although the present application has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present application may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present application.

Claims

1. A vehicle, characterized in that: The apparatus comprises a base, a first adjustment block located in front of the base, a second adjustment block located in front of the first adjustment block, a first adjustment assembly connecting the base and the first adjustment block, a second adjustment assembly connecting the second adjustment block and the first adjustment block, a fixing block connected to the first adjustment block for fixing a sample, and a shield connected to the second adjustment block and located in front of the fixing block, wherein the first adjustment assembly is used to adjust the position of the first adjustment block relative to the base in the lateral direction and the vertical direction, and the second adjustment assembly is used to adjust the position of the second adjustment block relative to the first adjustment block in the vertical direction; The first adjustment assembly includes a first intermediate block provided between the base and the first adjustment block, a first lateral adjustment structure connecting the base and the first intermediate block and used to adjust the position of the first intermediate block relative to the base in a lateral direction, and a first vertical adjustment structure connecting the first adjustment block and the first intermediate block and used to adjust the position of the first adjustment block relative to the first intermediate block in a vertical direction; The second adjustment component is also used to adjust the position of the second adjustment block relative to the first adjustment block in the lateral direction, and includes a second intermediate block arranged between the first adjustment block and the second adjustment block, a second upper and lower adjustment structure connecting the first adjustment block and the second intermediate block and used to adjust the position of the second adjustment block relative to the second intermediate block in the up and down direction, and a second lateral adjustment structure connecting the second adjustment block and the second intermediate block and used to adjust the position of the second adjustment block relative to the second intermediate block in the lateral direction.

2. The carrier according to claim 1, characterized in that The first lateral adjustment structure includes a screw assembly connected to the base and a first threaded hole on the first intermediate block that is threadedly engaged with the screw assembly. The position of the screw assembly remains fixed relative to the base in the lateral direction, and its axis extends along the lateral direction.

3. The carrier according to claim 1, characterized in that The first up and down adjustment structure and the second up and down adjustment structure are respectively located on both sides of the first adjustment block in the transverse direction. A receiving groove is provided on the front side of the first adjustment block. The second intermediate block includes a base portion at least partially arranged in the receiving groove, and a connecting portion extending from the base portion along the transverse direction to the second up and down adjustment structure to connect the second up and down adjustment structure.

4. The carrier according to claim 3, characterized in that The first adjusting block is provided with a first receiving hole extending up and down, and the first up and down adjusting structure includes: a first connecting rod, connected to the first adjusting block and at least partially extending into the first receiving hole; a first elastic member, wherein the first elastic member elastically expands and contracts in the up-down direction, and the upper and lower ends of the first elastic member respectively abut against the first adjusting block and the first connecting rod; A first manual adjustment member is connected to the first adjustment block and at least partially extends into the first receiving hole to contact the first connecting rod, and the first manual adjustment member is used to drive the connecting rod to move relative to the first adjustment block in a direction that causes the first elastic member to contract.

5. The carrier according to claim 3 or 4, characterized in that: The first adjustment block is further provided with a second receiving hole extending in the up-down direction, and the second up-down adjustment structure includes: a connecting assembly connected to the second intermediate block and at least partially extending into the second receiving hole; The second manual adjustment member is connected to the first adjustment block and at least partially extends into the second receiving hole to connect to the connecting assembly. The second manual adjustment member is used to drive the connecting assembly to move relative to the first adjustment block in the up and down directions.

6. The carrier according to claim 1, characterized in that The second lateral adjustment structure includes an adjustment knob, a second threaded hole opened on the second intermediate block and extending in the front-to-back direction, and a slot opened on the second adjustment block and extending in the lateral direction. The adjustment knob includes a supporting portion located on the front side of the second adjustment block, and a screw portion threadedly connected to the second threaded hole and connected to the supporting portion through the slot.

7. The carrier according to claim 1, characterized in that The carrier further includes an angle adjustment structure connecting the first adjustment block and the fixed block and used for adjusting a deflection angle of the fixed block relative to the first adjustment block in a front-rear direction.

8. The carrier according to claim 7, characterized in that: The angle adjustment structure includes a rotating block rotatably connected to the first adjusting block in a front-rear direction, a lever connected to the outer circumference of the rotating block, a first threaded member and an elastic component respectively provided on both sides of the radial direction of the lever, a threaded member threadedly connected to the first adjusting block for tightening the outer circumferential surface of the rotating block, the first threaded member connected to the first adjusting block for abutting one side of the lever, the two ends of the elastic component respectively abut the first adjusting block and the other side of the lever, and the fixed block is connected to the rotating block.

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